CN1796105A - Method and apparatus for fabricating bonded substrate - Google Patents
Method and apparatus for fabricating bonded substrate Download PDFInfo
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- CN1796105A CN1796105A CN 200510130210 CN200510130210A CN1796105A CN 1796105 A CN1796105 A CN 1796105A CN 200510130210 CN200510130210 CN 200510130210 CN 200510130210 A CN200510130210 A CN 200510130210A CN 1796105 A CN1796105 A CN 1796105A
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Abstract
An apparatus for fabricating bonded substrates with fewer production defects. A press machine includes a vacuum process chamber formed by an upper container and a lower container, two holding plates for holding two substrates, and a pressing mechanism for moving upper holding plate downward. The upper container is connected to the pressing mechanism via upper bellows. The lower container is connected to a positioning stage via lower bellows. The upper and lower bellows prevent deformation of the vacuum process chamber from being transmitted to the two holding plates.
Description
The application's dividing an application that be the title submitted on June 10th, 2003 for the application for a patent for invention No.03141056.1 of " making the method and apparatus of adhesive base plate ".
Technical field
The present invention relates to make the method and apparatus of adhesive base plate (bonded substrate), and more specifically, relate to the method and apparatus of making panel (panel), for example LCD (LCD), it is by coming bonding two substrates to obtain with preset space length.
Background technology
Recently, demand can high yield, make big and thin flat display floater, for example device of LCD (LCD) panel at low cost.The LCD panel is by two glass substrates are arranged to toward each other with very narrow interval (several micron), and between two glass substrates filling liquid crystal and manufactured come out.For example, two glass substrates are, are formed with the array base palte of a plurality of TFT (Thin Film Transistor, thin film transistor (TFT)) with matrix form thereon and are formed with the color filter substrate of colour filter (red, green and blue) and light shielding film thereon.Light shielding film helps to improve contrast, and the light of shielding directive TFT is to prevent the generation of light leakage current.Array base palte is adhered on the color filter substrate by the sealer (adhesive) that comprises thermosetting resin.
A kind of conventional method of the LCD of manufacturing panel comprises the sealing liquid crystal step of liquid crystal between two glass substrates of a sealing.Traditional sealing liquid crystal step is to realize by following vacuum impregnating shooting method.At first, the array base palte that is formed with TFT is adhered on the color filter substrate (substrate relatively) by sealer (seal).Sealer is solidified.In sealer, form an inlet.Bonded substrate and liquid crystal are put in the vacuum tank.When inlet was immersed in the liquid crystal, the pressure in jar was set up back atmospheric pressure.This makes liquid crystal be inhaled into from inlet.At last, the inlet of sealing sealer.
Recently, then pay close attention to following dropping liquid (dropping) method rather than described vacuum impregnating shooting method more.At first, form the sealer framework by this way, promptly surround the periphery of array base palte.The liquid crystal of doses is dripped on the surface of the array base palte in the sealer framework.At last, array base palte is adhered on the color filter substrate in a vacuum.The dropping liquid method can reduce the use amount of liquid crystal significantly and can shorten the needed time of sealing liquid crystal step, thereby causes the reduction of panel manufacturing cost.Therefore can expect that large-scale production will improve.
But, following problem is arranged according to the adhesive base plate manufacturing installation of dropping liquid method operation.
1, incorrect bonding (Improper Bonding)
The LCD panel is by obtaining with bonding two substrates of preset space length (unit interval).For unit interval is set to a predetermined value, for example 5 microns, two substrates should be accurately controlled to parallel to each other.
In being in the vacuum processing chamber of vacuum, with two base plate bondings together, the pressure setting in the vacuum processing chamber is returned atmospheric pressure and solidified sealer, in this process, have the situation of bonded base plate deformation.This is because the power of compacting substrate is inoperative in the sealer outside that atmospheric pressure works on base plate bonding direction together, and base plate bonding power is together worked in the sealed sealer inside of liquid crystal.When base plate deformation, it is unequal that unit interval becomes, and causes incorrect bonding.
As a kind of solution, that publication number provides in the sealer outside for the Japanese publication of flat 11-326922 discloses, in order to surround the outer seal of original that sealer at this shortcoming.Space between inner seal and the outer seal is kept in a vacuum, even make that unit interval is also very stable after sealer all is solidified.
Making the uneven factor of unit interval is the change of substrate deformation and substrate and sealer thickness.Because the change of substrate and sealer thickness, be not to be controlled as when parallel to each other and under the bonded situation, outer seal can not keep the high-air-tightness of substrate gap at substrate.This also causes incorrect bonding.
When 2, bonding to the influence of substrate
Two substrates are when two holding plates (holding plate) that had vacuum cup (chuck) mechanism or electrostatic chuck mechanism respectively keep, and are bonded in vacuum processing chamber.In vacuum cup, the chuck surface that the bottom surface of substrate is coupled to the holding plate on the vavuum pump holds.In electrostatic chuck, apply voltage being formed at the electrode on each holding plate and being formed between the conductive film on the related substrate, according to Coulomb's law generation power between glass substrate and electrode, this makes that substrate is inhaled on holding plate.Because inoperative when the vacuum of vacuum cup in vacuum processing chamber uprises, so under high vacuum state, substrate is by electrostatic chuck rather than vacuum cup kept.
It is bonded like this below substrate resembles.Two substrates are kept by two holding plates, and toward each other.On a substrate, provide sealer.Pressure in the vacuum processing chamber is lowered.Two holding plates are reached predetermined value by placement close to each other up to unit interval, thereby make two substrates all firmly contact sealer.
If it is parallel to each other that substrate is not retained as, substrate may be destroyed.Specifically, because on a substrate, provide in order to the pad (spacer) (sphere, column etc.) of adjustment unit spacing to predetermined value, so, if two substrates are bonded each other not parallelly, apply high pressure partly will for so substrate, thereby damage substrate.
3, the decline of the distortion of vacuum processing chamber and substrate position accuracy
When the pressure in the vacuum processing chamber was lowered, the difference between the internal pressure of vacuum processing chamber and the external pressure (atmospheric pressure) was out of shape vacuum processing chamber slightly.When therefore, the pressure of the relative position of two holding plates in vacuum processing chamber is lowered and the pressure in vacuum processing chamber slightly different when not being lowered.The position deviation of holding plate has reduced the accuracy of base plate bonding position.If the thickness that strengthens the application of vacuum chamber outer wall is to suppress the distortion of vacuum processing chamber, vacuum processing chamber will become bigger so, and this is not desired.
Summary of the invention
In one aspect of the invention, a kind of method from first and second substrates manufacturing adhesive base plate comprises the steps: to form the sealer framework at first substrate surface, first and second substrates are placed in the process chamber, reduce the pressure of process chamber, move at least one in first and second substrates by this way, promptly, make that first and second substrates are close to each other, calculating acts on the pressure load on first and second substrates, when the pressure load that is calculated reaches the targeted loads that the load when contacting described first and second substrates when whole sealer framework equates, stop at least one move in first and second substrates, and atmospheric pressure is returned in the pressure setting in the process chamber.
From the following description of in conjunction with the accompanying drawings, carrying out in the mode that illustrates the principle of the invention, it is very clear that other aspects of the present invention and advantage will become.
Description of drawings
Elaborated the feature that is considered to have novelty of the present invention in the appended claims.By the following description of reference currently preferred embodiment, together with accompanying drawing, can understand best the present invention with and purpose and advantage.In described accompanying drawing:
Fig. 1 is the block diagram according to the base plate bonding device of first embodiment of the invention;
Fig. 2 is the diagrammatic elevation view of forcing press;
Fig. 3 is the block diagram of pressure control unit;
Fig. 4 shows the example of the connection between pressure control unit and the load cell (load cell);
Fig. 5 and 6 shows the example of the layout (layout) of load cell;
Fig. 7 is the figure that explains the CCD position of camera;
Fig. 8 is the plane that has applied the substrate of sealer and liquid crystal thereon;
Fig. 9 A and 9B are the cross-sectional views of substrate in the adhesion process;
Figure 10 A and 10B are respectively plane and the cross-sectional views that has applied a substrate of outer seal thereon;
Figure 11 A and 11B are respectively plane and the cross-sectional views that another example of a substrate that has applied outer seal thereon is shown;
Figure 12 is the enlarged drawing that is coated on the outer seal of one jiao of substrate;
Figure 13 shows the spacing between the substrate and the curve map of pressure load;
Figure 14 and 15 is flow charts of base plate bonding method; And
Figure 16 shows the diagrammatic elevation view according to the forcing press of second embodiment of the invention;
Figure 17 A and 17B show the upward view and the side view of pressure plare of the forcing press of Figure 16 respectively;
Figure 18 A, 18B and 18C are pressure plare and the cross-sectional view of carrying out the platform of base plate bonding; And
Figure 19 shows the change of forcing press.
The specific embodiment
Adhesive base plate manufacturing installation 11 according to first embodiment of the invention will be described below.
Adhesive base plate manufacturing installation 11 is by being placed on liquid crystal between the first substrate W1 and the second substrate W2, and adhesive base plate W1 and W2 make LCD then.For example, LCD is a kind of panel of LCD of active matrix type.The first substrate W1 is the array base palte (TFT substrate) with glass of tft array.The second substrate W2 is colour filter (CF) substrate with colour filter and light shielding film.Substrate W1 and W2 are made and are provided to adhesive base plate manufacturing installation 11 respectively.
As shown in Figure 1, adhesive base plate manufacturing installation 11 comprises that main control unit 12, sealer pattern form system 13, liquid crystal dropping liquid equipment 14, binding appts 15 and inspection machine 16.Binding appts 15 comprises forcing press 17 and solidification equipment 18.Main control unit 12 control sealer patterns form system 13, liquid crystal dropping liquid equipment 14, binding appts 15 (forcing press 17 and solidification equipment 18) and inspection machine 16.
Adhesive base plate manufacturing installation 11 comprises that first transmits accessory 19a, the second transmission accessory 19b, the 3rd transmission accessory 19c and the 4th transmission accessory 19d, and these accessories transmit the first substrate W1 and the second substrate W2.Main control unit 12 control transmit accessory 19a to 19d to transmit the first substrate W1 and second substrate W2 and the adhesive base plate.
The sealer pattern forms system 13 and apply sealer along the periphery on the upper surface of substrate W1 and W2 (the first substrate W1 (array base palte) in first embodiment) on the precalculated position, thereby forms the sealer framework.Sealer preferably comprises adhesive, for example light binding.First transmits accessory 19a is sent to liquid crystal dropping liquid equipment 14 as one group of device (set) from sealer pattern formation system 13 with substrate W1 and W2.
Liquid crystal drips in a plurality of precalculated positions in the sealer framework of liquid crystal dropping liquid equipment 14 on the first substrate W1 upper surface.Behind dropping liquid, substrate W1 and W2 are transmitted accessory 19b by second and are sent to forcing press 17.
When light detected alignment mark, forcing press 17 align the by this way first substrate W1 and the second substrate W2 promptly, made sealer and liquid crystal on the substrate W1 that wins not contact the bottom surface of the second substrate W2.Forcing press 17 is with predetermined load compacting substrate W1 and W2.After the compacting, forcing press 17 discharges vacuum processing chamber 32 so that the pressure in the vacuum processing chamber 32 is set to atmospheric pressure.The pressure in space and atmospheric difference are compressed to the scheduled unit spacing with substrate W1 and W2 between substrate W1 and W2.
Monitoring when substrate W1 and W2 are sent to vacuum processing chamber 32 those elapsed times, main control unit 12 is controlled by this way from transmitting point and is played the elapsed time that bounding point ends, that is, make substrate W1 and W2 be exposed to and surpass one section preset time in the gas that is provided to vacuum processing chamber 32.This makes that the adhesive surface of substrate W1 and W2 is more firm, and makes adhesive surface have predetermined performance.
The 3rd transmits accessory 19c lifts down adhesive base plate W1 and W2 (liquid crystal panel) from forcing press 17, and sends it to solidification equipment 18.When being pressed that elapsed time from liquid crystal board and reaching preset time, main control unit 12 drives the 3rd and transmits accessory 19c liquid crystal board is offered solidification equipment 18.
Be sealed in liquid crystal in the LCD panel because the load and the atmospheric pressure of exerting pressure, drawout between substrate W1 and W2.
Be necessary before liquid crystal arrives the sealer framework, just to solidify sealer.Therefore, solidification equipment 18 has the light of predetermined wavelength to LCD panel irradiation, with back one period scheduled time of compacting with the after coagulation sealer.This scheduled time is from the time of sprawling of liquid crystal and release substrate W1 and W2 residue needed time of compression, obtains in advance by experiment.
Compression remains on adhesive base plate W1 and the W2.Because sealer was not solidified when substrate W1 and W2 were sent to solidification equipment 18, so compression is released from substrate W1 and W2.When sealer is solidified, on substrate W1 and W2, almost there is not the stress residue.This has reduced the generation of adhesive base plate W1 and W2 position deviation after sealer is solidified.
After sealer was solidified, the 4th transmits accessory 19d was sent to inspection machine 16 with adhesive base plate W1 and W2 (LCD panel) from solidification equipment 18.Inspection machine 16 is checked the position deviation of the first substrate W1 and the second substrate W2, and assay is offered main control unit 12.Based on assay, the next location that is pressed substrate of main control unit 12 calibrations.That is,, prevented the position deviation of this LCD panel by the substrate W1 and the W2 of sealer admittedly in the LCD panel that will make after on the rightabout of position deviation direction, moving this in advance with departure.
The forcing press 17 of compacting substrate W1 and W2 will be discussed below.
As shown in Figure 2, forcing press 17 comprises stiff baseplate 21 and the rigidity door frame (gate) 22 that is fixed on the base plate 21.Base plate 21 and door frame 22 are made by the material with high degree of rigidity.Be installed on two supports (support) of door frame 22 is guide rail 23a and the 23b that guiding linear guide member (linearguide) 24a and 24b move.First and second gripper shoes 25 and 26 are placed between linear guide part 24a and the 24b.First gripper shoe 25 is suspended in midair from support arm 28, and the pressure motor 27 that support arm 28 is installed in door frame 22 top parts moves up and down.
Ball-screw 29 is coupled on the output shaft of pressure motor 27 by this way, that is, make them to rotate together.The nut 30 that is assemblied on the support arm 28 is screwed onto on the ball-screw 29.Support arm 28 moves up and down according to the direction of rotation (forward or reverse) of pressure motor 27 output shafts.
Support arm 28 by top board 28a, be parallel to the base plate 28b of top board 28a and coupling plate 28c that top board 28a is coupled on the base plate 28b forms.A plurality of load cells 31 are installed in that base plate 28b goes up and near the bottom surface of first gripper shoe 25.
The upper bellows 35 that each suspension rod 34 all is used as flexible member covers.Upper bellows 35 all has flange portion at two ends.Flange portion is coupled on second gripper shoe 26 and the upper container 32a by the O ring as potted component.Upper bellows 35 is connected on the vacuum processing chamber 32 airtightly.Upper container 32a suspends in midair from second gripper shoe 26 by upper bellows 35.
Positioning table 36 is connected on the bottom container 32b by a plurality of (four) lower bellows 38.Lower bellows 38 parcel supporting leg 37 separately, and be connected airtightly with vacuum processing chamber 32.Each lower bellows 38 all has flange portion at two ends.Flange portion is coupled on positioning table 36 and the bottom container 32b by the O ring as potted component.Be fixed to a plurality of support columns 39 on the base plate 21 and be installed in the bottom of bottom container 32b.Therefore, bottom container 32b is supported on the positioning table 36 by lower bellows 38, and is supported on the base plate 21 by support column 39.
Between the upper end of each suspension rod 34 and second gripper shoe 26, provide level governor 40.For example, level governor 40 comprises the screw and nut that is formed on the relevant suspension rod 34, and moves up and down suspension rod 34 when being rotated.Level governor 40 is flatly regulated pressure plare 33a.Preferably pressure plare 33a is adjusted to 50 microns or littler with respect to the deviation parallel to each other of platform 33b.
When pressure motor 27 was driven, support arm 28, first gripper shoe 25 moved up and down along guide rail 23a and 23b with linear guide part 24a and 24b, and second gripper shoe 26, upper bellows 35 move up and down with upper container 32a.Therefore, pressure motor 27 move upper container 32a make its near or away from bottom container 32b.When upper container 32a touched bottom container 32b, vacuum processing chamber 32 was closed.When pressure motor 27 was further driven, pressure plare 33a moved down alone by second gripper shoe 26 and suspension rod 34.Upper bellows 35 is compressed, and makes substrate W2 and W1 by pressure plare 33a and platform 33b compression.Substrate W2 and W1 are bonded like this.
Each load cell 31 is measured the load that is applied from first gripper shoe 25 in compression substrate W2 and W1, and measured value is conveyed to pressure control unit 41.Pressure control unit 41 is calculated the four measuring value mutually acts on four total loads on the load cell 31.When substrate W2 and W1 do not have compressed the time, total load is to be supported on the weight " A " of the various elements (first gripper shoe 25, linear guide part 24a and 24b, second gripper shoe 26, suspension rod 34, level governor 40, pressure plare 33a and substrate W2) on the support arm 28 and to act on by suspension rod 34 that pressure plare 33a goes up and based on the summation (A+B) of the load " B " of pressure in the vacuum processing chamber 32 and atmospheric difference.The thickness of load B and suspension rod 34 (cross-sectional area) is proportional.
When vacuum processing chamber 32 during by step-down (bleeding), about 1kg/m
2Load B be applied on the pressure plare 33a by suspension rod 34.Load B is applied on four load cells 31 by second gripper shoe 26, linear guide part 24a and 24b and first gripper shoe 25.Therefore, four load cells 31 summation of sense weight A and load B together.
When substrate W1 and W2 were bonded, total load (A+B) was reduced by the reaction force of substrate W1 and W2.Therefore, being applied to actual pressure load on substrate W1 and the W2 is to calculate from the variation from the measured value of four load cells 31.
The resolution capability of each load cell 31 (resolution) is about 0.05%.Therefore, according to present embodiment, under the total load of 2000kg acted on situation on each load cell 31, the resolution capability that detects total load was about 1kg.
Linear guide part 24a and 24b are provided with linear scale 43a and 43b respectively, are used for the position of detected pressures plate 33a.Linear scale 43a and 43b come relative position (distance) between detection platform 33b and the pressure plare 33a based on the position of detected linear guide part 24a and 24b, and result's (position data) is outputed to display unit 44.
Display unit 44 is connected on the reference levels sensor 45 that is arranged on the pressure plare 33a.Display unit 44 is stored the target location of pressure plare 33a in advance.The target location is to separate certain distance with platform 33b as pressure plare 33a, the position of pressure plare 33a when this distance equals the summation of the gross thickness of two substrate W1 and W2 and object element spacing.Display unit 44 calculates the relative position of pressure plare 33a about the target location from the target location and from the result of calculation of linear scale 43a and 43b.
Another controlling organization of forcing press 17 is described in detail in detail with reference to Fig. 3 below.Similar or identical Reference numeral is used to indicate those and combines those structure divisions that Fig. 2 makes an explanation in the above, and their detailed description will partly be omitted.
Forcing press 17 comprises CCD camera 50, and its detection is formed on the alignment marker image on two substrate W1 and the W2.When substrate W1 and W2 were bonded, CCD camera 50 detected the alignment mark on substrate W1 and the W2, and the view data of alignment mark is outputed to graphics processing unit 47.Pressure control unit 41 produces the platform driving signal that is used for driving according to the result of calculation (calculated data of position deviation amount) from graphics processing unit 47 positioning motor 48, and this platform driving signal is sent to motor driver 49.Motor driver 49 sends to positioning motor 48 with pulse signal predetermined quantity, that produce according to platform driving signal.When positioning motor 48 was driven, positioning table 36 and platform 33b were moved.Such two substrate W1 and W2 are aligned.
From the measured value of each load cell 31, not to be provided directly to pressure control unit 41, but can be provided for arithmetic operation unit 51 (Fig. 3) from the measured value addition of independent load cell 31.In addition, as shown in Figure 4, adder 51a can be connected between four load cells 31 (load cell a is to d) and the pressure control unit 41.Adder 51a will convey to pressure control unit 41 from the total load of the measured value of pressure measurement element 31.Based on total load, pressure control unit 41 determines whether to want driving pressure motor 27, and produces motor drive signal when needed.In this case, pressure control unit 41 need be based on the calculating from the measured value of load cell 31, and therefore can avoid response delay, makes pressure motor 27 high-speed responses and accurately driven.
Next the layout of load cell 31 will be discussed.
Fig. 5 shows the position of the load cell 31 (density bullet) that projects on the pressure plare 33a and the position of suspension rod 34 (white marking).Four suspension rods 34 are provided with the distance that equates from pressure plare 33a center C, and are positioned on the diagonal that connects suspension rod 34.Therefore, load cell 31 is about the XZ plane symmetry by pressure plare 33a center C, also about the YZ plane symmetry by pressure plare 33a center C.The projected position of load cell 31 be preferably in suspension rod 34 projected positions near.
Weight A is assigned on four load cells 31 fifty-fifty.Even, act on four load B on the suspension rod 34 and also can in four load cells 31, be distributed fifty-fifty when vacuum processing chamber 32 time by step-down.In adhesion process, pressure plare 33a is highly precisely kept level.At pressure plare 33a because foreign object enter or adhesion process in the mechanical deflection that takes place and under the situation about tilting, can be from the summation of the measured value of load cell 31 or load, highly precisely check out the inclination angle.
As shown in Figure 6, load cell 31 can be by about the center C of pressure plare 33a layout with one heart and symmetrically.
Under the situation of using odd number load cell 31, preferably a load cell 31 is arranged in the center C (Fig. 5 and 6) of pressure plare 33a.
The pressure controller that uses image taking (pickup) device will be discussed below.
As shown in Figure 7, forcing press 17 has the equipment of monitor pressures load, and promptly the CCD camera 50.In this embodiment, CCD camera 50 is shared in order to detection be used for aliging CCD camera 50 (see figure 3)s of alignment mark of the substrate W1 of substrate W1 and W2 and W2.
By monitoring the smooth degree of sealer 55, the time by solidifying sealer 55 behind adhesive base plate W1 and W2, can be set to reasonable time to sealer 55 irradiation ultraviolet radiations.In blink after bonding, liquid crystal 54 is not diffusion fully between substrate W1 and W2 also, and the unit interval between substrate W1 and the W2 does not also reach predetermined value (target distance).The time that ultraviolet ray is irradiated on the sealer 55 is determined according to the diffusion velocity of liquid crystal 54.If ultraviolet irradiation early, sealer 55 just had been solidified before the spacing between two substrate W1 and the W2 reaches the scheduled unit spacing so.On the other hand, if ultraviolet irradiation evening, liquid crystal 54 touches not solidified sealer 55, and this causes the display defect of panel periphery part.From being determined ultraviolet best irradiation time, make sealer 55 to be solidified at reasonable time by the smooth degree of the sealer 55 of CCD camera 50 supervision.
After substrate W1 and W2 were bonded, pressure plare 33a discharged the electrostatic attraction to substrate W2, and leaves substrate W2.At this moment, CCD camera 50 can monitor the shape of sealer 55.In this case, the substrate W1 that produces because remaining in the electrostatic attraction on pressure plare 33a and the substrate W2 and the position deviation of W2 have been prevented.
In the time of will being given in adhesive base plate W1 and W2 now to pressure controlled description.
As shown in Figure 8, sealer 55 is applied in (being substrate W1 in this embodiment) of substrate W1 and W2 with the form of framework.The for example liquid crystal 54 of everywhere 5mg amount drips in a plurality of positions in sealer 55 frameworks.Then, shown in Fig. 9 A and 9B, substrate W1 and W2 are pressed into has the scheduled unit spacing, and this scheduled unit spacing is formed on the restriction of the pad 56 on the substrate W1.
As shown in Fig. 9 A, liquid crystal 54 is dripped by this way, that is, make liquid crystal 54 higher than the height of sealer 55.Therefore, realize the alignment of substrate W1 and W2 in the adhesion process by this way, that is, make substrate W2 only contact liquid crystal 54 and do not contact sealer 55.Specifically, pressure load when substrate W2 only contacts liquid crystal 54 is rule of thumb obtained in advance, and when the pressure load that calculates when the measured value from load cell 31 reached the pressure load that rule of thumb obtains, moving down of pressure plare 33a was stopped.At this moment, preferably CCD camera 50 monitors contacting of substrate W2 and sealer 55.Substrate W2 only contacts under the situation of liquid crystal 54, and by the 50 detected whiles of CCD camera, the alignment of substrate W1 and W2 is implemented at the alignment mark of substrate W1 and W2.Afterwards, substrate W1 and W2 are pressed up to the almost whole surface of sealer 55 and are compressed, and discharge vacuum processing chamber 32 then.As a result, substrate W1 and W2 are compressed to the scheduled unit spacing by pad 56 restrictions.
If substrate W1 and W2 be substrate W1 and W2 be aligned when sealer 55 contacts as shown in Fig. 9 B, shear stress acts on the sealer 55 so.When vacuum processing chamber 32 was released, the shear stress that acts on the sealer 55 was released, thereby caused the position deviation of substrate W1 and W2.In this embodiment, during that plays that sealer 55 is solidified that ends from base plate bonding in, W1 can not cause substrate W2 to contact sealer 55 with W2 by the alignment substrate, and has prevented the position deviation of substrate W1 and W2.
Because detected the load when substrate W2 only contacts liquid crystal 54, so may detect the position of pressure plare 33a when substrate W2 does not contact spacing between sealer 55 and substrate W1 and the W2 and is minimized.Alignment under this state can allow substrate W1 and W2 accurately to be bonded together, and can prevent the position deviation of bonding metacoxal plate W1 and W2.
As shown in Figure 10 A, the framework that surrounds the outer seal 61 of sealer 55 can be formed on the substrate W1.When substrate W1 had two unit (number of the panel that will form is two), two inner seals 55 that qualification will be encapsulated in two liquid crystal 54 zones in the unit formed on substrate W1.Outer seal 61 also is applied on the substrate W1 by this way with the shape of annular,, surrounds two inner seals 55 that is.The coating position of outer seal 61 has been arranged on unessential part of inner seal 55 outsides.The height of best outer seal 61 and width are all bigger than the inner seal shown in Figure 10 B 61.
Realize the alignment of substrate W1 and W2 when being preferably in substrate W2 and only contacting outer seal 61.This prevents that substrate W1 and W2 are distributed by substrate W1 and W2 thickness in adhesion process and the influence of substrate W2 bending and destroyed.That is to say, if the position deviation of substrate W1 and W2 has taken place or has lost parallel when bonding, in this case, when the substrate spacing bigger (when pressure more hour) time, can detect so unusual by using outer seal 61 to detect loads.Therefore firmly adhesive base plate W1 and W2.Because outer seal 61 has the effect that forms white space between inner seal 55 and outer seal 61, even so when adhesive base plate after coagulation sealer 55, also may suppress the position deviation of substrate W1 and W2, thereby guarantee stable unit interval.
If inner seal 55 is established higherly, increase of the size of product or sealer 55 can not be smooth to the scheduled unit spacing by atmospheric pressure so.Even after liquid crystal 54 is disperseed, sealer 55 may not be compressed to the scheduled unit spacing owing to the pressure of liquid crystal 54 yet.Therefore, preferably use outer seal 61, and need not to make inner seal 55 higher.
Have this situation, promptly inner seal 55 has arrived the light tight film (outer part of black substrate grades) that is formed on the substrate W2.In this case, the smooth degree of outer seal 61 can be monitored by CCD camera 50.Because outer seal 61 is bigger than inner seal 55, so the load when bonding is accurately detected.
Having under closing on the substrate W1 of a plurality of unit have distance to a certain degree between the unit the situation, can apply a plurality of outer seals 62 and 63 that are provided in conjunction with a plurality of unit respectively in inner seal 55 outsides, as shown in Figure 11 A and 11B.
As shown in Figure 12, four jiaos at inner seal 55 outsides, substrate W1 can apply four outer seals 71.
To provide description below to spacing and pressure load between substrate W1 and the W2.
The pressure load that acts on substrate W1 and the W2 should be set as the optimum value of having considered spacing between substrate W1 and the W2.This be because, if pressure load too high (amount that pressure plare 33a moves down is very big), substrate W1 and W2 may be destroyed so, otherwise, if pressure load low excessively (amount that pressure plare 33a moves down is very little) is released metacoxal plate W1 and W2 is not compressed to the scheduled unit spacing at vacuum processing chamber 32 so.Therefore, before carrying out base plate bonding, should obtain to act on the correlation between the spacing between pressure load on substrate W1 and the W2 and substrate by experiment in advance.Figure 13 shows the curve map of experimental result.Trunnion axis is represented the substrate spacing, the load of vertical axis representative pressure.Pressure load before liquid crystal 54 begins being flattened is 0kg.Along with liquid crystal 54 and inner seal 55 are compressed, pressure load raises.When the substrate spacing is approximate when reaching target size (5 microns), substrate W2 contact pins 56, pressure load raises suddenly.If substrate W1 and W2 are further compressed, substrate W1 and W2 and pressure plare 33a are with destroyed.Do not produce bubble and breaking-up for adhesive base plate W1 and W2, substrate W1 and W2 are preferably in the pressure load scope that (almost linearly) raises gradually bonded.
Preferably rule of thumb obtain to contact with substrate W2 and the whole surface of sealer 55 pressure load when nearly all being compressed when sealer 55.In this embodiment, when the substrate spacing was about 15 microns, pressure load became 100kg.When load cell 31 detects pressure load, mobile being stopped that pressure plare 33a is downward, thus stop to suppress substrate W1 and W2.
Preferably consider the position deviation of substrate W1 and W2 and gradient and progressively improve pressure load.For example, when being lower than the goal pressure load of 100kg by load cell 31 detected pressure loads (for example, when pressure load reaches 20kg or 50kg), the downward mobile quilt of pressure plare 33a temporarily stops with detected pressures load once more.
The pressure load of 20kg is the load when the substrate spacing is about 50 to 30 microns that are a bit larger tham sealer 55 elemental heights, and this moment, substrate W2 only contacted liquid crystal 54.The pressure load of 50kg is at that moment load before substrate W2 contact sealer 55, i.e. load when the substrate spacing is about 30 to 15 microns.(20kg 50kg) obtains the substrate spacing from pressure load based on the curve map among Figure 13.
When pressure load reaches 20kg or 50kg, when pressure load raises fast or become big (promptly the maximum difference between measured value reaches under about 10% the situation) from the difference between the measured value of a plurality of load cells 31, stop compacting in this case to substrate W1 and W2.On the other hand, do not have in pressing process under the unusual situation about taking place, pressure plare 33a is lowered up to pressure load and reaches desired value (100kg).After the compacting that has stopped substrate W1 and W2, vacuum processing chamber 32 is released.Substrate W1 and W2 are pressed into the object element spacing by atmospheric pressure.
All have under the situation that 650mm * 830mm size and inner seal 55 form at the inboard 10mm in related substrate edge place at two substrate W1 and W2, the load that is about 5100kg that substrate W1 and W2 are caused by atmospheric pressure is suppressed.By contrast, the pressure load before vacuum processing chamber 32 is released is about 100kg.Therefore, even under the pressure that reduces, load is applied on substrate W1 and the W2 partly when suppressing, substrate W1 and W2 can not be subjected to very big influence yet.
Below the method for adhesive base plate W1 and W2 will be discussed by reference Figure 14 and 15.
In step S81, substrate W1 and W2 are maintained at respectively on pressure plare 33a and the platform 33b.Pressure control unit 41 driving pressure motors 27 cut out vacuum processing chamber 32 and give vacuum processing chamber 32 step-downs to reduce upper container 32a.
In step S82, pressure control unit 41 moves down pressure plare 33a so that substrate W1 and W2 are further approaching each other.
In step S83, pressure control unit 41 is based on the measured value calculating pressure load from load cell 31.When the pressure load that is calculated reached 20kg, pressure control unit 41 stopped to reduce pressure plare 33a.Pressure control unit 41 is based on the smooth degree that monitors sealer 55 from the camera data of CCD camera 50.
In step S84, pressure control unit 41 is once more based on the measured value calculating pressure load from load cell 31, and checks that difference between pressure load and the 20kg is whether in preset range.When difference during greater than preset range (NO among the step S84), pressure control unit 41 stops to reduce pressure plare 33a and stops to suppress substrate W1 and W2 (step S85).In this case, because the change of substrate W1 and W2 or sealer 55 thickness, perhaps because the problem that takes place in the forcing press 17, it is parallel that substrate W1 and W2 might lose, so unusual position is checked.
When the result among the step S84 was YES, pressure control unit 41 drove positioning table 36 with alignment substrate W1 and W2 (step S86) when taking substrate W1 and W2 alignment marker image by CCD camera 50.
In step S87, pressure control unit 41 moves down pressure plare 33a.When the pressure load that calculates reached 50kg, pressure control unit 41 stopped to reduce pressure plare 33a (step S88).Pressure control unit 41 is from monitoring the smooth degree of sealer 55 from the camera data of CCD camera 50.
On the other hand, when the result among the step S89 is YES, pressure control unit 41 based on the smooth width of checking sealer 55 from the camera data of CCD camera 50 whether in preset range (step S91).When the smooth width of sealer 55 during greater than preset range, pressure control unit 41 stops to suppress substrate W1 and W2 (step S92).On the other hand, when the result among the step S91 is YES, pressure control unit 41 move down pressure plare 33a so that substrate W1 and W2 each other further near (step S93).When the pressure load that calculates reached 100kg, pressure control unit 41 stopped to reduce pressure plare 33a (step S94).Pressure control unit 41 is based on the smooth degree that monitors sealer 55 from the camera data of CCD camera 50.
In step S95, pressure control unit 41 is once more based on the measured value calculating pressure load from load cell 31.When the difference between the force value of pressure load that calculates and 100kg during greater than preset range (NO among the step S95), pressure control unit 41 stops to reduce pressure plare 33a (step S96).In this case, might substrate W1 with W2 lost parallel, so unusual position is checked.
On the other hand, when the result among the step S95 is YES, pressure control unit 41 based on the smooth width of checking sealer 55 from the camera data of CCD camera 50 whether in preset range (step S97).When the smooth width of sealer 55 during greater than preset range, pressure control unit 41 stops to suppress substrate W1 and W2 (step S98).On the other hand, when the result among the step S97 was YES, pressure control unit 41 moved up pressure plare 33a to discharge vacuum processing chamber 32 (step S99).Substrate W1 and W2 are compressed to the scheduled unit spacing by the difference between the pressure (vacuum) in atmospheric pressure and the substrate gap.
Graphics processing unit 47 is based on the smooth width that calculates sealer 55 from the camera data of CCD camera 50, and estimates spacing between substrate W1 and the W2 from this smooth width.Pressure control unit 41 is read the estimated value (step S100) of spacing between substrate W1 and the W2.Pressure control unit 41 is sent to transfer equipment (step S101) with adhesive base plate W1 and W2.
First embodiment has following advantage.
(1) pressure plare 33a that provides in vacuum processing chamber 32 and platform 33b are toward each other.Pressure plare 33a suspends in midair from second gripper shoe 26 by suspension rod 34.Platform 33b is supported on the positioning table 36 by supporting leg 37.Upper container 32a suspends in midair from second gripper shoe 26 by upper bellows 35.Bottom container 32b is supported on the positioning table 36 by lower bellows 38.Second gripper shoe 26 and positioning table 36 are supported on the base plate 21 and door frame 22 with high degree of rigidity.Even vacuum processing chamber 32 by the situation of step-down or distortion under, the distortion also can be absorbed by bellows 35 and 38.Therefore, the influence that the vacuum processing chamber 32 that is caused by step-down is out of shape does not act on pressure plare 33a and the platform 33b, does not therefore influence the relative position of substrate W1 and W2 with parallel yet.Because the change from forcing press 17 outsides is absorbed by bellows 35 and 38, be transferred to pressure plare 33a and platform 33b so prevented to change.This has reduced the position deviation of substrate W1 and W2, and keeps substrate W1 and W2 parallel to each other.
(2) compacting substrate W1 and W2 when monitoring from the measured value of load cell 31, the spacing between substrate W1 and W2 reaches substrate W1 contacts whole sealer 55 with W2 spacing.Keep substrate W1 and W2 relative position with parallel in discharge vacuum processing chamber 32.Afterwards, substrate W1 and W2 are compressed to the scheduled unit spacing because of the difference between the pressure in atmospheric pressure and the substrate gap.Because pressure load acts on whole base plate W1 and the W2 fifty-fifty after vacuum processing chamber 32 is released to atmospheric pressure, quilt is accurately not bonding so substrate W1 and W2 have destroyed.Because the pressure load after the pressure load when substrate W1 contacts sealer 55 with W2 is released back atmospheric pressure much smaller than vacuum processing chamber 32, even so that substrate W1 and W2 have taken place in forcing press 17 under the uneven each other situation of mechanical location deviation or substrate W1 and W2 is bonded, the breaking-up on substrate W1 and the W2 is also very little.
(3) based on from the measured value of load cell 31, by the position of linear scale 43a and the detected pressure plare 33a of 43b and by the smooth degree of CCD camera 50 detected sealers 55, come the monitor pressures load.Based on monitoring that the result detects under the situation of substrate W1 and W2 upward pressure load abnormal, stop further compacting, thereby prevent that pressure plare 33a, platform 33b and substrate W1 and W2 are destroyed.
(4) load cell 31 is provided with the distance that equates from pressure plare 33a center C, and is positioned on the diagonal that connects suspension rod 34.This allows average load (weight) to be applied on a plurality of load cells 31, and allows be applied on a plurality of load cells 31 to average load (atmospheric pressure) in the process of vacuum processing chamber 32 step-downs.Therefore, pressure plare 33a and platform 33b can be held parallel to each other regardless of the pressure in the vacuum processing chamber 32.Might entering or parallel with respect to platform 33b of pressure plare 33a that the mechanical deflection of forcing press 17 loses owing to foreign object, because inspected based on measured value from load cell 31, thus substrate W1 and W2 keep parallel in by highly precisely bonding.
(5) such position below pressure plare 33a is positioned at, that is, the spacing between substrate W1 and the W2 is that substrate W2 only contacts liquid crystal 54 and do not contact minimum of a value in the scope of sealer 55, at this moment carries out the alignment of substrate W1 and W2.Because shear stress does not act on the sealer 55, be released back the position deviation of substrate W1 and W2 after the atmospheric pressure so prevented vacuum processing chamber 32.
(6) because the outer seal 61 (62,63) more high and thick than inner seal 55 is provided in inner seal 55 outsides, so possible accuracy ground detects pressure load and the substrate spacing (stop position of pressure plare 33a) of surplus greatly is provided when stopping to suppress.Therefore, suppressing under the unusual situation, can detect unusual earlier.Even reach at inner seal 55 under the situation of substrate W2 light shielding film, also can detect the smooth degree of outer seal 61 (62,63) by CCD camera 50.
(7), also become and be approximately constant so after vacuum processing chamber 32 is released back atmospheric pressure, expand the 54 needed times of liquid crystal because the spacing between substrate W1 and the W2 is approximately constant based on being held from the measured value of load cell 31.This can make the time of ultraviolet ray irradiation be approximately constant, thereby can carry out the processing of solidifying sealer 55 at Best Times.The glutinous company that also may prevent sealer 55 is owing to insufficient solidifying becomes insufficient.This makes is realizing may activating adhesive base plate manufacturing installation 11 effectively under the bonding situation of substrate W1 and W2 continuously.
(8) be not subjected to the influence of vacuum processing chamber 32 distortion owing to the effect of bellows 35 and 38 because of measured value, so improved reliability from the measured value of load cell 31 from load cell 31.And pressure control unit 41 can highly precisely monitor the pressure load on substrate W1 and the W2.
To provide the description to according to a second embodiment of the present invention forcing press 121 below, mainly be about the difference between the forcing press 17 of the forcing press 121 and first embodiment, omitted the description to same structure.
As shown in Figure 16, forcing press 121 has the main inner support frame 124 that supports door frame 123 and linear guide part 126 has been installed that guide rail 125 has been installed.Inner support frame 124 can be moved up and down with respect to the main door frame 123 that supports.
Provide a plurality of (there is shown two) pressure motor 127 main the support on the door frame 123.Relevant ball-screw 128 of each pressure motor 127 rotation.Gripper shoe 129 can be moved up and down according to the direction of rotation of ball-screw 128.Inner support frame 124 is supported on the gripper shoe 129 by a plurality of (there is shown four) load cell 130.
Provide central support frame 131 at the center of inner support frame 124.Be installed on the central support frame 131 is the linear guide part 133 that can be moved up and down along the guide rail 132 that is installed on the gripper shoe 129.Be that central support frame 131 can move up and down with respect to gripper shoe 129 and inner support frame 124.
Gripper shoe 129 is equipped with the pressure motor 134 that rotation is coupling in the ball-screw 135 on the support component 136.The rotation of ball-screw 135 makes support component 136 move up and down.Central authorities' support frame 131 is supported on the support component 136 by a plurality of (there is shown two) load cell 137.Best layout load cell 130 and 137 as shown in Fig. 5 or Fig. 6.
Below inner and central support frame 124 and 131, provide vacuum processing chamber 140.Vacuum processing chamber 140 is defined by detachable upper container 140a and bottom container 140b.Bottom container 140b is supported by a plurality of support bar 140c that are installed on the main support door frame 123.
In the periphery of bottom container 140b opening part, provide the maintenance vacuum processing chamber 140 bubble-tight O ring 140d.When vacuum processing chamber 140 was closed, the alignment pin 140e that provides on the bottom container 140b was fixed among the locating hole 140f that is formed among the upper container 140a.This makes upper container 140a be positioned with respect to bottom container 140b.
In vacuum processing chamber 140, provide pressure plare 141 respect to one another and platform 142.Pressure plare 141 keeps the second substrate W2 (CF substrate), and platform 142 keeps the first substrate W1 (TFT substrate).Pressure plare 141 and platform 142 keep the second substrate W2 and the first substrate W1 respectively by in pull of vacuum and the electrostatic attraction at least one.
As shown in Figure 17 A, the peripheral press portion 141b that pressure plare 141 has central press portion 141a and provides in central press portion 141a outside, separate with central press portion 141a.Substrate W2 is kept by the central press portion 141a of shade indication among Figure 17 A and peripheral press portion 141b.Peripheral press portion 141b is supported on a plurality of (there is shown two) support member 143 that support frame 124 stretches out downwards internally.The press portion 141a of central authorities is supported on the support member 144 that a plurality of (there is shown two) stretch out downwards from central support frame 131.Support member 143 is an integral body with inner support frame 124, and support member 144 is an integral body with central support frame 131.
Between inner support frame 124 and upper container 140a, be arranged in such a way bellows (bellow) 145 as flexible member, that is, and around support member 143 separately.Each bellows 145 all has flange portion at two ends.Flange portion all is coupled to respectively on inner support frame 124 and the upper container 140a by the O ring as potted component.
Between central support frame 131 and upper container 140a, be arranged in such a way bellows 146 as flexible member, that is, and around support member 144 separately.Each bellows 146 all has flange portion at two ends.Flange portion all is coupled to respectively on central support frame 131 and the upper container 140a by the O ring as potted component.Bellows 145 and 146 is connected on the vacuum processing chamber 140 airtightly.
Provide platform 142 in bottom container 140b, platform 142 platform 147 that is positioned moves horizontally in horizontal plane and rotates.Positioning table 147 can slide and rotate with respect to being fastened on the main base plate 148 that supports on the door frame 123 in horizontal plane, and by a plurality of support member (not shown) support platforms 142.Therefore, when positioning table 147 moved, platform 142 also flatly moved and rotation.Support member is separately centered on by the bellows (not shown), and these bellowss keep the air-tightness of vacuum processing chamber 140 between positioning table 147 and bottom container 140b.
Main door frame 123, inner support frame 124, central support frame 131, gripper shoe 129, support component 136 and the base plate 148 of supporting made by the material with high degree of rigidity.
On platform 142, provide ultraviolet irradiation apparatus 149 and 150.Ultraviolet ray irradiation apparatus 149 is facing to the central press portion 141a of pressure plare 141, and ultraviolet irradiation apparatus 150 is facing to peripheral press portion 141b.Ultraviolet ray irradiation apparatus 149 and 150 cylinders that are not illustrated move up and down.The ultraviolet ray irradiation apparatus 149 and 150 when bonding first and second substrate W1 and W2 to the sealer irradiation ultraviolet radiation.Irradiation is solidified sealer with temporary transient fixing base W1 and W2.
Provide riser 153 in the periphery of platform 142.The upper surface of the upper surface of riser 153 and platform 142 (its sticking substrate W1) is on a horizontal plane.Platform 142 is stretched out in the outside of riser 153.Riser 153 is raised mechanism 154 and rises to platform more than 142.
The operation of forcing press 121 will be discussed below.
When driving pressure motor 127, gripper shoe 129, inner support frame 124 and central support frame 131 are moved up and down with respect to the main door frame 123 that supports.When driving pressure motor 134, support component 136 and central support frame 131 are moved up and down with respect to gripper shoe 129 and inner support frame 124.Therefore, inner support frame 124 and central support frame 131 are moved up and down independently with respect to the main door frame 123 that supports.In other words, central press portion 141a and peripheral press portion 141b are moved up and down when keeping substrate W2 independently of one another, as shown in Figure 17 B.
In the load cell 130 and 137 each offers the pressure control unit (not shown) with detected load.
When vacuum processing chamber 140 during by step-down, the load that is associated with pressure in the vacuum processing chamber 140 and the difference between the atmospheric pressure acts on the load cell 130 by peripheral press portion 141b and support member 143.Load cell 130 detects the load relevant with pressure differential and the summation of the load of being correlated with the element weight that is supported on the gripper shoe 129.Pressure control unit is based on the minimizing of the total load that is provided by load cell 130, calculates from peripheral press portion 141b and is applied to pressure load on substrate W1 and the W2.
In addition, when vacuum processing chamber 140 during by step-down, the load that is associated with pressure in the vacuum processing chamber 140 and the difference between the atmospheric pressure acts on the load cell 137 by central press portion 141a and support member 144.Load cell 137 detects the load relevant with pressure differential and the summation of the load of being correlated with the element weight that is supported on the gripper shoe 136.Pressure control unit calculates from central press portion 141a, is applied to the pressure load on substrate W1 and the W2 based on the minimizing of the total load that is provided by load cell 130.
According to first embodiment, pressure control unit is controlled the pressure load on substrate W1 and the W2 by according to the testing result control motor 127 and 134 from load cell 130 and 137.And, as above-mentioned described in reference to the description of Fig. 3, pressure control unit is based on from the view data of CCD camera 50, be in alignment with each other substrate W1 and W2 by driving positioning table 147.
Linear guide part 126 and 133 can be provided the linear scale of the shift position of detecting peripheral press portion 141b and central press portion 141a respectively.In this case, pressure control unit can monitor central press portion 141a and the peripheral press portion 141b relative position with respect to platform 142, and whether the spacing between definite substrate W1 and the W2 and the relation between the pressure load be suitable.
Now with reference to Figure 18 the bonding of substrate W1 and W2 is discussed.As discussing in the foregoing description of reference Figure 10, be used to seal a plurality of inner seals of liquid crystal of the inside, a plurality of unit that is formed on the first substrate W1 and the upper surface (adhesive surface) that is applied to the first substrate W1 around the outer seal of inner seal.
As shown in Figure 18 A, pressure plare 141 and platform 142 be the sticking second substrate W2 and the first substrate W1 respectively.The vacuum processing chamber 140 of finding time, the optical detection alignment mark is then with the align periphery of substrate W1 and W2 of discontiguous mode.
As shown in Figure 18 B, peripheral press portion 141b is moved downward to use pressure load F
0Suppress the periphery of the second substrate W2.Pressure load F
0Corresponding to the load when the second substrate W2 closely contacts with the periphery of the first substrate W1.In this case, by using camera C
1Substrate W1 and W2 align.From ultraviolet irradiation apparatus 149 irradiation ultraviolet radiations solidifying outer seal, thereby the periphery of temporary transient fixing base W1 and W2.
As shown in Figure 18 C, when peripheral press portion 141b was disengaged absorption, peripheral press portion 141b was moved upward.Then, central press portion 141a is moved downward.Using camera C
2In the time of location substrate W1 and W2 middle body, use pressure load F
CSuppress the middle body of the second substrate W2.Pressure load F
CCorresponding to the load when the second substrate W2 closely contacts with inner seal.Afterwards, from ultraviolet irradiation apparatus 150 irradiation ultraviolet radiations solidifying inner seal, thereby the middle body of temporary transient fixing base W1 and W2.
Along with central press portion 141a is disengaged absorption, central press portion 141a is moved upward.Then, discharge vacuum processing chamber 140.Substrate W1 and W2 are adhered to scheduled unit spacing (final substrate spacing) by atmospheric pressure.
Behind temporary transient fixedly periphery,, can move down central press portion 141a, and need not to promote peripheral press portion 141b for temporary transient fixedly middle body.
Except those advantages of first embodiment, second embodiment also has following advantage.
(1) pressure plare 141 comprises the central press portion 141a of compacting substrate W1 and W2 middle body, and the peripheral press portion 141b of compacting substrate W1 and W2 periphery.Peripheral press portion 141b and central press portion 141a are moved up and down independently of one another.Because the periphery of substrate W1 and W2 and middle body can be suppressed respectively, so realize bonding with the minimum load that needs.This can allow when preventing that reagency that substrate W2 produces when bonding from sliding into the next door and not lining up with substrate W1 substrate W1 and W2 to be bonded together with the scheduled unit spacing.
(2) under the situation that provides a plurality of outer seals around inner seal, after the periphery of substrate W1 and W2 was pressed, the middle body of substrate W1 and W2 was pressed.At first, outer seal is flattened the periphery with temporary transient fixing base W1 and W2, and inner seal is flattened temporarily to fix their middle body then.This can further reduce the generation of position deviation between substrate W1 and the W2.
(3) because peripheral press portion 141b and central press portion 141a are moved up and down independently of one another, so in that suitably bonding big substrate W1 and W2 upward pressure machine 121 are very useful.
For those of ordinary skill in the art, will be appreciated that the present invention can be implemented with many other concrete forms under the situation that does not depart from the spirit or scope of the present invention.For example, the foregoing description is modified like this below can resemble.
Can use the vacuum processing chamber 111 shown in Figure 16 to replace detachable vacuum processing chamber 32.Vacuum processing chamber 111 has the door frame of being closed by the family of power and influence 112.In vacuum processing chamber 111, provide pressure plare 33a and platform 33b, and pressure plare 33a suspends from second gripper shoe 26 by suspension rod 34 in midair.Platform 33b is supported on the positioning table 36 by supporting leg 37.The upper bellows 35 that provides around relevant suspension rod 34 is connected to vacuum processing chamber 111 on the gripper shoe 113.Vacuum processing chamber 111 and upper bellows 35 airtight communicating.The lower bellows 38 that provides around relevant supporting leg 37 is connected to the bottom of vacuum processing chamber 111 on the positioning table 36.Pressure setting 114 comprises the pressure motor 27 of pressing pressure plate 33a.Though in Figure 16, be not illustrated, base plate 21 be connected to that the similar door frame 22 shown in Fig. 2 on.This change has the advantage similar with the foregoing description.
Under the situation that bottom container 32b can be supported separately by lower bellows 38, can omit the support bar 39 described in Fig. 2.
Though door frame 22 is directly coupled on the base plate 21, can between base plate 21 and door frame 22, provide to have enough another kind of structures of high rigidity.
Detection to substrate W1 and the load of W2 upward pressure is not limited to calculate from the reduction of weight A and load B summation, but also can detect by other technologies.
The quantity of load cell 31 is not limited to four.
The quantity of CCD camera 50 is not limited to four, but can be greater than four or can be in one to three scope.Parallel for effectively and accurately detected pressures load and pressure plare 33a and platform 33b, preferably four of the quantity of CCD camera 50.
Can not use whole in load cell 31, linear scale 43a and 43b and the CCD camera 50 and only use some assemblies to detect and the controlled pressure load.Under the situation of the smooth degree that monitors the load that detects by four load cells 31 and sealer 55, even in the forcing press 17 mechanical deflection has taken place, also can highly precisely, high reliability detect pressure load unusually.
Can not monitor the smooth degree of sealer 55 by the sensor of transparent type by CCD camera 50.But preferably use CCD camera 50, because the staff can monitor the image that visually detects sealer 55 on the screen.
In a second embodiment, at first, can move down the middle body of central press portion 141a, and then remove sticking, can move down peripheral press portion 141b after this with the compacting periphery to central press portion 141a with compacting substrate W1 and W2.
In a second embodiment, when compacting substrate W1 and W2, do not cause the slip of substrate W2, can move down central press portion 141a and peripheral press portion 141b to the next door if suppress whole surface.The i.e. compacting of being undertaken by central press portion 141a and peripheral press portion 141b according to the size Control of substrate W1 and W2.
Present embodiment and example are illustrative and not restrictive, the invention is not restricted to details given here and describe, and can make amendment within the scope of claims and the condition of equivalence.
Claims (14)
1. the method from first and second substrates manufacturing adhesive base plate comprises the steps:
On the surface of first substrate, form the sealer framework;
First and second substrates are set in the process chamber;
Reduce the pressure of process chamber;
Move at least one in first and second substrates by this way, that is, make that described first and second substrates are close to each other;
Calculating acts on the pressure load on first and second substrates;
When the pressure load that is calculated reaches the targeted loads that the load when contacting described first and second substrates when whole sealer framework equates, stop at least one move in described first and second substrates; And
Atmospheric pressure is returned in pressure setting in the process chamber.
2. method according to claim 1 also comprises the steps:
When the pressure load that is calculated reaches the load that is lower than targeted loads, temporarily stop at least one move in described first and second substrates; And
After temporarily stopping the step that moves, check predetermined load and the pressure load that calculated between difference.
3. method according to claim 2 also comprises, after checking the step of difference, takes the sealer image and monitors the step of the smooth degree of sealer.
4. method according to claim 2, after also being included at least one the step that moves that stops described first and second substrates, the step of taking the sealer image and monitoring the smooth degree of sealing thing, wherein, when the smooth degree of sealer is positioned at preset range, stop to suppress first and second substrates, and carry out atmospheric step is returned in the pressure setting in the process chamber.
5. method according to claim 1, wherein, the step of calculating pressure load comprises the calculating of difference between from a plurality of measured values of a plurality of load cells two, and this method also comprises remove the step that acts on the pressure load on first and second substrates when this difference is equal to or greater than predetermined value.
6. method according to claim 1 also comprises the steps:
Liquid crystal drips in the sealer framework; And
When one in first and second substrates touches sealer and pressure load and reaches first and second substrates and all touch the load of liquid crystal, temporarily stop at least one move and bonding first and second substrates in described first and second substrates.
7. method according to claim 1, wherein, the described step that first and second substrates are set in process chamber comprises with first and second holding plates that are provided with in the process chamber and keeps first and second substrates respectively, and this method also comprises the steps:
Detect the distance between first and second holding plates; And
Stop at least one move in described first and second substrates when this distance reaches target range, this target range is corresponding to the distance between first and second substrates when whole sealer framework all contacts first and second substrates.
8. method according to claim 1, wherein, described targeted loads is lower than the load that is caused by atmospheric pressure.
9. method according to claim 8 wherein, describedly returns the pressure setting in the process chamber to atmospheric step, comprises by using atmospheric pressure that the spacing between first and second substrates is compressed to predetermined value.
10. one kind is used for having from the first and second substrate manufacturings device of the adhesive base plate of scheduled unit spacing, and this device comprises:
Be used on first substrate, forming equipment with the sealer framework that is higher than the unit interval height;
Be used for splashing into the equipment of liquid crystal in the sealer framework, in a plurality of positions; And
Forcing press, it comprises:
But the removable step-down process chamber that is divided into first container and second container;
First holding plate is arranged in first container, is used for keeping first substrate;
Second holding plate is arranged in second container, is used for keeping second substrate;
Suppress the pressure mechanism of first and second substrates, it comprises pressure motor and the connecting frame that can be moved up and down by this pressure motor, and first holding plate suspends in midair from this connecting frame by suspension rod;
Detent mechanism is used for sliding in horizontal plane and rotating second holding plate so that first and second substrates are in alignment with each other;
Flexible member, it is set between first container and the pressure mechanism and between second container and the detent mechanism;
Load cell, it is used for the load of detection effect on first and second substrates; And
Pressure control unit, it is based on the measured value controlled pressure mechanism from load cell, always from the measured value calculating pressure load of load cell, when reaching targeted loads, the pressure load that is calculated stops briquetting machine, and the pressure of process chamber is arranged in such a way back atmospheric pressure, that is, make atmospheric pressure that first and second substrates are compressed to the scheduled unit spacing.
11. device according to claim 10, wherein, described flexible member is a bellows.
12. device according to claim 10 also comprise the image taking unit that is used for monitoring the sealer distortion, and wherein said pressure control unit is based on the pressure load that is calculated by the captured sealer image inspection in image taking unit.
13. device according to claim 10, also comprise position detection unit, it is used for measuring the distance between first holding plate and second holding plate, and wherein said pressure control unit is based on the distance of calculating from the measurement result of position detection unit between first and second substrates.
14. device according to claim 10, wherein, described targeted loads equals when the load of the spacing between first and second substrates for greater than the predetermined value of scheduled unit spacing the time.
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| JP2002170007 | 2002-06-11 | ||
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| CNB031410561A Division CN1291272C (en) | 2002-06-11 | 2003-06-10 | Method and apparatus for producing adhesive base plate |
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| CN1796105A true CN1796105A (en) | 2006-07-05 |
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| CN 200610150470 Pending CN1932601A (en) | 2002-06-11 | 2003-06-10 | Method for fabricating bonded substrate |
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