CN1777489B - Laser processing device - Google Patents

Laser processing device Download PDF

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Publication number
CN1777489B
CN1777489B CN2004800107713A CN200480010771A CN1777489B CN 1777489 B CN1777489 B CN 1777489B CN 2004800107713 A CN2004800107713 A CN 2004800107713A CN 200480010771 A CN200480010771 A CN 200480010771A CN 1777489 B CN1777489 B CN 1777489B
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CN
China
Prior art keywords
laser
mentioned
polarized
optics
light separation
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Expired - Fee Related
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CN2004800107713A
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Chinese (zh)
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CN1777489A (en
Inventor
京藤友博
黑岩忠
小林信高
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Mitsubishi Electric Corp
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Mitsubishi Electric Corp
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/0604—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/0604—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams
    • B23K26/0613—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams having a common axis
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/067—Dividing the beam into multiple beams, e.g. multifocusing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/083—Devices involving movement of the workpiece in at least one axial direction
    • B23K26/0853—Devices involving movement of the workpiece in at least in two axial directions, e.g. in a plane
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/38—Removing material by boring or cutting
    • B23K26/382—Removing material by boring or cutting by boring
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/28—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
    • G02B27/283—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising used for beam splitting or combining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00—Articles made by soldering, welding or cutting
    • B23K2101/36—Electric or electronic devices
    • B23K2101/42—Printed circuits
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Laser Beam Processing (AREA)

Abstract

A laser beam apparatus for processing a workpiece (20), comprising an optical system consisting of optical components for guiding a laser beam emitted from a laser oscillator (1) to the workpiece (20), wherein one laser beam is split by a first polarization splitting means (5) into two laser beams, one of the beams is passed through a mirror (14) while the other is used by a first galvano scan mirror (13) for scanning in two axial directions, the two laser beams are guided to a second polarization splitting means (8) and used by a second galvano scan mirror (12) for scanning. The first and second polarization splitting means are arranged at 45 DEG relative to the optical axis of the laser light.

Description

Laser processing device
Technical field
The present invention relates to particularly seek to improve its productivity and crudy machined objects such as printed base plate are carried out the laser processing device that perforation processing is a main purpose.
Background technology
Existing machined objects such as printed base plate are carried out in the laser processing device that perforation processing is a main purpose, particularly can implement the laser processing device processed at two positions simultaneously, for for example international publication number is a structure shown in Figure 9 in the WO03/041904 communique.
In Fig. 9,1 is laser oscillator; 2 is laser; 3 is mask (mask), and it extracts the laser of required part from the laser of incident, so that machining hole becomes the size and the shape of hope; 4 is a plurality of speculums, its reflector laser 2, guiding light path.24 is first polarised light splitter, and it becomes two bundle laser with laser 2 beam split; 6 is with the beam of laser after 24 beam split of first polarised light splitter; 6p is the direction of polarized light of laser 6; 7 are another Shu Jiguang with the first polarised light splitter beam split; 7s is the direction of polarized light of laser 7; 25 is second polarised light splitter, and it is used for reflector laser 6, sees through laser 7, and the second automatically controlled scanning reflection mirror 12 leads.10 is with the second polarised light splitter laser light reflected; 11 for seeing through the laser of second polarised light splitter; 14 is speculum, and it is used for laser 6 guiding second polarised light splitter 25; 17 is f θ lens, and it is used for laser 10,11 is assembled on machined object 20; 13 is the first automatically controlled scanning reflection mirror, and it is used for scan laser 7 on two direction of principal axis, and second polarised light splitter 25 leads; 12 is the second automatically controlled scanning reflection mirror, and it is used for scan laser 10 and laser 11 on two direction of principal axis, guiding machined object 20.18 is XY worktable, and it is used to make machined object 20 to move in the XY direction; 19 is light intensity sensor, and it detects from the energy of the laser of f θ lens 17 ejaculations; 15 for blocking first photochopper of laser 6; 16 for blocking second photochopper of laser 7.In addition, light intensity sensor 19 is fixed on the XY worktable 18, when the energy of detection laser, the light accepting part of light intensity sensor 19 is moved on the position of laser irradiation.
As shown in Figure 9, with polarised light splitter the beam of laser beam split is being become two bundle laser, by independent scanning two bundle laser, the perforation processing that can implement simultaneously at two positions to process utilizes laser oscillator 1 to be directed to first polarised light splitter 24 with the laser 2 of rectilinearly polarized light starting of oscillation via mask 3, speculum 4 with in the laser processing device.
Then, utilize first polarised light splitter 24, the P wave component of laser 2 sees through polarised light splitter 24 and becomes laser 6, and the S wave component is laser 7 by 24 reflections of first polarised light splitter by beam split.
The laser 6 that sees through first polarised light splitter 24 is directed to second polarised light splitter 25 via speculum 14.
On the other hand, utilizing the first automatically controlled scanning reflection mirror 13 after scanning on two direction of principal axis, be directed to second polarised light splitter 25 with first polarised light splitter, 24 laser light reflected 7.
In addition, laser 6 is always at same position second polarised light splitter 25 that leads, but the deflection angle by the control first automatically controlled scanning reflection mirror 13 can be adjusted position, the angle of laser 7 to 25 incidents of second polarised light splitter.
After this, laser 10,11 utilizes the second automatically controlled scanning reflection mirror 12 after scanning on two direction of principal axis, is imported into f θ lens 17, assembles on the assigned position of machined object 20 respectively.
At this moment, by scanning the first automatically controlled scanning reflection mirror 13, laser 11 relatively the optical axis of laser 10 in certain setting range, for example in the square scope of length of side 4mm, move. pass through like this, but the second automatically controlled scanning reflection mirror 12 that moves in the ranges of work such as 50mm four directions for example can make laser be radiated on two different arbitrarily points on the machined object 20 simultaneously.
Figure 10 represents to be used to illustrate the schematic diagram of the principle of polarised light splitter 24, and central authorities' expression front view is represented side view about it, and top view is represented on top.
In Figure 10, the 26th, the window portion of polarised light splitter under the situation of carbon dioxide gas laser, is used ZnSe or Ge.The 27th, be used for speculum with 90 ° of laser reflections.
Polarised light splitter 24 is for becoming the structure of Brewster's angle, so that polarised light separates with respect to incident beam.
Therefore, have following character: when making laser 28 to these polarised light splitter 24 incidents, the composition of direction of polarized light 28p (P wave component) sees through, the composition of direction of polarized light 28s (S wave component) reflection.
In addition, have following character: if the circularly polarized light that all direction of polarized light character exist equably or make the direction of polarized light of P ripple, S ripple angle at 45, then laser is by five equilibrium, and the energy of laser 29 and laser 30 equates.
Therefore, become following structure: become circularly polarized light or make P ripple, S ripple angle at 45 by making incident beam 2 to first polarised light splitter 24, and with its energy five equilibrium.
In addition, certainly, has following character: if only be the P wave component, then all see through,, then all reflect if only be the S wave component to the direction of polarized light of the laser of polarised light splitter 24 incidents.
Therefore, become following structure: only be the P wave component by making laser 7, make laser 6 only be the S wave component to the light beam of second polarised light splitter, 25 incidents, and the noenergy loss ground guiding second automatically controlled scanning reflection mirror 12.
In above-mentioned this existing laser processing device, first polarised light splitter 24, second polarised light splitter 25, all so that laser is the mode allocation window of Brewster's angle to the incidence angle of window portion 26, thus with laser 2 beam split becoming S ripple, the P wave component, but for example under the situation of using the beam split of carrying out carbon dioxide gas laser with ZnSe as the window of material, if Brewster's angle is 67.5 °, then the incidence angle to window becomes big, if making the laser diameter of guiding polarised light splitter is φ 35mm, then the laser diameter on the window is 95mm on long axis direction.Therefore, have following problem: the effective diameter of window is necessary for more than 2.5 times or 2.5 times of above-mentioned laser diameter, is difficult to keep the accuracy of manufacture.
In addition, owing to see through the laser 6 of first polarised light splitter 24 as the P wave component, in second polarised light splitter 25, must be reflected as the S wave component, as the S wave component by first polarised light splitter, 24 laser light reflected 7, in second polarised light splitter 25, must see through as the P wave component, so first, must have the speculum 27 that is used for 90 ° of laser reflections on second polarised light splitter respectively, in addition, because the relative position relation of window portion 26 and speculum 27 has a significant impact the precision of the light path after the polarised light splitter, so when making polarised light splitter, must be noted that the relative position relation of window portion 26 and speculum 27, so also exist polarised light splitter to become the problem of the higher optics of price.
In addition, consider the characteristic of f θ lens 17, in order to obtain more stable crudy, must shorten from the optical path length first polarised light splitter, 24 to the f θ lens 17 as far as possible, thereby must increase the effective diameter of polarised light splitter.; because it enough is greatly difficult making the effective diameter of polarised light splitter in design; so it is enough not big to be actually the effective diameter of polarised light splitter; when the diameter of the laser of guiding f θ lens 17 is restricted to than the diameter of hope hour; under the constant situation of the focal length of f θ lens; the diameter of the laser on the machined object is restricted to bigger than the diameter of hope, can not constitute the light path that is fit to littler hole processing, the problem of the crudy that existence can not obtain requiring.
In addition, each optics that uses in optical system must have distortion (aberration) on manufacturing process, because for flatness, precision prescribed is more little, qualification rate is poor more, cost is high more, if so generally make with about 1/10～1/20 optical distortion of laser wavelength lambda. do not consider other problem, the optics of a plurality of this degree is constituted optical system, then each aberration is accumulated, can produce astigmatism etc., have the problem of the crudy that can not obtain requiring sometimes.
In addition, generally to make the surface be identical with the manufacturing process at the back side because each surface configuration is the optics on plane, so there is following problem: the tendency that the surface configuration at the surface and the back side becomes convex or spill simultaneously is strong more, and optical distortion in the optics of infiltration type (aberration) is big more.
The present invention proposes in order to address these problems, first purpose is, utilize in the laser processing device that the laser of polarized-light separation device beam split processes in use, obtain to use low-cost optics as polarized-light separation device and can make the littler laser processing device of laser diameter on the machined object.
Second purpose be, obtains reducing the aberration that the surface configuration because of optics causes, thereby improve the laser processing device of crudy.
Summary of the invention
To achieve these goals, in the 1st laser processing device that invention relates to, has the optical system that a plurality of opticses by the laser guide machined object that laser oscillator is penetrated constitute, utilize first polarized-light separation device that the beam of laser beam split is become two bundle laser, beam of laser is via speculum, another Shu Jiguang utilizes the first automatically controlled scanning reflection mirror to scan on two direction of principal axis, behind two bundle laser guides, second polarized-light separation device, utilize the second automatically controlled scanning reflection mirror to scan, the processing machined object, the optical axis that above-mentioned first and second polarized-light separation devices are configured to relative laser is at 45.
In the 2nd laser processing device that invention relates to, first and second polarized-light separation devices are to form the polarised light splitter that the dielectric multilayer film applies on the surface.
In the 3rd laser processing device that invention relates to, above-mentioned first and second polarized-light separation devices, one side is a spill, its back side is convex.
In the 4th laser processing device that invention relates to, above-mentioned first polarized-light separation device, the surface of reflector laser one side is a convex, its back side is spill, in this first polarized-light separation device, be the above-mentioned first automatically controlled scanning reflection mirror of spill with the laser guide surface configuration that is reflected, above-mentioned second polarized-light separation device, the surface of reflector laser one side is a spill, and its back side is convex.
In the 5th laser processing device that invention relates to, above-mentioned first polarized-light separation device, the surface of reflector laser one side is a spill, its back side is convex, in this first polarized-light separation device, be the above-mentioned first automatically controlled scanning reflection mirror of convex with the laser guide surface configuration that is reflected, above-mentioned second polarized-light separation device, the surface of reflector laser one side is a convex, and its back side is spill.
In the 6th laser processing device that invention relates to, to establish under the situation that above-mentioned Wavelength of Laser is λ, the recessed or convex on the surface of aforementioned first and second polarized-light separation devices forms with the precision that is less than or equal to λ/20.
In the 7th laser processing device that invention relates to, in above-mentioned optical system, one group of substantially identical optics of configuration surface shape in the following manner, promptly the beam incident surface of an optics is perpendicular to the beam incident surface of another optics, and identical with beam incident angle to another optics to the beam incident angle of an optics.
In the 8th laser processing device that invention relates to, the laser optical path till the laser that penetrates from above-mentioned laser oscillator arrives above-mentioned first polarized-light separation device mask is set, the above-mentioned one group of optics of configuration between this mask and above-mentioned machined object.
In the 9th laser processing device that invention relates to, have the carriage of fixing above-mentioned one group of optics respectively, under the directive situation of above-mentioned carriage, be configured to the axle of this directionality of expression identical with the plane of incidence direction of separately optics.
In the 10th laser processing device that invention relates to, to establish under the situation that above-mentioned Wavelength of Laser is λ, the surface configuration of above-mentioned one group of optics forms with the precision of λ/10～λ/20.
In the 11st laser processing device that invention relates to, above-mentioned first and second polarized-light separation devices have the direction of advance perpendicular to laser, and can adjust the mechanism of angle on two mutually orthogonal direction of principal axis.
In the 12nd laser processing device that invention relates to, have damper, it is used to absorb as energy loss and the laser that leaks from above-mentioned second polarized-light separation device.
By the present invention, by use incidence angle be 45 ° polarised light splitter as polarized-light separation device, the laser that can make larger diameter is to the incident of f θ lens, thereby can make the diameter of the laser on the machined object littler, can implement trickleer processing.In addition, polarized-light separation device is cheap, can reduce cost.
Description of drawings
Fig. 1 is the structure chart of the laser processing device of expression embodiments of the present invention 1.
Fig. 2 is the skeleton diagram of the bracket portion of the polarised light splitter of fixing expression embodiments of the present invention 1.
Fig. 3 is the structure chart of the laser processing device of expression embodiments of the present invention 2.
Fig. 4 is the schematic diagram that is used to illustrate the relation of the optical component surfaces shape of laser processing device of embodiments of the present invention 2 and refractivity.
Fig. 5 is the schematic diagram of optics configuration that is used to illustrate the laser processing device of embodiments of the present invention 2.
Fig. 6 is the schematic diagram that is used to illustrate the relation of the configuration of the optics with directionality of laser processing device of embodiments of the present invention 2 and refractivity.
Fig. 7 is the structure chart of the laser processing device of expression embodiments of the present invention 3.
Fig. 8 is the schematic diagram that is used to illustrate the relation of the optical component surfaces shape of laser processing device of embodiments of the present invention 3 and refractivity.
Fig. 9 is the structure chart of the laser processing device of expression prior art related to the present invention.
Figure 10 is the schematic diagram of polarised light splitter that is used to illustrate the laser processing device of the prior art that expression is related to the present invention.
The specific embodiment
Embodiment 1.
Fig. 1 relates to embodiments of the present invention 1, for representing the structure chart of following punching with laser processing device: the polarised light splitter that uses 45 ° of incidence angles is as polarized-light separation device, the beam of laser beam split is become two bundle laser, by independent scanning two bundle laser, can implement processing simultaneously at two positions.Adopt identical label for the structure identical, omit detailed explanation with Fig. 9 of prior art.
In Fig. 1,5 is first polarised light splitter, 6 for seeing through the laser of first polarised light splitter 5,6p is laser 6 becomes the P wave component by first polarised light splitter a direction of polarized light, 6s is laser 6 becomes the S wave component by first polarised light splitter a direction of polarized light, 7 is by first polarised light splitter, 5 laser light reflected, 7s is laser 7 becomes the S wave component by first polarised light splitter a direction of polarized light, 7p is laser 7 becomes the P wave component by first polarised light splitter a direction of polarized light, 8 is second polarised light splitter, 9 for accepting the damper as the laser of energy loss generation, 10 is to utilize second polarised light splitter, 8 laser light reflected in the laser 6,11 is the laser that sees through second polarised light splitter 8 in the laser 7.
In the prior art, laser is carried out use the window of incidence angle under the situation of polarised light separation, carry out polarised light by the laser that will contain equal P wave component, S wave component and separate as Brewster's angle, make P wave component that sees through and the S wave component five equilibrium that is reflected, the energy of five equilibrium laser.
But, in the present embodiment, implemented for example polarised light splitter of dielectric multilayer film coating by using at reflecting surface, not with Brewster's angle configuration incidence angle, but it is at 45 to be configured to relative optical axis, with constant precision the P ripple is seen through, and with certain constant precision reflection S ripple, the energy of five equilibrium laser.
As an example, to using the polarised light splitter of plated film, so that 5% the seeing through of 95% and S ripple of P ripple, the situation of 5% reflection of 95% and P ripple of S ripple is described.If the energy of establishing to the laser of first polarised light splitter, 5 incidents is 100%, the laser 6 that then sees through first polarised light splitter 5 contains 47.5% P wave component, 2.5% S wave component.After this, the laser of P wave component that contains 47.5% S wave component and 2.5% is to 8 incidents of second polarised light splitter, contained 45.125% S wave component and 0.125% P wave component by second polarised light splitter, 8 laser light reflected, the energy that is directed to the laser 10 of the second automatically controlled scanning reflection mirror 12 thus finally is 45.25%.The laser that becomes energy loss that sees through second polarised light splitter 8 contains 2.375% S wave component and 2.375% P wave component.
On the other hand, for by first polarised light splitter, 5 laser light reflected 7, also experience same process, the energy that 45.25% energy is directed to the second automatically controlled scanning reflection mirror 12,4.75% becomes energy loss.
Therefore, amount to 9.5% and be not directed to the second automatically controlled scanning reflection mirror 12 as energy loss, but under the situation of the light path that constitutes by present embodiment, because the loss of laser 6 partly sees through second polarised light splitter, the loss partial reflection of laser 7, so this laser that becomes energy loss can all be pooled to damper 9 parts, thereby can prevent that laser because of loss part from causing the damage of optics etc.
Above-mentioned polarised light splitter makes 5% the seeing through of 95% and S ripple of P ripple with 45 ° of incidence angles, make 5% wave reflection of 95% and P of S ripple, but because under incidence angle departs from 45 ° situation, the ratio of the P ripple that sees through and the S ripple of reflection reduces, energy loss increases, so preferably be configured for 45 ° with incidence angle.
In above-mentioned, illustrated that 5% of 95% and the S ripple that make the P ripple sees through, the energy loss of polarised light splitter of 5% wave reflection that makes 95% and P of S ripple is 9.5% situation, but as can be seen, if make the transmitance of P ripple and S wave reflection rate be higher than 95%, then energy loss can be less than 9.5%.
In addition, because the polarised light splitter of present embodiment is with 45 ° of configuration laser incidence angles, so when the diameter of laser of guiding polarised light splitter is φ 35mm, laser diameter on the window is 52mm on long axis direction, be about 1.5 times of above-mentioned laser diameter, with incidence angle is that the window effective diameter of the existing polarised light splitter of Brewster's angle must be compared more than or equal to 2.5 times of incident laser diameter, can make with littler shape.If the area with window compares, then because short-axis direction all is 35mm, so the polarised light splitter of 45 ° of incidence angles can dwindle 44.6% than existing polarised light splitter area.Thus, can make the processing unit (plant) miniaturization.
In addition, the window of same diameter, for example be under the situation of 53mm, Brewster's angle is on 67.5 ° the basis in existing polarised light splitter, laser diameter that can beam split is about φ 20mm, but in the polarised light splitter of 45 ° of incidence angles, be φ 35mm, can constitute the bigger light path of laser diameter.Here, be d if the laser that makes beam diameter D, is established the beam spot diameter of assembling this moment to the incident of the f of focal distance f θ lens on machined object, then the relation of the focal distance f of beam spot diameter d and f θ lens, incident beam diameter D can be represented with following formula.
d∝f/D (1)
(1) formula is represented, utilizes beam spot diameter d that the f θ lens of focal distance f assemble on workpiece and beam diameter D to the laser of f θ lens incident to be inversely proportional to.
Therefore, considering that the window with same diameter constitutes under the situation of polarised light splitter, as mentioned above, incidence angle is the effective diameter that 45 ° polarised light splitter can more effectively be guaranteed laser, under the situation of using identical f θ lens, because the beam diameter D to the incident of f θ lens is increased, so can implement the littler processing of beam spot diameter.
In addition, the speculum owing to not needing 90 ° of light path reflections so polarised light splitter is more cheap, can reduce the cost of processing unit (plant).
In addition, in embodiments of the present invention, owing to constitute the light path that makes 90 ° of laser reflections, so be applicable to the polarised light splitter of 45 ° of incidence angles.Utilize this structure, because the scanning direction of the automatically controlled scanning reflection mirror of two axles is for keeping straight on XY worktable 18, so as shown in Figure 1, by making this craspedodrome direction consistent with the XY direction, can make directions X, Y direction corresponding one to one with automatically controlled scanning reflection mirror respectively, adding the control of the automatically controlled scanning reflection mirror of understanding easily in man-hour, thus can simplified structure.
The reflection angle that makes laser with polarised light splitter for situation less than 90 ° acute angle under, can make the effective diameter of polarised light splitter become big, implement the littler processing of beam spot diameter.But, because do not keep straight in the scanning direction of the automatically controlled scanning reflection mirror of two axles on XY worktable in this case, so even for example the scanning direction of an automatically controlled scanning reflection mirror is consistent with directions X, the Y direction just scans with the synthetic of automatically controlled scanning reflection mirror of another automatically controlled scanning reflection mirror and directions X, so make the light path of 90 ° of above-mentioned laser reflections want complicated at the control ratio that adds automatically controlled scanning reflection mirror in man-hour.
Embodiment 2.
After the beam split two bundle laser is all through behind second polarised light splitter, because must be parallel with the axle of the directions X of Fig. 1, and the center of the second automatically controlled scanning reflection mirror 12 that leads, so the laser 6,7 after the beam split must the independent adjustment of implementing optical axises.
For with laser 10, the 11 second automatically controlled scanning reflection mirrors 12 that lead accurately, in the later light path of the speculum 4z that is located at first polarised light splitter, 5 tight fronts, must have two at least perpendicular to the light path direction of advance, and on two mutually orthogonal direction of principal axis, can adjust the speculum of angle respectively, but in the present embodiment, laser 10 can utilize the speculum 4z of first polarised light splitter, 5 tight fronts and second polarised light splitter 8 to adjust optical axis, on the other hand, can utilize first polarised light splitter 5 and the first automatically controlled scanning reflection mirror 13 to adjust the optical axis of laser 11.Here, the first automatically controlled scanning reflection mirror 13 has two speculums that can adjust angle mutually on the direction of reversing, has and a speculum identical functions can adjusting angle on two mutually orthogonal direction of principal axis.
Fig. 2 relates to embodiments of the present invention 2, for expression makes the direction of advance of polarised light splitter perpendicular to laser, and can adjust the figure of the mechanism of angle on two mutually orthogonal direction of principal axis.In Fig. 2, polarised light splitter 5 or 8 is supported by analog bracket 31, and analog bracket 31 is supported on the tray rack 32 in the mode that can freely rotate by the first turning cylinder 35a.In addition, tray rack 32 by with the second turning cylinder 35b of the first turning cylinder 35a quadrature, be supported in the mode that can freely rotate on the optical mount 36 of support of optical system.Like this, polarised light splitter is perpendicular to the direction of advance of laser, and can adjust angle on two mutually orthogonal direction of principal axis.In addition, form such structure, promptly on tray rack 32 and junction surface analog bracket 31, rotation direction along analog bracket 31 is provided with long the first access 34a, penetrate the first set bolt 33a and be screwed on the analog bracket 31, after rotating adjustment,, analog bracket 31 can be fixed on the tray rack 32 by the fastening first set bolt 33a.The junction surface of tray rack 32 and optical mount 36 utilizes the second adjustment hole 34b and the second set bolt 33b to become and can rotate the fixing structure in adjustment back too.
On the other hand, because the variable quantity of the laser beam axis that sees through polarised light splitter that produces by the angle adjustment of polarised light splitter, compare very little with laser light reflected, be negligible degree, so even adjustment is by the optical axis of first polarised light splitter, 5 laser light reflected 7,11, also almost to the not influence of optical axis of the laser 6,10 that sees through, because even adjustment is by the optical axis of second polarised light splitter, 8 laser light reflected 6,10, also almost to the not influence of optical axis of the laser 7,11 that sees through, so can adjust independently respectively.
In addition, under the situation of the angle of having adjusted speculum 4z and first, second polarised light splitter 5,8, the incidence angle to polarised light splitter also departs from 45 ° sometimes, and this moment, the energy loss of laser increased, but general angle adjustment is small, thereby energy loss also is small.In addition, owing to also can compensate, utilize the optical axis adjustment to improve machining accuracy so preferably pay the utmost attention to the output of laser oscillator.
The polarised light splitter etc. that apparatus is had an above-mentioned guiding mechanism describes the adjustment of optical axis below.
When the angle adjustment of the speculum 4z that implements first polarised light splitter, 5 tight fronts, laser 10,11 moves to identical direction on the second automatically controlled scanning reflection mirror 13.Therefore, adjust the order of direction as optical axis, must be at first used the optical axis adjustment of the laser 10 of the speculum 4z of two laser effects finished after, implement the optical axis adjustment of laser 11.In addition, if finish an optical axis adjustment, then pass through the angle adjustment of the speculum 4z of enforcement first polarised light splitter 5 tight fronts, under the situation that can remain unchanged in the relativeness of the bundle of two on the second automatically controlled scanning reflection mirror 12 laser, carry out the optical axis adjustment of laser 10,11, thereby be used for accurately the two optical axis adjustment of restrainting the center of the laser guides second automatically controlled scanning reflection mirror 12 being become easy.
Embodiment 3.
Fig. 3 relates to embodiments of the present invention 3, for being expressed as follows the structure chart of structure, promptly, the beam of laser beam split is being become two bundle laser, by independent scanning two bundle laser, the punching that can implement simultaneously at two positions to process is with in the laser processing device, has the optical system of carrying out mask replication, particularly will be configured in one group of optics with identical substantially surface configuration of mask back, be speculum 4a, 4b or 14a, 14b, with the beam incident surface of a speculum beam incident surface perpendicular to another speculum, and dispose (for example will dispose to Y direction reflection way with another speculum then from the laser of directions X incident to the reflection of Z direction) with the mode of beam incident angle identical (for example being 45 °) with a speculum to another speculum to the beam incident angle of a speculum.
In Fig. 3,4a, 4b are used for the surface configuration substantially identical speculum of laser 2 from mask 3 guiding first polarised light splitter 5, and 14a, 14b are the identical substantially speculums of surface configuration that is used for from first polarised light splitter, 5 guiding, second polarised light splitter 8.
Present embodiment 3 is identical with embodiment 1 about polarised light splitter, but because the configuration or the surface configuration difference of speculum 4,14, so with Fig. 4 the configuration as the optics of feature of the present invention is described.
In Fig. 4, Pru (α), Prv (α) are and incident beam with beam incident angle α incident the be reflected relevant u direction of the folded light beam of mirroring, the refractivity of v direction.Ptu (α), Ptv (α) be with the relevant u direction of the transmitted beam of the incident beam penetration mirror of beam incident angle α incident, the refractivity of v direction.Here, u direction is perpendicular to the direction of advance of each light beam, and with the parallel direction of beam incident surface (face that forms by incident beam and folded light beam), the v direction is perpendicular to the direction of advance of each light beam, and the direction vertical with beam incident surface.
Here, refractivity (Power) is one of the parameter of the refraction performance of expression optics, the state of expression plane of refraction, and general and surface curvature radius R is inversely proportional to, and is directly proportional with refractive index.In Fig. 4, if the surface curvature radius R is evenly distributed with concentric circles, and with respect to optical system enough big (when making the surface configuration of optics be general plane), establishing refractive index is n, and then refractivity Pru (α), Prv (α) provide with following formula.
P ru ( α ) = 2 cos α 1 R - - - ( 2 )
P rv ( α ) = 2 cos α 1 R - - - ( 3 )
Generally, make even optics is the plane with the surface configuration, also distortion can be arranged slightly in manufacturing process, general machining accuracy is about λ/10～λ/20, for surface configuration being carried out fine finishining, need a lot of time and cost with the precision higher than λ/20.Therefore we can say that general optics has the surface curvature radius R about λ/10～λ/20.For example under the situation of the polarised light splitter of having implemented 45 ° of beam incident angles that the dielectric multilayer film applies on the ZnSe (n=2.41), obtain following formula respectively by (2), (3) formula.
Figure G2004800107713D00131
From (4), (5) formula as can be seen, with 45 ° of reflex times of beam incident angle, u direction is bigger than the refractivity of v direction.Because if the difference of the refractivity of this u direction and v direction is delivered on the processing stand, just become astigmatism, so might be difficult to obtain stable crudy.
Relative therewith, in the present invention, when constituting optical system, one group of optics that surface configuration in a plurality of opticses is identical substantially, with the beam incident surface of an optics beam incident surface perpendicular to another optics, and to the beam incident angle of an optics with dispose to the identical mode of the beam incident angle of another optics.
Use speculum 14a, 14b description architecture here.In Fig. 5, speculum 14a is disposing to Z direction reflection way from the laser of directions X incident, and speculum 14b disposes to the mode of Y direction emission with the mirror 14a laser light reflected that will be reflected.In addition, the mirror surface radius of curvature of establishing speculum 14a is Ra, and the mirror surface radius of curvature of establishing speculum 14b is Rb.If the refractivity of the u direction of speculum 14a is Paru (45 °), the refractivity of v direction is Parv (45 °), the refractivity of the u direction of speculum 14b is Pbru (45 °), the refractivity of v direction is Pbrv (45 °), and is then as described below by the refractivity Prv by the refractivity Pru of the synthetic u direction of speculum 14a and speculum 14b and v direction of speculum 14b laser light reflected.
Figure G2004800107713D00134
Here, because speculum 14a is identical substantially surface configuration with speculum 14b, so Above-mentioned Pru and Prv equate substantially, like this, eliminated refractivity poor of u direction and v direction, and its result can reduce the astigmatism on processing stand, thereby can obtain stable crudy.For speculum 4a, speculum 4b,, can obtain identical effect because also be identical structure.
Above-mentioned is ° to study with α=45, and the situation of general angle is as described below.
P ru = P arv ( α ) + P bru ( α ) = 2 cos α 1 R a + 2 cos α 1 R b - - - ( 8 )
P rv = P aru ( α ) + P brv ( α ) = 2 cos α 1 R a + 2 cos α 1 R b - - - ( 9 )
Figure G2004800107713D00144
Situation under, from (8), (9) formula as can be seen, Pru and Prv equate substantially, eliminated refractivity poor of u direction and v direction like this, and be identical during with α=45 °, can reduce the astigmatism on processing stand, can access stable crudy.
; the carrier member of fixed optics parts is the structure with directionality; change and produce under the situation of astigmatism along this directionality at the surface curvature radius that is supported on the speculum on this carriage; one group of speculum that is supported on the above-mentioned carriage is disposed in the following manner: make the directionality of carriage consistent on identical direction with respect to each plane of incidence; simultaneously the beam incident surface of an optics is perpendicular to the beam incident surface of another optics, and identical with beam incident angle to another optics to the beam incident angle of an optics.
Fig. 6 represents an example.In Fig. 6, the first optics 37a is the identical optics of surface configuration with the second optics 37b, and the first carrier member 38a and the second carrier member 38b are identical shaped optic stationary parts.The axis of orientation that A, B represent carrier member respectively and had, when the optics with speculum etc. was installed on this carriage, the radius of curvature of mirror surface was RA on the A direction, is RB on the B direction.
As shown in Figure 6, with the first optics 37a and the second optics 37b, with the beam incident surface of the first optics 37a beam incident surface perpendicular to the second optics 37b, and dispose with the mode of beam incident angle identical (for example 45 °) to the second optics 37b to the beam incident angle of the first optics 37a, for the directionality that makes carrier member is consistent the A direction is parallel under the situation of the plane of incidence, the u direction of the second optics 37b reflex time, refractivity Pru, the Prv of v direction are as follows.
Figure G2004800107713D00151
Figure G2004800107713D00152
From (10), (11) formula as can be seen, Pru and Prv equate, can eliminate the astigmatism that carriage with directionality causes.Like this, the astigmatism on processing stand can be reduced, stable crudy can be accessed.From as can be seen above-mentioned, also can eliminate astigmatism in the time of beyond incidence angle is 45 °.
In addition, can use cheap carrier member, have the effect that reduces the processing unit (plant) cost with directionality.
In addition, in the present embodiment, in the optical system of carrying out mask replication, a plurality of opticses that are configured in the mask back are illustrated.This is because in mask replication, mainly is that the aberration of optics of mask back is influential to the beam quality on the processing stand.In addition much less, also be configured, also produce effect with same consideration method by a plurality of opticses to the mask front.
In addition, be not only the optical system of carrying out mask replication,, also have the effect that reduces optical aberration by carrying out the configuration of optics with same consideration method.
Embodiment 4.
Fig. 7 relates to embodiments of the present invention 4, for representing the structure chart of following punching with laser processing device, promptly, use the surface as convex, the back side as the polarised light splitter of spill as first polarized-light separation device, use the surface as spill, the back side as the polarised light splitter of convex as second polarized-light separation device, the beam of laser beam split is become two bundle laser,, can process simultaneously at two positions by independent scanning two bundle laser.
In Fig. 7,22 is that the surface is the polarised light splitter (with reference to Fig. 8 (a)) of spill for convex, the back side; 23 is that the surface is the polarised light splitter (with reference to Fig. 8 (b)) of convex for spill, the back side.Here, because separately surface configuration is by the shape decision as the grinder of manufacturing machine, so, can select spill or convex to make with the flatness of the machining accuracy of hope by the control manufacture method.
Present embodiment 4, the structure of the surface configuration of polarised light splitter is different with embodiment 1, thereby the shape as the polarised light splitter of feature of the present invention is described.
In Fig. 4, Ptu (α), Ptv (α) are the u direction relevant with the transmitted beam that sees through optics with the incident beam of beam incident angle α incident, the refractivity of v direction, when the surface curvature radius R is evenly distributed with concentric circles, and with respect to optical system enough big when being roughly the plane (surface configuration that makes optics for), if refractive index is n, then refractivity Ptu (α), Ptv (α) provide with following formula.
P tu ( α ) = n 2 - sin 2 α - cos α cos 2 α 1 R - - - ( 12 )
P tv ( α ) = ( n 2 - sin 2 α - cos α ) 1 R - - - ( 13 )
For example under the situation of the polarised light splitter of having implemented 45 ° of beam incident angles that the dielectric multilayer film applies on the ZnSe (n=2.41), obtain following formula respectively by (12), (13) formula.
Figure G2004800107713D00164
From (4), (5), (14), (15) formula as can be seen, under the situation of 45 ° of beam incident angles, not only at reflex time, also the refractivity than v direction is big for u direction when seeing through.Because when the difference of the refractivity of this u direction and v direction is delivered on the processing stand, just become astigmatism, so might be difficult to obtain stable crudy.
Refractivity when being conceived to the seeing through of polarised light splitter here.Refractivity when seeing through is the refractivity that adds the back side on the refractivity on polarised light splitter surface.That is to say that by (14), (15) formula, the subscript with 1,2 is presentation surface, the back side respectively, the u direction when seeing through, refractivity Ptua (45 °), the Ptva (45 °) of v direction become following formula.
Figure G2004800107713D00172
Therefore, shown in Fig. 8 (a), when the surface be convex (R1＞0), when the back side is spill (R2＜0) because the surface and the refractivity at the back side offsets, thus through the time refractivity diminish.Its result is because the difference of the refractivity of u direction and v direction diminishes, so have the effect that reduces astigmatism.
In addition, because when the surface shown in Fig. 8 (b) be spill (R1＜0), when the back side is convex (R2＞0) too, offset with the refractivity at the back side on the surface, so the refractivity when seeing through diminishes, its result, because the difference of the refractivity of u direction and v direction diminishes, so have the effect that reduces astigmatism.
Because the surface configuration of the polarised light splitter among the present invention must make the absolute value of the surface and the radius of curvature at the back side identical,, preferably be less than or equal to λ/20 so hope makes machining accuracy better than general.
Optimum shape to first polarised light splitter in the whole optical system and second polarised light splitter describes below.
Identical with the argumentation of the refractivity of front, also refractivity addition in whole optical system with each optics, so consequently determining aberration is greatly or little., for in the optical system of Fig. 7, use from the optics first polarised light splitter, 22 to second polarised light splitters 23, will divide to come through the light path B of the light path A of the laser 6 of first polarised light splitter and laser light reflected 7 to describe.
In light path A, see through the laser 6 of first polarised light splitter 22, be reflected mirror 14a and 14b second polarised light splitter 23 that leads.Because speculum 14a and 14b ratio are easier to make, be speculum about λ/10～λ/20 so can obtain accurately machined flatness precision.But, as follows, because there is the tendency that becomes poor in the flatness of automatically controlled scanning reflection mirror, so preferably carry out fine finishining with the precision about λ/15～λ/20.
Relative therewith, in light path B,, be positioned by the first automatically controlled scanning reflection mirror 13a and 13b by first polarised light splitter, 22 laser light reflected 7, second polarised light splitter 23 leads.The first automatically controlled scanning reflection mirror 13a and 13b must be very light for high speed motion, in addition, as illustrating with (1) formula, because necessary increased area for crudy is worsened, so become the shape of Bao Erkuan, very difficult on making, accurately machined flatness is compared with above-mentioned speculum, the tendency that very strong variation is arranged is for about λ/10～λ/15.In addition, as surface configuration, relying on manufacturing machine more, for example is bigger spill.
If different with each flatness among the light path B at light path A, then the refractivity of addition might produce difference.The difference of this refractivity might become the difference of focus of light path A and light path.
In the present invention, in the surface configuration of the first automatically controlled scanning reflection mirror 13a and 13b is under the situation of bigger spill, the surface configuration that makes first polarised light splitter 22 is that convex, the back side are shaped as spill, and the surface configuration that makes second polarised light splitter 23 is that spill, the back side are shaped as convex.
Utilize such structure, in light path A, when seeing through first polarised light splitter 22, produce refractivity hardly, on speculum 14a and the 14b because of surface configuration slightly concavity have refractivity on the pack direction a little, be directed to second polarised light splitter 23, at the reflex time of second polarised light splitter 23, because of surface configuration slightly concavity add refractivity a little in the pack direction.Its result becomes the laser that the pack direction has refractivity a little.
Relative therewith, on light path B, first polarised light splitter, 22 reflex times are being dispersed the refractivity of direction because of the convex on surface has a little, are directed to first automatically controlled scanning reflection mirror 13a and the 13b.Because the first automatically controlled scanning reflection mirror 13a and 13b are bigger spills, so be coupled with the refractivity of strong pack direction, its result has the laser 7 in the refractivity of pack direction a little, sees through second polarised light splitter 23 with identical substantially refractivity.
In above-mentioned, the surface configuration that makes speculum 14a and 14b is concavity slightly, but under the situation that becomes convex slightly, also be when the surface configuration that makes the first automatically controlled scanning reflection mirror 13a and 13b becomes big spill, the surface configuration that makes first polarised light splitter 22 is that convex, the back side are shaped as spill, the surface configuration that makes second polarised light splitter 23 is that spill, the back side are shaped as convex, the refractivity by can reducing light path A and light path B like this poor.But, since make speculum 14a and 14b the dished slightly situation of surface configuration its reduce difference effective of refractivity, so preferred spill.
As mentioned above, by the present invention, the aberration composition that each optics has is eliminated in optical system, and its result has the effect of little optical system such as the optical aberration that can obtain astigmatism and difference of focus etc.
In addition, in the present embodiment, making the surface is convex, the back side is that the polarised light splitter of spill is a spill as first polarized-light separation device and surface, making the surface is spill, the back side is that the polarised light splitter of convex is as second polarized-light separation device, but at the first automatically controlled scanning reflection mirror 13a and 13b is under the situation of big convex, if adopt and above-mentioned opposite configuration, promptly, making the surface is spill, the back side is that the polarised light splitter of convex is as first polarized-light separation device, making the surface is convex, the back side be the polarised light splitter of spill as second polarized-light separation device, the aberration composition that each optics is had is eliminated in optical system.
From above-mentioned explanation as can be seen, according to the difference of optical system or the optics that uses in optical system, the optimum value of shape and flatness is different, and this is self-evident.
In addition, in the present embodiment, be conceived to the shape of first, second polarized-light separation device, but from above-mentioned explanation also as can be seen, in other opticses, also optimum value arranged certainly by same consideration method.
In addition, more than embodiment be divided into 1,2,3 be illustrated, but they can certainly be made up.
Industrial practicality
The laser processing device that the present invention relates to is applicable to the beam of laser light splitting being become two bundles or the laser more than two bundles, carries out in the situation of Laser Processing at two or more positions simultaneously, reduces difficulty and cost on making, and improves crudy.

Claims (12)

1. laser processing device; Has the optical system that a plurality of opticses by the laser guide machined object that laser oscillator is penetrated consist of; Utilize first polarized-light separation device that the beam of laser light splitting is become two bundle laser; Make the beam of laser of this two bundle in laser second polarized-light separation device that leads via speculum; Another Shu Jiguang utilizes the first automatically controlled scanning reflection mirror two direction of principal axis scannings and second polarized-light separation device that leads; Utilize the second automatically controlled scanning reflection mirror to scan to this two bundles laser subsequently; The processing machined object; It is characterized in that
The plane of incidence of above-mentioned first and second polarized-light separation devices is configured to respectively at 45 with respect to the optical axis of the laser of the plane of incidence that is incident to above-mentioned first and second polarized-light separation devices.
2. laser processing device according to claim 1 is characterized in that,
Above-mentioned first and second polarized-light separation devices are to form the polarised light splitter that the dielectric multilayer film applies on the surface.
3. laser processing device according to claim 1 is characterized in that,
Above-mentioned first and second polarized-light separation devices, one side is a spill, another side is a convex.
4. laser processing device according to claim 3 is characterized in that,
Above-mentioned first polarized-light separation device, the surface of reflector laser one side is a convex, the surface of opposite side is a spill,
In this first polarized-light separation device, be the above-mentioned first automatically controlled scanning reflection mirror of spill with the laser guide surface configuration that is reflected,
Above-mentioned second polarized-light separation device, the surface of reflector laser one side is a spill, the surface of opposite side is a convex.
5. laser processing device according to claim 3 is characterized in that,
Above-mentioned first polarized-light separation device, the surface of reflector laser one side is a spill, the surface of opposite side is a convex,
In this first polarized-light separation device, be the above-mentioned first automatically controlled scanning reflection mirror of convex with the laser guide surface configuration that is reflected,
Above-mentioned second polarized-light separation device, the surface of reflector laser one side is a convex, the surface of opposite side is a spill.
6. laser processing device according to claim 3 is characterized in that,
Establishing under the situation that above-mentioned Wavelength of Laser is λ, the recessed or convex on the surface of aforementioned first and second polarized-light separation devices forms with the precision that is less than or equal to λ/20.
7. according to each described laser processing device in the claim 1 to 6, it is characterized in that,
In above-mentioned optical system, dispose the one group of identical substantially optics of shape that carries out interactional surface with laser in the following manner, promptly, the beam incident surface of an optics is perpendicular to the beam incident surface of another optics, and identical with beam incident angle to another optics to the beam incident angle of an optics.
8. laser processing device according to claim 7 is characterized in that,
The laser optical path till the laser that penetrates from above-mentioned laser oscillator arrives above-mentioned first polarized-light separation device mask is set,
The above-mentioned one group of optics of configuration between this mask and above-mentioned machined object.
9. laser processing device according to claim 7 is characterized in that,
Have the carriage of fixing above-mentioned one group of optics respectively,
Under the directive situation of above-mentioned carriage, this direction is configured to be positioned at equidirectional with respect to the plane of incidence of separately optics.
10. laser processing device according to claim 7 is characterized in that,
Establishing under the situation that above-mentioned Wavelength of Laser is λ, the surface configuration of above-mentioned one group of optics forms with the precision of λ/10～λ/20.
11. laser processing device according to claim 1 is characterized in that,
Above-mentioned first and second polarized-light separation devices have the transmission direction perpendicular to laser, and can adjust the mechanism of angle on two mutually orthogonal direction of principal axis.
12. laser processing device according to claim 1 is characterized in that,
Have damper, it is used to absorb the laser that becomes energy loss that leaks from above-mentioned second polarized-light separation device.
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