CN1775526A - Liquid droplet ejecting device - Google Patents
Liquid droplet ejecting device Download PDFInfo
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- CN1775526A CN1775526A CN 200510128657 CN200510128657A CN1775526A CN 1775526 A CN1775526 A CN 1775526A CN 200510128657 CN200510128657 CN 200510128657 CN 200510128657 A CN200510128657 A CN 200510128657A CN 1775526 A CN1775526 A CN 1775526A
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Abstract
The invention provides a droplet ejection method for ejecting droplets to a workpiece, which comprises a head unit disposition procedure for deploying a head unit, wherein, the head unit comprises a droplet ejection head and a control device corresponding to the electrical property of the droplet ejection head, and a driving procedure for providing a driving signal for the droplet ejection head through the control device arranged on the head unit which is deployed in the head unit disposition procedure, so as to lead the droplet to be ejected.
Description
The application is that application number is 03156733.9, and the applying date is on September 8th, 2003, and denomination of invention is divided an application for " droplet ejection apparatus and method, film formation device and method, device making method ".
Technical field
The present invention relates to by droplet ejection apparatus and method, film formation device and film build method, device making method and the electronic instrument of droplet jetting head to workpiece such as substrate ejection functional liquid.
Background technology
The droplet ejection apparatus that can carry out the ink-jet printer etc. of colored printing is provided with a plurality of droplet jetting heads on balladeur train, import versicolor ink (drop) at each droplet jetting head.In the droplet ejection apparatus of this structure, by according to print data each stature independently being driven, colour print is carried out in the ejection of control shades of colour drop.Like this, though designed the droplet ejection apparatus with a plurality of droplet jetting heads, set droplet jetting head has same specification in the droplet ejection apparatus of this structure.About the concrete structure of droplet ejection apparatus with a plurality of droplet jetting heads, for example can be with reference to following patent documentation 1.
Patent documentation 1: the spy opens 2001-277658
But the corresponding different workpiece that becomes functional liquid ejection object in order to form multiple functional membrane, needs to spray the different multiple functional liquid of viscosity sometimes.For example, apply chromosome on the check body on the sample at microscope, with covering material with its sealing and fixing, thereby can make the microscope sample that has saved cover glass.In this technology, need hang down the ejection of viscosity check body coloring agent (functional liquid) and the ejection of high viscosity covering material (functional liquid) simultaneously by droplet jetting head.
When the low viscosity check of ejection body coloring agent and during ejection high viscosity covering material, need to use the different function liquid droplet ejection head of specification., say simply for this reason, perhaps use 2 droplet ejection apparatus that dispose the droplet jetting head of different size respectively, perhaps use 1 can suitably change the droplet jetting head droplet ejection apparatus of (comprising the functional liquid feed system).
But, if use the former droplet jetting head, then need the time of workpiece handling to other droplet ejection apparatus, if use the latter's droplet ejection apparatus, then need to change the replacing time of droplet jetting head etc., therefore, on the whole, make the very complexity that becomes is handled in the drop ejection of each workpiece.In order to solve the above problems a little, then wish to be formed in the droplet jetting head that different size is set in 1 droplet ejection apparatus, further therefore the structure of simplification device, it is desirable to adopt the structure with compatible droplet jetting head drive circuit.
In the drive circuit of droplet jetting head, be provided with the fictitious load circuit that descends for the print quality that prevents to cause because of parasitic capacitance etc.Though the optimum value of this fictitious load is according to the specification of different heads and difference, but, use compatible drive circuit to drive the different droplet jetting head of specification as described above if exist, then can not set best fictitious load value, therefore the problem that causes print quality to descend at the kind of different heads.
Summary of the invention
The present invention proposes in order to solve the above problems, its objective is, a kind of droplet ejection apparatus and method, film formation device and method, device making method and electronic instrument that can not cause print quality to descend, can spray multiple functional liquid drop, can carry out the workpiece processing efficiently is provided.
In order to solve the above problems, the present invention's 1 droplet ejection apparatus is a kind of droplet ejection apparatus to workpiece ejection drop, it is characterized in that: comprising: multiple droplet jetting head; Have a plurality of control device that are used to suppress to apply with the circuit of the vibration of the drive waveforms of described droplet jetting head; The kind of corresponding described drop from described droplet jetting head ejection is selected one of them selecting arrangement of described a plurality of described control device, by by the selected described control device of described selecting arrangement described drive waveforms being put on described droplet jetting head.
According to the present invention, because the kind device for selection controlling of the drop of corresponding ejection, apply drive waveforms by selected control device to droplet jetting head, so, the corresponding droplet jetting head that drives is selected the circuit of the best of the vibration that is used to suppress drive waveforms, can not cause the decline of print quality, and can realize the diversified drop ejection of various functional liquids.In addition, owing to do not need to change the operation of droplet jetting head, handle thereby can carry out high efficiency workpiece.
Here, it is desirable to, described selecting arrangement has a plurality of electric switches that are connected with described droplet jetting head with described control device, by switching the connection status of this electric switch, select a plurality of described control device that is connected with described droplet jetting head one of them.
And described selecting arrangement preferably has a plurality of mechanical switch of the status of electrically connecting of switching and described control device and described droplet jetting head.
And described electric switch is analog switch preferably, the toggle switch that described mechanical switch is preferably operated by the user.
And the another feature of 1 droplet ejection apparatus according to the present invention is: have: the balladeur train that disposes described multiple droplet jetting head; Respectively to the functional liquid feed mechanism of described multiple droplet jetting head functions of physical supply liquid; Make described multiple droplet jetting head relative to travel mechanism that described workpiece moves by described balladeur train; Synchronously control the driving control device that the some ejection of described droplet jetting head drives with described travel mechanism.
In order to solve the above problems, the present invention's 2 droplet ejection apparatus is a kind of droplet ejection apparatus to workpiece ejection drop, it is characterized in that: comprising: have the mutually different droplet jetting head of each specification, and the head unit with removable structure; The drive unit that described droplet jetting head on the head unit that disposes being set at drives, each described head unit comprise a plurality of control device of the circuit of the vibration with the drive waveforms that is used to suppress the electrical characteristics of the set described droplet jetting head of correspondence and selects.
According to the present invention, owing to the circuit of the vibration that is suppressed the drive waveforms that corresponding droplet jetting head selects by droplet jetting head and being used to constitutes head unit, and can change this head unit to drive unit, so, only need to change (installation) head unit, just finish droplet jetting head and be used to suppress the circuit of vibration and being connected of drive unit of drive waveforms, thereby, the drop ejection of print quality can be guaranteed.And, even have the head unit of the mutually different droplet jetting head of each characteristic, owing to also can be connected with same drive unit, so can reduce the cost of device.
Here, in 1 and the present invention's of the present invention 2 droplet ejection apparatus, described control device preferably includes resistance components and capacitive component.
In order to solve the above problems, the present invention's 1 droplet discharge method, be a kind of droplet discharge method to workpiece ejection drop, it is characterized in that: comprising: the head of selecting the droplet jetting head that should drive from the mutually different a plurality of droplet jetting heads of specification is selected operation; The kind of corresponding described drop from described droplet jetting head ejection selects some control device to select operation from a plurality of control device of the circuit of vibration with the drive waveforms that is used for suppressing putting on described droplet jetting head; By select the selected control device of operation to drive signal by described control device, make it spray the driving operation of described drop to selecting the selected droplet jetting head of operation to supply with by described head.
In order to solve the above problems, the present invention's 2 droplet discharge method, to workpiece ejection drop, comprising: head unit arrangement step, configured head unit, this head unit have droplet jetting head and the control device corresponding with the electrical characteristics of this droplet jetting head; Drive operation, drive signal, make above-mentioned drop ejection by supplying with to above-mentioned droplet jetting head at the above-mentioned control device that head unit had of above-mentioned head unit arrangement step configuration.
Film formation device of the present invention is characterized in that: have any one above-mentioned droplet ejection apparatus.
Film build method of the present invention is characterized in that: comprise and use above-mentioned any droplet ejection apparatus or above-mentioned any droplet discharge method, spray drop, carry out the operation of film forming.
Device making method of the present invention, it is a kind of device making method that on the position of regulation, forms workpiece that has with functional figure, it is characterized in that: be included on the regulation position of described workpiece, use above-mentioned any droplet ejection apparatus or above-mentioned any droplet discharge method, the ejection drop, the operation of the described figure of formation on described workpiece.
Electronic instrument of the present invention is by using above-mentioned any droplet ejection apparatus or above-mentioned any droplet discharge method manufacturing to form.
Description of drawings
Fig. 1 is the block diagram that the summary of the droplet ejection apparatus of the expression embodiment of the invention 1 constitutes.
Fig. 2 is the figure of formation of the head unit 6 of the droplet ejection apparatus of expression with embodiment of the invention 1.
Fig. 3 is the figure of the 1st processing substrate example of the expression droplet ejection apparatus that uses the embodiment of the invention 1.
Fig. 4 is the figure of the 2nd processing substrate example of the expression droplet ejection apparatus that uses the embodiment of the invention 1.
Fig. 5 is the figure that expression has the circuit structure of the head driver of droplet ejection apparatus of the embodiment of the invention 1 and droplet jetting head.
Fig. 6 is the figure that expression has the circuit structure of the head driver of droplet ejection apparatus of the embodiment of the invention 2 and droplet jetting head.
Fig. 7 is the figure that expression has the circuit structure of the head driver of droplet ejection apparatus of the embodiment of the invention 3 and droplet jetting head.
Fig. 8 is the key diagram that the microlens array that the light internal connector device of droplet ejection apparatus manufacturing of the present invention uses is used in explanation.
Fig. 9 is the key diagram that the microlens array that the light internal connector device of droplet ejection apparatus manufacturing of the present invention uses is used in explanation.
Figure 10 is the profile that schematically illustrates the structure of the liquid-crystal apparatus that has used the color filter substrate that uses droplet ejection apparatus manufacturing of the present invention.
Figure 11 A and Figure 11 B are the key diagrams that is illustrated in the configuration status of all kinds on the color filter substrate.
Figure 12 is the profile of an example of the formation of expression organic El device.
Figure 13 is the exploded perspective view of a part of the formation of expression plasma type display unit.
Figure 14 A～14C is the figure of formation that expression has the electric field transmitted display (FED) of electric field transmitted element.
The specific embodiment
Below, with reference to accompanying drawing, droplet ejection apparatus and method, film formation device and film build method, device making method and the electronic instrument of embodiments of the invention is described in detail.
(embodiment 1)
Fig. 1 is the block diagram that the summary of the droplet ejection apparatus of the expression embodiment of the invention 1 constitutes.As shown in Figure 1, the droplet ejection apparatus 1 of present embodiment has X-axis travelling carriage 3 and the Y-axis travelling carriage 4 as travel mechanism that is arranged on the support 2.The main carriage 5 that moves freely is installed on X-axis travelling carriage 3, and this main carriage 5 is provided with head unit 6.In addition, though will be described in detail below, on head unit 6, dispose different multiple (the being 3 kinds in the present embodiment) droplet jetting head 8 (8a, 8b, 8c) of specification by secondary balladeur train 7.In addition, the substrate W as workpiece is configured on the Y-axis travelling carriage 4.
In addition, droplet ejection apparatus 1 has the functional liquid supply apparatus 9 as the function liquid droplet feedway that functional liquid is supplied to multiple droplet jetting head 8 each stature, and has and be used for control device 10 that the driving of X-axis travelling carriage 3 and Y-axis travelling carriage 4 and multiple droplet jetting head 8 etc. is controlled.This control device 10 is connected with personal computer 11 for the ejection graph data that generates multiple droplet jetting head 8.
In addition, though not shown in Fig. 1, droplet ejection apparatus 1 have acceptable solution droplet ejection head 8 periodic flushing (giving up the ejection functional liquid) from whole nozzles flushing unit, the cleaning unit that the nozzle face of droplet jetting head 8 is cleaned and the functional liquid that carries out droplet jetting head 8 absorbs and the cleaning unit of keeping etc.
X-axis travelling carriage 3 has the driving system of the X-direction that comprises motor 12, is made of the X-axis slide block 13 of motor 12 drivings, moves thereon and disposes main carriage 5 freely.In addition, Y-axis travelling carriage 4 has the X-axis slide block 15 that comprises motor 14, driven by motor 14 and the driving system of the Y direction that constitutes, and moves thereon and disposes the loading stage 16 that is made of absorptive table etc. freely.And, on loading stage 16, substrate W is held in the state that is positioned.
The droplet ejection apparatus 1 of present embodiment has constituted the structure that synchronously drives (the optionally ejection of function liquid droplet) each droplet jetting head 8 that moves with the droplet jetting head 8 of driving by X-axis travelling carriage 3.That is, the so-called main scanning of droplet jetting head 8 is to carry out reciprocal motion on the directions X of X-axis travelling carriage 3.And corresponding with it, so-called subscan is by Y-axis travelling carriage 4 substrate W to be moved back and forth on Y direction.And the driving of each droplet jetting head 8 that carries out with above-mentioned scan-synchronized is to carry out according to the ejection graph data that is made by above-mentioned personal computer 11.
Functional liquid supply apparatus 9 has and each droplet jetting head 8 corresponding 3 kinds of secondary ink cartridges 17 (17a, 17b, 17c), 3 kinds of main ink cartridges that are connected with secondary ink cartridge 17 and the pressure fluid conveying device (all not shown) that the functional liquid of each main ink cartridge is transported to corresponding secondary ink cartridge 17.The functional liquid of each main ink cartridge is transported to corresponding the 1st secondary ink cartridge 17a, the 2nd secondary ink cartridge 17b, the 3rd secondary ink cartridge 17c by pressure respectively.The functional liquid of being extruded by pressure in each secondary ink cartridge 17 under the pumping action of each droplet jetting head 8 of correspondence, is transported to each droplet jetting head 8 respectively.In addition, though omitted diagram, above-mentioned pressure fluid conveying device also is subjected to the control of above-mentioned control device 10.
Below, the structure of the head unit 6 of the droplet ejection apparatus with present embodiment is described.Fig. 2 is the figure of formation of the head unit 6 of the droplet ejection apparatus of expression with embodiment of the invention 1.As shown in Figure 2, head unit 6 has and comprises secondary balladeur train 9 that the slab by stainless steel etc. constitutes and by the structure of the 3 kind droplet jetting heads 8 of positioning and fixing on secondary balladeur train 9 accurately.
As shown in Figure 2, droplet jetting head 8 is made of the 1st ejecting head 8a, the 1st ejecting head 8b and the 3rd ejecting head 8c.If being set in the nozzle of each outermost end position of the 1st ejecting head 8a～the 3rd ejecting head 8c is benchmark nozzle N1～N3, then, the nozzle that is arranged in the 1st ejecting head 8a～the 3rd ejecting head 8c is configured to by permutation benchmark nozzle N1～N3 is arranged on the chain-dotted line L parallel with main scanning direction (directions X).And, the centre position of the secondary balladeur train 9 on the directions X on the both ends on the Y direction, be provided with a pair of location reference pins P1, P2.
Above-mentioned benchmark nozzle N1～N3 is used to the compensation (compensation of ejection graph data) of the eject position between two nozzle rows of the 1st ejecting head 8a for example or as the location benchmark of the 1st ejecting head 8a, the 2nd ejecting head 8b and the 3rd ejecting head 8c eject position compensation each other etc.In addition, when being fixed on each ejecting head 8a, 8b, 8c on the secondary balladeur train 9, also benchmark nozzle N1～N3 is positioned as benchmark.In addition, above-mentioned a pair of reference pins P1, P2 is used to the location benchmark as head unit 6.
Its specification of 3 kinds of above-mentioned droplet jetting heads 8 (the 1st ejecting head 8a～the 3rd ejecting head 8c) is different.For example, the 1st ejecting head 8a has the specification that 2 row are arranged the nozzle rows that is provided with 180 nozzles, and the 2nd ejecting head 8b has the specification that 3 row are arranged the nozzle rows that is provided with 96 nozzles, and the 3rd ejecting head 8c has the specification that 1 row are arranged the nozzle rows that is provided with 3 nozzles.
Like this, why be equipped with the droplet jetting head 8 of a plurality of different sizes, be for for example with different types of drop, change its drop amount (weight, volume) and be ejected on the substrate W.
Below, the processing substrate of having used droplet ejection apparatus is described.Fig. 3 is the figure of the 1st processing substrate example of the expression droplet ejection apparatus that uses the embodiment of the invention 1.
As shown in Figure 3, when each recess K1 of the substrate W of the workpiece that has been set from the rectangular drawing area R1 that is formed with embankment B1 to conduct sprays volatile the 1st functional liquid D1, spray the 2nd functional liquid D2 that overlay film is used to all drawing area R1, the 1st functional liquid D1 among each recess K1 is sealed, and under the injection condition of poor that the 1st functional liquid D1 and the 2nd functional liquid D2 have taken place, as defective products, can on marked region R2, use the 3rd functional liquid D3 to draw the bad mark of expression.
In this case, for example above-mentioned volatility the 1st functional liquid D1 is imported the 1st ejecting head 8a, overlay film is imported the 2nd ejecting head 8b with the 2nd functional liquid D2, mark is imported the 3rd ejecting head 8c with the 3rd functional liquid D3, the limit changes the relative position between substrate W and the droplet jetting head 8, and the limit sprays drop from the 1st ejecting head 8a～the 3rd ejecting head 8c.In addition, the 1st functional liquid D1 uses the lower functional liquid of ratio of viscosities, and the 2nd functional liquid D2 uses the higher functional liquid of ratio of viscosities, and the 3rd functional liquid D3 that mark is used uses the functional liquid that has with the basic identical viscosity of the 2nd functional liquid D2.
Fig. 4 is the figure of the 2nd processing substrate example of the expression droplet ejection apparatus that uses the embodiment of the invention 1.As shown in Figure 4, when each recess K1 of the substrate W of the workpiece that has been set from the rectangular drawing area R1 that is formed with embankment B1 to conduct sequentially sprays A functional liquid (luminous agent) D11 and B functional liquid (curing agent) that becomes 2 types lighting function liquid (or color filter function liquid of chromatic color filter), go up the situation of using the 3rd functional liquid D3 to draw the bad mark of expression with the above-mentioned marked region R2 that similarly can exist in.
In this case, for example A functional liquid D11 is imported the 1st ejecting head 8a, B functional liquid D12 is imported the 2nd ejecting head 8b, the 3rd functional liquid D3 is imported the 3rd ejecting head, the limit changes the relative position between substrate W and the droplet jetting head 8, and the limit sprays drop from the 1st ejecting head 8a～the 3rd ejecting head 8c.Like this, by possessing a plurality of droplet jetting heads, can point-like spray small different types of drop accurately, therefore, as long as in functional liquid (ejection object liquid), use special ink, photism or photosensitive resin, just can be applicable in the manufacturing field of various components and parts.
In addition, in Fig. 3 and processing substrate example shown in Figure 4, consider the 1st functional liquid D1～kind of the 3rd functional liquid D3 and the mode of ejection thereof, adopted the function liquid droplet spray volume of unit nozzles of the 1st ejecting head 8a few, the function liquid droplet spray volume of the unit nozzles of the 2nd ejecting head 8b is many, the profuse specification of function liquid droplet spray volume of the unit nozzles of the 3rd ejecting head 8c.
Return Fig. 1 again, control device 10 has control part 18, head driver 19, X-axis motor driver 20 and y-axis motor driver 21, and each device in the droplet ejection apparatus 1 is unified control.Control part 18 is connected with personal computer 11, and response is from the control instruction of personal computer 11 outputs, driving head driver 19, X-axis motor driver 20 and y-axis motor driver 21.Head driver 19 drives droplet jetting head 8 (the 1st ejecting head 8a～the 3rd ejecting head 8c).
Below, the internal structure of head driver 19 is described.Fig. 5 is the figure that expression has the circuit structure of the head driver of droplet ejection apparatus of the embodiment of the invention 1 and droplet jetting head.In addition, in Fig. 5, only illustrate for the formation of necessity of the present invention is described.As shown in Figure 5, head driver 19 comprise amplifier 30 that the drive waveforms COM that will be used to drive droplet jetting head 8 (the 1st ejecting head 8a～the 3rd ejecting head 8c) amplifies, fictitious load circuit 31a～31c and analog switch 32a～32c, the 33a～33c of the control device that becomes fictitious load.
The circuit of the circuit of be connected in series analog switch 32a, 33a, be connected in series analog switch 32b, 33b, the circuit of be connected in series analog switch 32c, 33c are connected in parallel, and connect amplifier 30 and droplet jetting head 8 (the 1st ejecting head 8a～the 3rd ejecting head 8c).In addition, fictitious load circuit 31a is connected with analog switch 32a, 33a, fictitious load circuit 31b is connected with analog switch 32b, 33b, fictitious load circuit 31c is connected with analog switch 32c, 33c.
Droplet jetting head 8 (the 1st ejecting head 8a～the 3rd ejecting head 8c) has the pressure generating component 36 of counting equal number analog switch 35 and piezoelectric element etc. with the ejecting head that is provided with.Whole analog switches 35 is connected with analog switch 33a～33c in being arranged on head driver 19, and 31a～31c supplies to pressure generating component 36 with drive waveforms COM by the fictitious load circuit.
In addition, print data DATA is supplied to each analog switch 35, open state and off status should print data DATA controlling it.For example, the analog switch 35 that has been supplied to as [1] of the value of print data DATA becomes out state, make drive waveforms COM be fed into pressure generating component 36, thus from pressure generating component 36 ejection drops by the analog switch 35 that is in out state by fictitious load circuit 31a～31c.
As mentioned above, because print data DATA is fed into whole analog switches 35 that droplet jetting head 8 (the 1st ejecting head 8a～the 3rd ejecting head 8c) is had, so, can select the droplet jetting head 8 (the 1st ejecting head 8a～the 3rd ejecting head 8c) that should drive according to the value of this print data DATA.And print data DATA also is fed into above-mentioned analog switch 32a～32c, 33a～33c.
In addition, by making many among analog switch 32a, 33a, analog switch 32b, 33b and analog switch 32c, the 33c, can make a plurality of connection the among droplet jetting head 8 and the fictitious load circuit 31a～31c to becoming out state.Like this, as long as, preprepared electric loading (each load of fictitious load circuit 31a～31c) electric loading in addition can be connected with droplet jetting head 8 with a plurality of connection the among droplet jetting head 8 and the fictitious load circuit 31a～31c.Therefore, even under the situation that the load of droplet jetting head 8 changes, also can stably spray drop.
Though only being used for the pressure of controlled pressure generating device 36, common print data DATA moves, carry out the ejection control of drop, but in the present embodiment, in addition, also according to the content of print data DATA, carry out the selection of the droplet jetting head 8 that should drive, the switching of fictitious load circuit 31a～31c of being connected with droplet jetting head 8.In addition, it should be noted, in the process of carrying out the drop ejection, can not carry out switching according to droplet jetting head 8 and the fictitious load circuit 31a～31c of print data DATA.
In above-mentioned formation, beginning to carry out before the action of substrate W ejection drop, select the control signal of droplet jetting heads 8 to head driver 19 outputs from control part 18.According to this control signal, the print data DATA of (switching) droplet jetting head 8 (any head among the 1st ejecting head 8a～the 3rd ejecting head 8c) is selected in head driver 19 output expressions.After this print data DATA is output, should driven droplet jetting head just selected (head is selected operation).Here selecteed is the 1st ejecting head 8a.
After having selected droplet jetting head, next head driver 19 is thought the print data DATA (fictitious load selection operation) of the fictitious load circuit implication that selecteed droplet jetting head output expression selection (switching) should connect according to the control signal from control part 18 outputs.According to this print data DATA, the one or more pairs of states that become out among analog switch 32a, 33a, analog switch 32b, 33b and analog switch 32c, the 33c are electrically connected the one or more and droplet jetting head formation among fictitious load circuit 31a～31c.
After the selection of having finished droplet jetting head 8 and fictitious load circuit, for example on substrate shown in Figure 3, by drive motors head unit 6 is scanned along directions X, drive waveforms COM is supplied to the 1st ejecting head 8a through selecteed fictitious load circuit, thereby the 1st functional liquid D1 is ejected into (driving operation) among each recess K1.Then, similarly according to control signal, carry out selection with above-mentioned according to droplet jetting head 8 and the fictitious load circuit of print data DATA from control part 18 outputs.Here, make the 2nd ejecting head 8b selected.After selecting end, then on drawing area R1, implement the spraying of the thickness painting type of the 2nd functional liquid D2 by the 2nd ejecting head 8b.
In addition, in processing substrate shown in Figure 4, in the scanning process of head unit 6, make the 1st ejecting head 8a scan (a scanning) to a direction prior to the 2nd ejecting head 8b, to each recess K1 ejection A functional liquid D11, on A functional liquid D11, spray B functional liquid D12 by the 2nd ejecting head 8b immediately by the 1st ejecting head 8a then.In addition, the 3rd ejecting head 8c that mark is used is after above-mentioned processing substrate, discerns the image recognition that camera lacks ink dot by not shown substrate, carries out suitable driving by this recognition result.The mark of being done by the 3rd ejecting head 8c is the image recognition that is used to distinguish defective products, by the 3rd extremely many ejecting head 8c of functional liquid spray volume, can finish drafting at short notice.
As described above, in the embodiment of the invention 1, owing to can select best fictitious load by corresponding selecteed droplet jetting head, drive waveforms COM is supplied to droplet jetting head by this fictitious load, so, can not cause the decline of the unequal print quality of spray volume, can carry out the diversified ejection of functional liquid.Its result can carry out the good processing substrate of efficient.Particularly in processing substrate shown in Figure 3, can before volatile the 1st functional liquid D1 volatilization, it be sealed with the 2nd functional liquid D2.In addition, in the example of Fig. 4, the A functional liquid D11 and the B functional liquid D12 of the functional liquid of 2 liquid types can be mixed substantially at one time.
More than, the droplet ejection apparatus of the embodiment of the invention 1 has been described.In the above-described embodiments, though enumerated with the example of analog switch as electric switch, the present invention is not limited to analog switch, also can be electric switches such as transistor, FET.
(embodiment 2)
Secondly, the droplet ejection apparatus of the embodiment of the invention 2 is described.Fig. 6 is the figure that expression has the circuit structure of the head driver of droplet ejection apparatus of the embodiment of the invention 2 and droplet jetting head.In addition, identical with Fig. 5 in Fig. 6, only illustrate for the formation of necessity of the present invention is described.And, because the structure of all structures of the droplet ejection apparatus of the embodiment of the invention 2 and droplet jetting head is identical with the structure of Figure 1 and Figure 2, its explanation of Therefore, omited.
The difference that is arranged on the head driver in head driver 19 and the droplet ejection apparatus that is arranged on the embodiment of the invention shown in Figure 51 in the droplet ejection apparatus of the embodiment of the invention shown in Figure 62 is, replace analog switch 32a～32c, 33a～33c among Fig. 5, and toggle switch 40a～40c, 41a～41c are set.Toggle switch 40a～40c, 41a～41c are equivalent to mechanical switch of the present invention, set out state and off status by user's operation.By setting the state of opening and the off status of these toggle switches 40a～40c, 41a～41c, can select the fictitious load that is connected with droplet jetting head.
In above-mentioned formation, beginning to carry out before the action of substrate W ejection drop, the user selects the fictitious load (fictitious load selection operation) that is connected with droplet jetting head 8 by one (a pair of) in the operation toggle switch or a plurality of (many to).Then, select the control signal of droplet jetting head 8 to head driver 19 outputs from control part 18.In addition, this control signal is the signal of the implication of expression selection and the droplet jetting head 8 that selected fictitious load adapts in above-mentioned operation.In other words, the user is predetermined the droplet jetting head of selecting in advance 8, in above-mentioned operation, select the droplet jetting head 8 that adapts with this droplet jetting head, select the control signal of the droplet jetting head 8 that is predetermined from control part 18 output by the operation toggle switch.
According to this control signal, the print data DATA of (switchings) droplet jetting heads 8 (among the 1st ejecting head 8a～the 3rd ejecting head 8c any) is selected in head driver 19 output expression.Behind output this print data DATA, the droplet jetting head that should drive is selected to go out (head is selected operation).It is selected to establish the 1st ejecting head 8a here.
After the droplet jetting head 8a that should drive is selected, with the foregoing description 1 similarly in processing substrate shown in Figure 3, by drive motors 12 head unit 6 is scanned to directions X, drive waveforms COM is supplied to the 1st ejecting head 8a by selecteed fictitious load circuit, the 1st functional liquid is ejected into (driving operation) among each recess K1.Next, similarly according to control signal, carry out selection with above-mentioned according to droplet jetting head 8 and the fictitious load circuit of print data DATA from control part 18 outputs.Here, it is selected to establish the 2nd ejecting head 8b.After selecting end, next on drawing area R1, carry out the spraying of the thickness painting type of the 2nd functional liquid D2 by the 2nd ejecting head 8b.
In addition, in processing substrate shown in Figure 4, in the scanning process of head unit 6, make the 1st ejecting head 8a scan (a scanning) to a direction prior to the 2nd ejecting head 8b, to each recess K1 ejection A functional liquid D11, on A functional liquid D11, spray B functional liquid D12 by the 2nd ejecting head 8b immediately by the 1st ejecting head 8a then.Like this, the droplet jetting head 8 that should drive (among the 1st ejecting head 8a～the 3rd ejecting head 8c arbitrarily) is connected with optimal fictitious load, can carries out stable drop and spray.
More than, the droplet ejection apparatus of the embodiment of the invention 2 has been described.In the above-described embodiment, for example understand the situation that toggle switch is set as mechanical switch.But the invention is not restricted to use toggle switch,, can use switch arbitrarily as long as can the status of electrically connecting between fictitious load circuit and the droplet jetting head be switched.And, in the above-described embodiments, exemplified the situation by the manual operation toggle switch, but also can use motor, drive unit etc., by the open and close state of mechanical configuration switch by the user.
(embodiment 3)
The following describes the droplet ejection apparatus of the embodiment of the invention 3.Fig. 7 is the figure that expression has the circuit structure of the head driver of droplet ejection apparatus of the embodiment of the invention 3 and droplet jetting head.In addition, same with Fig. 5 and Fig. 6 in Fig. 7, only illustrate for the necessary structure of the present invention is described.
In the above embodiments 1 and embodiment 2, the multiple droplet jetting head 8 (8a, 8b, 8c) of different size is set on head unit 6, and in head driver 19, be provided with fictitious load 31a～31c, select fictitious load with the corresponding connection of the droplet jetting head that should drive by analog switch 32a～32c, 33a～33c or toggle switch 40a～40c, 41a～41c.
And in the present embodiment, the fictitious load circuit of head driver 19 and analog switch etc. have been omitted, 1 droplet jetting head 45 that constitutes by pressure generating component 36 with the analog switch 35 of nozzle number equal amount and piezoelectric element etc., and the head unit 47 that will have a fictitious load circuit 46 is connected with head driver 19.The droplet jetting head 45 that each head driver 47 is had has mutually different specification, and the fictitious load circuit 46 that is complementary of the specification of setting and droplet jetting head 45.
Like this, in the present embodiment, by the fictitious load circuit 46 that the specification at head unit 47 side settings and droplet jetting head 45 is complementary, configuration (replacing) is provided with marries the head unit 47 of understanding droplet jetting head 45, droplet jetting head 45 is constituted with head driver 19 be electrically connected.Constitute according to this, only need the selected droplet jetting head 45 of configure user just can between head driver 19 and droplet jetting head 45, be connected the fictitious load circuit 46 of the most suitable droplet jetting head 45, can stably carry out the ejection of drop.
In above-mentioned structure, beginning to carry out before the action of substrate W ejection drop, the user is installed in main carriage 5 (with reference to Fig. 1) to it then and goes up (head unit installation procedure) selecting the head unit 47 that should install in requisition for the spray volume of ejection drop.By carrying out this operation, head driver 19 is electrically connected with fictitious load circuit 46 and droplet ejection apparatus 45.After installing head unit 47, by making head unit 6 in the enterprising line scanning of directions X, drive waveforms COM is supplied to head unit 47 by the fictitious load circuit by control part 18 drive motors 12, on workpiece W, spray drop (driving operation).
In the present embodiment, owing to be attended by the replacing of head unit 47, so while be not suitable for carrying out Fig. 3 and shown in Figure 4 switch the action that droplet jetting head sprays the 1st functional liquid D1～the 3rd functional liquid D3 continuously.But, for example under the situation of the device that need not change droplet jetting head halfway of making microlens array etc., can stably carry out the ejection of drop.
(film formation device and method, device making method, electronic instrument)
More than the embodiment of droplet ejection apparatus of the present invention is illustrated, this droplet ejection apparatus also can be used as the film formation device that forms film or as microlens array, liquid crystal indicator, organic El device, plasma display system, field emission display (FED; Field Emission Display) etc. device manufacture apparatus and using.Fig. 8 and Fig. 9 are respectively the key diagrams that the microlens array that the light internal connector device of droplet ejection apparatus manufacturing of the present invention uses is used in explanation.In droplet ejection apparatus, on the position of the regulation of Fig. 8 and the object W1 that constitutes by transparency carrier shown in Figure 9, spray photosensitive transparent resin (aqueous goo) from droplet jetting head, carry out ultraviolet curing then, as long as on the position of the regulation on the transparency carrier, formed lenticule L, just can make microlens array 50a, 50b that bright dipping internal connector device is used with prescribed level.
Here, in microlens array 50a shown in Figure 8, lenticule L is aligned to rectangular on directions X and Y direction.And in microlens array 50b shown in Figure 9, lenticule L forms irregular dispersion on directions X and Y direction.In addition, microlens array is except being used for light internal connector device, also can be used for LCD panel, even but when the lenticule that the manufacturing liquid crystal display is used, use ink jet type device of the present invention as long as use, owing to do not need to use photoetching technique, so can improve the production efficiency of microlens array.
Figure 10 is the profile that schematically illustrates the structure of the liquid-crystal apparatus that has used the color filter substrate that uses droplet ejection apparatus manufacturing of the present invention, and Figure 11 A and Figure 11 B are the key diagrams that is illustrated respectively in the configuration status of all kinds on the color filter substrate.In Figure 10, in liquid-crystal apparatus 60, for example be that color filter substrate 61 and tft array substrate 62 are fitted in the midfeather predetermined gap, and between this two substrates packing as the liquid crystal 63 of electro-optical substance.In tft array substrate 62, on the medial surface of transparency carrier 64, dispose TFT (not shown) and pixel electrode 65 that pixel is switched usefulness rectangularly, form alignment films 66 in its surface.To this, in color filter substrate 61, on the transparency carrier 67 with the position of pixel electrode 65 subtends on form color filter layer 72R, 72G, the 72B of R, G, B, form planarization film 68, counter electrode 70 and alignment films 71 in its surface.
On color filter substrate 61, color filter layer 71R, 72G, 72B are formed on the inboard of embankment 68, all around by vertical or stair-stepping embankment 68 encirclements.Here, color filter layer 72R, 72G, 72B are configured to being staggered shown in Figure 11 A, perhaps the shape of the regulation of the grade arranged in a straight line shown in Figure 11 B.
When manufacturing has the color filter substrate 61 of this spline structure, at first, on the surface of transparency carrier 67, form embankment 68, use the droplet ejection apparatus of explanation in the above embodiments 1～embodiment 3 then, fill the resin (aqueous goo) of the color of regulation to the inboard of each embankment 68, carry out ultraviolet curing or heat cure afterwards, form color filter layer 72R, 72G, 72B thus.Thereby, owing to need not use photoetching technique just can form color filter layer 72R, 72G, 72B, so, the production efficiency of color filter substrate can be improved.
Figure 12 is the profile of an example of the formation of expression organic El device.As shown in figure 12, organic El device 301 is connected with the wiring and the drive IC (not shown) of flexible base, board (not shown) on the organic EL 302 that is made of with substrate 371 substrate 311, component portion 321, pixel electrode 331, embankment portion 341, light-emitting component 351, negative electrode 361 (counter electrode) and sealing.Component portion 321 is formed on the substrate 311, a plurality of pixel electrodes 331 of proper alignment in component portion 321.And the cancellate embankment of formation portion 341 in the recess opening 344 that is made of embankment portion 341, forms light-emitting component 351 between each pixel electrode 331.Negative electrode 361 is formed on all faces on top of embankment portion 341 and light-emitting component 351, and the lamination sealing is with substrate 371 on negative electrode 361.
The manufacturing process that comprises the organic El device 301 of organic EL comprises that the dike portion of receiving of formation embankment portion 341 forms operation, the plasma treatment operation in order to form light-emitting component 351 exactly, the light-emitting component formation operation that forms light-emitting component 351, the counter electrode formation operation of formation negative electrode 361 and the sealing process that seals with substrate 371 formations in the sealing of negative electrode 361 superimposed layers.
Light-emitting component formation operation is by at recess opening 344, that is, form hole injection/transfer layer 352 and luminescent layer 353 on the pixel electrode 331 and formation light-emitting component 351, so have hole injection/transfer layer formation operation and luminescent layer formation operation.And, hole injection/transfer layer has the 1st drop ejection operation and the 1st constituent drying that makes ejection of will shoot out for the 1st constituent (functional liquid) that forms hole injection/transfer layer 352 on each pixel electrode 331, form the 1st drying process of hole injection/transfer layer 352, luminescent layer forms operation to have and injects shooing out for the 2nd constituent (functional liquid) that forms luminescent layer 353 to the hole/the 2nd drop ejection operation on the transfer layer 352 and make the 2nd constituent drying of ejection, forms the 2nd drying process of luminescent layer 353.Form in the operation at this light-emitting component, use droplet ejection apparatus to form above-mentioned light-emitting component.
Figure 13 is the exploded perspective view of a part of the formation of expression plasma type display unit.As shown in figure 13, plasma type display unit 400 comprises mutually to the substrate 401,402 of configuration and is formed on discharge display part 410 between the substrate 401,402.Discharge display part 410 is set of a plurality of arc chambers 416.In a plurality of arc chambers 416,3 arc chambers 416 of red arc chamber 416 (R), green arc chamber 416 (G), blue look arc chamber 416 (B) are configured to 1 group, constitute 1 pixel.
With the interval of regulation, linearity ground forms address electrode 411 on substrate 401, forms the top dielectric layer 419 that covers address electrode 411 and substrate 401.Between address electrode 411,411 and along each address electrode 411, forming next door 415 on the dielectric layer 419.Next door 415 have the width left and right sides that is adjacent to address electrode 411 the next door and with address electrode 411 crossing at right angle directions on the next door that extend to be provided with.And corresponding OBL zone of being separated by next door 415 forms arc chamber 416.In addition, dispose fluorophor 417 in the inboard in the OBL zone of dividing by next door 415.Fluorophor 417 can send the fluorescence of red, green, blue random colour, disposes red-emitting phosphors 417 (R) respectively in the bottom of red arc chamber 416 (R), disposes green-emitting phosphor 417 (G) in the bottom of green arc chamber 416 (G), disposes blue look fluorophor 417 (B) in the bottom of blue look arc chamber 416 (B).
On the other hand, on substrate 402, linearity ground forms a plurality of show electrodes 412 with the interval of regulation on above-mentioned and address electrode 411 decussate directions.And, form to cover these the diaphragm 414 that constitutes by dielectric layer 413 and MgO etc.Substrate 401 and substrate 402 close address electrode 411 and the mutual card in show electrode mutual subtend ground, 412 mutual crossing at right angles ground.Address electrode 411 and show electrode 412 are connected with not shown AC power.By to each electrifying electrodes, make fluorophor 417 excitation luminescences in discharge display part 410, thereby realize colored the demonstration.The droplet ejection apparatus of the embodiment of the invention is used at the inboard fluorophor 417 that disposes in the OBL zone of being divided by next door 415.
Figure 14 A～14C is the figure of formation that expression has the electric field transmitted display (FED) of electric field transmitted element.Figure 14 A is that schematic representation constitutes the cathode base of FED and the configuration relation exploded perspective view of anode substrate.Figure 14 B is the circuit diagram that expression is arranged on the primary structure of the drive circuit on the cathode base of FED.Figure 14 C is the stereogram of the major part of expression cathode base.Shown in Figure 14 A, FED500 is the structure with cathode base 500a and the configuration of anode substrate 500b subtend.
Shown in Figure 14 A, 14B, cathode base 500a has by gate line 501, emission polar curve 502, with gate line 501 and launch the so-called pure matrix driving circuit that electric field transmitted element 503 that polar curve 502 is connected constitutes.Supply with signal V to gate line 501
1, V
2..., V
m, supply with emitter signal W to emission polar curve 502
1, W
2..., W
mIn addition, anode substrate 500b possesses the fluorophor with character luminous by nucleophobic bump, as this fluorophor, is provided with the fluorophor of the fluorescence that can send red, green, blue random colour.
As shown in figure 14, electric field transmitted element 503 comprises emitter electrode 503a, the gate electrode 503b that is connected with gate line 501 that is connected with emission polar curve 502.In addition, emitter electrode 503a has the jut that is called as emitter terminal 505 that diminishes towards its diameter of gate electrode 503b from emitter electrode 503a side, gate electrode 503b on should the position of emitter terminal 505, form hole portion 504, with the front-end configuration of emitter terminal 505 in this hole portion 504.
When voltage is supplied with between the emitter electrode 503a and gate electrode 503b that is being set on the electric field transmitted element 503, electronics 510 moves to hole portion 504 from emitter terminal 505 under effect of electric field, and electronics 510 is launched out from emitter terminal 505.By making the electronics 510 that emits clash into the fluorophor of the anode substrate 500b that disposes with cathode base 500a subtend, make light-emitting phosphor.Thus, as long as pass through the signal V of control gate polar curve 501
1, V
2..., V
mAnd the emitter signal W of emission polar curve 502
1, W
2..., W
m, drive FED500, just can carry out desirable color and show.The droplet ejection apparatus of the embodiment of the invention is used for disposing fluorophor on anode substrate 500b.
The device of above-mentioned liquid-crystal apparatus, organic El device, plasma type display unit, FED etc. is configurable in the electrical equipment instrument of notebook computer and mobile phone etc.But the electrical equipment instrument of indication of the present invention is not limited to above-mentioned notebook computer and mobile phone, can be applicable in the various electrical equipment instruments.For example, can be applicable to liquid crystal projection apparatus, multimedia personal computer (PC) and engineering work station (EWS), pager, word processor, television set, view finding type or monitor direct viewing type video tape recorder, electronic notebook, desktop computer, vehicle navigation apparatus, POS terminal, have the electronic instrument of the device etc. of touch-screen.
Claims (1)
1, a kind of droplet discharge method to workpiece ejection drop, comprising:
Head unit arrangement step, configured head unit, this head unit have droplet jetting head and the control device corresponding with the electrical characteristics of this droplet jetting head;
Drive operation, drive signal, make described drop ejection by supplying with to described droplet jetting head at the described control device that head unit had of described head unit arrangement step configuration.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002265736 | 2002-09-11 | ||
| JP2002265736 | 2002-09-11 | ||
| JP2003285988 | 2003-08-04 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB031567339A Division CN1250397C (en) | 2002-09-11 | 2003-09-08 | Drop spraying device and method, film forming device and method, device mfg. method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1775526A true CN1775526A (en) | 2006-05-24 |
Family
ID=36765301
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200510128657 Pending CN1775526A (en) | 2002-09-11 | 2003-09-08 | Liquid droplet ejecting device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1775526A (en) |
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2003
- 2003-09-08 CN CN 200510128657 patent/CN1775526A/en active Pending
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