CN1773359A - High-efficiency laser frequency doubling device - Google Patents
High-efficiency laser frequency doubling device Download PDFInfo
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- CN1773359A CN1773359A CN 200410009783 CN200410009783A CN1773359A CN 1773359 A CN1773359 A CN 1773359A CN 200410009783 CN200410009783 CN 200410009783 CN 200410009783 A CN200410009783 A CN 200410009783A CN 1773359 A CN1773359 A CN 1773359A
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- 230000003287 optical effect Effects 0.000 claims abstract description 26
- 239000013078 crystal Substances 0.000 claims abstract description 25
- 238000005086 pumping Methods 0.000 claims abstract description 20
- 239000007787 solid Substances 0.000 claims description 6
- 229910013641 LiNbO 3 Inorganic materials 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 4
- 230000009466 transformation Effects 0.000 claims description 4
- 230000001105 regulatory effect Effects 0.000 claims description 3
- UHYPYGJEEGLRJD-UHFFFAOYSA-N cadmium(2+);selenium(2-) Chemical compound [Se-2].[Cd+2] UHYPYGJEEGLRJD-UHFFFAOYSA-N 0.000 claims description 2
- 239000000835 fiber Substances 0.000 claims description 2
- 239000007788 liquid Substances 0.000 claims description 2
- 239000000463 material Substances 0.000 claims description 2
- 239000000126 substance Substances 0.000 claims description 2
- 238000006243 chemical reaction Methods 0.000 abstract description 17
- 238000000034 method Methods 0.000 abstract description 10
- 230000001427 coherent effect Effects 0.000 abstract 2
- 230000015572 biosynthetic process Effects 0.000 abstract 1
- 238000003786 synthesis reaction Methods 0.000 abstract 1
- 238000005516 engineering process Methods 0.000 description 9
- 238000010586 diagram Methods 0.000 description 6
- 230000010287 polarization Effects 0.000 description 5
- 238000010168 coupling process Methods 0.000 description 4
- 238000005859 coupling reaction Methods 0.000 description 4
- 238000011161 development Methods 0.000 description 3
- 239000012141 concentrate Substances 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 229910052769 Ytterbium Inorganic materials 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000001093 holography Methods 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 238000012797 qualification Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- NAWDYIZEMPQZHO-UHFFFAOYSA-N ytterbium Chemical compound [Yb] NAWDYIZEMPQZHO-UHFFFAOYSA-N 0.000 description 1
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Abstract
The high-efficient laser frequency doubling device includes: the laser comprises a fundamental frequency laser, a beam splitter, a coherent beam combiner and a nonlinear crystal, wherein the fundamental frequency laser is subjected to beam splitting and then coherent synthesis, the synthesized laser is used as a pumping source of a frequency doubling laser, the nonlinear optical crystal is pumped, and finally the frequency doubling laser with high conversion efficiency is output. The invention can improve the conversion efficiency without specific limitation on the fundamental frequency laser. The laser can be coherent-synthesized to improve power density by a proper beam splitting method, so that the laser is not limited to short pulse or ultrashort pulse laser, and can improve conversion efficiency without improving the power of fundamental frequency laser.
Description
Technical field
The present invention relates to a kind of nonlinear optics frequency conversion laser technology, particularly a kind of efficient laser freuqency doubling device.
Background technology
Frequency multiplication is typical, most important, the most basic technology in the nonlinear optics mixing, also is most widely used technology; We can say that frequency multiplication is the basis of laser frequency conversion, the development of laser hi-tech and the application of widening laser are had crucial meaning.Can obtain multi-wavelength's laser by laser freuqency doubling, for example can produce ruddiness, green glow, blue light, ultraviolet and deep ultraviolet laser etc., they have great application prospect and vast market at aspects such as Large Screen Laser Display, laser medicine, high density storage, microelectronics, micromechanics, laser holography and pumping tunable optical parameter lasers.
In order to obtain more high-power double-frequency laser output, reduce system complexity, to improve electro-optical efficiency,, improve its frequency multiplication output efficiency and have great importance to adapt to various application demands.Therefore, improve frequency-doubling conversion efficiency all is one of research focus of having problems of second harmonic all the time.At present, the work that improves frequency-doubling conversion efficiency mainly concentrates on following research direction: (1) adopts short pulse and ultra-short pulse laser, improves the fundamental frequency peak power and obtains efficient second harmonic; (2) employing is walked to overcome walk-off effect from compensation scheme and is improved the second harmonic transformation efficiency; (3) utilize the high characteristics of laserresonator intracavity power density to carry out intracavity frequency doubling, obtain higher conversion efficiency of second harmonic; (4) for quasi continuous operation, pulse width is at the laser of the high-average power of 100ns level, because peak power is lower, need the big nonlinear factor and the nonlinear optical crystal of high damage threshold, also do not satisfy at present the nonlinear optical crystal of these two conditions simultaneously, so can adopt two nonlinear optical crystal transform methods to adopt Polarization Modulation to improve harmonic conversion efficient simultaneously.
Yet all there is shortcoming separately in said method, mainly is the range of application of its limitation, for example adopts the short pulse technology, also is corresponding short pulse with the double-frequency laser that makes output, and this method of long pulse double-frequency laser has just been had no way if desired; Adopt method, when crystal by adopting II class phase matching,, thereby make its validity be subjected to great influence, also be difficult to realize compensation preferably because the delay of the birefringent phase of nonlinear optical crystal causes the polarization confusion from compensation; The intracavity frequency doubling method will be considered factors such as its polarization characteristic, time response, and there are problems such as the design of resonator cavity and debug difficulties in system complex; Adopt the method for Polarization Modulation need adopt two and polylith nonlinear optical crystal etc.Therefore, develop efficient laser freuqency doubling new technology and related device and be still the very important problem of present nonlinear optics laser frequency, will and widen its range of application to the further development of laser technology and have very significant meaning.
Summary of the invention
Technology of the present invention is dealt with problems and is: overcome the deficiencies in the prior art, a kind of efficient laser freuqency doubling device that the basic frequency laser device is not needed to do the raising conversion efficiency of specific qualification is provided.
Technical solution of the present invention is: efficient laser freuqency doubling device, it is characterized in that comprising: basic frequency laser device, beam splitter, relevant bundling device, nonlinear crystal, the basic frequency laser device is relevant synthetic again after by beam splitting, with the pumping source of the laser after synthetic as frequency double laser, the pumping nonlinear optical crystal is exported high transformation efficiency double-frequency laser at last.
Also be included on the output light path of basic frequency laser and add the bundle device that contracts, can be to the light beam bundle back beam splitting of contracting, relevant more synthetic after the beam splitting.
After also being included in the beam splitter of output light path of basic frequency laser each road light beam is added the bundle device that contracts respectively, can be relevant synthetic to every road light beam Shu Houzai that contract, to improve relevant brightness of closing behind the bundle.
Add a phase regulator after also being included in beam splitter, the phase relation of regulating every road light is with the relevant synthetic hot spot that improves its degree of coherence and needing to obtain.
Described basic frequency laser device comprises: continuously or the chemical laser of pulse, continuously or the lamp pump solid state laser of pulse, continuously or the semiconductor pumped solid state laser (comprising fiber laser) of pulse, continuously or the liquid laser of pulse, continuously or the gas laser of pulse, continuously or the vertical cavity surface emitting laser of pulse.
Described nonlinear optical crystal comprises KBBF, SBBO, TBO, KABO, CLBO, CBO, KDP, ADP, LiIO
3, BBO, LBO, LiNbO
3, MgO:LiNbO
3, KnbO
3, KTA, KTP, BNN, AgGaS
2, AgGaSe
2, CdGeAs
2, ZnGaP
2, AgGa
1-XIn
XSe
2, Ag
3AsS
3, CdSe, PPLN, PPTiLN, PPKN, OOMgLN, PPLT, PPKTP, PPRTA, PPKTA.
Described beam splitter comprises N road beam splitter, and N is a positive integer, and N is more than or equal to 2.
Described bundling device, comprise the far field directly relevant close bundle or with lens at the focus place relevant acquisition far field pattern.
Further, described bundling device comprises the employing birefringent interferometer, unfilled corner right-angle prism, low-angle total reflection prism, optical filter, Prism Polarizing Spectroscope, flat-plate polarizing spectroscope, polygonal mirror, icelandspar double window 0E crystal etc.
Further, the described used lens of bundle device that contract comprise convex lens and concavees lens, can be made up of convex lens and concavees lens, also can be made up of convex lens and convex lens etc.
Further, described phase-shifter comprises various transparent optical materials, or binary optical elements.
Efficient laser freuqency doubling principle of device provided by the invention is: utilize the optical power density in the nonlinear optical crystal that incides frequency multiplication high more, the principle that its frequency-doubling conversion efficiency is also high more, so basic frequency laser is shone directly on the nonlinear crystal because not high its conversion efficiency of very difficult raising of its power density, if with its bundle that contracts, the beam ratio that contracts is too little, same its optical power density can not reach very high, beam ratio is too big if contract, then its angle of divergence will become big greatly, because its divergence has a strong impact on its conversion efficiency, so also be difficult to improve its efficient.We propose basic frequency laser relevant more synthetic after by beam splitting, and owing to the laser after the beam splitting is from same lasing light emitter, they have identical frequency, fixing phasic difference and consistent polarization, so they are concerned with.According to coherence theory, bundle is relevant if basic frequency laser is divided into N, and the brightness after it is relevant can improve nearly N than the brightness before the beam splitting doubly, and the optical power density of the conversion efficiency of frequency multiplication and its fundamental frequency pump light grows proportionately.Therefore, though the relevant synthetic power that does not improve the fundamental frequency pump light after the beam splitting, its brightness increases, thereby has increased frequency-doubling conversion efficiency, can obtain bigger frequency doubled light power output at last.
The present invention's advantage compared with prior art is:
Adopt the synthetic way of laser coherence to improve the shg efficiency that optical power density improves laser in the device of the present invention, this method provides a kind of new way to improving shg efficiency, no matter be continuous laser, still therefore pulse laser can not necessarily limit to short pulse or ultra-short pulse laser by the relevant synthetic power density that improves of the method for beam-splitting treatment; Simultaneously under the situation that does not improve basic frequency laser power, also can improve conversion efficiency, and principle is simple; It is a kind of cavity external frequency multiplication method, corresponding some shortcomings that overcome its intracavity frequency doubling, thereby and also can obtain high advantages such as the exportable more high-power double-frequency laser of conversion efficiency by a crystal, this will and widen its range of application to the further development of laser technology and have crucial meaning.
Description of drawings
Fig. 1 is a composition structured flowchart of the present invention;
Fig. 2 is the embodiment synoptic diagram of the laser freuqency doubling device of the directly relevant pumping output in far field of the present invention 532nm;
Fig. 3 closes the embodiment synoptic diagram of the laser freuqency doubling device of bundle output 532nm for far field of the present invention is relevant;
Fig. 4 is the synthetic pumping laser frequency multiplication device embodiment synoptic diagram of the Shu Xianggan that contracts of the present invention;
Fig. 5 is the relevant synthetic pumping laser frequency multiplication device embodiment synoptic diagram of 18 bundles of the present invention.
Embodiment
As shown in Figure 1, the present invention includes basic frequency laser device, beam splitter, relevant bundling device, nonlinear crystal, the basic frequency laser device is relevant synthetic again after by beam splitting, with the pumping source of the laser after synthetic as frequency double laser, the pumping nonlinear optical crystal is exported high transformation efficiency double-frequency laser at last.
Embodiment 1
With reference to figure 2, make the laser freuqency doubling device of the directly relevant pumping output in far field 532nm.
Among the figure: the basic frequency laser device adopts the laser of the Nd:YAG solid state laser output 1064nm wavelength of flash lamp pumping, this laser is divided into the identical laser of two beam powers by a beam splitter, make its two bundles far field relevant by lens then, the spacing of minute adjustment two-beam and the suitable focal length of selection, make the striped of its interference far field pattern minimum, degree of coherence is best, laser after synthetic will be concerned with then as the pumping source of the nonlinear optical crystal KTP of a weak point, the last exportable 532nm green glow higher than pump-coupling efficient.
Embodiment 2
With reference to figure 3, make the relevant laser freuqency doubling device that closes bundle output 532nm in a far field.
Among the figure: the basic frequency laser device adopts the Nd:YVO of semiconductor laser pumping
4The laser of solid state laser output 1064nm wavelength, this laser is divided into the identical laser of two beam powers by a beam splitter, make its two bundles far field relevant by lens then, the spacing of minute adjustment two-beam and the suitable focal length of selection, make the striped of its interference far field pattern minimum, degree of coherence is best, can reach the striped about 3, forming a bundling device by birefringent interferometer then makes it close Shu Chengyi energy mainly to concentrate on the hot spot, at this moment the hot spot of hot spot before than basic frequency laser beam splitting is little (closes the bundle part and sees OPTICSLETTERS/Vol.21 (24): 1996,1996), laser with it after synthetic is as the pumping source of nonlinear crystal LBO, the last exportable 532nm green glow higher than pump-coupling efficient.
Embodiment 3
With reference to figure 4, make the synthetic pumping laser frequency multiplication device embodiment synoptic diagram of Shu Xianggan that contracts;
Among the figure: the basic frequency laser device adopts the laser of excimer laser XeF output 351nm wavelength, this laser is divided into the identical laser of two beam powers by a beam splitter, the bundle device of forming by two convex lens that the contracts bundle twice that contracts earlier then, the two bundle far fields of contracting after restrainting are relevant, the spacing of minute adjustment two-beam and the suitable focal length of selection, make the striped of its interference far field pattern minimum, degree of coherence is best, can reach the striped about 3, laser after synthetic will be concerned with then as the pumping source of the nonlinear optical crystal KBBF of a weak point, because KBBF can deep ultraviolet and vacuum ultraviolet frequency multiplication, the exportable vacuum ultraviolet 175nm green glow higher than pump-coupling efficient at last.
Embodiment 4
With reference to figure 5, make the relevant synthetic pumping laser frequency multiplication device embodiment synoptic diagram of one 18 bundles;
Among the figure: the basic frequency laser device adopts the semiconductor pumped laser of mixing ytterbium narrow cable and wide optical fiber laser output 1064nm wavelength, this laser is divided into the identical laser of 18 beam powers by the multipath reflection mirror, make 18 bundles be arranged in center symmetry by a low-angle total reflection prism and catoptron then and make its far field relevant by lens, the spacing of minute adjustment 18 bundle light and the lens of selection proper focal length, and add the phase relation that phase delayer (as quartz wave-plate) is regulated each road as required on some road, make its interference far field pattern circularize pattern, degree of coherence is best, laser after synthetic will be concerned with then as the pumping source of the nonlinear optical crystal BBO of a weak point, the last exportable 532nm green glow higher than pump-coupling efficient.
Claims (11)
1, efficient laser freuqency doubling device, it is characterized in that comprising: basic frequency laser device, beam splitter, relevant bundling device and nonlinear crystal, the basic frequency laser device is relevant synthetic again after by beam splitting, with the pumping source of the laser after synthetic as frequency double laser, the pumping nonlinear optical crystal is exported high transformation efficiency double-frequency laser at last.
2, efficient laser freuqency doubling device according to claim 1 is characterized in that: also is included on the output light path of basic frequency laser and adds the bundle device that contracts, and to the light beam bundle back beam splitting of contracting, relevant more synthetic after the beam splitting.
3, efficient laser freuqency doubling device according to claim 1, it is characterized in that: after also being included in the beam splitter of output light path of basic frequency laser each road light beam is added the bundle device that contracts respectively, relevant synthetic to every road light beam Shu Houzai that contracts, to improve relevant brightness of closing behind the bundle.
4, efficient laser freuqency doubling device according to claim 1 is characterized in that: add a phase regulator after also being included in beam splitter, the phase relation of regulating every road light is with the relevant synthetic hot spot that improves its degree of coherence and needing to obtain.
5, efficient laser freuqency doubling device according to claim 1, it is characterized in that: described basic frequency laser device can be the chemical laser of continuous or pulse, continuously or the lamp pump solid state laser of pulse, continuously or the semiconductor pumped solid state laser (containing fiber laser) of pulse, continuously or the liquid laser of pulse, continuously or the gas laser of pulse, continuously or the vertical cavity surface emitting laser of pulse.
6, efficient laser freuqency doubling device according to claim 1, it is characterized in that: described nonlinear optical crystal comprises KBBF, SBBO, TBO, KABO, CLBO, CBO, KDP, ADP, LilO
3, BBO, LBO, LiNbO
3, MgO:LiNbO
3, KnbO
3, KTA, KTP, BNN, AgGaS
2, AgGaSe
2, CdGeAs
2, ZnGaP
2, AgGa
1-xIn
*Se
2, Ag
3AsS
3, CdSe, PPLN, PPTiLN, PPKN, OOMgLN, PPLT, PPKTP, PPRTA, PPKTA.
7, efficient laser freuqency doubling device according to claim 1 is characterized in that: described beam splitter, comprise N road beam splitter, and N is a positive integer, N is more than or equal to 2.
8, efficient laser freuqency doubling device according to claim 1 is characterized in that: described bundling device, comprise the far field directly relevant close bundle or with lens at the focus place relevant acquisition far field pattern.
9, efficient laser freuqency doubling device according to claim 1, it is characterized in that: described bundling device, comprise the employing birefringent interferometer, the unfilled corner right-angle prism, low-angle total reflection prism, optical filter, Prism Polarizing Spectroscope, flat-plate polarizing spectroscope, polygonal mirror, icelandspar double window OE crystal.
10, efficient laser freuqency doubling device according to claim 3 is characterized in that: the described used lens of bundle device that contract comprise convex lens and concavees lens.
11, efficient laser freuqency doubling device according to claim 3 is characterized in that: described phase-shifter, comprise that various transparent optical materials accomplish phase device, or binary optical elements.
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| CNB2004100097836A CN100430813C (en) | 2004-11-12 | 2004-11-12 | High-efficiency laser frequency doubling device |
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| CNB2004100097836A CN100430813C (en) | 2004-11-12 | 2004-11-12 | High-efficiency laser frequency doubling device |
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| CN1773359A true CN1773359A (en) | 2006-05-17 |
| CN100430813C CN100430813C (en) | 2008-11-05 |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103018911A (en) * | 2012-12-14 | 2013-04-03 | 清华大学 | Optical fiber laser synthesizer based on wavelength division multiplexing |
| CN107085311A (en) * | 2017-06-06 | 2017-08-22 | 曲阜师范大学 | One kind turns to symmetric splitting ahrens prism |
| CN109378696A (en) * | 2018-11-08 | 2019-02-22 | 中国人民解放军国防科技大学 | High-average-power mode-locked laser generation system and method based on parallel frequency shift |
| CN109560458A (en) * | 2019-02-15 | 2019-04-02 | 上海高意激光技术有限公司 | Semiconductor laser spectrum beam combination frequency doubling device |
| CN113031289A (en) * | 2021-02-28 | 2021-06-25 | 哈尔滨理工大学 | Nonlinear holographic generation method and device for propagating invariant structured light field |
| CN113258426A (en) * | 2020-02-10 | 2021-08-13 | 北京科益虹源光电技术有限公司 | 213nm laser |
| CN113258427A (en) * | 2020-02-10 | 2021-08-13 | 北京科益虹源光电技术有限公司 | 213nm ultraviolet light output method and system |
| CN115542629A (en) * | 2022-11-24 | 2022-12-30 | 安徽鲲腾量子科技有限公司 | Phase amplification method, system and test method based on nonlinear optical harmonic |
| CN118472751A (en) * | 2024-05-09 | 2024-08-09 | 武汉华日精密激光股份有限公司 | Femtosecond frequency doubling device and method |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| US4877297A (en) * | 1988-04-29 | 1989-10-31 | Rockwell International Corporation | Reconfigurable 0ptical interconnect using dynamic hologram |
| DE19504047C1 (en) * | 1995-02-08 | 1996-07-25 | Daimler Benz Ag | Laser system for color image projection |
| JPH0922037A (en) * | 1995-07-04 | 1997-01-21 | Mitsui Petrochem Ind Ltd | Laser beam generator |
| EP0849894B1 (en) * | 1996-12-20 | 2003-05-21 | Contraves Space AG | Method and device for driving a laser system for free space optical communication |
| JPH10270325A (en) * | 1997-03-26 | 1998-10-09 | Hitachi Ltd | Exposure light source, exposure method, aligner, and manufacture of semiconductor device |
| AU2001271363A1 (en) * | 2000-06-20 | 2002-01-02 | Actinix | Generating coherent vacuum ultraviolet radiation using four wave mixing |
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Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103018911A (en) * | 2012-12-14 | 2013-04-03 | 清华大学 | Optical fiber laser synthesizer based on wavelength division multiplexing |
| CN103018911B (en) * | 2012-12-14 | 2015-06-24 | 清华大学 | Optical fiber laser synthesizer based on wavelength division multiplexing |
| CN107085311A (en) * | 2017-06-06 | 2017-08-22 | 曲阜师范大学 | One kind turns to symmetric splitting ahrens prism |
| CN109378696A (en) * | 2018-11-08 | 2019-02-22 | 中国人民解放军国防科技大学 | High-average-power mode-locked laser generation system and method based on parallel frequency shift |
| CN109560458A (en) * | 2019-02-15 | 2019-04-02 | 上海高意激光技术有限公司 | Semiconductor laser spectrum beam combination frequency doubling device |
| CN113258426A (en) * | 2020-02-10 | 2021-08-13 | 北京科益虹源光电技术有限公司 | 213nm laser |
| CN113258427A (en) * | 2020-02-10 | 2021-08-13 | 北京科益虹源光电技术有限公司 | 213nm ultraviolet light output method and system |
| CN113031289A (en) * | 2021-02-28 | 2021-06-25 | 哈尔滨理工大学 | Nonlinear holographic generation method and device for propagating invariant structured light field |
| CN113031289B (en) * | 2021-02-28 | 2021-12-10 | 哈尔滨理工大学 | Nonlinear holographic generation method and device for propagating invariant structured light field |
| CN115542629A (en) * | 2022-11-24 | 2022-12-30 | 安徽鲲腾量子科技有限公司 | Phase amplification method, system and test method based on nonlinear optical harmonic |
| CN118472751A (en) * | 2024-05-09 | 2024-08-09 | 武汉华日精密激光股份有限公司 | Femtosecond frequency doubling device and method |
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| CN100430813C (en) | 2008-11-05 |
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