CN1770935A - Organic electro-luminescence display device and method of fabricating the same - Google Patents

Organic electro-luminescence display device and method of fabricating the same Download PDF

Info

Publication number
CN1770935A
CN1770935A CNA2005101137483A CN200510113748A CN1770935A CN 1770935 A CN1770935 A CN 1770935A CN A2005101137483 A CNA2005101137483 A CN A2005101137483A CN 200510113748 A CN200510113748 A CN 200510113748A CN 1770935 A CN1770935 A CN 1770935A
Authority
CN
China
Prior art keywords
scan chain
chain circuit
data link
display area
metal level
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CNA2005101137483A
Other languages
Chinese (zh)
Other versions
CN100482012C (en
Inventor
裴孝大
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
LG Electronics Inc
Original Assignee
LG Electronics Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by LG Electronics Inc filed Critical LG Electronics Inc
Publication of CN1770935A publication Critical patent/CN1770935A/en
Application granted granted Critical
Publication of CN100482012C publication Critical patent/CN100482012C/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10OLED displays
    • H10K59/17Passive-matrix OLED displays
    • H10K59/179Interconnections, e.g. wiring lines or terminals
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10OLED displays
    • H10K59/17Passive-matrix OLED displays
    • H10K59/179Interconnections, e.g. wiring lines or terminals
    • H10K59/1795Interconnections, e.g. wiring lines or terminals comprising structures specially adapted for lowering the resistance
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Electroluminescent Light Sources (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)

Abstract

The present invention relates to an organic electro-luminescence display device and a method of fabricating the same capable of improving an emission efficiency and of reducing a deterioration of picture quality. An organic electro-luminescence display device, including a display area and a non-display area, according to the present invention includes: a data line and a scan line, which are formed in a direction crossing each other, at the display area; a data link, extended from the data line, and a scan link, connected to the scan line, at the non-display area; and a data pad extended with a width wider than that of the data link and connected to the end of the data link formed at the non-display area, and a scan pad extended with a width wider than that of the scan link and connected to the end of the scan link formed at the non-display area, wherein at least any one of the data link, the data pad, the scan link, and the scan pad are formed in a multi conductive layer.

Description

Organic elctroluminescent device and manufacture method thereof
The application requires the priority at korean patent application P2004-82234, P2004-82235, P2004-82236 and the P2004-82237 of Korea S's submission on October 14th, 2004, and above-mentioned list of references is incorporated herein by reference.
Background of invention
Invention field
The present invention relates to organic elctroluminescent device, the organic elctroluminescent device and the manufacture method thereof that relate more specifically to improve emission effciency and reduce deterioration in image quality.
Description of Related Art
Recently, researched and developed the various flat-panel display devices that reduce on weight and volume, they can eliminate the shortcoming of cathode ray tube (CRT).These flat-panel display devices comprise: LCD (LCD), field-emitter display (FED), plasma display panel (PDP) and electroluminescence (EL) display etc.
In these flat-panel display devices, because the structure of PDP and manufacture method are simple, so it is making aspect the large scale screen tool advantage, but it has the shortcoming of low luminous efficiency and power consumption.Because LCD is by the semiconductor approach manufacturing, it still because it mainly is used as the display device of notebook personal computer, therefore has demand widely to it having any problem aspect the making large scale screen.But, the LCD defectiveness, promptly it is big in the power consumption of having any problem aspect the making large scale screen and cause owing to back light unit.In addition, LCD has following characteristics: because optics such as polarizing filter, prismatic lens, scattering sheet etc. cause a large amount of light losses and narrow visual angle.
On the other hand, according to the material of luminescent layer, the EL display device is divided into inorganic El element and organic EL device substantially, and is selfluminous element.When comparing with the aforementioned display device part, the EL display device has fast-response speed, high-luminous-efficiency, high brightness and advantage with great visual angle.Organic EL display device can be at about 10[V] and several ten thousand [cd/m 2] high brightness under display image.
Fig. 1 is the schematic plan view of the organic EL display device structure of demonstration correlation technique.
With reference to Fig. 1, the organic EL display device of correlation technique comprises: data wire DL intersected with each other and scan line SL; With viewing area A, wherein the EL unit (not shown) that forms on the crosspoint of the data wire DL of matrix type and scan line SL is positioned at described viewing area A, and has wherein realized image after organic emission.
The organic EL display device of correlation technique also comprises: extended data link DK from the data wire DL of viewing area A; Be provided with the database part 24 of database DP, the width of described database DP is wideer at the width of its end than data link DK; Be connected to the scan chain circuit SK of scan line SL; Wherein be provided with the non-display area B of scanning board part 32, wherein scanning board part 32 has scanning board SP, and the width of described scanning board SP is wideer at the width of its end than scan chain circuit SK.
Database part 24 and scanning board part 32 are connected on coil type encapsulation (Tape CarrierPackage) TCP (not shown), and data driver (not shown) that produces data-signal and the scanner driver (not shown) that produces sweep signal are installed on described TCP.
Database part 24 provides the data-signal that is applied to data wire DL from data driver, and this data-signal arrives corresponding data wire DL through each database DP and data link DK.Scanning board part 32 provides the sweep signal that is applied to scan line SL from scanner driver, and this sweep signal arrives corresponding data wire SL through each scanning board SP and scan chain circuit SK.
Fig. 2 is the schematic plan view of the another kind of organic EL display device of demonstration correlation technique.
Compare with the organic EL display device among Fig. 1, organic EL display device among Fig. 2 comprises: database part 24, the first scanning board part 32a and the second scanning board part 32b, wherein for the integrated purpose of display device, the first scanning board part 32a and the second scanning board part 32b are separated from one another in the both sides of substrate 2, and are formed together at the downside of the substrate 2 of organic EL display device.
The reason that forms database part 24, the first scanning board part 32a and the second scanning board part 32b at the downside of organic EL display device substrate together is, produce at integrated drive under the situation of display device, make the viewing area A of organic EL display device be positioned at the center of display device.
With reference to Fig. 2, be connected on the database DP corresponding through non-display area B from extended each data link of data wire DL DK of viewing area A with database part 24, described database part 24 forms at the downside of substrate 2.Each scan chain circuit SKa and SKb are connected on each scanning board SPa and SPb corresponding with scanning board part 32a and 32b through non-display area B, and described scanning board part 32a and 32b form at the downside of substrate 2.
Fig. 3 is for showing along I-I ' among Fig. 2 and the data link DK of II-II ' line intercepting and the cutaway view of scan chain circuit SK.
With reference to Fig. 3, the metal level that data link DK that forms in the non-display area B of organic EL display device and scan chain circuit SK comprise transparency conducting layer 14 and form on this transparency conducting layer 14.
The method formation that each transparency conducting layer 14 usefulness of data link DK that forms in non-display area B and scan chain circuit SK are identical with form data wire in the A of viewing area.After electric conducting material such as chromium Cr or molybdenum Mo are deposited on the substrate fully, with this electric conducting material composition forming the metal level 16 of data link DK and scan chain circuit SK, thereby the transparency conducting layer 14 of cover data link DK and scan chain circuit SK.
Because transparency conducting layer 14 is formed by the tin indium oxide with high resistivity (ITO), indium zinc oxide (IZO) and tin indium oxide zinc (ITZO) etc., so data link DK and scan chain circuit SK have high resistance.Data link DK that is caused by these transparency conducting layers 14 and the high resistance of scan chain circuit SK have reduced the emission effciency of display device, and making distorted signals, described signal is applied to data wire DL and scan line SK from database DP and scanning board SPa and SPb through each data link DK and scan chain circuit SK.This has formed the reason of deterioration in image quality after driving the EL unit.
For above-mentioned reasons, for the data link DK that compensates correlation technique and the high resistance of scan chain circuit SK, metal level 16 forms on the transparency conducting layer 14 of data link DK and scan chain circuit SK by using chromium Cr or molybdenum Mo.But, be used to form the high-resistance chromium Cr of metal level 16 with offset data link DK and scan chain circuit SK, have the resistivity of 12.7 Ω cm.For molybdenum Mo, because the resistivity of molybdenum Mo is higher than chromium Cr, the resnstance transformer that the transparency conducting layer 14 by data link DK and scan chain circuit SK produces is not enough.
In addition, proposed to use resistivity to be lower than the aluminium Al of chromium Cr or molybdenum Mo.But when aluminium Al contacted with oxygen, aluminium Al had oxidized characteristic.Because there is such problem in this specific character of aluminium Al: the aluminium Al with low-resistivity can not be used to form the metal level 16 of data link DK and scan chain circuit SK in the organic EL display device.
In addition, as shown in Figure 2, under the scan chain circuit SK situation opposite with data link DK, in order to be connected on corresponding scanning board SPa and the SPb, each scan chain circuit SK passes the non-display area B of long distance.Therefore, the scan chain circuit SK that passes the non-display area B of long distance has the resistance that is higher than data link DK.The high resistance of scan chain circuit SK in fact makes emission effciency and picture quality deterioration more.
Summary of the invention
Therefore, an object of the present invention is to provide the organic elctroluminescent device and the manufacture method thereof that can improve emission effciency and reduce deterioration in image quality.
In order to reach these and other purposes of the present invention, comprise that according to embodiment of the present invention the organic elctroluminescent device of viewing area and non-display area comprises: data wire and scan line, they form with direction intersected with each other in the viewing area; In non-display area from the extended data link of data wire and be connected to the scan chain circuit of scan line; With database that in non-display area, forms and scanning board, described database extends with the width of having a lot of social connections than data chainning and is connected to the data link end, described scanning board extends with the width of having a lot of social connections than scan chain and is connected to the scan chain circuit end, wherein in data link, database, scan chain circuit and the scanning board any one forms in many conductive layers at least.
Data link, database, scan chain circuit and scanning board form in having many conductive layers of transparency conducting layer.
Many conductive layers comprise: at the transparency conducting layer that forms on the substrate, the aluminium lamination that is forming on the transparency conducting layer, the first metal layer that forms between transparency conducting layer and aluminium lamination, second metal level that forms on aluminium lamination.
The first metal layer prevents the corrosion that causes when aluminium lamination is connected to transparency conducting layer.
Second metal level prevents the corrosion that causes when aluminium is exposed in the air.
In first and second metal levels each all comprise in chromium and the molybdenum at least any one.
Data link and database only form in single conductive layer, and scan chain circuit and scanning board form in many conductive layers.
Single conductive layer is a transparency conducting layer.
Many conductive layers comprise aluminium.
Many conductive layers comprise: the aluminium lamination on the substrate; With the metal level that on aluminium lamination, covers aluminium lamination.
Metal level prevents contacting of aluminium lamination and oxygen.
Metal level comprise in chromium and the molybdenum at least any one.
Each data link, database, scan chain circuit and scanning board comprise: aluminium lamination and the metal level that piles up on aluminium lamination, data link is included in the transparency conducting layer that piles up on the metal level.
Metal level prevents that aluminium lamination from contacting with oxygen.
Metal level comprise in chromium and the molybdenum at least any one.
The organic elctroluminescent device that comprises viewing area and non-display area according to embodiment of the present invention comprises: the data wire that is made of transparency conducting layer in the viewing area; The scan line that intersects with data wire in the viewing area has organic luminous layer between the two; The data link that in non-display area, forms by aluminium lamination, its data wire vertically on separate and extend and be connected to the database of data link longitudinal end with the width of having a lot of social connections than data chainning with data wire; The scan chain circuit that is connected to scan line that in non-display area, forms and extend and be connected to the scanning board of scan chain circuit longitudinal end with the width of having a lot of social connections than scan chain by aluminium lamination; In non-display area, form by metal level, cover data link and database and subdata link that data link is electrically connected with data wire.
Organic elctroluminescent device also is included in the sub-scan chain circuit that is formed by metal level in the non-display area, cover scan chain circuit and scanning board.
Scan chain circuit, scanning board, data link and database are formed by same material.
Sub-scan chain circuit and subdata chain route same material form.
Metal level comprise in chromium and the molybdenum at least any one.
The subdata link prevents that with sub-scan chain circuit data link, database, scan chain circuit and scanning board from contacting with oxygen.
A kind ofly comprise that according to the embodiment of the present invention manufacturing method of the organic elctroluminescent device of viewing area and non-display area comprises: in the viewing area, form data wire and in non-display area, form the transparency conducting layer of following each several part: extend and be connected to the database, scan chain circuit of data link longitudinal end from the extended data link of data wire, in non-display area with the width of having a lot of social connections and with width extension of having a lot of social connections and the scanning board that is connected to the scan chain circuit longitudinal end than scan chain than data chainning; On the transparency conducting layer of data link, database, scan chain circuit and scanning board, form many conductive layers; In the viewing area, form the scan line that is connected to scan chain circuit and intersects with data wire.
The formation of many conductive layers comprises: form the first metal layer on transparent conductive patterns; On the first metal layer, form aluminium lamination; With formation second metal level on aluminium lamination.
The first metal layer prevents the corrosion that causes when aluminium lamination contacts with transparency conducting layer.
Second metal level prevents the corrosion that causes when aluminium lamination is exposed in the air.
First and second metal levels comprise in chromium and the molybdenum at least any one.
A kind ofly comprise that according to the embodiment of the present invention manufacturing method of the organic elctroluminescent device of viewing area and non-display area comprises: in the viewing area, form data wire, in non-display area, form and be connected to data wire and have the data link of single conductive layer and be connected to the database of data link end; In non-display area by piling up scan chain circuit that many conductive layers form and the scanning board that is connected to this scan chain circuit end; With in the viewing area, form the scan line be connected to scan chain circuit and intersect with data wire.
Single conductive layer is formed by transparency conducting layer.
Many conductive layers are formed by the many conductive layers that contain aluminium.
The formation of many conductive layers comprises: form aluminium lamination on substrate; With the metal level that on aluminium lamination, forms the covering aluminium lamination.
Metal level prevents that aluminium lamination from contacting with oxygen.
Metal level comprise in chromium and the molybdenum at least any one.
A kind ofly comprise that according to the embodiment of the present invention manufacturing method of the organic elctroluminescent device of viewing area and non-display area comprises: thus in non-display area, form by piling up aluminium lamination and the metal level on aluminium lamination: data link, the database that is connected to the data link end, scan chain circuit and be connected to the scanning board of scan chain circuit end; In the viewing area, form the data wire that is connected to data link; With the scan line that formation in the viewing area is connected to scan chain circuit and intersects with data wire, wherein data link comprises the transparency conducting layer that is stacked on the metal level.
Metal level prevents that aluminium lamination from contacting with oxygen.
Metal level comprise in chromium and the molybdenum at least any one.
A kind ofly comprise that according to the embodiment of the present invention manufacturing method of the organic elctroluminescent device of viewing area and non-display area comprises: in the viewing area, form data wire; In non-display area by use aluminium lamination be formed on data wire vertically on separate with data wire data link, extend and be connected to database, the scan chain circuit of data link longitudinal end and extend and be connected to the scanning board of scan chain circuit longitudinal end with the width of having a lot of social connections with the width of having a lot of social connections than scan chain than data chainning; Subdata link by using metal level to form cover data link and database and data wire is electrically connected with data link in non-display area; With in the viewing area, form the scan line be connected to scan chain circuit and intersect with data wire.
A kind of method of making organic elctroluminescent device also comprises: form the sub-scan chain circuit that covers scan chain circuit and scanning board by the use metal level in non-display area.
Metal level comprise in chromium and the molybdenum at least any one.
The subdata link prevents that with sub-scan chain circuit data link, database, scan chain circuit and scanning board from contacting with oxygen.
Summary of drawings
By following detailed description of the embodiment of the present invention and with reference to accompanying drawing, these and other purposes of the present invention will be conspicuous, wherein:
Fig. 1 is the schematic plan view of the organic elctroluminescent device of demonstration correlation technique;
Fig. 2 is the schematic plan view of the another kind of organic elctroluminescent device of demonstration correlation technique;
Fig. 3 is for showing along I-I ' among Fig. 2 and the data link of II-II ' line intercepting and the cutaway view of scan chain circuit;
Fig. 4 is the schematic plan view of the organic elctroluminescent device of demonstration the present invention first to fourth embodiment;
Fig. 5 is the plane graph of the part organic elctroluminescent device of demonstration the present invention first to the 3rd embodiment;
Fig. 6 is that demonstration is along the data link of the first embodiment of the invention of III-III ' among Fig. 5 and the intercepting of IV-IV ' line and the cutaway view of scan chain circuit;
Fig. 7 is that demonstration is along the viewing area of the first embodiment of the invention of V-V ' among Fig. 4 and the intercepting of VI-VI ' line and the cutaway view of non-display area;
Fig. 8 A to 8D is the cutaway view of the method that progressively shows a kind of organic elctroluminescent device of making first embodiment of the invention;
Fig. 9 is that demonstration is along the data link of the second embodiment of the invention of III-III ' among Fig. 5 and the intercepting of IV-IV ' line and the cutaway view of scan chain circuit;
Figure 10 is that demonstration is along the viewing area of the second embodiment of the invention of V-V ' among Fig. 4 and the intercepting of VI-VI ' line and the cutaway view of non-display area;
Figure 11 A to 11D is the cutaway view of the method that progressively shows a kind of organic elctroluminescent device of making second embodiment of the invention;
Figure 12 is that demonstration is along the data link of the third embodiment of the invention of III-III ' among Fig. 5 and the intercepting of IV-IV ' line and the cutaway view of scan chain circuit;
Figure 13 is that demonstration is along the viewing area of the third embodiment of the invention of V-V ' among Fig. 4 and the intercepting of VI-VI ' line and the cutaway view of non-display area;
Figure 14 A to 14D is the cutaway view of the method that progressively shows a kind of organic elctroluminescent device of making third embodiment of the invention;
Figure 15 is the plane graph of the part organic elctroluminescent device of demonstration four embodiment of the invention;
Figure 16 is for showing along VII-VII ' among Figure 15 and the data link of VIII-VIII ' line intercepting and the cutaway view of scan chain circuit;
Figure 17 is that demonstration is along the viewing area of the four embodiment of the invention of V-V ' among Fig. 4 and the intercepting of VI-VI ' line and the cutaway view of non-display area; With
Figure 18 A to 18E is the cutaway view of the method that progressively shows a kind of organic elctroluminescent device of making four embodiment of the invention.
DESCRIPTION OF THE PREFERRED
In detail with reference to the preferred embodiments of the invention, shown embodiment in the accompanying drawings now.
Hereinafter, describe embodiment of the present invention in detail with reference to Fig. 4-18E.
Fig. 4 is the schematic plan view of organic electroluminescent (EL) display unit of demonstration the present invention first to fourth embodiment.
With reference to Fig. 4, the organic EL display device of embodiment of the present invention comprises: data wire DL intersected with each other and scan line SL; With viewing area A, wherein the EL unit (not shown) that forms on the crosspoint of the data wire DL of matrix type and scan line SL is arranged in described viewing area A, and has wherein realized image after organic emission.
The EL display device also comprises: from the extended data link DK of data wire DL of viewing area A; Be provided with the database part 74 of database DP, the width of described database DP is wideer than the end width of data link DK; Be connected to the scan chain circuit SK of scan line SL; With non-display area B, wherein be provided with first and second scanning board part 82a and the 82b, wherein the first and second scanning board part 82a and 82b have first and second scanning board SPa and the SPb, and its width is wideer than the end width of scan chain circuit SK.
For integrated purpose, the first and second plate portion 82a and 82b are divided into the both sides of database part 74, and described database part 74 forms at the downside of the substrate 52 of organic EL display device.
The database part 74 and the first and second scanning board part 82a and 82b are connected to coil type encapsulation TCP (not shown), and data driver (not shown) that produces data-signal and the first and second scanner driver (not shown)s that produce sweep signal have been installed thereon.
Database part 74 provides the data-signal that is applied to data wire DL from data driver, and this data-signal arrives corresponding data wire DL through each database DP and data link DK.The first and second scanning board part 82a and 82b provide from first and second scanner drivers and are applied to sweep signal to scan line SL, and this sweep signal arrives corresponding scan line SL through each scanning board SPa and SPb and scan chain circuit SKa and SKb.
Fig. 5 is the plane graph of the part organic elctroluminescent device of demonstration the present invention first to the 3rd embodiment, and Fig. 6 is that demonstration is along the data link of the first embodiment of the invention of III-III ' among Fig. 5 and the intercepting of IV-IV ' line and the cutaway view of scan chain circuit.
With reference to Fig. 5 and 6, the organic EL display device of first embodiment of the invention is included in data link DK and the scan chain circuit SK in the non-display area B.Here, data link DK and scan chain circuit SK comprise transparency conducting layer 64, the first metal layer 66, aluminium lamination 68 and second metal level 70 respectively, and they are deposited in order.
By the method identical, deposit on the substrate 52 fully transparent conductive material such as ITO, IZO, ITZO etc. and composition, to form the transparency conducting layer 64 of data link DK and scan chain circuit SK with the data wire DL of viewing area A.
Deposit on the substrate 52 in order the first conductive metallic material aluminium Al and second conductive metallic material and composition, to form the first metal layer 66, aluminium lamination 68 and second metal level 70.
Therefore, the data link DK and the scan chain circuit SK that pass non-display area B comprise the aluminium Al with low-resistivity, contain data link DK and the scan chain circuit SK of high-resistance transparent conductive material such as ITO, IZO and ITZO with compensation.Therefore, the emission effciency of organic EL display device has improved, and deterioration of image quality has reduced.
In this case, by using the first metal layer 66 that between transparency conducting layer 64 and aluminium lamination 68, forms, can prevent to contact the oxidation that causes with transparency conducting layer 64 owing to the aluminium lamination 68 of data link DK and scan chain circuit DK.In addition, by using second metal level 70 can prevent to be exposed to the oxidation that causes in the air owing to the aluminium lamination 68 of data link DK and scan chain circuit SK.
First and second metal levels 60 and 70 comprise chromium Cr or molybdenum Mo.
Fig. 7 is that demonstration is along the viewing area of the first embodiment of the invention of V-V ' among Fig. 4 and the intercepting of VI-VI ' line and the cutaway view of non-display area.
With reference to Fig. 7, the organic EL display device of first embodiment of the invention comprises: the data wire DL that separates preset distance in the A of the viewing area of substrate 52; , data link DK among non-display area Bs extended from the data wire DL of viewing area A; With the scan chain circuit SK that is connected to scan chain circuit SL.
Transparency conducting layer 64, the first metal layer 66, aluminium lamination 68 and second metal level 70 are piled up in order, to form scan chain circuit SK and data link DK.
In addition, organic EL display device comprises: the dielectric film 56 in the viewing area A on substrate 52, it has the opening portion that is used for each EL unit (not shown) and has contact hole 72, and this contact hole 72 is used for the scan line SL of viewing area A is connected to the scan chain circuit SK of non-display area B; Barrier rib 58 is used to make organic luminous layer 60 to separate with scan line SL on the dielectric film 56; With the scan line SL of viewing area A, it contacts with the scan chain circuit SK of non-display area B by contact hole 72.
Hereinafter, Fig. 8 A to 8D with reference to following progressively describes a kind of method of making the organic elctroluminescent device of first embodiment of the invention.
With reference to Fig. 8 A, deposit in the viewing area A on the substrate 52 fully transparent conductive material such as ITO, IZO, ITZO etc. and composition, to form the separately data wire DL of preset distance.Simultaneously, the transparency conducting layer 64 of data link DK and the transparency conducting layer 64 of scan chain circuit SK are connected to as follows the scan line SL that forms, and described transparency conducting layer 64 is preset distance separately, with by forming in the non-display area B of same procedure on substrate.
Then, as shown in Fig. 8 B, first metal material is deposited on the transparency conducting layer 64 of data link DK on the substrate 52 with data wire DL and scan chain circuit SK fully, aluminium Al is deposited on the substrate 52 that deposits first metal material thereon fully fully, second metal material is deposited on the substrate 52 that deposits aluminium on it fully fully, patterned then, thereby form data link DK and scan chain circuit SK, wherein transparency conducting layer 64, the first metal layer 66, aluminium lamination 68 and second metal level 70 pile up in non-display area B in order.
As shown in Fig. 8 C, on the substrate 52 of the data link DK of data wire DL with viewing area A and non-display area B and scan chain circuit SK, insulating material is deposited and composition fully, thereby form insulating barrier 56, it has opening portion and the contact hole 72 that is used for each EL unit (not shown), and the scan line SL that this contact hole 72 is used for the viewing area A that will be as follows forms is connected to the scan chain circuit SK of non-display area B.Subsequently, be used to make barrier rib 58 that organic luminous layer 60 separates with scan line SL to form having on the viewing area A of insulating barrier 56.Barrier rib 58 forms on the direction of intersecting with data wire DL.Thereafter, as shown in Fig. 8 D, on the substrate 52 with barrier rib 58, deposit luminous organic material by using mask, to form organic luminous layer 60, complete then deposition of electrode material is to form scan line SL.After deposition was used to form the electrode material of scan line SL fully, each scan chain circuit SK of non-display area B was connected to the respective scan line SL of viewing area A through contact hole 72.
Fig. 9 is that demonstration is along the data link of the second embodiment of the invention of Fig. 5 center line III-III ' and IV-IV ' intercepting and the cutaway view of scan chain circuit.
With reference to Fig. 9, the organic EL display device of second embodiment of the invention comprises: the data link DK and the database DP that are formed by transparent conductive material such as ITO, IZO, ITZO etc. in non-display area B; With scan chain circuit SK and scanning board SP, wherein the aluminium lamination 168 and second metal level 170 deposit on the non-display area B in order.
By the method identical with the data wire DL of viewing area A, transparent conductive material such as ITO, IZO, ITZO etc. are deposited on the substrate 52 and composition fully, to form data link DK and database DP.
Deposit on the substrate 52 in order aluminium Al and conductive metallic material and composition, to form scan chain circuit SK and scanning board SP.
Therefore, because the scan chain circuit SK that forms in non-display area B forms by aluminium Al, so compare with data link DK, passing the resistance of growing apart from the scan chain circuit SK of non-display area can be lowered.Therefore, the emission effciency of organic EL display device has improved, and deterioration of image quality has reduced.
In this respect, the metal level 170 of scan chain circuit SK and scanning board SP comprises chromium Cr or molybdenum Mo, and aluminium lamination 168 that can prevent to be formed by aluminium Al, scan chain circuit SK and scanning board SP contacts with oxygen.
Figure 10 is that demonstration is along the viewing area of the second embodiment of the invention of V-V ' among Fig. 4 and the intercepting of VI-VI ' line and the cutaway view of non-display area.
With reference to Figure 10, the organic EL display device of second embodiment of the invention comprises: the data wire DL that separates preset distance in the A of the viewing area of substrate 52; , data link DK among non-display area Bs extended from the data wire DL of viewing area A; Be connected to scan chain circuit SK scan chain circuit SL, that have aluminium lamination 168 and metal level 170.
In addition, organic EL display device comprises: the dielectric film 56 in the viewing area A on substrate 52, it has the opening portion that is used for each EL unit (not shown) and has contact hole 72, and this contact hole 72 is used for the scan line SL of viewing area A is connected to the scan chain circuit SK of non-display area B; Barrier rib 58 is used to make organic luminous layer 60 to separate with scan line SL on the dielectric film 56; With the scan line SL of viewing area A, it contacts with the scan chain circuit SK of non-display area B by contact hole 72.
Hereinafter, with reference to Figure 11 A to 11D, a kind of method of making the organic elctroluminescent device of second embodiment of the invention is described progressively.
With reference to Figure 11 A, transparent conductive material such as ITO, IZO, ITZO etc. are deposited on the substrate 52 and composition fully, to form separately the data wire DL of the viewing area A of preset distance and the data link DK of non-display area B.
Then, as shown in Figure 11 B, aluminium Al is deposited on the substrate 52 of data link DK of data wire DL with viewing area A and non-display area B fully, deposit on the substrate 52 with deposition of aluminum Al fully chromium Cr or molybdenum Mo and composition then, thereby form scan chain circuit SK, wherein aluminium lamination 168 and metal level 170 are stacked in the non-display area B in order.
As shown in Figure 11 C, on the substrate 52 of the data link DK of data wire DL with viewing area A and non-display area B and scan chain circuit SK, insulating material is deposited and composition fully, thereby form dielectric film 56, it has opening portion and the contact hole 72 that is used for each EL unit (not shown), and the scan line SL that this contact hole 72 is used for the viewing area A that will be as follows forms is connected to the scan chain circuit SK of non-display area B.Subsequently, be used to make barrier rib 58 that organic luminous layer 60 separates with scan line SL to form having on the viewing area A of dielectric film 56.Barrier rib 58 forms on the direction of intersecting with data wire DL.Thereafter, as shown in Figure 11 D, on the substrate 52 with barrier rib 58, deposit luminous organic material by using mask, to form organic luminous layer 60, electrode material is deposited fully to form scan line SL then.After deposition was used to form the electrode material of scan line SL fully, each scan chain circuit SK of non-display area B was connected to the respective scan line SL of viewing area A through contact hole 72.
Figure 12 is that demonstration is along the data link of the third embodiment of the invention of III-III ' among Fig. 5 and the intercepting of IV-IV ' line and the cutaway view of scan chain circuit.
With reference to Figure 12, the organic EL display device of third embodiment of the invention comprises data link DK and scan chain circuit SK, piles up aluminium lamination 268 and metal level 270 thereon in order.
Aluminium Al and conductive metallic material deposit on the substrate 52 and composition in order, to form data link DK and scan chain circuit SK.
Therefore, form data link DK and the scan chain circuit SK that passes non-display area B by using aluminium Al, thereby reduce the resistance of data link DK and scan chain circuit SK.Therefore, the emission effciency of organic EL display device has improved, and deterioration of image quality has reduced.
In this respect, the metal level 270 of data link DK and scan chain circuit SK comprises chromium Cr or molybdenum Mo, can prevent that the aluminium lamination 268 of data link DK and scan chain circuit SK from contacting with oxygen.In addition, the metal level 270 of the data link DK that forms on the aluminium lamination 268 of data link DK can prevent to be contacted with the aluminium lamination 268 of data link DK by the data wire DL that transparent conductive material such as ITO, IZO, ITZO etc. form.
Figure 13 is that demonstration is along the viewing area of the third embodiment of the invention of V-V ' among Fig. 4 and the intercepting of VI-VI ' line and the cutaway view of non-display area.
With reference to Figure 13, the organic EL display device of third embodiment of the invention comprises: the data wire DL that separates preset distance in the A of the viewing area of substrate 52; , data link DK among non-display area Bs extended from the data wire DL of viewing area A; With the scan chain circuit SK that is connected to scan chain circuit SL with aluminium lamination 268 and metal level 270.
In addition, organic EL display device comprises: the dielectric film 56 in the viewing area A on substrate 52, it has the opening portion that is used for each EL unit (not shown) and has contact hole 72, and this contact hole 72 is used for the scan line SL of viewing area A is connected to the scan chain circuit SK of non-display area B; Barrier rib 58 is used to make organic luminous layer 60 to separate with scan line SL on the dielectric film 56; With the scan line SL of viewing area A, it contacts with the scan chain circuit SK of non-display area B by contact hole 72.
Hereinafter, with reference to Figure 14 A to 14D, a kind of method of making the organic elctroluminescent device of third embodiment of the invention is described progressively.
With reference to Figure 14 A, aluminium Al is deposited on the substrate 52 fully, and chromium Cr or molybdenum Mo are deposited on the substrate 52 with deposition of aluminum Al fully, and be patterned then, thereby form data link DK and scan chain circuit SK, on non-display area B, pile up aluminium lamination 268 and metal level 270 in order.
, as Figure 14 B as shown in, fully deposit to substrate 52 on transparent conductive material such as ITO, IZO, ITZO etc. and composition, in the A of viewing area, to form data wire DL thereafter.In this respect, data wire DL extends to the metal level 270 of data link DK, to be connected to this data link DK that forms in non-display area B.
As shown in Figure 14 C, on the substrate 52 of the data link DL of data wire DL with viewing area A and non-display area B and scan chain circuit SK, insulating material is deposited and composition fully, thereby form dielectric film 56, it has opening portion and the contact hole 72 that is used for each EL unit (not shown), and the scan line SL that this contact hole 72 is used for the viewing area A that will be as follows forms is connected to the scan chain circuit SK of non-display area B.Subsequently, be used to make barrier rib 58 that organic luminous layer 60 separates with scan line SL to form having on the viewing area A of dielectric film 56.Barrier rib 58 forms on the direction of intersecting with data wire DL.Thereafter, as shown in Figure 14 D, on the substrate 52 with barrier rib 58, deposit luminous organic material by using mask, to form organic luminous layer 60, electrode material is deposited fully to form scan line SL then.After deposition was used to form the electrode material of scan line SL fully, each scan chain circuit SK of non-display area B was connected to the respective scan line SL of viewing area A through contact hole 72.
Figure 15 is the plane graph of the part organic elctroluminescent device of demonstration four embodiment of the invention, and Figure 16 is for showing along VII-VII ' among Figure 15 and the data link of VIII-VIII ' line intercepting and the cutaway view of scan chain circuit.
With reference to Figure 15 and 16, the organic EL display device of second embodiment of the invention comprises: the data wire DL that is formed by transparent conductive material in the A of viewing area; With data link DK that in non-display area B, forms and scan chain circuit SK by aluminium Al.
The data link DK that is formed by aluminium Al is free of attachment to data wire DL, corrodes behind contact data wire DL to prevent data link DK.For this reason, organic EL display device also comprises subdata link 370, is used for the data wire DL of viewing area A is connected to the data link DK of non-display area B.
The subdata link 370 that forms is used to cover data link DK and the database DP in the non-display area B.At this moment, also form sub-scan chain circuit SK together, it covers scan chain circuit SK and scanning board SP in the non-display area B.
Subdata link 370 and sub-scan chain circuit 371 are formed by chromium Cr or molybdenum Mo, can prevent that data link DK, the database DP, scan chain circuit SK and the scanning board SP that are formed by aluminium Al from contacting with oxygen.
As mentioned above, data link DK that forms in non-display area B and scan chain circuit SK are formed by aluminium Al, thereby can reduce the resistance of data link DK and scan chain circuit SK.Therefore, the emission effciency of organic EL display device has improved, and deterioration of image quality has reduced.
Figure 17 is that demonstration is along the viewing area of the four embodiment of the invention of V-V ' among Fig. 4 and the intercepting of VI-VI ' line and the cutaway view of non-display area.
With reference to Figure 17, the organic EL display device of four embodiment of the invention comprises: the data wire DL that separates preset distance in the A of the viewing area of substrate 52; With data link DK, database DP, scan chain circuit SK and the scanning board SP in the non-display area B of substrate 52.
The data link DK that forms is free of attachment to the data wire DL that forms in the A of viewing area.
Organic EL display device also comprises subdata link 370 and sub-scan chain circuit 371, their cover data link DK, database DP, scan chain circuit SK and scanning board SP.The subdata link 370 that forms is used for data link DK is connected to the data wire DL of viewing area A, and they do not interconnect.
In addition, organic EL display device comprises: the dielectric film 56 in the viewing area A on substrate 52, it has the opening portion that is used for each EL unit (not shown) and has contact hole 72, and this contact hole 72 is used for the scan line SL of viewing area A is connected to the scan chain circuit SK of non-display area B; Barrier rib 58 is used to make organic luminous layer 60 to separate with scan line SL on the dielectric film 56; With the scan line SL of viewing area A, it is by the scan chain circuit SK of contact hole 72 contact non-display area B.
Figure 18 A to 18E is the cutaway view of the method that progressively shows a kind of organic EL display device of making four embodiment of the invention.
With reference to Figure 18 A, transparent conductive material such as ITO, IZO, ITZO etc. are deposited on the substrate 52 and composition fully, to be formed on the data wire DL that separates preset distance in the A of viewing area.
Then, described in Figure 18 B, aluminium Al is deposited on the substrate 52 with data wire DL fully, and is patterned then, thereby forms data link DK, database DP, scan chain circuit SK, scanning board SP in non-display area B.In this respect, the data link DK of formation is free of attachment to the data wire DL that forms in the A of viewing area.
As shown in Figure 18 C, chromium Cr or molybdenum Mo are had data link DK by depositing to fully, on the substrate 52 of database DP, scan chain circuit SK and scanning board SP, patterned then, thus the subdata link 370 of cover data link DK and database DP and the sub-scan chain circuit 371 of covering scan chain circuit SK and scanning board SP formed.The subdata link 370 that forms is used for the data wire DL of viewing area A is connected with the data link DK of non-display area B, and wherein the data wire DL of viewing area A is not electrically connected to the data link DK of non-display area B.
As shown in Figure 18 D, on the substrate 52 of the subdata link 370 of data wire DL with viewing area A and non-display area B and sub-scan chain circuit 371, insulating material is by deposition is also patterned fully, thereby form dielectric film 56, it has opening portion and the contact hole 72 that is used for each EL unit (not shown), and the scan line SL that this contact hole 72 is used for the viewing area A that will be as follows forms is connected to the scan chain circuit SK of non-display area B.Subsequently, be used to make barrier rib 58 that organic luminous layer 60 separates with scan line SL to form having on the viewing area A of dielectric film 56.Barrier rib 58 forms on the direction of intersecting with data wire DL.Thereafter, as shown in Figure 18 E, on the substrate 52 with barrier rib 58, deposit luminous organic material by using mask, to form organic luminous layer 60, electrode material is deposited fully to form scan line SL then.After the electrode material that is used to form scan line SL deposited fully, each scan chain circuit SK of non-display area B was connected to the respective scan line SL of viewing area through contact hole 72.
As mentioned above, in the organic elctroluminescent device and manufacture method thereof of embodiment of the present invention, data link and scan chain circuit are formed by metal material with low-resistivity such as aluminium.Thereby the data link that forms in non-display area and the resistance of scan chain circuit have reduced.Thus, can improve the emission effciency of organic EL display device and the deterioration of minimizing image treatment.
Although the present invention is illustrated by above-mentioned embodiment shown in the drawings, it will be understood by those skilled in the art that to the invention is not restricted to these embodiments that its various modifications or variation are feasible, only otherwise deviate from spirit of the present invention.Therefore, scope of the present invention should only be determined by following claims or its equivalent.

Claims (39)

1. organic elctroluminescent device that comprises viewing area and non-display area, described device comprises:
Data wire and scan line, described data wire and scan line form with direction intersected with each other in the viewing area;
In non-display area from the extended data link of data wire and be connected to the scan chain circuit of scan line; With
Database that forms in non-display area and scanning board, described database extend with the width of having a lot of social connections than data chainning and are connected to the data link end, and described scanning board extends with the width of having a lot of social connections than scan chain and is connected to the scan chain circuit end,
Wherein in data link, database, scan chain circuit and the scanning board any one forms in many conductive layers at least.
2. organic elctroluminescent device as claimed in claim 1, wherein data link, database, scan chain circuit and scanning board form in having many conductive layers of transparency conducting layer.
3. organic elctroluminescent device as claimed in claim 2, wherein many conductive layers comprise:
The transparency conducting layer that on substrate, forms;
The aluminium lamination that on transparency conducting layer, forms;
The first metal layer that between transparency conducting layer and aluminium lamination, forms; With
Second metal level that on aluminium lamination, forms.
4. organic elctroluminescent device as claimed in claim 3, wherein the first metal layer prevents the corrosion that causes when aluminium lamination contacts with transparency conducting layer.
5. organic elctroluminescent device as claimed in claim 3, wherein second metal level prevents the corrosion that causes when aluminium lamination is exposed to air.
6. organic elctroluminescent device as claimed in claim 3, wherein each in first and second metal levels all comprise in chromium and the molybdenum at least any one.
7. organic elctroluminescent device as claimed in claim 1, wherein data link and database only form in single conductive layer, and scan chain circuit and scanning board form in many conductive layers.
8. organic elctroluminescent device as claimed in claim 7, wherein single conductive layer is a transparency conducting layer.
9. organic elctroluminescent device as claimed in claim 7, wherein many conductive layers comprise aluminium.
10. organic elctroluminescent device as claimed in claim 9, wherein many conductive layers comprise:
Aluminium lamination on the substrate; With
On aluminium lamination, cover the metal level of aluminium lamination.
11. organic elctroluminescent device as claimed in claim 9, wherein metal level prevents that aluminium lamination from contacting with oxygen.
12. organic elctroluminescent device as claimed in claim 11, wherein metal level comprise in chromium and the molybdenum at least any one.
13. organic elctroluminescent device as claimed in claim 1, wherein each data link, database, scan chain circuit and scanning board all comprise aluminium lamination and are stacked on metal level on this aluminium lamination, and wherein data link comprises the transparency conducting layer that is stacked on this metal level.
14. organic elctroluminescent device as claimed in claim 13, wherein metal level prevents that aluminium lamination from contacting with oxygen.
15. organic elctroluminescent device as claimed in claim 14, wherein metal level comprise in chromium and the molybdenum at least any one.
16. an organic elctroluminescent device that comprises viewing area and non-display area, described device comprises:
The data wire that in the viewing area, forms by transparency conducting layer;
In the viewing area, intersect and the scan line of organic luminous layer between them arranged with data wire;
Data link of in non-display area, separating with data wire on vertically at data wire and the database that extends and be connected to the data link longitudinal end with the width of having a lot of social connections than data chainning by aluminium lamination being used for of forming;
In non-display area, be connected to the scan chain circuit of scan line and extend and be connected to the scanning board of scan chain circuit longitudinal end with the width of having a lot of social connections than scan chain by aluminium lamination being used to of forming; With
The subdata link that is used for cover data link and database and data wire is electrically connected with data link that in non-display area, forms by metal level.
17. organic elctroluminescent device as claimed in claim 16 wherein also is included in sub-scan chain circuit that formed by metal level, that be used to cover scan chain circuit and scanning board in the non-display area.
18. organic elctroluminescent device as claimed in claim 16, wherein scan chain circuit, scanning board, data link and database are formed by same material.
19. organic elctroluminescent device as claimed in claim 17, its neutron scan chain circuit and subdata chain route same material form.
20. organic elctroluminescent device as claimed in claim 16, wherein metal level comprise in chromium and the molybdenum at least any one.
21. organic elctroluminescent device as claimed in claim 17, its neutron data link prevents that with sub-scan chain circuit data link, database, scan chain circuit and scanning board from contacting with oxygen.
22. a manufacturing comprises the method for the organic elctroluminescent device of viewing area and non-display area, described method comprises:
In the viewing area, form data wire and in non-display area, form the transparency conducting layer of following each several part: from the extended data link of data wire, extend and be connected to database, the scan chain circuit of data link longitudinal end and extend and be connected to the scanning board of scan chain circuit longitudinal end with the width of having a lot of social connections than scan chain with the width of having a lot of social connections than data chainning;
On the transparency conducting layer of data link, database, scan chain circuit, scanning board, form many conductive layers; With
In the viewing area, form the scan line that is connected to scan chain circuit and intersects with data wire.
23. method as claimed in claim 22, wherein the formation of many conductive layers comprises:
On transparent conductive patterns, form the first metal layer;
On this first metal layer, form aluminium lamination; With
On this aluminium lamination, form second metal level.
24. method as claimed in claim 23, wherein the first metal layer prevents the corrosion that causes when aluminium lamination contacts with transparency conducting layer.
25. method as claimed in claim 23, wherein second metal level prevents the corrosion that causes when aluminium lamination is exposed in the air.
26. method as claimed in claim 23, wherein first and second metal levels comprise in chromium and the molybdenum at least any one.
27. a manufacturing comprises the method for the organic elctroluminescent device of viewing area and non-display area, described method comprises:
In the viewing area, form data wire and in non-display area, form: be connected to data wire and have the data link of single conductive layer and be connected to the database of data link end;
In non-display area, form: scan chain circuit and be connected to the scanning board of scan chain circuit end by piling up many conductive layers; With
In the viewing area, form the scan line that is connected to scan chain circuit and intersects with data wire.
28. method as claimed in claim 27, wherein single conductive layer is formed by transparency conducting layer.
29. method as claimed in claim 27, wherein many conductive layers are formed by the many conductive layers that contain aluminium.
30. method as claimed in claim 27, wherein the formation of many conductive layers comprises:
On substrate, form aluminium lamination; With
On aluminium lamination, form the metal level that covers aluminium lamination.
31. method as claimed in claim 30, wherein metal level prevents that aluminium lamination from contacting with oxygen.
32. method as claimed in claim 31, wherein metal level comprise in chromium and the molybdenum at least any one.
33. a manufacturing comprises the method for the organic elctroluminescent device of viewing area and non-display area, described method comprises:
In non-display area, form: data link, the database that is connected to the data link end, scan chain circuit and be connected to the scanning board of scan chain circuit end by piling up aluminium lamination and the metal level on aluminium lamination;
In the viewing area, form the data wire that is connected to data link; With
In the viewing area, form the scan line that is connected to scan chain circuit and intersects with data wire,
Wherein data link comprises the transparency conducting layer that is stacked on the metal level.
34. method as claimed in claim 33, wherein metal level prevents that aluminium lamination from contacting with oxygen.
35. method as claimed in claim 34, wherein metal level comprise in chromium and the molybdenum at least any one.
36. a manufacturing comprises the method for the organic elctroluminescent device of viewing area and non-display area, described method comprises:
In the viewing area, form data wire;
In non-display area by using aluminium lamination to form: the data link of separating with data wire on vertically at data wire, extend and be connected to database, the scan chain circuit of data link longitudinal end and extend and be connected to the scanning board of scan chain circuit longitudinal end with the width of having a lot of social connections than scan chain with the width of having a lot of social connections than data chainning;
In non-display area by using metal level to form the subdata link, with cover data link and database and data wire is electrically connected with data link; With
In the viewing area, form the scan line that is connected to scan chain circuit and intersects with data wire.
37. method as claimed in claim 36, described method also comprises: form the sub-scan chain circuit that covers scan chain circuit and scanning board by the use metal level in non-display area.
38. method as claimed in claim 36, wherein metal level comprise in chromium and the molybdenum at least any one.
39. method as claimed in claim 36, its neutron data link prevents that with sub-scan chain circuit data link, database, scan chain circuit and scanning board from contacting with oxygen.
CNB2005101137483A 2004-10-14 2005-10-14 Organic electro-luminescence display device and method of fabricating the same Expired - Fee Related CN100482012C (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
KR1020040082236 2004-10-14
KR1020040082237 2004-10-14
KR1020040082234 2004-10-14
KR1020040082234A KR100692844B1 (en) 2004-10-14 2004-10-14 Organic Electro Luminescence Display and Fabricating Method Thereof
KR1020040082235 2004-10-14

Publications (2)

Publication Number Publication Date
CN1770935A true CN1770935A (en) 2006-05-10
CN100482012C CN100482012C (en) 2009-04-22

Family

ID=36751861

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB2005101137483A Expired - Fee Related CN100482012C (en) 2004-10-14 2005-10-14 Organic electro-luminescence display device and method of fabricating the same

Country Status (2)

Country Link
KR (1) KR100692844B1 (en)
CN (1) CN100482012C (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102034414A (en) * 2009-09-25 2011-04-27 乐金显示有限公司 Driving circuit for display device and method for driving the same
CN102157542A (en) * 2010-12-17 2011-08-17 四川虹视显示技术有限公司 PMOLED scanning electrode wiring structure
CN108628048A (en) * 2018-05-14 2018-10-09 昆山国显光电有限公司 Display panel and its display device

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100766923B1 (en) * 2006-11-10 2007-10-17 삼성에스디아이 주식회사 Organic light emitting diode display and fabricating method thereof
KR102023896B1 (en) * 2013-02-15 2019-09-24 삼성디스플레이 주식회사 Display substrate andmethod of manufacturing the same
KR102297897B1 (en) * 2017-04-25 2021-09-03 엘지디스플레이 주식회사 Substrate with multi layer pad, display panel comprising the substrate, and method of fabricating thereof

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102034414A (en) * 2009-09-25 2011-04-27 乐金显示有限公司 Driving circuit for display device and method for driving the same
CN102157542A (en) * 2010-12-17 2011-08-17 四川虹视显示技术有限公司 PMOLED scanning electrode wiring structure
CN108628048A (en) * 2018-05-14 2018-10-09 昆山国显光电有限公司 Display panel and its display device

Also Published As

Publication number Publication date
CN100482012C (en) 2009-04-22
KR20060033237A (en) 2006-04-19
KR100692844B1 (en) 2007-03-13

Similar Documents

Publication Publication Date Title
CN1169394C (en) Panchromatic organic electroluminescent display screen and its making method and drinking circuit
CN1645978A (en) Organic electroluminescent device and fabrication method thereof
CN100335958C (en) IPS type LCD and method for fabricating the same
CN1862804A (en) Semiconductor device and manufacturing method of the same
CN1800917A (en) Array substrate and display panel having the same
CN1691859A (en) Display device
CN1649461A (en) Light-emitting device
CN1956225A (en) Thin-film transistor, method of manufacturing the same, liquid crystal display panel having the same and electro-luminescence display panel having the same
CN1481205A (en) Organic electrolumincescence displaying device and its mfg. method
CN1638549A (en) Dual panel type organic electroluminescent display device and method of fabricating the same
CN1607561A (en) Display device with photosensor
CN1838448A (en) Light-emitting device
CN1573453A (en) Display device and manufacturing method of the same
CN1457220A (en) Active matrix organic electrogenerated luminescent device and manufacturing method thereof
CN1577414A (en) Display device
CN1862825A (en) Light emitting device and manufacturing method thereof and light emitting display and manufacturing method thereof
CN1700265A (en) Display device, color filter and electronic device
CN1416302A (en) Organic electrofluorescence displaying panel
CN1770935A (en) Organic electro-luminescence display device and method of fabricating the same
CN1913145A (en) Driving film, driving package, manufacturing method thereof and display comprising the same
CN1866527A (en) Thin film transistor array panel and method thereof
CN1496199A (en) Two-type organic electroluminescent display and its mfg. method
CN1734331A (en) Thin-film transistor display panel and LCD
CN101051645A (en) Pixel array substrate
CN1784096A (en) Method for manufacturing electro-optic element and electro-optic device

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
C17 Cessation of patent right
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20090422

Termination date: 20101014