CN1763938A - Package bonding structure of element - Google Patents
Package bonding structure of element Download PDFInfo
- Publication number
- CN1763938A CN1763938A CN 200410086482 CN200410086482A CN1763938A CN 1763938 A CN1763938 A CN 1763938A CN 200410086482 CN200410086482 CN 200410086482 CN 200410086482 A CN200410086482 A CN 200410086482A CN 1763938 A CN1763938 A CN 1763938A
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- substrate
- bonding structure
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- electrode
- package bonding
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Abstract
The invention relates to package joint structure for an element, which comprises: the first base with a plurality of metal pads and first joint metal layer and adhesive metal wire connected to pads and following electrodes, and a second base with a plurality of electrodes and second joint metal layer fixed to the first metal joint layer. This invention can be used in joint between IC and base without non-conductive film or anisotropic conductive film, increases reliability of process, reduces step and cost, and solves the high-temperature problem in prior art.
Description
Technical field
The present invention relates to a kind of connected structure, particularly relate to a kind of package bonding structure of electronic component.
Background technology
Owing to the semiconductor element encapsulation technology improves constantly for the requirement that increases component reliability, raising joint density and minimizing component size aspect, so conventional wire joint (wire bonding) is replaced by chip flip chip bonding encapsulation (flip-chip) technology gradually.
The flip-chip encapsulation technology is to form joint sheet (pad) or projection (bump) on the composition surface of element and substrate to replace the existing employed lead frame of encapsulation technology (lead frame), then at substrate surface coating solid.Realize circuit turn-on by the projection of direct pressing or soldered elements and the joint sheet of substrate, to finish flip-chip soldering encapsulation structure.Compare the electronic signal transmission distance that can reduce between element and substrate with the routing joint, be applicable to the encapsulation of high-speed electronic component.The existing chip flip chip packaging method, both have serious thermal expansion coefficient difference with respect to element owing to the solid of coating substrate, and when temperature changed, the influence of thermal stress made the bump bond of element and substrate produce distortion easily.
General flip-chip encapsulate employed solid can be divided into non-conductive film (Non-conductiveFilm, NCF) and aeolotropic conductive film (Anisotropic Conductive Film, ACF).The tradition joining technique is to use non-conductive film, non-conductive film is coated on the substrate, element is combined with substrate, and utilize pressurization and heating schedule to make non-conductive film melt and dissolved, the shrinkage stress that is produced after utilizing this film hardening fully is bonded together element and element.This joining technique can improve higher joint density, but element is to rely on mechanical forces to keep with engaging of element fully, just the stress that film produced need be kept the quality of contact conducting, when in case the stress that film bore is excessive, can make the phenomenon that produces coincide (lamination) on film other contact-making surface for circuit and base material again, the resistance after causing engaging raises.
The aeolotropic conductive film joining technique is that the conductive film that one deck contains the anisotropic of conducting particles is placed between element and the element that desire engages, utilizes pressurization and heating schedule to make film melt and dissolved, and element and element are bonded together.Make metal bond pads, metal coupling and conducting particles form conductive channel.The shortcoming of this kind joining technique is: when the spacing of metal bond pads and metal coupling very hour, because heating can cause conducting particles to produce the phenomenon that flows with the relation of pressurization, and make two adjacent phenomenons that conductiving point can be short-circuited, the demand that can't meet microminiaturization is so that engage the spacing that density can only reach 40 microns (μ m).
Another kind of eutectic diffusion bond (diffusion bonding) technology, be to utilize high temperature to make the contact of element and substrate produce the phenomenon of counterdiffusion mutually and engage, but because of junction temperature often need reach more than 400 degree Celsius, and the metal surface of two contacts can form metal oxide, its covalent bond can limit to the free electron of metal, be difficult to form metallic bond between the interface and make, and electric conduction phenomena comes from the tunneling effect of electronics, produce higher contact impedance, therefore also be not suitable for the application of thin space (fine pitch).
Summary of the invention
Technical problem to be solved by this invention is to provide a kind of package bonding structure of element, with the purpose of implementation structure improvement with the manufacturing process simplification.
To achieve these goals, the invention provides a kind of package bonding structure of element, its characteristics are, mainly comprise first substrate and second substrate; The surface of first substrate has a plurality of metal gaskets and the first jointing metal layer, the surface of second substrate has a plurality of electrodes and the second jointing metal layer, wherein first substrate is engaged in second substrate, the first jointing metal layer and the second jointing metal layer are then then fixing mutually, and a plurality of metal gasket electrically conducts in a plurality of electrodes.Particularly, second substrate of the present invention can be a kind of flexible base plate, as the macromolecular material substrate, engages the stress that is produced in order to cushion first substrate with second substrate.
In addition, the present invention has a kind of package bonding structure of element in addition, be to make a plurality of electrodes and the second jointing metal layer embed second substrate only to expose top end surface, similarly, the first jointing metal layer of aforesaid first substrate then is fixed in the second jointing metal layer, and a plurality of metal gasket electrically conducts in a plurality of electrodes.
And, the electric connection of then fixing and a plurality of electrodes of the first jointing metal layer and the second jointing metal interlayer, can be directly engage or surface activation process be finished joint with hot pressing mode, ultrasonic waves, also can first matching surface activation processing or the ultrasonic waves vibration after engage with hot pressing mode again.Joint interface earlier through surface active or ultrasonic treatment, can be reduced junction temperature, solve the high temperature problem that existing connection process is faced.
The package bonding structure of said elements, its characteristics are that this first substrate comprises a sticky metals circuit, and it connects this metal gasket and this electrode.
The package bonding structure of said elements, its characteristics are that this first substrate comprises a protective layer, are coated in this first substrate and expose this metal gasket.
The package bonding structure of said elements, its characteristics are that this first substrate comprises a sticky metals circuit, are connected in this metal gasket and extension and are covered in this protective layer, and be connected in this electrode.
The package bonding structure of said elements, its characteristics are that the adhesion circuit of this first substrate extends to this electrode place that is connected in this second substrate.
The package bonding structure of said elements, its characteristics are that the manufacturing step of this embedded substrate comprises: deposition one metal level on a bearing substrate; This metal level of etching forms this required electrode and this second metallic bond layer; Be coated with a macromolecule layer in this bearing substrate to cover this electrode and this second metallic bond layer; And remove this bearing substrate, expose this electrode and the top end surface of this second metallic bond layer of being embedded in this macromolecule layer, with this embedded substrate of formation.
The package bonding structure of said elements, its characteristics are, then fixing between this electrode and this metal gasket finished joint with the method that hot pressing, ultrasonic waves joint or surface activation process engage wherein.
The package bonding structure of said elements, its characteristics are, then fixing between this electrode and this metal gasket, with a ultrasonic waves vibration and a surface activation process method wherein, handle this first jointing metal layer and engage with a method that directly engages wherein with hot pressing more earlier with the desire composition surface of this second jointing metal layer.
The package bonding structure of said elements, its characteristics are, also comprise a solid, in order to the edge in conjunction with this first substrate and this second substrate.
Effect of the present invention, be to can be applicable to engaging as integrated circuit (IC) chip and substrate, need not to use non-conductive film or aeolotropic conductive film, can improve joint density, reach thin space and engage, increase the reliability of manufacturing process, and reduce making step and reduce manufacturing cost, and in engaging process,, can reduce junction temperature, solve the high temperature problem that existing joining technique is faced joint interface elder generation process surface active or ultrasonic treatment.
Describe the present invention below in conjunction with the drawings and specific embodiments, but not as a limitation of the invention.
Description of drawings
Fig. 1 is the amplification schematic cross-section of first embodiment of the invention;
Fig. 2 is the amplification schematic cross-section of second embodiment of the invention;
Fig. 3 is the amplification schematic cross-section of third embodiment of the invention; And
Fig. 4 A to Fig. 4 D is the manufacturing process schematic diagram of embedded substrate.
Wherein, Reference numeral:
100-first substrate, 110-metal gasket, 120-sticky metals circuit
The 130-first jointing metal layer, the 140-protective layer
200-second substrate, 210-electrode, the 220-second jointing metal layer
The 230-solid, 300-macromolecule layer, 400-metal level
The 401-bearing substrate, the 410-electrode
420-second metallic bond layer
Embodiment
As shown in Figure 1, it comprises first substrate 100 and second substrate 200; The surface of first substrate has a plurality of metal gaskets 110, sticky metals circuit 120, protective layer 140 and the first jointing metal layer 130; protective layer 140 is formed at the surface of first substrate 100 and exposes a plurality of metal gaskets 110; sticky metals circuit 120 is connected in metal gasket 110 and extends and is covered in protective layer 140; electric connection after being beneficial to, the first jointing metal layer 130 is covered on the protective layer 140.The surface of second substrate 200 has a plurality of electrodes 210 and the second jointing metal layer 220, wherein first substrate 100 engages second substrate 120 in aspectant mode, make the first jointing metal layer 130 then be fixed in the second jointing metal layer 220, and a plurality of metal gasket 110 conductings in sticky metals circuit 120 to be electrically connected at a plurality of electrodes 210, and a small amount of solid 230 is inserted in the trip edge of first substrate 100 and second substrate 200, with engaging of more firm first substrate 100 and second substrate 200, and prevent that aqueous vapor from entering connected structure.
And the electrode of the metal gasket of first substrate of the present invention and second substrate can utilize the adhesion circuit of first substrate to stretch out to be connected in the electrode place of second substrate.Please refer to Fig. 2, it is the amplification schematic cross-section of second embodiment of the invention.Similarly, comprise first substrate 100 and second substrate 200; The surface of first substrate 100 has a plurality of metal gaskets 110, sticky metals circuit 120, protective layer 140 and the first jointing metal layer 130; protective layer 140 is formed at the surface of first substrate 100 and exposes a plurality of metal gaskets 110; sticky metals circuit 120 is connected in metal gasket 110 and extends and is covered in protective layer 140, the first jointing metal layers 130 and is covered on the protective layer 140.The surface of second substrate 200 has a plurality of electrodes 210 and the second jointing metal layer 220, first substrate 100 is engaged in second substrate 200, make the first jointing metal layer 130 then be fixed in the second jointing metal layer 220, yet the metal gasket 110 of first substrate 100 is not in alignment with the electrode 210 of second substrate 200, electrode 210 places that the adhesion circuit 120 of first substrate extends to be connected in second substrate 200, make a plurality of metal gasket 110 conductings in sticky metals circuit 120 being electrically connected at a plurality of electrodes 210, and a small amount of solid 230 is inserted in the trip edge of first substrate 100 and second substrate 200.
In addition, the present invention also can make a plurality of electrodes 210 and the second jointing metal layer, 220 embedding, second substrate 200 only expose top end surface, please refer to Fig. 3, and it is the amplification schematic cross-section of third embodiment of the invention.Comprise first substrate 100 and second substrate 200; The structure of first substrate 100 as previously mentioned, and surperficial set a plurality of electrodes 210 of second substrate 200 and the second jointing metal layer, 220 embedding, second substrate 200 only expose its top end surface, first substrate 100 engages second substrate 200 in aspectant mode, make the first jointing metal layer 130 then be fixed in the second jointing metal layer 220, and a plurality of metal gasket 110 conductings in sticky metals circuit 120 being electrically connected at a plurality of electrodes 210, and a small amount of solid 230 is inserted in the trip edge of first substrate 100 and second substrate 200.By the second embedded board structure, can further reduce the volume of encapsulation.
Wherein, embedded substrate can be made by following steps, please refer to Fig. 4 A to Fig. 4 D, and it is the manufacturing process schematic diagram of embedded substrate.
Shown in Fig. 4 A, elder generation's depositing metal layers 400 on bearing substrate 401.
And for example shown in Fig. 4 B, etch metal layers 400 is to form the required electrode 410 and second metallic bond layer 420.
Shown in Fig. 4 C, coating macromolecule layer 300 is with the coated electrode 410 and second metallic bond layer 420 on bearing substrate.
Shown in Fig. 4 D, remove bearing substrate 401, to expose the electrode 410 that embeds macromolecule layer 300 and the surface of second metallic bond layer 420, to form the second embedded substrate.
And, the electric connection of then fixing and a plurality of electrodes and the sticky metals circuit or the metal gasket of the first jointing metal layer and the second jointing metal interlayer, can directly finish joint with hot pressing mode, ultrasonic waves joint or surface activation process, also can first matching surface activation processing or the ultrasonic waves vibration joint interface is carried out surface active or ultrasonic treatment, again with hot pressing or directly juncture engages.Wherein the surface activation process that is cooperated is that the lip-deep dust particle and the oxide layer of the first metal layer, knitting layer and a plurality of electrodes are removed, carry out follow-up joint manufacturing process again, form the metal bond at joint interface, therefore can make the package bonding structure of first substrate and the formed element of second substrate have splendid electrical characteristic.
The present invention carries out the then fixing of first substrate and second substrate with first metallic bond layer and combining of second metallic bond layer, need not to use non-conductive film or aeolotropic conductive film, and because first metallic bond layer can form simultaneously with the metal gasket or the sticky metals circuit of first substrate, and second metallic bond layer can form simultaneously with the electrode of second substrate, therefore, can reduce making step and reduction manufacturing cost.And in engaging process,, can reduce junction temperature, solve the high temperature problem that existing joining technique is faced joint interface elder generation process surface active or ultrasonic treatment.
Certainly; the present invention also can have other various embodiments; under the situation that does not deviate from spirit of the present invention and essence thereof; those of ordinary skill in the art can make various corresponding changes and distortion according to the present invention, but these corresponding changes and distortion all should belong to the protection range of claim of the present invention.
Claims (16)
1, a kind of package bonding structure of element is characterized in that, includes:
One first substrate, its surface have a plurality of metal gaskets and one first jointing metal layer; And
One second substrate, its surface have a plurality of electrodes and one second jointing metal layer, and this second jointing metal layer then is fixed in this first jointing metal layer, make this first substrate be engaged in second substrate, and this metal gasket electrically conducts in this electrode.
2, the package bonding structure of element according to claim 1 is characterized in that, this first substrate comprises a sticky metals circuit, and it connects this metal gasket and this electrode.
3, the package bonding structure of element according to claim 2 is characterized in that, engaging between this electrode and this sticky metals circuit is to finish joint with hot pressing, ultrasonic waves engages and surface activation process engages wherein a method.
4, the package bonding structure of element according to claim 2, it is characterized in that, then fixing between this electrode and this metal gasket, earlier with a ultrasonic waves vibration and a surface activation process method wherein, handle the desire composition surface of this first jointing metal layer and this second jointing metal layer, engage with a method that directly engages wherein with hot pressing again.
5, the package bonding structure of element according to claim 1 is characterized in that, this first substrate comprises a protective layer, is coated in this first substrate and exposes this metal gasket.
6, the package bonding structure of element according to claim 5 is characterized in that, this first substrate comprises a sticky metals circuit, is connected in this metal gasket and extension and is covered in this protective layer, and be connected in this electrode.
7, the package bonding structure of element according to claim 6 is characterized in that, the adhesion circuit of this first substrate extends to this electrode place that is connected in this second substrate.
8, the package bonding structure of element according to claim 1 is characterized in that, this second substrate is a flexible base plate.
9, the package bonding structure of element according to claim 8 is characterized in that, this flexible base plate is the macromolecular material substrate.
10, the package bonding structure of element according to claim 1 is characterized in that, this second substrate is an embedded substrate, and this electrode and this second jointing metal layer are embedded in this second substrate and only expose its top end surface.
11, the package bonding structure of element according to claim 10 is characterized in that, the manufacturing step of this embedded substrate comprises:
Deposition one metal level on a bearing substrate;
This metal level of etching forms this required electrode and this second metallic bond layer;
Be coated with a macromolecule layer in this bearing substrate to cover this electrode and this second metallic bond layer; And
Remove this bearing substrate, expose this electrode that is embedded in this macromolecule layer and the top end surface of this second metallic bond layer, to form this embedded substrate.
12, the package bonding structure of element according to claim 1, it is characterized in that, then fixing of this first jointing metal layer and this second jointing metal interlayer is to finish joint with the method that hot pressing, ultrasonic waves joint and surface activation process engage wherein.
13, the package bonding structure of element according to claim 1, it is characterized in that, then fixing of this first jointing metal layer and this second jointing metal interlayer, with a ultrasonic waves vibration and a surface activation process method wherein, handle this first jointing metal layer and engage with a method that directly engages wherein with hot pressing more earlier with the desire composition surface of this second jointing metal layer.
14, the package bonding structure of element according to claim 1 is characterized in that, then fixing between this electrode and this metal gasket finished joint with the method that hot pressing, ultrasonic waves joint or surface activation process engage wherein.
15, the package bonding structure of element according to claim 1, it is characterized in that, then fixing between this electrode and this metal gasket, with a ultrasonic waves vibration and a surface activation process method wherein, handle this first jointing metal layer and engage with a method that directly engages wherein with hot pressing more earlier with the desire composition surface of this second jointing metal layer.
16, the package bonding structure of element according to claim 1 is characterized in that, also comprises a solid, in order to the edge in conjunction with this first substrate and this second substrate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200410086482 CN100521171C (en) | 2004-10-21 | 2004-10-21 | Package bonding structure of element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200410086482 CN100521171C (en) | 2004-10-21 | 2004-10-21 | Package bonding structure of element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1763938A true CN1763938A (en) | 2006-04-26 |
| CN100521171C CN100521171C (en) | 2009-07-29 |
Family
ID=36747988
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200410086482 Expired - Fee Related CN100521171C (en) | 2004-10-21 | 2004-10-21 | Package bonding structure of element |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN100521171C (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101279709B (en) * | 2007-04-04 | 2011-01-19 | 财团法人工业技术研究院 | Multi-layer type encapsulation structure of minisize acoustic sensor |
| CN101807558B (en) * | 2009-02-12 | 2012-07-04 | 财团法人工业技术研究院 | Element sealing and bonding structure and process thereof |
| CN102823000A (en) * | 2010-04-08 | 2012-12-12 | 日亚化学工业株式会社 | Light-emitting device and process for production thereof |
| CN112993135A (en) * | 2020-07-01 | 2021-06-18 | 重庆康佳光电技术研究院有限公司 | Display panel manufacturing method, display panel and display device |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3073644B2 (en) * | 1993-12-28 | 2000-08-07 | 株式会社東芝 | Semiconductor device |
| US5854514A (en) * | 1996-08-05 | 1998-12-29 | International Buisness Machines Corporation | Lead-free interconnection for electronic devices |
| JP3422276B2 (en) * | 1999-02-04 | 2003-06-30 | 松下電器産業株式会社 | Resin-sealed semiconductor device and method of manufacturing the same |
| EP1328015A3 (en) * | 2002-01-11 | 2003-12-03 | Hesse & Knipps GmbH | Method of bonding a flip chip |
| JP3550391B2 (en) * | 2002-05-15 | 2004-08-04 | 沖電気工業株式会社 | Semiconductor device and manufacturing method thereof |
-
2004
- 2004-10-21 CN CN 200410086482 patent/CN100521171C/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101279709B (en) * | 2007-04-04 | 2011-01-19 | 财团法人工业技术研究院 | Multi-layer type encapsulation structure of minisize acoustic sensor |
| CN101807558B (en) * | 2009-02-12 | 2012-07-04 | 财团法人工业技术研究院 | Element sealing and bonding structure and process thereof |
| CN102823000A (en) * | 2010-04-08 | 2012-12-12 | 日亚化学工业株式会社 | Light-emitting device and process for production thereof |
| CN102823000B (en) * | 2010-04-08 | 2016-08-03 | 日亚化学工业株式会社 | Light-emitting device and manufacture method thereof |
| CN112993135A (en) * | 2020-07-01 | 2021-06-18 | 重庆康佳光电技术研究院有限公司 | Display panel manufacturing method, display panel and display device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN100521171C (en) | 2009-07-29 |
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Granted publication date: 20090729 Termination date: 20181021 |