CN1755432A - System and method of reducing color shift in a display - Google Patents

System and method of reducing color shift in a display Download PDF

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Publication number
CN1755432A
CN1755432A CN 200510103554 CN200510103554A CN1755432A CN 1755432 A CN1755432 A CN 1755432A CN 200510103554 CN200510103554 CN 200510103554 CN 200510103554 A CN200510103554 A CN 200510103554A CN 1755432 A CN1755432 A CN 1755432A
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China
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display system
optical element
substrate
light
display
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杰弗里·B·桑普塞尔
卡伦·泰格尔
米特兰·马修
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Qualcomm MEMS Technologies Inc
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IDC LLC
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Abstract

The invention reveals a system and a method for reducing color throw in a display, which comprise an interference type modulator display which is configured as reflected light which passes by the display to an optical path of an observer along at least one light source, and passes through at least one converging optical element from the light source. The converging optical element comprises a diffraction optical element in an example.

Description

Reduce the system and method for the gamut in the display
Technical field
Technical field of the present invention relates to MEMS (micro electro mechanical system) (MEMS).
Background technology
MEMS (micro electro mechanical system) (MEMS) comprises micromechanical component, driver and electronic component.Micromechanical component can adopt deposition, etching or other several portions that can etch away substrate and/or institute's deposited material layer maybe can add several layers and make with the micromachined technology that forms electricity and electromechanical assembly.One type MEMS device is called as interferometric modulator.Interferometric modulator can comprise the pair of conductive plate, one of them or the two all can be transparent whole or in part and/or be reflectivity, and can relative motion when applying a suitable electric signal.One of them plate can comprise a quiescent layer that is deposited on the substrate, and another plate can comprise a metal partion (metp) that separates by a clearance and this quiescent layer.Said apparatus is with a wide range of applications, and in this technology, utilizes and/or revises the characteristic of these types of devices so that its performance can be used for improving existing product and makes still undeveloped at present new product will be rather useful.
Summary of the invention
System of the present invention, method and device all have many aspects, and arbitrary single aspect all can not determine its desired characteristic separately.Now, its main characteristic is carried out brief description, this not delimit the scope of the invention.Checking this explanation, especially reading title for after the part of " embodiment ", how people provides the advantage that is better than other display device if can understanding characteristic of the present invention.
One embodiment is a kind of display system that is used for display image.Described display system comprises a plurality of interference of light formula modulators that are incident on the surface thereof that are configured to modulate.Described display system further comprises a converging optical element, and its surface alignment with respect at least one interferometric modulator in a plurality of interferometric modulators becomes to make the focal length of described optical element greater than the distance between described optical element and the described surface.
Another embodiment is a kind of method of manufacturing one display system.Described method is included in and forms a plurality of interferometric modulators on one first substrate.Described method further is included in and forms a converging optical element on one second substrate.Described optical element becomes to make the focal length of described optical element greater than the distance between described optical element and described at least one surface with respect at least one surface alignment of at least one interferometric modulator in a plurality of interferometric modulators.Another embodiment is a display system according to this method manufacturing.
Another embodiment is a kind of display system that is used for display image.Described display system comprises: be used for the member with interference mode modulation light incident thereon; And being used for the member of converging light, this convergence member is through adjusting the gamut of at least a portion between different viewing location to limit described image.
Another embodiment is a kind of display system of making by a method that may further comprise the steps: form a plurality of interferometric modulators on one first substrate; Form a convergence diffraction optical element on one second substrate, described optical element is positioned to be redirected at least one the lip-deep light that is incident at least one interferometric modulator in described a plurality of interferometric modulator.
Another embodiment is a kind of display system that is used for display image, and described display system comprises: be used for the member with interference mode modulation light incident thereon; And be used for diffraction light and be incident in the described member that is used for the light on the member of interference mode light modulated to be redirected, the wherein said member that is used for diffraction light is configured to assemble described light.
Another embodiment is a kind of display system that is used to show an image, and described display system comprises: a plurality ofly be configured to modulate interference of light formula modulator incident thereon; Reach one and be configured to be redirected the convergence diffraction optical element that is incident in the light at least one interferometric modulator in described a plurality of interferometric modulator.
Another embodiment is a kind of display system that is used for display image, and described display system comprises: be used for the member with interference mode modulation light incident thereon; And be used for diffraction light and be incident in the described member that is used for the light on the member of interference mode light modulated to be redirected.
Description of drawings
Fig. 1 is an isometric drawing, it shows the part of an embodiment of an interferometric modulator display, wherein one of one first interferometric modulator removable reflection horizon is in an off-position, and a removable reflection horizon of one second interferometric modulator is in an excited target position.
Fig. 2 is a system block diagram, and it shows that one comprises an embodiment of the electronic installation of one 3 * 3 interferometric modulator displays.
Fig. 3 is the removable mirror position of an exemplary embodiment of interferometric modulator shown in Figure 1 and the graph of a relation of the voltage that applies.
Fig. 4 is one group and can be used for driving the row of interferometric modulator display and the synoptic diagram of column voltage.
Fig. 5 A and Fig. 5 B show and can be used for writing the row of a frame of display data and an exemplary sequential chart of column signal to 3 * 3 interferometric modulator displays shown in Figure 2.
Fig. 6 A is the sectional view of a device shown in Figure 1.
Fig. 6 B is a sectional view of an alternate embodiment of an interferometric modulator.
Fig. 6 C is a sectional view of another alternate embodiment of an interferometric modulator.
Fig. 7 is the schematic side profile diagram of an embodiment of an interferometric modulator display, and it shows through an interferometric modulator element of the described display optical path from light source to an observer.
Fig. 8 is the schematic side profile diagram of another embodiment of interferometric modulator display, similar to the interferometric modulator display shown in Fig. 7, described interferometric modulator display is comprising lens from light source in the optical path to the observer through interferometric modulator element.
Fig. 9 is the schematic side profile diagram of another embodiment of interferometric modulator display, similar to the interferometric modulator display shown in Fig. 8, described interferometric modulator display is comprising a diffraction optical element from light source in the optical path to the observer through interferometric modulator element.
Figure 10 is the schematic side profile diagram of another embodiment of interferometric modulator display, similar to the interferometric modulator display shown in Fig. 8, described interferometric modulator display is comprising a single-stage binary optical elements in the optical path to the observer from light source through interferometric modulator element.
Figure 11 A and 11B are system block diagrams, and it shows that one comprises an embodiment of the visual display unit of a plurality of interferometric modulators.
Embodiment
Below describe in detail and relate to some embodiments of the invention.But, the present invention can implement by being permitted different ways.In this explanation, can be with reference to accompanying drawing, in the accompanying drawings, identical parts use identical number-mark from start to finish.
In preferred embodiment, the present invention includes the optical element that is positioned between interferometric display and the display observer, for example lens, Fresnel Lenses, diffraction optical element or a binary optical elements.Appreciable gamut when described optical element is configured to be reduced in viewing angle or the variation of optic angle degree.
Below describe in detail and relate to some embodiments of the invention.But, the present invention can implement by being permitted different ways.In this explanation, can be with reference to accompanying drawing, in the accompanying drawings, identical parts use identical number-mark from start to finish.Find out easily that according to following explanation the present invention can be used for display image-no matter be dynamic image (for example video) or still image (for example rest image) in arbitrary configuration, no matter be character image or picture-device in implement.More specifically, the present invention can implement in inferior numerous kinds of electronic installations or is associated with these electronic installations for example (but being not limited to): mobile phone, wireless device, personal digital assistant (PDA), handheld computer or portable computer, gps receiver/omniselector, camera, the MP3 player, video camera, game machine, wrist-watch, clock, counter, TV monitor, flat-panel monitor, computer monitor, automotive displays (for example, mileometer display etc.), driving cabin control device and/or display, the camera view display (for example, the rear view camera display of vehicle), electronic photo, electronics billboard or label, projector, building structure, packing and aesthetic structures (for example, the image display of a jewelry).The MEMS device that has similar structures with MESE device described herein also can be used for non-display application, for example is used for electronic switching device.
In Fig. 1, show a kind of interferometric modulator display embodiment that comprises an interfere type MEMS display element.In these devices, pixel is in bright state or dark state.Under bright (" opening (on) " or " opening (open) ") state, display element reflexes to the user with most of incident visible light.Be in dark (" closing (off) " or " closing (closed) ") state following time, display element reflects the incident visible light to the user hardly.Decide on different embodiment, can put upside down the light reflectance properties that " on " reaches " off " state.The MEMS pixel can be configured to mainly reflect under selected color, also can realize colored the demonstration except that black and white.
Fig. 1 is an isometric drawing, and it shows two adjacent pixels in a series of pixels of a visual displays, and wherein each pixel comprises a MEMS interferometric modulator.In certain embodiments, an interferometric modulator display comprises a row/column array that is made of these interferometric modulators.Each thousand relates to the formula modulator and comprises a pair of reflection horizon, and this is positioned to each other to have a variable-sized optical resonance cavity at a distance of a variable and controlled distance at least to form one to the reflection horizon.In one embodiment, one of them reflection horizon can be moved between the two positions.Be referred to herein as on the primary importance of release conditions, the local reflex layer that the position of this displaceable layers distance one is fixed is far away relatively.On the second place, the position of this displaceable layers is more closely near this local reflex layer.Decide position according to removable reflection horizon, from the incident light of this two layers reflection can with mutually long or mutually the mode of disappearing interfere, thereby form the mass reflex or the non-reflective state of each pixel.
The pixel array portion that shows in Fig. 1 comprises two adjacent interferometric modulator 12a and 12b.In the interferometric modulator 12a in left side, demonstration one movably high reflection layer 14a is in an off-position, and this off-position is apart from fixing local reflex layer 16a one preset distance.In the interferometric modulator 12b on right side, demonstration one movably high reflection layer 14b is in an excited target position, and this excited target position is near fixing local reflex layer 16b.
Fixed bed 16a, 16b conduct electricity, the part is transparent and local is reflectivity, and can the layer of one or more respectively do for oneself chromium and tin indium oxides be made by for example depositing on a transparent substrates 20.Described each layer is patterned into parallel band, and can form the column electrode in the display device, as further specifying hereinafter. Displaceable layers 14a, 14b can form by one or more depositing metal layers that is deposited on pillar 18 tops (and column electrode 16a, 16b quadrature) and and be deposited on the series of parallel band that the middle expendable material between the pillar 18 constitutes.After expendable material was etched, these deformable metal levels separated with the air gap 19 of the metal level of fixing by a regulation.These deformable layer can use one to have high conductivity and reflexive material (for example aluminium), and those bands can form the row electrode in the display device.
When not applying voltage, cavity 19 remains between a layer 14a, the 16a, and deformable layer is in the mechanical relaxed state shown in pixel 12a among Fig. 1.Yet after a selected row and column applies potential difference (PD), the capacitor that forms at the respective pixel place of described row and column electrode intersection is recharged, and electrostatic force pulls to these electrodes together.If voltage is enough high, then displaceable layers generation deformation, and be forced on the fixed bed (can on fixed bed, deposit a dielectric material (not shown in this Figure), preventing short circuit, and the control separation distance), shown in the pixel 12b on right side among Fig. 1.Regardless of the potential difference (PD) polarity that is applied, the behavior is all identical.This shows, may command reflection and row/row of non-reflective pixel state encourage to traditional LCD and other display techniques in used row/row encourage similar in many aspects.
Fig. 2 to Fig. 5 shows the example process and the system that use an interferometric modulator array in a display application.Fig. 2 is a system block diagram, and this figure shows that one can embody an embodiment of the electronic installation of each side of the present invention.In this exemplary embodiment, described electronic installation comprises a processor 21-, and it can be any general purpose single-chip or multicore sheet microprocessor, for example ARM, Pentium , Pentium II , PentiumIII , Pentium IV , Pentium Pro, 8051, MIPS , Power PC , ALPHA , or any special microprocessor, for example digital signal processor, microcontroller or programmable gate array.According to convention in the industry, processor 21 can be configured to carry out one or more software modules.Except that carrying out an operating system, also this processor can be configured to carry out one or more software applications, comprise web browser, telephony application, e-mail program or any other software application.
In one embodiment, processor 21 also is configured to communicate with an array controller 22.In one embodiment, this array control unit 22 comprises horizontal drive circuit 24 and the column drive circuit 26 that signal is provided to a pel array 30.The xsect of the array shown in Fig. 1 illustrates with line 1-1 in Fig. 2.For the MEMS interferometric modulator, OK/the row excitation protocol can utilize the hysteresis property of these devices shown in Figure 3.It may need the potential difference (PD) of (for example) 10 volts to make displaceable layers be deformed into actuated state from release conditions.Yet, when described voltage when this value reduces, along with described voltage drop is back to below 10 volts, described displaceable layers keeps its state.In the exemplary embodiment of Fig. 3, before voltage drop was low to moderate below 2 volts, displaceable layers can not discharge fully.Therefore, in example shown in Figure 3, exist one to be approximately the voltage range that 3-7 lies prostrate, exist one to apply voltage window in this voltage range, described device is stabilized in and discharges or actuated state in this window.Be referred to as " lag windwo " or " stability window " in this article.For an array of display with hysteresis characteristic shown in Figure 3, OK/the row excitation protocol can be designed so that to be expert at during the gating, make gating the pixel that is energized be suffered about 10 volts voltage difference in capable, and make d/d pixel is suffered voltage difference near 0 volt.After gating, make pixel suffer about 5 volts steady state voltage poor, gating makes its residing state so that its maintenance is expert at.After writing, in this example, each pixel is all born a potential difference (PD) that is in the 3-7 volt " stability window ".This characteristic makes pixel design shown in Figure 1 be stabilized in an existing actuated state or release conditions under the voltage conditions in identical applying.Because each pixel of interferometric modulator, no matter be in actuated state or release conditions, in fact all be one by capacitor fixing and that mobile reflection horizon constituted, so this steady state (SS) can be kept under the voltage in the lag windwo and consumed power hardly.If the current potential that is applied is fixed, then there is not electric current to flow into pixel basically.
In the typical case uses, can be by determining that according to one group of desired actuated pixels in first row one group of row electrode forms a display frame.After this, horizontal pulse is put on the electrode of the 1st row, thereby encourage the pixel corresponding with determined alignment.After this, determined one group of row electrode is become corresponding with desired one group of actuated pixels in second row.After this, with pulse put on the 2nd the row electrode, thereby according to determined row electrode encourage the 2nd the row in suitable pixel.The pixel of the 1st row is not subjected to the influence of the pulse of the 2nd row, and the state that keeps it to set at the impulse duration of the 1st row.The property mode repeats this process to the row of whole series in order, to form described frame.Usually, repeating this process continuously by the speed with a certain required frame number/second to refresh and/or upgrade these frames with new video data.Also have a variety of row and the row electrodes that are used to drive pel array to be known by people, and can use with the present invention with the agreement that forms display frame.
Fig. 4 and Fig. 5 show a kind of possible excitation protocol that is used for forming a display frame on 3 * 3 arrays shown in Figure 2.Fig. 4 shows one group of possible row and row voltage levvl of can be used for those pixels that show hysteresis curve shown in Figure 3.In the embodiment of Fig. 4, encourage a pixel to comprise suitable row are set to-V Bias, and suitable row is set to+Δ V, it can correspond respectively to-5 volts and+5 volts.Discharging pixel then is by suitable row are set to+V BiasAnd suitable row is set to identical+Δ V realizes so that form 0 volt potential difference (PD) at described pixel two ends.Wherein go voltages at those and remain in 0 volt the row, pixel is stable at its original residing state, and is in+V with these row BiasStill-V BiasIrrelevant.
Fig. 5 B is the sequential chart of a series of row of demonstration and column signal, and those signals put on 3 * 3 arrays shown in Figure 2, and it will form the demonstration shown in Fig. 5 A and arrange that wherein actuated pixels is non-reflectivity.Before writing the frame shown in Fig. 5 A, pixel can be in any state, and in this example, all row all are in 0 volt, and all row all be in+5 volts.Under these institute's voltages that apply, all pixels are stable at its existing actuated state or release conditions.
In the frame shown in Fig. 5 A, pixel (1,1), (1,2), (2,2), (3,2) and (3,3) are encouraged.For realizing this effect, during one " line time " of the 1st row, the 1st row and the 2nd row are set at-5 volts, the 3rd row are set at+5 volts.This can not change the state of any pixel, because all pixels all remain in the stability window of 3-7 volt.After this, rise to 5 volts of pulses that are back to 0 volt that descend again then by one from 0 volt and come gating the 1st row.Actuate pixel (1,1) and (1,2) and discharge pixel (1,3) thus.Other pixels in the array are all unaffected.For the 2nd row is set at desired state, the 2nd row are set at-5 volts, the 1st row and the 3rd row are set to+5 volts.After this, apply identical strobe pulse with actuate pixel (2,2) and discharge pixel (2,1) and (2,3) to the 2nd row.Equally, other pixels in the array are all unaffected.Similarly, by the 2nd row and the 3rd row are set at-5 volts, and be listed as the 1st be set at+5 volts to the 3rd capable the setting.The strobe pulse of the 3rd row is set at the state shown in Fig. 5 A with the 3rd row pixel.After writing incoming frame, the row current potential is 0, and the row current potential can remain on+5 or-5 volts, and after this demonstration will be stable at the layout shown in Fig. 5 A.Should be appreciated that, can use identical programs the array that constitutes by tens of or hundreds of row and columns.The timing, order and the level that should also be clear that the voltage that is used to implement the row and column excitation can alter a great deal in above-described General Principle, and above-mentioned example only is exemplary, and any actuation voltage method all can be used with the present invention.
Detailed structure according to the interferometric modulator of above-mentioned principle operation can be ever-changing.For example, Fig. 6 A-6C shows three kinds of different embodiment of moving lens structure.Fig. 6 A is a sectional view embodiment illustrated in fig. 1, wherein deposition one strip of metal material 14 on the support member 18 that quadrature extends.In Fig. 6 B, movably reflecting material 14 only is on the tethers 32 at corner and is attached to support member.In Fig. 6 C, removable reflecting material 14 is suspended on the deformable layer 34.Because the structural design and the material therefor of reflecting material 14 can be optimized aspect optical property, and the structural design of deformable layer 34 and material therefor can be optimized aspect the desired mechanical property, so this embodiment has advantage.In many open files, comprise that for example No. 2004/0051929 U.S. discloses in the application case, the production of various dissimilar interference devices has been described.Can use the known technology of a variety of people to make said structure, this comprises a series of material depositions, patterning and etching step.
Fig. 7 is the schematic side profile diagram of an embodiment of an interferometric modulator display 100, and it shows through the optical path of display 100 from a light source 102 to one observers 130.Light source 102 shown in Fig. 7 is from a series of position emission light that comprise (for example) position 104 or 106.Interferometric modulator display 100 comprises an interferometric modulator array that is made of 110a, 110b and 110c.Although shown an array that is made of three photomodulators in Fig. 7, the embodiment of display 100 can comprise thousands of or up to a million modulators.Among photomodulator 110a, 110b and the 110c each all comprises a pair of mirror 112 and 114. Mirror 112 and 114 is positioned to substantially parallel each other and interval one distance 116, to define an optical cavities betwixt.Color from the light that described optical cavities reflected depends on distance 116 at least in part.In an example embodiment of the display 100 that is configured to produce a coloured image, the distance of selecting for each photomodulator 110a, 110b and 110c 116 makes each photomodulator 110a, 110b and 110c reflection be essentially the light of a particular color (for example red, blue or green).In other embodiments, the distance of all modulators 110 can be substantially the same in the display 100.
In one embodiment, display 100 produces a display image from multiple source along the light that a plurality of optical paths arrive display 100 by reflection.In an exemplary optical path, 120 arrive displays 100 along the path from the light of position 104.Interferometric modulator element 110a modulates this light, with will be along the path part of 120 light reflex to observer 130 along a path 122.120 incident light is with 122 reflected light defines an angle θ each other along the path along the path.Reflected by mirror 114 and be transmitted to by source 102 that path (not shown) that observer 130 light propagated is reflected by mirror 112 and to be transmitted to the path that observer 130 light propagated by source 102 short.Path length difference between this two paths has determined the peak wavelength of the light of the self-modulation device element 110a reflection that observer 130 feels together with other Several Factors.This path length difference roughly multiply by distance 116 with the cosine of angle θ/2 and is directly proportional.In θ=0 o'clock, cos θ/2=1, and path length difference is the twice of distance 116.Along with the increase of angle θ, cos θ/2 reduce, and are in fact become thus by the path distance (twices of distance 118) that these two mirrors 112 and 114 define for 120 and 122 the light along the path and to be shorter than twice apart from 116.Be formed at the gamut of the optical path distances 118 of this shortening among the modulator element 110a corresponding to the light that reflects by modulator element 110a.When angle θ was enough big, observer 130 can feel this gamut in the color that display 120 is produced.
Fig. 8 is the schematic side profile diagram of another embodiment of interferometric modulator display 100, and interferometric modulator display 100 comprises the whole convergent lens 200 of watching the surface of a leap display 100.Lens 200 are positioned at apart from modulator 110 1 last less than the distance of the focal length of lens 200 along optical axis 201.In the embodiment that comprises lens 200 shown in Figure 8, an optical path comprises a route segment 202, and light 106 is transmitted to display 100 along route segment 202 from the position.In one embodiment, lens 200 have an optical aperture greater than total aperture of two or more interferometric modulators of display 100.In one embodiment, lens 200 have an optical aperture greater than total aperture of interferometric modulator array.Cross the surface reflection of lens 200 and the mirror by interferometric modulator 110a from least a portion transmission of the light of route segment 202.Reflected light transmission is once more crossed lens 200 arrival observers 130.In concept, lens 200 are selected to arrive observer 130 from the input transmittance ovennodulation device element 110a of a position 106 on the source 102.Therefore be chosen to the incident angle that incident angle (near 90 °) with the reflecting surface of modulator arrives observer's optical path in greater than the embodiment that is not having lens 200 through the optical path that lens 200 arrive observers' light.This transmittance to observer 130 can be by changing the path length difference in the optical cavities so that the distance that the more approaching light of propagating along optical axis 201 of institute's propagation distance is followed reduces the gamut of being felt.
In one embodiment, lens 200 are configured to by an optical path that comprises optical path section 202,220,222 and 122 photoconduction be caused observer 130 in fact.The source of 202 light of propagating is the position 106 on the source 102 along the path.Selected position 106 is than the central axis that sends the position 104 more close display systems of 120 light of propagating along the path.In this embodiment of display 100, the reducing of light-source angle causes the angle of the light in the modulator element 110 littler in fact.Reflection paths section 222 defines one jiao of θ ' with incident path section 220.Lens 200 are chosen to make angle θ ' less than the angle θ that is defined by route segment 120 and 122 (corresponding to the light path in the display-middle existence that does not have the embodiment of lens-as shown in Figure 7).Diagonal angle θ ' the correspondence one that interferometric modulator element 110a place diminishes doubles distance 224 path length difference, and since θ ' less than θ, thereby path 224 will be longer than the path 118 among Fig. 7.Elongated path correspondingly reduces the gamut of being felt from axle light that is shown device 100 reflections.
In one embodiment, display 100 is that a use has the direct-viewing type interferometric display that the light-struck light source 102 of broadband environment is watched, wherein all basically points all are subjected to similar irradiation in the observer field behind, so that not little with the equation of light from any other source position on average from the light of a source position.Therefore lens 200 are selected the light from such point in described: it is with respect to observer 130 diagonal angle selected angle when not having lens 200.
In one embodiment, convergent lens 200 is convex lens.The known technology of technical field drew shape and the material that is used for lens 200 are constructed with desired characteristic under the person of ordinary skill in the field can use.Yet in many typical display application, for example in hand-held or other portable display apparatus, lens 200 are huge and heavy usually, and this is that people are undesirable.In addition, the structural support (not shown) that is used for lens 200 can increase the cost and the complexity of display 100, and can make thus lens 200 are integrated in such typical products and become unrealistic.
As a substitute of convergent lens 200, for example, for reducing this big volume, each embodiment can comprise any other converging optical element that is suitable for, and comprises Fresnel Lenses.Desired as people, Fresnel Lenses is littler and light and handy than simple toroidal lens embodiment (lens 200 as shown in Figure 8).Yet for many portable use, or even the Fresnel Lenses that volume reduces is unrealisticly also still often big.Other embodiment of lens 200 can comprise the convergent lens or the optical element of any other known type of affiliated technical field.
To in photocontrol is used, using a kind of alternative of lens to be to use diffraction optical element, comprise holographic optical elements (HOE).At the conceptive diffraction optical element that can be considered progressively near an optical function (a for example Fresnel lens) is optical modulation element, it comprises in one embodiment and has used the photoetching technique patterning and be etched in structure on the substrate, so that make optical diffraction in a pre-mode of determining, for example make optical convergence or focusing.In one embodiment, described structure is of a size of several microns sizes, and this is on deciding affected light wavelength.Usually use a suitable computer program to calculate to define the pattern and the shape of structure that is used to carry out the DOE of a particular optical function (a for example function of assembling lens).The example of this software comprises can be from being positioned at Pasadena, the Optical Resarch Associates of CA, the CODE V that Inc obtains, can be from being positioned at the Lambda Resarch Associates of Rochester NY, the OSLO that Inc obtains and can be from being positioned at Tucson, the ZEMAX that the Focus Software of AZ obtains.For example, more details about diffraction optical element, comprise calculating to the lens arrangement that is suitable for, be found in by Thomas J.Sulski, Alan D.Kathman, Dennis W.Prather shown " diffraction optical element: the design, Computer-Assisted Design, Manufacture And Test (DiffractiveOptics:Design; Fabrication , ﹠amp; Test), Donald C.O ' Shea (Society of Photo-OpticalInstrument Enginerring 2003).
One type DOE is binary optical elements (" BOE ").Binary optical elements is a kind of diffraction optical element that comprises a discrete number Difraction surface.The simplest form is to be made of the single stage element with two Difraction surfaces (for example being formed by single lithography step).These two surfaces are introduced one and are 0 or are the differing of π in incident wavefront.One multistage binary element comprises that N level material-for example is by N lithography step formation.This N level can produce 2 NIndividual phase level.
Fig. 9 is the schematic side profile diagram of an embodiment of interferometric modulator display 100, and interferometric modulator display 100 is comprising a diffraction optical element 302 from the position 106 of light source 102 through interferometric modulator element 110a to observer 130 optical path.The embodiment of shown DOE 302 is the binary optical elements of a N=3.In other embodiments, N can be any numeral.In certain embodiments, N can be 1,2,3,4 or 5.In other embodiments, N can be within the scope of 1-10.
DOE 302 comprises one and assembles DOE.One assembles DOE one is configured to carry out a DOE who assembles the optical function of lens, even light is assembled towards the optical axis 201 of DOE 302.Should be appreciated that shown element in each figure of Fig. 7-10 is neither draw in proportion, also have no intention the accurate illustration that is used to carry out the structure of the optical function of giving described element as any.Diffraction optical element (DOE) 302 comprises a large amount of small components 304 usually.Each element 304 comprises a lamination that is made of single or multiple elements.Some this class component 304 can define a stepped shape.As mentioned above, the size of element 304 and position typically use computing machine and the software that is suitable for calculates.In one embodiment, described arrangements of elements is to define the pattern of one group of donut.In another embodiment, element 302 is grouped into the partial structurtes that can realize optical function described herein jointly.Element 304 can utilize photoetching technique, use for example with inferior suitable material formation: the photoresist of photoresist, sclerosis (for example curing firmly in a baking oven), silica, quartz glass or plastics.In one embodiment, a series of elements 304 of deposition and etching with a specific thicknesses and refractive index materials layer with formation DOE302.Therefore, the same with lens 200, DOE 302 selections come from the light of the position 106 of light source 102.At least a portion of this light is reflexed to observer 130 by interferometric modulator element 110a along route segment 122.
In one embodiment, DOE 302 is formed at one and is attached on the individual substrate of display 100.In one embodiment, described individual substrate comprises a film.Display 100 can comprise a diffuser (not shown), to be used for coming the reflected light of scattering by interferometric modulator element 110a reflection with lambert's pattern of a cardinal principle.In one embodiment, diffuser comprises DOE 302.In another embodiment, DOE 302 is formed on the same substrate with interferometric modulator 110a, 110b and the 110c of display 100.For example, interferometric modulator 110a, 110b and 110c can be formed on the glass substrate.In one embodiment, each interferometric modulator 110a, 110b and 110c are formed on one first side of described glass substrate, and DOE 302 is formed on the opposite side of described glass substrate.
In another embodiment, DOE 302 is formed on the same side with modulator 110.In such embodiment, element 304 is formed on the described substrate and by a complanation layer and covers.After this, on described complanation layer, form interferometric modulator 110a, 110b and 110c.In one embodiment, the refractive index of planarisation material is different with the refractive index of the material that is used to make diffraction element 304.The pattern of the diffraction element 304 in the DOE 302 is to calculate according to the two the refractive index of material that is used to form the material of diffraction element 304 and is used to form complanation layer.
In one embodiment, diffraction optical element 302 is formed by a binary optical elements simple, N=1.Figure 10 is the schematic side profile diagram of another embodiment of interferometric modulator display 100, and interferometric modulator display 100 is at an embodiment who comprises the DOE 302 of N=1 through interferometric modulator element 110a from the position 106 of light source 102 to observer 130 the optical path.The embodiment of DOE 302 shown in Figure 10 utilizes one group of BOE structure 404 to form, and this group BOE structure 404 forms usually has roughly the same height or thickness each other.Although the exemplary DOE among Figure 10 302 is shown as the structure 404 that has between homogeneous phase, the also width of each structure 404 of scalable and optical function at interval to obtain to expect.In an illustrated embodiment, DOE 302 can be by single material layer through lithographic patterning and etching and form.The formation step of this embodiment of DOE302 is less than the multistage binary optical elements 302 among Fig. 9.Single-stage DOE 302 can be placed on different positions and the different substrate, and with above carry out complanation at multistage DOE 302 described identical modes.
For example DOE 302 binary optical elements such as grade only define one with the approaching optical function of desired optical function.In general, the number of plies in the binary optical elements is many more, just can be more goodly near desired optical function.But, with the optical function of convergent lens 200 near having reduced from light source 102 at least in part and having been reflexed to the gamut of observer 130 light by interferometric modulator 110a.In certain embodiments, this part of gamut reduces the color accuracy that is enough to improve for the display of being felt for watching from the axle light source with from axle 100.
Identical with the above any embodiment that is discussed in conjunction with DOE 302, can form the embodiment of DOE 302 with display 100 relatively.For example, DOE 302 can be formed on the diffuser, one independently on the substrate or on the either side of the substrate of interferometric modulator 110a, 110b and 110c.
For bigger display, for example Diagonal Dimension is located at typical indoor viewing distance (for example several meters) greater than about 30 inches display, even if when being positioned at the center of display, the observer still can feel the angle gamut of a part of display.Should be appreciated that for example the embodiment of diffraction optical element 302 optical elements such as grade can be configured to reduce this gamut of at least a portion of display.
The embodiment of diffraction optical element 302 can be configured to carry out other optical functions.For example, may need in certain embodiments light in display is directed to a preferable viewing location scope.Therefore, in such embodiments, diffraction optical element 302 also can be configured to guide view direction or the control size of images of light to control visual field, restriction or expanded images from display 100.In one embodiment, optical element comprises a biconvex lens assembly, this biconvex lens arrangement of components becomes by being directed to an angular range (for example, make from the light of display 100 horizontal axis around the display 100 distribute) visual field of (with respect to the observer) control display in the horizontal direction from the part of the light of display.In one embodiment, optical element makes angular range that light distributes along horizontal axis greater than the angular range that distributes along vertical axis.This can be increased in from axle viewing location place, for example the light quantity that the seat position range place around the display receives in a room.In one embodiment, diffraction optical element 302 further is configured to carry out the optical function of a biconvex lens.
In another embodiment, display 100 can comprise or be configured to use specific one or one group of light source with respect to the location aware of display 100.In this embodiment, diffraction optical element 302 is customized to according to the aperture of position, the quantity of illumination or light source and comes guide lights.In one embodiment, described light source comprises one or more light emitting diodes of arranging around the front of display 100 so that display is thrown light on.In this embodiment, DOE 302 is configured to change by (for example) and passes amount that DOE 302 is transmitted through the lip-deep light of display 100 and compensate described light source to the uneven irradiation of display or compensate the influence of other undesirable features of described light source.
Figure 11 A and 11B are the system block diagrams of an embodiment of demonstration one display device 2040.Display device 2040 for example can be cellular phone or mobile phone.Yet the same components of display device 2040 and the form of doing slightly to change thereof also can be used as for example illustration of all kinds such as TV and portable electronic device display device.
Display device 2040 comprises a shell 2041, a display 2030, an antenna 2043, a loudspeaker 2045, an input media 2048 and a microphone 2046.Shell 2041 is made by any technology in the known numerous kinds of manufacturing process of person of ordinary skill in the field usually, comprises injection moulding and vacuum forming.In addition, shell 2041 can be made by any material in the numerous kinds of materials, includes but not limited to the combination of plastics, metal, glass, rubber and pottery or one.In one embodiment, shell 2041 comprises removable part (not shown), and these removable parts can have removable part different colours or that comprise different identification, picture or symbol with other and use instead.
The display 2030 of exemplary display device 2040 can be any in the numerous kinds of displays, comprises bi-stable display as herein described.In other embodiments, display 2030 comprises flat-panel monitors such as plasma scope for example mentioned above, EL, OLED, STN LCD or TFT LCD or non-tablet display such as CRT or other tubular devices for example, and these displays are known by the person of ordinary skill in the field.Yet for ease of the explanation present embodiment, display 2030 comprises just like interferometric modulator display as herein described.
Figure 11 B schematically shows the assembly among the embodiment of exemplary display device 2040.Example illustrated display device 2040 comprises a shell 2041, and can comprise that other are closed in assembly wherein at least in part.For example, in one embodiment, exemplary display device 2040 comprises a network interface 2027, and this network interface 2027 comprises that one is coupled to the antenna 2043 of a transceiver 2047.Transceiver 2047 is connected to processor 2021, and processor 2021 is connected to again regulates hardware 2052.Regulating hardware 2052 can be configured to a signal is regulated (for example a signal being carried out filtering).Regulate hardware 2052 and be connected to a loudspeaker 2045 and a microphone 2046.Processor 2021 also is connected to an input media 2048 and a driving governor 2029.Driving governor 2029 is coupled to one frame buffer 2028 and is coupled to array driver 2022, and array driver 2022 is coupled to an array of display 2030 again.One power supply 2050 is all component power supply according to the designing requirement of particular exemplary display device 2040.
Network interface 2027 comprises antenna 2043 and transceiver 2047, so that exemplary display device 2040 can communicate by network and one or more device.In one embodiment, network interface 2027 also can have some processing capacity, to reduce the requirement to processor 2021.Antenna 2043 is to launch being used to known to the person of ordinary skill in the field and any antenna of received signal.In one embodiment, this antenna is launched according to IEEE 802.11 standards (comprising IEEE 802.11 (a), (b), or (g)) and is received the RF signal.In another embodiment, this antenna is launched according to bluetooth (BLUETOOTH) standard and is received the RF signal.If be cellular phone, then this antenna is designed to receive CDMA, GSM, AMPS or other and is used for the known signal that communicates at the mobile phone network.2047 pairs of signals that receive from antenna 2043 of transceiver carry out pre-service, so that it can be received and further be handled by processor 2021.Transceiver 2047 is also handled the signal that self processor 2021 receives, so that they can be by antenna 2043 from exemplary display device 2040 emissions.
In an alternate embodiment, can replace transceiver 2047 by a receiver.In another alternate embodiment, can replace network interface 2027 by an image source, this image source can store or produce and send out the view data of delivering to processor 2021.For example, this image source can be the software module that hard disk drive or that digital video disk (DVD) or contains view data produces view data.
The overall operation of processor 2021 common control examples display device 2040.Processor 2021 automatic network interfaces 2027 or an image source receive data (for example Ya Suo view data), and this data processing is become raw image data or is processed into a kind of form that is easy to be processed into raw image data.Then, the data after processor 2021 will be handled are sent to driving governor 2029 or are sent to frame buffer 2028 and store.Raw data typically refers to the information that can discern the picture characteristics of each position in the image.For example, described picture characteristics can comprise color, saturation degree and gray level.
In one embodiment, processor 2021 comprises a microcontroller, CPU or is used for the logical block of the operation of control examples display device 2040.Regulating hardware 2052 generally includes and is used for sending signals and being used for amplifier and wave filter from microphone 2046 received signals to loudspeaker 2045.Adjusting hardware 2052 can be the discrete component in the exemplary display device 2040, perhaps can incorporate in processor 2021 or other assemblies.
Driving governor 2029 direct self processors 2021 or receive the raw image data that produces by processor 2021 from frame buffer 2028, and suitably with described raw image data reformatting so as high-speed transfer to array driver 2022.Particularly, driving governor 2029 is reformated into one with raw image data and has the data stream of grating class form, so that it has a chronological order that is suitable for scanning array of display 2030.Then, the information after driving governor 2029 will format is sent to array driver 2022.Although driving governor 2029 (for example lcd controller) is normally as an integrated circuit (IC) and being associated with system processor 2021 independently, yet these controllers also can make up by many kinds of modes.It can be used as hardware and is embedded in the processor 2021, is embedded in the processor 2021 or together fully-integrated with example, in hardware and array driver 2022 as software.
Usually, the self-driven controllers 2029 of array driver 2022 receive the information after the format and video data are reformated into one group of parallel waveform, and the parallel waveform per second of this group many times is applied to from hundreds of of the x-y picture element matrix of display, thousands of lead-in wires sometimes.
In one embodiment, driving governor 2029, array driver 2022, and array of display 2030 be applicable to the display of arbitrary type as herein described.For example, in one embodiment, driving governor 2029 is a traditional display controller or bistable display controllers (a for example interferometric modulator controller).In another embodiment, array driver 2022 is a legacy drive or a bistable display driver (a for example interferometric modulator display).In one embodiment, a driving governor 2029 integrates with array driver 2022.This embodiment is very common in the integrated system of for example cellular phone, wrist-watch and other small-area display equal altitudes.In another embodiment, array of display 2030 is a typical array of display or a bistable array of display (a for example display that comprises an interferometric modulator array).
Input media 2048 makes the operation that the user can control examples display device 2040.In one embodiment, input media 2048 comprises a keypad (for example, qwerty keyboard or telephone keypad), a button, a switch, a touch sensitive screen, a pressure-sensitive or thermosensitive film.In one embodiment, microphone 2046 is input medias of exemplary display device 2040.When using microphone 2046, can provide voice command to come the operation of control examples display device 2040 by the user to these device input data.
Power supply 2050 can comprise many kinds of energy storing devices, and this is well-known in affiliated technical field.For example, in one embodiment, power supply 2050 is a rechargeable accumulator, for example nickel-cadmium accumulator or lithium-ions battery.In another embodiment, power supply 2050 is a regenerative resource, capacitor or solar cell, comprises plastic solar cell and solar cell coating.In another embodiment, power supply 2050 is configured to receive electric power from wall plug.
In certain embodiments, programmability is as indicated above resides in the driving governor in control, and this driving governor can be arranged on several positions of electronic display system.In some cases, the control programmability resides in the array driver 2022.The person of ordinary skill in the field will know, hardware that can any amount and/or component software and to implement above-mentioned optimization in the different configurations.
In view of the above, people will understand, and embodiments of the invention have overcome many problems of affiliated technical field by an optical element that can be reduced in the gamut that is manifested when viewing angle or ray angles change is provided for an interferometric modulator display.In addition, by using several additional lithography steps, promptly can this optical element be included in the display cost effective and efficient manner.
Although above describe in detail is to show, illustrate and point out the novel feature that is applicable to various embodiment of the present invention, yet should be appreciated that, the person of ordinary skill in the field can make various omissions, substitute and change shown device or technology on form and details, and this does not deviate from spirit of the present invention.Should know,, thereby can not provide in the form of all features as herein described and advantage one and implement the present invention because some feature can use with other features or try out mutually independently.

Claims (73)

1, a kind of display system that is used to show an image, described display system comprises:
A plurality of interferometric modulators, it is configured to modulate the light that is incident on the surface thereof; And
One converging optical element, its surface alignment with respect at least one interferometric modulator in described a plurality of interferometric modulators becomes to make a focal length of described optical element greater than the distance between described optical element and the described surface.
2, display system as claimed in claim 1, wherein said optical element comprise a positive focal power optical element.
3, display system as claimed in claim 1, wherein said optical element comprises a diffraction optical element.
4, display system as claimed in claim 1, the aperture of wherein said optical element is greater than total aperture of two interferometric modulators in described a plurality of interferometric modulators.
5, display system as claimed in claim 1, the aperture of wherein said optical element is greater than total aperture of described a plurality of interferometric modulators.
6, display system as claimed in claim 3, wherein said optical element comprise a binary optical elements.
7, display system as claimed in claim 3, wherein said optical element comprises a diffuser.
8, display system as claimed in claim 1, wherein said optical element comprises a biconvex lens.
9, display system as claimed in claim 3, wherein said optical element are configured to make described modulated light to be different from along the distribution of one second axis of described display system along the distribution of a first axle of described display system.
10, display system as claimed in claim 9, wherein said first axle are a horizontal axis, and described second axis is a vertical axis.
11, display system as claimed in claim 3, it further comprises:
One light source, wherein said optical element are configured to compensate at least a optical property of described light source.
12, display system as claimed in claim 1, it further comprises:
One substrate, it supports described a plurality of interferometric modulator and supports described optical element.
13, display system as claimed in claim 12, wherein said substrate is between described optical element and described a plurality of modulator.
14, display system as claimed in claim 12, wherein said optical element is between described a plurality of interferometric modulators and described substrate.
15, display system as claimed in claim 12, wherein said a plurality of interferometric modulators are between described optical element and described substrate.
16, display system as claimed in claim 1, it further comprises:
One processor that communicates with described a plurality of interferometric modulator electricity, described processor is configured to image data processing; And
One memory storage that communicates with described processor electricity.
17, display system as claimed in claim 16, it further comprises:
One drive circuit, it is configured to send at least one signal to described a plurality of interferometric modulators.
18, display system as claimed in claim 17, it further comprises:
One controller, it is configured at least a portion of described view data is sent to described driving circuit.
19, display system as claimed in claim 16, it further comprises:
One image source module, it is configured to send described view data to described processor.
20, display system as claimed in claim 19, wherein said image source module comprise a receiver, transceiver, and transmitter at least a.
21, display system as claimed in claim 16, it further comprises:
One input media, it is configured to receive the input data and described input data is sent to described processor.
22, a kind of method of making one display system, described method comprises:
On one first substrate, form a plurality of interferometric modulators; And
Form a converging optical element on one second substrate, described optical element becomes to make the focal length of described optical element greater than the distance between described optical element and described at least one surface with respect at least one surface alignment of at least one interferometric modulator in described a plurality of interferometric modulators.
23, method as claimed in claim 22 wherein forms described at least one optical element and is included in and deposits layer of material at least on the described substrate.
24, method as claimed in claim 23 wherein forms described at least one optical element and further comprises described at least one layer material patterning.
25, method as claimed in claim 22 wherein forms described at least one optical element and comprises formation one diffraction optical element.
26, method as claimed in claim 25 wherein forms described diffraction optical element and is included in binary optical elements of formation on the described substrate.
27, method as claimed in claim 25 wherein forms described diffraction optical element and comprises a patterns of materialization to form a plurality of diffractive optical elements.
28, method as claimed in claim 22, wherein said first substrate comprises described second substrate.
29, method as claimed in claim 22, wherein said optical element and described a plurality of modulator form and make described first substrate therebetween.
30, method as claimed in claim 22, wherein said optical element form between described a plurality of interferometric modulators and described first substrate.
31, method as claimed in claim 22, wherein said a plurality of interferometric modulators form between described optical element and described first substrate.
32, method as claimed in claim 22 wherein forms described optical element and comprises formation one biconvex lens.
33, method as claimed in claim 25 wherein forms described optical element and comprises and be configured to make described modulated light to be different from along the distribution of one second axis of described display system along the distribution of a first axle of described display system described optical element.
34, method as claimed in claim 25, it further comprises:
Arrange that a light source is to shine described optical element; And
Described optical element is configured to compensate at least a optical property of described light source.
35, a kind of display system of making by the described method of claim 22.
36, a kind of display system of passing through method manufacturing, described method comprises:
On one first substrate, form a plurality of interferometric modulators; And
Form a convergence diffraction optical element on one second substrate, described optical element is positioned to and will be incident at least one lip-deep light-redirecting of at least one interferometric modulator in described a plurality of interferometric modulator.
37, display system as claimed in claim 36 wherein forms described optical element and is included in and deposits layer of material at least on the described substrate.
38, display system as claimed in claim 37 wherein forms described optical element and further comprises described at least one layer material patterning.
39, display system as claimed in claim 36 wherein forms described optical element and is included in binary optical elements of formation on the described substrate.
40, display system as claimed in claim 36 wherein forms described optical element and comprises a patterns of materialization to form a plurality of diffractive optical elements.
41, display system as claimed in claim 36, wherein said first substrate comprises described second substrate.
42, display system as claimed in claim 36, wherein said optical element and described a plurality of modulator form and make described first substrate therebetween.
43, display system as claimed in claim 36, wherein said optical element form between described a plurality of interferometric modulators and described first substrate.
44, display system as claimed in claim 36, wherein said a plurality of interferometric modulators form between described optical element and described first substrate.
45, display system as claimed in claim 36 wherein forms described optical element and comprises formation one biconvex lens.
46, display system as claimed in claim 36, wherein said optical element are configured to make described modulated light to be different from along the distribution of one second axis of described display system along the distribution of a first axle of described display system.
47, display system as claimed in claim 45, wherein said first axle are a horizontal axis, and described second axis is a vertical axis.
48, display system as claimed in claim 36, it further comprises:
Arrange that a light source is to shine described optical element; And
Further described optical element is configured to compensate at least a optical property of described light source.
49, a kind of display system that is used to show an image, described display system comprises:
A plurality of interferometric modulators, it is configured to modulate light incident thereon; And
One convergence diffraction optical element, the light-redirecting on its at least one interferometric modulator that is configured to be incident in described a plurality of interferometric modulator.
50, display system as claimed in claim 49, wherein said optical element comprise a positive focal power optical element.
51, display system as claimed in claim 49, wherein said optical element comprise a binary optical elements.
52, display system as claimed in claim 49, wherein said optical element comprises a diffuser.
53, display system as claimed in claim 49, it further comprises:
One substrate, it supports described a plurality of interferometric modulator and supports described optical element.
54, display system as claimed in claim 53, wherein said substrate is between described optical element and described a plurality of modulator.
55, display system as claimed in claim 53, wherein said diffraction optical element is between described a plurality of interferometric modulators and described substrate.
56, display system as claimed in claim 53, wherein said a plurality of interferometric modulators are between described optical element and described substrate.
57, display system as claimed in claim 53, wherein said optical element are configured to make described modulated light to be different from along the distribution of one second axis of described display system along the distribution of a first axle of described display system.
58, display system as claimed in claim 53, wherein said first axle are a horizontal axis, and described second axis is a vertical axis.
59, display system as claimed in claim 53, it further comprises:
One light source, wherein said optical element are configured to compensate at least a optical property of described light source.
60, display system as claimed in claim 49, it further comprises:
One processor that communicates with described a plurality of interferometric modulator electricity, described processor is configured to image data processing; And
One memory storage that communicates with described processor electricity.
61, display system as claimed in claim 60, it further comprises:
One drive circuit, it is configured to send at least one signal to described a plurality of interferometric modulators.
62, display system as claimed in claim 61, it further comprises:
One controller, it is configured at least a portion of described view data is sent to described driving circuit.
63, display system as claimed in claim 60, it further comprises:
One image source module, it is configured to send described view data to described processor.
64, as the described display system of claim 63, wherein said image source module comprise a receiver, transceiver, and transmitter at least a.
65, display system as claimed in claim 60, it further comprises:
One input media, it is configured to receive the input data and described input data is sent to described processor.
66, a kind of display system that is used to show an image, described display system comprises:
Be used for member with interference mode modulation light incident thereon; And
The member that is used for converging light, it is through adjusting the gamut of at least a portion between different viewing location to limit described image.
67, as the described display system of claim 66, it further comprises and is used to make described modulated light to be different from along the components distributed of one second axis of described display system along the distribution of a first axle of described display system.
68, as the described display system of claim 66, wherein said convergence comprises a positive focal power optical element.
69, as the described display system of claim 66, it further comprises the irradiation member, and wherein said convergence member comprises the member of the influence of at least a optical property that is used to compensate described irradiation member.
70, a kind of display system that is used to show an image, described display system comprises:
Be used for member with interference mode modulation light incident thereon; And
Be used to make optical diffraction will be incident in the described member that is used for the light-redirecting on the member of interference mode light modulated.
71, as the described display system of claim 70, wherein said diffraction comprises a diffraction optical element.
72, as the described display system of claim 70, its further comprise be used to make described modulated light with a first axle components distributed along the different mode of one second axis of described display system along described display system.
73, as the described display system of claim 70, it further comprises the member that is used to throw light on, and wherein said diffraction comprises and is used for the member that the influence at least a optical property of the described member that is used to throw light on compensates.
CN 200510103554 2004-09-27 2005-09-21 System and method of reducing color shift in a display Pending CN1755432A (en)

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US11/041,020 2005-01-21

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113795736A (en) * 2019-04-30 2021-12-14 ams传感器新加坡私人有限公司 Spectrometer comprising an illumination channel comprising a light guide

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113795736A (en) * 2019-04-30 2021-12-14 ams传感器新加坡私人有限公司 Spectrometer comprising an illumination channel comprising a light guide

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