CN1750247A - Direct evaluating method and device for metal fine wire - Google Patents

Direct evaluating method and device for metal fine wire Download PDF

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Publication number
CN1750247A
CN1750247A CNA2005100999948A CN200510099994A CN1750247A CN 1750247 A CN1750247 A CN 1750247A CN A2005100999948 A CNA2005100999948 A CN A2005100999948A CN 200510099994 A CN200510099994 A CN 200510099994A CN 1750247 A CN1750247 A CN 1750247A
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China
Prior art keywords
metal fine
rectilinear propagation
liquid
gold thread
evaluating apparatus
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Granted
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CNA2005100999948A
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Chinese (zh)
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CN1750247B (en
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牧一诚
中田有治
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Mitsubishi Materials Corp
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Mitsubishi Materials Corp
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Publication of CN1750247B publication Critical patent/CN1750247B/en
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  • Length Measuring Devices With Unspecified Measuring Means (AREA)

Abstract

The present invention provides a method and a device for evaluating the straightness of a metallic fine wire capable of accurately evaluating the straightness of the metallic fine wire. A gold wire having a specified length is floated on pure water under the state in which at least one end of the gold wire is brought to a free end. The straightness of the gold wire is evaluated on the basis of the shape of the gold wire on the liquid surface of pure water. It is preferable that the gold wire floated on a liquid is image-sensed, and the straightness of the gold wire is evaluated from the static image. The device has pure water floating the gold wire on its liquid surface and a pad storing pure water.

Description

Metal fine rectilinear propagation evaluation method and rectilinear propagation evaluating apparatus
Technical field
The present invention relates to a kind of rectilinear propagation evaluation method and rectilinear propagation evaluating apparatus that is used for the metal fines such as gold thread of closing line (bonding wire).
Background technology
Closing line is used in semiconductor product, for example the wiring (wireconnection) of large scale integrated circuit such as LSI.Recently, along with miniaturization, minimal thicknessization, the narrow spacingization of these semiconductor products, the metal fine that is utilized as closing line also needs to improve its rectilinear propagation.Therefore, be necessary the rectilinear propagation of metal fine is estimated.
The rectilinear propagation evaluation method of these metal fines has: actually utilize the Cheng Huan (looping) of metal fine and estimate the method for its rectilinear propagation; To separate the metal fine of leaving from spool (spool) and place in the plane, by the method for its shape evaluation rectilinear propagation; To hang down (pendency) from the metal fine that spool is untied in windproof usefulness container, by the method (for example, with reference to patent documentation 1) of its shape evaluation rectilinear propagation.
The open 2002-124534 communique (Fig. 1) of (patent documentation 1) Japan Patent
But also there are the following problems on above-mentioned traditional metal fine rectilinear propagation evaluation method.That is,,,, just be difficult to carry out itself rectilinear propagation evaluation of metal fine because of being subjected to engaging the influence of (bonding) condition etc. if utilize the actual ring that is carried out to of metal fine if according to above-mentioned traditional metal fine rectilinear propagation evaluation method.Also have, if metal fine is placed in the plane, because of the frictional force that takes place between metal fine and the plane is difficult to be deformed into the shape of crawling that metal fine has, simultaneously, because the method for arranging of metal fine, metal fine produces unbalanced in shape, thereby can not carry out correct rectilinear propagation evaluation.In addition,,, as mentioned above, be difficult to be deformed into the shape of crawling that metal fine has, can not correctly observe bending or crooked amplitude because of the weight of metal fine itself if metal fine is hung down.
Summary of the invention
The present invention considers the problems referred to above and studies invention.The purpose of this invention is to provide a kind of metal fine rectilinear propagation evaluation method and the rectilinear propagation evaluating apparatus that can correctly estimate the rectilinear propagation of metal fine.
The present invention has adopted following structure in order to solve above-mentioned problem.Promptly, metal fine rectilinear propagation evaluation method of the present invention, it is characterized in that: metal fine with specific length, at least one end of its metal fine is floated over above the liquid with free-ended state, with the basis that is shaped as of the above-mentioned metal fine on its liquid levels, estimate the rectilinear propagation of metal fine.
According to the present invention,, can eliminate the influence that the friction of metal fine etc. is suppressed the supression power of metal fine distortion like this by metal fine is floated over above the liquid.At this, be free end by at least one end with metal fine, metal fine just can be deformed into its shape of crawling that had originally.Therefore, can correctly estimate the rectilinear propagation of metal fine.
And metal fine rectilinear propagation evaluation method of the present invention is taken the above-mentioned metal fine that floats over above the aforesaid liquid, is advisable according to the rectilinear propagation that its static portrait is estimated metal fine.
According to this invention, by estimate the rectilinear propagation of metal fine by the observation portrait of camera head, be static portrait, so than the rectilinear propagation that more can correctly estimate metal fine with visual assessment but draw a portrait because of the observation that obtains.
And, metal fine rectilinear propagation evaluation method of the present invention, above-mentioned metal fine is that gold thread is advisable.
According to the present invention, carry out the rectilinear propagation evaluation to using gold thread as closing line.
In addition, metal fine rectilinear propagation evaluating apparatus of the present invention is characterized in that: comprise liquid that utilizes liquid level come-up metal fine and the fluid preservation container of storing its liquid.
According to this invention, as mentioned above, metal fine is floated over above the liquid, thereby can correctly estimate the rectilinear propagation of metal fine.
And metal fine rectilinear propagation evaluating apparatus of the present invention comprises that being used to take the above-mentioned camera head that floats over the metal fine above the liquid is advisable.
According to this invention, as mentioned above, estimate the rectilinear propagation of metal fine by the shooting portrait that obtains by camera head.Therefore, than the rectilinear propagation that more can correctly estimate metal fine with visual assessment.
And metal fine rectilinear propagation evaluating apparatus of the present invention comprises preventing that aforesaid liquid is advisable to the vibration proof mechanism of liquid level vibration.
According to this invention, by preventing the vibration of liquid level, it is stable that the shape of the metal fine on the liquid level becomes, thereby can carry out the rectilinear propagation evaluation of more accurate metal fine.
And metal fine rectilinear propagation evaluating apparatus of the present invention comprises that shining the lighting device that floats over the above-mentioned metal fine above the aforesaid liquid is advisable.
According to this invention,, can observe metal fine significantly by to metal fine irradiating illumination light.
According to metal fine rectilinear propagation evaluation method of the present invention,, can be deformed into the shape of crawling that metal fine had originally by metal fine is floated over above the liquid.Thereupon, just can correctly carry out the rectilinear propagation evaluation of metal fine.
And, according to metal fine rectilinear propagation evaluating apparatus of the present invention, as mentioned above, can correctly carry out the evaluation of metal fine.
Description of drawings
Fig. 1 is the stereogram of the rectilinear propagation evaluating apparatus of expression an embodiment of the invention.
Fig. 2 is in the expression rectilinear propagation evaluation method of the present invention, floats over gold thread on the pure water liquid level, (a) is the overall plan view of gold thread, (b) is the enlarged drawing in the bending of rule.
-1 rectilinear propagation evaluating apparatus among the figure, 2 gold threads (metal fine), 3 baskets (vibration proof mechanism), 4 drums (fluid preservation container), 5 remove the platform (vibration proof mechanism) that shakes, 6 lighting devices, 7 camera heads.
Embodiment
Below, an execution mode of metal fine rectilinear propagation evaluating apparatus of the present invention is described with reference to the accompanying drawings.
According to the rectilinear propagation evaluating apparatus 1 of present embodiment, be the evaluating apparatus of estimating as connect IC chip electrode and outside lead terminal (lead terminal) as the rectilinear propagation of the gold thread 2 of closing line.And, this rectilinear propagation evaluating apparatus 1, as shown in Figure 1, comprising: shading, windproof make with basket (vibration proof mechanism) 3, in inside drum (fluid preservation container) 4 that gold thread 2 suspends, in the above arrange drum 4 remove the platform (vibration proof mechanism) 5 that shakes, on gold thread 2 irradiating illumination light lighting device 6 and take the camera head 7 of gold thread 2.
Gold thread 2 is made up of the Au of purity 99.99%, and its line directly is 18 μ m, twists on the spool every 2000m.
Basket 3 is in order to prevent because of producing unbalanced the setting on the factor observed results such as the light of outside or wind.And, scribble the coating of black on the inwall of basket 3, will be so that observe significantly from the illumination light of lighting device 6 reverberation with gold thread 2 reflex times.
Drum 4, the pure water of liquid is equipped with in its inside, from spool separate out and in accordance with regulations the gold thread 2 that cuts off of length float on the liquid level of this pure water.In addition, drum 4 for prevent by the vibration of outside pass come to vibrate produce on the liquid level observed result unbalanced, be arranged in remove the platform 5 that shakes above.And, at the inner face and the basket 3 the same coating that scribble black of drum 4.
Lighting device 6 for example is made of fluorescent lamp, is arranged in basket 3 ceiling faces.And lighting device 6 constitutes, make its equably irradiating illumination light to floating over the gold thread 2 that is contained on the drum 4 pure water liquid levels.
Camera head 7 for example is made of digital camera, constitutes to use the illumination light of gold thread 2 reflections from lighting device 6, takes its reverberation.
Secondly, the method for utilizing this rectilinear propagation evaluating apparatus 1 to estimate gold thread 2 rectilinear propagations is described.
At first, untie the gold thread 2 that twists in spool, cut off, make on its liquid level that floats over the pure water that is contained in drum 4 with suitable length.At this moment, to the gold thread 2 that floats over liquid level, the not influence of the supression power of the distortion of the inhibition gold thread 2 as frictional force, so gold thread 2 can be deformed into the shape of crawling that gold thread 2 had originally.In addition, if become stable, take gold thread 2 with camera head 7 with the shape of 6 pairs of gold threads 2 that are out of shape at floating gold thread 2 irradiating illumination light of lighting device.One example of the shape of the gold thread 2 that at this moment, obtains is presented on Fig. 2.
Secondly, measure the mean radius of curvature of bending of mean amplitude of tide, rule of bending of number, rule of the bending of rule and the number of irregular bending from the portrait that obtains.
At this, the bending of rule represents, shown in Fig. 2 a, and Gui Ze the shape of crawling to a certain degree, its radius of curvature is big, and the part of giving prominence to from center line L1 in the shape of crawling of expression shown in Fig. 2 a.Therefore, the numerical table of Gui Ze bending shows the number of the bending that the shape of crawling mean curvature radius is big.And the amplitude of bending of rule represents, in the shape of crawling, and the distance between the summit of the bending of center line and rule.And the radius of curvature of bending of rule represents, in be connected to the radius of a circle of the bending of rule.
In addition, irregular crooked expression, shown in Fig. 2 b, the irregular shape of crawling, its radius of curvature is little, the part of giving prominence to from curve of approximation L2 in the shape of crawling shown in Fig. 2 b.Therefore, the numerical table of irregular bending shows, the number of the bending that the shape of crawling mean curvature radius is little.
As above-mentioned method, carry out the rectilinear propagation evaluation of gold thread 2.And, when estimating rectilinear propagation, cut off a plurality of gold threads 2 that twist in same spool, this is carried out each and estimate, thereby can carry out the evaluation of more accurate rectilinear propagation.
According to such rectilinear propagation evaluation method,, prevent from gold thread 2 is taken place the influence of the supression power of frictional force etc. by gold thread 2 is floated on the liquid level of pure water.Therefore, gold thread 2 can be deformed into the shape of crawling that had originally, also can correctly estimate the rectilinear propagation of gold thread 2.
In addition, according to the rectilinear propagation evaluating apparatus 1 of formation like this, as mentioned above, can more correctly estimate the rectilinear propagation of gold thread 2.
And, obtain observing portrait by camera head 7, thereby can carry out than with the more accurate rectilinear propagation evaluation of visual assessment.And, by basket 3 and stable,, also can carry out the evaluation of rectilinear propagation correctly by observing gold thread 2 significantly by lighting device 6 except that the shape change of platform 5 gold threads 2 that shake.
(embodiment 1)
Secondly, specify rectilinear propagation evaluation method of the present invention according to embodiment.
At first, it directly is 18 μ m that the gold thread of purity 99.99% is extended to line, and anneal (annealing) handles so that extend 4%.And, coat lubricant on the surface of gold thread, twist in 2000m on the spool that radius is 25mm.Making the 8 covers volume of making like this has the spool of gold thread.At this, the gold thread that 8 covers of preparing are twisted in spool is according to the order of sequence as from embodiment 1 to 8.
For from embodiment 1 to 8, each has been prepared 20 and has cut into the gold thread that length is 350mm respectively.Then, according to above-mentioned rectilinear propagation evaluation method, the number of the irregular bending of each, the mean amplitude of tide, the mean radius of curvature of bending of rule of bending of number, rule of bending of rule of each have been measured.And, utilize the actual Kulicke﹠amp of being arranged at of each gold thread; The wire bonder (wire bonder) that Soffa company makes (device name 8028), between seat (pad pitch) be 45 μ m at interval, the length of coil (loop) is that the height of 5mm, coil is under the condition of 220 μ m, make 10000 coils, and mutual connection touches number partly between the coil of mensuration adjacency, that is the number of short circuit, (short).
Table 1
The number of each irregular bending The number of the bending of each rule The mean amplitude of tide (mm) of the bending of rule The crooked mean radius of curvature (mm) of rule Short circuit (short) number
Embodiment 1 0.1 Zero is few 2.6 19 97 Zero is big 18 Zero is few
Embodiment
2 0.2 Zero is few 2.8 19 83 Zero is big 20 Zero is few
Embodiment 3 0.4 Zero is few 3.4 15 72 Zero is big 38 Zero is few
Embodiment 4 0.2 Zero is few 6.4 9 34 * little 143 * many
Embodiment 5 0.9 △ is general 4.9 8 65 △ is general 156 * many
Embodiment 6 1.3 * many 2.9 14 105 Zero is big 182 * many
Embodiment 7 1.4 * many 3.2 14 87 Zero is big 190 * many
Embodiment 8 2.1 * many 5.7 9 42 * little 248 * many
From the table 1 as can be known, if the number of irregular bending few (zero shown in the table 1), and the radius of curvature of the bending of rule big (zero shown in the table 1), short circuit number tail off (zero shown in the table 1) then, if the number of irregular bending many (△ shown in the table 1 or *), the perhaps radius of curvature of Gui Ze bending little (△ shown in the table 1 or *), then the short circuit number becomes many (shown in the tables 1 *).
More than, by confirming the shape of crawling that gold thread 2 had originally on the liquid level that gold thread 2 is floated over pure water, also confirmed to estimate really the rectilinear propagation of gold thread.And the rectilinear propagation of having confirmed gold thread 2 relies on the radius of curvature of regular bending and the number of irregular bending.
In addition, the absolute value of short circuit number can be along with different wire bonders changes to some extent, but relative short circuit number among the embodiment 1 to 8 what can not change.And, utilize above-mentioned traditional rectilinear propagation evaluation method to carry out the rectilinear propagation evaluation of gold thread equally, then reason in the supression power to the length direction of gold thread 2 such as the frictional force on plane or the weight of gold thread itself, and do not reach the shape of crawling of confirming that gold thread had originally.
And the present invention is not limited to above-mentioned execution mode, in the scope that does not break away from purport of the present invention, can carry out numerous variations.
For example, in the above-mentioned execution mode, reach the vibration that removes the platform inhibition liquid level that shakes, obtained static portrait by camera head, but this type of device is not set, only also can estimate the rectilinear propagation of gold thread by the drum come-up gold thread of adorning pure water by basket.
In addition, in the above-mentioned execution mode, used gold thread with metal fine, but iron wire (ironwire), tungsten line, aluminum steel, copper cash, chromium line, nickel wire, perhaps your gold thread (silver-colored line, platinum line, palladium line), perhaps, alloy wire (for example, gold-palladium line, Jin-Yin line, gold-platinum line, 18 gold threads, hard steel line, piano wire, stainless steel wire), perhaps, the fine rule that coats other materials (metal, inorganic matter, organic substance etc.) on this gold thread also can use.
And, be that free end carries out the rectilinear propagation evaluation with the two ends of gold thread, but that at least one end is a free end is also passable.
And the present invention floats over gold thread on the liquid level of pure water, but aforesaid liquid does not limit pure water, so long as the liquid that metal fine can be floated on the liquid level is just passable.

Claims (7)

1. metal fine rectilinear propagation evaluation method, it is characterized in that: the metal fine that will have specific length, at least one end with its metal fine floats over above the liquid as free-ended state, and, estimate the rectilinear propagation of metal fine with the basis that is shaped as of the described metal fine on this liquid levels.
2. metal fine rectilinear propagation evaluation method according to claim 1 is characterized in that: take the described metal fine that floats over above the described liquid, estimate the rectilinear propagation of metal fine according to its static portrait.
3. metal fine rectilinear propagation evaluation method according to claim 1 and 2 is characterized in that: described metal fine is a gold thread.
4. a metal fine rectilinear propagation evaluating apparatus is characterized in that: comprise liquid that utilizes liquid level come-up metal fine and the fluid preservation container of storing this liquid.
5. metal fine rectilinear propagation evaluating apparatus according to claim 4 is characterized in that: comprise and take the described camera head that floats over the metal fine above the liquid.
6. according to claim 4 or 5 described metal fine rectilinear propagation evaluating apparatus, it is characterized in that: comprise preventing the vibration proof mechanism of described liquid towards the liquid level vibration.
7. according to any described metal fine rectilinear propagation evaluating apparatus in the claim 4 to 6, it is characterized in that: comprise that irradiation floats over the lighting device of the described metal fine above the described liquid.
CN2005100999948A 2004-09-14 2005-09-13 Direct evaluating method and device for metal fine wire Expired - Fee Related CN1750247B (en)

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JP2004266605A JP4355637B2 (en) 2004-09-14 2004-09-14 Straightness evaluation method and straightness evaluation apparatus for thin metal wire
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JP3976384B2 (en) * 1997-12-26 2007-09-19 田中電子工業株式会社 Apparatus and method for measuring the linearity of fine metal wires
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