CN1750226A - Plane light emitting display of edge emission structure and its producing process - Google Patents
Plane light emitting display of edge emission structure and its producing process Download PDFInfo
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- CN1750226A CN1750226A CN 200510048409 CN200510048409A CN1750226A CN 1750226 A CN1750226 A CN 1750226A CN 200510048409 CN200510048409 CN 200510048409 CN 200510048409 A CN200510048409 A CN 200510048409A CN 1750226 A CN1750226 A CN 1750226A
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Abstract
This invention relates to a plane luminous display with an edge emitting structure and its processing technology including a closed vacuum cavity composed of an anode substrate glass, a cathode substrate glass and a surrounded glass frame, among which, a cathode conduction strip and a printed carbon nm tube cathode and a control grating for controlling electronic emission are set on the cathode substrate glass, a fluorescent powder is prepared on the anode substrate glass, a bracing wall structure and its subsidiary getter elements.
Description
Technical field
The invention belongs to the mutual crossing domain of nanoscale science and technology, flat panel display, vacuum science technology and microelectronics science and technology, relate to the making of dull and stereotyped field emission light-emitting display device, be specifically related to the content of element manufacturing aspect of the panel field emission display of carbon nanotube cathod, specially refer to the manufacture craft of field emission flat panel display device a kind of edge emission structure, carbon nanotube cathod.
Background technology
At present, the world enters " information revolution " epoch, Display Technique and display device have occupied crucial status in the evolution of information technology, the display screen on portable device such as TV, computer, mobile phone and all kinds of instrument and meter is daily life and a large amount of information of work supplier.Do not have display, just do not have the information technology of current fast development.Flat-panel screens is important man-machine interface, and this has been a undisputable fact.Flat-panel monitor because technology such as wide viewing angle, high-res, big picture constantly obtain breaking through, will be caught up with and surpassed the development trend of cathode ray tube in recent years gradually, makes large screen flat plate display continue to step more firm paces on the monitor market.Field of display is towards high image quality (near natural colour), lighting (easy to carry), big picture (satisfying telepresenc) and three-dimensional, so towards miniaturization with innovative technology exploitation and complanation development.Display current collection, communication and the information processing technology be in one, is considered to the another significant development chance of electronics industry after 20th century microelectronics, computer.Science and technology development is maked rapid progress, and Display Technique also a revolution is taking place.Because flat-panel monitor has little, radiationless, the advantage such as do not glimmer of in light weight, thin thickness, volume, become the direction of Display Technique development.
Carbon nano-tube has unique geometry and high mechanical strength, can alive outside effect launch a large amount of electronics down, becomes novel excellent cathode emission material.In the middle of novel field emission flat-panel display, made novel cathode construction, and carbon nano-tube has been transplanted to wherein.When on the control grid, applying under the situation of positive voltage, will form powerful electric field in carbon nano tube surface, force a large amount of electronics of its emission, just awkward silence at a meeting causes the emission phenomenon.But in the process of cathode emission, not all cathode material is emitting electrons uniformly, but maximum in the marginal position electrons emitted of carbon nanotube cathod, the electric field strength that its surface forms is also maximum, and this also is to cause comparison unique phenomenon in the emission in awkward silence at a meeting.Is so how making full use of this phenomenon, better to make the service of new display spare? that is to say how to effectively utilize the phenomenon that a large amount of electronics are launched in this maximal margin position, this is the realistic problem that the researcher need solve.
In the middle of present transmission-type flat-panel display device, visible light is gone out from the direct transmission of anode plate, need just can be transmitted to the device outside later on by various retes, has light losing significantly, has also reduced the luminous efficiency of device.Be subjected to the restriction of various factors, break through technical can't the obtaining of element manufacturing at present; And the anode working overtension of this device needs higher-quality megohmite insulant to protect, and this has increased the overall cost of manufacture of device virtually, this also with flat-panel display device in original intention with low cost disagree.
In addition, not influencing as far as possible under the prerequisite of image quality, also need further to reduce the cost of manufacture of flat device; When can carrying out large-area element manufacturing, it is complicated to need also to make that device fabrication processes avoids, and helps carrying out business-like large-scale production.
Summary of the invention
The objective of the invention is to overcome the deficiencies in the prior art and planar luminescent display device and the manufacture craft thereof that a kind of manufacturing process is with low cost, simple in structure, make the edge emission structure of rate of finished products height, reliable and stable, edge emission structure be provided.
The object of the present invention is achieved like this: comprise by the front glass panel, back face glass and all around glass enclose the sealed vacuum chamber that frame constitutes, be arranged on supporting wall structure and attached getter element on the front glass panel, back face glass is provided with anode electrode layer, printing last layer insulation paste layer on the face glass of back, form insulation and increase layer, insulation is increased layer and is covered back face glass and anode electrode layer, and increase in insulation and to reserve the anode pixels hole on the layer, and the anode electrode layer in the anode pixels hole comes out, on dielectric isolation layer, be provided with negative electrode layer, on negative electrode layer, be provided with dielectric isolation layer, on dielectric isolation layer, be provided with the control grid electrode layer, on anode electrode layer, be provided with phosphor powder layer, on negative electrode layer, also be provided with carbon nanotube cathod.Launch on the basis of a large amount of electrical principles making full use of cathode edge, directly bombard phosphor anode and send visible light, and through the emission of anode electrode layer, face glass is transmitted to the device outside in the past by the electronics of cathode emission.
Dielectric isolation layer of the top existence of described negative electrode layer, dielectric isolation layer can be one of insulation paste layer, silicon dioxide layer, dielectric isolation layer does not all cover negative electrode layer, only cover mid portion, to reserve the cathode electrode layer segment in both sides, so that for the preparation of carbon nanotube cathod provides the space, a control of the top existence of dielectric isolation layer grid electrode layer, the control grid electrode layer can be gold, silver, nickel, chromium, aluminum metal layer.
The flat-plate luminous display of edge emission structure among the present invention adopts following technology to make:
1, the making of back face glass: the dull and stereotyped soda-lime glass of integral body is carried out cutting, produce the back face glass;
2, the making of anode electrode layer: utilize coating machine, evaporation last layer aluminium film on the face glass of back; In conjunction with conventional photoetching process, aluminum membranous layer is carried out etching, form anode electrode layer;
3, the making of layer is increased in insulation: in conjunction with silk-screen printing technique, printing last layer insulation paste layer forms insulation and increases layer on the face glass of back.Through overbaking (baking temperature: 150 ℃, retention time: 15 minutes) afterwards, be placed on and carry out high temperature sintering (sintering temperature: 590 ℃, retention time: 10 minutes) in the sintering furnace; Require insulating barrier will cover back face glass and anode electrode layer; Increase on the layer in insulation and will reserve the anode pixels hole, and the anode electrode layer in the anode pixels hole is come out;
4, the making of negative electrode layer: on dielectric isolation layer, prepare nickel metal layer; In conjunction with conventional photoetching process, nickel metal layer is carried out etching, form negative electrode layer;
5, the making of dielectric isolation layer: in conjunction with silk-screen printing technique, printing last layer insulation paste layer on negative electrode layer forms dielectric isolation layer.Through overbaking (baking temperature: 150 ℃, retention time: 15 minutes) afterwards, be placed on and carry out high temperature sintering (sintering temperature: 590 ℃, retention time: 10 minutes) in the sintering furnace; Require dielectric isolation layer can not all cover negative electrode layer, only cover mid portion, will reserve the cathode electrode layer segment, so that provide the space for the preparation of carbon nanotube cathod in both sides;
6, the making of control grid electrode layer: on dielectric isolation layer, prepare nickel metal layer; In conjunction with conventional photoetching process, nickel metal layer is carried out etching, form the control grid electrode layer;
7, the making of phosphor powder layer:, on anode electrode layer, prepare phosphor powder layer in conjunction with silk-screen printing technique; Needs process baking process (baking temperature: 120 ℃, the retention time: 15 minutes), allow other material of phosphor powder layer vapor away;
8, the making of carbon nanotube cathod: in conjunction with silk-screen printing technique, with carbon nanotube cathod be printed on negative electrode layer above, be formed for the carbon nanotube cathod of emitting electrons;
9, the reprocessing of carbon nanotube cathod: the carbon nanotube cathod after the printing is carried out reprocessing, to improve the field emission characteristics of carbon nano-tube;
10, the making of front glass panel: the dull and stereotyped soda-lime glass of integral body is carried out cutting, produce front glass panel [9];
11, device assembling: with front glass panel, back face glass, glass encloses frame and supporting wall structure is assembled together all around, and getter put in the middle of the cavity, fix with glass powder with low melting point.Around face glass, smeared glass powder with low melting point, fixed with clip.
12, finished product is made: the device that has assembled is carried out following packaging technology: toast in the middle of the sample device is put into baking oven; Carry out high temperature sintering in the middle of putting into sintering furnace; On exhaust station, carry out device exhaust, sealed-off, on the roasting machine that disappears, the getter of device inside bake and disappears, install pin formation finished parts at last additional.
The present invention has following good effect:
Main feature among the present invention has been to make light-emitting plate display device edge emission structure, carbon nanotube cathod.On the basis that makes full use of a large amount of electrical principles of carbon nanotube cathod edge-emission, directly bombard phosphor anode and send visible light by the electronics of cathode emission, and through the emission of anode electrode layer, face glass is transmitted to the device outside in the past.The favourable part of the large tracts of land feasibility of silk-screen printing technique and good device architecture is combined, produce the better field emission active flat panel device of performance.
1, adopts edge emission structure to make field emission display device, helped the emission effciency of further boost device.In the present invention, be produced on the effect that the anode aluminum membranous layer on the face glass of back is serving as anode electrode, on aluminum membranous layer, exist phosphor powder layer.Carbon nanotube cathod is positioned at insulation and increases the top both sides of layer, when after applying forward voltage on the control gate electrode, will form powerful electric field strength on the carbon nanotube cathod surface, thereby launch a large amount of electronics; And because the phosphor anode layer is positioned at the side summary lower position of carbon nanotube cathod, this just makes the carbon nano-tube of carbon nanotube cathod edge that more superior development space arranged, and has also just made full use of the principle that the carbon nanotube cathod marginal position can be launched a large amount of electronics more; And because the side that the phosphor anode layer is positioned at carbon nanotube cathod lower position slightly, this also makes the process of a high-speed motion from the carbon nanotube cathod electrons emitted, impact fluorescence bisque under the high-tension effect of anode and send visible light.Owing to do not pass through any other element from the carbon nanotube cathod electrons emitted, be not subjected to the bad interference of any other element yet, directly phosphor powder layer is carried out the high-energy bombardment, this has significantly improved the luminous efficiency of device.
2, on the face glass of back, made aluminum membranous layer, it serves as the electrode of anode on the one hand, make it possible to device is applied suitable anode high voltage, also make the aluminium film that utilizes evaporation form a mirror surface on the other hand, come visible light is better reflected, face glass is transmitted to the device outside in the past.
3, adopt reflective active flat panel display structure, help improving the image displaying quality of device.In the middle of the edge emission structure light-emitting plate display device in the present invention, when phosphor powder layer and after sending visible light by electron bombard, the visible light that sends is through aluminum membranous layer (anode electrode layer just) reflection at phosphor powder layer back, and face glass directly is transmitted to the device outside in the past.Because the viewing area on the front glass panel does not have any other device, therefore, the visible light that device sends can be described as almost without any loss just be transmitted to the device outside, this can greatly improve the visual display quality of device undoubtedly.
In addition, in the middle of the light-emitting plate display device of edge emission structure in the present invention, on the basis that fully combines silk-screen printing technique, carry out element manufacturing, had the feasibility of making large area display spare; In the manufacturing process of edge emission structure light-emitting plate display device in the present invention, do not adopt special element manufacturing material and special device making technics, can greatly reduce the production cost of device, have that manufacture craft is simple, cost of manufacture is cheap, a superior part such as reliable and stable, high-quality display image.
Description of drawings
Fig. 1 has provided the vertical structure schematic diagram of back of the present invention face glass structure.
Fig. 2 has provided the transversary schematic diagram of back of the present invention face glass structure.
Provided structural representation of the present invention among Fig. 3.
Embodiment
Below in conjunction with drawings and Examples the present invention is further specified, but the present invention is not limited to these
Embodiment.
The present invention includes by front glass panel [9], back face glass [1] and all around glass enclose the sealed vacuum chamber that frame [10] is constituted, be arranged on supporting wall structure [11] and attached getter element [12] on the front glass panel [9], it is characterized in that: back face glass [1] is provided with anode electrode layer [2], go up printing last layer insulation paste layer at back face glass [1], form insulation and increase layer [3], insulation is increased layer [3] and is covered back face glass [1] and anode electrode layer [2], and increase layer in insulation and reserve the anode pixels hole on [3], and the anode electrode layer in the anode pixels hole [2] comes out, on dielectric isolation layer [3], be provided with negative electrode layer [4], on negative electrode layer [4], be provided with dielectric isolation layer [5], on dielectric isolation layer [5], be provided with control grid electrode layer [6], on anode electrode layer [2], be provided with phosphor powder layer [7], on negative electrode layer [4], also be provided with carbon nanotube cathod [8].
Described front glass panel and back face glass are one of soda-lime glass, Pyrex material.The negative electrode layer that layer is increased in described insulation can be one of gold, silver, nickel, chromium, aluminum metal.Dielectric isolation layer of the top existence of described negative electrode layer, dielectric isolation layer can be one of insulation paste layer, silicon dioxide layer, dielectric isolation layer does not all cover negative electrode layer, only cover mid portion, to reserve the cathode electrode layer segment in both sides, so that for the preparation of carbon nanotube cathod provides the space, a control of the top existence of dielectric isolation layer grid electrode layer, the control grid electrode layer can be gold, silver, nickel, chromium, aluminum metal layer.
The present invention adopts following technology to make:
1, the making of back face glass [1]
The dull and stereotyped soda-lime glass of integral body is carried out cutting, produce back face glass [1];
2, the making of anode electrode layer [2]
Utilize coating machine, go up evaporation last layer aluminium film at back face glass [1]; In conjunction with conventional photoetching process, aluminum membranous layer is carried out etching, form anode electrode layer [2];
3, the making of layer [3] is increased in insulation
In conjunction with silk-screen printing technique, printing last layer insulation paste layer forms insulation and increases layer [3] on the face glass of back.Through overbaking (baking temperature: 150 ℃, retention time: 15 minutes) afterwards, be placed on and carry out high temperature sintering (sintering temperature: 590 ℃, retention time: 10 minutes) in the sintering furnace; Require insulating barrier will cover back face glass [1] and anode electrode layer [2]; Increase layer in insulation and will reserve the anode pixels hole on [3], and the anode electrode layer in the anode pixels hole [2] is come out;
4, the making of negative electrode layer [4]
On dielectric isolation layer [3], prepare nickel metal layer; In conjunction with conventional photoetching process, nickel metal layer is carried out etching, form negative electrode layer [4];
5, the making of dielectric isolation layer [5]
In conjunction with silk-screen printing technique, printing last layer insulation paste layer on negative electrode layer [4] forms dielectric isolation layer [5].Through overbaking (baking temperature: 150 ℃, retention time: 15 minutes) afterwards, be placed on and carry out high temperature sintering (sintering temperature: 590 ℃, retention time: 10 minutes) in the sintering furnace; Require dielectric isolation layer [5] can not all cover negative electrode layer [4], only cover mid portion, will reserve negative electrode layer [4] part in both sides, so that provide the space for the preparation of carbon nanotube cathod;
6, the making of control grid electrode layer [6]
On dielectric isolation layer [5], prepare nickel metal layer; In conjunction with conventional photoetching process, nickel metal layer is carried out etching, form control grid electrode layer [6];
7, the making of phosphor powder layer [7]
In conjunction with silk-screen printing technique, on anode electrode layer [2], prepare phosphor powder layer [7]; Needs process baking process (baking temperature: 120 ℃, the retention time: 15 minutes), allow other material of phosphor powder layer vapor away;
8, the making of carbon nano-tube [8] negative electrode
In conjunction with silk-screen printing technique, with carbon nano-tube [8] negative electrode be printed on negative electrode layer [4] above, be formed for carbon nano-tube [8] negative electrode of emitting electrons;
9, the reprocessing of carbon nano-tube [8] negative electrode
Carbon nano-tube [8] negative electrode after the printing is carried out reprocessing, to improve the field emission characteristics of carbon nano-tube;
10, the making of front glass panel [9]
The dull and stereotyped soda-lime glass of integral body is carried out cutting, produce front glass panel [9];
11, device assembling
With front glass panel, back face glass, glass encloses frame [10] and supporting wall structure [11] is assembled together all around, and getter [12] put in the middle of the cavity, fix with glass powder with low melting point.Around face glass, smeared glass powder with low melting point, fixed with clip.
12, finished product is made
The device that has assembled is carried out following packaging technology: toast in the middle of the sample device is put into baking oven; Carry out high temperature sintering in the middle of putting into sintering furnace; On exhaust station, carry out device exhaust, sealed-off, on the roasting machine that disappears, the getter of device inside bake and disappears, install pin formation finished parts at last additional.
The front glass panel of the flat-plate luminous display device of edge emission structure among the present invention and back face glass be large-scale, have quite good thermal endurance and operability, a High Performance Insulation material with low cost; The front glass panel of the flat-plate luminous display device of edge emission structure among the present invention and back face glass are glass material, as soda-lime glass, Pyrex; There is an anode metal layer on the back face glass of the flat-plate luminous display device of edge emission structure among the present invention; Anode metal layer on the back face glass of the flat-plate luminous display device of edge emission structure among the present invention is an aluminum membranous layer; The making of the aluminum membranous layer on the back face glass of the flat-plate luminous display device of edge emission structure among the present invention can be finished in conjunction with the evaporation process and the photoetching process of routine, forms anode electrode; Exist an insulation to increase layer on the back face glass of the flat-plate luminous display device of edge emission structure among the present invention; Layer is increased in insulation on the back face glass of the flat-plate luminous display device of edge emission structure among the present invention can be insulation paste layer, silicon dioxide layer and the poly-imine layer that mills; The insulation of the flat-plate luminous display device of edge emission structure among the present invention is increased and is reserved with the anode pixels hole on the layer; The insulation of the flat-plate luminous display device of edge emission structure among the present invention increase the layer the anode pixels hole in to expose following anode electrode; Negative electrode layer of top existence of layer is increased in the insulation of the flat-plate luminous display device of edge emission structure among the present invention; The negative electrode layer of the flat-plate luminous display device of edge emission structure among the present invention can be gold, silver, nickel, chromium, aluminum metal; The carbon nanotube cathod of the flat-plate luminous display device of edge emission structure among the present invention just prepares on negative electrode layer; Dielectric isolation layer of the top existence of the negative electrode layer of the flat-plate luminous display device of edge emission structure among the present invention; The dielectric isolation layer of the flat-plate luminous display device of edge emission structure among the present invention can be insulation paste layer, silicon dioxide layer; The dielectric isolation layer of the flat-plate luminous display device of edge emission structure among the present invention can not all cover negative electrode layer, only cover mid portion, to reserve the cathode electrode layer segment in both sides, so that provide the space for the preparation of carbon nanotube cathod; A control of the top existence of the dielectric isolation layer of the flat-plate luminous display device of edge emission structure among the present invention grid electrode layer; The control grid electrode layer of the flat-plate luminous display device of edge emission structure among the present invention can be gold, silver, nickel, chromium, aluminum metal layer; The flat-plate luminous display of edge emission structure among the present invention prepares on anode electrode layer phosphor powder layer.
Claims (5)
1, a kind of planar luminescent display device of edge emission structure, comprise by front glass panel [9], back face glass [1] and all around glass enclose the sealed vacuum chamber that frame [10] is constituted, be arranged on supporting wall structure [11] and attached getter element [12] on the front glass panel [9], it is characterized in that: back face glass [1] is provided with anode electrode layer [2], go up printing last layer insulation paste layer at back face glass [1], form insulation and increase layer [3], insulation is increased layer [3] and is covered back face glass [1] and anode electrode layer [2], and increase layer in insulation and reserve the anode pixels hole on [3], and the anode electrode layer in the anode pixels hole [2] comes out, on dielectric isolation layer [3], be provided with negative electrode layer [4], on negative electrode layer [4], be provided with dielectric isolation layer [5], on dielectric isolation layer [5], be provided with control grid electrode layer [6], on anode electrode layer [2], be provided with phosphor powder layer [7], on negative electrode layer [4], also be provided with carbon nanotube cathod [8].
2, the planar luminescent display device of a kind of edge emission structure as claimed in claim 1 is characterized in that: described front glass panel and back face glass are one of soda-lime glass, Pyrex material.
3, the planar luminescent display device of a kind of edge emission structure as claimed in claim 1 is characterized in that: the negative electrode layer that layer is increased in described insulation can be one of gold, silver, nickel, chromium, aluminum metal.
4, the planar luminescent display device of a kind of edge emission structure as claimed in claim 1, it is characterized in that: dielectric isolation layer of the top existence of described negative electrode layer, dielectric isolation layer can be the insulation paste layer, one of silicon dioxide layer, dielectric isolation layer does not all cover negative electrode layer, only cover mid portion, to reserve the cathode electrode layer segment in both sides, so that provide the space for the preparation of carbon nanotube cathod, a control of the top existence of dielectric isolation layer grid electrode layer, the control grid electrode layer can be gold, silver, nickel, chromium, aluminum metal layer.
5, a kind of preparation technology of planar luminescent display device of edge emission structure is characterized in that: adopt following technology to make:
1), the making of back face glass [1]: the dull and stereotyped soda-lime glass of integral body is carried out cutting, produce back face glass [1];
2), the making of anode electrode layer [2]: utilize coating machine, go up evaporation last layer aluminium film at back face glass [1]; In conjunction with conventional photoetching process, aluminum membranous layer is carried out etching, form anode electrode layer [2];
3), the making of layer [3] is increased in insulation: in conjunction with silk-screen printing technique, printing last layer insulation paste layer forms insulation and increases layer [3] on the face glass of back.Through overbaking, baking temperature: 150 ℃, the retention time: 15 minutes, afterwards, be placed on and carry out high temperature sintering in the sintering furnace, sintering temperature: 590 ℃, the retention time: 10 minutes; Require insulating barrier will cover back face glass [1] and anode electrode layer [2]; Increase layer in insulation and will reserve the anode pixels hole on [3], and the anode electrode layer in the anode pixels hole [2] is come out;
4), the making of negative electrode layer [4]: on dielectric isolation layer [3], prepare nickel metal layer; In conjunction with conventional photoetching process, nickel metal layer is carried out etching, form negative electrode layer [4];
5), the making of dielectric isolation layer [5]: in conjunction with silk-screen printing technique, printing last layer insulation paste layer on negative electrode layer [4] forms dielectric isolation layer [5].Through overbaking, baking temperature: 150 ℃, the retention time: 15 minutes, afterwards, be placed on and carry out high temperature sintering in the sintering furnace, sintering temperature: 590 ℃, the retention time: 10 minutes; Require dielectric isolation layer [5] can not all cover negative electrode layer [4], only cover mid portion, will reserve negative electrode layer [4] part in both sides, so that provide the space for the preparation of carbon nanotube cathod;
6), the making of control grid electrode layer [6]: on dielectric isolation layer [5], prepare nickel metal layer; In conjunction with conventional photoetching process, nickel metal layer is carried out etching, form control grid electrode layer [6];
7), the making of phosphor powder layer [7]:, on anode electrode layer [2], prepare phosphor powder layer [7] in conjunction with silk-screen printing technique; Need through baking process baking temperature: 120 ℃, the retention time: 15 minutes, allow other material of phosphor powder layer vapor away;
8), the making of carbon nano-tube [8] negative electrode: in conjunction with silk-screen printing technique, with carbon nano-tube [8] negative electrode be printed on negative electrode layer [4] above, be formed for carbon nano-tube [8] negative electrode of emitting electrons;
9), the reprocessing of carbon nano-tube [8] negative electrode: carbon nano-tube [8] negative electrode after the printing is carried out reprocessing, to improve the field emission characteristics of carbon nano-tube;
10), the making of front glass panel [9]: the dull and stereotyped soda-lime glass of integral body is carried out cutting, produce front glass panel [9];
11), device assembling: with front glass panel, back face glass, glass encloses frame [10] and supporting wall structure [11] is assembled together all around, and getter [12] put in the middle of the cavity, fix with glass powder with low melting point.Around face glass, smeared glass powder with low melting point, fixed with clip;
12), finished product is made: the device that has assembled is carried out following packaging technology: toast in the middle of the sample device is put into baking oven; Carry out high temperature sintering in the middle of putting into sintering furnace; On exhaust station, carry out device exhaust, sealed-off, on the roasting machine that disappears, the getter of device inside bake and disappears, install pin formation finished parts at last additional.
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| CN 200510048409 CN1750226A (en) | 2005-10-18 | 2005-10-18 | Plane light emitting display of edge emission structure and its producing process |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101819913A (en) * | 2010-05-08 | 2010-09-01 | 福州大学 | Front gate type field emission cathode structure with edge enhancement effect and preparation method thereof |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101819913A (en) * | 2010-05-08 | 2010-09-01 | 福州大学 | Front gate type field emission cathode structure with edge enhancement effect and preparation method thereof |
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