CN1737187A - 用于保护制品的方法及相关组合物 - Google Patents

用于保护制品的方法及相关组合物 Download PDF

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Publication number
CN1737187A
CN1737187A CNA2005100629300A CN200510062930A CN1737187A CN 1737187 A CN1737187 A CN 1737187A CN A2005100629300 A CNA2005100629300 A CN A2005100629300A CN 200510062930 A CN200510062930 A CN 200510062930A CN 1737187 A CN1737187 A CN 1737187A
Authority
CN
China
Prior art keywords
atom
supercoat
base material
target
alloy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CNA2005100629300A
Other languages
English (en)
Chinese (zh)
Inventor
D·M·利普金
J·-C·赵
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
General Electric Co
Original Assignee
General Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by General Electric Co filed Critical General Electric Co
Publication of CN1737187A publication Critical patent/CN1737187A/zh
Pending legal-status Critical Current

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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14Metallic material, boron or silicon
    • C23C14/16Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
    • C23C14/165Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon by cathodic sputtering
    • CCHEMISTRY; METALLURGY
    • C22METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22CALLOYS
    • C22C21/00Alloys based on aluminium
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • C23C14/32Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325Electric arc evaporation
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34Sputtering
    • C23C14/3407Cathode assembly for sputtering apparatus, e.g. Target
    • C23C14/3414Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34Sputtering
    • C23C14/3435Applying energy to the substrate during sputtering
    • C23C14/345Applying energy to the substrate during sputtering using substrate bias
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/58After-treatment
    • C23C14/5806Thermal treatment
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02TCLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
    • Y02T50/00Aeronautics or air transport
    • Y02T50/60Efficient propulsion technologies, e.g. for aircraft
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/12All metal or with adjacent metals
    • Y10T428/12493Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12736Al-base component
    • Y10T428/1275Next to Group VIII or IB metal-base component

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Physical Vapour Deposition (AREA)
CNA2005100629300A 2004-03-30 2005-03-30 用于保护制品的方法及相关组合物 Pending CN1737187A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/814,693 US20040185182A1 (en) 2002-07-31 2004-03-30 Method for protecting articles, and related compositions
US10/814693 2004-03-30

Publications (1)

Publication Number Publication Date
CN1737187A true CN1737187A (zh) 2006-02-22

Family

ID=34912664

Family Applications (1)

Application Number Title Priority Date Filing Date
CNA2005100629300A Pending CN1737187A (zh) 2004-03-30 2005-03-30 用于保护制品的方法及相关组合物

Country Status (4)

Country Link
US (1) US20040185182A1 (enExample)
EP (1) EP1584704A1 (enExample)
JP (1) JP2005281865A (enExample)
CN (1) CN1737187A (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102912340A (zh) * 2012-10-15 2013-02-06 秦皇岛格瑞得节能技术服务有限公司 一种耐高温冲击磨损梯度复合材料的制备方法
CN107581841A (zh) * 2017-10-19 2018-01-16 临海市朵纳卫浴有限公司 Led镜基座及其制备方法
CN107692702A (zh) * 2017-10-19 2018-02-16 临海市朵纳卫浴有限公司 Led花纹镜及其制备方法
CN107828990A (zh) * 2017-09-27 2018-03-23 宁波华源精特金属制品有限公司 一种机器人连接杆及其制备工艺

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US8066854B2 (en) * 2002-12-18 2011-11-29 Metascape Llc Antimicrobial coating methods
SG127768A1 (en) * 2005-05-27 2006-12-29 Turbine Overhaul Services Priv Thermal barrier coating
US20070026205A1 (en) 2005-08-01 2007-02-01 Vapor Technologies Inc. Article having patterned decorative coating
WO2007100363A1 (en) * 2006-03-03 2007-09-07 Chameleon Scientific Corporation Chrome coated surfaces and deposition methods therefor
US20070207339A1 (en) * 2006-03-06 2007-09-06 Zimmerman Robert G Jr Bond coat process for thermal barrier coating
US7416790B2 (en) * 2006-12-08 2008-08-26 General Electric Company Coating systems containing rhodium aluminide-based layers
US7879203B2 (en) * 2006-12-11 2011-02-01 General Electric Company Method and apparatus for cathodic arc ion plasma deposition
US20100254820A1 (en) * 2006-12-29 2010-10-07 Michael Patrick Maly Article with restored or regenerated structure
IL191822A0 (en) * 2007-06-25 2009-02-11 Sulzer Metaplas Gmbh Layer system for the formation of a surface layer on a surface of a substrate and also are vaporization source for the manufacture of a layer system
EP2166128B1 (de) 2008-09-19 2011-11-09 Oerlikon Trading AG, Trübbach Verfahren zum Herstellen von Metalloxidschichten durch Funkenverdampfung
CN117867446B (zh) * 2024-01-12 2025-10-03 广东工业大学 一种氮化铬铝硼铈/氮化铌多层超厚涂层及其沉积方法

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US3341307A (en) * 1965-05-25 1967-09-12 Tarr Charles Oliver Oxidation resistant niobium
US4109061A (en) * 1977-12-08 1978-08-22 United Technologies Corporation Method for altering the composition and structure of aluminum bearing overlay alloy coatings during deposition from metallic vapor
US5516380A (en) * 1994-10-14 1996-05-14 General Electric Company NiAl intermetallic alloy and article with improved high temperature strength
US5923056A (en) * 1996-10-10 1999-07-13 Lucent Technologies Inc. Electronic components with doped metal oxide dielectric materials and a process for making electronic components with doped metal oxide dielectric materials
US6139699A (en) * 1997-05-27 2000-10-31 Applied Materials, Inc. Sputtering methods for depositing stress tunable tantalum and tantalum nitride films
SG71151A1 (en) * 1997-09-17 2000-03-21 Gen Electric Bond coat for a thermal barrier coating system and method therefor
CN1109591C (zh) * 1998-01-12 2003-05-28 皇家菲利浦电子有限公司 电化学机械加工工件的方法和设备
US6153313A (en) * 1998-10-06 2000-11-28 General Electric Company Nickel aluminide coating and coating systems formed therewith
US6291084B1 (en) * 1998-10-06 2001-09-18 General Electric Company Nickel aluminide coating and coating systems formed therewith
US6287644B1 (en) * 1999-07-02 2001-09-11 General Electric Company Continuously-graded bond coat and method of manufacture
US6207297B1 (en) * 1999-09-29 2001-03-27 Siemens Westinghouse Power Corporation Barrier layer for a MCrAlY basecoat superalloy combination
US6475642B1 (en) * 2000-08-31 2002-11-05 General Electric Company Oxidation-resistant coatings, and related articles and processes
US6620525B1 (en) * 2000-11-09 2003-09-16 General Electric Company Thermal barrier coating with improved erosion and impact resistance and process therefor
US6617049B2 (en) * 2001-01-18 2003-09-09 General Electric Company Thermal barrier coating with improved erosion and impact resistance
US6746782B2 (en) * 2001-06-11 2004-06-08 General Electric Company Diffusion barrier coatings, and related articles and processes
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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102912340A (zh) * 2012-10-15 2013-02-06 秦皇岛格瑞得节能技术服务有限公司 一种耐高温冲击磨损梯度复合材料的制备方法
CN107828990A (zh) * 2017-09-27 2018-03-23 宁波华源精特金属制品有限公司 一种机器人连接杆及其制备工艺
CN107828990B (zh) * 2017-09-27 2019-07-23 宁波华源精特金属制品有限公司 一种机器人连接杆及其制备工艺
CN107581841A (zh) * 2017-10-19 2018-01-16 临海市朵纳卫浴有限公司 Led镜基座及其制备方法
CN107692702A (zh) * 2017-10-19 2018-02-16 临海市朵纳卫浴有限公司 Led花纹镜及其制备方法

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Publication number Publication date
JP2005281865A (ja) 2005-10-13
EP1584704A1 (en) 2005-10-12
US20040185182A1 (en) 2004-09-23

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