CN1730700A - Novel silicon base alloy - Google Patents

Novel silicon base alloy Download PDF

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Publication number
CN1730700A
CN1730700A CN 200510060331 CN200510060331A CN1730700A CN 1730700 A CN1730700 A CN 1730700A CN 200510060331 CN200510060331 CN 200510060331 CN 200510060331 A CN200510060331 A CN 200510060331A CN 1730700 A CN1730700 A CN 1730700A
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CN
China
Prior art keywords
base alloy
silicon base
silicon
silver
weight ratio
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN 200510060331
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Chinese (zh)
Inventor
田小钰
周立敬
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to CN 200510060331 priority Critical patent/CN1730700A/en
Publication of CN1730700A publication Critical patent/CN1730700A/en
Pending legal-status Critical Current

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Abstract

The invention relates to a novel silicon base alloy, which mainly comprises silicon element 60-95% and colored metallic elements 5-40% (by weight ratio), the colored metallic elements are one or the combination of Ag, Ni, Al, Sn, Cu, W, Pb and Sb.

Description

Novel silicon base alloy
Technical field
The present invention relates to a kind of metallic substance, particularly a kind of novel silicon base alloy that is used for the power semiconductor device chip substrate.
Background technology
For a long time, domestic and international manufacturer production power semiconductor device, its chip substrate generally adopts thermal expansivity and the approaching molybdenum sheet of silicon chip.But because the continuous increase of Mo demand, the quick promotion of molybdenum sheet price now near precious metal materials such as silver, makes with the molybdenum sheet to be that the power semiconductor device cost of substrate increases substantially.And the performance of molybdenum sheet is also not satisfactory, is difficult to adapt to more large-sized silicon wafers substrate application.The sintering temperature of molybdenum sheet substrate and silicon chip is higher, generally more than 710 ℃; The machining property of molybdenum sheet and electrical and thermal conductivity performance are also undesirable, and also have the big and shortcoming such as remove difficulties of STRESS VARIATION,
Summary of the invention
The invention provides a kind of novel silicon base alloy that is used for the power semiconductor device chip substrate, make its price lower, and performance is more satisfactory.
Novel silicon base alloy of the present invention mainly is grouped into (weight ratio) by following one-tenth:
Element silicon 60--95%
Non-ferrous metal element 5-40%
Wherein the non-ferrous metal element is any one or the multiple combination in silver, nickel, aluminium, tin, copper, tungsten, lead, the antimony.
The present invention is owing to mainly adopted the element silicon material identical with silicon chip, and its thermal expansivity and silicon chip are more approaching; And allocate into the partially conductive heat conductivility preferably non-ferrous metal be combined into novel silicon base alloy, its sintering temperature is compared for 710 ℃ with the molybdenum sheet sintering temperature about 600 ℃, has reduced by 110 ℃; And price is lower, and STRESS VARIATION reduces, and machining property, electrical and thermal conductivity performance, chemical stability all significantly strengthen, and can adapt to more the large-sized silicon wafers substrate and use.Advantages such as therefore, it is low that the present invention has price, and performance is good.
Embodiment
Embodiment 1:
A kind of novel silicon base alloy is to be grouped into (weight ratio) by following one-tenth:
Silicon 70-85%
Silver 15-30%
The novel silicon base alloy that present embodiment is formed, its electrical and thermal conductivity performance is preferable.
Embodiment 2:
A kind of novel silicon base alloy is to be grouped into (weight ratio) by following one-tenth:
Silicon 75-85%
Silver 8-15%
Nickel 7-10%
The novel silicon base alloy that present embodiment is formed, its machining property and chemical stability are better.
Embodiment 3:
A kind of novel silicon base alloy is to be grouped into (weight ratio) by following one-tenth:
Silicon 75-85%
Silver 5-9%
Nickel 5-8%
Tin 5-8%
The novel silicon base alloy that present embodiment is formed, its STRESS VARIATION is less.
Embodiment 4:
A kind of novel silicon base alloy is to be grouped into (weight ratio) by following one-tenth:
Silicon 80-90%
Silver 3-5%
Nickel 3-5%
Tin 2-5%
Plumbous 2-5%
The novel silicon base alloy that present embodiment is formed, its thermal expansivity and silicon chip are very approaching.
Embodiment 5: a kind of novel silicon base alloy is to be grouped into (weight ratio) by following one-tenth:
Silicon 60-95%
Silver 1-8%
Nickel 1-8%
Tin 1-8%
Plumbous 0.5-6%
Antimony 0.5-6%
Aluminium 0.5-3%
Copper 0.5-1%
The novel silicon base alloy that present embodiment is formed, its sintering temperature is lower, generally below 600 ℃, compares for 710 ℃ with the sintering temperature of molybdenum sheet, has reduced by 110 ℃.
The present invention is combined into in element silicon and silver, nickel, aluminium, tin, copper, lead, the antimony element any one or more.Also can add other non-ferrous metal elements such as gold, chromium, molybdenum, titanium in addition.

Claims (6)

1. novel silicon base alloy that is used for the power semiconductor device chip substrate, it is characterized in that: it mainly is grouped into (weight ratio) by following one-tenth:
Element silicon 60--95%
Non-ferrous metal element 5-40%
Wherein the non-ferrous metal element is any one or the multiple combination in silver, nickel, aluminium, tin, copper, tungsten, lead, the antimony.
2, novel silicon base alloy according to claim 1 is characterized in that: it is grouped into (weight ratio) by following one-tenth:
Silicon 70-85%
Silver 15-30%
3. novel silicon base alloy according to claim 1 is characterized in that: it is grouped into (weight ratio) by following one-tenth:
Silicon 75-85%
Silver 8-15%
Nickel 7-10%
4. novel silicon base alloy according to claim 1 is characterized in that: be grouped into (weight ratio) by following one-tenth:
Silicon 75-85%
Silver 5-9%
Nickel 5-8%
Tin 5-8%
5. novel silicon base alloy according to claim 1 is characterized in that: be grouped into (weight ratio) by following one-tenth:
Silicon 80-90%
Silver 3-5%
Nickel 3-5%
Tin 2-5%
Plumbous 2-5%
6. novel silicon base alloy according to claim 1 is characterized in that: be grouped into (weight ratio) by following one-tenth:
Silicon 60-95%
Silver 1-8%
Nickel 1-8%
Tin 1-8%
Plumbous 0.5-6%
Antimony 0.5-6%
Aluminium 0.5-3%
Copper 0.5-1%
CN 200510060331 2005-08-04 2005-08-04 Novel silicon base alloy Pending CN1730700A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 200510060331 CN1730700A (en) 2005-08-04 2005-08-04 Novel silicon base alloy

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN 200510060331 CN1730700A (en) 2005-08-04 2005-08-04 Novel silicon base alloy

Publications (1)

Publication Number Publication Date
CN1730700A true CN1730700A (en) 2006-02-08

Family

ID=35963121

Family Applications (1)

Application Number Title Priority Date Filing Date
CN 200510060331 Pending CN1730700A (en) 2005-08-04 2005-08-04 Novel silicon base alloy

Country Status (1)

Country Link
CN (1) CN1730700A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113106274A (en) * 2021-03-25 2021-07-13 北京诺飞新能源科技有限责任公司 Preparation method of wear-resistant and corrosion-resistant high-silicon aluminum alloy

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113106274A (en) * 2021-03-25 2021-07-13 北京诺飞新能源科技有限责任公司 Preparation method of wear-resistant and corrosion-resistant high-silicon aluminum alloy

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