CN1713006A - Dark ultraviolet visible near infrared polarizer - Google Patents
Dark ultraviolet visible near infrared polarizer Download PDFInfo
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- CN1713006A CN1713006A CN 200510018753 CN200510018753A CN1713006A CN 1713006 A CN1713006 A CN 1713006A CN 200510018753 CN200510018753 CN 200510018753 CN 200510018753 A CN200510018753 A CN 200510018753A CN 1713006 A CN1713006 A CN 1713006A
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- crystal material
- glue
- near infrared
- bbo crystal
- polarizer
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Abstract
A deep ultraviolet , visible and near infrared polarizer is prepared by crystal material and glue as crystal material is alpha-BBO crystal material being prepared to be two double refractive materials in the same structure with corner cut of 59.6+/-2 degree and being set with glue between their bevels; glue has high transmissibility under ultraviolet condition and good refractivity in matching to refractivity of crystal material excellently.
Description
Technical field:
The present invention relates to a kind of polarizer, relate in particular to a kind of deep ultraviolet, visible, near infrared polarizer.
Background technology:
The suitable lowest wavelength of general icelandspar (Calcite) polarizer can only reach 350nm, though and at present common α-BBO polarizer can reach 200nm, wavelength coverage that can't covering wide can only be segmented into 200-270nm, 300-700nm,＞700nm.Because semicon industry, accuracy requirement to coat thickness detection is more and more higher, this ellipsometer that just requires to test this little thickness can cover from deep ultraviolet near infrared detectability, and will realize this function, and main restriction is exactly the critical component of ellipsometer---polarizer.
Existing Glan Thompson (Glan thomson) polarizer is only done material with icelandspar usually, because material itself, he can not be used for deep ultraviolet.Though can having well at deep ultraviolet, passes through α-BBO, but want to make Glan Thompson and must overcome three problems: 1. angle design wants reasonable and just right, 2. will have a kind of glue very high transmissivity to be arranged in ultraviolet, 3. the refractive index of glue wants that good coupling can be arranged with the refractive index of a-BBO material.Can solve this three problems but all have no talent so far.
Summary of the invention:
The invention solves the above-mentioned defective that prior art exists, provide a kind of and can cover the deep ultraviolet of 190-950nm wavelength light, visible, near infrared polarizer.
Technical scheme of the present invention is as follows: polarizer of the present invention comprises crystalline material and glue, it is characterized in that: described crystalline material is α-bbo crystal material; Described glue has the refractive index of very high transmissivity and glue good coupling to be arranged with the refractive index of α-bbo crystal material in ultraviolet; α-bbo crystal material made two shapes structure is identical, corner cut is the birefringent materials of 59.6 ± 2 degree, between the inclined-plane of two α-bbo crystal material, be provided with glue.
Polarizer of the present invention can cover the deep ultraviolet that wavelength is 190-950nm, visible and near infrared light, and this is that other polarizers can not be accomplished at present.And the present invention also has very high ultraviolet permeability, can reach greater than＞50%; High extinction ratio reaches 5 * 10^-6; Big acceptance angle, acceptance angle＞15 degree.The present invention fills the advantage that part is utilized the high ultraviolet permeability of α-BBO, when design two α-bbo crystal corner cut is 59.6 ± 2 when spending, can be implemented in the 190nm-950nm scope and make o light (normal light, big refractive index) incident angle at the gummed interface produces reflection greater than being all-trans the angle, made e light (non-ordinary light simultaneously, little refractive index) incident angle at the gummed interface can see through glue-line less than being all-trans the angle, and the light that comes out from exit facet is polarized light like this.
Description of drawings:
Fig. 1 is that α of the present invention-bbo crystal material shape is trapezoidal structural representation.
Fig. 2 is that α of the present invention-bbo crystal material shape is leg-of-mutton structural representation.
Label declaration: 1 crystalline material, 2 glue, α corner cut.
Embodiment:
As shown in Figure 1, 2: polarizer of the present invention comprises crystalline material 1 and glue 2, it is characterized in that: described crystalline material 1 is α-bbo crystal material; The refractive index of described glue 2 is 1.39-1.43, and the refractive index of glue 2 can have good coupling with the refractive index of α-bbo crystal material; With α-bbo crystal material 1 make two measure-alike, the trapezoidal or triangular structure at the band right angle that optical axis direction is identical, the corner cut α that angle trapezoidal or hypotenuse and base is α-bbo crystal material, corner cut α be 59.6 ± 2 the degree.
Process: two crystal forming polarizer are identical (measure-alike, optical axis direction is identical) triangles.In process, we select earlier the optical axis direction of top-quality portion according to design from α-BBO blank, and size cuts out a square, and then is cut into two triangles along the diagonal angle.Two are stitched together, and processing polishing inclined-plane and minor face right angle face together are to guarantee two angles that complete phase is arranged; Carry out gluing after polished, two crystal are glued together along the inclined-plane, to note guaranteeing the depth of parallelism of both ends of the surface during gummed.Polish once more to both ends of the surface the gummed back, last plated film.
The main application of this product: be mainly used in ellipsometer, spectroanalysis instrument rises as laser wherein partially Parts.
Claims (3)
1, a kind of deep ultraviolet, visible, near infrared polarizer, it comprises crystalline material (1) and glue (2), it is characterized in that: described crystalline material (1) is α-bbo crystal material; Described glue (2) has the refractive index of very high transmissivity and glue (2) good coupling to be arranged with the refractive index of α-bbo crystal material (1) in ultraviolet; α-bbo crystal material (1) made two shapes structure is identical, corner cut α is the birefringent materials of 59.6 ± 2 degree, between the inclined-plane of two α-bbo crystal material (1), be provided with glue (2).
2, deep ultraviolet according to claim 1, visible, near infrared polarizer, it is characterized in that: the refractive index of described glue (2) is 1.39-1.43.
3, deep ultraviolet according to claim 1 and 2, visible, near infrared polarizer, it is characterized in that: with α-bbo crystal material (1) make two measure-alike, trapezoidal or the triangular structure at the band right angle that optical axis direction is identical, angle trapezoidal or a hypotenuse and a right-angle side are the corner cut α of α-bbo crystal material (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005100187536A CN100356209C (en) | 2005-05-20 | 2005-05-20 | Dark ultraviolet visible near infrared polarizer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005100187536A CN100356209C (en) | 2005-05-20 | 2005-05-20 | Dark ultraviolet visible near infrared polarizer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1713006A true CN1713006A (en) | 2005-12-28 |
| CN100356209C CN100356209C (en) | 2007-12-19 |
Family
ID=35718695
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2005100187536A Active CN100356209C (en) | 2005-05-20 | 2005-05-20 | Dark ultraviolet visible near infrared polarizer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN100356209C (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102073143A (en) * | 2010-12-10 | 2011-05-25 | 福州高意光学有限公司 | Crystal polarizing, combining and splitting device |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2727935B2 (en) * | 1993-11-15 | 1998-03-18 | 日本電気株式会社 | External harmonic generation laser oscillator |
| US5594592A (en) * | 1994-03-30 | 1997-01-14 | Harlamoff; Brian L. | Narrow linewidth BBO optical parametric oscillator utilizing extraordinary resonance |
| EP1226637B1 (en) * | 1999-09-15 | 2006-12-27 | Yeda Research And Development Co. Ltd. | Optical resonators with orthogonally polarized modes |
-
2005
- 2005-05-20 CN CNB2005100187536A patent/CN100356209C/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102073143A (en) * | 2010-12-10 | 2011-05-25 | 福州高意光学有限公司 | Crystal polarizing, combining and splitting device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN100356209C (en) | 2007-12-19 |
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| Date | Code | Title | Description |
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| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C56 | Change in the name or address of the patentee |
Owner name: FUJIAN FOCTEK PHOTONICS, INC. Free format text: FORMER NAME: FUTEKE PHOTOELECTRIC CO., LTD., FUZHOU |
|
| CP03 | Change of name, title or address |
Address after: 350100 Minhou City, Fuzhou province Tieling Industrial Zone, No. two, No. 7 Road, No. 8, No. Patentee after: Foctek Photonics, Inc. Address before: 350012 Fujian Province, Fuzhou City Industrial Zone, Jinshan Road Garden 32 Patentee before: Futeke Photoelectric Co., Ltd., Fuzhou |