CN1702452B - Digital micromirror multi-target imaging spectrometer device - Google Patents
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Abstract
The digital micromirror multi-target imaging spectrometer device consists of an imaging subsystem, a dimension compression subsystem, a spectrum dispersion and acquisition subsystem and a digital micromirror circuit feedback subsystem, wherein the imaging subsystem consists of a front telescope, a digital micromirror, a collimating lens and a focusing lens, the dimension compression subsystem consists of a cylindrical micro lens array and a cylindrical lens, and the digital micromirror circuit feedback subsystem consists of a spectroscope, a focal plane detector, a data acquisition card, a digital image processor, a computer and a digital micromirror driver. The invention can realize the quick selection of a plurality of point targets in a large field of view without scanning due to the high resolution, high optical efficiency, digitally controlled semiconductor switch characteristic and circuit feedback function of the digital micromirror, simultaneously eliminate the influence of background light and improve the signal to noise ratio of the system, and the optical lens group with compressed dimension is composed of a cylindrical micro lens array, a cylindrical lens and a lens group, thereby having simple structure and low manufacturing cost. The invention can be applied to the measurement of multi-target spectrum/radiation spectrum of each wave band of visible light, near infrared, medium wave infrared and long wave infrared.
Description
Affiliated technical field
What the present invention relates to is a kind of multi-target imaging spectrometer device, belongs to the imaging spectral technology field.
Background technology
Traditional spectrometer must scan certain one dimension (X, Y or λ) could obtain complete data cube.Optical filter type imaging spectrometer adopts camera to add the scheme of optical filter, need scan in the λ dimension; The color dispersion-type imaging spectrometer projects on the row picture dot of detector by the curve of spectrum of dispersion element with scenery target every bit, obtains the spectrum picture of view picture scenery target, i.e. data cube by the mode of spacescan; Inteference imaging spectrometer is by the some interference curve of all sampled points on the interferogram extracting objects of scenery target, an interference curve is carried out the curve of spectrum that contrary Fourier conversion just can obtain this point, also need to scan the acquisition data cube by the optical path difference that changes two arms.Chromatography (CT) is a new technology by low-dimensional data for projection reconstruct higher-dimension target.With the chromatic dispersion of introducing previously with the interference type imaging spectrometer is different is, the CT imaging spectrometer reconstructs the scene data cube by these projected images then by surveying the projected image of scene data cube different directions.The typical ct findings restructing algorithm just is being based on the center strip theory (Central Slice Theorem) that the relation by Radon conversion and Fourier conversion draws, and only scans and could obtain complete imaging spectral.The high s/n ratio of motion multi-target measurement can only obtain by non-scan mode, and does not find the report of a plurality of point target imaging spectral measurement systems under the non-scan mode now as yet.
Summary of the invention
The technical issues that need to address of the present invention are: overcome the deficiencies in the prior art, provide a kind of under non-scanning situation the digital micro-mirror multi-target imaging spectrometer device to a plurality of point target radiation spectrum measurements.
Technical solution of the present invention is: digital micro-mirror multi-target imaging spectrometer device, its characteristics are: it is made up of imaging, dimension compression, spectral dispersion and collection, digital micro-mirror circuit feedback subsystem, wherein imaging subsystems is made up of preposition telescope, digital micro-mirror, collimation lens and condenser lens, the dimension compression subsystem is made up of cylindrical microlenses array and cylindrical lens, as Fig. 1, a plurality of point target radiation enter beam split after the system by telescope, one the tunnel enters the digital micro-mirror feedback system, and one the tunnel enters imaging spectrum system.Picture signal is converted into digital signal is adjusted each micro mirror by digital micro-mirror feedback microcircuit state (rotating ± 10 °), make digital micro-mirror that bias light is reflected light path, and the target emanation reflection is entered system light path, process cylindrical microlenses array and cylindrical lens and condenser lens are with a plurality of point targets of a plurality of point target boil down to one dimensions distributions of Two dimensional Distribution, through collected the spectrum of a plurality of targets after the spectrometer chromatic dispersion by planar array detector and capture card then.
Described digital micro-mirror circuit feedback subsystem is made up of spectroscope, planar detector, data collecting card, Digital Image Processor, computing machine and digital micro-mirror driver, by telescopic system tracking lock target, target emanation is through the spectroscope beam split, one the tunnel is imaged onto on the focus planardetector, be converted to digital signal by capture card, Digital Image Processor, identify impact point by mode identificating software, and drive the control figure micro mirror by digital micro-mirror by corresponding digital signal, make bias light reflect light path, the target emanation reflection enters system light path.
Described spectral dispersion and acquisition system are by the slit spectrometer, condenser lens, focal plane detection array (FPA)/CCD forms, target emanation enters collimation lens by mirror reflects, by lens imaging to cylindrical microlenses array front focal plane, the cylindrical microlenses array, cylindrical lens, lens are that one dimension distributes through the spectrometer entrance slit with the targeted compression of Two dimensional Distribution, collimation lens incides on the blazed grating, to focus planardetector, the picture signal that focus planardetector collects is carried out further analyzing and processing by capture card input computing machine to dispersion spectrum by lens imaging.
The present invention compared with prior art has the following advantages:
1, because high resolving power, high optical efficiency, the numerically controlled semiconductor switch characteristic of digital micro-mirror, with and the circuit feedback function, can need not to scan the quick selection that promptly realizes a plurality of point targets in the big visual field, eliminate the influence of bias light simultaneously, improve system signal noise ratio.
2, the optical frames group that is used for dimension compression is by a slice cylindrical microlenses array, a slice cylindrical lens, and some standard lens are formed simple in structure, low cost of manufacture.
3, system can improve to be applicable to visible light, the infrared band of 0.4～2.5 μ m, 3～5 μ m and 8.0～14.0 μ m.
Description of drawings
Fig. 1 is optics of the present invention and mechanical general structure synoptic diagram;
Fig. 2 is the structural representation of the digital micro-mirror among the present invention, and wherein Fig. 2 a is its microstructure schematic perspective view, and Fig. 2 b is its principle of work synoptic diagram;
Fig. 3 is the cylindrical microlenses array structure synoptic diagram among the present invention, and wherein Fig. 3 a is its perspective view, and Fig. 3 b is its side view, and Fig. 3 c is its front view;
Fig. 4 is the cylindrical lens structure synoptic diagram among the present invention, and wherein Fig. 4 a is its perspective view, and Fig. 4 b is its side view, and Fig. 4 c is its front view.
Embodiment
As shown in Figure 1, the present invention includes imaging subsystems, dimension compression subsystem, spectral dispersion and acquisition subsystem and digital micro-mirror circuit feedback subsystem.Front end is an imaging subsystems, and it is made up of telescope 3, digital micro-mirror 4, structure reflecting mirror 19 and collimation condenser lens 17,18; The dimension compression subsystem is made up of cylindrical microlenses array 16, cylindrical lens 15 and lens 14; Spectral dispersion and acquisition system are calculated by entrance slit 13, spectrometer incident mirror 12, blazed grating 11, spectrometer outgoing mirror 10, focal plane detection array 9, data collecting card 8 and main frame and 7 are formed; Digital micro-mirror circuit feedback subsystem drives 6 by spectroscope 20, planar detector 2, data collecting card 3, Digital Image Processor 5, computing machine 7 and digital micro-mirror and forms.As Fig. 1, by a plurality of point targets of telescopic system 1 tracking lock, target emanation is through spectroscope 20 beam split one route focus planardetector, 2 collections and by capture card 3, Digital Image Processor 5 is converted to digital signal, identify impact point by mode identificating software, and drive 6 by corresponding digital signal by digital micro-mirror and come control figure micro mirror 4, make bias light reflect light path, target emanation enters collimation lens 18 by catoptron 19 reflections, by lens 17 imagings to cylindrical microlenses array front focal plane, cylindrical microlenses array 16, cylindrical lens 15, lens 14 are that one dimension distributes through spectrometer entrance slit 13 with the targeted compression of Two dimensional Distribution, collimation lens 12 incides on the blazed grating 11, to the focus planardetector target surface, the picture signal that focus planardetector 9 collects is carried out further analyzing and processing by capture card 8 input computing machines 7 to dispersion spectrum by lens 10 imagings.
As shown in Figure 2, digital micro-mirror can simply be described as being a semiconductor optical switch.Thousands of small square 17 * 17um eyeglasses are built upon on the hinge arrangement of static random access memory top and form digital micro-mirror.Each eyeglass can a pixel of break-make light.Hinge arrangement allows eyeglass to tilt between two states, and+10 degree are " opening ", and-10 degree are for " pass ", and when eyeglass was not worked, they were in 0 degree " berthing " state.In case video or figure signal are under a kind of digital format, just be admitted to the digital micro-mirror feedback system, by the storage unit under each eyeglass is carried out electronic addressing with the scale-of-two planed signal, each eyeglass on the digital micro-mirror array by with the electrostatic means inclination for opening or closing attitude.Each pixel of information by on the eyeglass that directly is mapped in it, provides exact figure control according to 1: 1 ratio, if signal is 640 * 480 pixels, 640 * 480 eyeglasses of device central authorities are taked action.Other eyeglass of this location will simply be placed in the position of " pass ".Among Fig. 2, incident light is mapped on three eyeglass pixels, and the eyeglass of two outsides is set to out, and the eyeglass of these two " opening " states produces square white pixel figure.Central authorities' eyeglass tilts to the position of " pass ", and this eyeglass departs from out the incident light reflection projection lens and injects light absorber, so that does not have light to reflect up on that special pixel, forms square, a black picture element image.
As shown in Figure 3, the cylindrical microlenses array does not produce the microlens array of diffraction effect, and its microstructure is made up of a series of cylindrical lenses, and satisfies its front focal plane and overlap with the back focal plane of imaging subsystems.
As shown in Figure 4, cylindrical lens is lens, and its bus is parallel with cylindrical microlenses array bus, and satisfies its front focal plane and overlap with cylindrical microlenses array front focal plane.
Claims (4)
1. digital micro-mirror multi-target imaging spectrometer device, it is characterized in that: it is by imaging, the dimension compression, spectral dispersion and collection and digital micro-mirror circuit feedback subsystem are formed, wherein imaging subsystems is by digital micro-mirror, collimation lens and condenser lens are formed, the dimension compression subsystem is made up of cylindrical microlenses array and cylindrical lens, described cylindrical microlenses array is not for producing the microlens array of diffraction effect, the microstructure of cylindrical microlenses array is made up of a series of cylindrical lenses, and the front focal plane that satisfies the cylindrical microlenses array overlaps with the back focal plane of imaging subsystems, and the bus of cylindrical lens is parallel with cylindrical microlenses array bus; A plurality of point target radiation enter the back beam split by telescopic system, one the tunnel enters digital micro-mirror circuit feedback subsystem, one the tunnel enters imaging subsystems, picture signal is converted into digital signal is adjusted each digital micro-mirror by digital micro-mirror circuit feedback subsystem state, make digital micro-mirror that bias light is reflected light path, and the target emanation reflection is entered system light path, process cylindrical microlenses array and cylindrical lens and condenser lens are with a plurality of point targets of a plurality of point target boil down to one dimensions distributions of Two dimensional Distribution, through collected the spectrum of a plurality of targets after the spectrometer chromatic dispersion by planar array detector and capture card then.
2. digital micro-mirror multi-target imaging spectrometer device according to claim 1 is characterized in that: described digital micro-mirror circuit feedback subsystem is made up of spectroscope, focus planardetector, data collecting card, Digital Image Processor, computing machine and digital micro-mirror driver.
3. digital micro-mirror multi-target imaging spectrometer device according to claim 1, it is characterized in that: by telescopic system tracking lock target, target emanation is through the spectroscope beam split, one the tunnel is imaged onto on the focus planardetector, be converted to digital signal by capture card, Digital Image Processor, identify impact point by mode identificating software, and drive the control figure micro mirror by digital micro-mirror by corresponding digital signal, make bias light reflect light path, target emanation enters collimation lens by mirror reflects, by lens imaging to cylindrical microlenses array front focal plane.
4. digital micro-mirror multi-target imaging spectrometer device according to claim 1 is characterized in that: microlens array and cylindrical lens and other combination of lensess change into one dimension with the point target of Two dimensional Distribution and distribute.
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| CN 200410009118 CN1702452B (en) | 2004-05-24 | 2004-05-24 | Digital micromirror multi-target imaging spectrometer device |
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| CN 200410009118 CN1702452B (en) | 2004-05-24 | 2004-05-24 | Digital micromirror multi-target imaging spectrometer device |
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| JP2020073894A (en) * | 2019-12-25 | 2020-05-14 | 京セラ株式会社 | Electromagnetic wave detection device and information acquisition system |
| CN111811649A (en) * | 2020-06-29 | 2020-10-23 | 中国科学院空天信息创新研究院 | Spectral imaging system based on DMD and spectral imaging method based on DMD |
| CN112816068B (en) * | 2020-12-29 | 2023-12-26 | 华中光电技术研究所（中国船舶重工集团公司第七一七研究所） | Infrared spectrum imaging system and spectrum image reconstruction method thereof |
| CN118392304B (en) * | 2024-07-01 | 2024-09-10 | 南京思波科光电科技有限公司 | Spectrum measuring device and method and spectrometer |
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