CN1702190A - Rotation device for vacuum vertical planet clamp - Google Patents
Rotation device for vacuum vertical planet clamp Download PDFInfo
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- CN1702190A CN1702190A CN 200410009114 CN200410009114A CN1702190A CN 1702190 A CN1702190 A CN 1702190A CN 200410009114 CN200410009114 CN 200410009114 CN 200410009114 A CN200410009114 A CN 200410009114A CN 1702190 A CN1702190 A CN 1702190A
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- vacuum
- magnetic fluid
- bearing
- planetary
- main shaft
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- Sealing Using Fluids, Sealing Without Contact, And Removal Of Oil (AREA)
Abstract
A vacuum vertical planetary holder rotating device, which can improve uniformity of thickness of vacuum coating, works by that directly by hydromagnetic transmission, generator drives planetary holder rotate along vertical plane. Designing Support and location bearing in the double-layer water-cooled container, it prevents vacuum grease in the bearing from volatilizing and charring because of excess temperature, avoids the pollution to vacuum coating, ensures the normal usage of bearing, and improves the vacuum degree and the operation stability. The invented can apply extensively in vacuum coating and the related industry, especially to vertical rotational structure.
Description
Technical field
The present invention relates to the device that a kind of vacuum plating door body vertical-type planetary anchor clamps rotate, be particularly useful for ion beam sputter depositing optical thin film system.
Background technology
At present, rotation bell-jar in the homemade vacuum coating film equipment or planetary anchor clamps rotation system are to adopt vacuum chamber top, horizontal mounting means, and motor is by the transmission shaft of rubber ring V formula vacuum dynamic seal, and the chucking appliance system that drives in the vacuum chamber rotates.But for ion beam sputtering deposition equipment, the planetary fixture rotation system can only vertically be installed on the door body of vacuum chamber, and this has just caused the non-equilibrium rotation of planetary fixture, and this need install load-bearing, locating bearing in vacuum chamber.Because the working temperature in the vacuum chamber is at 80-100 ℃, the vacuum grease on load-bearing, the locating bearing will charing in the relatively shorter time under the situation of rotating.The planetary fixture that rotating load is heavier, under the situation that does not have the lubricated non-equilibrium rotation of vacuum grease, the life-span of bearing is very short, has generally just damaged with interior at 50 hours.Simultaneously, the vacuum grease of charing has caused pollution to a certain degree to vacuum.Therefore, traditional structure, have vacuum tightness not high, exist to pollute and shortcomings such as the life-span is short.
Summary of the invention
Technology of the present invention is dealt with problems and is: overcome the deficiencies in the prior art, a kind of brand-new vacuum vertical-type planetary anchor clamps wheelwork is provided, not only improve vacuum tightness, overcome the pollution of vacuum grease, and, the more important thing is that having guaranteed that planet rotates can steady in a long-term move; Simultaneously, eliminated the uncertain potential safety hazard that traditional structure has.
Technical solution of the present invention is: vacuum vertical-type planetary anchor clamps wheelwork, comprise motor, vacuum chamber, planetary fixture system, it is characterized in that: also comprise the magnetic fluid that is installed on the Vacuum door body, motor directly drives the planetary fixture system by magnetic fluid and rotates.
Described magnetic fluid mainly comprises: sealing main shaft, load-bearing and locating bearing, magnetic current liquid, magnetic fluid housing, collet, flux sleeve, sealing main shaft outer cover one collet, flux sleeve is positioned at the outside of collet, the magnetic current liquid level is between flux sleeve and magnetic fluid housing, the two ends of magnetic fluid housing are supported by load-bearing and locating bearing, one end of sealing main shaft links to each other another termination planetary fixture system with motor.
The present invention's advantage compared with prior art is: magnetic fluid is installed on the Vacuum door body, by introducing Magneticfluid Seal Technique, locating bearing is encapsulated in the magnetic fluid, the water-cooled housing of magnetic fluid prevents the charing of the vacuum grease on the bearing of vacuum one side, and this has improved the work-ing life of bearing greatly.Buncher is given planetary fixture by the seal shaft transmission that is installed in the magnetic fluid on the door for vacuum chamber body, drives its little follower gear around the initiatively master wheel rotation of fixed that is installed on the bracing frame.Traditional rubber zero type circle vacuum dynamic seal is in the magnetic current liquid sealing in the magnetic field in the magnetic fluid, this sealing means has improved vacuum tightness greatly, is particularly suitable for the situation of the dynamic seal that vacuum has relatively high expectations.
Description of drawings
Fig. 1 is a structural representation of the present invention, wherein: chopper blade 1, buncher 2, optoelectronic switch 3, atmosphere 4, vacuum chamber 5, magnetic fluid 6, planetary fixture 7, fixing master wheel 8 initiatively, driven pinion(gear) 9.
Fig. 2 is the magnetic fluid structural representation among the present invention, wherein: sealing main shaft 10, load-bearing and locating bearing 11, magnetic current liquid 12, water-cooled housing 13, water supply connector 14, spiral cover 15, water out adapter 16, collet 17, flux sleeve 18, flange 19.
Embodiment
As shown in Figure 1 and Figure 2, the present invention is by buncher 2, vacuum chamber 5, magnetic fluid 6, planetary fixture 7, initiatively fixedly master wheel 8, driven pinion(gear) 9 are formed, magnetic fluid 6 outer being installed on the door for vacuum chamber body, buncher 2 links to each other with the main shaft of magnetic fluid 6, the planetary fixture 7 that drive links to each other with sealing main shaft 10 rotates, driven pinion(gear) 9 on the planetary fixture 7 keeps rotation in the time of active master wheel 8 revolution that is fixed on the supporting rack, must keep each several part that reasonable right alignment is arranged, prevent to rotate stuck.By optoelectronic switch 3 be installed in the rotary state that chopper blade 1 on the sealing main shaft 10 can be monitored planetary fixture 7.
Claims (3)
1, vacuum vertical-type planetary anchor clamps wheelwork comprises motor, vacuum chamber, planetary fixture system, it is characterized in that: also comprise the magnetic fluid that is installed on the Vacuum door body, motor directly drives the planetary fixture system by magnetic fluid and rotates.
2, vacuum vertical-type planetary anchor clamps wheelwork according to claim 1, it is characterized in that: described magnetic fluid mainly comprises: sealing main shaft, load-bearing and locating bearing, magnetic current liquid, magnetic fluid housing, collet, flux sleeve, sealing main shaft outer cover one collet, flux sleeve is positioned at the outside of collet, the magnetic current liquid level is between flux sleeve and magnetic fluid housing, the two ends of magnetic fluid housing are supported by load-bearing and locating bearing, one end of sealing main shaft links to each other another termination planetary fixture system with motor.
3, vacuum vertical-type planetary anchor clamps wheelwork according to claim 2, it is characterized in that: described magnetic fluid housing is double-deck water-cooling structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200410009114 CN1702190A (en) | 2004-05-24 | 2004-05-24 | Rotation device for vacuum vertical planet clamp |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200410009114 CN1702190A (en) | 2004-05-24 | 2004-05-24 | Rotation device for vacuum vertical planet clamp |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1702190A true CN1702190A (en) | 2005-11-30 |
Family
ID=35632150
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200410009114 Pending CN1702190A (en) | 2004-05-24 | 2004-05-24 | Rotation device for vacuum vertical planet clamp |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1702190A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102732844A (en) * | 2012-07-12 | 2012-10-17 | 中国科学院光电技术研究所 | Method for designing coating uniformity correction mask for spherical optical elements on planetary rotating jigs of vacuum coating machines |
| CN102953041A (en) * | 2012-10-24 | 2013-03-06 | 中国科学院光电技术研究所 | Baffle plate design method for controlling membrane thickness distribution of spherical optical element in coating machine planet system |
| CN104532204A (en) * | 2015-01-13 | 2015-04-22 | 中国科学院光电技术研究所 | Vertically-placed coating clamp |
| CN110906039A (en) * | 2019-11-14 | 2020-03-24 | 上海交通大学 | Adjustable low-temperature throttle valve device for vacuum cooling box |
| CN117385326A (en) * | 2023-12-11 | 2024-01-12 | 成都晨发泰达航空科技股份有限公司 | Rotating device for EB-PVD thermal barrier coating and blade coating method |
-
2004
- 2004-05-24 CN CN 200410009114 patent/CN1702190A/en active Pending
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102732844A (en) * | 2012-07-12 | 2012-10-17 | 中国科学院光电技术研究所 | Method for designing coating uniformity correction mask for spherical optical elements on planetary rotating jigs of vacuum coating machines |
| CN102732844B (en) * | 2012-07-12 | 2014-05-07 | 中国科学院光电技术研究所 | Method for designing coating uniformity correction mask for spherical optical elements on planetary rotating jigs of vacuum coating machines |
| CN102953041A (en) * | 2012-10-24 | 2013-03-06 | 中国科学院光电技术研究所 | Baffle plate design method for controlling membrane thickness distribution of spherical optical element in coating machine planet system |
| CN102953041B (en) * | 2012-10-24 | 2014-07-02 | 中国科学院光电技术研究所 | Baffle plate design method for controlling membrane thickness distribution of spherical optical element in coating machine planet system |
| CN104532204A (en) * | 2015-01-13 | 2015-04-22 | 中国科学院光电技术研究所 | Vertically-placed coating clamp |
| CN110906039A (en) * | 2019-11-14 | 2020-03-24 | 上海交通大学 | Adjustable low-temperature throttle valve device for vacuum cooling box |
| CN110906039B (en) * | 2019-11-14 | 2022-03-29 | 上海交通大学 | Adjustable low-temperature throttle valve device for vacuum cooling box |
| CN117385326A (en) * | 2023-12-11 | 2024-01-12 | 成都晨发泰达航空科技股份有限公司 | Rotating device for EB-PVD thermal barrier coating and blade coating method |
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Legal Events
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| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |