CN1696746A - Method and device for repairing defect of color filter - Google Patents
Method and device for repairing defect of color filter Download PDFInfo
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- CN1696746A CN1696746A CN 200410038005 CN200410038005A CN1696746A CN 1696746 A CN1696746 A CN 1696746A CN 200410038005 CN200410038005 CN 200410038005 CN 200410038005 A CN200410038005 A CN 200410038005A CN 1696746 A CN1696746 A CN 1696746A
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- defective
- colored filter
- repairing
- substrate
- protrusion defect
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Abstract
A method for repairing defect of colour filter includes providing a colour filter including a baseplate having light transmission layer with ledge defect, heating a heatconductive substance and using it to contact on ledge defect for removing ledge defect and forming concave defect by heating and burning decomposition, utilizing ink jet method to jet photoresist in concave defect, curing for finishing repair.
Description
Technical field
The present invention is relevant for a kind of method of repairing the defective of colored filter, is particularly to a kind ofly utilize heat to burn solution or ink-jet method or both to arrange in pairs or groups and use method and device thereof with the defective of repairing colored filter.
Background technology
Colored filter (CF; Color filter) is LCD (LCD; Liquid crystaldisplay) pith in.In the manufacturing process of colored filter,, and produce bigger particle projection because the instability of photoresist may have photoresistance gel (gel) phenomenon.Moreover the foreign matter in the environment also may make photoresistance produce bigger particle projection.These are called black defective (black defect) because of the protrusion defect that photoresist or foreign matter cause.Moreover if before the photoresistance coating foreign matter is just arranged, after exposure, developing, the photoresistance part that need stay might be removed along with peeling off of foreign matter, thereby produces white space.Perhaps, the adhesion of photoresistance itself and glass substrate is not good, may produce white space yet.The white space that is produced in colored filter is called white defective (white defect) like this.It is many that white defective also might be that the neighbour near color images of its colour element thickness usually must approach, thereby cause color light partially or partially in vain.
Usually, the repairing method of black defective can use polishing, perhaps in the mode of laser (laser) protrusion defect of colored filter top is got rid of.But when being to use the laser mode to remove, also can producing splash and pollute.
Moreover the repairing method of existing defective has dry film method (dry-film method) and drop method (drop method).But when being to use the dry film method to repair, be subject to the material of dry film, uncontrollable thickness and colourity.Similarly, when using drop method to repair, be subject to the surface tension characteristics of patching material, also uncontrollable thickness and colourity.
Summary of the invention
In view of this, purpose of the present invention provides a kind of method of repairing the defective of colored filter for addressing the above problem, and can reduce because of scrapping that defective causes, and promotes colored filter and produces yield, promote production capacity, and reduce running expense (running cost).Moreover, repair by ink-jet method, more the colourity of may command repairing rear region and thickness are to maintain in the specification.
For reaching purpose of the present invention, according to first feature of the present invention, the method that the present invention repairs the defective of colored filter may further comprise the steps.One colored filter is provided, and it comprises a substrate, and the printing opacity color layer that is formed at the substrate top.Has a protrusion defect in this printing opacity color layer.Then, a conduction material being heated to and protrusion defect can being burnt the temperature separate, for example is 200 ℃ to 400 ℃, with the conduction material contact protrusion defective after the heating, separates and separates, removes with the printing opacity color layer so that protrusion defect is burnt through heat.
This protrusion defect is burnt through heat and can be removed fully after separating and form a recessed defective.When recessed defective is positioned on the colour element, and colour element be by a chromatic photoresist through sclerosis and the time, the present invention can more use ink-jet method, and a chromatic photoresist is sprayed in the recessed defective.
According to second feature of the present invention, the method that the present invention repairs the defective of colored filter may further comprise the steps.One colored filter is provided, and it comprises a substrate, and the printing opacity color layer that is formed at the substrate top.This printing opacity color layer comprises a colour element, and this colour element is to be got through sclerosis by a chromatic photoresist, and has a recessed defective.Then, use ink-jet method, chromatic photoresist is sprayed in the recessed defective.
According to the 3rd feature of the present invention, the method that the present invention repairs the defective of colored filter may further comprise the steps.One colored filter is provided, and it comprises a substrate, is formed at the printing opacity color layer on the substrate, and is formed at the light shielding part on the substrate, has a protrusion defect in the light shielding part.Then, a conduction material being heated to and protrusion defect can being burnt the temperature separate, for example is 200 ℃ to 400 ℃, with the conduction material contact protrusion defective after the heating so that protrusion defect through heat burn separate and with shading light part from, remove.
According to the 4th feature of the present invention, the method that the present invention repairs the defective of colored filter may further comprise the steps.One colored filter is provided, and it comprises a substrate, is formed at the printing opacity color layer on the substrate, and forms the light shielding part on the substrate.Light shielding part is to be got through sclerosis by a black resin, and has a recessed defective.Then, use ink-jet method, black resin is sprayed in the recessed defective.
According to the 5th feature of the present invention, the present invention is repaired the X-Y platform (X-Y stage) of the good laser interferometer of the method for defective of colored filter and precision or detect the collocation of defective board and use, in other words, it is incorporated in a machine or the device, detects, heat burns and to separate or action such as ink-jet repairing.
Description of drawings
Fig. 1 a to Fig. 1 d shows the section diagrammatic sketch of repairing the defective of colored filter according to the present invention's one specific embodiment.
Symbol description:
10～substrate,
20～filter layer,
R～red pixel,
R '～red pixel,
G～green pixel,
B～blue pixel,
BM～black matrix",
30～conduction material,
40～ink discharge device,
52～protrusion defect,
54～recessed defective,
56～red photoresistance.
Embodiment
Fig. 1 a to Fig. 1 d shows the section diagrammatic sketch of repairing the defective of colored filter according to the present invention's one specific embodiment.At first, see also Fig. 1 a, a colored filter is provided, it comprises a substrate 10, and the filter layer 20 that is formed at substrate 10 tops.Filter layer 20 comprises a printing opacity color layer, and for example, this printing opacity color layer can comprise the colour element of three kinds of different colours: red pixel R, green pixel G and blue pixel B.And filter layer 20 also comprises a light shielding part, for example, and black matrix" BM (blackmatrix).
As shown in Figure 1a, a protrusion defect 52 is arranged in red pixel R.This protrusion defect 52 might be owing to be used for forming the photoresist instability of red pixel R, and causes photoresistance gel (gel) phenomenon, or the foreign matter in the environment is caused, is also referred to as black defective.The position that protrusion defect 52 is produced does not have certain limitation, may be in other pixel of printing opacity color layer, for example, may be in green pixel G or blue pixel B.Perhaps, protrusion defect 52 also may be arranged in black matrix" BM.For convenience of description, below only to be arranged in red pixel R with protrusion defect 52 be example, but the present invention is not as limit.
The present invention is to utilize heat to burn (heating removal) mode of separating the projection of filter layer 20 tops is removed for the repairing method of black defective.For example, can use a conduction material 30, be heated to and can make protrusion defect 52 burn the temperature of separating, for example be between 200 ℃ to 400 ℃, makes the conduction material 30 contact protrusion defectives 52 after the heating again, separates and be removed so that protrusion defect 52 is burnt through heat.The setting of temperature can adjust according to the characteristic that desire is removed material.The material and the shape that are applicable to conduction material of the present invention do not have certain restriction, for example can be metal, particularly, can be the metal contact pilotage.
The rising height of the black defective in filter layer 20 tops hour, and is then less for the influence of colored filter character.Therefore, the above-mentioned heat of the present invention is burnt the mode of separating can not needed to remove protrusion defect 52 fully, and can optionally partly remove protrusion defect 52, makes it that less height be arranged.For example, protrusion defect 52 parts can be removed, feasible rising height with respect to the printing opacity color layer is less than 0.3 μ m, and at this moment, so little projection is very little for the influence of colored filter character, is within the acceptable range.
Similarly,, then also can optionally partly remove protrusion defect wherein, make it that less height be arranged if the protrusion defect work heat burning that is directed among the black matrix" BM is separated.For example, protrusion defect partly can be removed, feasible rising height with respect to black matrix" is less than 0.3 μ m.
Certainly, the above-mentioned heat burning of the present invention is separated mode and also can optionally protrusion defect 52 be removed fully, and forms a recessed defective 54, shown in Fig. 1 b.Formed recessed defective 54, generally also be called white defective, white defective may be the white space that does not have colour element fully, it is many also might to be that the neighbour near color images of its colour element thickness usually must approach, thus cause irregular colour or light partially, be necessary to remake further repairing partially in vain.
See also Fig. 1 c, the present invention is to use ink-jet method to repair for the white defective of filter layer 20.Because will make the pixel of repairing identical with the composition of script red pixel R, therefore, employed ink must elect according to different pixels during ink-jet spray cloth.Know clearly it, red pixel R is got through sclerosis by a red photoresistance, for example, red photoresistance is coated on the substrate 10, through overexposure, development, again through overbaking, and obtains red pixel R.Certainly, red pixel R also can spray mode for cloth by ink-jet and make, for example, with a red photoresistance with ink-jet method spray cloth on substrate in the corresponding reserved area, and then get through baking hardening.As mentioned above, when red pixel R be by a red photoresistance through sclerosis and the time, used ink also must be selected this red photoresistance for use when then repairing recessed defective 54 with ink-jet method.Shown in 1c figure, can utilize ink discharge device 40, this red photoresistance 56 is sprayed in the recessed defective 54.
Then, see also Fig. 1 d, carry out cure process, can be that part or full wafer substrate toast, look closely employed apparatus for baking, being hardened in the red photoresistance 56 in the recessed defective, and make itself and the red pixel surface that contacts then and can not come off or peel off, to obtain the red pixel R ' of a complete no recessed defective.Its baking condition can be the condition of toasting in the color filter producing process, for example is 220 ℃, one hour.
According to the present invention, repairing can also be opportunity in making the red pixel process, finishes after exposure, the development, enter before the baking hardening, repair recessed defective 54, certainly with ink-jet method, this moment, used ink must be selected this red photoresistance for use, and then toasted and finish cure process.
According to the present invention, the recessed defective 54 of above-mentioned Fig. 1 b (white defective) is not necessarily burnt to separate to remove protrusion defect 52 (deceiving defective) and is formed because carry out heat, it can also be the defective that colored filter itself promptly has, for example, may be photoresistance along with foreign matter is divested, or because of the adhesion of photoresistance and substrate is good etc. reason caused.
The present invention uses ink-jet method to burn the zone of separating after the removal for the white defective of filter layer 20 itself and heat and repairs, and can accurately control thickness, repair position and size.And ink-jet method is repaired very high accuracy, the colourity specification (color spec) of repairing area can be maintained in the required specification.Moreover as mentioned above, employed ink must elect according to different pixels during ink-jet spray cloth.Therefore, if white defective is to occur among the green pixel G, used green photoresistance is that ink carries out ink-jet spray cloth in the time of then must selecting formation green pixel G for use.Similarly, if white defective is to occur among the blue pixel B, used blue photoresistance is that ink carries out ink-jet spray cloth in the time of then must selecting formation blue pixel B for use.
In addition, white defective also might occur among the black matrix" BM.When black matrix" BM is to use black resin (black resin) to make, can use ink-jet method of the present invention to carry out the repairing of white defective among the BM.At this moment, must select for use identical black resin with the white defective in the ink-jet method repairing black matrix".
The present invention more can arrange in pairs or groups the good laser interferometer of precision X-Y platform (X-Y stage) or detect that the defective board carries out that heat burning is separated or action such as ink-jet repairing, substrate is fixed on the X-Y stage, X-Ystage can accurately move to substrate and detect the position that the defective board detects defective and determines to repair, the ink-jet repairing is carried out in selection or heat burning Xie Houzai carries out the ink-jet repairing, so share an X-Y platform or with detect the collocation of defective board and use, ink-jet is repaired higher accuracy is arranged, and save platform and the space of supporting substrate processing, improve the space service efficiency of colored filter factory building.
In sum, the present invention uses heat to burn the black defective that solution is repaired colored filter, the white defective of using ink-jet method to repair colored filter, can reduce because of scrapping that defective causes, promote colored filter and produce yield, promote production capacity, and reduce running expense (running cost).Moreover, repair by ink-jet method, more the colourity of may command repairing area and thickness are to maintain in the specification.
Though the present invention discloses as above with preferred embodiment; so it is not in order to limit scope of the present invention; anyly have the knack of this skill person; without departing from the spirit and scope of the present invention; when can doing a little change and retouching, so protection scope of the present invention is as the criterion when looking accompanying the claim person of defining.
Claims (10)
1. method of repairing the defective of colored filter, it comprises:
One colored filter is provided, and it comprises a substrate, and a printing opacity color layer that is formed at this substrate top, wherein has a protrusion defect in this printing opacity color layer; And
With conduction material heating, make the conduction material after this heating contact this protrusion defect, so that this protrusion defect is separated and is removed through the heat burning.
2. the method for the defective of repairing colored filter according to claim 1, wherein this printing opacity color layer comprises the colour element of three kinds of different colours, and this protrusion defect is arranged at least a colour element.
3. the method for the defective of repairing colored filter according to claim 1, wherein this conduction material is a metal.
4. the method for the defective of repairing colored filter according to claim 1, wherein this protrusion defect is burnt through heat and is removed fully after separating and form a recessed defective.
5. the method for the defective of repairing colored filter according to claim 4, wherein this recessed defective is positioned on the colour element, and wherein this colour element is to be got through sclerosis by a chromatic photoresist.
6. the method for the defective of repairing colored filter according to claim 5, it more comprises the use ink-jet method, and this chromatic photoresist is sprayed cloth in this recessed defective.
7. method of repairing the defective of colored filter, it comprises:
One colored filter is provided, and it comprises a substrate, and is formed at the printing opacity color layer on this substrate, and wherein this printing opacity color layer comprises a colour element at least, and this colour element is to be got through sclerosis by a chromatic photoresist, and has a recessed defective; And
Use ink-jet method, this chromatic photoresist is sprayed cloth in this recessed defective.
8. method of repairing the defective of colored filter, it comprises:
One colored filter is provided, and it comprises a substrate, is formed at a printing opacity color layer of this substrate top, and a light shielding part that is formed at this substrate top, wherein has a protrusion defect in this light shielding part; And
With conduction material heating, make the conduction material after this heating contact this protrusion defect, so that this protrusion defect is separated and is removed through the heat burning.
9. method of repairing the defective of colored filter, it comprises:
One colored filter is provided, and it comprises a substrate, is formed at a printing opacity color layer of this substrate top, and a light shielding part that forms this substrate top, and wherein this light shielding part is to be got through sclerosis by a black resin, and has a recessed defective; And
Use ink-jet method, this black resin is sprayed cloth in this recessed defective.
10. colored filter repair apparatus is characterized in that using the method according to the defective of the repairing colored filter of claim 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB200410038005XA CN100335920C (en) | 2004-05-12 | 2004-05-12 | Method and device for repairing defect of color filter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB200410038005XA CN100335920C (en) | 2004-05-12 | 2004-05-12 | Method and device for repairing defect of color filter |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1696746A true CN1696746A (en) | 2005-11-16 |
| CN100335920C CN100335920C (en) | 2007-09-05 |
Family
ID=35349545
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB200410038005XA Expired - Fee Related CN100335920C (en) | 2004-05-12 | 2004-05-12 | Method and device for repairing defect of color filter |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN100335920C (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101620324B (en) * | 2008-07-02 | 2012-03-21 | 乐金显示有限公司 | Method for repairing defect on substrate |
| CN101620373B (en) * | 2009-08-13 | 2012-08-22 | 深圳市路维电子有限公司 | Light shield repair method and light shield repair device of LED display screens |
| CN102854195A (en) * | 2012-09-21 | 2013-01-02 | 京东方科技集团股份有限公司 | Method for detecting defect coordinates on color filter |
| CN101995682B (en) * | 2009-08-22 | 2013-01-30 | 比亚迪股份有限公司 | CF detection plate and CF defect detection method |
| CN105172173A (en) * | 2015-08-07 | 2015-12-23 | 公安部第一研究所 | Method for repairing surface of certificate |
| CN109556831A (en) * | 2018-11-27 | 2019-04-02 | 惠科股份有限公司 | Method and device for detecting color filter and computer readable storage medium |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3034438B2 (en) * | 1994-03-31 | 2000-04-17 | キヤノン株式会社 | Color filter manufacturing equipment |
| CN1077477C (en) * | 1995-12-16 | 2002-01-09 | 太原钢铁集团公司 | Method for welding mending local defect of gold-tungsten bush |
| US6834158B1 (en) * | 2000-09-22 | 2004-12-21 | Advanced Micro Devices, Inc. | Pinhole defect repair by resist flow |
-
2004
- 2004-05-12 CN CNB200410038005XA patent/CN100335920C/en not_active Expired - Fee Related
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101620324B (en) * | 2008-07-02 | 2012-03-21 | 乐金显示有限公司 | Method for repairing defect on substrate |
| CN101620373B (en) * | 2009-08-13 | 2012-08-22 | 深圳市路维电子有限公司 | Light shield repair method and light shield repair device of LED display screens |
| CN101995682B (en) * | 2009-08-22 | 2013-01-30 | 比亚迪股份有限公司 | CF detection plate and CF defect detection method |
| CN102854195A (en) * | 2012-09-21 | 2013-01-02 | 京东方科技集团股份有限公司 | Method for detecting defect coordinates on color filter |
| CN102854195B (en) * | 2012-09-21 | 2014-08-20 | 京东方科技集团股份有限公司 | Method for detecting defect coordinates on color filter |
| CN105172173A (en) * | 2015-08-07 | 2015-12-23 | 公安部第一研究所 | Method for repairing surface of certificate |
| CN105172173B (en) * | 2015-08-07 | 2018-04-06 | 公安部第一研究所 | A kind of method for repairing document surface |
| CN109556831A (en) * | 2018-11-27 | 2019-04-02 | 惠科股份有限公司 | Method and device for detecting color filter and computer readable storage medium |
Also Published As
| Publication number | Publication date |
|---|---|
| CN100335920C (en) | 2007-09-05 |
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Granted publication date: 20070905 Termination date: 20130512 |