CN1693845A - Alignment method based on interference fringe - Google Patents
Alignment method based on interference fringe Download PDFInfo
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- CN1693845A CN1693845A CN 200510013509 CN200510013509A CN1693845A CN 1693845 A CN1693845 A CN 1693845A CN 200510013509 CN200510013509 CN 200510013509 CN 200510013509 A CN200510013509 A CN 200510013509A CN 1693845 A CN1693845 A CN 1693845A
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- interference fringe
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Abstract
The invention discloses a collimation method based on interference fringe. The laser beam after collimated is separated into two coherent beams while passing through wedge shape plat board and courses several interference fringes that have the same thickness paralleling to edge of the wedge. The adjusting fringe emitting device make the interference fringe plumb to the light shaft and parallel to the base of the emitting device. Diaphragm is used to select several fringes at the cross location of the two laser beams as light reference of collimation measuring. The interference fringe is picked up by CCD image sensor, and transforms the optical signal into electric signal, taking amplification and filtering process. The location that the interference fringe should be located would be calculated by MPU and the data would be displayed. Plural points would be gained in this process and calculating the linearity error of the tested object. The advantage are high pricision measuring, and improving simple structure.
Description
Technical field
The present invention relates to a kind of alignment method, belong to collimation technique based on interference fringe.
Background technology
By detecting principle, laser collimation technology is broadly divided into three types: the luminous intensity measurement type, and phase measurement type (as the double-frequency laser interference method etc.), the polarimetry type (as laser optically-active collimator etc.).
In producing and living, obtained using widely with the normal optical strong type laser collimator of laser beam as the collimation reference ray.But it is difficult to overcome influences such as temperature, air turbulence to the parasitic light sensitivity.The LASER Light Source drift is the major obstacle that improves the laser alignment precision with atmospheric disturbance.Though multiple design proposal occurred, as Fresnel zone plate method, zero order fringe interferometric method, Zero-order diffractive method of altering course with a concentric circle, asymmetric phase board method, single-mode fiber method etc.These methods have played good effect aspect the asymmetrically distributed influence of laser drift and light intensity overcoming, yet still can't effectively solve the influence of atmospheric disturbance.
Though it is relative less that phase type and polarization-type laser collimator are influenced by air turbulence etc., its structure more complicated, measuring distance is limited, and price is also more expensive.
Therefore, it is very necessary seeking novel alignment instrument a kind of not only simple in structure but also that can suppress influences such as air turbulence.
Summary of the invention
The objective of the invention is to explore a kind of new pattern laser collimation technique of utilizing interference fringe as the collimation reference ray.A kind of alignment method based on laser interferencefringes is provided, and this method has influence, the high characteristics of collimation precision to measuring such as suppressing air turbulence.
The present invention is a kind of alignment method based on interference fringe, it is characterized in that:
The laser beam of being launched by laser instrument is through shining behind the collimator and extender on the wedge shape optical flat, reflex by two surfaces about the wedge shape optical flat, laser is decomposed into two bundle coherent light beams, in the scope that two bundle collimated laser beams intersect, just produces some the equal thick interference fringes that are parallel to the wedge rib.Adjust the striped emitter, make interference fringe vertical with optical axis and parallel with the striped launcher base; Utilize diaphragm to select some stripe of two bundle laser intersection centers, launch light benchmark as alignment measurement.
Receiving target places on the measurand, interference fringe is received by the photoelectrical position sensor on the receiving target (as ccd image sensor), light signal is converted to electric signal, and under the effect of driving circuit, the electric signal that will have positional information send microprocessor behind signal condition.
Microprocessor carries out calculation process to signal, obtains the positional information with respect to the measurand of interference fringe, and this information is shown in the numerical value mode.
As being that photoelectric sensor is when measuring linearity with CCD, receiving target moves on measurand, record receiving target and be in pixel position on the CCD image sensing surface, just can utilize young waiter in a wineshop or an inn's square law or end points line method to calculate the straightness error of this measurand in different measuring point place interference fringe.
Advantage of the present invention: inoperative to striped with the equidirectional flow perturbation of interference fringe, the flow perturbation influence more than 50% is suppressed, and can effectively improve the alignment measurement precision; The collimator that uses is simple in structure, easy to operate; The result who measures can with other compunication, realize that the robotization of data is handled.
Description of drawings
Fig. 1 realizes apparatus system block diagram of the present invention.
Among the figure: 1-laser instrument, 2-collimator and extender, 3-plate wedge, 4-diaphragm, the 5-mirror of decaying, 6-receiving target, 7-photoelectric sensor, 8-interference fringe, 9-tested guide rail.
Fig. 2 realizes that of the present invention is the Circuits System block diagram of photoelectric sensor with CCD.
Embodiment
The present invention uses centre wavelength 635nm semiconductor laser as light source, to the wedge shape optical flat of the 45 ° of placements of tilting, after the reflection of wedge shape optical flat upper and lower surface, is broken down into two bundle intersection light beams through vertical irradiation after the collimator and extender.In the scope that these two collimated laser beams intersect, just produce some interference fringes, utilize diaphragm to select to be positioned at the benchmark of three bright fringess of two bundle coherent lights intersection centers as alignment measurement.This part is called the laser interferencefringes emitter.
Photoelectricity receives and treating apparatus composed as follows described.The TCD1501D line array CCD is fixed on the receiving target as electrooptical device, and under the driving pulse effect that is produced by EMP7064SLC44-10 type CPLD, the interference light signal that CCD will image on its photosurface changes the voltage signal that reflects light intensity into.Signal processing circuit is carried out filtering and binary conversion treatment to the signal of CCD output.In this collimator, adopt second order voltage controlled voltage source type chebyshev low-pass filter to come signal is carried out low-pass filtering, adopt voltage comparator LM339 to carry out binary conversion treatment.The square-wave signal that obtains is sent into the T/C0 mouth of AT89C51 single-chip microcomputer, by single-chip microcomputer to SP pulse count calculate in the middle of the position of edge on the CCD image sensing surface of bright fringes.The gained result can deliver to display module and show, or sends into computing machine by standard interface.Said process has realized that receiving target the obtaining of the measuring-signal of a certain measurement point of tested guide rail, in like manner can get receiving target and is positioned at each different measuring point place measured value.Adopt end points line method or least square method to calculate to all measured values, just can obtain the straightness error of this tested guide rail.
Claims (1)
1. alignment method based on interference fringe, it is characterized in that: the laser beam of being launched by laser instrument is through shining behind the collimator and extender on the wedge shape optical flat, reflex by two surfaces about the wedge shape optical flat, laser is decomposed into two bundle coherent light beams, in the scope that two bundle collimated laser beams intersect, just produces some the equal thick interference fringes that are parallel to the wedge rib; Adjust the striped emitter, make interference fringe vertical with optical axis and parallel with the striped launcher base; Utilize diaphragm to select some stripe of two bundle laser intersection centers, launch light benchmark as alignment measurement; Receiving target places on the measurand, and interference fringe is received by the photoelectrical position sensor on the receiving target, light signal is converted to electric signal, and under the effect of driving circuit, the electric signal that will have positional information send microprocessor behind signal condition; Microprocessor carries out calculation process to signal, obtains the positional information with respect to the measurand of interference fringe, and this information is shown in the numerical value mode; As being that photoelectric sensor is when measuring linearity with CCD, receiving target moves on measurand, record receiving target and be in pixel position on the CCD image sensing surface, just can utilize least square method or end points line method to calculate the straightness error of this measurand in different measuring point place interference fringe.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200510013509 CN1693845A (en) | 2005-05-16 | 2005-05-16 | Alignment method based on interference fringe |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200510013509 CN1693845A (en) | 2005-05-16 | 2005-05-16 | Alignment method based on interference fringe |
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| Publication Number | Publication Date |
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| CN1693845A true CN1693845A (en) | 2005-11-09 |
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| CN 200510013509 Pending CN1693845A (en) | 2005-05-16 | 2005-05-16 | Alignment method based on interference fringe |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108563027A (en) * | 2018-01-25 | 2018-09-21 | 西安工业大学 | A kind of Self-regulation track method of beam-expanding collimation light beam |
| CN110487219A (en) * | 2019-08-15 | 2019-11-22 | 卢振武 | A kind of detection system and its detection method of movement mechanism straightness |
-
2005
- 2005-05-16 CN CN 200510013509 patent/CN1693845A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108563027A (en) * | 2018-01-25 | 2018-09-21 | 西安工业大学 | A kind of Self-regulation track method of beam-expanding collimation light beam |
| CN110487219A (en) * | 2019-08-15 | 2019-11-22 | 卢振武 | A kind of detection system and its detection method of movement mechanism straightness |
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