CN1683219A - Small lot size substrate carriers - Google Patents
Small lot size substrate carriers Download PDFInfo
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- CN1683219A CN1683219A CNA2005100697308A CN200510069730A CN1683219A CN 1683219 A CN1683219 A CN 1683219A CN A2005100697308 A CNA2005100697308 A CN A2005100697308A CN 200510069730 A CN200510069730 A CN 200510069730A CN 1683219 A CN1683219 A CN 1683219A
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- substrate carrier
- suspension type
- door
- carrier
- flange
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M50/00—Constructional details or processes of manufacture of the non-active parts of electrochemical cells other than fuel cells, e.g. hybrid cells
- H01M50/30—Arrangements for facilitating escape of gases
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/46—Treatment of water, waste water, or sewage by electrochemical methods
- C02F1/461—Treatment of water, waste water, or sewage by electrochemical methods by electrolysis
- C02F1/46104—Devices therefor; Their operating or servicing
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/68—Treatment of water, waste water, or sewage by addition of specified substances, e.g. trace elements, for ameliorating potable water
- C02F1/685—Devices for dosing the additives
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2201/00—Apparatus for treatment of water, waste water or sewage
- C02F2201/002—Construction details of the apparatus
- C02F2201/004—Seals, connections
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2201/00—Apparatus for treatment of water, waste water or sewage
- C02F2201/009—Apparatus with independent power supply, e.g. solar cells, windpower, fuel cells
-
- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2307/00—Location of water treatment or water treatment device
- C02F2307/12—Location of water treatment or water treatment device as part of household appliances such as dishwashers, laundry washing machines or vacuum cleaners
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/10—Energy storage using batteries
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Hydrology & Water Resources (AREA)
- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Water Supply & Treatment (AREA)
- Organic Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Medicinal Chemistry (AREA)
- Warehouses Or Storage Devices (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
In a first aspect, an apparatus is provided for opening a substrate carrier door of a substrate carrier. The apparatus includes a supporting member adapted to (1) support the substrate carrier door at a load port; (2) allow removal of the door from the substrate carrier; and (3) pivot the removed door below a bottom surface of the substrate carrier. Numerous other aspects are provided.
Description
The application on January 26th, 2004 submit to, name is called the U.S. Patent Application Serial Number No.10/764 of " suspension type that is used to hang substrate carrier is transmitted flange and support " (Agt's number of putting on record 8092), 820 subsequent application, the U.S. Provisional Application sequence number that this application requires is that on January 27th, 2003 submitted to, name is called " suspension type that is used to hang chip carrier is transmitted flange and support " (Agt's number of putting on record 8092/L) is No.60/443,153 preference.The U.S. Provisional Patent Application sequence number that the application also requires on February 5th, 2004 to submit to is No.60/542,519 preceence.Content in above-mentioned each patent application all at this in full in conjunction with for referencial use.
The cross reference of related application
The application relates to the U.S. Patent application just on the docket of following commonly-assigned us, following application at this in full in conjunction with for referencial use:
The sequence number of submitting on August 28th, 2003, name is called " system that is used to transmit substrate carrier " (Agt's number of putting on record No.6900) is No.10/650,310 U.S. Patent application;
The sequence number of submitting on January 26th, 2004, name is called " method and apparatus that is used to transmit substrate carrier " (Agt's number of putting on record No.7163) is No.10/764,982 U.S. Patent application;
The sequence number of submitting on August 28th, 2003, name is called " directly from mobile load-transfer device on the discharged substrate carrier treater of substrate carrier " (Agt's number of putting on record No.7676) is No.10/650,480 U.S. Patent application;
Technical field
The present invention relates to semiconductor devices production on the whole, relates in particular to small lot size substrate carriers and using method thereof and equipment.
Background technology
Semiconductor devices is fabricated on the substrate, as silicon substrate, glass board etc., and uses in computing machine, telltale and similar products.These devices are made according to a sequence manufacturing step, as thin-film deposition, oxidation or nitrogenize, etching, polishing and heat treatment and offset printing treating process.Although just can carry out a plurality of production stages, must be used for transmitting substrate between the processing station of several procedure of processings at least usually at single processing station.
Substrate is stored in box or the container (hereinafter general designation " substrate carrier "), to transmit between processing station and other places usually.Although can transmit substrate carrier by hand between processing station, the transmission of substrate carrier is normally carried out automatically.For example, can carry out the automatic transmission of substrate carrier by robot, this robot utilizes end-effector that substrate carrier is mentioned.
In order to obtain the substrate that is stored in the substrate carrier, can the door of substrate carrier be opened through door-opening mechanism, this door-opening mechanism is usually located at the overside port place of machining tool.Opening door operation should carry out in the mode that effectively and not can cause the substrate in the substrate carrier to be polluted.Therefore, there are the needs that improve substrate carrier design and improved using method and equipment.
Summary of the invention
In a first aspect of the present invention, provide a kind of substrate carrier.This substrate carrier comprises: (1) substrate carrier shell, this shell have an opening and and are fit to store the zone of a slice substrate at least; (2) the suitable door that links with this shell and seal this opening.This door comprises the magnetic penetrating parts, and these parts are fit to link with the respective magnetic parts of the door-opening mechanism of overside port.
In a second aspect of the present invention, provide the equipment of the substrate carrier door that is used to open substrate carrier.This equipment comprises a load-carrying element, and this load-carrying element is suitable for (1) in overside port place supporting substrate carrier door; (2) allow door is pulled down from substrate carrier; (3) this door of pulling down of pivot below the bottom surface of substrate carrier.
In a third aspect of the present invention, an overside port structure is set, this structure comprises (1) Box Opener/Loader to Tool Standard (BOLTS) opening; (2) be positioned at several overside port unit of this BOLTS opening, and each overside port unit all is suitable for supporting substrate carrier in this BOLTS opening.These and other aspects according to the present invention also provide several other aspects.
From following detailed, appended claim and accompanying drawing, other features of the present invention and aspect will become more clear and definite.
Description of drawings
Fig. 1 is the part transparent view of suspension type conveying device, and wherein this suspension type conveying device is just being carried first and second carriers;
Fig. 2 is that suspension type carrier bracket shown in Figure 1 and suspension type are transmitted flange assembly decomposition diagram along the longitudinal direction;
Fig. 3 is the exploded bottom view that suspension type carrier bracket shown in Figure 2 and suspension type are transmitted flange assembly;
Fig. 4 is the exploded bottom view that suspension type carrier bracket shown in the accompanying drawing 2 and suspension type are transmitted flange assembly;
Fig. 5 and 6 is respectively first blade receptor of this suspension type carrier bracket and the transparent view that this suspension type is transmitted first knife edge part (comprising cross-sectional plane) of flange;
Fig. 7 and 8 is simple cross-sectional that this suspension type carrier bracket and suspension type are transmitted the same section of flange;
Fig. 9 is that the present invention that utilizes of accompanying drawing 1 connects the part excision transparent view that suspension type carrier bracket and suspension type are transmitted the suspension type conveying device of flange,, wherein be present in the object in the path of this suspension type conveying device delivery vehicles, clash into this carrier;
Figure 10 to 12 is cross sectional drawings of the each several part of the first blade receptor of this suspension type carrier bracket and this suspension type first blade that transmits flange, and it has described the separation process that causes carrier to shift out from the suspension type conveying device of accompanying drawing 1;
Figure 13 is the cutaway view of the part of first blade receptor of suspension type carrier bracket and first blade that suspension type is transmitted flange, this Figure illustrates the alternative of this assembly;
Figure 14 is the transparent view that transmits several shelfs of flange support substrate carrier by suspension type according to of the present invention;
Figure 15 is the transparent view of the shelf of accompanying drawing 14, and wherein top shelf is transmitted the flange support substrate carrier by its suspension type;
Figure 16 A is the one exemplary embodiment of substrate carrier, and this substrate carrier has suspension type and transmits flange, is suitable for carrying single substrate;
Figure 16 B-D is the one exemplary embodiment of substrate carrier;
Figure 17 A-L has described first one exemplary embodiment of door-opening mechanism, and this door-opening mechanism is used to open the door of substrate carrier;
Figure 18 A-L has described second one exemplary embodiment that is used for a door-opening mechanism of opening of substrate carrier;
Figure 19 A-19H has described exemplary clip claw mechanism, and this clip claw mechanism can be used for fixing substrate carrier;
Figure 20 A-B has described the 3rd one exemplary embodiment of door-opening mechanism, and this door-opening mechanism is used to open the door of substrate carrier;
Figure 21 has described the lateral plan that is arranged on a plurality of 4-substrate substrate carriers in Box Opener/Loader to Tool Standard (BOLTS) opening;
Figure 22 A-E has described the 4th one exemplary embodiment of door-opening mechanism, and this door-opening mechanism is used to open the door of substrate carrier; With
Figure 23 A-23G has described the different assemblies of exemplary substrate carrier.
The specific embodiment
The invention provides a kind of suspension type that is used for substrate carrier transmits flange and transmits the corresponding suspended scaffold that flange supports carrier by this suspension type.The present invention also provides novel substrate carrier and overside port structure (load port configuration).
This substrate carrier can be the monocrepid carrier that only is fit to store a substrate, or is fit to store many substrate carriers of several substrates.On the one hand, this suspended scaffold is adjusted, and makes this support be provided with to catch window (be used to catch this suspension type and transmit flange), and this is caught window and transmits flange along this suspension type and can become narrower window from the window of broad near the direction of support.Second aspect, this suspension type is transmitted flange and suspended scaffold is adjusted, and makes when suspension type transmission flange is supported by suspended scaffold, prevents that this suspension type transmission flange from moving with respect to suspended scaffold on any direction except vertical direction.Again on the one hand, this suspension type is transmitted flange and suspended scaffold is adjusted, if make that the substrate carrier that supports is thereon clashed on the direction opposite with the carrier moving direction, the suspension type of this carrier transmission flange will separate from this suspended scaffold so, allow carrier to fall.
In these aspects each all is considered to creative separately, yet transmits among the embodiment of flange and suspended scaffold at least one suspension type, may comprise above-mentioned each aspect.Its accompanying drawing and following description provide the concrete structure of implementing above-mentioned each creative aspect.The structure of accompanying drawing 1 to 12 only is exemplary, and should be appreciated that according to function of the present invention and also can design other alternative structure.
Accompanying drawing 1 is the transparent view of the part 101 of suspension type conveying device 103, and wherein this suspension type conveying device 103 is carried the first and second carrier 105a, 105b along the shiftable track 109 of suspension type conveying device 103 on first coaxial direction 107.The first suspension type carrier bracket 111a of the novelty of this suspension type conveying device 103 transmits flange 113a by first suspension type of a novelty and supports this first carrier 105a, this first suspension type is transmitted flange and is fixed on the first carrier 105a, and be positioned at the center of this first carrier top, and the second suspension type carrier bracket 111b of the novelty of this suspension type conveying device 103 transmits flange 113b by second suspension type of a novelty and supports the second carrier 105b, this second suspension type is transmitted flange and is fixed on the second carrier 105b, and is positioned at this center, second carrier top.Suspension type is transmitted flange 113a, 113b also can adopt other positions with respect to substrate carrier 105a, 105b.
Accompanying drawing 2 is the decomposition diagrams along the coaxial direction 107 of the assembly of suspension type carrier bracket 111a shown in the accompanying drawing 1 and suspension type transmission flange 113a.This suspension type carrier bracket 111a comprises stay bearing plate 115 and is fixed on the connection clamp 117 that stay bearing plate 115 pushes up that this connection clamp is suitable for suspension type carrier bracket 111a is fixedly coupled on the shiftable track 109 of suspension type conveying device 103.This suspension type carrier bracket 111a also comprises a flexible suspension bracket 119, and this flexibility suspension bracket also is fixed on stay bearing plate 115 top, and is suitable for suspension type carrier bracket 111a and provides supplemental support along shiftable track 109.The first blade receptor 121a is fixed on the first side 123a below of stay bearing plate 115, and the second blade receptor 121b is fixed on the second side 123b below of the stay bearing plate 115 relative with the first side 123a.Each assembly of suspension type carrier bracket 111a can use any suitable coupling mechanism (for example, screw, bolt, adhesive agent etc.) to be linked together.The all or part parts of this suspension type carrier bracket 111a can monolithic molding.
This suspension type is transmitted flange 113a and is comprised flange plate 125, and this flange plate is suitable for by suitable fixed mechanism, as fixed orifice 127 or analogue, is connected on the carrier (for example, the first carrier 105a (accompanying drawing 1)).The first blade 129a begins downward extension from the first side 131a of this flange plate 125, and the second blade 129b (not obvious in accompanying drawing 2, but can with reference to accompanying drawing 3) extends downwards from the second side 131b of this flange plate 125.Reinforcement extension plate 133 begins downward extension from the 3rd side 131c of this flange plate 125.
Such as will be explained further below, this first blade receptor 121a is suitable for receiving this first blade 129a, and this second blade receptor 121b is suitable for receiving the second blade 129b.Such as will be explained further below, the stay bearing plate 115 of this suspension type carrier bracket 111a, the first blade receptor 121a and the second blade receptor 121b define the suspension type flange and catch window 137, hold at the first and second blade receptor 121a, the 121b of this suspension type carrier bracket 111a before the corresponding first and second blade 129a, the 129b of this suspension type transmission flange 113a, suspension type is transmitted flange 113a and is fit to catch window 137 by this suspension type flange.
Accompanying drawing 3 is exploded bottom view that accompanying drawing 2 centre mounted type carrier bracket 111a and suspension type are transmitted the assembly of flange 113a.This suspension type carrier bracket 111a and suspension type are transmitted flange 113a along vertical surface 135 alignment, and this vertical surface 135 overlaps with the center line face (not illustrating separately) that center line face (not illustrating separately) and the suspension type of suspension type carrier bracket 111a are transmitted flange 113a.With reference to accompanying drawing 1, this vertical surface 135 preferably aligns with the shiftable track 109 of the vertical orientation of suspension type conveying device 103, yet also can be arranged to other directions according to the present invention (for example, bevelled, perhaps parallel but setover).
In accompanying drawing 3, the suspension type flange is caught window 137 and is looked similarly to be a line.The relative position that this suspension type carrier bracket 111a is suitable for allowing suspension type transmission flange 113a to transmit flange 113a from the suspension type shown in the accompanying drawing 3 begins to advance to suspension type carrier bracket 111a, and catches window 137 by this suspension type flange.
The first blade receptor 121a with respect to the center line face (not illustrating separately) of suspension type carrier bracket 111a with the first angle 139a orientation, and the second blade receptor 121b with respect to the center line face of suspension type carrier bracket 111a with the second angle 139b orientation.Preferably, this first angle 139a and the second angle 139b equate, thereby the second blade receptor 121b upward becomes mirror image with the first blade receptor 121a at the whole center line face (not illustrating separately) of suspension type carrier bracket 111a.In one embodiment, the third angle degree 141 between the first blade receptor 121a and the second blade receptor 121b is approximately 60 degree.Also can adopt other angle (for example, comprising the angle that is approximately 10 to 20 degree).Very obvious, as will making an explanation below, the selection of the scope of third angle degree 141 is relevant with other aspects of the geometric configuration of this suspension type carrier bracket 111a and suspension type transmission flange 113a.
The center line face (not illustrating separately) that the first blade 129a transmits flange 113a with respect to suspension type is with the 4th angle 139c orientation, and the second blade 129b transmits the center line face (not illustrating separately) of flange 113a with the 5th angle 139d orientation with respect to suspension type.Preferably, the 4th angle 139c equates with the 5th angle 139d, thereby the whole center line face (not illustrating separately) that the second blade 129b transmits flange 113a in suspension type is gone up and first blade 129a formation mirror image.In one embodiment, the hexagonal degree 143 between this first blade 129a and the second blade 129b is approximately 60 degree.Also can adopt other angle.For the correct mutual action between suspension type carrier bracket 111a and the suspension type transmission flange 113a, this third angle degree 141 and hexagonal degree 143 are preferably equal substantially.
Accompanying drawing 4 is exploded bottom view that suspension type carrier bracket 111a shown in the accompanying drawing 2 and suspension type are transmitted the assembly of flange 113a.Accompanying drawing 4 is similar to accompanying drawing 3, except suspension type transmit flange 113a from accompanying drawing 3 residing position advance with respect to suspension type carrier bracket 111a (referring to imaginary line), passed through the suspension type flange and caught window 137, and demonstration is to be positioned at the nested position place with respect to suspension type carrier bracket 111a.At this nested position place, the first and second blade 129a, 129b form together basically and lack one jiao " V " shape or chevron pointing, this first and second blade 129a, 129b are very close with the corresponding first and second blade receptor 121a, 121b (they also form basically and lack one jiao " V " shape or chevron pointing), but also do not have perfect fitting together.This can be referred to as the progressive position that suspension type is transmitted flange 113a.
Although suspension type is transmitted flange 113a and is passed the suspension type flange and catch advancing of window 137 and can match with suspension type carrier bracket 111a so that suspension type is transmitted flange 113a, but the invention provides and will explain below, suspension type is transmitted flange 113a and also can be risen from suspension type carrier bracket 111a below, with the nested position (rather than approaching with horizontal assembly) that presents accompanying drawing 4.Be similar to shown in the accompanying drawing 4 vertically advance continuously can be so that suspension type is transmitted the first blade 129a and the second blade 129b of flange 113a to match with the first blade receptor 121a and the second blade receptor 121b of suspension type carrier bracket 111a respectively, and by they fixed pedestals.V-V section shown in the accompanying drawing 4 is perpendicular to the representative of the cross-sectional plane of the first blade receptor 121a and first blade 129a cutting, and this section 5-12 with reference to the accompanying drawings illustrates and is described below.
Accompanying drawing 5 and 6 is transparents view (comprising cross-sectional plane) of the appropriate section of the first blade receptor 121a of suspension type carrier bracket 111a and the first blade 129a that suspension type is transmitted flange 113a, and accompanying drawing 7 to 8 is simple cutaway views that this suspension type carrier bracket 111a and suspension type are transmitted the same part of flange 113a.Accompanying drawing 5 to 8 has been described the first blade receptor 121a and the supported and suspended formula of the second blade receptor 121b (not shown) that cause suspension type carrier bracket 111a and has been transmitted the first blade 129a of flange 113a and the connection process of the second blade 129b (not shown).
In the connection process shown in the accompanying drawing 5 to 8, the first blade receptor 121a is (shown in the figure, being connected to suspension type transmits on the stay bearing plate 115 of flange 113a and is positioned at its below) and the first blade 129a move relative to each other, and the second blade receptor 121b (not shown) and the second blade 129b (not shown) also move relative to each other.Between each is to corresponding blade and blade receptor, will be opposite except in the relative motion between the second blade receptor 121b (not shown) and the second blade 129b (not shown) or become the mirror image with the relative motion shown in accompanying drawing 5 to 8 and the accompanying drawing 10 to 12 between the first blade receptor 121a and the first blade 129a, above-mentioned relative motion is similar substantially.Like this, 10 to 12 in accompanying drawing 5 to 8 and accompanying drawing have been described the relative motion between the first blade receptor 121a and the first blade 129a, and the relative motion between other blades and the blade receptor can be understood as its mirror image.
In accompanying drawing 5 to 8 and accompanying drawing 10 to 12, the stay bearing plate 115 and the first blade receptor 121a are shown as two that are linked together.Yet this stay bearing plate 115 and the first blade receptor 121a can be a slices.
With reference to accompanying drawing 5, the first receiving surface 121aa of the first blade receptor 121a is the plane preferably, and be suitable for first blade surface 129aa (being blocked) sliding block joint with the first blade 129a, this first blade surface is plane preferably also, with the first blade receptor 121a combination that matches with the first blade 129a.The second receiving surface 121ab (being blocked) of the first blade receptor 121a is plane preferably also, and is suitable for contacting the first knife edge 129ab of the first blade 129a.In at least one embodiment of the present invention, the first knife edge 129ab is adapted to pass through gravity and is arranged among the first blade receptor 121a, and contact with the extension summit 121ac of the first blade receptor 121a, this extension summit is limited by the intersection line between the second receiving surface 121ab of the first receiving surface 121aa of the first blade receptor and the first blade receptor.If necessary, the first receiving surface 121aa of the first blade receptor 121a also is suitable for contacting with the first knife edge 129ab.The elongation antelabium 121ad of this first blade receptor 121a preferably is positioned at the low order end 121ae place of the first blade receptor 121a.This antelabium 121ad also can adopt other position.
Suspension type is transmitted the first blade receptor 121a of the first blade 129a of flange 113a with respect to suspension type carrier bracket 111a, what show in Fig. 5 is to be positioned at a progressive position easily, mentioned above with reference to reaching shown in the accompanying drawing 4, this Fig. 5 is the view of the section V-V of Fig. 4.Why easily a reason of this progressive position is exactly, the first blade 129a is near the first blade receptor 121a in-to-in accommodated position, only need go up to first blade receptor 121a propelling and with respect to first blade receptor 121a decline, to obtain this holding in coaxial direction 107 (referring to accompanying drawing 1).Why easily the Another reason of progressive position shown in being somebody's turn to do is that the first blade 129a can arrive this position from a plurality of progressive position direction of closing (for example, the first progressive position direction of closing 145a, the second progressive position direction of closing 145b etc.).
This first progressive position direction of closing 145a is the above accompanying drawing 4 described directions of being on close level of reference.If (for example along load-transfer device, the suspension type conveying device 103 of accompanying drawing 1) between the adjacent carrier support (for example, between the first carrier 105a and the second carrier 105b of accompanying drawing 1) words of enough axial clearances are arranged, this first progressive position direction of closing 145a can be adopted at an easy rate so, and have continuously, simple advantage, this is only to need the first blade 129a directly is placed on the accommodated position of the first blade receptor 121a at the simple continuous movement that coaxial direction 107 (referring to accompanying drawing 1) goes up progressive position shown in the process because suspension type is transmitted flange 113a.
When carrier along the load-transfer device tight spacing (for example, as shown in Figure 1, the same with the first carrier 105a and the second carrier 105b along shiftable track 109 tight spacings of suspension type conveying device 103) time, the second progressive position direction of closing 145b is the practical alternative direction of the first progressive position direction of closing 145a.The second progressive position direction of closing 145b is vertical direction of closing, and it utilizes and can not contacted under the situation of blade receptor 121a, 121b at blade with the formed chevron pointing of the second blade 129b by the first blade 129a, closely is inserted in by the first blade receptor 121a and this fact of the formed chevron pointing of second blade receptor 121b back.
Owing to can be inserted in by the first blade receptor 121a and the formed chevron pointing of second blade receptor 121b back by the first blade 129a and the formed chevron pointing of the second blade 129b, so suspension type is transmitted flange 113a and can be risen below suspension type carrier bracket 111a, and move up and pass the first blade receptor antelabium 121ad, with the low order end 121ae that passes the first blade receptor 121a, thereby the first blade 129a from the first blade receptor 121a back (for example, in back along coaxial direction 107) rise to first blade receptor 121a top, to arrive this progressive position easily shown in the attached Figure 4 and 5.This second progressive position direction of closing 145b has at the lengthwise location place along the shiftable track 109 of suspension type conveying device 103, suspension type is transmitted the advantage that flange 113a introduces suspension type conveying device 103, supported and suspended formula is transmitted near suspension type carrier bracket 111a the position of flange 113a in this position very much, thereby only need transmit minimum portraitlandscape motion is arranged between flange 113a and the suspension type carrier bracket 111a, can be contained among the suspension type carrier bracket 111a so that suspension type is transmitted flange 113a in suspension type.For example, transmit in the uphill process of flange 113a in suspension type, this suspension type transmit flange 113a track can with the track overlaid of suspension type carrier bracket 111a.
With reference to accompanying drawing 6, show all low order end 121ae with reference to the accompanying drawing 5 described first blade receptor 121a, the first blade surface 129aa and the first blade receptor 121a.This suspension type is transmitted flange 113a and is begun to move on coaxial direction 107 (referring to accompanying drawing 4), thereby the relative motion between suspension type transmission flange 113a and the suspension type carrier bracket 111a takes place.Especially, this suspension type is transmitted flange 113a and is moved to suspension type carrier bracket 111a, thereby the first knife edge 129ab and aligns with the low order end 121ae of the first blade receptor 121a now directly above the first blade receptor antelabium 121ad.
Between the antelabium 121ad of the first knife edge 129ab of the first blade 129a and the first blade receptor 121a, there is the first gap 147a.In one embodiment of the invention, preferably about 3 millimeters or littler of this first gap 147a, and preferably about 1.5 millimeters or littler.In addition, also can adopt other gap, transmit in suspension type between the stay bearing plate 115 of the flange plate 125 (referring to accompanying drawing 2) of flange 113a and suspension type carrier bracket 111a and have the second gap 147b.In one embodiment of the invention, also preferably about 3 millimeters or littler of this second gap 147b, and preferably about 1.5 millimeters or littler.Also can adopt other gap.Because the space in the clean room of typical semiconductor device production facilities is very expensive, so preferably will remain on minimum as the gap of the first gap 147a and second gap 147b and so on.
It should be noted that, when suspension type is transmitted flange 113a along coaxial direction 107 (referring to accompanying drawing 1) during near suspension type carrier bracket 111a, the first blade 129a is not directly (for example, the cross-sectional plane that is parallel to accompanying drawing 5) near the first blade receptor 121a, thereby (for example along the specified point of the first blade 129a, referring to accompanying drawing 6, some 129aba along the first knife edge 129ab of the first blade 129a) (for example perpendicular to the first blade receptor 121a and the corresponding point on the first blade receptor antelabium 121ad, as shown in Figure 6, along the some 121ada of the first blade receptor antelabium 121ad) go up process.More definite is, (for example vertically crossing between the first blade 129a and the first blade receptor 121a, it is parallel with the first blade receptor antelabium 121ad " line " that " line " of the first knife edge 129ab keeps, advance simultaneously to same direction) and the first blade 129a and the first blade receptor 121a between horizontal relative motion (for example, the first knife edge point 129aba laterally moves past the first blade receptor vermilion borders 121ada) combination will along with suspension type transmit flange 113a along coaxial direction 107 to the preceding of suspension type carrier bracket 111a and then generation (referring to accompanying drawing 1).
Like this, along suspension type transmit the respective point of cutting open on the cross-sectional plane of the accompanying drawing 5 to 8 of flange 113a and suspension type carrier bracket 111a and accompanying drawing 10 to 12 (not illustrating separately) be not accompanying drawing 4 the V-V section have a few, and should be (for example to transmit point that the distance between flange 113a and the suspension type carrier bracket 111a changes to accompanying drawing from accompanying drawing according to suspension type, transmit the viewgraph of cross-section that the some place on flange 113a and the suspension type carrier bracket 111a cuts open in suspension type near the V-V section of accompanying drawing 4), this does not influence the describing mode that suspension type is transmitted flange 113a and suspension type carrier 111a.
Referring to accompanying drawing 7, this suspension type is transmitted flange 113a and is moved further with respect to suspension type carrier bracket 111a, thereby the first knife edge 129ab is located immediately at the extension summit 121ac top of the first blade receptor.Transmitting flange 113a in suspension type is under the situation of this position with respect to suspension type carrier bracket 111a, can allow this first blade 129a to fall along vertical channel 149a, thereby the first knife edge 129ab can contact with the extension summit 121ac of the first blade receptor is linear with respect to the first blade receptor 121a.
Optionally, this first blade 129a can be further horizontal channel 149b on the same horizontal surface advance to the first blade receptor 121a, cause the linearity contact between the second receiving surface 121ab of the first knife edge 129ab and the first blade receptor.As another alternatives, the first blade 129a can move through the slant path 149c with level and vertical two assemblies, with the similar results that obtains and process slant path 149c is obtained.By allowing suspension type to transmit flange 113a after the initial level speed component is made contributions, descend or drop on the suspension type carrier bracket 111a, can obtain this slant path 149c especially.
As an example, this suspension type (is for example transmitted flange 113a, it is first carrier 105a of its part that this suspension type is transmitted flange 113) can be to advance with the identical velocity level of the shiftable track 109 of suspension type conveying device 103 (for example, the motor-driven roller device by being provided with the horizontal feed surface or by other any devices).The horizontal velocity of this first carrier 105 can increase, make suspension type transmit flange 113a sealing suspension type carrier bracket 111a, and the first carrier 105a (transmitting flange 113a with the suspension type that is connected thereto) can descend or the whereabouts with respect to suspension type carrier bracket 111a.
When suspension type is transmitted flange 113a with respect to the horizontal position of suspension type carrier bracket 111a as shown in Figure 6 the time, even as shown in Figure 5, before the first knife edge 129ab passes through the first blade receptor antelabium 121ad, the bending channel that is similar to ramp way 149c can begin, this suspension type is transmitted flange 113a and pass through the first blade receptor antelabium 121ad under the situation of not colliding the first blade receptor antelabium 121ad, and contacts the first receiving surface 121aa of the first blade receptor, the second receiving surface 121ab of the first blade receptor or the extension summit 121ac of the first blade receptor.
With reference to accompanying drawing 8, show among the figure that this suspension type transmission flange 113a is supported by the first blade receptor 121a, wherein the first blade 129a is contained in the suspension type carrier bracket 111a.This first knife edge 129ab contacts with the extension summit 121ac of the first blade receptor is linear, and the first blade 129a contacts with the first receiving surface 121aa of the first blade receptor is linear.
As an example, before the first knife edge 129ab contacts with the extension summit 121ac of the first blade receptor is linear, this first blade 129a can slide downwards and to the right, and wherein the first knife edge 129ab slides atop and contacts with the second receiving surface 121ab of the first blade receptor is linear.In one embodiment of the invention, the second receiving surface 121ab of the first blade receptor preferably is oriented the angle that is about 25 to 30 degree with vertical surface.This inclination guarantees that the first blade 129a will move down rapidly since the contact point of the second receiving surface 121ab of the first knife edge 129ab and the first blade receptor.Also can adopt other angle.
Optionally, this first blade 129a can slide downwards and left, and wherein the first blade surface 129aa slides atop, and contacts with the first receiving surface 121aa face of the first blade receptor.In at least one embodiment of the present invention, the first receiving surface 121aa of the first blade receptor preferably is oriented the angle that is about 25 to 30 degree with vertical surface.Also can adopt other angle.
Though the first blade 129a is positioned at the first blade receptor 121a (and the second blade 129b is positioned at the second blade receptor 121b (referring to accompanying drawing 4-5)), but the obstruction of the first blade surface 129aa is transmitted with suspension type that flange 113a advantageously is limited in laterally and in the backward directions (for example, with coaxial direction 107 opposite (referring to accompanying drawing 1)) by what the first receiving surface 121aa of the first blade receptor was caused.In at least one embodiment of the present invention, blade and receiving surface are preferably smooth, and have complementary orientation about vertical direction, with the contact of between the first receiving surface 121aa of the first blade surface 129aa and the first blade receptor, guaranteeing to closely cooperate.As previously mentioned, the second blade receptor is with the same manner limit lateral movement.Also can adopt non-planar surface.
Simultaneously, the obstruction to the first knife edge 129ab that is caused by the second receiving surface 121ab of the first blade receptor is transmitted flange 113a with suspension type and advantageously is limited in forwards inwardly (for example, (referring to accompanying drawing 1) on the coaxial direction 107).This first knife edge 129ab can be the circle (for example, the wedge angle that breaks, round edge, the frustum of a cone etc.), between the second receiving surface 121ab of the first knife edge 129ab and the first blade receptor, slide smoothly when guaranteeing the second receiving surface 121ab moving contact when the first knife edge 129ab and the first blade receptor.
Yet, should be noted that suspension type being transmitted flange 113a to be placed in the process on the suspension type carrier bracket 111a that the contact between the second receiving surface 121ab of the first knife edge 129ab and the first blade receptor almost is independent the generation.Just, in case the first knife edge 129ab is contained among the extension summit 121ac of the first blade receptor, and suspension type conveying device 103 transmits the first carrier 105a (referring to accompanying drawing 1) on coaxial direction 107, and it is less relatively with respect to the possibility of suspension type carrier bracket 111a power forward that the first carrier 105a is subjected to impelling suspension type transmission flange 113a so.Such just as will be explained further below, with reference to accompanying drawing 9 to 12, suspension type is transmitted flange 113a more may will be subjected to laterally promoting its power, or promotes its power backward, or the making a concerted effort of these power.
Accompanying drawing 9 is part excision transparents view of suspension type conveying device 103, and the connection of exploitation of innovation between suspension type carrier bracket 111a and suspension type transmission flange 113a is to transmit the first carrier 105a on coaxial direction 107.Appear at the object 151 in the path that suspension type conveying device 103 transmits the first carrier 105a, clash into the angle 105aa of the first carrier 105a.This object 151 can be a machinery, the equipment that misplaces the position or other any object as robot that has shifted out from its pre-routing owing to program mal and so on.May be wittingly or by mistake be placed on many other objects or article near the position of this suspension type conveying device 103, thus the collision of itself and the first carrier 105a can occur in 105aa place, the first carrier angle.
Also can cause with the collision of the first carrier 105a by the object (not illustrating separately) at bottom, side, top or the back of clashing into the first carrier 105a.Because the shiftable track 109 of suspension type conveying device 103 is very unexpected preferably with higher speed carrying substrates carrier on coaxial direction 107 so object clashes into the first carrier 105a from behind.
The advantage that suspension type carrier bracket 111a of the present invention and suspension type are transmitted flange 113a is, when the power backward or horizontal that is subjected to pre-sizing, as 3 pounds or more than, perhaps best 5 pounds or when bigger, the first carrier 105a can predictably and controllably shift out from suspension type conveying device 103.Just, in one embodiment of the invention, if the first carrier 105a is subjected to from the front or the bump of the power of 1 pound of the first carrier 105a or 2 pounds is pointed in the side, this suspension type is transmitted flange 113a and is preferably remained in the suspension type carrier bracket 111a, thereby this first carrier 105a continues to be carried on coaxial direction 107 by suspension type conveying device 103.Yet, if the first carrier 105a is subjected to from the front or the bump of the power of 7 pounds of the first carrier 105a or 8 pounds is pointed in the side, suspension type transmission flange 113a preferably shifts out from suspension type carrier bracket 111a and drops down from suspension type conveying device 103 so, leaves other substrate carriers of being carried by suspension type conveying device 103.
As mentioned above and with reference to accompanying drawing 1, when the first carrier 105a is transmitted on coaxial direction 107 along shiftable track 109 by suspension type conveying device 103, suspension type transmit flange 113a with respect to the horizontal relative motion aspect the suspension type carrier bracket 111a, in the past backward relative motion and from after forward relative motion all be restricted, and these motions are forbidden in the normal running of suspension type conveying device 103 basically.Similarly, suspension type transmission flange 113a is under an embargo with respect to moving downward too of suspension type carrier bracket 111a.Yet it is unrestricted basically with respect to the upward movement of suspension type carrier bracket 111a that this suspension type is transmitted flange 113a.
Object 151 shown in the accompanying drawing 9 may be subjected to the horizontal and power backward of the first carrier 105a, this power can change at the speed on the coaxial direction 107, the angle of first carrier 105a bump object 151 and the width (for example, the collision nidus between the object 151 and the first carrier 105a is apart from the distance of shiftable track 109) of the first carrier 105a according to suspension type conveying device 103.Yet this suspension type carrier bracket 111a preferably limits suspension type and transmits twisting and the motion of translation of flange 113a in horizontal surface.Like this, in order to prevent to damage the shiftable track 109 of suspension type conveying device 103, the horizontal force that is caused by collision is change of direction in some way.
Transmit the front of flange 113a observes along coaxial direction 107 from suspension type, the first receiving surface 121aa (accompanying drawing 5) of this first blade receptor recedes, and the first receiving surface 121aa and the formed level of corresponding surperficial (not shown) on the second blade receptor 121b (referring to accompanying drawing 2) thereof by the first blade receptor lack one jiao chevron pointing, increase to the broad shape of transmitting flange 113a back near suspension type from transmit the narrower shape of flange 113a fwd near suspension type.This combination that forms outward-dipping lambdoid two surfaces that recede, back makes, mating surfaces (for example, the first blade surface 129aa and the corresponding surperficial (not shown) on the second blade 129b (referring to accompanying drawing 2) thereof) can transmit flange 113a upwards and " ride " backward about suspension type, and cooperate connection with their corresponding stayed surfaces.
In operation, described this backward and the circular array on the surface that is inclined upwardly and the first carrier 105a experienced backward with horizontal impulsive force (for example, during colliding) cooperation, make the suspension type of the carrier 105a that wins transmit flange 113a and upwards and backward move with respect to the suspension type carrier bracket 111a of suspension type conveying device 103.This suspension type is transmitted flange 113a and can be shifted out from suspension type carrier bracket 111a, and therefore the carrier 105a that wins is fallen from suspension type conveying device 103.This cooperates with reference to the accompanying drawings, and 10-12 is described below.
Accompanying drawing 10-12 is the first blade receptor 121a of suspension type carrier bracket 111a, transmit the cutaway view of the first blade 129a each several part of flange 113a with suspension type, these view descriptions the separation process that causes the first carrier 105a to shift out from suspension type conveying device 103.With reference to accompanying drawing 10, this power F1 is applied to suspension type along the direction of extending perpendicular to the first blade 129a and transmits on the flange 113a in accompanying drawing 5 and 6, and is the component of the impulsive force between first carrier 105a shown in the accompanying drawing 10 and the object 151.
Form the obstruction of suspension type being transmitted the first blade 129a cross motion of flange 113a if not the first receiving surface 121aa because of the first blade receptor, this power F1 will transversely transmit flange 113a to the first blade 129a in suspension type and in the residing horizontal surface, push away out the first blade receptor 121a in accompanying drawing 8.Yet, because the first receiving surface 121aa of the first blade receptor is because first receiving surface 121aa of the first blade receptor and the contact of the face between the first blade surface 129aa, stopped that suspension type transmits the direct cross motion of flange 113a, so suspension type is transmitted flange 113a by the first blade surface 129aa on the whole with respect to suspension type carrier bracket 111a upwards and slide backward or " riding " and this power F1 is reacted.
As mentioned above, this suspension type transmission flange 113a means with respect to the motion backward of suspension type carrier bracket 111a, suspension type is transmitted the some (not shown) that flange 113a goes up the position that cross-sectional plane cuts open of accompanying drawing 10, along with the upwards slip of the first blade surface 129aa along the first receiving surface 121aa of the first blade receptor, move among the page, accompanying drawing 10-12 centre mounted type transmits the cross-sectional plane of flange 113a and cuts open at the difference place that suspension type is transmitted flange 113a.
Refer again to accompanying drawing 10, in response to power F1, the first blade surface 129aa of the first blade 129a is along direction 153, upwards be reduced on the first receiving surface 121aa of the first blade receptor of suspension type carrier bracket 111a, the inclined-plane 155 of the first receiving surface 121aa of this direction 153 and the first blade receptor aligns.Because between the first blade surface 129aa of suspension type transmission flange 113a and the first receiving surface 121aa of the first blade receptor is the face contact, and because the complementary surface (not shown) on suspension type transmission flange 113a opposite side is operated simultaneously, so this suspension type is transmitted the horizontal orientation that flange 113a can keep it to present along with its rise, (referring to the accompanying drawing 9) formula that is draped carrier bracket 111a carries along suspension type conveying device 103 (referring to accompanying drawing 8) before the impact between the first carrier 105a and the object 151 simultaneously.In addition, along with suspension type is transmitted flange 113a with respect to suspension type carrier bracket 111a rise and mobile backward, the above-mentioned arrangement of cooperating surfaces makes that the center line face (not shown) that suspension type is transmitted flange 113a keeps aliging substantially with the shiftable track 109 of suspension type conveying device 103.
With reference to accompanying drawing 11, this suspension type is transmitted flange 113a and is removed from suspension type carrier bracket 111a fully, and be in the upwards sling movement, shown in sling movement path 157, break away from from the inclined-plane 155 of the first receiving surface 121aa of the first blade receptor.This suspension type is transmitted flange 113a and is no longer limited its perpendicular movement now, and can move down, away from suspension type carrier bracket 111a.
In accompanying drawing 11, suspension type is transmitted flange 113a and is risen, thereby the first knife edge 129ab obtains gap 147c at least with respect to the extension summit 121ac of the first blade receptor, and this gap is consistent with the height of the first blade receptor antelabium 121ad above the first blade receptor extends summit 121ac.Like this, this first knife edge 129ab can pass through first blade receptor antelabium 121ad top, and does not have the danger that the first blade 129a clashes into the first blade receptor 121a.Preferably about 3 millimeters of this gap 147c should be noted that the length of gap 147c is selected part based on required separating force, and this separating force is approximately 5 pounds as mentioned above in the present embodiment.If the separating force of expectation can be selected littler gap 147c so less than 5 pounds, vice versa.For example, in another embodiment of the present invention, may need 20 pounds power that the first carrier 105a is separated from suspension type conveying device 103.In such an embodiment, can require bigger gap 147c (for example, being approximately 05 inch in one embodiment).
With reference to accompanying drawing 12, the advancing of point of sling movement path 157 vestiges go up to be described along with the first knife edge 129ab, this suspension type transmit flange 113a backward, move down, and away from suspension type carrier bracket 111a.After colliding (referring to accompanying drawing 9),, can this first carrier 105a (referring to accompanying drawing 9) be caught with net or other similar means in order gently to collect the first carrier 105a with object 151.
Fwd is described and is just disclosed one exemplary embodiment of the present invention; The modification that above-mentioned disclosed apparatus and method fall in the scope of the invention is very tangible for those of ordinary skills.For example, this suspension type carrier bracket 111a and suspension type are transmitted flange 113a and can be formed (material that for example, is free to slide and has long-term resistance to abrasion) by any suitable material.The exemplary materials that is used for suspension type carrier bracket and/or suspension type transmission flange comprises that metal (for example, corrosion-resistant steel, aluminium etc.), plastics (for example, polycarbonate, polyethylene, other super high molecular weights or high-density plastic, nylon, polytetrafluoroethylene etc.), perhaps other similar materials.Plastic assembly can carry out mold pressing or other processing.
Accompanying drawing 13 is cutaway views of the part of the first blade receptor 121a of suspension type carrier bracket 111a and the first blade 129a that suspension type is transmitted flange 113a, has described the alternative of these parts.All become about miter angle (although also can adopt other angle) with reference to the low order end 121ae of accompanying drawing 13, the first blade receptor 121a and the first knife edge 129ab of the first blade 129a with vertical direction.Do not compare when not tilting with the first knife edge 129ab with low order end 121ae, this set transmits flange 113a for suspension type the bigger window of catching is provided.Simultaneously, when tilting, if do not have alignment, these surfaces can slide relative to one another so, and help suspension type carrier bracket 111a to catch suspension type transmission flange 113a.
Transmit flange 113a though mainly described suspension type carrier bracket 111a and the suspension type used in the suspension type transmission system herein, but should be appreciated that suspension type carrier bracket 111a (perhaps its each several part) can be used for transmitting the substrate carrier support of flange 113a and/or being positioned at any other position having suspension type.For example, suspension type carrier bracket 111a (or its each several part) can be used for substrate carrier being supported and/or being positioned at accumulator, substrate carrier cleaner, local memory buffer (MB), and they are as the handling implement of stove or wet scrubbing workstation etc. and so on, the part of batch processing instrument.
Accompanying drawing 14 is the transparents view according to several shelfs 175a-b of the present invention, and they transmit the flange support substrate carrier by suspension type.Can adopt more than two or be less than two shelf.Each shelf 175a-b comprises makes blade receptor 121a, 121b be connected to the stayed surface 177a-b of (or being formed on wherein) on it.So, this shelf 175a-b form can the supporting substrate carrier the suspension type carrier bracket, this substrate carrier has the suspension type of transmitting flange 113a (accompanying drawing 1-12) as suspension type and transmits flange.Angle/size of blade receptor 121a, 121b can, for example, be similar to previously described blade receptor.This shelf 175a-b can be installed in any position (for example, in as the accumulator of the part of handling implement, batch processing instrument etc., substrate carrier cleaner, local memory buffer (MB)) of supporting substrate carrier.In one or more embodiment of the present invention, shelf 175a and/or 175b can move.For example, shelf 175a and/or 175b can be used for substrate carrier is stored in the overside port of handling implement, and perhaps the overside port from handling implement unloads.
Accompanying drawing 15 is transparents view of the shelf 175a-b of accompanying drawing 14, and wherein top shelf 175a transmits flange 113a supporting substrate carrier 179 by its suspension type.This substrate carrier 179 can be the monocrepid carrier or be suitable for holding a plurality of substrate carriers.Very obvious, the use that blade receptor 121a, 121b and suspension type are transmitted flange 113a allows substrate carrier to deposit with height stacking density, and to deposit on the top of the shelf and to take away from shelf relative to less moving.
This suspension type is transmitted flange 113a can adopt open substrate container or pallet.The blade receptor of suspension type carrier bracket can tilt rearwards from the front of suspension type carrier bracket (with respect to horizontal direction); And/or the suspension type knife edge of transmitting flange can tilt rearwards from the front that suspension type is transmitted flange (with respect to horizontal direction).
Accompanying drawing 16 A are one exemplary embodiment of substrate carrier 201a, and this substrate carrier has suspension type and transmits flange 113a, and is suitable for transmitting single substrate.This substrate carrier 201a comprises door 203, and this can move to allow to visit the substrate (hereinafter can further describe) that is stored in the substrate carrier 201a.Shown in one exemplary embodiment in, door 203 comprises latch 205a, b, this latch allows door 203 to be fixed to selectively on the remainder of substrate carrier 201a and from the remainder of substrate carrier 201a to remove.Door 203 can comprise a zone 207, can (for example see through the zone such as metal or other magnetic, iron, corrosion-resistant steel etc.), when hope visit substrate carrier 201a is inner (for example, for with substrate from substrate carrier 201a remove or for substrate load to substrate carrier 201a), this zone allows door-opening mechanism (will be described below) that door 203 is fixedly maintained.The remainder of substrate carrier 201a can be made by polycarbonate, PEEK or other suitable materials.
Accompanying drawing 16B-D is respectively the one exemplary embodiment of substrate carrier 201b-d, and substrate carrier 201b-d is similar to substrate carrier 201a, but is suitable for carrying two, three and four substrates respectively.As what will be understood from accompanying drawing 16A-D, the height of substrate carrier is along with the substrate capacity of substrate carrier increases and increases.Substrate carrier with four above substrates of storage also can be provided.
Accompanying drawing 17A-L has described first one exemplary embodiment of door-opening mechanism 209, and this door-opening mechanism is used to open the door 203 of substrate carrier 201a.Similarly door-opening mechanism can be applied among the substrate carrier 201b-d.With reference to accompanying drawing 17A-L, substrate carrier 201a transmits flange 113a with blade receptor 121a, 121b and suspension type and is supported on 211 places, overside port position (for example, allowing substrate carrier to be piled into high-bulk-density).Door-opening mechanism 209 comprises load-carrying element 213, this load-carrying element is suitable for contacting the door 203 with supporting substrate carrier 201a, and as will be described further below, be suitable at rotary door 203 below the remainder of substrate carrier 201a (for example, in shell 215).Can adopt linear driving mechanism or other driver trains 217 (for example, driver train such as pneumatic, motor-driven) to dock/break away from respect to 219 pairs of substrate carriers of overside port of door-opening mechanism 209 and/or overside port position 211.
In operation, substrate carrier 201a is supported on 211 places, overside port position by blade 121a, 121b (suspension type through substrate carrier 201a is transmitted flange 113a), shown in accompanying drawing 17A and 17B.So the door 203 of substrate carrier 201a moves forward and contacts with load-carrying element 213 through driver train 217 (accompanying drawing 17C-D).Just as will be described further below, load-carrying element 213 can respond these butt joint motions and open latch and support door 203.
Along with opening of door 203, substrate carrier 201a removes from overside port 219, and door 203 is supported by load-carrying element 213 (accompanying drawing 17E-F).Subsequently, load-carrying element 213 reductions (for example, by unshowned driver train) enter (accompanying drawing 17G-J) in the shell 215.In this position, door 203 is arranged on substrate carrier 201a below, and in the embodiment shown, roughly is positioned at horizontal surface.This embodiment has reduced the amount of space that need hold door 203 (for example, allowing overside port stacking more closely).In case door reduces, substrate carrier 201a can dock (for example, allowing substrate 221 to remove from this overside port) to overside port 219 again shown in accompanying drawing 17K-L.Note that in said structure, load-carrying element 213 is arranged on door 203 tops, and shutter 203 is not subjected to the particle contamination that produces in the butt joint of substrate carrier 201a or detach procedure.This load-carrying element 213 can be formed by any suitable material (for example, as metals such as aluminium).
Accompanying drawing 18A-L has described second one exemplary embodiment of door-opening mechanism 209 ', and this door-opening mechanism is used for the door 203 of substrate carrier 201a is opened.Similarly door-opening mechanism can be used for substrate carrier 201b-d.With reference to accompanying drawing 18A-L, substrate carrier 201a transmits flange 113a (for example, allowing substrate carrier to pile up with high-bulk-density) with blade receptor 121a, 121b and suspension type and is supported on 211 places, overside port position.This door-opening mechanism 209 ' comprises load-carrying element 213, and this load-carrying element is suitable for contacting the door 203 with supporting substrate carrier 201a, and as will be described further below, is suitable for rotary door 203 below the remainder of substrate carrier 201a.Can adopt linear driving mechanism or other driver trains 217 (for example, driver train such as pneumatic, motor-driven) to dock/break away from respect to 219 pairs of substrate carriers of overside port of door-opening mechanism 209 ' and/or overside port position 211.Except when load-carrying element 213 is when rotating shown in accompanying drawing 18G-L, door 203 is outside substrate carrier 201a, and the door-opening mechanism 209 ' of accompanying drawing 18A-L and door-opening mechanism 209 class of operation of accompanying drawing 17A-L are seemingly.In this structure, door 203 can be exposed in the particle that produces in butt joint/detach procedure of substrate carrier 201a.
Accompanying drawing 19A-19H has described exemplary clip claw mechanism 301, and this clip claw mechanism can be used in processes such as the storage of substrate carrier 201a, butt joint, disengaging with respect to blade 121a, 121b fixed substrate carrier 201a (or any other substrate carrier described herein).With reference to accompanying drawing 19A-19H, this clip claw mechanism 301 comprises driver train 303 (for example, as the linear actuating device of pneumatic actuating device and so on), and this driver train is connected to (accompanying drawing 19D-19H) on the pivot member 305.Pivot member 305 comprises contact member 307 (for example, one or more wheels), and this contact member 307 is suitable for contacting the suspension type transmission flange 113a of substrate carrier 201a, thereby prevents that substrate carrier 201a and blade 121a, 121b from throwing off.
In operation, driver train 303 withdrawal (accompanying drawing 19A), thereby when contact member 307 be loaded into blade 121a, when 121b is last, it will can not disturb substrate carrier 201a at (accompanying drawing 19E).Subsequently, substrate carrier 201a is loaded onto on blade 121a, the 121b, and is supported by it (accompanying drawing 19A-B and accompanying drawing 19F).Driver train 303 extends subsequently, thereby rotates this pivot member 305 (accompanying drawing 19E), makes contact member 307 transmit flange 113a with the suspension type of substrate carrier 201a and contacts.Like this, substrate carrier 201a is with respect to blade 121a, 121b fixed clamp (for example, in any butt joint or disengaging moving process, perhaps only in the storing process of substrate carrier 201a).In order to remove substrate carrier 201a, driver train 307 withdrawals are shown in accompanying drawing 19F.Subsequently, substrate carrier 201a can remove from blade 121a, 121b.Note that accompanying drawing 19A-D has described the embodiment of overside port 219, wherein be formed with recess 309, be used to hold blade 121b and suspension type and transmit flange 113a.
Accompanying drawing 20A-B has described door-opening mechanism 209 " the 3rd one exemplary embodiment, this door-opening mechanism is used to open the door 203 of substrate carrier 201a.Similarly door-opening mechanism can be applied on the substrate carrier 201b-d.With reference to accompanying drawing 20A-B, door-opening mechanism 209 " comprise load-carrying element (not shown), this load-carrying element be used to open substrate 203 door 203 latch and support this door (to be similar to) with reference to accompanying drawing 17A-L and the described mode of accompanying drawing 18A-L.Yet, door-opening mechanism 209 " and comprise that a wheel word 401 (for example, motor), this wheel word are suitable for around the center shaft of door 203 center shaft of load-carrying element (not shown) (and/or around) rotary door 203; Also comprise linear actuating device 403, this linear actuating device is suitable for door (and/or load-carrying element) is reduced to substrate carrier 201a below.By this way, door 203 can be removed, rotate, thus basic horizontal and be reduced to substrate carrier 201a below.Door 203 can be rotated by wheel word 401 after reducing through linear actuating device 403.In at least one embodiment, this wheel word 401 can move (for example, through the linear slide block shown in one or more) together up and/or down with door 203.
Accompanying drawing 21 is lateral plans of describing several 4-substrate substrate carriers 201d, and this 4-substrate substrate carrier is arranged in Box Opener/Loader to Tool Standard (BOLTS) opening (for example, being limited by SEMI E63 standard etc.).If adopt the substrate carrier (for example, 1-, 2-or 3-substrate substrate carrier) of reduced size, other substrate carrier also can be positioned in the BOLTS opening.For example, each three substrate carrier that all are fit to 2 substrates of clamping can be positioned in the BOLTS opening of standard." small lot size " substrate carrier of other quantity can be positioned in the standard BOLTS opening.
As used herein, " small lot " size substrate carriers refers to than common " in enormous quantities " size substrate carriers that is suitable for fixing 13 or 25 substrates usually, the fixing obviously substrate carrier of less substrate.As an example, in one embodiment, small lot size substrate carriers is suitable for fixing no more than 5 substrates.Also can adopt other small lot size carrier (for example, fix 1,2,3,4 or, but obviously be less than the small lot size carrier of size substrate carriers in enormous quantities) more than 5 substrates.Generally speaking, each small lot size substrate carriers can be fixed the manual delivery that less substrate is used for substrate carrier, to such an extent as to feasible in the semiconductor devices production facilities.
In one or more embodiments, can provide the overside port position that independently to control and/or door-opening mechanism (not shown in the accompanying drawing 21) for each substrate position in the BOLTS opening, any overside port position for example described herein and/or door-opening mechanism or any other suitable overside port position and/or door-opening mechanism.By this way, each substrate carrier among the BOLTS can dock separately with independently, open, contact, close, disengaging etc.
And at least one embodiment, the substrate that is arranged in the BOLTS opening can be selected like this:
(1) is arranged on the position that top-side substrate slit in the top-side substrate carrier in the BOLTS opening occupies the top-side substrate slit (for example, slit 1) of the substrate carrier that is not higher than standard 25 substrates that are arranged among the BOLTS; And
(2) be arranged on the position that bottom substrate slit in the bottom substrate carrier in the BOLTS opening occupies the bottom substrate slit (for example, slit 25) of the substrate carrier that is not less than standard 25 substrates that are positioned among the BOLTS;
By this way, can application standard front equipment end module (EFEM) substrate treater or bot access BOLTS opening in each substrate carrier (for example, the range of movement of this substrate treater and/or robot will be enough to visit each substrate position of each substrate carrier in the BOLTS opening).By a plurality of small lot size substrate carriers being positioned with the BOLTS opening, and by with in the substrate position scope of the position limit of substrate in these small lot size substrate carriers in the standard 25 substrate substrate carriers, withdrawing from equipment interface and can retrofiting at an easy rate of the substrate carrier of 25 substrates is used for small lot size substrate carriers.
Accompanying drawing 22A-E has described the 4th one exemplary embodiment of door-opening mechanism 209 , and this door-opening mechanism is used to open the door 203 of substrate carrier 201a.Similarly door-opening mechanism can be used for substrate carrier 201b-d.With reference to accompanying drawing 22A-E, door-opening mechanism 209 comprise load-carrying element 213 (accompanying drawing 22B), and this load-carrying element is suitable for contacting the also door 203 of supporting substrate carrier 201a, and door 203 is turned to below the remainder of substrate carrier 201a, and is as described below.One or more sides of overside port 211 can be provided with passage 501 (for example, cam path), and this passage 501 is suitable for holding one or more parts 503 (for example, cam follower) of load-carrying element 213.This passage 501 can be applied to the door 203 of substrate carrier 201a is reduced and is pivoted to the remainder below of substrate carrier 201a.
In operation, substrate carrier 201a contacts with load-carrying element 213.In the embodiment shown, the unlatching parts 505 of load-carrying element 213 cooperate with the latch (will be described below) of substrate carrier 201a, and door 203 is opened.Along with substrate carrier 201a away from overside port 211 (accompanying drawing 22A), component 507 (for example, electromagnet in the embodiment shown) 203 contacts and it is maintained with door.Like this, the driver train (not shown) can be reduced to substrate carrier 201a below with load-carrying element 213 and door 203 with the passage 505 and the parts 503 (accompanying drawing 22B) of load-carrying element 213.In at least one embodiment, connecting rod 509 (accompanying drawing 22D) can be used for mobile simultaneously unlatching parts 505.
Accompanying drawing 23A-23G has described each assembly of exemplary substrate carrier 201a.Substrate carrier 201c-d can similarly be provided with.With reference to accompanying drawing 23A-G, substrate carrier 201a comprises top 601 and bottom 603.In accompanying drawing 23D-E, show the front and back transparent view of door 203 respectively.Door 203 comprises latch 205a, b and aforesaid regional 207, and substrate support member 605 (accompanying drawing 23E), and this substrate support member is suitable for contacting and support the substrate that is positioned among the substrate carrier 201a when locking.Accompanying drawing 23F-23G has described door 203, wherein protecgulum is removed to show latch 205a, b.
Accompanying drawing 23G is the amplifier section of latch 205b.As shown in accompanying drawing 23G, latch 205b comprises rotating part 607, and this rotating part can be cooperated and rotated by the open the door bolt-operating mechanism of instrument of substrate carrier.The first and second prolongation 609a, the 609b of rotating part 607 radially extend from rotating part, and cooperate guiding part 611a, the 611b of substrate carrier 201a.This guiding part 611a, 611b can be with door 203 lockings (locking) in position (for example, when prolongation 609a, 609b be in position shown in the accompanying drawing 23G).In order to open this door, can rotate rotating part 607 (in the embodiment of accompanying drawing 23G, being cw), thereby prolongation 609a, 609b break away from guiding part 611a, 611b.In at least one embodiment, rotating part 607 can rotate about 90 degree, thereby prolongation 609a, 609b approximately are positioned at horizontal surface.Holding member 613 can be arranged to prolong parts 609a, 609b with one of them and cooperate, thereby rotating part 607 is fixed on known position.In this position, door 203 can be removed from substrate carrier 201a.
In at least one embodiment of the present invention, can transmit flange 113a encode (for example, consider the ID of content, the substrate carrier 201a-d of the substrate carrier 201a-d that suspension type flange 113a is connected to, to being stored in the processing that substrate carried out among the substrate carrier 201a-d etc.) to suspension type with information.For example, label or other computer-readable recording mediums (not illustrating separately) can be attached on the suspension type flange 113a, and read by the reader that is arranged on overside port, storage location or other positions (not illustrating separately).
And, in certain embodiments, when substrate carrier 201a removes from overside port 219, make when door 203 is supported by load-carrying element 213 (accompanying drawing 17E-F), after door 203 is opened, substrate carrier 201a can be retained in the passage that is limited by overside port, and can be flow through the opening of substrate carrier 201a by the clean air that the factor interface (not shown) provides.For example, between the inside face of the outside face of substrate carrier 201a and overside port, can form torus section, and clean air can flow out through this torus section by overside port (for example, between the inside face of the outside face of substrate carrier 201a and overside port) from factor interface.Clean air flow can prevent any substrate in the particle contamination substrate carrier 201a.
Any substrate carrier described herein can be by suspension type flange or other proper supporting members or load-carrying element position (surpporting member locations) support of other type.Should be appreciated that the present invention also can adopt the substrate of any kind, as silicon chip, glass board, template, silk screen etc., no matter be form pattern or do not form pattern; And/or be used to transmit and/or handle the equipment of these substrates.
Therefore, though the present invention discloses in conjunction with its one exemplary embodiment, should be appreciated that other embodiment also can fall in the spirit and scope of the present invention that are defined by the following claims.
Claims (21)
1. substrate carrier comprises:
The zone that one substrate carrier shell, this shell have opening and be suitable for storing at least one substrate; With
One is suitable for being connected on this shell and seals the door of this opening;
It is characterized in that this door comprises the magnetic force penetrating parts, these parts are suitable for linking with the corresponding magnetic part of the door-opening mechanism of overside port.
2. substrate carrier according to claim 1 also comprises the suspension type transmission flange that is connected on this shell.
3. substrate carrier according to claim 2 is characterized in that, this suspension type transmit flange use be stored in substrate carrier in the relevant data of one or more substrates encode.
4. equipment that is used to open the substrate carrier door of substrate carrier comprises:
One load-carrying element, it is suitable for:
Support this substrate carrier at an overside port place;
Permission is pulled down door from substrate carrier; With
The hingen of pulling down is forwarded to the lower surface below of substrate carrier.
5. equipment according to claim 4 is characterized in that, this load-carrying element also is suitable for hingen is forwarded to the lower surface below of substrate carrier, thereby the front of this door approximately is parallel to the lower surface of substrate carrier.
6. equipment according to claim 4 also comprises a shell, and this shell is connected on this load-carrying element, and when door turned to the lower surface below of substrate carrier, this shell was suitable for receiving at least one in load-carrying element and the door.
7. equipment according to claim 4 is characterized in that, the front of the door that has pivoted is in the face of the lower surface of substrate carrier.
8. equipment according to claim 4 is characterized in that, the front of the door that has pivoted is back to the lower surface of substrate carrier.
9. equipment according to claim 4 is characterized in that, this load-carrying element also is suitable for opening this substrate carrier door from substrate carrier.
10. equipment according to claim 4 is characterized in that, this load-carrying element is the part of the overside port of overside port position, comprising:
At least one substrate carrier support, this support are suitable for transmitting the flange support substrate carrier with the suspension type of substrate carrier; With
One actuating device, it is suitable for moving this at least one substrate carrier support towards overside port or away from overside port.
11. equipment according to claim 10 also comprises a caliper unit, this caliper unit is suitable for clamping this suspension type and transmits flange, thereby substrate carrier is fixed on this at least one substrate carrier support.
12. equipment according to claim 10 is characterized in that:
This overside port comprises at least one passage;
This load-carrying element comprises one or more parts of sliding of being suitable in this at least one passage, thereby door is turned to the lower surface below of substrate carrier.
13. equipment according to claim 4 is characterized in that, this load-carrying element comprises:
One slewing arrangement, it is suitable for the substrate carrier door is rotated around the line of centers of door or the line of centers of support element; With
One actuating device, it is suitable for door is reduced to the lower surface below of substrate carrier.
14. a method of opening substrate carrier comprises:
Mobile substrate carrier, thereby the door contact load-carrying element of substrate carrier;
Use this door of this support member support;
The shell of this substrate carrier is moved away from this load-carrying element; With
This load-carrying element and hingen are forwarded to the lower surface below of substrate carrier.
15. method according to claim 14 also comprises with suspension type and transmits this substrate carrier of flange support.
16. method according to claim 14 is characterized in that, the lower surface below that this load-carrying element and hingen is forwarded to substrate carrier comprises:
Door is rotated around this line of centers or the line of centers of this load-carrying element; With
This is reduced to the lower surface below of substrate carrier.
17. method according to claim 14 is characterized in that, the lower surface below that this load-carrying element and hingen is forwarded to substrate carrier comprises, moves one or more parts of this load-carrying element along the passage of overside port.
18. method according to claim 14 is characterized in that, uses the step of this door of support member support to comprise, the magnetic penetrating parts of this support component is connected on this corresponding magnetic part.
19. an overside port structure comprises:
One Box Opener/Loader to Tool Standard (BOLTS) opening; With
Several overside port positions, it is arranged in this BOLTS opening, and each overside port position all is suitable for supporting substrate carrier in this BOLTS opening.
20. overside port structure according to claim 19 is characterized in that, each overside port position comprises an overside port and door-opening mechanism, and this door-opening mechanism is suitable for the door that is arranged on the substrate carrier of this overside port position is removed.
21. overside port structure according to claim 19 is characterized in that,
The top-side substrate slit that is arranged in the top-side substrate carrier in this BOLTS opening occupies the top-side substrate slit that is not higher than the substrate carrier that is arranged on 25 substrates in this BOLTS opening; With
The bottom substrate slit that is arranged in the bottom substrate carrier in this BOLTS opening occupies the bottom substrate slit that is not less than the substrate carrier that is arranged on 25 substrates in this BOLTS opening.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US54251904P | 2004-02-05 | 2004-02-05 | |
| US60/542,519 | 2004-02-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1683219A true CN1683219A (en) | 2005-10-19 |
Family
ID=35262764
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2005100697308A Pending CN1683219A (en) | 2004-02-05 | 2005-02-05 | Small lot size substrate carriers |
Country Status (3)
| Country | Link |
|---|---|
| KR (1) | KR20060041781A (en) |
| CN (1) | CN1683219A (en) |
| TW (1) | TWI307525B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103236409A (en) * | 2013-04-07 | 2013-08-07 | 沈阳拓荆科技有限公司 | Sealed pin ceramic support plate |
-
2005
- 2005-02-04 TW TW094103762A patent/TWI307525B/en not_active IP Right Cessation
- 2005-02-05 KR KR1020050010951A patent/KR20060041781A/en not_active Application Discontinuation
- 2005-02-05 CN CNA2005100697308A patent/CN1683219A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103236409A (en) * | 2013-04-07 | 2013-08-07 | 沈阳拓荆科技有限公司 | Sealed pin ceramic support plate |
| CN103236409B (en) * | 2013-04-07 | 2015-11-04 | 沈阳拓荆科技有限公司 | The ceramic support plate of closed pin |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI307525B (en) | 2009-03-11 |
| KR20060041781A (en) | 2006-05-12 |
| TW200534352A (en) | 2005-10-16 |
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Open date: 20051019 |