CN1673528A - Micro-mechanical reciprocating membrane pump - Google Patents
Micro-mechanical reciprocating membrane pump Download PDFInfo
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- CN1673528A CN1673528A CN 200410003457 CN200410003457A CN1673528A CN 1673528 A CN1673528 A CN 1673528A CN 200410003457 CN200410003457 CN 200410003457 CN 200410003457 A CN200410003457 A CN 200410003457A CN 1673528 A CN1673528 A CN 1673528A
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Abstract
The present invention relates to micro mechanical reciprocating membrane pump, and is one kind of micro mechanical reciprocating membrane pump for biochemical microanalysis. The micro mechanical reciprocating membrane pump has piezoelectric driving device as driving source, which makes the membrane vibrate to force the pump cavity to suck in and pump out fluid reciprocally; inertial fairing flow channel as no-motion valve to make the flow damp in some direction greater than that in the other direction; inertial ring cavity to further increase the damp difference between two directions. The present invention has simple structure, can drive fluid containing relatively large grain, has no damage to cell or macro molecule in fluid, no dead volume and constant flow rate and other advantages, and is suitable for driving micro volume fluid in micro flow channel of cross section size in decades and hundreds microns.
Description
Technical field
The present invention relates to the reciprocal diaphragm pump of a kind of micromechanics, particularly relate to the reciprocal diaphragm pump of micromechanics that the biochemistry microanalysis is used.
Background technique
Adopt the reciprocal diaphragm pump of micromechanics in the biochemistry microanalysis widely, it plays the effect of pumping sample, reagent, buffer solution in steps such as sample introduction, analysis, cleaning.The working principle of the general reciprocal diaphragm pump of micromechanics is: connect selection valve at the pump chamber two ends, cover diaphragm above pump chamber, diaphragm moves back and forth, and forces pump chamber to suck fluid from an end, discharges fluid from the other end.The reciprocal diaphragm pump of micromechanics can have movement parts one-way valve, no movement parts selection valve to be divided into two big classes according to employing.
Employing has the reciprocal diaphragm pump of the micromechanics of movement parts one-way valve, its advantage is to stop the static state backflow, and shortcoming is that life-span weak point, the valve port movement parts pair cell of structure fabrication complexity, movement parts has certain destruction, driving to contain than the fluid of solid particle can influence sealing valve port greatly, pump pressure is low, output ripple is big with big molecule.Chinese patent 95117829.6 " silicon microheating actuating pump and manufacturing process thereof " discloses a kind of employing, and movement parts one-way valve, pump chamber are arranged is the micromechanics pump of simply connected domain.
Adopt the reciprocal diaphragm pump of micromechanics of no movement parts selection valve, its advantage is that simple in structure, easy making, life-span are long, and shortcoming is to stop static the backflow.Do not damage owing to allow fluid to contain larger particles, pair cell and big molecule, adopt the reciprocal diaphragm pump of micromechanics of no movement parts one-way valve to be specially adapted to the biochemistry microanalysis.It is the micromechanics pump of simply connected domain mouthful as no movement parts valve, pump chamber that Chinese patent 96232181 " Silicon micro-machinery pump " discloses a kind of awl that adopts.Up to now, the major defect that adopts the reciprocal diaphragm pump of micromechanics of no movement parts one-way valve is that pump pressure deficiency, output ripple are big, has limited its application area.
Chinese patent 01207658 " bicavate bimetal film heat driven minisize pump " discloses the micromechanics pump of double pump chamber parallel-connection structure, and anti-phase action can reduce output ripple between the two-chamber.Chinese patent 02132855.2 " multiple-cavity piezoelectric film driven pump " adopts many pump chambers series and parallel composite structure, makes the formation phase relationship of working between pump chamber, can obtain higher pump pressure, littler output ripple.Adopting in the patent has the movement parts one-way valve, but its patent principle is equally applicable to adopt the reciprocal diaphragm pump of micromechanics of no movement parts one-way valve.The shortcoming of many pump chambers series and parallel composite structure is a comparatively bulky complex of structure, and it is big that pump chamber takies Fluid Volume.
By the U. S. Patent 5,876,187 and the US6 of people such as Fred K.Foster invention, 227, it is the reciprocal diaphragm pump of micromechanics of simply connected domain as no movement parts valve, single pump chamber, pump chamber that 809B1 discloses a kind of inertia rectification runner that adopts.This pump overall structure is made up of the silicon pump housing, quartz diaphragm, three parts of piezoelectric chip, it is characterized in that the no movement parts valve that etches adopts a kind of inertia rectification runner on the silicon pump housing, do not have the movement parts valve than awl mouth commonly used and have better flow resistance choosing, can obtain bigger pump pressure to effect.This kind inertia rectification runner is based on principle, the structure of nineteen twenty by the U. S. Patent 1329559 of Nicola Tesla invention, the moment of inertia of fluid is combined with flow passage structure, positive and negative both direction is flowed experience different mobile paths, thereby produce different flow resistances.
By this Micropump of people such as Fred K.Foster invention, only consider and in no movement parts valve, utilize the inertia rectification, whole flow process in the pump is not carried out the inertia rectification; For the application of biochemical analysis, it is still not high enough that it can obtain pump pressure, and output ripple is still very big.The pump chamber that its adopts is identical with the reciprocal diaphragm pump pump chamber of existing micromechanics, is the simply connected domain chamber, take Fluid Volume greatly, stagnation period is uncertain therein, cleaning process is long for fluid.
Summary of the invention
There are not the problems referred to above of the reciprocal diaphragm pump of movement parts valve for solving micromechanics, the present invention proposes a kind of micromechanics pump of realizing the rectification of twin-stage inertia in the whole flow process in pump, adopting non-simply connected domain pump chamber, and purpose is to improve pump pressure, reduce output ripple, reduce pump chamber and take Fluid Volume.
The technical solution used in the present invention is as follows:
The micromechanics pump is by pump housing substrate and the bonding one that forms of diaphragm bonding, diaphragm and piezoelectric vibrator.The circular groove that pump housing upper surface of base plate etches, round platform, and form inertia rings an actor's rendering of an operatic tune between the diaphragm; Inertia rings an actor's rendering of an operatic tune is connected with input cavity, output cavity respectively by two inertia rectification runners.Inertia rectification runner segment port and inertia rings an actor's rendering of an operatic tune form tangent position relation, and form mouth-to-mouth position relation between the port of two inertia rectification runners.In the inertia rectification runner that is connected with input cavity, the flow resistance that flows to inertia rings an actor's rendering of an operatic tune from input cavity is less than the flow resistance that flows to input cavity from inertia rings an actor's rendering of an operatic tune; In the inertia rectification runner that is connected with output cavity, the flow resistance that flows to inertia rings an actor's rendering of an operatic tune from output cavity is greater than the flow resistance that flows to output cavity from inertia rings an actor's rendering of an operatic tune.
The present invention does not have the reciprocal diaphragm pump of movement parts valve with micromechanics in the background technique and compares, and the beneficial effect that has is:
1, the invention provides the reciprocal diaphragm pump of micromechanics, adopt the twin-stage inertia rectifier structure of inertia rectification runner, inertia rings an actor's rendering of an operatic tune, can improve and flow to delivery outlet from the inlet opening, flow to the mobile damping error of two flow directions in inlet opening, thereby realize bigger pump pressure from delivery outlet.
2, the invention provides the reciprocal diaphragm pump of micromechanics, suck fluid stage at inertia rings an actor's rendering of an operatic tune, the circulation that has been present in inertia rings an actor's rendering of an operatic tune can be to producing the effect of intercepting from output cavity to the backflow of inertia rings an actor's rendering of an operatic tune, thereby reduce the output ripple that delivery outlet refluxes and causes.
3, the invention provides the reciprocal diaphragm pump of micromechanics, adopt the circular groove pump chamber of non-simply connected domain, make pump chamber become one section runner, help reducing pump chamber and take the test solution volume, and the time that makes fluid pass through pump chamber shortens; Form mutual driving relationship between the section fluid of front and back, fluid is waiting time unanimity in pump chamber, helps improving the conformity of biochemical analysis; Fluid can not form delay in pump chamber, avoided dead volume, helps cleaning, changing liquid.
Description of drawings
Fig. 1, Fig. 2 are single chamber pump structure principle schematic of the specific embodiment of the invention; Fig. 1 is the sectional drawing on the A-A plane of Fig. 2, and Fig. 2 is the sectional drawing on the B-B plane of Fig. 1.
Among the figure: pump housing substrate 1, diaphragm 2, piezoelectric vibrator 3, inertia rectification runner 4 and 4 ', circular groove 5 ', annular chamber 5, input slot 6, output magazine 7, round platform 8.
Fig. 3 is inertia rectification runner 4 of the present invention or 4 ' structural representation.
Fig. 4 a is that the present invention's's single chamber first cycle of pump work (when sucking fluid) momentum concerns schematic representation; Fig. 4 b is that the present invention's's single chamber second cycle of pump work (when discharging fluid) momentum concerns schematic representation; Fig. 4 c is that the present invention's single chamber first cycle of pump work (when sucking fluid) circulation concerns schematic representation to the momentum that the output backflow produces the effect of intercepting.
Fig. 5 a is the mobile momentum schematic representation in first cycle of double pump of the present invention chamber push-push operation (upper and lower pump chamber all sucks fluid); Fig. 5 b is the mobile momentum schematic representation in second cycle of double pump of the present invention chamber push-push operation (upper and lower pump chamber is all discharged fluid); Fig. 5 c is the mobile momentum schematic representation of double pump of the present invention chamber first cycle of anti-phase work (go up pump chamber and suck fluid, following pump chamber discharge fluid); Fig. 5 d is the mobile momentum schematic representation of double pump of the present invention chamber second cycle of anti-phase work (go up pump chamber and discharge fluid, following pump chamber suction fluid).
Fig. 6 is operation cycle interior delivery outlet cross section " equivalent flow velocity-time " plotted curve of the single chamber of the present invention pump.
Among the figure: the equivalent flow velocity is the mean velocity of multiple spot on the delivery outlet cross section, and on the occasion of for to reflux to pump chamber from delivery outlet, equivalent flow velocity negative value is for to pump from delivery outlet.Flow is approximately equal to the equivalent flow velocity and the delivery outlet cross section is long-pending.
Embodiment
The invention will be further described below in conjunction with accompanying drawing.
As shown in Figure 1 and Figure 2, micromechanics pump of the present invention is by pump housing substrate 1 and diaphragm 2 bondings, diaphragm 2 and the piezoelectric vibrator 3 bonding one that form.Segment port pump housing substrate 1 upper surface etches circular groove 5 ', round platform 8, and forms inertia rings an actor's rendering of an operatic tune 5 between the diaphragm 2; Inertia rings an actor's rendering of an operatic tune 5 is connected with input cavity 6, output cavity 7 respectively by two inertia rectification runners 4,4 '.Inertia rectification runner 4,4 ' segment port and inertia rings an actor's rendering of an operatic tune 5 form tangent position relation, and form mouth-to-mouth position relation between two the inertia rectification runners 4,4 ' port.In the inertia rectification runner 4 that is connected with input cavity 6, the flow resistance that flows to inertia rings an actor's rendering of an operatic tune 5 from input cavity 6 is less than the flow resistance that flows to input cavity 6 from inertia rings an actor's rendering of an operatic tune 5; In the inertia rectification runner 4 ' that is connected with output cavity 7, the flow resistance that flows to inertia rings an actor's rendering of an operatic tune 5 from output cavity 7 is greater than the flow resistance that flows to output cavity 7 from inertia rings an actor's rendering of an operatic tune 5.
Said inertia rectification runner 4,4 ' has identical physical dimension.
Said round platform 8 does not form one with diaphragm 2, makes the diaphragm 2 can up-down vibration.
Said pump housing substrate 1 material is silicon chip or quartz, and diaphragm 2 materials are quartz or copper.
Said piezoelectric vibrator 3 adopts piezoelectric chip.
At inertia rectification runner 4,4 ' and inertia rings an actor's rendering of an operatic tune 5 tangent joints, the flow resistance that further improves opposite two flow directions is poor.Shown in Fig. 4 a, when inertia rings an actor's rendering of an operatic tune 5 sucks fluid, form circulation in inertia rings an actor's rendering of an operatic tune 5, the flow tendency unanimity in circulation direction and the inertia rectification runner 4 that is connected input cavity 6, and opposite with flow tendency in the inertia rectification runner 4 ' that is connected output cavity 7.Shown in Fig. 4 b, when pump chamber is discharged fluid, keep circulation in inertia rings an actor's rendering of an operatic tune, the flow tendency unanimity in circulation direction and the inertia rectification runner 4 ' that is connected output cavity 7, and opposite with flow tendency in the inertia rectification runner 4 that is connected input cavity 6.Because equidirectional momentum (or flow tendency) can strengthen mutually, opposite direction momentum (or flow tendency) can weaken mutually, the long and is: the total flow resistance that flows to output cavity 7 directions from input cavity 6 is reduced, and the total flow resistance that flows to input cavity 6 directions from output cavity 7 is improved.The raising of the total flow resistance difference of both direction helps to produce bigger output pump pressure.
Shown in Fig. 4 c, when inertia rings an actor's rendering of an operatic tune 5 sucked fluid stage, already present circulation can inject the inertia rectification runner 4 ' that connects output cavity 7, to intercepting effect from output cavity 7 to the mobile generation of inertia rings an actor's rendering of an operatic tune 5, can effectively reduce output and reflux, thereby reduce output ripple.
Can be similar to the Changing Pattern of flow in the reflection one-period by Fig. 6; Because flow is approximately equal to the equivalent flow velocity and the delivery outlet cross section is long-pending, can analyze, the output flow in the one-period is much larger than return flow.It can also be seen that from figure because the effect of inertia circulation, the time of discharging fluid from delivery outlet is much larger than the time that sucks fluid.
As shown in Figure 5, the present invention can also adopt the structure in double pump chamber, two pump chamber collaborative works.When two inertia rings an actor's rendering of an operatic tune 5 during push-push operation, can improve the output pump pressure shown in Fig. 5 a, Fig. 5 b; When two inertia rings an actor's rendering of an operatic tune 5 during anti-phase work, can reduce output ripple shown in Fig. 5 c, Fig. 5 d.The present invention can also adopt other many pump chambers composite structure.
The present invention and U. S. Patent 5,876,187 and US6,227, the main structure difference of the reciprocal diaphragm pump of the disclosed micromechanics of 809B1 is: a. the present invention adopts ring runner formula pump chamber, U. S. Patent 5,876,187 and US6,227, what 809B1 adopted is the cylindrical pump chamber of simply connected domain.B. the present invention make inertia rectification runner 4,4 ' and inertia rings an actor's rendering of an operatic tune 5 form tangent position relation, and two inertia rectification runners 4, the 4 ' ports that are connected with inertia rings an actor's rendering of an operatic tune 5 form mouth-to-mouth position and concern.U. S. Patent 5,876,187 and US6,227, inertia rectification runner segment port is vertical the connection with the cylindrical pump chamber ways of connecting of simply connected domain among the 809B1, and does not require relative position.
Claims (5)
1, the reciprocal diaphragm pump of a kind of micromechanics, it is characterized in that it comprises: by pump housing substrate [1] and diaphragm [2] bonding, diaphragm [2] and the bonding one that forms of piezoelectric vibrator [3], pump housing substrate [1] upper surface etches circular groove [5 '], round platform [8], and forms inertia rings an actor's rendering of an operatic tune [5] between the diaphragm [2]; Inertia rings an actor's rendering of an operatic tune [5] is by being connected with input cavity [6], output cavity [7] respectively two inertia rectification runners [4], [4 ']; Inertia rectification runner [4], [4 '] segment port and inertia rings an actor's rendering of an operatic tune [5] form tangent position relation, and form mouth-to-mouth position relation between the port of two inertia rectification runners 4, [4 ']; In inertia rectification runner [4] that input cavity [6] is connected, the flow resistance that flows to inertia rings an actor's rendering of an operatic tune [5] from input cavity [6] is less than the flow resistance that flows to input cavity [6] from inertia rings an actor's rendering of an operatic tune [5]; In inertia rectification runner [4 '] that output cavity [7] is connected, the flow resistance that flows to inertia rings an actor's rendering of an operatic tune [5] from output cavity [7] is greater than the flow resistance that flows to output cavity [7] from inertia rings an actor's rendering of an operatic tune [5].
2, the reciprocal diaphragm pump of a kind of micromechanics according to claim 1 is characterized in that: have said inertia rectification runner [4], [4 '] identical physical dimension.
3, the reciprocal diaphragm pump of a kind of micromechanics according to claim 1 is characterized in that: said round platform [8] and diaphragm [2] do not form one, make the diaphragm [2] can up-down vibration.
4, the reciprocal diaphragm pump of a kind of micromechanics according to claim 1 is characterized in that: said pump housing substrate [1] material is silicon chip or quartz, and diaphragm [2] material is quartz or copper.
5, the reciprocal diaphragm pump of a kind of micromechanics according to claim 1 is characterized in that: said piezoelectric vibrator [3] adopts piezoelectric chip, and driven diaphragm [2] is done deflection deformation, produces simple harmonic oscillation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2004100034574A CN100458152C (en) | 2004-03-24 | 2004-03-24 | Micro-mechanical reciprocating membrane pump |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2004100034574A CN100458152C (en) | 2004-03-24 | 2004-03-24 | Micro-mechanical reciprocating membrane pump |
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| CN1673528A true CN1673528A (en) | 2005-09-28 |
| CN100458152C CN100458152C (en) | 2009-02-04 |
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| CNB2004100034574A Expired - Fee Related CN100458152C (en) | 2004-03-24 | 2004-03-24 | Micro-mechanical reciprocating membrane pump |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101490419B (en) * | 2006-12-09 | 2011-02-02 | 株式会社村田制作所 | Piezoelectric pump |
| US9395050B2 (en) | 2010-05-21 | 2016-07-19 | Hewlett-Packard Development Company, L.P. | Microfluidic systems and networks |
| US9963739B2 (en) | 2010-05-21 | 2018-05-08 | Hewlett-Packard Development Company, L.P. | Polymerase chain reaction systems |
| US10132303B2 (en) | 2010-05-21 | 2018-11-20 | Hewlett-Packard Development Company, L.P. | Generating fluid flow in a fluidic network |
| US10173435B2 (en) | 2010-05-21 | 2019-01-08 | Hewlett-Packard Development Company, L.P. | Fluid ejection device including recirculation system |
| CN109690310A (en) * | 2016-07-04 | 2019-04-26 | 弗劳恩霍夫应用研究促进协会 | Equipment with minisize fluid actuator |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6227809B1 (en) * | 1995-03-09 | 2001-05-08 | University Of Washington | Method for making micropumps |
| US5876187A (en) * | 1995-03-09 | 1999-03-02 | University Of Washington | Micropumps with fixed valves |
| CN1047432C (en) * | 1995-12-08 | 1999-12-15 | 清华大学 | Silicon microheating actuating pump and its mfg. tech |
| CN2263720Y (en) * | 1996-06-28 | 1997-10-01 | 东南大学 | Silicon micro-machinery pump |
| JP3843677B2 (en) * | 1999-12-22 | 2006-11-08 | 松下電工株式会社 | Piezoelectric diaphragm pump and manufacturing method thereof |
| CN2469208Y (en) * | 2001-03-23 | 2002-01-02 | 清华大学 | Dual cavity, double metallic film and heat driven type miniature pump |
| DE10238600A1 (en) * | 2002-08-22 | 2004-03-04 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Peristaltic micropump |
| CN1179127C (en) * | 2002-09-03 | 2004-12-08 | 吉林大学 | Multiple-cavity piezoelectric film driven pump |
-
2004
- 2004-03-24 CN CNB2004100034574A patent/CN100458152C/en not_active Expired - Fee Related
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101490419B (en) * | 2006-12-09 | 2011-02-02 | 株式会社村田制作所 | Piezoelectric pump |
| US9395050B2 (en) | 2010-05-21 | 2016-07-19 | Hewlett-Packard Development Company, L.P. | Microfluidic systems and networks |
| US9963739B2 (en) | 2010-05-21 | 2018-05-08 | Hewlett-Packard Development Company, L.P. | Polymerase chain reaction systems |
| US10132303B2 (en) | 2010-05-21 | 2018-11-20 | Hewlett-Packard Development Company, L.P. | Generating fluid flow in a fluidic network |
| US10173435B2 (en) | 2010-05-21 | 2019-01-08 | Hewlett-Packard Development Company, L.P. | Fluid ejection device including recirculation system |
| US10272691B2 (en) | 2010-05-21 | 2019-04-30 | Hewlett-Packard Development Company, L.P. | Microfluidic systems and networks |
| US10415086B2 (en) | 2010-05-21 | 2019-09-17 | Hewlett-Packard Development Company, L.P. | Polymerase chain reaction systems |
| US10807376B2 (en) | 2010-05-21 | 2020-10-20 | Hewlett-Packard Development Company, L.P. | Fluid ejection device including recirculation system |
| US11260668B2 (en) | 2010-05-21 | 2022-03-01 | Hewlett-Packard Development Company, L.P. | Fluid ejection device including recirculation system |
| CN109690310A (en) * | 2016-07-04 | 2019-04-26 | 弗劳恩霍夫应用研究促进协会 | Equipment with minisize fluid actuator |
| CN109690310B (en) * | 2016-07-04 | 2022-04-15 | 弗劳恩霍夫应用研究促进协会 | Apparatus with micro-fluidic actuator |
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| CN100458152C (en) | 2009-02-04 |
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