CN1652664A - Substrate duster - Google Patents
Substrate duster Download PDFInfo
- Publication number
- CN1652664A CN1652664A CN 200410033495 CN200410033495A CN1652664A CN 1652664 A CN1652664 A CN 1652664A CN 200410033495 CN200410033495 CN 200410033495 CN 200410033495 A CN200410033495 A CN 200410033495A CN 1652664 A CN1652664 A CN 1652664A
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- substrate
- dust
- rotating brushes
- conveyer
- rollers
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Abstract
To provide a substrate dust removal apparatus capable of sucking and removing approximately whole of dust scraped from a surface of the substrate by a rotating rotation brush roller. The two rotation brush rollers 20 rotating toward reverse directions each other are press-contacted with a surface of a substrate 10 placed and conveyed on a conveyor directed toward a direction crossing the substrate 10. Then, the dust deposited on the surface of the substrate 10 is scraped off from the surface of the substrate by the rotating rotation brush roller 20, is floated between the two rotation brush roller 20 and is deposited on the two rotation brush roller 20. Then, the dust is sucked to the inner side of a dust removal means 90 while passing through a dust-collection port 92 of the dust removal means continuously covering an upper periphery of the two rotation brush roller 20 and is discharged.
Description
Technical field
The present invention relates to be used to remove substrate dust removal attached to the dust on the substrates such as printed wiring board.
Background technology
In the substrate of above-mentioned printed wiring board etc., when on this substrate surface, adhering to dust such as scolding tin chip or dust or dust,, have the danger of the function that undermines this substrate because the resistance value of this dust attachment area can be descended degradation.The decline of adhering to the resistance value that causes of this because dust is fatal for the nearest semiconductor device that utilizes faint work about electric power with the situation of substrate.
Thereby, in the assembling operation of the substrate of this semiconductor device by using etc., add the operation of removing the dust on this substrate usually.
For the dust cleaning apparatus of the dedusting operation that is used for this substrate, there is the spy to drive the dust cleaning apparatus that the 2003-334499 communique is described.
Utilizing this dust cleaning apparatus to remove in the method for dust, as shown in Figure 4, will along with the opposite direction rotating rotation brush roller 20 of carrying direction (direction of arrow among the figure) of carrying substrate 10, point to the direction of crosscut substrate 10, touch the surface of substrate 10, utilize this rotating rotation brush roller 20, scrape lip-deep dust from the surface of substrate 10 attached to substrate 10.Simultaneously, the dust with the surface that utilizes rotating rotation brush roller 20 from this substrate 10 scrapes by the dust collecting opening 42 of the dust collect plant around the top that covers rotating brushes roller 20, is attracted to the inboard of dust collect plant 40, and gets rid of.
But, under the dust collection method that utilizes above-mentioned dust cleaning apparatus is removed situation attached to the dust on the substrate 10, utilize the dust that scrapes from the surface of substrate 10 with the carrying direction rightabout rotating rotation brush roller 20 of this substrate 10, be subjected to the revolving force of this rotating rotation brush roller 20, spread extensively at the superjacent air space of the substrate 10 in the place ahead of rotating brushes roller 20 and fly upward.Simultaneously, the dust that great majority fly upward extensively at the superjacent air space of this substrate 10 can not be attracted to the inboard of dust collect plant 40 reliably by the dust collecting opening 42 around the top that is configured in rotating brushes roller 20, and adhere again on the substrate 10 below it.
Therefore,, can not utilize rotating rotation brush roller 20 to scrape lip-deep whole dust, and have no to be attracted to the inboard of dust collect plant 40 with omitting reliably and to remove attached to this substrate 10 utilizing above-mentioned dust cleaning apparatus to remove in the method for dust.
Summary of the invention
The present invention forms in order to solve this problem, its purpose is, provide a kind of can be with the most dust that utilizes rotating rotation brush roller to scrape from substrate surface, have no the substrate dust removal that attracts reliably and remove with omitting from the periphery of substrate.
In order to reach this purpose, substrate dust removal of the present invention is characterized in that, it comprises: the board carrying conveyer; Direction along the crosscut substrate is crimped onto lift-launch on the substrate surface that is handled upside down on this conveyer, and former and later two rotating brushes rollers of closely arranging mutually; Roller segment with the substrate surface side that is crimped onto these two rotating brushes rollers points to the mode that the inboard between two rotating brushes rollers rotates respectively, makes two rotating brushes rollers whirligig of rotation round about mutually; Dust cleaning apparatus with the top dust collecting opening on every side that covers aforementioned two rotating brushes rollers continuously, by aforementioned dust collecting opening attract to swim between these two rotating brushes rollers dust and attached to the dust on these two rotating brushes rollers, and with the dust cleaning apparatus of its eliminating.
In this substrate dust removal, former and later two rotating brushes rollers of closely arranging mutually along the direction of crosscut substrate, can be crimped onto lift-launch on the substrate surface that is handled upside down on the conveyer.Meanwhile, with these former and later two rotating brushes rollers of closely arranging mutually, utilize whirligig, point to the mode that the inboard between two rotating brushes rollers rotates respectively, can make it to rotate round about mutually with the roller segment of the substrate surface side that is crimped onto these two rotating brushes rollers.Simultaneously, pointing to the mode that the inboard between two rotating brushes rollers rotates respectively so that be crimped onto the roller segment of this substrate surface side, mutually in two rotating brushes rollers that rotate round about, utilization is crimped onto two the rotating brushes rollers of lift-launch on the substrate surface that is handled upside down on the conveyer, can be with attached to the dust of substrate front portion on the substrate surface at substrate rear portion, scrape from substrate surface successively, and be rolls-up onto inboard between these former and later two rotating brushes rollers.Simultaneously, can make the dust that is rolls-up onto the inboard between these two rotating brushes rollers, be in two states between the rotating brushes roller that swim in, also can make it to be in state attached on these two rotating brushes rollers.Simultaneously, can will swim between two rotating brushes rollers, perhaps attached to the dust on two rotating brushes rollers, by the dust collecting opening of the dust cleaning apparatus around the top that covers these two rotating brushes rollers continuously, be attracted to the inboard of dust cleaning apparatus, and get rid of.
At this moment, point to the mode that the inboard between two rotating brushes rollers rotates respectively with the roller segment that is crimped onto this substrate surface side, that utilizes mutually that former and later two rotating brushes rollers of rotation round about scrape flies upward dust between two rotating brushes rollers, be in the state that is sandwiched between former and later two rotating brushes rollers of mutually closely arranging, prevent its be subjected between these former and later two rotating brushes rollers to the revolving force of its outside rotating rotation brush roller and diffusion extensively.That is, these two rotating brushes rollers play a part to prevent the protection walls that the dust that flies upward spreads extensively to the outside of two rotating brushes rollers between two rotating brushes rollers.Simultaneously, the most dust that scrapes from substrate surface that the state between these former and later two rotating brushes rollers of being clipped in is floating, dust collecting opening by the dust cleaning apparatus around the top that covers these former and later two rotating brushes rollers continuously attracted to the inboard of dust cleaning apparatus, and is excluded.
Meanwhile, utilize mutually that former and later two rotating brushes rollers of rotation round about scrape from substrate surface, attached to the most dust on two rotating brushes rollers of this rotation, also by the continuous dust collecting opening that covers the top dust cleaning apparatus on every side of these former and later two rotating brushes rollers, attracted to the inboard of dust cleaning apparatus, be excluded.
Consequently, the most dust that former and later two rotating brushes rollers that utilize this rotation can be scraped from substrate surface, dust collecting opening by the dust cleaning apparatus around the top that covers these former and later two rotating brushes rollers continuously, have no to be attracted to reliably the inboard of dust cleaning apparatus with omitting, and get rid of.
In substrate dust removal of the present invention, can have the adjusting device that width that makes conveyer and the width that carries the substrate that is handled upside down on this conveyer are as one man adjusted width.
In this case, utilize this adjusting device, can adjust the width of the width of conveyer, make that the width of conveyer is consistent with the width that carries the substrate that is handled upside down on this conveyer.Simultaneously, the substrate that dedusting is used carries reliably on the conveyer of the width that its width adjustment one-tenth is consistent with the width of substrate, this substrate can be carried with stable status on conveyer.
In substrate dust removal of the present invention, can have and make two rotating brushes rollers with respect to carrying the substrate that on conveyer, is handled upside down, the lowering or hoisting gear of lifting along the vertical direction.
In this case, carrying under the various electronic component situations such as semiconductor device is being installed on the substrate surface that is handled upside down on this conveyer, utilize lowering or hoisting gear, can be with two rotating brushes rollers with respect to carrying the substrate that on this conveyer, is handled upside down, with the height that is installed in the electronic component on this substrate surface as one man, rise to the top of predetermined distance.Simultaneously, make lift-launch the substrate that electronic component is installed that is handled upside down on this conveyer can with two rotating brushes rollers do not have contiguously, smoothly resistance ground pass through these two rotating brushes rollers below.Simultaneously, can prevent to be installed in electronic component on this substrate surface and the collision of two rotating brushes rollers and the damage that causes.
Secondly, scrape at two rotating brushes rollers wanting to utilize rotation under the situation of lip-deep dust of other substrate that electronic component is not installed that lift-launch is being handled upside down on this conveyer, can utilize lowering or hoisting gear once more, to utilize lowering or hoisting gear to rise to two rotating brushes rollers of predetermined distance top, with respect to carrying the substrate that on conveyer, is handled upside down, drop to the below of predetermined distance.Simultaneously, two rotating brushes rollers of rotation are crimped onto lift-launch reliably on the surface of other substrate that electronic component is not installed that is handled upside down on this conveyer, can utilize two rotating brushes rollers of this rotation, scrape attached to the dust on other substrate surface from substrate surface.
In substrate dust removal of the present invention, can have remove substrate that lift-launch is handled upside down on the conveyer in the rear of two rotation hair rollers or the place ahead with static remove electrostatic equipment.
In this case, make the substrate of two rotating brushes rollers that are crimped onto rotation, even be subjected to the influence of the frictional force that between these two rotating brushes rollers and substrate, produces and be in the state of static electrification, when on this substrate is carried conveyer at the rear of two rotating brushes rollers, being handled upside down, can with on this substrate with the static utilization go electrostatic equipment to remove.Simultaneously, the dust that can prevent to swim in substrate periphery by this substrate with electrostatic attraction adhere again on the substrate.
Perhaps, when on substrate carries conveyer in the place aheads of two rotating brushes rollers, being handled upside down, can utilize electrostatic equipment remove in advance this substrate with static.Simultaneously, the dust that can prevent to swim in substrate periphery by this substrate with electrostatic attraction and be attached on the substrate.
In substrate dust removal of the present invention, can have and carry injection air on the substrate surface that is handled upside down on the conveyer in the rear of two rotating brushes rollers or the place ahead, will attached in the groove that is engraved on this substrate surface or/be arranged on the dust in the through hole on this substrate, the air jet system that utilizes air to blow off and remove.
In this case, utilize this air jet system, to carrying injection air on the surface of the substrate that is handled upside down on the conveyer in the rear of two rotating brushes rollers or the place ahead, will be attached in the groove of scribing on this substrate surface or/and be arranged on that this two rotating brushes rollers that can not utilize rotation of dust in the through hole on this substrate scrape and the dust removed, can utilize air in this groove or/be blown out to that it is outside and remove in the through hole.
As described above, according to substrate dust removal of the present invention, former and later two rotating brushes rollers that utilize this rotation are not spread to this periphery extensively from the most dust that substrate surface scrapes, and have no reliably to be attracted to the inboard of dust cleaning apparatus with omitting and get rid of.
Description of drawings
Fig. 1 is the theory structure key diagram of substrate dust removal of the present invention.
Fig. 2 is the front view of substrate dust removal of the present invention.
Fig. 3 is the vertical view of the state that unloads dust cleaning apparatus of substrate dust removal of the present invention.
Fig. 4 is the theory structure key diagram of the dust cleaning apparatus of prior art.
Wherein, description of reference numerals is as follows:
10 substrates
20 rotating brushes rollers
30 apparatus main bodies
40 dust collect plants
60 conveyers
80 whirligigs
90 dust cleaning apparatuss
The dust collecting opening of 92 dust cleaning apparatuss
100 adjusting devices
110 lowering or hoisting gears
120 remove electrostatic equipment
130 air jet systems
Embodiment
Below, according to the description of drawings embodiments of the present invention.
Fig. 1 to Fig. 3 represents the preferred implementation of substrate dust removal of the present invention, and Fig. 1 is its theory structure key diagram, and Fig. 2 is its front view, and Fig. 3 is the vertical view that unloads the state of its dust cleaning apparatus.Below, this substrate dust removal is described.
In this substrate dust removal, as shown in Figures 2 and 3, comprise and carry the also conveyer 60 of carrying substrate 10.The structure of conveyer 60 is, makes each seamless belt 62 of pair of right and left, synchronously circulates with same speed along same direction in the inboard of a pair of conveying machine frame 64.Simultaneously, make the substrate 10 that to carry on whole pair of right and left seamless belt 62, along the loop direction of seamless belt 62 and the structure of seamless belt 62 same speed carryings.
Former and later two microscler rotating brushes rollers 20 are crimped onto lift-launch on the surface of the substrate 10 that is handled upside down on the conveyer 60 along the direction of crosscut substrate 10, mutually near the top midway that can arrange with rotating freely and be bearing in conveyer 60.
The inboard of pointing between two rotating brushes rollers 20 for the roller segment that makes the face side that is crimped onto this substrate 10 rotates respectively, whirligig 80 with these two rotating brushes rollers 20 rotate mutually round about is connected with the rotating shaft 22 of two rotating brushes rollers.Whirligig 80 is made of the electro-motor 82 of band gear and the gear mechanism 84 that the revolving force of the output shaft of this motor is delivered on each rotating shafts 22 of two rotating brushes rollers.
Around the top of two rotating brushes rollers 20, be attracted the dust that swims between these two rotating brushes rollers 20 and be covered with continuously attached to the dust on these two rotating brushes rollers 20 and with dust collecting opening 92 ground very close to each other of the dust cleaning apparatus 90 of its eliminating.Dust cleaning apparatus 90 is made of vacuum pump (not shown) etc., its structure is the top dust collecting opening 92 on every side by covering two rotating brushes rollers 20 continuously, with swim in two between the rotating brushes roller 20 dust and attached to the dust on two rotating brushes rollers 20, be attracted to conduit 94 inboard of dust cleaning apparatus 90 and the structure of getting rid of.
Fig. 1 is to substrate dust removal shown in Figure 3, constitute in a manner described, in this substrate dust removal, as shown in Figure 1, can be with former and later two rotating brushes rollers 20 of above the pars intermedia of conveyer 60, closely arranging mutually, along the direction of crosscut substrate 10, be crimped onto lift-launch on the surface of the substrate 10 that is handled upside down on the conveyer 60.Meanwhile, point to inboard between two rotating brushes rollers 20 and the mode of rotation respectively with the roller segment of the face side that is crimped onto this substrate 10, utilize whirligig 80, can make former and later two rotating brushes rollers 20 rotation round about mutually of closely arranging mutually.Simultaneously, point to mode inboard and rotation respectively former and later two rotating brushes rollers 20 of rotation round about mutually between two rotating brushes rollers with the roller segment of the face side that is crimped onto this substrate 10, utilization is crimped onto lip-deep two rotating brushes rollers 20 of the substrate 10 that lift-launch is handled upside down on conveyer 60, can with attached to from the front portion of substrate 10 to the substrate 10 lip-deep dust at the rear portion of substrate 10, from the surface of substrate 10, scrape successively, be rolls-up onto between two rotating brushes rollers 20.Simultaneously, the dust that is rolls-up onto between these two rotating brushes rollers 20 is in swims in two states between the rotating brushes roller 20, perhaps be in attached to the state on these two rotating brushes rollers 20.Simultaneously, can with swim between these two rotating brushes rollers 20 or attached to the dust on these two rotating brushes rollers, by the dust collecting opening 92 of the dust cleaning apparatus around the top that covers these two rotating brushes rollers 20 continuously, be attracted to the inboard of dust cleaning apparatus 90, and get rid of.
At this moment, the mode of rotating respectively with the inboard of roller segment between two rotating brushes rollers 20 of the face side that is crimped onto this substrate 10, the dust that prevents to utilize mutually former and later two rotating brushes rollers of rotation round about 20 that scrape, flies upward above between two rotating brushes rollers 20 to the direction of rotation of rotating brushes roller 20, be in the state that is sandwiched between former and later two rotating brushes rollers 20 of closely arranging mutually, because of being subjected to the revolving force of rotating rotation brush roller 20, from diffusion extensively laterally between these former and later two rotating brushes rollers 20.Simultaneously, at the state between these former and later two rotating brushes rollers 20 of being sandwiched in most dust floating, that scrape from the surface of substrate 10, dust collecting opening 92 by the dust cleaning apparatus around the top that covers these former and later two rotating brushes rollers 20 continuously, attracted to the inboard of dust cleaning apparatus 90 reliably with having no to omit, and be excluded.
Meanwhile, in the roller segment of the face side that is crimped onto this substrate 10 mode of the interior sideway swivel between two rotating brushes rollers 20 respectively, utilize mutually that former and later two rotating brushes rollers 20 of rotation round about scrape from the surface of substrate 10, attached to the most dust on two rotating brushes rollers 20 of this rotation, the also dust collecting opening 92 of the dust cleaning apparatus around the top by covering these former and later two rotating brushes rollers 20 continuously, attracted to the inboard of dust cleaning apparatus 90 reliably with having no to omit, and be excluded.
Consequently, can be with the most dust that scrapes on the surface by the substrate 10 of former and later two rotating brushes rollers 20 of this rotation, dust collecting opening 92 by the dust cleaning apparatus around the top that covers these former and later two rotating brushes rollers 20 continuously, have no to be attracted to reliably the inboard of dust cleaning apparatus 90 with omitting, and get rid of.
In this substrate dust removal, as shown in Figure 2, can have the adjusting device 100 that width that makes conveyer 60 and the width that carries the substrate that is handled upside down 10 on this conveyer 60 are as one man adjusted width.Adjusting device 100 can adopt following structure, that is, the conveying machine frame 64 that can make the either party's (being the left side in Fig. 2) about it utilizes bolt 68 grades to fix along guide rail 66 move left and right, makes on its any part that can be discharged into guide rail 66.Another carries machine frame 64 not to be fixed on movably on the apparatus main body 30.Simultaneously, can adopt following structure, promptly, can make its one to carry machine frame 64 to move suitable distance along guide rail 66, by being reattached to any part of guide rail 66, make to be bearing in pair of right and left capable of circulationly and to carry distance between a pair of seamless belt 62 of inboard of machine frame 64, as one man adjust the structure of width with the width that carries the substrate 10 of carrying on whole this pair of right and left seamless belt 62.
Simultaneously, can utilize this adjusting device 100, the width of conveyer 60 as one man can be adjusted width with the width that carries the substrate 10 that is handled upside down at conveyer 60.Simultaneously, the substrate 10 that dedusting can be used carries reliably at the width of its width and substrate 10 as one man to be adjusted on the conveyer 60 of width, and carried under stable status.
In addition, in this substrate dust removal, as shown in Figure 2, can have and make two rotating brushes rollers 20 with respect to carry the substrate 10 on conveyer 60, the be handled upside down lowering or hoisting gear 110 of lifting along the vertical direction.But but lowering or hoisting gear 110 can by with the supporting frame 24 of two rotating brushes rollers 20 of free rotary ground supporting with respect to apparatus main body 30 guide part 32 of free lifting ground supporting along the vertical direction, and, will along this guide part along the vertical direction the supporting frame 24 of the suitable distance of lifting fixedly make bolt 36 formations such as grade of its any part that can be discharged into guide part 32.
Simultaneously, can on the surface of the substrate 10 that is handled upside down on this conveyer 60, be equipped with under the situation of various electronic component (not shown)s such as semiconductor device in lift-launch, utilize lowering or hoisting gear 110, with two rotating brushes rollers 20 with respect to carrying the substrate 10 on this conveyer 60, be handled upside down, with the height of the lip-deep electronic component that is installed in this substrate 10 as one man, rise to the top of predetermined distance.Simultaneously, the substrate that electronic component is installed 10 that lift-launch is handled upside down on this conveyer 60 with two rotating brushes rollers 20 ground that do not bump, does not have the below by these two rotating brushes rollers 20 smoothly, resistance ground.Simultaneously, can prevent to be installed in these substrate 10 lip-deep electronic components and two rotating brushes roller 20 collisions and the damage that causes.
Secondly, two rotating brushes rollers 20 that utilize rotation scrape that lift-launch is handled upside down on this conveyer 60 other substrate 10 lip-deep dust of electronic component are not installed the time, can will utilize lowering or hoisting gear 110 to rise to two rotating brushes rollers 20 of predetermined distance top, utilize lowering or hoisting gear 110 once more with respect to carrying the other substrate 10 that on this conveyer 60, is handled upside down, drop to the below of predetermined distance.Simultaneously, two rotating brushes rollers 20 of rotation can be crimped onto reliably lift-launch on other the surface of substrate 10 that electronic component is not installed that is handled upside down on this conveyer 60, utilize two rotating brushes rollers 20 of this rotation, scrape lip-deep dust attached to this other substrate 10.
In addition, in this substrate dust removal, as shown in Figure 1, can have remove substrate 10 that lift-launch is handled upside down on the conveyer 60 of the rear of two rotating brushes rollers 20 or the place ahead (being the rear in Fig. 1) with static use remove electrostatic equipment 120.For removing electrostatic equipment 120, can adopt the product of selling on the market.
Simultaneously, be subjected to the influence of the frictional force that produces between these two rotating brushes rollers 20 and the substrate 10 at the substrate 10 of two rotating brushes roller 20 crimping that make rotation and be under the state of static electrification, this substrate 10 is carried when carrying on the conveyer 60 at the rear of two rotating brushes rollers 20, also can utilize electrostatic equipment 120 remove this substrate 10 with static.Simultaneously, can prevent by substrate 10 with electrostatic attraction, the dust of periphery that swims in substrate 10 is once more attached on the substrate 10.
In addition, difference according to circumstances can replace and has electrostatic equipment 120, adopts to have the brush roll that prevents charged function.Simultaneously, can also prevent that below by these two rotating brushes rollers 20 is sent to the substrate 10 on the conveyer 60 at its rear, is subjected to being in the state of static electrification from the frictional force of two rotating brushes rollers 20 of this rotation.
Perhaps, in the time of also can on substrate 10 carries conveyer 60 in the place aheads of two rotating brushes rollers 20, being handled upside down, utilizing and remove electrostatic equipment 120, remove in advance this substrate 10 with static.Simultaneously, also can prevent to swim in this substrate 10 periphery dust by this substrate 10 with electrostatic attraction attached on the substrate 10.
In addition, in this substrate dust removal, as shown in Figure 1, can have to carrying injection air on the surface of the substrate 10 that is handled upside down on the conveyer 60 of the rear of two rotating brushes rollers 20 or the place ahead (in Fig. 1, being the place ahead), will be attached in the lip-deep groove (not shown) of scribing with laser etc. of this substrate 10 or/and be arranged on dust in the through hole (not shown) on this substrate 10, the air jet system 130 that utilizes air to blow off and remove.Air jet system 130 can adopt the air that will blow out from the air compressor (not shown), the structure of spraying to substrate surface 10 from the nozzle 132 of the near surface that is disposed at the substrate 10 that lift-launch is handled upside down at conveyer 60.
Simultaneously, utilize this air jet system 130, air can be ejected into lift-launch on the surface of the substrate 10 that is handled upside down on the conveyer 60 in the rear of two rotating brushes rollers 20 or the place ahead, make attached in the lip-deep groove that is engraved on this substrate 10 or/and be arranged on that dust in the through hole on this substrate 10 is this can not to scrape the dust of removing with two rotating brushes rollers 20 of rotation, utilize air in this groove or/and be blown out to its outside in the through hole and remove.
Substrate dust removal of the present invention as scraping and remove the device of usefulness from this substrate surface attached to the lip-deep dust of various substrates such as printed wiring board, ceramic substrate, can wide and practical be used.
Claims (5)
1, a kind of substrate dust removal is characterized in that, comprising: the board carrying conveyer; Direction along the crosscut substrate is crimped onto lift-launch on the substrate surface that is handled upside down on this conveyer, and former and later two rotating brushes rollers of closely arranging mutually; Roller segment with the substrate surface side that is crimped onto these two rotating brushes rollers points to the mode that the inboard between two rotating brushes rollers rotates respectively, makes two rotating brushes rollers whirligig of rotation round about mutually; Dust cleaning apparatus with the top dust collecting opening on every side that covers aforementioned two rotating brushes rollers continuously, by aforementioned dust collecting opening attract to swim between described two rotating brushes rollers dust and attached to the dust on described two rotating brushes rollers, and with the dust cleaning apparatus of its eliminating.
2, substrate dust removal as claimed in claim 1 is characterized in that, comprises that the width that makes aforementioned conveyer and the width that carries the substrate that is handled upside down on this conveyer as one man adjust the adjusting device of width.
3, substrate dust removal as claimed in claim 1 or 2 is characterized in that, comprises making aforementioned two rotating brushes rollers with respect to carry the substrate be handled upside down on the conveyer lowering or hoisting gear of lifting along the vertical direction.
4, as claim 1,2 or 3 described substrate dust removal, it is characterized in that, comprise remove substrate that lift-launch is handled upside down on the conveyer in the rear of aforementioned two rotating brushes rollers or the place ahead with static remove electrostatic equipment.
5, as claim 1,2,3 or 4 described substrate dust removal, it is characterized in that, comprise to carrying injection air on the substrate surface that is handled upside down on the conveyer in the rear of aforementioned two rotating brushes rollers or the place ahead, utilize air to blow off and remove the air jet system that is attached in the groove that is engraved on this substrate surface and/or is arranged on the dust in the through hole on this substrate.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004027463A JP2005218923A (en) | 2004-02-04 | 2004-02-04 | Substrate dust removal apparatus |
| JP2004027463 | 2004-02-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1652664A true CN1652664A (en) | 2005-08-10 |
Family
ID=34879159
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200410033495 Pending CN1652664A (en) | 2004-02-04 | 2004-04-09 | Substrate duster |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP2005218923A (en) |
| CN (1) | CN1652664A (en) |
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