CN110899244A - Porous ceramic carrying platform cleaning device and display panel manufacturing equipment - Google Patents
Porous ceramic carrying platform cleaning device and display panel manufacturing equipment Download PDFInfo
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- CN110899244A CN110899244A CN201911085078.7A CN201911085078A CN110899244A CN 110899244 A CN110899244 A CN 110899244A CN 201911085078 A CN201911085078 A CN 201911085078A CN 110899244 A CN110899244 A CN 110899244A
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- 238000004140 cleaning Methods 0.000 title claims abstract description 96
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 20
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- 238000000034 method Methods 0.000 claims description 5
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B5/00—Cleaning by methods involving the use of air flow or gas flow
- B08B5/04—Cleaning by suction, with or without auxiliary action
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- B08B1/12—
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- B08B1/32—
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Abstract
The invention provides a porous ceramic carrying platform cleaning device and display panel manufacturing equipment, wherein the porous ceramic carrying platform cleaning device comprises: a drive mechanism; at least forming an open cover shell at the bottom, wherein the open bottom of the cover shell moves close to the surface of the porous ceramic carrying platform; at least one roller and a suction device are transversely accommodated in the housing, the roller is driven by a driving mechanism, and the suction device is arranged in parallel with the roller and suspended on the surface of the porous ceramic carrying platform; the surface of the roller is provided with a brush. The cleaning device provided by the invention can effectively remove the residual residues on the porous ceramic carrying platform, effectively prevent the residues from blocking the air holes of the porous ceramic carrying platform, avoid the defect of high production cost caused by frequent replacement of the adhesive roller in the prior art, and obviously reduce the operation and maintenance cost of the cleaning device for cleaning the porous ceramic carrying platform.
Description
Technical Field
The invention relates to the technical field of display panel manufacturing equipment, in particular to a porous ceramic carrying platform cleaning device and display panel manufacturing equipment.
Background
In the display panel manufacturing process, a carrier is used to carry and fix the display panel for various operations required by the manufacturing process. The early stage carrier is made of metal materials such as stainless steel, negative pressure air holes are densely distributed on the top surface of the carrier, and the negative pressure air holes are connected with a negative pressure device so as to adsorb and fix the display panel by utilizing the adsorption force generated by the negative pressure device.
Because the metal carrying platform has better thermal conductivity and electrical conductivity, the local area of the display panel generates overlarge attraction force to cause damage, and when the carried display panel is subjected to process operations such as Rubbing (Rubbing), large temperature change can be generated, and charges accumulated by static electricity cannot be effectively released, so that the alignment of the display panel is influenced; meanwhile, the carrier made of metal also has the problem of abrasion to the display panel. To improve the above problem, the industry has started to use a monolithic ceramic plate with a plurality of micro-holes, i.e. a porous ceramic carrier, to solve the above problem. The porous ceramic carrier is densely distributed with pores with the diameter of about 20 mu m, and the porosity can reach more than 40 percent.
The display panel is usually cut and mounted on a porous ceramic carrier. However, the porous ceramic stage generates a fine residue with a certain diameter after performing the panel cutting operation, and the diameter of the residue is usually between 5 to 100 μm. The clogging of the pores by the residue leads to a decrease in the adsorption and fixing effects of the porous ceramic stage on the display panel. Therefore, the porous ceramic stage must be periodically cleaned. Although the conventional cleaning means for wiping the porous ceramic carrier with alcohol or IPA (isopropyl alcohol) dipped in dust-free cloth can remove a part of the residue with a large diameter, a large amount of residue with a diameter less than 20 μm is still brought into the air holes to block the air holes.
Referring to fig. 1, a cleaning device for cleaning a porous ceramic carrier in the prior art is disclosed. The cleaning device consists of a platform 83 moving longitudinally, a mounting bracket 82 mounted on the platform 83 and a frame 81 moving vertically along the mounting bracket 82, wherein the tail end of the frame 81 clamps a rolling adhesive roller 80. The cleaning device is contacted with the surface of the porous ceramic carrier 60 through an adhesive roller 80 which can reciprocate, so that the residual residues on the porous ceramic carrier are removed through the adhesion of the adhesive roller 80.
However, the adhesive roller 80 in the cleaning device still causes a part of fine residues to block the air holes due to the rolling action of the adhesive roller 80 when downward pressure is applied to the porous ceramic carrier 60, thereby causing a defect of poor cleaning effect; meanwhile, after the cleaning device is used for a certain period of time, residues are bound to the surface of the adhesive roller 80, so that the adhesive roller 80 needs to be replaced frequently, the use cost of the cleaning device is increased, the porous ceramic carrying platform needs to be stopped for cleaning, and the production efficiency of the display panel is influenced to a certain extent.
In view of the above, there is a need to improve the apparatus for cleaning the porous ceramic stage in the prior art to solve the above problems.
Disclosure of Invention
The invention aims to disclose a porous ceramic carrying table cleaning device and display panel manufacturing equipment based on the porous ceramic carrying table cleaning device, which are used for removing residues left on a porous ceramic carrying table, effectively preventing the residues from blocking air holes and avoiding the defect of high production cost caused by frequent replacement of an adhesive roller.
To achieve the first object, the present invention provides a cleaning device for a porous ceramic stage, comprising:
a drive mechanism;
at least forming an open cover shell at the bottom, wherein the open bottom of the cover shell moves close to the surface of the porous ceramic carrying platform;
at least one roller and a suction device are transversely accommodated in the housing, the roller is driven by the driving mechanism, and the suction device and the roller are arranged in parallel and suspended on the surface of the porous ceramic carrying platform;
the surface of the roller is provided with a brush.
As a further improvement of the invention, the suction device transversely extends out of the cover and is connected with the negative pressure generating device, and a slit is formed on one side of the suction device facing the porous ceramic carrier.
As a further improvement of the invention, an even number of rollers rolling in opposite directions are transversely accommodated in the housing, and the suction device is arranged between two adjacent rollers.
As a further improvement of the invention, two rollers which are driven by the driving mechanism and roll oppositely are transversely accommodated in the housing, and the suction device is arranged between the two adjacent rollers.
As a further improvement of the present invention, the porous ceramic stage cleaning device further includes:
and the lifting mechanism is connected with the top of the housing and used for moving the housing.
As a further improvement of the invention, the transverse width of the cover shell is at least larger than the width of one side of the porous ceramic carrier.
As a further improvement of the present invention, a side of the suction device facing the porous ceramic stage is a plane, and the plane is provided with the slit.
As a further improvement of the invention, one side of the suction device facing the porous ceramic carrying platform is composed of two inclined surfaces, and the two inclined surfaces jointly enclose to form the slit.
In a further improvement of the present invention, a brush row is disposed on the bottom of the suction device in parallel with the slit and attached to the surface of the porous ceramic stage.
Based on the same inventive concept and to achieve the second object described above, the present invention also provides a display panel manufacturing apparatus including:
the porous ceramic stage cleaning device is used for cleaning the porous ceramic stage.
Compared with the prior art, the invention has the beneficial effects that:
the brush which is arranged on the surface of the roller and extends out of the bottom opening of the housing from the lower part is used for gathering micropores on the porous ceramic bearing platform and residues remained on the surface to the lower part of the slit which is arranged on one side of the suction device facing the porous ceramic bearing platform, so that the residues are adsorbed by the suction device and discharged out of the housing, the residues remained on the porous ceramic bearing platform are cleared, the air holes are effectively prevented from being blocked by the residues, the defect that the production cost is high due to the fact that the adhesive roller needs to be frequently replaced in the prior art is avoided, the operation and maintenance cost of the cleaning device for cleaning the porous ceramic bearing platform is remarkably reduced, the operation and maintenance cost of display panel manufacturing equipment is indirectly reduced, and the shutdown and maintenance time of the display panel equipment comprising the porous ceramic bearing platform is reduced.
Drawings
FIG. 1 is a perspective view of a cleaning device for cleaning a porous ceramic stage according to the prior art;
FIG. 2 is a perspective view of a porous ceramic stage cleaning device according to the present invention;
FIG. 3 is a front view of a porous ceramic stage cleaning device according to the present invention;
FIG. 4 is a top view of a porous ceramic stage cleaning device according to the present invention;
FIG. 5 is a schematic structural view of the porous ceramic stage cleaning device cut along the direction D-D in FIG. 4;
FIG. 6 is a schematic structural diagram of a cleaning device for a porous ceramic carrier stage taken along the direction C-C in FIG. 3 according to an embodiment;
FIG. 7 is a schematic structural diagram of a cleaning device of a porous ceramic carrier stage cut along the direction C-C in FIG. 3 according to a modified embodiment;
FIG. 8 is a schematic structural diagram of a cleaning device for a porous ceramic carrier stage cut along the direction C-C in FIG. 3 according to another modified embodiment;
FIG. 9 is a schematic structural diagram of a final embodiment of the cleaning device for the porous ceramic carrier taken along the direction C-C in FIG. 3;
fig. 10 is a perspective view of the porous ceramic stage.
Detailed Description
The present invention is described in detail with reference to the embodiments shown in the drawings, but it should be understood that these embodiments are not intended to limit the present invention, and those skilled in the art should understand that functional, methodological, or structural equivalents or substitutions made by these embodiments are within the scope of the present invention.
It should be understood that in various embodiments, the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", "positive", "negative", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only used for convenience of describing the present technical solution and simplifying the description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed in a specific orientation, and be operated, and thus should not be construed as limiting the present technical solution.
The application mainly discloses porous pottery microscope carrier cleaning device includes: a drive mechanism; a cover 10 with an opening 13 formed at least at the bottom, wherein the opening 13 at the bottom of the cover 10 is close to the surface of the porous ceramic carrying platform for movement; the housing 10 houses laterally therein at least one rotatable drum driven by a drive mechanism, and a suction device 51 (or a suction device 52) arranged parallel to the drum and suspended on the surface of the porous ceramic stage 60. The surface of the roller is provided with a brush.
The porous ceramic carrying table cleaning device can remove residues remained in air holes with the diameter of about 20 micrometers, which are formed on the surface of the porous ceramic carrying table and attached to the surface of the porous ceramic carrying table through the hairbrush arranged on the surface of the roller, effectively prevent the air holes from being blocked by the residues, and avoid the defect of high production cost caused by frequent replacement of the adhesive roller of the cleaning device in the prior art as disclosed in figure 1. The brush of the roller collects the residues on the porous ceramic carrier to the bottom of the suction device in the rotating process, so that the residues are sucked into the suction device and discharged through the negative pressure formed at the slit formed at the bottom of the suction device.
The porous ceramic stage cleaning device according to the present invention is described in detail by the following embodiments disclosed in the first to fourth embodiments. Meanwhile, based on the porous ceramic carrying table cleaning device, the application also discloses a using method based on the porous ceramic carrying table cleaning device and a specific implementation mode of display panel manufacturing equipment based on the porous ceramic carrying table cleaning device.
The first embodiment is as follows:
a first embodiment of a porous ceramic stage cleaning device (hereinafter referred to as "cleaning device") according to the present invention is disclosed with reference to fig. 2 to 6.
In this embodiment, the cleaning device includes: the driving mechanism is composed of two motors 21 and 22 which are independently configured and arranged above the housing 10, the housing 10 is a hollow cubic structure, an opening 13 is formed at the bottom of the housing 10, the shape of the opening 13 is not limited, for example, the opening 13 can be rectangular, and the brush on the surface of the roller can extend out of the housing 10 from the opening 14 and contact with the surface of the porous ceramic carrier 60. The bottom opening 13 of the housing 10 moves close to the surface of the porous ceramic carrier 60.
Preferably, the cleaning apparatus further includes a lifting mechanism 30 connected to the top of the housing 10. The lifting mechanism 30 is used to move the housing 10 as a whole, and in actual assembly, a lifting rail, a servo mechanism, a robot arm, or other devices or apparatuses capable of driving the cleaning device as a whole in the prior art can be used. As shown in fig. 10, the longitudinal direction of the cover 10 is parallel to one side L1 of the porous ceramic stage, and is defined as a transverse direction of the cover 10, such as the Y direction in fig. 2. The housing 10 accommodates the rollers 41 and 42 in a transverse direction, and the rollers 41 and 42 are disposed in parallel. The ends 412 of both ends of the roller 41 extend out of the housing 10 in the direction of the Y-axis in fig. 2, and the ends 422 of both ends of the roller 42 extend out of the housing 10 in the direction of the Y-axis in fig. 2. The drum 41 and the drum 42 are driven by the motor 21 and the motor 22, respectively; and a suction device 51 arranged in parallel with the roller 41 and the roller 42 and suspended on the surface of the porous ceramic stage 60. The brushes 411 and 421 are disposed on the surfaces of the rollers 41 and 42. The brushes 411 and 421 can be made of nylon or other polymer materials with weather resistance suitable for clean room environment.
The suction device 51 is disposed between the roller 41 and the roller 42, and a slit 50 is opened on a side of the suction device 51 facing the porous ceramic stage 60. Meanwhile, the lateral width (in the Y direction in fig. 2) of the cover case 10 is at least larger than the length of one of the sides of the porous ceramic stage 60, i.e., L1. The moving direction of the porous ceramic stage cleaning device is along the direction L2 on the other side of the porous ceramic stage 60, which includes the directions indicated by the arrows E and F in fig. 2, 6 and 7, and in the present embodiment, the cleaning operation can be completed by simply sweeping the cleaning device across the surface of the porous ceramic stage 60 along the direction indicated by the arrow E in fig. 6. In particular, the lateral width of the cover case 10 may be larger than the width of the other side L2 of the porous ceramic stage 60 as shown in fig. 10, so that the cleaning device manufactured based on the cover cases 10 with different sizes can perform the cleaning process on the surface of the porous ceramic stage 60 along the direction shown by any one side L1 or L2 of the porous ceramic stage (as shown in fig. 10).
A notch 15 is formed at an end of the housing 10 in the direction of the axis Y, and a bearing housing (not shown) for locking both end portions 412 and 422 of the roller 41 and the roller 42 is provided at the notch 15 so that the roller 41 and the roller 42 can perform a pivotal movement inside the housing 10. The top of the housing 10 is provided with a mounting seat 211 for fixing the motor 21, and a mounting seat 221 for fixing the motor 22. A pulley 213 is mounted at an end 412 of the drum 41 outside the housing 10, and the pulley provided on the output shaft of the motor 21 drives the pulley 213 to rotate via a transmission member 212 such as a belt, thereby driving the drum 41 inside the housing 10 to pivot. Similarly, a pulley 223 is mounted at an end 422 of the drum 42 located outside the housing 10, and the pulley provided on the output shaft of the motor 22 drives the pulley 223 to rotate via a transmission 222 such as a belt, thereby driving the drum 42 inside the housing 10 to pivot. One or two through holes 12 are opened at the lateral end of the housing 10, and the through holes 12 communicate with a suction device 51 inside the housing 10. The motors 21 and 22 can be electrically connected to the commercial power or the external power source corresponding to the normal operation of the motors 21 and 22 through wires or a tow chain for accommodating the guide. The through-hole 12 communicates with a negative pressure generating device (not shown) through a flexible pipe to generate a negative pressure inside the suction device 51 by the negative pressure generating device to generate suction force to suck the residue collected to the vicinity of the slit 50 formed on the side of the suction device 51 facing the porous ceramic stage 60, and finally to discharge the cover 10 through the through-hole 12.
Preferably, the length of the slit 50 is equal to the lateral length of the rollers 41 and 42. With this arrangement, the residue collected in the vicinity of the slit 50 can be efficiently sucked by the suction device 51 through the slit, and the effect of cleaning the porous surface of the porous ceramic stage 60 can be ensured.
As shown in fig. 5 and 6, in the present embodiment, the housing 10 contains the parallel roller 41 and the parallel roller 42, which are driven by the driving mechanism to roll in the directions shown by the arrows a and B, respectively, and the brush 411 and the brush 421 are always in contact with the surface of the porous ceramic stage 60 while the cleaning device sweeps across the surface of the porous ceramic stage 60 in the direction shown by the arrow E, so that the residue on the porous ceramic stage 60 is collected near the slit 50 by the brush 411 and the brush 421 and is sucked into the suction device 51. In the present embodiment, "rolling in opposite directions" means that two adjacent rollers arranged in parallel, that is, the rollers 41 and 42 rotate in opposite directions, and residues on the surface of the porous ceramic stage 60 can be collected by the cooperation of the brushes 411 and 421 arranged on the surfaces of the rollers.
Meanwhile, the side of the suction device 51 facing the porous ceramic stage 60 is composed of an inclined surface 511 and an inclined surface 512, and the two inclined surfaces together enclose the slit 50. The retention of the slit 50 to the surface of the porous ceramic stage 60 is greater than >0mm and <10mm spacing.
It should be noted that, the interior of the housing 10 of the cleaning device disclosed in this embodiment may also accommodate three or four or more rollers, and most preferably an even number of rollers, laterally, and a suction device 51 is disposed between two adjacent rollers; meanwhile, the adjacent two rollers maintain the state of rolling in opposite directions as shown by the rollers 41 and 42.
Example two:
referring to fig. 7, this embodiment shows a second embodiment of the porous ceramic stage cleaning device according to the present invention.
The cleaning device disclosed in the present embodiment is mainly different from the cleaning device disclosed in the first embodiment in that the side of the suction device 52 facing the porous ceramic stage 60 in the cleaning device disclosed in the present embodiment is a plane 521, and the slit 50 is opened in the plane 521, and the plane 521 and the surface of the porous ceramic stage 60 maintain a distance greater than >0mm and less than 10 mm.
In the present embodiment, since the side of the suction device 52 facing the porous ceramic stage 60 is a planar structure, the arrangement is simpler and easier to implement, and at the same time, the bottom space of the suction device 52 can form a stronger negative pressure area, so that the residue can be more easily sucked by the suction device 52, and the residue left on the surface of the porous ceramic stage 60 by the cleaning device can be further improved.
Please refer to the description of the first embodiment, and details thereof are not repeated herein.
Example three:
referring to fig. 8, this embodiment shows a third embodiment of the porous ceramic stage cleaning device according to the present invention.
Compared with the cleaning device disclosed in the first and/or second embodiment, the cleaning device disclosed in this embodiment has the main difference that in this embodiment, only the roller 42 is transversely disposed in the housing 10, and the suction device 51 is disposed parallel to the roller 42 and suspended on the surface of the porous ceramic stage 60. When the cleaning device is used to clean the surface of the porous ceramic stage 60, the cleaning device may first be swept across the surface of the porous ceramic stage 60 in the direction indicated by the arrow E in fig. 7, and then the cleaning device or the porous ceramic stage 60 may be rotated 180 degrees in the direction indicated by the arrow F in fig. 8, and then swept across the surface of the porous ceramic stage 60.
Please refer to the description of the first embodiment and/or the second embodiment, and details of the cleaning apparatus disclosed in this embodiment and the cleaning apparatus disclosed in the first embodiment and/or the second embodiment are not repeated herein.
Example four:
referring to fig. 9, this embodiment shows a fourth embodiment of the porous ceramic stage cleaning device according to the present invention.
Compared with the cleaning device disclosed in any of the above embodiments, especially the cleaning device disclosed in the third embodiment, the cleaning device disclosed in the present embodiment has the main difference that only the roller 42 is transversely disposed in the housing 10. When the cleaning device is used to clean the surface of the porous ceramic stage 60, the cleaning device may first be swept across the surface of the porous ceramic stage 60 in the direction indicated by the arrow E in fig. 7, and then the cleaning device or the porous ceramic stage 60 may be rotated 180 degrees in the direction indicated by the arrow F in fig. 9, and then swept across the surface of the porous ceramic stage 60. In particular, in order to prevent the residue collected in the slit 50 by the roller 42 from being missed, a brush row 522 which is always attached to the surface of the porous ceramic stage 60 may be disposed on the side of the bottom of the suction device 52 away from the roller 42, and the brush row 522 may be parallel to the slit 50 of the suction device 52.
In particular, as a reasonable variation of the present embodiment, the brush row 522 shown in the present embodiment may be further disposed on the inclined surface 512 in fig. 8, or even further disposed on the sidewall of the suction device 51 above the inclined surface 512, so that the brush row 522 is always attached to the surface of the porous ceramic stage 60.
The cleaning device disclosed in this embodiment and the cleaning device disclosed in any embodiment have the same technical solutions, please refer to the description of the first to third embodiments, and are not repeated herein.
Example five:
based on the porous ceramic stage cleaning device in one or more of the first to fourth embodiments, this embodiment further discloses a specific implementation manner of a display panel manufacturing apparatus.
A display panel manufacturing apparatus, comprising: the porous ceramic stage 60 and the porous ceramic stage cleaning device according to any one or several of the embodiments described above are configured to perform a cleaning process on the surface of the porous ceramic stage 60 by the porous ceramic stage cleaning device.
The porous ceramic stage 60 is used for performing a cutting operation on a display panel (e.g., an LCD display panel) or a flexible display panel (e.g., an OLED display panel). The display panel or the flexible display panel is supported by a motion stage, is transported onto a porous ceramic stage 60, and is cut into a predetermined size by laser. The motion stage is based on a general term of a driving roller and other assorted power mechanisms, and is used for horizontally conveying the display panel or the flexible display panel.
The specific implementation manner of the porous ceramic carrier cleaning device included in the display panel manufacturing apparatus disclosed in this embodiment is described in the technical solutions disclosed in the first to fourth embodiments, and is not described herein again.
The above-listed detailed description is only a specific description of a possible embodiment of the present invention, and they are not intended to limit the scope of the present invention, and equivalent embodiments or modifications made without departing from the technical spirit of the present invention should be included in the scope of the present invention.
It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.
Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.
Claims (10)
1. A porous ceramic stage cleaning device, comprising:
a drive mechanism;
at least forming an open cover shell at the bottom, wherein the open bottom of the cover shell moves close to the surface of the porous ceramic carrying platform;
at least one roller and a suction device are transversely accommodated in the housing, the roller is driven by the driving mechanism, and the suction device and the roller are arranged in parallel and suspended on the surface of the porous ceramic carrying platform;
the surface of the roller is provided with a brush.
2. The porous ceramic stage cleaning device of claim 1, wherein the suction device extends laterally out of the housing and is connected to the negative pressure generating device, and a slit is formed on a side of the suction device facing the porous ceramic stage.
3. The porous ceramic stage cleaning device as claimed in claim 1 or 2, wherein an even number of rollers rolling in opposite directions are accommodated laterally in the casing, and the suction means is disposed between two adjacent rollers.
4. The porous ceramic stage cleaning device as claimed in claim 3, wherein two rollers driven by the driving mechanism and rolling in opposite directions are accommodated laterally in the housing, and the suction device is disposed between the two adjacent rollers.
5. The porous ceramic stage cleaning device according to claim 1 or 2, further comprising:
and the lifting mechanism is connected with the top of the housing and used for moving the housing.
6. The porous ceramic stage cleaning device of claim 1 or 2, wherein the lateral width of the cover case is at least larger than the width of one of the sides of the porous ceramic stage.
7. The porous ceramic stage cleaning device according to claim 2, wherein a side of the suction device facing the porous ceramic stage is a plane, and the plane is provided with the slit.
8. The porous ceramic stage cleaning device of claim 2, wherein the side of the suction device facing the porous ceramic stage is composed of two inclined surfaces, and the two inclined surfaces together enclose the slit.
9. The porous ceramic stage cleaning device according to claim 7 or 8, wherein a brush row is disposed on a bottom of the suction device in parallel with the slit and attached to a surface of the porous ceramic stage.
10. A display panel manufacturing apparatus, characterized by comprising:
a porous ceramic stage, and the porous ceramic stage cleaning device according to any one of claims 1 to 9, wherein the porous ceramic stage cleaning device is configured to perform a cleaning process on the porous ceramic stage.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201911085078.7A CN110899244A (en) | 2019-11-08 | 2019-11-08 | Porous ceramic carrying platform cleaning device and display panel manufacturing equipment |
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| CN201911085078.7A CN110899244A (en) | 2019-11-08 | 2019-11-08 | Porous ceramic carrying platform cleaning device and display panel manufacturing equipment |
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| KR20150001344A (en) * | 2013-06-27 | 2015-01-06 | 김선홍 | Roll brush cleaner |
| CN103521479A (en) * | 2013-09-27 | 2014-01-22 | 京东方科技集团股份有限公司 | Cleaning device and linear coater |
| CN107020285A (en) * | 2017-04-19 | 2017-08-08 | 京东方科技集团股份有限公司 | A kind of ultrasonic cleaning equipment and base plate processing system |
| CN107414319A (en) * | 2017-09-15 | 2017-12-01 | 京东方科技集团股份有限公司 | Laser cutting device and its control method |
| KR102025134B1 (en) * | 2018-02-01 | 2019-11-04 | 육경식 | Prefabricated cleaning nozzle and prefabricated cleaning device |
| CN208708866U (en) * | 2018-04-28 | 2019-04-09 | 华北理工大学 | A kind of computor-keyboard clearing apparatus |
| CN109366433A (en) * | 2018-10-15 | 2019-02-22 | 湖北宏旭伟业电子科技有限公司 | A kind of sucker-type work level for the production of mobile phone screen plate |
| CN209502366U (en) * | 2018-12-26 | 2019-10-18 | 福建华佳彩有限公司 | track cleaning machine |
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Application publication date: 20200324 |