CN1648715A - Method for inducing periodic microstructure on surface of conductive glass - Google Patents
Method for inducing periodic microstructure on surface of conductive glass Download PDFInfo
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- CN1648715A CN1648715A CN 200510023207 CN200510023207A CN1648715A CN 1648715 A CN1648715 A CN 1648715A CN 200510023207 CN200510023207 CN 200510023207 CN 200510023207 A CN200510023207 A CN 200510023207A CN 1648715 A CN1648715 A CN 1648715A
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- conductive glass
- glass surface
- laser
- film
- femtosecond laser
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- 239000011521 glass Substances 0.000 title claims abstract description 46
- 230000000737 periodic effect Effects 0.000 title claims abstract description 20
- 238000000034 method Methods 0.000 title claims abstract description 14
- 230000001939 inductive effect Effects 0.000 title claims abstract description 10
- 230000001427 coherent effect Effects 0.000 claims abstract description 13
- 229910003437 indium oxide Inorganic materials 0.000 claims abstract description 8
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 claims abstract description 8
- 239000010408 film Substances 0.000 claims description 9
- 229910006404 SnO 2 Inorganic materials 0.000 claims description 7
- 239000010409 thin film Substances 0.000 claims description 7
- 239000011159 matrix material Substances 0.000 claims description 4
- 230000002452 interceptive effect Effects 0.000 claims description 3
- 230000005611 electricity Effects 0.000 claims 2
- 238000004377 microelectronic Methods 0.000 abstract description 2
- 239000000758 substrate Substances 0.000 abstract 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 abstract 1
- 229910001887 tin oxide Inorganic materials 0.000 abstract 1
- 238000005516 engineering process Methods 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 3
- 238000010276 construction Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005401 electroluminescence Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
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Abstract
A method for inducing periodic microstructure on the surface of conductive glass by using femtosecond laser coherent field is characterized in that the coherent field of femtosecond laser or shorter pulse laser is applied to the surface of a film of the conductive glass, the energy of the laser is controlled to enable the laser to ablate indium oxide and tin oxide films on the surface of the conductive glass without damaging a substrate, the interfered laser beam is fixed, and a three-dimensional platform controlled by a computer is used for controlling the movement of a conductive glass sample, so that the periodic conductive microstructure film is induced on the surface of the conductive glass. The structure has important application in the aspects of sensors and microelectronic devices.
Description
Technical field
The present invention relates to electro-conductive glass, particularly a kind of method of utilizing the femtosecond laser coherent field at the conductive glass surface inducing periodic micro structure.
Background technology
Transparent conducting glass (ITO) is widely used in making high-tech electronic products such as LCDs, electroluminescence screen, solar cell, touch screen plasma display screen.Especially when forming the two-dimensional and periodic ordered structure, more can improve its application aspect chemical sensor, biology sensor and microelectronic component at conductive glass surface.
Formerly " method of femtosecond laser manufacturing cycle microstructure on metallic film " in the technology, number of patent application: 03116837.x utilizes the laser coherence technology to prepare periodic micro structure on metallic film.
Summary of the invention
The objective of the invention is the expansion of technical work formerly and replenish, a kind of method at the conductive glass surface inducing periodic micro structure is provided, and we adopt two kinds of femtosecond laser coherent field technologies to induce at the ITO conductive glass surface to have prepared two kinds of periodic microstructures respectively: lattice structure and optical grating construction.
Method of the present invention is with the femtosecond laser light beam, carries out relevant superposition on time and the space through lens focus, and makes it to act on the film of conductive glass surface, and then produces periodic micro structure.
Technical solution of the present invention is as follows:
A kind of method at the conductive glass surface inducing periodic micro structure, it is characterized in that adopting femtosecond laser or more the coherent field of short-pulse laser act on the indium oxide and the SnO 2 thin film surface of electro-conductive glass, the energy of control laser makes its indium oxide that can melt conductive glass surface and SnO 2 thin film and can not destroy matrix, fixing laser beam of interfering, the three-dimensional platform control electro-conductive glass movement of sample of utilizing computing machine to handle induces periodically conductive micro structures film at conductive glass surface.
Described femtosecond laser coherent field is to utilize diffraction beam splitter that the femtosecond laser light beam is divided into five bundles, acts on conductive glass surface through object lens focusing, forms the periodic lattice microstructure at conductive glass surface.
Described femtosecond laser coherent field is that single femto-second laser pulse is divided into relevant on two bundle realization times and the spaces, through lens focus and act on conductive glass surface, forms periodic grating microstructure at conductive glass surface.
The pulsewidth of described femtosecond laser is less than 100 femtoseconds, and wavelength is in 100nm～1000nm scope.
Description of drawings
Fig. 1 is that the present invention utilizes the installation drawing of femtosecond laser coherent field in the method for conductive glass surface inducing periodic micro structure.
Among the figure: 1-coherent laser beam, 2-lens, 3-electro-conductive glass sample, 4-microscope
Fig. 2 is the periodicity grating microstructure graph that the present invention utilizes the femtosecond laser coherent field to form at conductive glass surface in the method for conductive glass surface inducing periodic micro structure.
Embodiment:
The present invention is further described with following embodiment, so that to the understanding of the present invention and advantage thereof.
Embodiment 1
See also Fig. 1 earlier, Fig. 1 is the light path synoptic diagram of the device of the present invention's inducing periodic micro structure on conductive glass surface.Selecting pulse width for use is the femto-second laser pulse of 120fs, wavelength is 800nm, pulse recurrence rate is 1Hz, pulse energy is 400 μ J, by beam splitting chip light beam is divided into two bundles with 1: 1 ratio, beam diameter is 5mm, the relevant second harmonic by means of the frequency-doubling crystal generation of two-beam is realized, the angle of two-beam is 40 °, with focal length indium oxide and the SnO 2 thin film surface that two condenser lenses of 10cm focus on two light beams electro-conductive glass, the energy of control laser makes its indium oxide that can melt conductive glass surface and SnO 2 thin film and can not destroy matrix, the three-dimensional mobile platform control that the electro-conductive glass sample is handled by computing machine.With sem observation induced with laser district, can observe optical grating construction, as shown in Figure 2.
Embodiment 2
Selecting pulse width for use is the femtosecond pulse of 120fs, and wavelength is 800nm, and pulse recurrence rate is 1KHz, and laser power is 200mW, by diffraction beam splitter light beam is divided into five bundles, other 4 four times of restrainting around wherein middle a branch of energy equals.With focal length is that the lens of 100mm become directional light with light beam, and utilize 1 * the object lens focusing light beam, control indium oxide and SnO 2 thin film surface that three-dimensional mobile platform makes the relevant hot spot effect electro-conductive glass of light beam, the energy of control laser makes its indium oxide that can melt conductive glass surface and SnO 2 thin film and can not destroy matrix, fixing laser beam of interfering, the three-dimensional platform control electro-conductive glass movement of sample of utilizing computing machine to handle, be 10 seconds action time.Can observe formation periodic lattice structure in the interference light spot region with optical microscope (100 */0.9 object lens).
Claims (4)
1, a kind of method of utilizing the femtosecond laser coherent field at the conductive glass surface inducing periodic micro structure, it is characterized in that adopting femtosecond laser or more the coherent field of short-pulse laser act on the film surface of electro-conductive glass, the energy of control laser makes its indium oxide that can melt conductive glass surface and SnO 2 thin film and can not destroy matrix, fixing laser beam of interfering, the three-dimensional platform control electro-conductive glass movement of sample of utilizing computing machine to handle induces periodically conductive micro structures film at conductive glass surface.
2, the method that forms the microstructure film that periodically conducts electricity at conductive glass surface according to claim 1, it is characterized in that described femtosecond laser coherent field is to utilize diffraction beam splitter that the femtosecond laser light beam is divided into five bundles, act on conductive glass surface through object lens focusing, form the periodic lattice structure at conductive glass surface.
3, the method that forms the microstructure film that periodically conducts electricity at conductive glass surface according to claim 1, it is characterized in that described femtosecond laser coherent field is that single femto-second laser pulse is divided into being concerned with on two bundle realization times and the space, through lens focus and act on conductive glass surface, form periodic grating microstructure at conductive glass surface.
4, describedly form the periodically method of the microstructure film of conduction at conductive glass surface according to claim 1 or 2 or 3, the pulsewidth that it is characterized in that described laser is less than 100 femtoseconds, and wavelength is in 100nm～1000nm scope.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200510023207 CN1648715A (en) | 2005-01-10 | 2005-01-10 | Method for inducing periodic microstructure on surface of conductive glass |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200510023207 CN1648715A (en) | 2005-01-10 | 2005-01-10 | Method for inducing periodic microstructure on surface of conductive glass |
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| CN1648715A true CN1648715A (en) | 2005-08-03 |
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| CN 200510023207 Pending CN1648715A (en) | 2005-01-10 | 2005-01-10 | Method for inducing periodic microstructure on surface of conductive glass |
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Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101219506B (en) * | 2008-01-07 | 2010-06-02 | 江苏大学 | Laser production method for metal base ultra-hydrophobicity micro-structure surface |
| CN101958251B (en) * | 2009-07-20 | 2012-08-29 | 上海半导体照明工程技术研究中心 | Method for manufacturing patterned substrate on lithium aluminate wafer |
| CN103219421A (en) * | 2013-03-27 | 2013-07-24 | 中国科学院上海光学精密机械研究所 | Method for manufacturing vertical multi-junction solar cell piece by laser |
| CN104199144A (en) * | 2014-09-19 | 2014-12-10 | 天津理工大学 | Device and method for writing gratings on lithium niobate waveguides by aid of femtosecond laser device |
| WO2016205724A1 (en) | 2015-06-19 | 2016-12-22 | Gentex Corporation | Second surface laser ablation |
| CN107907931A (en) * | 2017-11-15 | 2018-04-13 | 北京理工大学 | Realize that transparent conductive oxide is polarized the method with analyzing based on femtosecond laser |
| US10610975B2 (en) | 2014-10-03 | 2020-04-07 | Gentex Corporation | Second surface laser ablation |
| CN111168233A (en) * | 2020-02-14 | 2020-05-19 | 南京理工大学 | Method for inducing periodic structure on surface of optical glass by picosecond laser |
| US11009760B2 (en) | 2017-05-05 | 2021-05-18 | Gentex Corporation | Interleaving laser ablation |
| US11130195B2 (en) | 2014-07-29 | 2021-09-28 | Gentex Corporation | Laser ablation with reduced visual effects |
| CN117444381A (en) * | 2023-11-02 | 2024-01-26 | 深圳技术大学 | Method for preparing conductive microstructure on surface of lithium niobate crystal based on femtosecond laser direct writing technology |
-
2005
- 2005-01-10 CN CN 200510023207 patent/CN1648715A/en active Pending
Cited By (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101219506B (en) * | 2008-01-07 | 2010-06-02 | 江苏大学 | Laser production method for metal base ultra-hydrophobicity micro-structure surface |
| CN101958251B (en) * | 2009-07-20 | 2012-08-29 | 上海半导体照明工程技术研究中心 | Method for manufacturing patterned substrate on lithium aluminate wafer |
| CN103219421A (en) * | 2013-03-27 | 2013-07-24 | 中国科学院上海光学精密机械研究所 | Method for manufacturing vertical multi-junction solar cell piece by laser |
| CN103219421B (en) * | 2013-03-27 | 2015-05-13 | 中国科学院上海光学精密机械研究所 | Method for manufacturing vertical multi-junction solar cell piece by laser |
| US11130195B2 (en) | 2014-07-29 | 2021-09-28 | Gentex Corporation | Laser ablation with reduced visual effects |
| CN104199144A (en) * | 2014-09-19 | 2014-12-10 | 天津理工大学 | Device and method for writing gratings on lithium niobate waveguides by aid of femtosecond laser device |
| CN104199144B (en) * | 2014-09-19 | 2017-02-01 | 天津理工大学 | Device and method for writing gratings on lithium niobate waveguides by aid of femtosecond laser device |
| US10610975B2 (en) | 2014-10-03 | 2020-04-07 | Gentex Corporation | Second surface laser ablation |
| EP3310526A4 (en) * | 2015-06-19 | 2018-06-06 | Gentex Corporation | Second surface laser ablation |
| CN108351564A (en) * | 2015-06-19 | 2018-07-31 | 金泰克斯公司 | Second surface laser ablation |
| US10185198B2 (en) | 2015-06-19 | 2019-01-22 | Gentex Corporation | Second surface laser ablation |
| CN108351564B (en) * | 2015-06-19 | 2020-10-09 | 金泰克斯公司 | Second surface laser ablation |
| WO2016205724A1 (en) | 2015-06-19 | 2016-12-22 | Gentex Corporation | Second surface laser ablation |
| US11275285B2 (en) | 2015-06-19 | 2022-03-15 | Gentex Corporation | Second surface laser ablation |
| US11009760B2 (en) | 2017-05-05 | 2021-05-18 | Gentex Corporation | Interleaving laser ablation |
| CN107907931A (en) * | 2017-11-15 | 2018-04-13 | 北京理工大学 | Realize that transparent conductive oxide is polarized the method with analyzing based on femtosecond laser |
| CN111168233A (en) * | 2020-02-14 | 2020-05-19 | 南京理工大学 | Method for inducing periodic structure on surface of optical glass by picosecond laser |
| CN117444381A (en) * | 2023-11-02 | 2024-01-26 | 深圳技术大学 | Method for preparing conductive microstructure on surface of lithium niobate crystal based on femtosecond laser direct writing technology |
| CN117444381B (en) * | 2023-11-02 | 2024-06-04 | 深圳技术大学 | Method for preparing conductive microstructure on surface of lithium niobate crystal based on femtosecond laser direct writing technology |
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