CN1590255A - Conveyer - Google Patents
Conveyer Download PDFInfo
- Publication number
- CN1590255A CN1590255A CNA2004100644984A CN200410064498A CN1590255A CN 1590255 A CN1590255 A CN 1590255A CN A2004100644984 A CNA2004100644984 A CN A2004100644984A CN 200410064498 A CN200410064498 A CN 200410064498A CN 1590255 A CN1590255 A CN 1590255A
- Authority
- CN
- China
- Prior art keywords
- transport object
- pallet
- assembly
- float
- conveyance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
-
- A—HUMAN NECESSITIES
- A63—SPORTS; GAMES; AMUSEMENTS
- A63B—APPARATUS FOR PHYSICAL TRAINING, GYMNASTICS, SWIMMING, CLIMBING, OR FENCING; BALL GAMES; TRAINING EQUIPMENT
- A63B22/00—Exercising apparatus specially adapted for conditioning the cardio-vascular system, for training agility or co-ordination of movements
- A63B22/16—Platforms for rocking motion about a horizontal axis, e.g. axis through the middle of the platform; Balancing drums; Balancing boards or the like
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
- H02K7/06—Means for converting reciprocating motion into rotary motion or vice versa
- H02K7/075—Means for converting reciprocating motion into rotary motion or vice versa using crankshafts or eccentrics
-
- A—HUMAN NECESSITIES
- A63—SPORTS; GAMES; AMUSEMENTS
- A63B—APPARATUS FOR PHYSICAL TRAINING, GYMNASTICS, SWIMMING, CLIMBING, OR FENCING; BALL GAMES; TRAINING EQUIPMENT
- A63B2213/00—Exercising combined with therapy
- A63B2213/001—Exercising combined with therapy with radiation therapy
- A63B2213/002—Infra-red
Abstract
An opening is provided on a bottom face of a tray, and a blow-out unit for levitation conveyance fitted in this opening is provided at a station. The tray can be freely brought in and out of the station by a conveyor. Height of a side face of the tray is smaller than height of front and rear faces to bring in and out the conveyance object freely between the tray and a levitation conveyance device.
Description
Technical field
The present invention relates to a kind of conveyer, it is the conveyance that will be undertaken by pallet and floats conveyance and made up.
Background technology
In the past, all every case of the conveyance of transport object such as liquid crystal substrate was accommodated about several and be that unit ground carries out with the case, but along with liquid crystal substrate maximize to 2m square about, the mode of this one-tenth case conveyance just is difficult to accomplish.Therefore just considering mounting a slice liquid crystal substrate on each pallet, is that unit carries out conveyance with the pallet.But,, liquid crystal substrate need be taken out or put into from pallet to taking-up such as processing equipment or when putting into liquid crystal substrate.As the conveyance of processing equipment side, the contriver sets about, studies floating conveyance from cleaning degree this point.Between the carrying device and float conveyer that carry out with pallet, need and large-scale transport object such as liquid crystal substrate can be taken out or let-in station from pallet thus.Considered also that here the hand etc. with manipulator carries out transfer, but to 2m the large-sized substrate about square to handle with manipulator be unpractical.
Summary of the invention
Basic assignment of the present invention provides a kind of conveyer, and it is just transport object can be taken out from pallet or put into without hand of manipulator etc.Additional problem of the present invention 2 provides a kind of conveyer, when transport object is taken out from pallet or put into, just can transport object be floated with few spray volume, can take out or put into stable attitude.Additional problem of the present invention 3,4 provides a kind of conveyer, when taking out or putting into from pallet, can prevent that transport object and pallet from interfering mutually.
It is each mounting a slice transport object and the conveyer that carries out conveyance on pallet for a conveyer of the present invention, it is characterized in that, bottom at pallet is provided with opening, but also being provided with station, this station has the opening that is used for via the tray bottom gas ejection is floated the float conveyer of conveyance and the belt conveyor that tray conveying is used to transport object.
Best, the ejection assembly of overlooking in the opening that is housed in the tray bottom is being set on above-mentioned float conveyer, and the lifting mechanism that is used to make the belt conveyor lifting relatively that float conveyer and above-mentioned tray conveying use is being set, and make the position of above-mentioned ejection assembly and be in also conversion freely between the state of bottom of ratio open at the state in entering into above-mentioned opening.
And it is best, at least be provided with and float the ejiction opening that is used as above-mentioned float conveyer with ejiction opening and conveyance with 2 kinds of ejiction openings of ejiction opening, and float make with ejiction opening transport object float to the hands-off height of pallet after, transport object is advanced outside pallet with ejiction opening in conveyance.
The present invention moves into pallet with belt conveyor to take out of on the station, with the opening of tray bottom transport object is floated conveyance, transport object can be taken out or is put into from pallet thus.Float conveyance owing to use, even thereby very fragile transport object also can not sustain damage and the hand etc. that needn't use huge manipulator just can be with transport object from the pallet taking-up or put into.
Because the present invention 2 makes the lifting relatively of pallet and ejection assembly, thereby just can make transport object positively float with little spray volume, consequently in taking-up or when putting into, can stably keep the attitude of transport object.
Because the present invention the 3, the 4th makes transport object float earlier, advances then, thereby can prevent the interference of pallet and transport object really.
Description of drawings
Fig. 1 represents the scheme drawing of using assembly with assembly and propelling that floats in the used float conveyer of embodiment.
The expression of Fig. 2 pattern ground makes the section-drawing of the assembly of louvre direction-agile.
Fig. 3 represents in the float conveyer of embodiment, to the scheme drawing of the assembly of the amplitude direction configuration of conveyance path.
Fig. 4 represents the scheme drawing of the straightening mechanism that the attitude to transport object in the float conveyer of embodiment is corrected.
Fig. 5 represents the scheme drawing of the configuration of float conveyer in an embodiment.
Fig. 6 represents to use the birds-eye view of main portion of the float conveyer of nozzle.
Fig. 7 represents in the conveyer of embodiment, the scheme drawing in the station between pallet/float conveyer and pallet warehouse.
Fig. 8 represents the birds-eye view in pallet, the station between pallet/float conveyer and pallet warehouse among the embodiment.
Fig. 9 is the pallet of embodiment and the lateral plan of station (station of expression except the belt conveyor (コ Application ベ ヤ) of front one side).
Figure 10 represent from the station of embodiment pallet with transport object take out, the instruction diagram of let-in algorithm.
The specific embodiment
Below, describe implementing most preferred embodiment of the present invention.
Fig. 1～Fig. 5 represents to use the most preferred embodiment of fan or blowing engine.The example of using assembly 4 with assembly 2 and propelling is floated in expression among Fig. 1, all is provided with fan 10 in any one component internal, forms ejiction opening 8,9 on the top of its framework 6,7.Floating with under the situation of assembly 2, directly over the direction of air ejection for example is.And advancing with under the situation of assembly 4, the direction of air ejection is an oblique upper, for this reason, louvre 12,13 is installed.
All be provided with fan 10 on the assembly 2,4,, can make air-supply directly arrive ejiction opening 8,9, between ejection plate 6,7 and fan 10, the air-supply path do not have bending (bending) from fan 10 except to adjusting by the emission direction of louvre 12,13.Consequently, except forming, almost do not have by louvre 12,13 from the loss of pressure of the outlet of fan 10.And fan 10 is for example respectively to be provided with 1 on each assembly 2,4, and air quantity can be controlled independently.And, thereby do not need pipe arrangement or compressor because the air of blowing is by fan 10 air of assembly 2,4 downsides to be sent to upside, do not need the equipment such as groove cylinder, nozzle of high pressure air yet.
The fan 10 here is an axial flow fan, through blast convert, its output is (below the 10Kpa) below 0.1 barometric pressure, can be equipment replacement fans such as blowing engine below 0.2 barometric pressure with blast, and preferably use low price, the less fan of running energy needed. Assembly 2,4 surface sizes for example are that to make 1 limit be about 5cm * 5cm～20cm * 20cm, in the present embodiment, the surface is the square roughly square shape of 10cm, highly is the thickness that louvre 12,13 needed height+fans 10 are set.Liquid crystal substrate glass as transport object, be that 1 limit is the oblong-shaped about 1～2m for example, quality is about 10Kg, along the left and right directions of conveyance path (in horizontal surface with the rectangular direction of conveyance direction), arranging the assembly 2,4 about 5～40, in these assemblies, have advance with, float usefulness, kind such as used in the center, by position the on/off or the air quantity of the fan in the assembly are controlled, just can the utmost point be controlled the attitude of transport object or speed etc. meticulously according to substrate.
When Fig. 2 represents fan component 20 in the variation, the 22nd, movable louvre, can change its direction by the power element that does not have expression among the figure, along with this change as to directly over floating of air-supply with assembly make its action, also can be used as to oblique the place ahead or to the propelling usefulness of air-supplies such as oblique rear or the assembly etc. that stops usefulness and make its action.
Fig. 3 is illustrated in the configuration of assembly on the left and right directions of conveyance path 30.For example the central authorities at conveyance path 30 are provided with propelled at high velocity with assembly 32, low speed is set in its both sides advances with assembly 33,33.Here, propulsion assembly 32,33 adds up to into 3 row, but also can become 1 row or 5 row.And be provided with under the above situation of 3 row, for example can propelled at high velocity about 1～3 row be set with assembly 32 at central portion, low speed about 1～3 row is set respectively in its both sides advances and use assembly 33.Advance two outsides with assembly 33 that multiple row is set respectively at low speed and float with assembly 34, to directly over the ejection air transport object is floated, to center element 36,36, air is sprayed in two arranged outside to the oblique upper of conveyance path 30 inboards.In addition can be between propelled at high velocity advances with the row of assembly 33 with the row of assembly 32 and low speed configuration float row with assembly 34, also can make to float to be mixed in propelled at high velocity with in the row of assembly 32 or be mixed in the low speed propelling and use in the row of assembly 33 with assembly 34.And, center element 36,36 is arranged to often more be in than transport object 40 outside of left and right directions.The 38th, guide member, on the surface of conveyance path 30 sides member such as configuration buffer component etc., can prevent that therefore conveyance object conveyance path 30 is outstanding.When replacing tabular guide member 38 bar-shaped guide member 39 etc. is set, and on reeling in its surface during buffer component, just can removes owing to the corner angle of transport object and guide member 38 very close to each other are run into the problems such as damage that take place.
Fig. 4 represents the position of left and right directions of transport object 40 or the straightening mechanism of direction.To correctly keep the position of left and right directions in addition and correctly keep the direction of transport object to be called the center.It is normal condition that transport object 40 is in the state shown in the solid line among Fig. 4, for example begins to take place direction thus and changes and become the state shown in the dotted line.At this moment, the right side of transport object 40 is subjected to from the air-supply to conveyance path inboard to center element, and the moment of Xing Chenging just can be corrected the variation of attitude thus.When transport object 40 under occurrence positions out-of-position situation on the left and right directions, equally can be by center element being corrected offset.
For example will advance with assembly and be arranged to 3 row as illustrated in fig. 3, propelled at high velocity assembly 32 will be set in the central.Here, advance with multiple row and use assembly, when the propulsive force overbalance exported from each row, just become and make transport object 40 rotating reasons.Here, when advancing at the central portion configuration high-speed of conveyance path 30 when advancing with assembly 33,33 with assembly 32, both sides configuration low speed, because the propelled at high velocity of central authorities is difficult to become with assembly 32 attitude of transport object 40 is changed, thereby just can prevent the attitude variation of the transport object 40 that forms by propulsion assembly.In addition about low speed advance with taking place under the uneven situation of propulsive force between the assembly 33,33, though also can become the reason that the attitude that makes transport object 40 changes, because they are low-tach, thereby its influence is smaller.
Fig. 5 represents the configuration of float conveyer.Wherein, transport object by conveyance assembly 41 with its from the below conveyance of figure to the top, by conveyance assembly 42 its conveyance direction is changed 90 ° then, and by conveyance assembly 43 conveyance from left to right, then, then send to conveyance assembly 45 by conveyance assembly 44 change of direction once more.46a～46c is the promotion part, disposing low speed in propelled at high velocity with the both sides of assembly as described above and advancing and use assembly, and the 47th, to central part, arranging above-mentioned to center element.The 48th, stop portion, be used for transport object was once being stopped at conveyance assembly 42 or conveyance assembly 44.And on the appropriate location of each conveyance assembly, disposing transport object sensor 49 etc., be used to detect the position of transport object, and detection signal is input to control part 50, position according to transport object, change the fan air flow of each assembly, perhaps float conveyance by the connection/cut-out of fan.In the transport object sensor 49, utilize the sort of such as make the different structure of specific inductance capacity, also can use sensor of the ultrasonic reflections that the sort of detection causes by glass substrate etc. by having or not of glass substrate.Though the fan of each assembly can independently be controlled each assembly, but also can control respectively whole assemblies, that arranges about on for example that the conveyance direction is the roughly the same position floats assembly as 1 group, the control of connecting/cutting off in the identical time.
And then, though present embodiment is that the carrying channel line is formed U word shape, can on Fig. 5 transport object sent above conveyance assembly 42, transport object is sent to the right side of conveyance assembly 44, come conveyance direction along separate routes with this.In this case,, promotion part 46b is failure to actuate, only makes promotion part 46a action for example at conveyance assembly 42 places, just can be to the shunt of the top of conveyance assembly 42.And by promotion part 46a, transport object is advanced to after near the portion of stopping 48, promotion part 46a is stopped, by air-supply transport object is braked, then, when making promotion part 46b action, just can make 90 ° of conveyance direction variations towards Fig. 5 below from the portion of stopping 48.To advance air supply direction with assembly to be configured to also can make the transport object revolution under the situation such as circular-arc, adjust the air supply direction of fan, and, just can carry out conveyance to transport object with various paths by disposing the different assembly of multiple air supply direction with louvre.
The 52nd, filter assemblies uses filter assemblies that the cleaning shop uses etc. that peace and quiet air is supplied with and a plurality ofly floats with assembly or advance with assembly and to center element etc. the pollution of transport object when preventing to float conveyance.In addition filter assemblies 52 can be set.And transport object also is not limited to the glass substrate that liquid crystal is used.
Though in the present embodiment, the example that uses fan or blowing engine is illustrated, also can use nozzle as illustrated in fig. 6.In this case, a plurality of nozzles of configuration on an assembly advance with assembly 63,63 at the left and right directions both sides configuration low speed of propelled at high velocity with assembly 62 these row, and the multiple row that not have to represent in figure is for example being arranged in two outside is respectively floated and used assembly.In addition in Fig. 6, with arrow, represent each nozzle to pattern.And advancing with on the assembly 62,63, from nozzle with the just ejection obliquely of gases such as air or nitrogen, and on floating with assembly, from nozzle with gas to directly over ejection.And on two outsides of floating with those row of assembly, on the position outside the left and right end portions of (under the situation of normal position or direction) transport object is positioned at slightly at ordinary times, configuration has the assembly of the nozzle that the center is used.Variation shown in Figure 6 except fan being become nozzle, be same with the embodiment of Fig. 1～shown in Figure 5.
Fig. 7～Figure 10 is illustrated between pallet (ト レ イ) and the float conveyer transport object is taken out or put into.Wherein, though the liquid crystal substrate about square is not limited thereto as transport object with 2m * 2m.In the conveyer 70 shown in Fig. 7 waits, the 72nd, the belt conveyor of roll conveyor etc. carries out conveyance to pallet, and the 74, the 75th, station takes out transport object on station 74 from pallet, on station 75 transport object is put on the pallet.At station 74,75 belt conveyor 76 that has elevator is being set, when transport object is taken out or put into, belt conveyor is being descended, the taking-up by floating conveyance or put into and easily to carry out with elevator.The kind of belt conveyor can be selected for example roll conveyor for use, supports the both sides of pallet and carries out conveyance.78, the 79th, the float conveyer in the station 74,75, the float conveyer 78 of station 74 sides have and transport object can be floated, advanced and to 3 functions in center.The float conveyer 79 of station 75 sides have transport object can be floated, advance, to the center with stop to advance 4 functions.Between station 74,75, be provided with pallet warehouse 80, be used for the pallet of folding and unfolding sky.
Below, the structure in pallet warehouse 80 is described.The 82nd, expand and to open belt conveyor, make belt conveyor that tray conveying uses the moving up and down of Fig. 7 by expanding opening apparatus 84, be provided with the gap that elevator 86 or pallet are passed through therebetween.The 88th, chuck is clamped to the pallet of taking care of on the position of the conveyance face that is higher than belt conveyor, and a plurality of tray laminate ground is taken care of.The storage position of pallet is not limited to be higher than the upside of conveyance face, also can carry out lamination keeping at the downside of conveyance face, perhaps in horizontal surface with the rectangular direction of conveyance direction of belt conveyor 72, the pallet of sky discharged and carry out the lamination keeping.
The 90th, control part, and carry out handshaking between other control parts, and import the tray position signal by the tray sensor that does not have expression among the figure, and import the substrate location signal of transport object by the transport object sensor.Control part 90 is controlled the belt conveyor 76 that has elevator according to these signal output pallet lifting signals S1, makes the pallet lifting in station 74,75.Control part 90 delivery airs ejections signal S2, S3 control the float conveyers 78,79 in the station 74,75, and the control transport object is from the taking-up of pallet or put into.Control part 90 is according to elevator control signal S4, the elevators 86 in the pallet warehouse 80 controlled, and expanded according to belt conveyor and to open the expansion that signal S5 opens belt conveyor 82 to expansion and drive row control into.And chuck 88 is controlled by chuck signal S6.
Be provided with float conveyer 92 between station 74,75, be used for transport object is floated conveyance, it and float conveyer shown in Figure 5 are same devices.And control part 90 controls float conveyer 92 by floating conveyance control signal S7, S8, will be than the inside of the also low downside of 1 long and short dash line of Fig. 7 as processing equipment or testing fixture etc.
Fig. 8, Fig. 9 represent the structure of pallet 100 and station 74.The 94th, elevator is used for the lifting of belt conveyor 76, and best, comparison transport object is carried out the required assembly that conveyance uses that floats of precise placement makes belt conveyor 76 liftings better.The bottom of pallet 100 is provided with opening 108, as entering into opening 108, in other words with the angle of overlooking see be folding and unfolding in opening 108 like that, will float with assembly 102, advance, center element 106 these 3 assemblies will be provided on the float conveyer 78 with assembly 104.As Fig. 1～shown in Figure 5, because these assemblies make transport object float conveyance by the air-flow from fan, thereby can substitute fan with blowing engine, also can be with nozzle substituted fan shown in Figure 6.
Advancing the central portion that is configured in the amplitude direction with assembly 104 along the conveyance direction Cheng Liezhuan ground of transport object, from the top of Fig. 8 downwards, see from the side, is just to spray air obliquely and advance transport object.Float with assembly 102 advance both sides with assembly 104, to directly over spray air, transport object is floated.Float distance and be for example about 2～3mm and since float with between the bottom surface of assembly 102 and transport object apart from little or nothing, thereby promptly use spray volume seldom that it is stably floated.To center element 106 to the inboard of the rectangular direction of conveyance direction of floating conveyance ejection air, be offset about transport object preventing.Under the situation of the float conveyer 79 of station 75, for the transport object that float conveyer 92 conveyances are come stops in the pallet, for example the settings such as innermost in the conveyance direction stop to use assembly, to the direction ejection air opposite with direction of propulsion transport object are stopped.Each structure of all the other of float conveyer 79 is same with float conveyer 78.
110, the 110th, wall portion, the side of the front and back when being positioned at belt conveyor 72,76 conveyance pallets 100 is provided with projection 112 at an upper portion thereof, fastens with the hole that does not have expression among the figure that is arranged on wall portion 110 bottom surfaces, can be with pallet 100 laminations.In the side of pallet 100, flange 114,115 is being set highlightedly, carry out conveyance by belt conveyor by the bottom surface of flange 114 from pallet 100.Because flange 115 is to be used for belt conveyor conveyance pallet 100 time, to make the direction of transfer conversion rectangular, thereby can not be provided with especially.And 116 are lower part walls, though be arranged on the position that is lower than flange 114,115, also can not be provided with especially.And then with flange 114,115 be provided in not with pallet 100 in the equitant position of mounting portion of transport object on so that when pallet 100 being carried out the lamination keeping, dust is fallen in the mounting portion.
The 120th, opening is separately positioned on the above-below direction of pallet 100 of Fig. 8, is used for hand of manipulator etc. to be inserted into coming the transfer transport object in the pallet 100.Wall portion 118 is arranged on the left and right sides of opening 120, is used to prevent that transport object from coming off from pallet.In addition opening 120 can be set, highly make the wall portion of the pallet 100 of the above-below direction of Fig. 8 consistent with the height of wall portion 118.The 122nd, a plurality of projections are used to support the bottom surface of transport object.
Figure 10 represents the algorithm of transport object from the pallet taking-up.Is unit conveyance to the right with transport object with the pallet from the left side of Fig. 7, till arriving station 74, by belt conveyor 72 conveyances.In the time of in pallet stops at station 74, belt conveyor is descended, for example meanwhile, from float with assembly to directly over spray air, thereby begin floating of transport object.Also can make pallet descend, in case transport object transferred to float with assembly or advance with after above the assembly etc., can begin floating of transport object.But since with the decline (decline of belt conveyor) of pallet when almost side by side beginning to float, will transport object transfer to float with assembly or advance it is floated, thereby the possibility of damage transport object is just littler with assembly etc.Belt conveyor descends, and when the wall portion 118 of aspect ratio Fig. 9 of transport object is also high, begins to spray air from advancing with assembly, and transport object and wall portion 118 are taken out from pallet uninterruptedly.Move into the inside of handling device or testing fixture from the transport object that pallet takes out by float conveyer 92, carry out suitable processing.And the pallet that becomes sky is taken care of in the pallet warehouse 80 of Fig. 7.
Under with the situation of transport object mounting to the pallet, 80 grades are replenished the pallet of sky to station 75 from the pallet warehouse, and the belt conveyor 76 that has elevator is descended, and by float conveyer 92 transport object are moved into float conveyer 79 in the station 75.In this case, by preventing that from the air-flow that stops with assembly the depths of transport object and pallet from clashing.Position to the transport object on the station 75 monitors, when entering of transport object finished, order according to the rules made self-propelled with assembly or stop to stop with the air of assembly, follows, when belt conveyor is risen, make simultaneously from the air that floats with assembly etc. to stop ejection.In this case, preferably also be that transport object is not directly transferred on the pallet from float state contiguously with floating with assembly 102 grades.
Claims (4)
1. conveyer, it is respectively to place a slice transport object and the conveyer that carries out conveyance on pallet, it is characterized in that, bottom at pallet is provided with opening, but also being provided with station, this station has the opening that is used for via the tray bottom gas ejection is floated the float conveyer of conveyance and the belt conveyor that tray conveying is used to transport object.
2. conveyer as claimed in claim 1, it is characterized in that, the ejection assembly of overlooking in the opening that is housed in the tray bottom is being set on above-mentioned float conveyer, and be provided with and be used to make float conveyer and above-mentioned pallet to transmit lifting mechanism, and make the position of above-mentioned ejection assembly and be in also conversion freely between the state of bottom of ratio open at the state in entering into above-mentioned opening with belt conveyor lifting relatively.
3. conveyer as claimed in claim 1, it is characterized in that, at least be provided with and float the ejiction opening that is used as above-mentioned float conveyer with ejiction opening and conveyance with 2 kinds of ejiction openings of ejiction opening, and float make with ejiction opening transport object float to the hands-off height of pallet after, transport object is advanced outside pallet with ejiction opening in conveyance.
4. conveyer as claimed in claim 2, it is characterized in that, at least be provided with and float the ejiction opening that is used as above-mentioned float conveyer with ejiction opening and conveyance with 2 kinds of ejiction openings of ejiction opening, and float make with ejiction opening transport object float to the hands-off height of pallet after, transport object is advanced outside pallet with ejiction opening in conveyance.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003305250A JP3876867B2 (en) | 2003-08-28 | 2003-08-28 | Transport system |
| JP305250/2003 | 2003-08-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1590255A true CN1590255A (en) | 2005-03-09 |
Family
ID=34408721
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2004100644984A Pending CN1590255A (en) | 2003-08-28 | 2004-08-27 | Conveyer |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP3876867B2 (en) |
| KR (1) | KR100702402B1 (en) |
| CN (1) | CN1590255A (en) |
| TW (1) | TW200508130A (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100838107B1 (en) * | 2007-01-30 | 2008-06-13 | 주식회사 케이엔제이 | Substrate transfering apparatus |
| JP5604940B2 (en) * | 2010-03-31 | 2014-10-15 | 株式会社Ｉｈｉ | Levitation transfer device |
| JP7374591B2 (en) * | 2019-02-13 | 2023-11-07 | 株式会社東京精密 | Wafer presence detection device |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2713551B2 (en) * | 1994-06-17 | 1998-02-16 | 四国電力株式会社 | Transfer device |
| JPH11322101A (en) * | 1998-05-12 | 1999-11-24 | Canon Inc | Sheet paper feeder and image reading device provided with the same |
-
2003
- 2003-08-28 JP JP2003305250A patent/JP3876867B2/en not_active Expired - Fee Related
-
2004
- 2004-02-17 TW TW093103787A patent/TW200508130A/en unknown
- 2004-04-09 KR KR1020040024354A patent/KR100702402B1/en not_active IP Right Cessation
- 2004-08-27 CN CNA2004100644984A patent/CN1590255A/en active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| TW200508130A (en) | 2005-03-01 |
| JP2005075498A (en) | 2005-03-24 |
| KR20050022253A (en) | 2005-03-07 |
| JP3876867B2 (en) | 2007-02-07 |
| KR100702402B1 (en) | 2007-04-02 |
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| C06 | Publication | ||
| PB01 | Publication | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |