CN1588149A - Tunable light wave guide dispersion compensator controlled by two-section erverse electrode oriented coupler - Google Patents
Tunable light wave guide dispersion compensator controlled by two-section erverse electrode oriented coupler Download PDFInfo
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- CN1588149A CN1588149A CNA2004100531613A CN200410053161A CN1588149A CN 1588149 A CN1588149 A CN 1588149A CN A2004100531613 A CNA2004100531613 A CN A2004100531613A CN 200410053161 A CN200410053161 A CN 200410053161A CN 1588149 A CN1588149 A CN 1588149A
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- 230000001808 coupling effect Effects 0.000 abstract description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 7
- 239000010410 layer Substances 0.000 description 4
- 239000012792 core layer Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000000377 silicon dioxide Substances 0.000 description 3
- 238000004891 communication Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
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- 235000012239 silicon dioxide Nutrition 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
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- 239000011521 glass Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
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Abstract
本发明公开一种双节反向电极定向耦合器控制的可调光波导色散补偿器。在光波导微环沿其构成闭环的波导局部,设置并行的输入/输出光波导,构成定向耦合器,定向耦合器的有效长度,为其耦合长度的1倍至3倍长度之间,有效长度为计入渐变分离处的耦合影响的长度,在定向耦合器上设置两段相同长度的驱动电极,两段电极反向设置于构成定向耦合器的两根波导上,构成具有双节反向电极结构的2×2输入可控定向耦合器。这种结构的可调耦合机制可以实现全范围耦合可调,而且可以具有弯曲形状,即使是对圆形光微环,也不需要采用特别的结构处理,不会增大光微环的周长。这给器件的设计带来了极大的灵活性。此外,对多级级连的设计与实现也具有极大的灵活性。
The invention discloses an adjustable optical waveguide dispersion compensator controlled by a double-section reverse electrode directional coupler. Parallel input/output optical waveguides are set in the waveguide part where the optical waveguide microring forms a closed loop to form a directional coupler. The effective length of the directional coupler is between 1 and 3 times the coupling length. In order to take into account the length of the coupling effect at the gradual separation, two sections of driving electrodes with the same length are set on the directional coupler, and the two sections of electrodes are oppositely set on the two waveguides constituting the directional coupler, forming a double-section opposite electrode Structured 2×2 input steerable directional coupler. The adjustable coupling mechanism of this structure can realize full-range coupling adjustment, and can have a curved shape. Even for circular optical microrings, no special structural treatment is required, and the circumference of the optical microrings will not be increased. . This brings great flexibility to device design. In addition, it also has great flexibility in the design and implementation of multi-level cascading.
Description
技术领域technical field
本发明涉及光学元器件,特别涉及一种可调光波导色散补偿器。The invention relates to optical components, in particular to an adjustable optical waveguide dispersion compensator.
背景技术Background technique
随着光通信中通信速率的增大,光纤中的色散已经成为限制光传输距离的主要因素,为此,对光纤中传输的光波进行色散补偿已经变得极其重要。目前,人们已经提出了许多光色散补偿方案,这其中基于全通滤波器原理,采用光微环结构的集成光波导型光色散补偿器是极具前景的方案。With the increase of the communication rate in optical communication, the dispersion in the optical fiber has become the main factor limiting the optical transmission distance. Therefore, it has become extremely important to compensate the dispersion of the light wave transmitted in the optical fiber. At present, many optical dispersion compensation schemes have been proposed, among which the integrated optical waveguide optical dispersion compensator with optical microring structure based on the principle of all-pass filter is a very promising scheme.
采用光微环结构的光波导色散补偿器,要实现可色散补偿可调功能,则需要具有光微环的输入/输出耦合控制机制。美国贝尔实验室(Bell Labs)的麦德生等人得出了采用2×2马赫-曾德干涉结构实现耦合控制,但由于机理上的限制,耦合系数的实现存在限制,并且,由于结构上的要求,不得不增大整个光微环的周长,不利于应用。The optical waveguide dispersion compensator using the optical microring structure needs to have the input/output coupling control mechanism of the optical microring to realize the adjustable dispersion compensation function. Mai Desheng and others of Bell Labs in the United States have obtained a coupling control using a 2×2 Mach-Zehnder interference structure, but due to the limitation of the mechanism, there are limitations in the realization of the coupling coefficient, and, due to the structural In order to meet the requirements, the circumference of the entire optical microring has to be increased, which is not conducive to the application.
发明内容Contents of the invention
本发明的目的在提供一种双节反向电极定向耦合器控制的可调光波导色散补偿器,它的色散补偿可调控制功能通过采用具有双节反向电极结构的定向耦合器来实现。The object of the present invention is to provide an adjustable optical waveguide dispersion compensator controlled by a double-section reverse electrode directional coupler, whose dispersion compensation adjustable control function is realized by using a double-section reverse electrode structure directional coupler.
本发明解决其技术问题所采用的技术方案是:在光波导微环沿其构成闭环的波导局部,设置并行的输入/输出光波导,构成定向耦合器,定向耦合器的有效长度,为其耦合长度的1倍至3倍长度之间,有效长度为计入渐变分离处的耦合影响的长度,在定向耦合器上设置两段相同长度的驱动电极,两段电极反向设置于构成定向耦合器的两根波导上,构成具有双节反向电极结构的2×2输入可控定向耦合器。The technical solution adopted by the present invention to solve the technical problem is: in the waveguide part of the optical waveguide micro-ring forming a closed loop, parallel input/output optical waveguides are set to form a directional coupler, and the effective length of the directional coupler is used for coupling Between 1 and 3 times the length, the effective length is the length that takes into account the coupling effect at the gradient separation point. Two driving electrodes of the same length are set on the directional coupler, and the two sections of electrodes are set in opposite directions to form the directional coupler. A 2×2 input controllable directional coupler with a double-section opposite electrode structure is formed on the two waveguides.
光波导微环可以是圆形的,相应的输入/输出波导中与其构成具有定向耦合器的弧形部分,与光波导微环具有相同的圆心,此时的定向耦合器具有弯曲形状。The optical waveguide microring can be circular, and the corresponding input/output waveguide constitutes an arc-shaped part with a directional coupler, which has the same center of circle as the optical waveguide microring, and the directional coupler at this time has a curved shape.
光波导微环可以是田径跑道形状的,相应的输入/输出波导采用直波导,与光波导微环的直波导部分构成平行直波导的定向耦合器。The optical waveguide microring can be in the shape of a track and field, the corresponding input/output waveguide adopts a straight waveguide, and forms a directional coupler parallel to the straight waveguide with the straight waveguide part of the optical waveguide microring.
本发明具有的优点:The advantages that the present invention has:
1)可以实现全范围耦合可调,这为集成光波导型光色散补偿器的设计提供了一个方案;1) It can realize full-range coupling adjustment, which provides a solution for the design of integrated optical waveguide optical dispersion compensator;
2)由于采用定向耦合器结构,而且定向耦合器可以具有弯曲形状,即使是对圆形光微环,也不需要采用特别的结构处理,不会增大光微环的周长。这给器件的设计带来了极大的灵活性;2) Since the directional coupler structure is adopted, and the directional coupler can have a curved shape, even for a circular optical microring, no special structural treatment is required, and the circumference of the optical microring will not be increased. This brings great flexibility to the design of the device;
3)由于具有所需特性的可调光色散补偿器往往还需要通过多级级连方案来实现,采用本发明中的圆形结构,可以相当好地利用圆的周长进行耦合控制,这给多级级连的设计与实现也带来了极大的灵活性。3) Since the adjustable optical dispersion compensator with required characteristics often needs to be realized through a multi-level cascading scheme, the circular structure in the present invention can make good use of the circumference of the circle for coupling control, which gives The design and implementation of multi-level cascading also brings great flexibility.
附图说明Description of drawings
图1是双节反向电极定向耦合器控制的可调光波导色散补偿,图中光波导微环为圆形;Figure 1 is an adjustable optical waveguide dispersion compensation controlled by a double-section reverse electrode directional coupler. In the figure, the optical waveguide microring is circular;
图2是双节反向电极定向耦合器控制的可调光波导色散补偿器,图中光波导微环为田径跑道形状;Figure 2 is an adjustable optical waveguide dispersion compensator controlled by a double-section reverse electrode directional coupler. In the figure, the optical waveguide micro-ring is in the shape of a track and field track;
具体实施方式Detailed ways
图1和图2是双节反向电极定向耦合器控制的可调光波导色散补偿器。图1中光波导微环1为圆形,图2中光波导微环11为田径跑道形状。其中的1和11是光波导微环,2和12是输入/输出耦合光波导,3和13为具有双节反转电极结构的定向耦合器部分,驱动电极4和14与驱动电极5和15分别构成了双节反转电极部分。当然,这里要说明的是,电极结构仅是示意性的,具体将根据所利用的折射率效应的驱动进行设置。Figure 1 and Figure 2 are tunable optical waveguide dispersion compensators controlled by double-section opposite electrode directional couplers. In FIG. 1, the optical waveguide microring 1 is circular, and in FIG. 2, the
本发明的实施方式很多,在此以二氧化硅多层平面光波导工艺为实施例,但决非仅限于此实施例。There are many implementations of the present invention, and the silicon dioxide multilayer planar optical waveguide process is used as an example here, but it is by no means limited to this example.
以具有一定厚度二氧化硅层的硅片或玻璃为衬底材料,生长出掺杂而具有相对高折射率值的二氧化硅芯层,并用光刻与干法刻蚀,制作出的可调光色散补偿器的芯层波导。完成芯层后,再生长出折射率稍低的上限制层。对二氧化硅光波导,可以利用其热光效应实现器件的可调特性。即,在上限制层上蒸上一层金属铬,采用光刻与腐蚀的方法,在定向耦合器部位制作出具有双节反转电极结构的加热电极。由这一加热电极激励热光效应,从而获得2×2的可调定向耦合器,实现光微环与输入/输出光波导间的耦合可调,最终获得可调的光色散补偿器。Using a silicon wafer or glass with a certain thickness of silicon dioxide layer as the substrate material, grow a doped silicon dioxide core layer with a relatively high refractive index value, and use photolithography and dry etching to produce an adjustable The core layer waveguide of the optical dispersion compensator. After the core layer is completed, an upper confinement layer with a slightly lower refractive index is grown again. For silica optical waveguide, its thermo-optic effect can be used to realize the tunable characteristics of the device. That is, a layer of metal chromium is vaporized on the upper limiting layer, and a heating electrode with a double-node inverted electrode structure is fabricated on the directional coupler by photolithography and etching. The thermo-optic effect is excited by this heating electrode, so as to obtain a 2×2 adjustable directional coupler, realize the adjustable coupling between the optical microring and the input/output optical waveguide, and finally obtain an adjustable optical dispersion compensator.
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104280899A (en) * | 2014-10-27 | 2015-01-14 | 山东大学 | Silicon-based thermo-optic modulator based on micro-ring resonant cavity |
CN113267848A (en) * | 2020-02-17 | 2021-08-17 | 华为技术有限公司 | Multi-wavelength dispersion compensation device, related product and optical signal processing method |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
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CN104280899A (en) * | 2014-10-27 | 2015-01-14 | 山东大学 | Silicon-based thermo-optic modulator based on micro-ring resonant cavity |
CN104280899B (en) * | 2014-10-27 | 2016-11-23 | 山东大学 | Silica-based Thermo-optical modulator based on micro-ring resonant cavity |
CN113267848A (en) * | 2020-02-17 | 2021-08-17 | 华为技术有限公司 | Multi-wavelength dispersion compensation device, related product and optical signal processing method |
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