CN106054317B - A kind of micro-loop filter of the polarization insensitive based on silicon nanowires waveguide - Google Patents
A kind of micro-loop filter of the polarization insensitive based on silicon nanowires waveguide Download PDFInfo
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- 230000010287 polarization Effects 0.000 title claims abstract description 94
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 23
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 23
- 239000010703 silicon Substances 0.000 title claims abstract description 23
- 239000002070 nanowire Substances 0.000 title claims abstract description 21
- 239000002184 metal Substances 0.000 claims abstract description 136
- 229910052751 metal Inorganic materials 0.000 claims abstract description 136
- 238000010438 heat treatment Methods 0.000 claims abstract description 106
- 230000003647 oxidation Effects 0.000 claims abstract description 4
- 238000007254 oxidation reaction Methods 0.000 claims abstract description 4
- 238000005452 bending Methods 0.000 claims description 67
- 238000009413 insulation Methods 0.000 claims description 33
- 230000008878 coupling Effects 0.000 claims description 12
- 238000010168 coupling process Methods 0.000 claims description 12
- 238000005859 coupling reaction Methods 0.000 claims description 12
- 230000005540 biological transmission Effects 0.000 claims description 7
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 7
- 239000010931 gold Substances 0.000 claims description 7
- 229910052737 gold Inorganic materials 0.000 claims description 7
- 238000001914 filtration Methods 0.000 abstract description 6
- 230000003287 optical effect Effects 0.000 description 8
- 230000035945 sensitivity Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 230000004044 response Effects 0.000 description 4
- 230000003595 spectral effect Effects 0.000 description 4
- 239000012212 insulator Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
- G02B6/29331—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by evanescent wave coupling
- G02B6/29335—Evanescent coupling to a resonator cavity, i.e. between a waveguide mode and a resonant mode of the cavity
- G02B6/29338—Loop resonators
- G02B6/2934—Fibre ring resonators, e.g. fibre coils
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
- G02B6/29379—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means characterised by the function or use of the complete device
- G02B6/29397—Polarisation insensitivity
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Abstract
The invention discloses a kind of polarization insensitive micro-loop filter based on silicon nanowires waveguide.The heating electrode for adjusting resonance wavelength is equipped with above first micro-loop filter and the second micro-loop filter, first micro-loop filter and the second micro-loop filter singly polarize work and resonance wavelength is identical, first micro-loop filter and the second micro-loop filter are used separately as the filtering of TM polarization mode and TE polarization mode and interchangeable, two micro-loop filters are respectively provided with one group of metal area and are perhaps equipped with same group of metal area by two groups of metal electrodes of heating or Laser Oxidation waveguide is combined to correct resonance wavelength.Micro-loop filter of the present invention has the characteristics that size is small, structure is simple, to solve the problems, such as that the Polarization-Sensitive of micro-loop filter proposes a kind of feasible program.
Description
Technical field
The invention belongs to integrated opto-electronic device fields, and in particular to a kind of polarization insensitive based on silicon nanowires waveguide
Micro-loop filter.
Background technique
Micro-loop filter is led because of the features such as its size is small, and structure is simple, and functional characteristic is flexible and changeable in integrated optical device
Domain gains great popularity.Silicon nanowires waveguide based on silicon-on-insulator (Silicon On Insulator, SOI) material platform due to
It is poor with Super Hi-Index, it is strong to light field limitation capability, it is thus possible to realize ultra-compact integrated optical device structure, and have
The compatible characteristic of CMOS technology.A series of this advantage makes pass of the micro-loop filter based on silicon nanowires waveguide as researcher
One of heat injection point.
Silicon nanowires waveguide is due to very strong birefringent characteristic, the i.e. effective folding of the light of different polarization states in the waveguide
Rate difference is penetrated, different so as to cause the light path that passes through in the waveguide of light of different polarization states, this is allowed for based on silicon nanowires wave
The integrated optical device led has obviously Polarization-Sensitive characteristic.However, Polarization-Sensitive problem largely limits collection
At application of the optical device in optical fiber optical communication system.This is because the polarization state of input light is at any time in fiber optical communications
Between change, for the micro-loop filter of polarization independent, the polarization state of input light changes, will generate additional spectral line,
Influence its performance.Therefore, the Polarization-Sensitive most important of the micro-loop filter based on silicon nanowires waveguide is solved the problems, such as.For micro-
For ring wave filter, Polarization-Sensitive, solution that there are mainly two types of is solved the problems, such as.A kind of scheme be it is so-called inherently
Solve the polarization sensitivity of micro-loop filter.For micro-loop filter, Polarization-Sensitive problem is mainly there are two source, and one
The polarization sensitivity of waveguide, one be the coupled zone coefficient of coup polarization sensitivity.Inherently solve micro-loop filter
The scheme of Polarization-Sensitive problem, exactly sets about in terms of the two, on the one hand, by the design of waveguide dimensions, make waveguide for
The light of TE and TM polarization state effective refractive index having the same, so that the polarization sensitivity of waveguide is eliminated, on the other hand by adopting
The polarization sensitivity of the coupled zone coefficient of coup is eliminated with the coupler of special polarization insensitive.In this scheme, design is complicated
It is often complex, and process allowance is very small.Second scheme is then polarization diversity scheme.The thinking of this scheme is exactly
Input light is decomposed into two orthogonal polarization states, is respectively processed.This scheme largely improves design
Flexibility.But this scheme needs to introduce additional device, such as polarization beam apparatus, polarization rotator etc..To a certain degree
On, increase the complexity of system, it is also possible to there are problems that increasing device size.
Summary of the invention
In order to solve the problems, such as background technique, the purpose of the present invention is to provide one kind to be based on silicon nanowires waveguide
Polarization insensitive micro-loop filter.
The technical solution adopted by the present invention is that:
The present invention includes the first micro-loop filter and the second micro-loop filter being connected, the first micro-loop filter and second
It is equipped with above micro-loop filter for heating the metal electrode for adjusting resonance wavelength, the first micro-loop filter and the second micro-loop
Filter singly polarizes work and resonance wavelength is identical, and resonance wavelength is adjusted by heating the metal area.
First micro-loop filter and the second micro-loop filter are used separately as the filtering of TM polarization mode and TE polarization mode, and two
Person can be interchanged.
The first micro-loop filter and the second micro-loop filter is respectively provided with one group of metal area, passes through two groups of heating respectively
The resonance wavelength of the first micro-loop filter and the second micro-loop filter is adjusted in metal electrode, so that the two is identical.
The first micro-loop filter and the second micro-loop filter is equipped with same group of metal area, respectively by heating the group
Metal electrode simultaneously carries out Laser Oxidation to the micro-loop in the first micro-loop filter and the second micro-loop filter and then adjusts first micro-
The resonance wavelength of ring wave filter and the second micro-loop filter makes the two identical, realizes the movement and alignment of resonance wavelength.
The first micro-loop filter includes first annular waveguide and is symmetrically placed in the of first annular waveguide two sides
One curved waveguide and third curved waveguide, the second micro-loop filter include the second disc waveguide and are symmetrically placed in second
The second curved waveguide and the 4th curved waveguide of disc waveguide two sides；Input waveguide is connect with the input terminal of the first curved waveguide,
First curved waveguide output end is connect through the first insulation connection waveguide with the input terminal of the second curved waveguide, and the second curved waveguide is defeated
Outlet connects the first output waveguide；The output end of 4th curved waveguide is defeated through the second insulation connection waveguide and third curved waveguide
Enter end connection, the output end of third curved waveguide connect with the second output waveguide, the output end of third curved waveguide and first curved
The input terminal of bent waveguide is located at the same side of first annular waveguide.
Two groups of metal electrodes are covered with above the micro-loop filter: one group of metal electrode includes first micro- heating electrode connection
Metal area, first micro- heating electrode contacts metal area and first micro- heating heated by electrodes metal area, first micro- heating heated by electrodes
Metal area is located at the surface of first annular waveguide and is equipped with opening, and first micro- heating heated by electrodes metal area is to first annular wave
It leads and is heated, the both ends of the micro- heating heated by electrodes metal area of connection first connect gold through respective first micro- heating electrode respectively
Belong to area to connect with two first micro- heating electrode contacts metal areas；Another group of metal electrode includes second micro- heating electrode connection gold
Belong to area, second micro- heating electrode contacts metal area and second micro- heating heated by electrodes metal area, second micro- heating heated by electrodes gold
Belong to area to be located at the surface of the second disc waveguide and be equipped with opening, second micro- heating heated by electrodes metal area is to the second disc waveguide
Heated, the both ends of second micro- heating heated by electrodes metal area respectively through the respective second micro- heating electrode connection metal area and
Two second micro- heating electrode contacts metal area connections.
Same group of metal electrode is covered with above the micro-loop filter, one group of metal electrode includes that first micro- heating electrode connects
Connect metal area, first micro- heating electrode contacts metal area and first micro- heating heated by electrodes metal area, two first micro- heating electricity
Pole heating metal area be located at first annular waveguide and the second disc waveguide surface and be equipped with opening, two first it is micro- plus
Thermode heat metal area one end between by connection metal area connection, two first it is micro- heating heated by electrodes metal area it is another
Connect respectively through respective first micro- heating electrode connection metal area and two first micro- heating electrode contacts metal areas between one end
It connects.
The first micro-loop filter and the second micro-loop filter are using cascade ring structure, and micro-loop structure is by multiple cascades
Disc waveguide couple constitute.In the case of cascading ring structure, same group of metal can be covered with above described two micro-loop filters
Electrode or respective one group of metal electrode.
Between the first annular waveguide and the first curved waveguide formed first bending coupled zone, first annular waveguide and
Third is formed between third curved waveguide and is bent coupled zone, and the second bending is formed between the second disc waveguide and the second curved waveguide
Coupled zone, the 4th bending coupled zone of formation between the second disc waveguide and the 4th curved waveguide, the first bending coupled zone,
Third bending coupled zone, the 4th bending coupled zone and the second bending coupled zone are all made of the coupled structure of bending coupler.
First bending coupled zone is identical with third bending coupled zone symmetrical configuration, the 4th bending coupled zone and the second bending coupling
It is symmetrically the same to close plot structure.
The input waveguide, the first curved waveguide, the first insulation connection waveguide, the second curved waveguide, the first output wave
It leads, the second output waveguide, third curved waveguide, the first insulation connection waveguide, the 4th curved waveguide, first annular waveguide and second
Disc waveguide is single mode transport waveguide, it is preferable that the first insulation connection waveguide and the second insulation connection waveguide are all made of
Tapered waveguide structure, the width of one end and the width of the other end be not identical.
One of described first micro-loop filter and the second micro-loop filter reach the transmission loss of TM polarization state
103DB/cm magnitude, so that the TM polarization resonance of the micro-loop filter is eliminated, there is only TE to polarize resonance, and it is inclined to be operate on TE
Single polarization resonant cavity of vibration.Preferably, in the first micro-loop filter and the second micro-loop filter, one of disc waveguide it is straight
Diameter is less than the diameter of another disc waveguide.
The coupled zone of another micro-loop filter is only 0.001 magnitude to the coefficient of coup of TE polarization state, so that TE is polarized
Resonance is eliminated, there is only TM to polarize resonance, is operate on single polarization resonant cavity of TM polarization.
Basic functional principle of the invention is, by designing two being directed in TM polarization state and TE polarization state that work respectively
The micro-loop filter of single polarization work, is realized when input light is respectively TM polarization state and TE polarization state, can be by Same Wavelength
It filters out.
The micro-loop filter of the present invention two single polarization work, the micro-loop filter of one of single polarization work is only to TM
The input light of polarization state normally filters, and passes through to the input light low-loss of TE polarization state；Another singly polarizes the micro- of work
Ring wave filter only normally filters the input light of TE polarization state, and passes through to the input light low-loss of TM polarization state.Two lists
The resonance wavelength for polarizing the micro-loop of work is transferred to same resonance wave strong point, thus may be implemented the input light of two kinds of polarization states
Same Wavelength filter out.
To the first micro-loop filter of single polarization state TM polarization state response, by the structure for rationally designing bending coupled zone
Size allows the light of the TM polarization state inputted from input waveguide to obtain the suitable coefficient of coup by bending coupled zone, thus
It is exported at the first output waveguide and the second output waveguide port, i.e., the light in resonance wavelength is defeated from the second output waveguide
Out, the light of non-resonant wavelengths is exported from the first output waveguide；The light of the TE polarization state inputted from input waveguide is by bending coupling
Area hardly happens coupling, even if the second output waveguide is under resonance wavelength without through output, the light of resonance and non-resonant wavelengths
All exported from the first output waveguide.In this way when input light is TM polarization state, the second output waveguide of micro-loop filter can be with
Realize the output of resonance wavelength, the first output waveguide realizes the output of non-resonant wavelengths, that is, realizes normal filter function；And work as
When input light is TE polarization state, the light of resonance and non-resonant wavelengths is exported from the first output waveguide.Therefore, pair designed in this way
The first micro-loop filter that TM polarizes photoresponse only realizes filter function to single polarization state TM polarised light.
To the second micro-loop filter of single polarization state TE polarization state response, it is bent coupled zone by rationally designing, makes TE
Polarised light can obtain suitable coupling, to obtain normal filtering output, i.e., under resonance wavelength, from the second output waveguide
Output exports under non-resonant wavelengths from the first output waveguide.And TM polarised light has lesser coupling in bending coupled zone, together
When the second disc waveguide choose lesser bending radius, so that TM polarised light is had biggish bending loss under the bending radius, from
And realize from the second output waveguide under resonance wavelength almost without the output of TM polarised light, resonance wavelength and non-resonant wavelengths
TM polarised light is exported from the first output waveguide.
As shown in Figure 1, the polarization insensitive micro-loop filter uses two heating electrodes.By being applied to micro- heating electrode
Making alive, the resonance wavelength that can polarize the micro-loop filter of work by adjusting two lists respectively, realizes that two micro-loop filters are humorous
The long stringent alignment of vibration wave.As shown in Fig. 2, the polarization insensitive micro-loop filter can also be using single heating electrode.It is logical
Cross the heating metal area in the design process of electrode to micro- heating electrode on the micro-loop filter of two single polarization work
Resistance is designed, and realization only uses single electrode can be to the tuber function of polarization insensitive micro-loop filter.Using single
The scheme of electrode is heated, by the method for Laser Oxidation, can also realize the resonance of the micro-loop filter of two single polarization work
The alignment of wavelength moves to the resonance wavelength of polarization insensitive micro-loop filter at the wavelength of needs then by heated by electrodes.
What the present invention had has the advantages that:
Polarization insensitive micro-loop filter of the present invention, due to two single micro-loop filters difference for polarizing work of use
Single polarization state is responded, without being influenced by other polarization states, input polarization is solved and micro-loop filter is exported at random
The influence of response.
Polarization insensitive micro-loop filter of the present invention, compared to traditional polarization diversity scheme, do not introduce additional inclined
Shake beam splitter, and polarization rotator substantially reduces the complexity of device, improves the flexibility of design.
Polarization insensitive micro-loop filter of the present invention can realize filter function to the input light of random polarization state.
Detailed description of the invention
Fig. 1 is the first implementation structural schematic diagram of micro-loop filter of the present invention.
Fig. 2 is second of implementation structural schematic diagram of micro-loop filter of the present invention.
Fig. 3 is the third implementation structural schematic diagram of micro-loop filter of the present invention.
Fig. 4 is the partial enlargement diagram of Fig. 1.
Fig. 5 is transmission spectral line of the embodiment micro-loop filter when input light is TE polarization state.
Fig. 6 is transmission spectral line of the embodiment micro-loop filter when input light is TM polarization state.
In figure: 1 is input waveguide, and 2 be the first curved waveguide, and 3 connect waveguide for the first insulation, and 4 be the second curved waveguide,
5 be the first output waveguide, and 6 be the second output waveguide, and 7 be third curved waveguide, and 8 connect waveguide for the second insulation, and 9 is curved for the 4th
Bent waveguide, 10 be first annular waveguide, and 11 be the second disc waveguide, and 12, which are connected as the first micro- heating electrode, connects metal area, 13
It is second micro- heating electrode connection connection metal area for first micro- heating electrode contacts metal area, 14,15 be second micro- heating electricity
Pole contact metal area, 16 be the first bending coupled zone, and 17 are bent coupled zone for the second bending coupled zone, 18 for third, and 19 be the
Four bending coupled zones, 20 be the first micro-loop filter, and 21 be the second micro-loop filter, and 22 be first micro- heating heated by electrodes metal
Area, 23 be second micro- heating heated by electrodes metal area, and 24 be connection metal area.
Specific embodiment
With reference to the accompanying drawing 1 and embodiment the invention will be further described.
Embodiment one
As shown in Figure 1, embodiment one includes the first micro-loop filter 20 being connected and the second micro-loop filter 21 and gold
Belong to electrode, the first micro-loop filter 20 includes first annular waveguide 10 and is symmetrically placed in the first of first annular 10 two sides of waveguide
Curved waveguide 2 and third curved waveguide 7, micro-loop therein is using single first annular waveguide 10, the second micro-loop filtering
Device 21 includes the second disc waveguide 11 and the second curved waveguide 4 for being symmetrically placed in 11 two sides of the second disc waveguide and the 4th bending
Waveguide 9, micro-loop therein use single second disc waveguide 11.First annular waveguide 10 therein and the second disc waveguide 11 are adopted
With single micro-loop structure.
Input waveguide 1, the first curved waveguide 2, first insulation connection waveguide 3, the second curved waveguide 4 and the first output waveguide
5 join end to end, positioned at the same side of first annular waveguide 10 and the second disc waveguide 11；Second output waveguide 6, third bending wave
It leads the 7, second insulation connection waveguide 8 and the 4th curved waveguide 9 also joins end to end, be located at first annular waveguide 10 and the second circumferential wave
Lead 11 other side.
First group of metal electrode and second group are respectively equipped with above first micro-loop filter 20 and the second micro-loop filter 21
Metal electrode.
First group of metal electrode includes that first micro- heating electrode connects the micro- heating electrode contacts metal area of metal area 12, first
13 and the first micro- heating heated by electrodes metal area 22, first micro- heating heated by electrodes metal area 22 be located at first annular waveguide 10
Surface is simultaneously equipped with opening, and first micro- heating heated by electrodes metal area 22 is in the annular with opening, first micro- heating heated by electrodes
Metal area 22 heats first annular waveguide 10, and the both ends of first micro- heating heated by electrodes metal area 22 are respectively through respective
First micro- heating electrode connection metal area 12 is connect with two first micro- heating electrode contacts metal areas 13, first micro- heating electrode
Contact metal area 13 is located at outside micro-loop filter；
Second group of metal electrode includes that second micro- heating electrode connects the micro- heating electrode contacts metal area of metal area 14, second
15 and the second micro- heating heated by electrodes metal area 23, second micro- heating heated by electrodes metal area 23 be located at the second disc waveguide 11
Surface is simultaneously equipped with opening, and second micro- heating heated by electrodes metal area 23 is in the annular with opening, second micro- heating heated by electrodes
Metal area 23 heats the second disc waveguide 11, and the both ends of second micro- heating heated by electrodes metal area 23 are respectively through respective
Second micro- heating electrode connection metal area 14 is connect with two second micro- heating electrode contacts metal areas 15, second micro- heating electrode
Contact metal area 15 is located at outside micro-loop filter.
As shown in Figure 1, each waveguide is all made of single mode waveguide；The first annular waveguide 10 of first curved waveguide 2 and part is total
The first bending coupled zone 16 of 2 × 2 bending direction coupler is based on composition；Third curved waveguide 7 and part are first annular
Waveguide 10 collectively constitutes the first bending coupled zone 17 of the bending direction coupler based on 2 × 2.4th curved waveguide 9 and part
Second disc waveguide 11 collectively constitutes the 4th bending coupled zone 18 of the bending direction coupler based on 2 × 2.Second curved waveguide
4 and the second disc waveguide of part 11 collectively constitute the bending direction coupler based on 2 × 2 first bending coupled zone 19.First
Curved waveguide 2, first annular waveguide 10 and third curved waveguide 7 collectively form the first micro-loop filter 20.Second curved waveguide
4, the second disc waveguide 11 and the 4th curved waveguide 9 collectively form the second micro-loop filter 21.
As shown in Figure 1, the first bending coupled zone 16, third are bent coupled zone 17, two coupled zones are about first annular wave
It is symmetrical to lead 10.4th bending coupled zone 18, the second bending coupled zone 19, two coupled zones are right about the second disc waveguide 11
The first bending coupled zone 16 of distribution is claimed to distribute the light of the TM polarization state inputted from input waveguide 1 to first absolutely in proper proportions
It is thermally connected waveguide 3 and first annular waveguide 10；First bending coupled zone 16 is complete by the light of the TE polarization state inputted from input waveguide 1
Part is assigned to the first insulation connection waveguide 3；Third be bent coupled zone 17 by the light of the TM polarization state in first annular waveguide 10 with
Suitable pro rate is into the second output waveguide 6 and first annular waveguide 10.Second bending coupled zone 19 will be from input waveguide 1
The light of TE polarization state of the input by the first insulation connection waveguide 3 is distributed in proper proportions to the first output waveguide 5 and first
In disc waveguide 11；Second bending coupled zone 19 will connect the TM polarization state of waveguide 3 from the input of input waveguide 1 by the first insulation
Light overwhelming majority distribution to the first output waveguide 5；4th bending coupled zone 18 polarizes the TE in the second disc waveguide 11
The light of state is distributed in proper proportions into the second insulation connection waveguide 5 and the second disc waveguide 11.
Embodiment two
As shown in Fig. 2, embodiment two includes the first micro-loop filter 20 being connected and the second micro-loop filter 21 and gold
Belong to electrode, the first micro-loop filter 20 includes first annular waveguide 10 and is symmetrically placed in the first of first annular 10 two sides of waveguide
Curved waveguide 2 and third curved waveguide 7, micro-loop therein is using single first annular waveguide 10, the second micro-loop filtering
Device 21 includes the second disc waveguide 11 and the second curved waveguide 4 for being symmetrically placed in 11 two sides of the second disc waveguide and the 4th bending
Waveguide 9, micro-loop therein use single second disc waveguide 11.First annular waveguide 10 therein and the second disc waveguide 11 are adopted
With single micro-loop structure.
Input waveguide 1, the first curved waveguide 2, first insulation connection waveguide 3, the second curved waveguide 4 and the first output waveguide
5 join end to end, positioned at the same side of first annular waveguide 10 and the second disc waveguide 11；Second output waveguide 6, third bending wave
It leads the 7, second insulation connection waveguide 8 and the 4th curved waveguide 9 also joins end to end, be located at first annular waveguide 10 and the second circumferential wave
Lead 11 other side.
Same group of metal electrode is equipped with above first micro-loop filter 20 and the second micro-loop filter 21.This group of metal electrode
Including first micro- heating electrode connection micro- heating electrode contacts metal area 13 of metal area 12, first and first micro- heating heated by electrodes
Metal area 22, two first micro- heating heated by electrodes metal areas 22 are located at first annular waveguide 10 and the second disc waveguide 11
Surface and be equipped with opening, first micro- heating heated by electrodes metal area 22 is in the annular of band opening, and two the first micro- heating are electric
Pole is heated and is connected between one end of metal area 22 by connection metal area 24, two first micro- heating heated by electrodes metal areas 22
Respectively through respective first micro- heating electrode connection metal area 12 and two first micro- heating electrode contacts metals between the other end
Area 13 connects, and first micro- heating electrode contacts metal area 13 is located at outside micro-loop filter.
Embodiment three
As shown in Figure 1, embodiment three includes the first micro-loop filter 20 being connected and the second micro-loop filter 21 and gold
Belong to electrode, the first micro-loop filter 20 includes three cascade first annular waveguides 10 and is symmetrically placed in first annular waveguide 10
The first curved waveguide 2 and third curved waveguide 7 of two sides after cascade, the second micro-loop filter 21 include three cascade second rings
Shape waveguide 11 and the second curved waveguide 4 and the 4th curved waveguide 9 for being symmetrically placed in two sides after the second disc waveguide 11 cascade.The
One disc waveguide 10 and the second disc waveguide 11 use the cascade structure of multiple micro-loops.
Input waveguide 1, the first curved waveguide 2, first insulation connection waveguide 3, the second curved waveguide 4 and the first output waveguide
5 join end to end, the same side after first annular waveguide 10 and the second disc waveguide 11 cascade；Second output waveguide 6, third
The insulation of curved waveguide 7, second connection waveguide 8 and the 4th curved waveguide 9 also join end to end, and are located at first annular waveguide 10 and second
The other side after the cascade of disc waveguide 11.
Three disc waveguides are of coupled connections, and in the case of cascading ring structure, can be covered with same group above two disc waveguides
Metal electrode or respective one group of metal electrode.
Using two groups of separated metal electrodes specifically as shown in figure 3, one group of metal electrode includes that first micro- heating electrode connects
Connect the micro- heating electrode contacts metal area 13 of metal area 12, first and first micro- heating heated by electrodes metal area 22, multiple first rings
Shape waveguide 10 is arranged along linear interval, and the surface of each first annular waveguide 10 is covered with symmetrical semi-circular metal area, institute
There is the semi-circular metal area in first annular waveguide 10 to constitute first micro- heating heated by electrodes metal area 22；Same first annular wave
It leads two on 10 semi-circular metal areas to be not connected with, between the semi-circular metal area of the adjacent first annular waveguide 10 in the same side
It is connected；The 10 semi-circular metal area edge of first annular waveguide of one side edge is connected after cascade, after being located at cascade
The semi-circular metal area edge of the first annular waveguide 10 of another side edge is not connected with, and has opening, the both ends point of opening
It is not connect through respective first micro- heating electrode connection metal area 12 with two first micro- heating electrode contacts metal areas 13, first
Micro- heating electrode contacts metal area 13 is located at outside micro-loop filter.It is similarly identical for another group of metal electrode arrangement mode.
The specific implementation course of work of the invention are as follows:
Optical signal all the way is respectively carried by two polarization state basic modes of transverse electric TE or horizontal magnetic TM to input from input waveguide 1.By
When the first micro-loop filter 20, since the first bending coupled zone 16 and third bending coupled zone 17 are designed as meeting phase to TM mode
Position matching, so the available reasonable coupling of TM polarization state.For the input light of TM polarization state, by the first bending coupled zone
16, it is partly coupled in the first insulation connection waveguide 3.Remaining light is coupled to first annular wave by the first bending coupled zone 16
It leads in 10.The light being coupled in first annular waveguide 10 is bent coupled zone 17 by third, and has the light of part TM polarization state, from
Third curved waveguide 7 is coupled in first annular waveguide 10, exports from the second output waveguide 6, and remaining light is bent by third
Coupled zone 17 be coupled to first annular waveguide 10 relaying resume it is defeated.In the resonance wave strong point of the first micro-loop filter 20, due to light
The light path transmitted in first annular waveguide 10 one week is the integral multiple of wavelength, and enhancing effect in field occurs in first annular waveguide 10
It answers.
The light of resonance wave strong point is interfered mutually long to export at the second output waveguide 6, in the first insulation connection waveguide 3
Place's interference cancellation is to no output.For the first micro-loop filter 20, the light at non-resonant wavelengths is then all output to first absolutely
It is thermally connected waveguide 3.The light of the TM polarization state of the second micro-loop filter 21 is input to from the first insulation connection waveguide 3, it is curved second
Only have minimal amount of optically coupling in the second disc waveguide 11 at bent coupled zone 19, most light is by the second bending coupling
Area 19 is from the first output waveguide 5 through output.It is coupled to the minimal amount of light of the second disc waveguide 11 because in the second disc waveguide
Transmission exists compared with lossy in 11, even if can not also obtain enough enhancings in resonance wave strong point, and can not connect in the second insulation
The resonance output that the second micro-loop filter 21 is obtained at waveguide 8 is connect, so that also resonance free exports at the second output waveguide 6.
The input light of TE polarization state is input to the first micro-loop filter 20, because of bending coupled zone 16 and bending coupled zone
17 are designed as meeting phase matched just for the input light of TM polarization state, and have biggish phase mismatch to TE polarised light, because
This coupling efficiency is relatively low.Since restriction effect of the silicon nanowires waveguide to TE polarization state is stronger, and 2 He of the first curved waveguide
Between first annular waveguide 10, the spacing between third curved waveguide 7 and first annular waveguide 10 is larger, when the light of TE polarization state
When being bent coupled zone 17 by the first bending coupled zone 16 and the second curved waveguide 2 and first annular waveguide 10, hardly happen
Coupling, i.e., the light of the TE polarization state inputted from the first input waveguide 1 are coupled to first annular wave by the first bending coupled zone 16
The light in 10 is led close to zero, almost all is input in insulation connection waveguide 3 by the first curved waveguide 2.TE polarization state
Light is input in the second micro-loop filter 21 from insulation connection waveguide 3, by the second bending coupled zone 19, is partly coupled to second
In disc waveguide 11.The light of TE polarization state in 21 resonance wavelength of the second micro-loop filter occurs humorous in the second disc waveguide
Vibration is coupled to defeated from the second output waveguide 6 by curved waveguide 7 from the second insulation connects waveguide 8 from the 4th bending coupled zone 18
Out.The light of TE polarization state in 21 non-resonant wavelengths of the second micro-loop filter is exported from the first output waveguide 5.
A kind of specific embodiment of micro-loop filter based on silicon nanowires is given below.
Using structure shown in FIG. 1, the silicon nanowires optical waveguide for being based on silicon-on-insulator (SOI) material: core material is selected
It is silicon, with a thickness of 220nm；Upper and lower clad material is silica, and under-clad layer is with a thickness of 2 μm, and top covering is with a thickness of 1.5 μm.
Input waveguide 1, the first curved waveguide 2, third curved waveguide 7, the second output waveguide 6 are silicon nanowires waveguide,
Choosing its width is 350nm, so that only supporting basic mode transmission.First annular waveguide 10 uses width for the silicon nanowires of 590nm
Waveguide.First annular waveguide 10 and the first curved waveguide 2, third curved waveguide 7 are directed to TM and meet phase matched.First annular wave
Lead 10 bending radius be 10 μm, the first curved waveguide 2, third curved waveguide 7 bending radius be 11.1 μm.First annular wave
Lead 10 and first curved waveguide 2, third curved waveguide 7 be isocentric circular arc.Second curved waveguide 4, the first output waveguide the 5, the 4th
Curved waveguide 9 is silicon nanowires waveguide, and choosing its width is 400nm, so that only supporting basic mode transmission.Second disc waveguide 11
Use width for the silicon nanowires waveguide of 450nm.The bending radius of second disc waveguide 11 is 3um.Second curved waveguide 4,
The bending radius of four curved waveguides 9 is 3.715um.Second disc waveguide 11 and the second curved waveguide 4, the 4th curved waveguide 9 are
Isocentric circular arc.First insulation connection waveguide 3 and the second insulation connection waveguide 8 use tapered waveguide structure.
The polarization insensitive micro-loop filter based on silicon nanowires waveguide has been made according to above-described embodiment and has been measured respectively
When being respectively TE and TM from the polarization state of 1 input light of input waveguide, at the first output waveguide 5 and the second output waveguide 6
Spectral response (as shown in Figure 5,6).From Fig. 5, Fig. 6 as can be seen that the present invention make based on the inclined of silicon nanowires waveguide
Insensitive micro-loop filter shake when input light is random polarization state, can realize the filter function to input signal, all in fact
The function of filtering out the light of 1564nm wavelength is showed.
Above-described embodiment is used to illustrate the present invention, rather than limits the invention, in spirit of the invention and
In scope of protection of the claims, to any modifications and changes that the present invention makes, protection scope of the present invention is both fallen within.
Claims (2)
1. a kind of polarization insensitive micro-loop filter based on silicon nanowires waveguide, it is characterised in that:
Including the first micro-loop filter (20) and the second micro-loop filter (21) being connected, the first micro-loop filter (20) and
The heating electrode for adjusting resonance wavelength, the first micro-loop filter (20) and are equipped with above two micro-loop filters (21)
List polarizes work to two micro-loop filters (21) and resonance wavelength is identical, and resonance wavelength is adjusted by heating metal area；
The first micro-loop filter (20) includes first annular waveguide (10) and is symmetrically placed in first annular waveguide (10)
The first curved waveguide (2) and third curved waveguide (7) of two sides, the second micro-loop filter (21) include the second circumferential wave
It leads (11) and is symmetrically placed in second curved waveguide (4) and the 4th curved waveguide (9) of the second disc waveguide (11) two sides；Input
Waveguide (1) is connect with the input terminal of the first curved waveguide (2), and the first curved waveguide (2) output end connects waveguide through the first insulation
(3) it is connect with the input terminal of the second curved waveguide (4), the second curved waveguide (4) output end connects the first output waveguide (5)；The
The output end of four curved waveguides (9) is connect through the second insulation connection waveguide (8) with the input terminal of third curved waveguide (7), third
The output end of curved waveguide (7) is connect with the second output waveguide (6), the output end and the first bending wave of third curved waveguide (7)
The input terminal for leading (2) is located at the same side of first annular waveguide (10)；
The first bending coupled zone (16), the first ring are formed between the first annular waveguide (10) and the first curved waveguide (2)
Third bending coupled zone (17), the second disc waveguide (11) and second are formed between shape waveguide (10) and third curved waveguide (7)
The second bending coupled zone (19), shape between the second disc waveguide (11) and the 4th curved waveguide (9) are formed between curved waveguide (4)
At the 4th bending coupled zone (18), first bending coupled zone (16), third bending coupled zone (17), the 4th bending coupling
Area (18) and the second bending coupled zone (19) are all made of the coupled structure of bending coupler；
Metal area is arranged in the first micro-loop filter (20) and the second micro-loop filter (21), is divided into two kinds of embodiment party
Formula:
The first embodiment, the first micro-loop filter (20) and the second micro-loop filter (21) are respectively provided with one group of metal
Area, respectively by two groups of metal electrodes of heating to the resonance wavelength of the first micro-loop filter (20) and the second micro-loop filter (21)
It is adjusted, so that the two is identical；
Two groups of metal electrodes are covered with above the micro-loop filter:
One group of metal electrode includes that first micro- heating electrode connects metal area (12), first micro- heating electrode contacts metal area (13)
With first micro- heating heated by electrodes metal area (22), first micro- heating heated by electrodes metal area (22) is located at first annular waveguide
(10) surface is simultaneously equipped with opening, and first micro- heating heated by electrodes metal area (22) adds first annular waveguide (10)
Heat, the both ends of first micro- heating heated by electrodes metal area (22) are respectively through respective first micro- heating electrode connection metal area (12)
It is connect with two first micro- heating electrode contacts metal areas (13)；
Another group of metal electrode includes that second micro- heating electrode connects metal area (14), second micro- heating electrode contacts metal area
(15) and second micro- heating heated by electrodes metal area (23), second micro- heating heated by electrodes metal area (23) are located at the second circumferential wave
It leads the surface of (11) and is equipped with opening, second micro- heating heated by electrodes metal area (23) adds the second disc waveguide (11)
Heat, the both ends of second micro- heating heated by electrodes metal area (23) are respectively through respective second micro- heating electrode connection metal area (14)
It is connect with two second micro- heating electrode contacts metal areas (15)；
Second of embodiment, the first micro-loop filter (20) and the second micro-loop filter (21) are equipped with same group of metal
Area, respectively by this group of metal electrode of heating and to the micro-loop in the first micro-loop filter (20) and the second micro-loop filter (21)
It carries out Laser Oxidation and then the resonance wavelength for adjusting the first micro-loop filter (20) and the second micro-loop filter (21) makes the two
It is identical, realize the movement and alignment of resonance wavelength；
Same group of metal electrode is covered with above the micro-loop filter, one group of metal electrode includes first micro- heating electrode connection gold
Category area (12), first micro- heating electrode contacts metal area (13) and first micro- heating heated by electrodes metal area (22), two first
Micro- heating heated by electrodes metal area (22) is located at the surface of first annular waveguide (10) and the second disc waveguide (11) simultaneously
Equipped with opening, connected between one end of two first micro- heating heated by electrodes metal area (22) by connection metal area (24), two
Metal is connected through respective first micro- heating electrode respectively between the other end of a first micro- heating heated by electrodes metal area (22)
Area (12) is connect with two first micro- heating electrode contacts metal areas (13)；
The first micro-loop filter (20) and the second micro-loop filter (21) are using cascade ring structure, and micro-loop structure is by multiple
Cascade disc waveguide coupling is constituted；
One of the first micro-loop filter (20) and the second micro-loop filter (21) micro-loop filter is to TM polarization state
Transmission loss reach 103The coupled zone of dB/cm magnitude, another micro-loop filter is only to the coefficient of coup of TE polarization state
0.001 magnitude.
2. a kind of polarization insensitive micro-loop filter based on silicon nanowires waveguide according to claim 1, feature exist
In: the input waveguide (1), the first curved waveguide (2), the first insulation connection waveguide (3), the second curved waveguide (4), first
Output waveguide (5), the second output waveguide (6), third curved waveguide (7), the first insulation connection waveguide (8), the 4th curved waveguide
(9), first annular waveguide (10) and the second disc waveguide (11) are single mode transport waveguide, the first insulation connection waveguide
(3) and the second insulation connection waveguide (8) is all made of tapered waveguide structure, and the width of one end and the width of the other end be not identical.
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| EP3730981B1 (en) * | 2018-01-18 | 2022-10-26 | Huawei Technologies Co., Ltd. | Method and apparatus for wavelength calibration of a microring filter |
| CN110286444B (en) * | 2019-06-14 | 2020-07-14 | 浙江大学 | Reconfigurable micro-ring optical switch based on phase change material |
| CN111610650B (en) * | 2020-06-16 | 2022-04-29 | 东南大学 | Three-dimensional integrated programmable optical filter |
| CN113267908B (en) * | 2021-05-20 | 2022-07-15 | 燕山大学 | Cascaded double-micro-ring resonant cavity filter based on diamond waveguide |
| CN113866896B (en) * | 2021-09-18 | 2022-05-27 | 华中科技大学 | High Q value micro-ring resonator |
| CN115189799B (en) * | 2022-09-08 | 2022-12-23 | 之江实验室 | Broadband wavelength division demultiplexer based on reverse design and wavelength automatic feedback |
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