CN103257462B - Based on dynamic tunable filter and the tuning methods of Polarization Controller and waveguide optical grating - Google Patents
Based on dynamic tunable filter and the tuning methods of Polarization Controller and waveguide optical grating Download PDFInfo
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Abstract
The invention discloses a kind of dynamic tunable filter based on Polarization Controller and waveguide optical grating and tuning methods thereof.This filter construction comprises Polarization Controller and waveguide optical grating two parts, wherein Polarization Controller is the inclined device of line, waveguide optical grating cuts lithium columbate crystal as substrate using X, substrate makes plough groove type waveguiding structure, waveguide end etching wrinkle rank Bragg grating, plough groove type waveguide and wrinkle Bragg grating both sides, rank are all amassed and are crossed electrode.Realize reflecting the tuning fast of resonance wavelength by regulating the voltage being added in wrinkle Bragg grating both sides, rank, then regulate the voltage being added in plough groove type waveguide both sides to realize the high speed of reflection wave phase place tuning, the angle of the inclined device of last control line realizes the Dynamic controlling of reflection wave light intensity.Filtering device of the present invention possesses the advantages such as large, tunable highly sensitive, the good stability of integrated level, can be applicable to the jumbo all-optical network communication of hypervelocity.
Description
Technical Field
The invention relates to a fast tunable narrow-band filter, in particular to a dynamic tunable filter based on a polarization controller and a waveguide grating.
Background
The grating made of optical fiber or optical waveguide is used as a basic wavelength selective component, and has wide application in the fields of optical communication and optical sensing. According to the size of the grating period, the grating can be divided into a long period grating with the period length of 100 μm magnitude and a Bragg grating with the period size of below 1 μm, wherein the Bragg grating with the short period can reflect back the specific wavelength meeting the Bragg condition greatly, and has the function of narrow-band filtering.
The fiber grating is easy to manufacture, low in loss and convenient to connect, and is mainly used as an optical filter, a dispersion compensator, an optical sensor and the like in the fields of optical communication and optical sensing, but because the fiber grating is limited by fiber materials (quartz glass) and structures (cylindrical cladding structures), only the chronic tuning (the tuning rate is generally in the magnitude of ms) based on the elasto-optical effect (stress) and the thermo-optical effect (temperature) can be realized, and the fiber grating is in multi-stage cascade connection with great loss, large-scale integration is difficult to realize, so that the action and application of the fiber grating are greatly limited, and the fiber grating is difficult to apply to a high-speed real-time large-capacity all-optical network. In order to break through the limitation of the optical fiber material, it is an effective solution to use the optical waveguide made of special material to replace the traditional optical fiber to manufacture the grating device.
The waveguide grating is made of electro-optic materials, the electro-optic effect with high response speed is utilized to realize electric control tuning, and the defect of low tuning speed of the traditional fiber grating can be overcome. Lithium niobate crystal is the most mature electro-optical material with excellent comprehensive indexes discovered at present, integrates the optical properties of electro-optical, nonlinearity, photorefractive effect and the like, has the advantages of easy growth and polishing, low cost, stable physical and chemical properties and the like, and is widely used as an electro-optical modulator, a wavelength converter and the like.
In physical science and newspaper of No. 10 of No. 54 of 10.2005, Wang Yi Ping, Chen Jian Ping et al, a "fast tunable electro-optic polymer waveguide grating" was published, which can realize nanosecond tuning of resonant wavelength by linear electro-optic effect of polarized polymer, with tuning sensitivity of 6.1pm/v, and overcomes the disadvantages of slow tuning speed and difficult large-scale integration of fiber grating. However, the waveguide grating adopts the inverted ridge waveguide, the requirement on the manufacturing process is high, the polarization control cannot be realized by the device, and the polarization independence needs to be realized by the assistance of other designs.
Electronically controlled tunable waveguide gratings based on lithium niobate crystals were later reported. (L Pierno1, M Dispenza1, ASecchi1, A lithium niobate electrically-tunable Bragg filter magnetically tunable, IOP PUBLISHING, 2008, 10) in this report a lithium niobate Thermally Annealed Proton Exchange (TAPE) waveguide was employed to experimentally achieve a Bragg filter with a tuning sensitivity of 5pm/v, confirming the electrically controlled tunability of the lithium niobate Bragg filter. However, the filter is polarization dependent and cannot achieve phase and amplitude control of the reflected wave.
In "semiconductor optoelectronics", volume 31, 2010, vol.31, sun yang, xu scholar, tou dao guang, cheng shao wu, et al, published "design and fabrication of SOI sub-micron waveguide grating", they proposed the fabrication of sub-micron waveguide grating with grating period 380nm and duty ratio 16:19 by combining electron beam lithography and plasma etching, and proposed a way to implement a precise waveguide bragg structure, but in the report, the waveguide is fabricated by SOI material, so the device does not have fast tunability.
Disclosure of Invention
The invention aims to solve the problems of low tuning speed of the traditional fiber bragg grating, poor stability of an electro-optic polymer waveguide grating device and high insertion loss, and provides a dynamic tunable filter based on a polarization controller and a waveguide grating, which has the advantages of simple structure, stable performance and higher tuning sensitivity. The filter has high integration level, simple structure and high resonant wavelength tuning sensitivity, and can realize the control of the phase and the amplitude of the reflected wave.
The structure of the dynamically tunable filter based on the polarization controller and the waveguide grating provided by the invention comprises a polarization controller and a waveguide grating (see figure 1), wherein the polarization controller is connected with the waveguide grating through optical fiber coupling.
The polarization controller is a linear polarizer, changes the polarization state of incident light into linear polarization, and controls the polarization direction of the linear polarization, thereby realizing the control of the light intensity of reflected waves.
The waveguide grating comprises a substrate of the waveguide grating, a groove type waveguide structure is manufactured on the substrate, one end of the groove type waveguide is etched with a corrugated Bragg grating, and phase adjusting electrodes (V) are arranged on two sides of the groove type waveguidea) Wavelength tuning electrodes (V) are arranged on two sides of the corrugated Bragg gratingb) Phase adjusting electrode (V)a) And a wavelength tuning electrode (V)b) An insulating (isolating) belt is arranged between the two.
The substrate of the waveguide grating is an X-cut lithium niobate crystal, X, Y, Z is an optical coordinate system of the lithium niobate substrate, the Z axis is the optical axis of the substrate crystal, and the direction of an external electric field is parallel to the Z axis under the electrified condition. The groove type waveguide is formed by adopting a thermal annealing proton exchange mode (APE), and the corrugated Bragg grating is obtained by combining electron beam lithography and reactive particle etching.
The tuning method of the dynamic tunable filter based on the polarization controller and the waveguide grating provided by the invention realizes the rapid dynamic tuning of the resonant wavelength and the reflected wave phase of the filter in a voltage applying mode, realizes the regulation and control of the reflected wave light intensity in a mode of adjusting the polarization direction of the linear polarizer, and finally realizes the simultaneous independent tuning of the reflected resonant wavelength, the reflected wave phase and the reflected wave light intensity.
The tuning method of the invention comprises the following steps:
(1) first by adjusting the voltage v applied to the wavelength tuning electrode 2bThe reflected resonance wavelength is controlled (the voltage applied to the electrode can be direct current voltage or modulated alternating current voltage), and the nanosecond tuning speed of the resonance wavelength can be realized by utilizing the linear electro-optic effect of the lithium niobate crystal.
(2) Determining the reflection resonance wavelength (i.e. the applied wavelength tuning voltage v)bDetermined), by adjusting the voltage v applied to the phase adjusting electrode 3aThe phase of the reflected resonant wave is controlled (the voltage applied to the electrode can be direct current voltage or modulated alternating current voltage), and the high-speed tuning of the phase of the reflected wave can be realized by utilizing the linear electro-optical effect of the lithium niobate crystal.
(3) And the light intensity of the reflected resonant wave is controlled by adjusting the polarization controller 1 and the included angle between the polarization direction of the linear polarization light and the Z axis of the waveguide grating substrate (namely, the X-cut lithium niobate crystal).
In the tuning step, the relation between the reflection resonance wavelength and the applied voltage is as follows:wherein r is33Is a waveguide grating substrate (i.e. X-cut lithium niobate)Crystal), n) of the crystaleIs effective abnormal refractive index in groove type waveguide (APE waveguide), Λ is grating period of corrugated Bragg grating, d is electrode spacing, and tuning of reflection resonance wavelength and external wavelength tuning voltage vbIn a linear relationship.
Reflected wave phase and applied voltage vaAnd vbThe relationship of (1) is: is the amount of phase change, v, caused by a corrugated Bragg gratingπIs and vaAssociated half-wave voltage) after determining the reflected wavelength (i.e. the wavelength tuning voltage v)bDetermination), the phase change amount of the reflected wave and the applied phase tuning voltage vaThe linear relation is formed;
the intensity of the reflected light is regulated and controlled by the relation IInverse direction=cos2(θ)IInto，IIntoFor the input light intensity, theta is the included angle between the polarization direction of the linearly polarized light and the Z axis of the substrate, and accordingly the control of the intensity of the reflected wave is realized.
The control of the resonant wavelength and the phase of the reflected wave adopts an electric control tuning mode, and the ultra-high tuning speed is realized based on the electro-optic effect of the lithium niobate crystal.
The invention has the advantages and beneficial effects that:
the invention relates to a dynamic tunable filter based on lithium niobate crystals, wherein the lithium niobate crystals are used for replacing quartz glass to manufacture a waveguide grating, the electro-optic effect of the lithium niobate crystals is utilized to realize the high-speed tuning of the waveguide grating, and the defect of low tuning speed of the traditional fiber grating is overcome. Compared with other electro-optic polymer waveguide gratings, the device has the advantages of good stability, low insertion loss and more excellent tunable performance. In addition, the invention adopts the X-cut lithium niobate crystal as the substrate, and realizes the autonomous polarization control of the device in a modulation mode that an external electric field is parallel to the optical axis without an external polarization control device. The control of the reflected wave light intensity is realized by adjusting the included angle between the linear deflector and the Z axis (optical axis) of the waveguide grating substrate.
Drawings
Fig. 1 is a schematic structural diagram of a dynamically tunable filter based on a polarization controller and a waveguide grating according to the present invention.
In the figure, 1 a polarization controller (linear polarizer) and 2 an additional wavelength tuning electrode Vb3 adding a phase adjusting electrode Va4 corrugated Bragg grating, 5 groove waveguide (APE waveguide), 6 insulating tape, 7 waveguide grating substrate (namely X-cut lithium niobate crystal), X, Y, Z are optical coordinate axes of the lithium niobate crystal respectively, Z is an optical axis, an external electric field is parallel to the Z axis, and 8 is an optical fiber.
Fig. 2 is a schematic diagram of a lateral cross-section (YZ plane) of a device structure of the present invention. In the figure, h is the depth of the APE groove type waveguide, electrodes are arranged on two sides of the waveguide, and the direction of an external electric field E is parallel to the optical axis of the crystal.
Fig. 3 is a schematic longitudinal cross-section (ZX-plane) of a device structure of the present invention. In the figure, LbIs the length of the corrugated order Bragg grating, LaThe length of the trench waveguide without grating writing, and d is the width of the waveguide (distance between two electrodes).
Fig. 4 is an electrically controlled tunability of the reflected resonance wavelength at the parameter settings of example 1.
Fig. 5 is an electrically controlled tunability of the reflected wave phase under the parameter settings of example 1.
FIG. 6 is the adjustment and control of the intensity of the reflected wave under the parameter settings of example 1.
FIG. 7 is a tuning relationship of the filter reflection spectrum with applied voltage under the parameter settings of example 2.
FIG. 8 is a graph showing the relationship between the phase of the reflected wave and the applied voltage under the parameter settings of example 2.
The present invention will be described in further detail with reference to the accompanying drawings.
Detailed Description
Examples 1,
One, dynamic tunable filter
As shown in fig. 1, the structure of the dynamically tunable filter based on the polarization controller and the waveguide grating includes two parts, i.e., the polarization controller and the waveguide grating, which are coupled via an optical fiber 8, the polarization controller controls the intensity of the reflected wave, and the waveguide grating controls the resonant wavelength and the phase of the reflected wave.
The waveguide grating comprises a substrate 7 of the waveguide grating, a groove type waveguide 5 and a corrugated Bragg grating 4 are respectively arranged at the upper part of the middle of the substrate, and phase adjusting electrodes 3 (V) are arranged at two sides of the groove type waveguidea) Wavelength tuning electrodes 2 (V) are arranged on two sides of the corrugated Bragg gratingb) Phase adjusting electrode (V)a) And a wavelength tuning electrode (V)b) With an insulating (isolating) strip 6 in between.
The waveguide grating adopts X-cut lithium niobate crystal as a substrate, and the substrate is placed in a medium containing octadecanoic acid (CH)3（CH2）16COOH) and then subjected to an appropriate annealing treatment to an APE trench waveguide 5 (see fig. 2) having a diffusion depth h =5 μm. After APE waveguide is formed, electron beam lithography is firstly carried out on one end of the waveguide, then etching is carried out on the waveguide through reactive particles, corrugated Bragg grating 4 is manufactured, finally electrodes are respectively accumulated on two sides of the groove type waveguide 5 and two sides of the corrugated Bragg grating 4, the two electrodes are isolated through insulating tape 6, and manufacturing of the device is completed.
In this embodiment, in the present inventionWidth d =10 μm of trench waveguide and length L of corrugated Bragg gratingb=10.36mm (see fig. 3), grating period Λ =362.3nm, etching depth w =150nm, etching duty ratio 1/2, voltage v applied across itb. The length of the groove type waveguide of the non-inscribed grating is La=3.45mm, and a voltage v is applied across ita. The spacing between the electrodes is equal to the width of the waveguide.
Second, tuning method
The method comprises the following steps:
1, first, by adjusting the voltage v applied to the wavelength tuning electrode 2bThe reflection resonance wavelength is controlled (the voltage applied to the electrode 2 can be direct current voltage or modulated alternating current voltage), and the nanosecond tuning speed of the resonance wavelength can be realized by utilizing the linear electro-optic effect of the lithium niobate crystal.
The relationship between the reflected resonance wavelength and the applied voltage is:wherein r is33Is the electro-optic coefficient, r, of the waveguide grating substrate (i.e., lithium niobate crystal)33=30.8pm/v，neIs the effective extraordinary refractive index, n, in a grooved waveguide (APE waveguide)e=2.139, Λ is the grating period of the rugate Bragg grating, d is the electrode spacing, tuning of the resonant wavelength and the applied wavelength tuning voltage vbIn a linear tuning relationship.
2, after the reflection resonance wavelength is determined, by adjusting the voltage v applied to the phase adjusting electrode 3aThe phase of the reflected resonance wave is controlled (the voltage applied to the electrode 3 may be a direct current voltage or a modulated alternating current voltage), and the phase of the reflected wave can be tuned at high speed by utilizing the linear electro-optical effect of the lithium niobate crystal.
Reflected wave phase and applied voltage vaAnd vbThe relationship of (1) is:wherein,is the amount of phase change, v, caused by a corrugated Bragg gratingπIs and vaThe associated half-wave voltage after the reflected resonant wavelength is determined (i.e. the applied wavelength tuning voltage v)bDetermination), reflected wave phase and applied phase tuning voltage vaIn a linear tuning relationship.
And 3, controlling the light intensity of the reflected resonant wave by adjusting the polarization controller 1 and adjusting the included angle between the polarization direction of the linearly polarized light and the Z axis of the waveguide grating substrate.
The intensity of the reflected light is regulated and controlled by the relation IInverse direction=cos2(θ)IInto，IIntoFor the input light intensity, theta is the included angle between the polarization direction of linearly polarized light and the Z axis (optical axis) of the waveguide grating substrate, thereby realizing the control of the intensity of reflected wave.
FIG. 4 shows the electrically controlled tuning of the resonant wavelength at the parameter settings of example 1, from which the reflected resonant wavelength shift and the applied voltage vbThe relationship of (A) and (B) illustrates the electronic control tunability of the resonant wavelength of the device, when the tuning voltage of the applied wavelength is changed from-100 v to +100v, the tuning range of the resonant wavelength is 2.1nm, and the tuning sensitivity is 10.4 pm/v.
FIG. 5 shows the electrically controlled tuning of the reflected wave phase under the parameter settings of example 1, from which the reflected wave phase and the applied voltage v are knownaThe relationship (2) of (c). Reflected wave phase and applied voltage va、vbThe relationship of (1) is:wherein the reflected wave phase is represented by vaAnd vbDetermined together, but in practice we will first determine the reflected resonance wavelength to be filtered out, so we consider that at a certain applied voltage vbUnder the condition that the phase of the reflected wave follows vaA change in (c). Reflected in FIG. 5The phase tuning characteristics of the reflected wave were found to be 0.5 pi/v for the resonant wavelengths of 1549.95nm and 1548.9nm, respectively.
FIG. 6 shows the control of the intensity of the reflected wave under the parameter setting of example 1, and it can be seen that the intensity of the reflected wave varies with the angle θ between the linear deflector and the Z-axis of the substrate. Because only TE mode can be transmitted in the waveguide of the device (the polarization direction is parallel to the optical axis), the light intensity of the reflected wave can be regulated and controlled by adjusting the included angle between the incident light and the optical axis of the waveguide grating substrate through adjusting the linear polarizer (1).
Example 2
In this embodiment, the width d =7 μm of the trench waveguide and the length L of the corrugated bragg grating in the present inventionb=10.36mm, grating period Λ =362.3nm, etching depth w =50nm, etching duty ratio 1/2, voltage v applied across itb. The length of the groove type waveguide of the non-inscribed grating is La=3.45mm, and a voltage v is applied across ita. The spacing between the electrodes is equal to the width of the waveguide.
FIG. 7 shows the tuning relationship between the reflection spectrum of the filter and the applied voltage under the parameter settings of example 2, and it can be seen from the figure that when the applied voltage is changed from-100 v to +100v, the tuning range of the resonant wavelength is 3nm and the tuning sensitivity is 15 pm/v. Reducing the etch depth greatly reduces the filtering performance and reducing the waveguide width (electrode spacing) increases the tuning sensitivity of the reflected wavelength.
Fig. 8 reflects the relationship between the phase of the reflected wave and the applied voltage under the parameter setting of the embodiment 2, and it can be seen from the graph that the tuning sensitivity of the phase of the reflected wave is 1 pi/v, and the tuning sensitivity of the phase is increased by decreasing the electrode distance.
In the device of the present invention, changing the parameter setting of the waveguide grating does not affect the tuning performance of the reflected wave light intensity, and the light intensity regulation performance of embodiment 2 is the same as that of embodiment 1.
Claims (10)
1. A dynamic tunable filter based on a polarization controller and a waveguide grating is characterized in that the filter structure comprises a polarization controller and a waveguide grating, the polarization controller is coupled with the waveguide grating through an optical fiber, the waveguide grating comprises a substrate of the waveguide grating, a groove type waveguide structure is manufactured on the upper portion of the substrate, a corrugated Bragg grating is etched at one end of the groove type waveguide, and phase adjusting electrodes (V) are arranged on two sides of the groove type waveguidea) Wavelength tuning electrodes (V) are arranged on two sides of the corrugated Bragg gratingb) Phase adjusting electrode (V)a) And a wavelength tuning electrode (V)b) With an insulating tape disposed therebetween.
2. The filter of claim 1, wherein the polarization controller is a linear polarizer, and the polarization state of the incident light is changed into linear polarization, and the polarization direction of the linear polarization is controlled, thereby controlling the intensity of the reflected wave.
3. The filter of claim 1, wherein the substrate of the waveguide grating is an X-cut lithium niobate crystal, X, Y, Z are the optical coordinate system of the lithium niobate substrate, respectively, the Z-axis is the optical axis of the substrate crystal, and the direction of the applied electric field is parallel to the Z-axis under the energized condition.
4. The filter of claim 1 wherein the trench waveguide is formed by thermally annealed proton exchange and the corrugated bragg grating is formed by a combination of e-beam lithography and reactive particle etching.
5. The filter according to claim 1, wherein the intensity of the reflected wave is controlled by the polarization controller portion, the resonance wavelength and the phase of the reflected wave are controlled by the waveguide grating portion, and the resonance wavelength, the phase of the reflected wave, and the intensity of the reflected wave can be tuned independently at the same time.
6. A method of tuning a dynamically tunable filter based on a polarization controller and a waveguide grating as claimed in claim 1, the method comprising the steps of:
(1) by adjusting the voltage v applied to the wavelength tuning electrodebControlling the resonant wavelength of the reflection;
(2) tuning voltage v at a wavelength determined by the reflection resonance, i.e. the applied wavelengthbAfter determination, by adjusting the voltage v applied to the phase-adjusting electrodeaControlling the reflected resonant waveThe phase of (d);
(3) and the light intensity of the reflected resonant wave is controlled by adjusting the polarization controller and the included angle between the polarization direction of the linearly polarized light and the Z axis of the waveguide grating substrate.
7. A method according to claim 6, characterized in that the resonance wavelength and the phase of the reflected wave are controlled by electrically controlled tuning means, the voltage v applied to the wavelength tuning electrode being such thatbAnd a voltage v applied to the phase adjustment electrodeaEither a dc voltage or a modulated ac voltage.
8. The method according to claim 6, wherein the relationship between the reflection resonance wavelength and the applied voltage in step (1) is:wherein r is33Is the electro-optic coefficient of the waveguide grating substrate, neFor the effective abnormal refractive index in the groove type waveguide, Λ is the period of the corrugated Bragg grating, d is the electrode distance, the variation of the reflection resonance wavelength and the external wavelength tuning voltage vbIn a linear relationship.
9. The method according to claim 6, wherein the phase of the reflected resonance wave in step (2) is related to the applied voltage vaAnd vbThe relationship of (1) is:wherein,is the amount of phase change, v, caused by a corrugated Bragg gratingπIs and vaAssociated half-wave voltage, reflecting resonant wave phase and applied phase tuning voltage v after determination of reflection wavelengthaIn a linear relationship.
10. The method according to claim 6, wherein the intensity of the reflected light in step (3) is regulated by the relation IInverse direction＝cos2(θ)IInto，IIntoFor the input light intensity, theta is the included angle between the polarization direction of linearly polarized light and the Z axis of the waveguide grating substrate, so that the regulation and control of the reflected light intensity are realized.
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| CN104597551B (en) * | 2015-02-26 | 2017-07-28 | 中国电子科技集团公司第四十四研究所 | Polarizer of high polarization extinction ratio and preparation method thereof and test device can be achieved |
| CN106597696A (en) * | 2016-12-12 | 2017-04-26 | 天津理工大学 | Wavelength-tunable narrow-band filter based on lithium niobate waveguide grating |
| CN106646934A (en) * | 2017-01-12 | 2017-05-10 | 天津理工大学 | Multi-wavelength tunable narrow-band filter based on lithium niobate crystal |
| CN107144986A (en) * | 2017-07-18 | 2017-09-08 | 山东大学 | A kind of Larger Dynamic range tunable dispersion compensator and its application based on waveguide optical grating |
| CN107894527B (en) * | 2017-12-20 | 2020-07-31 | 天津理工大学 | Random waveguide grating voltage sensor based on electro-optic effect and voltage detection method thereof |
| CN109541822B (en) * | 2018-11-26 | 2022-06-03 | 武汉邮电科学研究院有限公司 | Graphene electro-optical modulator and preparation method thereof |
| CN109270626B (en) * | 2018-11-28 | 2020-05-26 | 南京邮电大学 | Adjustable grating filter based on SOI wafer and preparation method |
| CN110658584B (en) * | 2019-10-08 | 2020-08-14 | 浙江大学 | Ultra-large bandwidth silicon-based waveguide MEMS optical switch |
| CN112346263A (en) * | 2020-11-26 | 2021-02-09 | 苏州易锐光电科技有限公司 | Bragg grating chip |
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