CN103257462A - Dynamic tunable filter based on polarization controller and waveguide grating and tuning method - Google Patents
Dynamic tunable filter based on polarization controller and waveguide grating and tuning method Download PDFInfo
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Abstract
The invention discloses a dynamic tunable filter based on a polarization controller and a waveguide grating and a tuning method. The filter structure comprises the polarization controller and the waveguide grating, wherein the polarization controller is a linearly polarized device. An X-cut lithium niobate crystal serves as a substrate of the waveguide grating, a groove-type waveguide structure is manufactured on the substrate, a wrinkly rank bragg grating is etched at one end of a waveguide, and electrodes are arranged on two sides of the groove-type waveguide and two sides of the wrinkly rank bragg grating in an electroplate mode respectively. The reflex resonant wavelength can be fast tuned by adjusting voltage exerted on the two sides of the wrinkly rank bragg grating, a reflected wave phase is tuned at a high speed by adjusting voltage exerted on two sides of the groove-type waveguide, and at last, the reflected wave light strength is dynamically controlled by controlling the angles of the linearly polarized device. The dynamic tunable filter has the advantages of being high in integration level and tunable sensitivity, good in stability, suitable for being applied to all optical network communication with ultrahigh speed and large capacity, and the like.
Description
Technical field
The present invention relates to a kind of fast tunable narrow band filter, particularly a kind of dynamic-tuning wave filter based on Polarization Controller and waveguide optical grating.
Background technology
The grating of making of optical fiber or optical waveguide is as a kind of basic wavelength selectivity components and parts, has very at optical communication and light sensory field and uses widely.Press the size in grating cycle, can be divided into Cycle Length at long-period gratings and the Bragg grating of big I of cycle below 1 μ m of 100 μ m magnitudes, wherein the short-period Bragg grating specific wavelength that can will satisfy Bragg condition reflects greatly, has the effect of narrow-band filtering.
Fiber grating is made simple and easy, loss is low, easy to connect, be used as optical filter in optical communication and light sensory field more, dispersion compensator, optical sensor etc., but because fiber grating is subjected to the restriction of fiber optic materials (quartz glass) and structure (cylinder cladding structure), be merely able to realization based on chronic tuning (tuning speed is generally in the ms magnitude) of elasto-optical effect (stress) and thermo-optic effect (temperature), and the fiber grating multi-stage cascade has very big loss, very difficult realization is integrated on a large scale, thereby its effect and application be greatly limited, and is difficult to be applied in the big capacity all-optical network of high-speed real-time.In order to break through the limitation of fiber optic materials itself, replacing conventional optical fibers with the optical waveguide of special substance, to make grating device be a kind of effective solution route.
Adopt electrooptical material to make waveguide optical grating, it is automatically controlled tuning to utilize the electrooptical effect of high response speed to realize, can solve the slow shortcoming of conventional optical fibers grating tuned speed.Lithium columbate crystal is the most ripe outstanding electrooptical material of finding at present of overall target, and optical properties such as current collection light, non-linear, photorefractive effect have easy growth and polishing, cost is low, advantages such as physical and chemical performance is stable are widely used as electrooptic modulator, wavelength shifter etc.
On the 54th the 10th phase of volume of October in 2005 " Acta Physica Sinica ", Wang Yiping, oldly build the equality people and delivered " fast tunable electro-optic polymer waveguide optical grating ", this waveguide optical grating can realize that by the linear electro-optic effect of polar polymer the nanosecond of resonance wavelength is tuning, tuning sensitivity is 6.1pm/v, has overcome fiber grating tuning speed slowly and has been difficult to extensive integrated shortcoming.What but this waveguide optical grating adopted is the inverse ridge shape waveguide, and manufacture craft requires very high, and device itself can't realize Polarization Control, need assist the realization polarization irrelevant by other design.
Reported the automatically controlled tunable waveguide optical grating based on lithium columbate crystal afterwards.(L Pierno1, M Dispenza1, A Secchi1, A lithium niobate electro-optic tunable Bragg filter fabricated by electron beam lithography, IOP PUBLISHING, 2008,10) in this report, adopted lithium niobate thermal annealing proton exchange (TAPE) waveguide, from experimentally having realized the bragg filter of tuning sensitivity 5pm/v, confirmed the automatically controlled tunability of lithium niobate bragg filter.But this wave filter polarization is relevant, and can not realize the regulation and control of reflection wave phase place and amplitude.
In the 31st the 1st phase of volume of " semiconductor optoelectronic " February in 2010, Sunyang, Xu Xuejun, slaughter twilight, Chen Shaowu, delivered " design and fabrication of SOI submillimeter wave guide grating " Deng the people, the mode that they have proposed to adopt beamwriter lithography and gas ions etching to combine realizes that the grating cycle is 380nm, dutycycle is the making of the submillimeter wave guide grating of 16:19, this report has proposed a kind of mode that can realize accurate waveguide bragg structure, but what adopt in the report is that the SOI material is made waveguide, so device does not possess fast tunable.
Summary of the invention
It is slow to the present invention seeks to solve conventional optical fibers grating tuned speed, and electro-optic polymer waveguide grating device poor stability, insert the high problem of loss, a kind of simple in structure, stable performance, the dynamic-tuning wave filter based on Polarization Controller and waveguide optical grating that tuning sensitivity is higher are provided.This wave filter integrated level height, simple in structure, resonance wavelength tuning sensitivity height, and can realize the control of reflection wave phase place and amplitude.
Dynamic-tuning wave filter based on Polarization Controller and waveguide optical grating provided by the invention, its structure comprise Polarization Controller and waveguide optical grating two parts (see figure 1), link to each other by the optical fiber coupling between Polarization Controller and the waveguide optical grating.
Described Polarization Controller partly is the inclined to one side device of line, makes incident light polarization state become the line polarisation, and the polarization direction of control line polarisation, thereby realizes the control of reflection wave light intensity.
Described waveguide optical grating comprises the substrate of waveguide optical grating, is manufactured with the plough groove type waveguiding structure in substrate, and an end etching of plough groove type waveguide has wrinkle rank Bragg grating, and plough groove type waveguide both sides are provided with phase adjusted electrode (V
a), wrinkle Bragg grating both sides, rank are provided with wavelength tuning electrode (V
b), phase adjusted electrode (V
a) and wavelength tuning electrode (V
b) between be provided with insulation (isolation) band.
The substrate of described waveguide optical grating is that X cuts lithium columbate crystal, and X, Y, Z are respectively the optical coordinate systems at the bottom of the lithium niobate base, and the Z axle is the optical axis of substrate crystal, and under power on condition, the extra electric field direction is parallel to the Z axle.Described plough groove type waveguide adopts thermal annealing proton exchange mode (APE) to form, and the method that described wrinkle rank Bragg grating utilizes beamwriter lithography and reaction particle etching to combine obtains.
The tuning methods of the dynamic-tuning wave filter based on Polarization Controller and waveguide optical grating provided by the invention, it is the quick dynamic tuning of realizing filter resonance wavelength and reflection wave phase place by the mode of impressed voltage, the mode of the polarization direction by adjusting the inclined to one side device of line realizes the regulation and control of reflection wave light intensity, finally realizes that reflection resonance wavelength, reflection wave phase place and reflection wave light intensity are simultaneously independently tuning.
Tuning methods of the present invention may further comprise the steps:
(1), at first is added in voltage v on the wavelength tuning electrode 2 by adjusting
bThe resonance wavelength (voltage that adds at electrode can be DC voltage, also can be the alternating voltage through ovennodulation) of control reflection utilizes the linear electro-optic effect of lithium columbate crystal can realize the nanosecond order tuned speed of resonance wavelength.
(2), determining that reflection resonance wavelength (namely adds wavelength tuning voltage v
bDetermine) afterwards, be added in voltage v on the phase adjusted electrode 3 by adjusting
aControl the phase place (voltage that is added on the electrode can be that DC voltage also can be the alternating voltage of modulating) of this reflection resonance wave, utilize the linear electro-optic effect of lithium columbate crystal can realize that the high speed of reflection wave phase place is tuning.
(3), by regulating Polarization Controller 1, regulate the polarization direction of line polarisation and control the light intensity that reflects resonance wave with the angle of waveguide optical grating substrate (being that X cuts lithium columbate crystal) Z axle.
In the described tuning step, the pass of reflection resonance wavelength and impressed voltage is:
R wherein
33Be the electrooptical coefficient of waveguide optical grating substrate (being that X cuts lithium columbate crystal), n
eBe effective anomaly refractive index in the plough groove type waveguide (APE waveguide), Λ is the grating cycle of wrinkle rank Bragg grating, and d is electrode separation, reflects the tuning of resonance wavelength and adds wavelength tuning voltage v
bLinear.
Reflection wave phase place and impressed voltage v
aAnd v
bThe pass be:
Be the phase change amount that wrinkle rank Bragg grating causes, v
πBe and v
aRelevant half-wave voltage), determining that behind the reflection wavelength (be wavelength tuning voltage v
bDetermine), the phase change amount of reflection wave with add phase place tuning voltage v
aLinear;
Reflection wave light intensity regulation relationship formula is I
Instead=cos
2(θ) I
Go into, I
Go intoBe the input light intensity, θ is the polarization direction of line polarisation and the angle between the substrate Z axle, realizes the control of reflection wave light intensity accordingly.
The control of resonance wavelength of the present invention and reflection wave phase place is to adopt automatically controlled tuning manner, and its superfast tuned speed is based on that the electrooptical effect of lithium columbate crystal realizes.
Advantage of the present invention and beneficial effect:
The present invention is based on the dynamic-tuning wave filter of lithium columbate crystal, replace quartz glass with lithium columbate crystal and make waveguide optical grating, utilize the electrooptical effect of lithium columbate crystal to realize that the high speed of waveguide optical grating is tuning, solved the slow drawback of conventional optical fibers grating tuned speed.Compare with other electro-optic polymer waveguide optical grating, device stability of the present invention is good, and the insertion loss is low, and tunable performance is more outstanding.The present invention adopts X to cut lithium columbate crystal and does substrate in addition, and the modulation system that extra electric field is parallel to optical axis realizes the autonomous Polarization Control of device, needn't add polarized controller.By the control of the realization of the angle between the adjusting inclined to one side device of line and the waveguide optical grating substrate Z axle (optical axis) to the reflection wave light intensity.
Description of drawings
Fig. 1 is the dynamic-tuning filter construction synoptic diagram that the present invention is based on Polarization Controller and waveguide optical grating.
Among the figure, 1 Polarization Controller (the inclined to one side device of line), 2 add wavelength tuning electrode V
b, 3 add phase adjusted electrode V
a, 4 wrinkle rank Bragg gratings, 5 plough groove type waveguides (APE waveguide), 6 para tapes, 7 waveguide optical grating substrates (being that X cuts lithium columbate crystal), X, Y, Z are respectively the optical coordinate axle of lithium columbate crystal, and Z is optical axis, and extra electric field is parallel to the Z axle, and 8 is optical fiber.
Fig. 2 is lateral cross section (YZ face) synoptic diagram of device architecture of the present invention.Among the figure, h is APE plough groove type Waveguide Depth, and the both sides of waveguide are electrode, and the direction of extra electric field E is parallel to the optical axis of crystal.
Fig. 3 is longitudinal cross-section (ZX face) synoptic diagram of device architecture of the present invention.Among the figure, L
bBe the length of wrinkle rank Bragg grating, L
aFor not inscribing the plough groove type waveguide length of grating, d is the width (two interelectrode distances) of waveguide.
Fig. 4 arranges the automatically controlled tuning performance of reflection resonance wavelength down in embodiment 1 parameter.
Fig. 5 arranges the automatically controlled tuning performance of reflection wave phase place down in embodiment 1 parameter.
Fig. 6 arranges the control of reflection wave light intensity down in embodiment 1 parameter.
Fig. 7 is the tuning relation that following wave filter reflectance spectrum and impressed voltage are set in embodiment 2 parameters.
Fig. 8 is the regulation relationship that following reflection wave phase place and impressed voltage are set in embodiment 2 parameters.
Below in conjunction with accompanying drawing the present invention is done further and to specify.
Embodiment
One, dynamic-tuning wave filter
As shown in Figure 1, be the dynamic-tuning wave filter based on Polarization Controller and waveguide optical grating, its structure comprises Polarization Controller and waveguide optical grating two parts, link to each other by optical fiber 8 couplings between Polarization Controller and the waveguide optical grating, utilize the Polarization Controller part that the reflection wave light intensity is controlled, utilize the waveguide optical grating part that resonance wavelength and reflection wave phase place are controlled.
Described waveguide optical grating comprises the substrate 7 of waveguide optical grating, is respectively arranged with plough groove type waveguide 5 and wrinkle rank Bragg grating 4 in the middle upper portion of substrate, and plough groove type waveguide both sides are provided with phase adjusted electrode 3(V
a), wrinkle Bragg grating both sides, rank are provided with wavelength tuning electrode 2(V
b), phase adjusted electrode (V
a) and wavelength tuning electrode (V
b) between be provided with insulation (isolation) and be with 6.
It is substrate that waveguide optical grating adopts X to cut lithium columbate crystal, this substrate is placed contain stearic acid (CH
3(CH
2)
16COOH) carry out proton exchange in the solution, carry out suitable annealing in process then and can arrive the APE plough groove type waveguide 5(of diffusion depth h=5 μ m referring to Fig. 2).Form after the APE waveguide, use beamwriter lithography earlier at waveguide one end, carry out etching with reaction particle afterwards, the making rank Bragg grating 4 that obtains wrinkling, amass respectively with wrinkle Bragg grating 4 both sides, rank in plough groove type waveguide 5 at last and cross electrode, isolate with para tape 6 between two electrodes, finish the making of device.
In this embodiment, the plough groove type duct width d=10 μ m among the present invention, wrinkle rank Bragg grating length L
b=10.36mm(is referring to Fig. 3), grating periods lambda=362.3nm, etch depth w=150nm, the etching dutycycle is 1/2, is v at its both sides making alive
bThe plough groove type waveguide length of not inscribing grating is L
a=3.45mm is v at its both sides making alive
aSpacing between the electrode equals the width of waveguide.
Two, tuning methods
The inventive method may further comprise the steps:
1st, at first be added in voltage v on the wavelength tuning electrode 2 by adjusting
bControl reflection resonance wavelength (voltage that adds at electrode 2 can be DC voltage, also can be the alternating voltage through ovennodulation) utilizes the linear electro-optic effect of lithium columbate crystal can realize the nanosecond order tuned speed of resonance wavelength.
The pass of reflection resonance wavelength and impressed voltage is:
R wherein
33Be the electrooptical coefficient of waveguide optical grating substrate (being lithium columbate crystal), r
33=30.8pm/v, n
eBe effective anomaly refractive index in the plough groove type waveguide (APE waveguide), n
e=2.139, Λ is the grating cycle of wrinkle rank Bragg grating, and d is electrode separation, resonance wavelength tuning with add wavelength tuning voltage v
bBe linear tuning relation.
2nd, after having determined reflection resonance wavelength, be added in voltage v on the phase adjusted electrode 3 by adjusting
aControl the phase place (voltage that is added on the electrode 3 can be that DC voltage also can be the alternating voltage of modulating) of this reflection resonance wave, utilize the linear electro-optic effect of lithium columbate crystal can realize that the high speed of reflection wave phase place is tuning.
Reflection wave phase place and impressed voltage v
aAnd v
bThe pass be:
Wherein,
Be the phase change amount that wrinkle rank Bragg grating causes, v
πBe and v
aRelevant half-wave voltage determines that in reflection resonance wavelength the back (namely adds wavelength tuning voltage v
bDetermine), the reflection wave phase place with add phase place tuning voltage v
aBe linear tuning relation.
3rd, by regulating Polarization Controller 1, regulate the polarization direction of line polarisation and the angle of waveguide optical grating substrate Z axle and control the light intensity that reflects resonance wave.
Reflection wave light intensity regulation relationship formula is I
Instead=cos
2(θ) I
Go into, I
Go intoBe the input light intensity, θ is the polarization direction of line polarisation and the angle between the waveguide optical grating substrate Z axle (optical axis), realizes the control of reflection wave light intensity accordingly.
What Fig. 4 reflected is in embodiment 1 parameter the automatically controlled tuning performance of resonance wavelength down to be set, and reflects resonance wavelength drift and impressed voltage v as seen from the figure
bRelation, the automatically controlled tunability of the device resonance wavelength of this invention has been described, add wavelength tuning voltage from-100v change to+during 100v, the resonance wavelength tuning range is 2.1nm, tuning sensitivity is 10.4pm/v.
What Fig. 5 reflected is in embodiment 1 parameter the automatically controlled tuning performance of reflection wave phase place, reflection wave phase place and impressed voltage v as seen from the figure down to be set
aRelation.Reflection wave phase place and impressed voltage v
a, v
bThe pass be:
As can be known, the reflection wave phase place is by v in the formula
aAnd v
bThe common decision, but in the practical operation, we at first can determine the reflection resonance wavelength that will leach, and are at certain impressed voltage v so we consider
bUnder the condition, the reflection wave phase place is with v
aVariation.Reflected among Fig. 5 that resonance wavelength is respectively the tuning performance of the reflection wave phase place under 1549.95nm and the 1548.9nm situation, the phase place tuning sensitivity is 0.5 π/v.
What Fig. 6 reflected is in embodiment 1 parameter the control of reflection wave light intensity down to be set, and reflection wave intensity is with the variation relation of the angle theta between the inclined to one side device of line and the substrate Z axle as seen from the figure.Owing in the waveguide of this device, can only propagate TE pattern (polarization direction is parallel to optical axis), can regulate and control the light intensity of reflection wave by the optical axis included angle of regulating the inclined to one side device of line (1) control incident light and waveguide optical grating substrate.
In this embodiment, the plough groove type duct width d=7 μ m among the present invention, wrinkle rank Bragg grating length L
b=10.36mm, grating periods lambda=362.3nm, etch depth w=50nm, the etching dutycycle is 1/2, is v at its both sides making alive
bThe plough groove type waveguide length of not inscribing grating is L
a=3.45mm is v at its both sides making alive
aSpacing between the electrode equals the width of waveguide.
Fig. 7 reflection be in embodiment 2 parameters the tuning relation of wave filter reflectance spectrum and impressed voltage down to be set, as seen from the figure, impressed voltage from-100v change to+during 100v, the resonance wavelength tuning range is 3nm, tuning sensitivity is 15pm/v.Reduce etch depth and can reduce filtering performance greatly, reduce the tuning sensitivity that duct width (electrode separation) can increase reflection wavelength.
What Fig. 8 reflected is the regulation relationship that following reflection wave phase place and impressed voltage are set in embodiment 2 parameters, and as seen from the figure, its reflection wave phase place tuning sensitivity is 1 π/v, reduces the tuning sensitivity that electrode separation also can increase phase place.
In device of the present invention, the parameter setting that changes waveguide optical grating does not influence the tuning performance of reflection wave light intensity, and the light intensity regulation and control performance of embodiment 2 is consistent with the light intensity regulation and control performance among the embodiment 1.
Claims (10)
1. dynamic-tuning wave filter based on Polarization Controller and waveguide optical grating, it is characterized in that this filter construction comprises Polarization Controller and waveguide optical grating two parts, link to each other by the optical fiber coupling between Polarization Controller and the waveguide optical grating, wherein waveguide optical grating comprises the substrate of waveguide optical grating, base upper portion is manufactured with the plough groove type waveguiding structure, one end etching of plough groove type waveguide has wrinkle rank Bragg grating, and plough groove type waveguide both sides are provided with phase adjusted electrode (V
a), wrinkle Bragg grating both sides, rank are provided with wavelength tuning electrode (V
b), phase adjusted electrode (V
a) and wavelength tuning electrode (V
b) between be provided with para tape.
2. wave filter according to claim 1 is characterized in that described Polarization Controller is the inclined to one side device of line, makes incident light polarization state become linear polarization, and the polarization direction of control line polarisation, thereby realizes the control to the reflection wave light intensity.
3. wave filter according to claim 1, the substrate that it is characterized in that described waveguide optical grating is that X cuts lithium columbate crystal, and X, Y, Z are respectively the optical coordinate systems at the bottom of the lithium niobate base, and the Z axle is the optical axis of substrate crystal, under power on condition, the extra electric field direction is parallel to the Z axle.
4. wave filter according to claim 1 is characterized in that described plough groove type waveguide employing thermal annealing proton exchange mode forms, and the method that described wrinkle rank Bragg grating utilizes beamwriter lithography and reaction particle etching to combine obtains.
5. wave filter according to claim 1, it is characterized in that utilizing the Polarization Controller part that the reflection wave light intensity is controlled, utilize the waveguide optical grating part that resonance wavelength and reflection wave phase place are controlled, and can realize that resonance wavelength, reflection wave phase place and reflection wave light intensity are simultaneously independently tuning.
6. based on the tuning methods of the dynamic-tuning wave filter of Polarization Controller and waveguide optical grating, it is characterized in that this method may further comprise the steps:
(1), is added in voltage v on the wavelength tuning electrode by adjusting
bThe resonance wavelength of control reflection;
(2), determining reflection resonance wavelength, namely adding wavelength tuning voltage v
bAfter determining, be added in voltage v on the phase adjusted electrode by adjusting
aControl the phase place of this reflection resonance wave;
(3), by regulating Polarization Controller, the angle of regulating the polarization direction of line polarisation and waveguide optical grating substrate Z axle is controlled the light intensity of this reflection resonance wave.
7. method according to claim 6, the control that it is characterized in that resonance wavelength and reflection wave phase place are to adopt automatically controlled tuning manner, are added in the voltage v on the wavelength tuning electrode
bWith the voltage v that is added on the phase adjusted electrode
aFor DC voltage or through the alternating voltage of ovennodulation.
8. method according to claim 6 is characterized in that the pass of reflection resonance wavelength and impressed voltage is in the step (1):
R wherein
33Be the electrooptical coefficient of waveguide optical grating substrate, n
eBe effective anomaly refractive index in the plough groove type waveguide, Λ is the cycle of wrinkle rank Bragg grating, and d is electrode separation, reflects the change amount of resonance wavelength and adds wavelength tuning voltage v
bLinear.
9. method according to claim 6 is characterized in that reflection resonance wave phase place and impressed voltage v in the step (2)
aAnd v
bThe pass be:
Wherein,
Be the phase change amount that wrinkle rank Bragg grating causes, v
πBe and v
aRelevant half-wave voltage, after determining reflection wavelength, reflection wave phase change amount with add phase place tuning voltage v
aLinear.
10. method according to claim 6 is characterized in that reflection wave light intensity regulation relationship formula is I in the step (3)
Instead=cos
2(θ) I
Go into, I
Go intoBe the input light intensity, θ is the polarization direction of line polarisation and the angle between the waveguide optical grating substrate Z axle, has realized the regulation and control of reflective light intensity accordingly.
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Cited By (9)
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| CN104597551A (en) * | 2015-02-26 | 2015-05-06 | 中国电子科技集团公司第四十四研究所 | Polaroid high in polarization extinction ratio, production method of polaroid and test device |
| CN106597696A (en) * | 2016-12-12 | 2017-04-26 | 天津理工大学 | Wavelength-tunable narrow-band filter based on lithium niobate waveguide grating |
| CN106646934A (en) * | 2017-01-12 | 2017-05-10 | 天津理工大学 | Multi-wavelength tunable narrow-band filter based on lithium niobate crystal |
| CN107144986A (en) * | 2017-07-18 | 2017-09-08 | 山东大学 | A kind of Larger Dynamic range tunable dispersion compensator and its application based on waveguide optical grating |
| CN107894527A (en) * | 2017-12-20 | 2018-04-10 | 天津理工大学 | Random waveguide optical grating voltage sensor and its voltage detection method based on electrooptic effect |
| CN109270626A (en) * | 2018-11-28 | 2019-01-25 | 南京邮电大学 | A kind of tunable gratings filter and preparation method based on SOI wafer |
| CN109541822A (en) * | 2018-11-26 | 2019-03-29 | 武汉邮电科学研究院有限公司 | A kind of graphene electro-optical modulator and preparation method thereof |
| CN110658584A (en) * | 2019-10-08 | 2020-01-07 | 浙江大学 | Ultra-large bandwidth silicon-based waveguide MEMS optical switch |
| WO2022109982A1 (en) * | 2020-11-26 | 2022-06-02 | 苏州易锐光电科技有限公司 | Bragg grating chip |
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| CN104597551A (en) * | 2015-02-26 | 2015-05-06 | 中国电子科技集团公司第四十四研究所 | Polaroid high in polarization extinction ratio, production method of polaroid and test device |
| CN106597696A (en) * | 2016-12-12 | 2017-04-26 | 天津理工大学 | Wavelength-tunable narrow-band filter based on lithium niobate waveguide grating |
| CN106646934A (en) * | 2017-01-12 | 2017-05-10 | 天津理工大学 | Multi-wavelength tunable narrow-band filter based on lithium niobate crystal |
| CN107144986A (en) * | 2017-07-18 | 2017-09-08 | 山东大学 | A kind of Larger Dynamic range tunable dispersion compensator and its application based on waveguide optical grating |
| CN107894527A (en) * | 2017-12-20 | 2018-04-10 | 天津理工大学 | Random waveguide optical grating voltage sensor and its voltage detection method based on electrooptic effect |
| CN107894527B (en) * | 2017-12-20 | 2020-07-31 | 天津理工大学 | Random waveguide grating voltage sensor based on electro-optic effect and voltage detection method thereof |
| CN109541822A (en) * | 2018-11-26 | 2019-03-29 | 武汉邮电科学研究院有限公司 | A kind of graphene electro-optical modulator and preparation method thereof |
| CN109270626A (en) * | 2018-11-28 | 2019-01-25 | 南京邮电大学 | A kind of tunable gratings filter and preparation method based on SOI wafer |
| CN110658584A (en) * | 2019-10-08 | 2020-01-07 | 浙江大学 | Ultra-large bandwidth silicon-based waveguide MEMS optical switch |
| CN110658584B (en) * | 2019-10-08 | 2020-08-14 | 浙江大学 | Ultra-large bandwidth silicon-based waveguide MEMS optical switch |
| WO2022109982A1 (en) * | 2020-11-26 | 2022-06-02 | 苏州易锐光电科技有限公司 | Bragg grating chip |
| US11796842B2 (en) | 2020-11-26 | 2023-10-24 | Irixi Photonics (Suzhou) Co., Ltd. | Bragg grating chip |
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