CN1588143A - Light wave guide micro ring device coupled by bending shape oriented coupler - Google Patents

Light wave guide micro ring device coupled by bending shape oriented coupler Download PDF

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CN1588143A
CN1588143A CN 200410053160 CN200410053160A CN1588143A CN 1588143 A CN1588143 A CN 1588143A CN 200410053160 CN200410053160 CN 200410053160 CN 200410053160 A CN200410053160 A CN 200410053160A CN 1588143 A CN1588143 A CN 1588143A
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optical waveguide
optical
microring
directional coupler
waveguide
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CN1253736C (en
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杨建义
江晓清
王帆
李锡华
周强
王明华
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Zhejiang University ZJU
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Abstract

本发明公开了一种采用弯曲形状定向耦合器耦合的光波导微环器件。在输入/输出光波导一定距离上,采用与具有闭环谐振结构的光波导微环相同的弯曲形状,并且与光微环并行设置,构成弯曲形状的定向耦合器,通过波导中光波模式消逝场实现输入/输出光波导与光波导微环间的光功率耦合,并行的一定距离是根据应用中耦合量大小需要确定的。本发明采用弯曲形状的定向耦合器,可以在相当长的距离上设置光微环与输入/输出光波导间的耦合,从而可以容易地实现不同大小的光微环输入/输出功率耦合,进一步地利用定向耦合器的特性以及电光效应等,还可以容易地实现功率耦合大小的可调控制。

Figure 200410053160

The invention discloses an optical waveguide microring device coupled by a curved directional coupler. At a certain distance from the input/output optical waveguide, adopt the same curved shape as the optical waveguide microring with a closed-loop resonant structure, and set it in parallel with the optical microring to form a curved directional coupler, which is realized by the evanescent field of the optical wave mode in the waveguide For the optical power coupling between the input/output optical waveguide and the optical waveguide microring, a certain parallel distance is determined according to the coupling amount in the application. The present invention adopts the directional coupler of curved shape, can set the coupling between the optical microring and the input/output optical waveguide at quite a long distance, thereby can realize the optical microring input/output power coupling of different sizes easily, further By utilizing the characteristics of the directional coupler and the electro-optic effect, etc., the adjustable control of the power coupling can be easily realized.

Figure 200410053160

Description

采用弯曲形状定向耦合器耦合的光波导微环器件Optical waveguide microring device coupled by curved shape directional coupler

技术领域technical field

本发明涉及光学元器件,特别涉及一种光波导微环器件。The invention relates to optical components, in particular to an optical waveguide microring device.

背景技术Background technique

光波导微环谐振器是一种重要的光波导器件结构单元,它在激光器、光滤波器、光调制器、光色散补偿器等光器件中均有着重要的应用。要充分利用光波导微环谐振器的特性,实现光微环中光功率的输入与输出耦合是最基本的。它要求根据不同的需要,能够获得不同的功率耦合系数。在基于光微环的一些可调光器件中,这种耦合进一步被利用,通过功率耦合量的调整来实现功能特性的可调。Optical waveguide microring resonator is an important structural unit of optical waveguide devices, and it has important applications in optical devices such as lasers, optical filters, optical modulators, and optical dispersion compensators. To make full use of the characteristics of the optical waveguide microring resonator, it is the most basic to realize the input and output coupling of optical power in the optical microring. It requires that different power coupling coefficients can be obtained according to different needs. In some tunable optical devices based on optical microrings, this coupling is further utilized, and the functional characteristics can be adjusted by adjusting the amount of power coupling.

目前现有的耦合方式都是基于输入/输出直波导与光微环间的耦合,为实现大的功率耦合以及耦合可控,不得不将光微环中的一段也设计为直波导,这大大增加了光微环的周长,限制了器件的应用。也有人采用复杂的马赫-曾德结构进行耦合控制,严重影响器件的结构与尺寸,特别地,对微小微环尺寸实现是不可行的。At present, the existing coupling methods are all based on the coupling between the input/output straight waveguide and the optical microring. In order to achieve large power coupling and coupling controllability, a section of the optical microring has to be designed as a straight waveguide, which greatly The perimeter of the optical microring is increased, which limits the application of the device. Some people also use complex Mach-Zehnder structure for coupling control, which seriously affects the structure and size of the device. In particular, it is not feasible to realize the tiny microring size.

发明内容Contents of the invention

本发明的目的在于提供一种采用弯曲形状定向耦合器耦合的光波导微环器件,可以根据需要容易地实现各种情况的光功率耦合,还可以用于实现耦合的可调。The object of the present invention is to provide an optical waveguide microring device coupled by a curved directional coupler, which can easily realize optical power coupling in various situations as required, and can also be used to realize adjustable coupling.

本发明解决其技术问题所采用的技术方案是:在输入/输出光波导一定距离上,采用与具有闭环谐振结构的光波导微环相同的弯曲形状,并且与光波导微环并行设置,构成弯曲形状的定向耦合器,通过波导中光波模式消逝场实现输入/输出光波导与光波导微环间的光功率耦合,并行的一定距离是根据应用中耦合量大小需要确定的。The technical solution adopted by the present invention to solve the technical problem is: at a certain distance from the input/output optical waveguide, adopt the same curved shape as the optical waveguide microring with closed-loop resonant structure, and set it in parallel with the optical waveguide microring to form a curved The shape of the directional coupler realizes the optical power coupling between the input/output optical waveguide and the optical waveguide microring through the evanescent field of the optical wave mode in the waveguide. A certain distance in parallel is determined according to the coupling amount in the application.

输入/输出光波导与光波导微环在同一光波导平面内、彼此并行的距离上设置。The input/output optical waveguide and the optical waveguide microring are arranged in the same optical waveguide plane at a parallel distance to each other.

输入/输出光波导与光波导微环在不同的光波导平面内、彼此并行的距离上设置;光波导微环所在的层面是在输入/输出光波导的层面上方或下方。The input/output optical waveguide and the optical waveguide microring are arranged in different optical waveguide planes at a parallel distance to each other; the layer where the optical waveguide microring is located is above or below the layer of the input/output optical waveguide.

所说的光波导微环是圆环形状光微环或任意闭环形状光微环。The said optical waveguide microring is a ring shaped optical microring or an arbitrary closed ring shaped optical microring.

本发明具有的有益的效果是:The beneficial effects that the present invention has are:

1)本发明采用弯曲形状的定向耦合器,可以在相当长的距离上设置光微环与输入/输出光波导间的耦合,从而可以容易地实现不同大小的光微环输入/输出功率耦合;特别地,对于圆环形光微环,可以不需要因为耦合的需要而再特别设置结构,也就不需要增大微环的周长;1) The present invention adopts a curved directional coupler, which can set the coupling between the optical microring and the input/output optical waveguide at a fairly long distance, so that the input/output power coupling of optical microrings of different sizes can be easily realized; In particular, for the ring-shaped optical microring, there is no need to set up a special structure because of the need for coupling, and there is no need to increase the circumference of the microring;

2)利用定向耦合器的特性以及电光效应等,在本发明采用的弯曲形状定向耦合器上可以容易地实现功率耦合大小的可调控制。2) Using the characteristics of the directional coupler and the electro-optical effect, etc., the adjustable control of the power coupling can be easily realized on the curved directional coupler adopted in the present invention.

附图说明Description of drawings

图1是同一平面时的采用弯曲形状定向耦合器耦合的具有任意闭环形状的光波导微环器件;Fig. 1 is the optical waveguide microring device with any closed-loop shape that adopts the curved shape directional coupler to couple in the same plane;

图2是上下层面时的采用弯曲形状定向耦合器耦合的具有任意闭环形状的光波导微环器件;Fig. 2 is an optical waveguide microring device with any closed-loop shape coupled by a curved directional coupler when the upper and lower layers are used;

图3是同一平面时的采用弯曲形状定向耦合器耦合的具有圆形形状的光波导微环器件;Fig. 3 is an optical waveguide microring device with a circular shape that adopts a curved shape directional coupler to couple on the same plane;

图4是上下层面时的采用弯曲形状定向耦合器耦合的具有圆形形状的光波导微环器件。Fig. 4 is an optical waveguide microring device with a circular shape coupled by a curved directional coupler when the upper and lower layers are used.

具体实施方式Detailed ways

如图1所示,是同一平面时的采用弯曲形状定向耦合器耦合的具有任意闭环形状的光波导微环器件;图1(a)、(b)中,1为输入/输出波导,2为任意闭环形状光微环,3弯曲形状的定向耦合器。As shown in Figure 1, it is an optical waveguide microring device with any closed-loop shape coupled by a curved directional coupler in the same plane; in Figure 1 (a) and (b), 1 is the input/output waveguide, and 2 is Arbitrary closed-loop shape optical microring, directional coupler with 3 curved shapes.

如图2所示,是上下层面时的采用弯曲形状定向耦合器耦合的具有任意闭环形状的光波导微环器件;图2(a)、(b)、(c)中,11为输入/输出波导,12为任意闭环形状光微环,13为弯曲形状的定向耦合器。图2(b)中输入/输出波导11在上层面15,任意闭环形状光微环12位于输入/输出波导11的下层面14。图2(c)中输入/输出波导11在下层面14,任意闭环形状光微环12位于输入/输出波导12的上层面15。As shown in Figure 2, it is an optical waveguide microring device with any closed-loop shape coupled by a curved directional coupler when the upper and lower layers are used; in Figure 2 (a), (b), and (c), 11 is input/output The waveguide, 12 is an optical microring with any closed-loop shape, and 13 is a directional coupler with a curved shape. In FIG. 2( b ), the input/output waveguide 11 is on the upper layer 15 , and the optical microring 12 with any closed-loop shape is located on the lower layer 14 of the input/output waveguide 11 . In FIG. 2( c ), the input/output waveguide 11 is on the lower layer 14 , and the optical microring 12 with any closed-loop shape is located on the upper layer 15 of the input/output waveguide 12 .

如图3所示,是同一平面时的采用弯曲形状定向耦合器耦合的具有圆形形状的光波导微环器件;图3(a)、(b)中,21为输入/输出波导,22为圆形形状光微环,23弯曲形状的定向耦合器。As shown in Figure 3, it is an optical waveguide microring device with a circular shape that adopts a curved shape directional coupler to couple on the same plane; in Figure 3 (a), (b), 21 is an input/output waveguide, and 22 is Circular shape optical microring, 23 curved shape directional couplers.

如图4所示,是上下层面时的采用弯曲形状定向耦合器耦合的具有圆形形状的光波导微环器件;图4(a)、(b)、(c)中,31为输入/输出波导,32为圆形形状光微环,33为弯曲形状的定向耦合器。图4(b)中输入/输出波导31在上层面35,圆形形状光微环32位于输入/输出波导31的下层面34。图4(c)中输入/输出波导31在下层面34,圆形形状光微环32位于输入/输出波导32的上层35。As shown in Figure 4, it is an optical waveguide microring device with a circular shape that is coupled with a curved shape directional coupler when the upper and lower layers are used; in Figure 4 (a), (b), and (c), 31 is input/output The waveguide, 32 is a circular optical microring, and 33 is a curved directional coupler. In FIG. 4( b ), the input/output waveguide 31 is on the upper layer 35 , and the circular optical microring 32 is located on the lower layer 34 of the input/output waveguide 31 . In FIG. 4( c ), the input/output waveguide 31 is on the lower layer 34 , and the circular optical microring 32 is on the upper layer 35 of the input/output waveguide 32 .

本发明的实施方式很多,在此以有机聚合物多层平面光波导工艺为实施例,但决非仅限于此实施例。There are many implementations of the present invention, and the organic polymer multilayer planar optical waveguide technology is used as an example here, but it is by no means limited to this example.

以硅片或玻璃为衬底材料,采用旋转涂敷成膜法制作下限制层,再制作芯层,并用光刻与干法刻蚀,制作出具有输入/输出光波导和光波导微环的波导图形。完成芯层后涂敷上限制层。由此就可以获得了共平面时的输入/输出光波导与光微环间的弯曲形状定向耦合器输入/输出耦合结构。在定向耦合器部分利用电光效应或其它效应加以电极实现,即可以控制光微环与输入/输出波导间的功率耦合。Using silicon wafer or glass as the substrate material, the lower confinement layer is fabricated by spin coating film formation method, and then the core layer is fabricated, and the waveguide with input/output optical waveguide and optical waveguide microring is produced by photolithography and dry etching graphics. After the core layer is completed, the upper restraint layer is applied. Thus, the curved shape directional coupler input/output coupling structure between the input/output optical waveguide and the optical microring can be obtained when they are coplanar. The electro-optic effect or other effects are used to realize the electrode in the directional coupler, that is, the power coupling between the optical microring and the input/output waveguide can be controlled.

对上下平面结构,同样可以以硅片或玻璃为衬底材料,采用旋转涂敷成膜法制作第一层的下限制层,再制作第一层的芯层,并用光刻与干法刻蚀,制作出具有输入/输出光波导(或光波导微环)的波导图形。完成芯层后涂敷上限制层。这个上限制层也将作为第二层的下限制层。随后是第二层的芯层制作与光波导微环(或输入/输出光波导)的波导刻蚀与上限制层的涂敷。由此就可以完成了上下层面时的输入/输出光波导与光微环间的采用弯曲形状定向耦合器耦合的光波导微环器件。For the upper and lower planar structures, the silicon wafer or glass can also be used as the substrate material, and the lower limiting layer of the first layer can be made by the spin-coating method, and then the core layer of the first layer can be made, and then etched by photolithography and dry etching. , to produce waveguide patterns with input/output optical waveguides (or optical waveguide microrings). After the core layer is completed, the upper restraint layer is applied. This upper confinement layer will also serve as the lower confinement layer for the second layer. Subsequently, the core layer of the second layer is fabricated, the waveguide etching of the optical waveguide microring (or the input/output optical waveguide) and the coating of the upper confinement layer are performed. In this way, an optical waveguide microring device coupled with a curved directional coupler between the input/output optical waveguide and the optical microring at the upper and lower layers can be completed.

Claims (4)

1. optical waveguide micro ring device that adopts curved shape directional coupler coupling, it is characterized in that: on I/O optical waveguide certain distance, adopt and the identical curved shape of the little ring of the optical waveguide with close loop resonance structure, and be provided with the little ring of optical waveguide is parallel, constitute the directional coupler of curved shape, the luminous power that realizes I/O optical waveguide and the little interannular of optical waveguide by light wave pattern evanescent field in the waveguide is coupled, and parallel certain distance is measured big or small needs according to coupling in using and determined.
2. a kind of optical waveguide micro ring device that adopts curved shape directional coupler coupling according to claim 1 is characterized in that: the little ring of I/O optical waveguide and optical waveguide is provided with in same optical waveguide plane, on the parallel distance.
3. a kind of optical waveguide micro ring device that adopts curved shape directional coupler coupling according to claim 1 is characterized in that: I/O optical waveguide and the little ring of optical waveguide are provided with in different optical waveguide planes, on the parallel distance; The aspect at the little ring of optical waveguide place is above or below the aspect of I/O optical waveguide.
4. according to claim 1,2 or 3 described a kind of optical waveguide micro ring devices that adopt the coupling of curved shape directional coupler, it is characterized in that: the little ring of said optical waveguide is the little ring of toroidal light or any little ring of closed loop shape light.
CN 200410053160 2004-07-19 2004-07-19 Light wave guide micro ring device coupled by bending shape oriented coupler Expired - Fee Related CN1253736C (en)

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103163664A (en) * 2013-04-02 2013-06-19 杭州电子科技大学 Frequency-selective wave filter based on micro-ring resonant cavity
CN104062712A (en) * 2014-07-17 2014-09-24 广东威创视讯科技股份有限公司 Smoothing structure applied to LED and LED display screen
CN104100932A (en) * 2014-07-31 2014-10-15 广东威创视讯科技股份有限公司 Filtering structure applied to LED, LED display screen and optical loss coefficient acquiring method
CN106054317A (en) * 2016-06-03 2016-10-26 浙江大学 Polarization-insensitive micro-ring filter based on silicon nanowire waveguide
CN110764284A (en) * 2019-10-18 2020-02-07 中国地质大学(武汉) Large-range bandwidth-adjustable microwave photon filter based on silicon-based micro-ring

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103163664A (en) * 2013-04-02 2013-06-19 杭州电子科技大学 Frequency-selective wave filter based on micro-ring resonant cavity
CN104062712A (en) * 2014-07-17 2014-09-24 广东威创视讯科技股份有限公司 Smoothing structure applied to LED and LED display screen
CN104100932A (en) * 2014-07-31 2014-10-15 广东威创视讯科技股份有限公司 Filtering structure applied to LED, LED display screen and optical loss coefficient acquiring method
CN106054317A (en) * 2016-06-03 2016-10-26 浙江大学 Polarization-insensitive micro-ring filter based on silicon nanowire waveguide
CN110764284A (en) * 2019-10-18 2020-02-07 中国地质大学(武汉) Large-range bandwidth-adjustable microwave photon filter based on silicon-based micro-ring

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