CN1587895A - Double-frequency laser interferometer - Google Patents
Double-frequency laser interferometer Download PDFInfo
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- CN1587895A CN1587895A CN 200410052915 CN200410052915A CN1587895A CN 1587895 A CN1587895 A CN 1587895A CN 200410052915 CN200410052915 CN 200410052915 CN 200410052915 A CN200410052915 A CN 200410052915A CN 1587895 A CN1587895 A CN 1587895A
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- frequency laser
- polarization spectroscope
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- 230000010287 polarization Effects 0.000 claims abstract description 31
- 230000005540 biological transmission Effects 0.000 claims abstract description 5
- 238000012360 testing method Methods 0.000 abstract description 14
- 238000005259 measurement Methods 0.000 description 5
- 230000003287 optical effect Effects 0.000 description 5
- 238000005070 sampling Methods 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
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- 230000003068 static effect Effects 0.000 description 2
- 241001269238 Data Species 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
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- 230000007613 environmental effect Effects 0.000 description 1
- 238000005495 investment casting Methods 0.000 description 1
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Abstract
A dual-frequency laser interferometer comprises a dual-frequency laser, a polarization spectroscope is arranged on an output light path of the laser, a beam splitting surface of the polarization spectroscope and the output light path of the laser form an angle of 45 degrees, a fixed pyramid prism is arranged in the direction of reflected light of the polarization spectroscope, a movable pyramid prism is arranged in the direction of transmission, a detector is further arranged on the same side of the dual-frequency laser and the output light direction of the polarization spectroscope, and the dual-frequency laser interferometer is characterized in that the polarization spectroscope and the detector are provided with a reflecting mirror, and a beam converter and a reflecting mirror are arranged on the light path between the dual-frequency laser and the polarization spectroscope at an angle of 45 degrees. Compared with the existing double-frequency laser interferometer, the invention has the advantage that the test precision is doubled under the same test condition. The testing method has the advantages of simplicity, convenience, economy, high precision and the like.
Description
Technical field
The present invention is relevant with length metering, is the improvement to two-frequency laser interferometer, to improve the resolution of two-frequency laser interferometer.
Background technology
Two-frequency laser interferometer is owing to having wide-measuring range, high resolving power, high precision, reaching comprehensive advantages such as high-speed, and can by with the combination of different annex, can carry out the measurement of length, speed, angle, flatness, linearity and verticality etc., acquired application widely in accurate and super hot investment casting field, for example, precision positioning of the work stage of the demarcation of the demarcation of precision coordinate lathe, high-precision sensor, litho machine and mask platform etc.
Commercialization two-frequency laser interferometer structure as shown in Figure 1 at present, this two-frequency laser interferometer, comprise a two-frequency laser 4, one polarization spectroscope 2 is set on the output light path of this laser instrument 4, the output light path of the light splitting surface of this polarization spectroscope 2 and laser instrument 4 is at 45, place a fixed angles cone prism 5 in these polarization spectroscope 2 reflected light directions, transmission direction is an angle of critical deformation cone prism 1, also has a detector 3 at the output light direction of this polarization spectroscope 2, the homonymy of two-frequency laser 4.
Two-frequency laser 4 generations two bundle direction of vibration are vertical mutually, frequency is respectively f
1And f
2, frequency difference is the linearly polarized light of Δ f.This two bundles light enters polarization spectroscope 2, and wherein the frequency of vertical vibration is f
1Linearly polarized light all reflex to fixing prism of corner cube 5, and the frequency of parallel vibration is f
2Linearly polarized light all through entering angle of critical deformation cone prism 1.This two bundles light after prism of corner cube 5 and 1 reflection, is joined at polarization spectroscope 2 light splitting surfaces respectively.This interferometer is based on the Doppler shift principle and surveys length, when prism of corner cube 1 moves, since Doppler effect, f
2Become f
2± Δ f
2, utilize detector 3 to obtain having the double-frequency laser interference test signal of displacement information.
At present, although the logical two-frequency laser interferometer self of a Daepori has higher resolution, for example, can reach nanometer scale, but under many circumstances, it usually is micron dimension that resolution reaches the measuring accuracy that the two-frequency laser interferometer of nanometer scale provides, even poorer.
Along with the development of micro-nano manufacturing technology, the precision of interferometer is had higher requirement.
Summary of the invention
The purpose of this invention is to provide a kind of two-frequency laser interferometer, existing two-frequency laser interferometer is improved, to improve the measuring accuracy of existing two-frequency laser interferometer.
Basic thought of the present invention is on the basis of a commercialization two-frequency laser interferometer, adopts a kind of easy method, increases a catoptron in light path, realizes optics two segmentations, thereby improves the measuring accuracy of instrument.
Technical solution of the present invention is as follows:
A kind of two-frequency laser interferometer, comprise a two-frequency laser, one polarization spectroscope is set on the output light path of this laser instrument, the light splitting surface of this polarization spectroscope and the output light path of laser instrument are at 45, place a fixed angles cone prism at the output light direction of this polarization spectroscope, transmission direction is an angle of critical deformation cone prism, also has a detector at the output light direction of this polarization spectroscope and the homonymy of two-frequency laser, it is characterized in that between described polarization spectroscope and detector, being provided with a catoptron, on the light path between two-frequency laser and the polarization spectroscope, place a beam converter and catoptron at 45ly.
The present invention realizes optics two segmentations owing to increased a catoptron in light path, and the resolution of this instrument is doubled, and measuring accuracy is doubled.
Description of drawings:
Fig. 1 is existing two-frequency laser interferometer structural representation
Fig. 2 is a two-frequency laser interferometer structural representation of the present invention
Embodiment
See also Fig. 2 earlier, Fig. 2 is a two-frequency laser interferometer structural representation of the present invention.As seen from the figure, two-frequency laser interferometer of the present invention, comprise a two-frequency laser 4, one polarization spectroscope 2 is set on the output light path of this laser instrument 4, the output light path of the light splitting surface of this polarization spectroscope 2 and laser instrument 4 is at 45, place a fixed angles cone prism 5 in these polarization spectroscope 2 reflected light directions, transmission direction is an angle of critical deformation cone prism 1, output light direction at this polarization spectroscope 2, the homonymy of two-frequency laser 4 also has a detector 3, it is characterized in that between described polarization spectroscope 2 and detector 3, being provided with a catoptron 6 placement one beam converter 8 at 45 and catoptron 7 on the light path between two-frequency laser 4 and the polarization spectroscope 2.
Increase an optical mirror 6 in the position as shown in the figure at polarization spectroscope 2, make the measuring light f that has displacement information
2With reference light f
1Directly enter detector 3 no longer as shown in Figure 1, but return by original optical path, by entering detector 3 behind 45 ° of beam converters 7 and 45 ° of catoptrons 8, by having increased an optical flat catoptron 6, measuring light and reference light been have all have been come and gone away twice, reached the purpose of optical path difference multiplication, made more original this commercialization two-frequency laser interferometer resolution of resolution of new measuring system be doubled, thereby under the same test condition, make measuring accuracy be doubled.
The static immobilization accuracy test test that utilization has been carried out the 500mm scope respectively to as shown in Figure 1 commercialization two-frequency laser interferometer and the present invention as shown in Figure 2.Movably prism of corner cube 1 is fixed on the guide rail with fine anti-vibration performance, makes measured object be in very steady state (SS), avoids because the error that the object being measured vibration causes.Since 0, be spaced apart 50mm, to 500mm place, totally 11 measurement points.Each measurement point carries out the test of three sub-samplings, and each sampling and testing writes down 6 data automatically by microcomputer, and the time interval of getting each data is 0.35 second, and therefore each sampling time of measuring is within 2 seconds.In test process, environment temperature, atmospheric pressure, air humidity that influences measuring accuracy and the variation of measuring the environmental factors such as material temperature of carrier are carried out tracking measurement.In fact, within 1.5 seconds to 2 seconds time ranges, influence environment temperature, atmospheric pressure, the air humidity of measuring accuracy and measure the variation of material temperature of carrier very little, measurement result is reliable.The 500mm scope static immobilization accuracy test test that as shown in Figure 1 commercialization two-frequency laser interferometer and the present invention are as shown in Figure 2 carried out respectively, as mentioned above, obtain 33 bearing accuracy errors respectively, bearing accuracy subtracts minimum value by the maximal value in 6 sampled datas of each group, obtains divided by 2 again.66 data that obtain under above-mentioned two kinds of situations, all within 10 nanometers, because optical path difference of the present invention has increased one times, its test result will be divided by 2 for its bearing accuracy error, obviously, the resulting bearing accuracy of the present invention is doubled than the test result of former commercialization two-frequency laser interferometer.
Claims (1)
1. two-frequency laser interferometer, comprise a two-frequency laser (4), one polarization spectroscope (2) is set on the output light path of this laser instrument (4), the output light path of light splitting surface of this polarization spectroscope (2) and laser instrument (4) is at 45, place a fixed angles cone prism (5) at the output light direction of this polarization spectroscope (2), transmission direction is an angle of critical deformation cone prism (1), also has a detector (3) at the output light direction of this polarization spectroscope (2) and the homonymy of two-frequency laser (4), it is characterized in that between described polarization spectroscope (2) and detector (3), being provided with a catoptron (6), on the light path between two-frequency laser (4) and the polarization spectroscope (2), place a beam converter (8) and catoptron (7) at 45ly.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200410052915 CN1587895A (en) | 2004-07-16 | 2004-07-16 | Double-frequency laser interferometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200410052915 CN1587895A (en) | 2004-07-16 | 2004-07-16 | Double-frequency laser interferometer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1587895A true CN1587895A (en) | 2005-03-02 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200410052915 Pending CN1587895A (en) | 2004-07-16 | 2004-07-16 | Double-frequency laser interferometer |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2010108446A1 (en) * | 2009-03-26 | 2010-09-30 | 钱定榕 | Light beam processing device for focusing light beam emitted by semiconductor laser |
| CN102889854A (en) * | 2012-10-17 | 2013-01-23 | 中国科学院上海光学精密机械研究所 | Five-axis flat mirror interferometer |
-
2004
- 2004-07-16 CN CN 200410052915 patent/CN1587895A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2010108446A1 (en) * | 2009-03-26 | 2010-09-30 | 钱定榕 | Light beam processing device for focusing light beam emitted by semiconductor laser |
| US8767304B2 (en) | 2009-03-26 | 2014-07-01 | Yi-Xuan Xiao | Beam shaping device for focusing light beams from semiconductor laser |
| CN102889854A (en) * | 2012-10-17 | 2013-01-23 | 中国科学院上海光学精密机械研究所 | Five-axis flat mirror interferometer |
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