CN1242241C - Large-scale nano detection optical system - Google Patents
Large-scale nano detection optical system Download PDFInfo
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- CN1242241C CN1242241C CN 200410072546 CN200410072546A CN1242241C CN 1242241 C CN1242241 C CN 1242241C CN 200410072546 CN200410072546 CN 200410072546 CN 200410072546 A CN200410072546 A CN 200410072546A CN 1242241 C CN1242241 C CN 1242241C
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Abstract
The present invention provides a large range nanometer detecting optical system which relates to the large range nanometer detecting optical system. In order to provide the large range nanometer detecting optical system, the measuring range of the system is enlarged under the condition of ensuring high resolution and high precision. The present invention has the technical scheme that the present invention is composed of a V-shaped friction guide rail, a driving motor, a laser interference system, etc., wherein a V-shaped sliding friction mode is adopted by the guide rail, and a sliding frame of the guide rail is supported by five polyfluoroethylene short cushions; the driving device is an ultra-micro-drive continuous controllable piezoelectric motor with large displacement, which can be used for realizing continuous feeding movements and uniform speed nanometer displacement; the layout of the whole system structure is symmetrical, and the measuring line, a center line of the guide rail and a center line of the laser interference system are overlapped. The present invention is mainly used for satisfying the test of a displacement value with high precision, and can be used for detection of a displacement sensor with high precision, positioning, processing and detection of a large scale integrated circuit, measurement of electrostriction (magnetostriction) of piezoelectric (ferroelectric) ceramics, etc.
Description
Technical field
The present invention relates to the measurement of nano-precision, specifically relate to large-scale nano detection optical system.
Background technology
The nano measurement technology is an important branch of nano science.The measurement of nano-precision has become the problem that presses for solution in present industry and the scientific development.The nanometer metering develops towards high precision, high-resolution direction.In general, the complete surface nanometer-displacement system of a cover should be made up of four parts, i.e. detection system, displacement system, metering system and signal Processing and control system.Thereby the nano measurement technology can be described as the comprehensive of multiple technologies, how will above four kinds of technology combines to constitute a complete system, designs practical nano measurement system, is the direction that develops of surface nanometer-displacement from now on.In this case, develop a kind of simple in structure, cost is low, debug easily, nano measurement system that antijamming capability is strong, in the precision measurement technical field certain researching value and realistic meaning is arranged still.
Summary of the invention
For overcoming the deficiencies in the prior art, the object of the present invention is to provide nano detection optical system, this system is guaranteeing under high resolving power, the high-precision prerequisite, measurement range is expanded to 10mm, both can satisfy the test of high precision displacement amount, can be used for the calibrating of high accuracy displacement sensor again, the location of large scale integrated circuit, processing and detection and piezoelectricity (ferroelectric) ceramic electrical causes (mangneto) flexible mensuration etc.The technical solution used in the present invention is partly to be made up of V-type friction extensible guide, CD-ROM drive motor, laser interference system.Wherein, guide rail adopts the form of V-type sliding friction, supportting the guide rail balladeur train with the short advance expenditure of five teflon, drive unit is for realizing the continuous feed motion and the moving continuous controllable formula piezo-electric motor of big displacement ultra micro of nano-grade displacement at the uniform velocity, comprise in addition and be used to gather interference signal, and interference signal is carried out error compensation with the Heydemann algorithm, calculating through tangent segmentation and displacement, draw the Measurement and Control System CPU1 of displacement at that time, receive Measurement and Control System CPU1 by serial communication and send information, and the motor control system CPU2 of the controllable type piezo-electric motor of control switching, total system topology layout symmetry, the center line of its slotted line and guide rail and the central lines of laser interference system.
Wherein, laser interference system selects for use He-Ne Lasers through Lamb dip frequency stabilization as light source.
Laser interference system adopts coupled difference formula optical interference circuit, the intrinsic light path difference equals zero, three-dimensional the 2nd rigging-angle cone prism, the 5th rigging-angle cone prism are fixed on beyond the guide rail balladeur train two ends, remaining optical mirror slip all is fixed on the main support, the laser that light source sends arrives interferometer behind inverted telescopic system collimator and extender, its spot diameter is 3mm, this light beam is divided into two-beam by the 1st three-dimensional spectroscope, one road reflected light repeatedly reflects through three-dimensional the 2nd rigging-angle cone prism, the 3rd rigging-angle cone prism, return the 1st three-dimensional spectroscope behind translation one segment distance, form a measuring beam; Another road transmitted light, the 4th mirror reflects through the plane arrives three-dimensional the 5th rigging-angle cone prism, the 6th rigging-angle cone prism, gets back to the 4th right-angle prism after repeatedly reflecting translation one segment distance, again through reflecting back into the 1st three-dimensional spectroscope, forms another drive test amount light beam; Two-way light converges again at the 1st three-dimensional spectroscope, form and interfere, interference light is by the 7th plane reflection mirror reflection, by the 8th spectroscope separated into two parts, mix integrated the 1st photelectric receiver and PIN-FET by PIN-FET and mix integrated the 2nd photelectric receiver and receive interferometric fringe signal, obtain phase differential and be the interference signals that the two-way of 90 degree change by sinusoidal rule.
Measurement and Control System CPU1 is a Measurement and Control System of finishing follow procedure:
The acquired signal data;
Generate the multiple linear regression matrix;
The group of solving an equation;
Calculate Ah a, G, p, q;
Compensate;
Judge polarity;
Computation of table lookup.
The present invention can bring following effect: supportting guide rail balladeur train V-type friction extensible guide, coupled difference formula optical interference circuit owing to adopt with the short advance expenditure of five teflon, thereby the utlity model has high resolving power, high precision, measurement range expands to 10mm.
Description of drawings
Fig. 1 nano detection optical system structural drawing, and as Figure of abstract
Fig. 2 interferometer light path figure
Fig. 3 test result
Fig. 4 control system software flow pattern
Fig. 5 computing machine segmentation program flow diagram
Embodiment
Further specify the present invention below in conjunction with drawings and Examples.
1, general structure
The general structure of nano detection optical system as shown in Figure 1, nano detection optical system, partly form by V-type friction extensible guide, CD-ROM drive motor, laser interference system etc., guide rail adopts the form of V-type sliding friction, supportting the guide rail balladeur train with the short advance expenditure of five teflon, drive unit is for realizing the continuous feed motion and the moving continuous controllable formula piezo-electric motor of big displacement ultra micro of nano-grade displacement at the uniform velocity, total system topology layout symmetry, the center line of its slotted line and guide rail and the central lines of laser interference system.
Laser interference system adopts coupled difference formula optical interference circuit, and the intrinsic light path difference equals zero, and three-dimensional rigging-angle cone prism 2, rigging-angle cone prism 5 are fixed on beyond the guide rail balladeur train two ends, and remaining optical mirror slip all is fixed on the main support.The principle of work of interferometer as shown in the figure, the laser that helium-neon laser sends arrives interferometer behind inverted telescopic system collimator and extender, its spot diameter is 3mm, this light beam is divided into two-beam by three-dimensional spectroscope 1, one road reflected light is through three-dimensional rigging-angle cone prism 2, more than 3 reflection of rigging-angle cone prism, return three-dimensional spectroscope 1 behind translation one segment distance, form a measuring beam; Another road transmitted light through plane mirror 4 reflections, arrives three-dimensional rigging-angle cone prism 5, rigging-angle cone prism 6, gets back to right-angle prism 4 after repeatedly reflecting translation one segment distance, again through reflecting back into three-dimensional spectroscope 1, forms another drive test amount light beam; Two-way light converges again at three-dimensional spectroscope 1, forms to interfere, and interference light is by plane mirror 7 reflections, by spectroscope 8 separated into two parts, by PIN-FET mixing integrated electro receiver D
1, by PIN-FET mixing integrated electro receiver D
2Receive interferometric fringe signal, obtaining phase differential is the interference signal of the two-way of 90 degree by sinusoidal rule variation.
2, laser interference system
1. the light source of simple and stable.This interferometer selects for use the He-Ne Lasers of process frequency stabilization as light source, and its wavelength accuracy is very high, and through the He-Ne Lasers of Lamb dip frequency stabilization, its wavelength stability is 5 * 10
-10, wavelength accuracy is 2 * 10
-8, guaranteed the realization of nano-precision displacement measurement.
2. the design of interference system meets abbe ' s principle and the minimum principle of malformation, and tested part dimension line and laser interferometer datum line are on same straight line.
3. the optical layout of simple and stable adopts coupled difference formula principle of interference, the light path symmetry, and its intrinsic light path difference equals zero.In addition, optical layout's compact conformation adopts such layout to reduce thermal expansion and air refraction changes the influence that brings.
4. adopt the method for optical path difference multiplication, improve the resolution of interferometer.Viewpoint from precision measurement of length doubles to optical path difference, has the advantage that directly length information is become many times of optical path differences.With two pairs of right-angle prisms optical path difference is repeatedly doubly taken advantage of, displacement is carried out coupled difference in addition and measure, so the resolution of interferometer is higher 4 times than common Michelson interferometer.
Figure 2 shows that the coupled difference formula interferometer light path figure of optics 8 frequencys multiplication.The optical element of forming this interference system, except that three-dimensional rigging-angle cone prism 2, rigging-angle cone prism 5 were fixed on guide rail balladeur train two ends, remaining optical mirror slip all was fixed on the main support.The principle of work of interferometer as shown in the figure, the laser that helium-neon laser sends arrives interferometer behind inverted telescopic system collimator and extender, its spot diameter is 3mm, this light beam is divided into two-beam by three-dimensional spectroscope 1, one road reflected light is through three-dimensional rigging-angle cone prism 2, more than 3 reflection of rigging-angle cone prism, return three-dimensional spectroscope 1 behind translation one segment distance, form a measuring beam; Another road transmitted light through plane mirror 4 reflections, arrives three-dimensional rigging-angle cone prism 5, rigging-angle cone prism 6, gets back to right-angle prism 4 after repeatedly reflecting translation one segment distance, again through reflecting back into three-dimensional spectroscope 1, forms another drive test amount light beam; Two-way light converges again at three-dimensional spectroscope 1, forms to interfere, and interference light is by plane mirror 7 reflections, by spectroscope 8 separated into two parts, by PIN-FET mixing integrated electro receiver D
1, PIN-FET mixing integrated electro receiver D
2Receive interferometric fringe signal, obtaining phase differential is the interference signal of the two-way of 90 degree by sinusoidal rule variation.
When the guide rail balladeur train moved, one road light path increased, and another road light path reduces, thereby realized variate; Because every road light comes and goes twice between every pair of rigging-angle cone prism, therefore can produce the optical fine of λ/8, i.e. the whenever mobile λ of guide rail balladeur train/8, the photelectric receiver output signal will change one-period, note the periodicity N that signal changes, just can determine tested displacement L.
Survey long fundamental formular so just obtained this coupled difference interferometer:
L＝N·λ
0/8n
In the formula, n is the air refraction under the measuring condition, λ
0It is He-Ne Lasers wavelength in the vacuum.
If with computing machine interference signal is carried out 200 segmentations again, then has: L=N λ
0/ 1600n
So can know the resolution of this interferometer is λ/1600.Can see that from the light path design of interferometer therefore the coupled difference interferometer of this optical path difference multiplication also just has better stability than highly sensitive 4 times of common Michelson interferometer.
3, Measurement and Control System
With the single-chip microcomputer is the Measurement and Control System of core design, interference signal is gathered, and error compensation, and then realize the function that displacement is calculated.In actual measurement, mainly there are following three kinds of errors in interference signal: signal non-orthogonality error, non-constant amplitude sum of errors DC level drift error.Because the existence of these three kinds of errors has influenced subdivision accuracy,, so just guaranteed the realization of high-acruracy survey so adopt Heydemann that it is revised.This Measurement and Control System also can be carried out communication with the piezo-electric motor control system in addition, thereby has realized closed-loop measuring.
Performance test
The detection of this interferometer is by carrying out with the comparison of capacitance gage.Available is the type high-accuracy capacitor micrometer JDC-2000 of smart instrument institute of University Of Tianjin exploitation.The accurate capacitance micrometer of JDC is to adopt a kind of contactless fine measuring instrument of high input impedance amplifier feedback principle to be not difficult to find in measuring process, the analog quantity U and the displacement deviate L of capacitance gage output are linear, so we can obtain equation of linear regression between U and the L by one-variable linear regression.After having obtained the equation of linear regression of U and L, just can carry out precision and estimate, in linear equation, also represent directly to measure the precision of gained data with standard error σ to measurement data.
By 4 contrastive tests that in the different time, carry out with capacitance gage, the result as shown in Figure 3, the measuring accuracy that draws this interference measuring system is 10-12nm, has both comprised the influence of systematic error in the middle of this, also comprises the influence of accidental error; The measuring error of existing interferometer has the measuring error of capacitance gage again.
Claims (4)
1. nano detection optical system, by the V-type friction extensible guide, CD-ROM drive motor, laser interference system is partly formed, it is characterized in that, guide rail adopts the form of V-type sliding friction, supportting the guide rail balladeur train with the short advance expenditure of five teflon, drive unit is for realizing the continuous feed motion and the moving continuous controllable formula piezo-electric motor of big displacement ultra micro of nano-grade displacement at the uniform velocity, comprise in addition and be used to gather interference signal, and interference signal is carried out error compensation with the Heydemann algorithm, calculating through tangent segmentation and displacement, draw the Measurement and Control System CPU1 of displacement at that time, receive Measurement and Control System CPU1 by serial communication and send information, and the motor control system CPU2 of the controllable type piezo-electric motor of control switching, total system topology layout symmetry, the center line of its slotted line and guide rail and the central lines of laser interference system.
2. nano detection optical system according to claim 1 is characterized in that, laser interference system selects for use He-Ne Lasers through Lamb dip frequency stabilization as light source.
3. nano detection optical system according to claim 1, it is characterized in that, laser interference system adopts coupled difference formula optical interference circuit, the intrinsic light path difference equals zero, three-dimensional the 2nd rigging-angle cone prism, the 5th rigging-angle cone prism is fixed on beyond the guide rail balladeur train two ends, remaining optical mirror slip all is fixed on the main support, the laser that light source sends arrives interferometer behind inverted telescopic system collimator and extender, its spot diameter is 3mm, this light beam is divided into two-beam by the 1st three-dimensional spectroscope, one road reflected light is through three-dimensional the 2nd rigging-angle cone prism 2, the 3rd rigging-angle cone prism repeatedly reflects, and returns the 1st three-dimensional spectroscope behind translation one segment distance, forms a measuring beam; Another road transmitted light, the 4th mirror reflects through the plane arrives three-dimensional the 5th rigging-angle cone prism, the 6th rigging-angle cone prism, gets back to the 4th right-angle prism after repeatedly reflecting translation one segment distance, again through reflecting back into the 1st three-dimensional spectroscope, forms another drive test amount light beam; Two-way light converges again at the 1st three-dimensional spectroscope, form and interfere, interference light is by the 7th plane reflection mirror reflection, by the 8th spectroscope separated into two parts, mix integrated the 1st photelectric receiver and PIN-FET by PIN-FET and mix integrated the 2nd photelectric receiver and receive interferometric fringe signal, obtain phase differential and be the interference signals that the two-way of 90 degree change by sinusoidal rule.
4. nano detection optical system according to claim 1 is characterized in that, Measurement and Control System CPU1 is a Measurement and Control System of finishing follow procedure:
The acquired signal data;
Generate the multiple linear regression matrix;
The group of solving an equation;
Compensate;
Judge polarity;
Computation of table lookup.
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|---|---|---|---|
| CN 200410072546 CN1242241C (en) | 2004-10-28 | 2004-10-28 | Large-scale nano detection optical system |
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|---|---|---|---|
| CN 200410072546 CN1242241C (en) | 2004-10-28 | 2004-10-28 | Large-scale nano detection optical system |
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| CN1242241C true CN1242241C (en) | 2006-02-15 |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100342211C (en) * | 2005-08-26 | 2007-10-10 | 哈尔滨工业大学 | Position detector for double grating displacement transducer metering mode and detection method thereof |
| CN100494876C (en) * | 2007-01-24 | 2009-06-03 | 中国科学院上海光学精密机械研究所 | Online monitoring system capable of adjusting pole pitch of F-P interferometer |
| CN101592573B (en) * | 2009-06-08 | 2011-02-16 | 清华大学 | Tension-compression and fatigue loading testing machine based on laser confocal microscope |
| CN109917828B (en) * | 2019-04-15 | 2021-10-15 | 中国航空工业集团公司北京长城计量测试技术研究所 | Interference differential displacement method micro force control system |
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