CN1576776A - Interferometer with interference fringe scanning function - Google Patents
Interferometer with interference fringe scanning function Download PDFInfo
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- CN1576776A CN1576776A CN 200410069067 CN200410069067A CN1576776A CN 1576776 A CN1576776 A CN 1576776A CN 200410069067 CN200410069067 CN 200410069067 CN 200410069067 A CN200410069067 A CN 200410069067A CN 1576776 A CN1576776 A CN 1576776A
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Abstract
To prevent the influence of external vibration, to achieve a reference plate support structure, and to reduce manufacturing costs by providing a phase difference varying means for changing the phase difference of luminous flux passing two paths for fringe scanning at a path match path section. An optical path length changing section 30 fixes total reflection mirrors 23, 24 on a second path on a plate 31, and drives a piezo element 14 mounted to the plate 31, so that the total reflection mirrors 23, 24 are reciprocated in the direction of an arrow A in one piece and the phase difference between light fluxes passing two paths is changed. The piezo element 14 is driven by a piezo driver 16 as a drive means. The piezo driver 16 outputs a specified drive voltage to the piezo element 14, based on a piezo element drive signal outputted from a stage controller 15 according to a control signal from a computer 11.
Description
Technical field
The present invention relates to a kind of by the parts that light beam the shone generation physics that is provided by light source is moved, thereby make the interferometer that produces the phase differential variation between two light beams that produce optical interference and can implement interference fringe scanning, particularly relate to and a kind ofly have the light beam that to provide by this light source and be divided into two bundles, make this two light beams respectively the optical path difference by will be each other be adjusted into after two paths of the optical range twice between detected that is equivalent to interferometric reference field and object to be detected, two light beams is implemented to merge route matching (path match) the path portion of output, thereby have the interferometer of interference fringe scanning function.
Background technology
Be equipped with striking rope type (Fizeau) interferometer in the prior art such as the good light source of LASER Light Source or the like interference capability, owing to can between reference field and detected, form be concerned with (coherent) with the light source that uses, the work space abundance, be widely used as interferometer easy to use apart from corresponding interval.
And striking rope type interferometer can adopt and the similar interference fringe scanning method of other interferometer (strip-scanning method), so can carry out detected concavo-convex differentiation and correct three-dimensional shape differentiation operation.
Yet, present known conventional interference fringe scanning method, interferometer need be by implementing to support to datum plate such as 3, piezoelectric element is installed at the place three support portions, and, datum plate is moved along optical axis direction by predetermined voltage being applied at the fixed time on the piezoelectric element to drive this piezoelectric element.And, need make a video recording to implementing several times owing to this mobile interference fringe image data that change, these view data are inputed in the computing machine, utilize predetermined operational formula, solve the phase place of each point on the interference fringe image, carry out the shape analysis operation (such as, can referring to patent documentation 1) of object to be detected thus.
[patent documentation 1]
TOHKEMY 2000-155051 communique.
Yet the occasion for adopting as the interference fringe scanning method in the above-mentioned prior art has following problems.
Use the occasion of interferometer down for the environment that externally vibration is bigger, or reduce the occasion of external vibration influence for needs, in order to prevent that object to be detected and datum plate from producing vibration respectively owing to external vibration, upset relative position relation, make to interfere and measure the phenomenon appearance that is difficult to realize, employing is more favourable such as object to be detected and datum plate being fixedly installed on the mode on the holding member, yet adopt this datum plate to be fixedly installed on mode on the holding member, have to be difficult to adopt and use piezoelectric element or the like that datum plate is implemented to drive problem with the said method that carries out the interference fringe scanning operation.
And above-mentioned prior art need be installed in piezoelectric element respectively the place, three support portions of datum plate, compares problem of higher so also have manufacturing cost.
And, the user of interferometer, may need implementing to measure such as object to be detected long linear foot of longitudinal comparison or the like, that have special shape, with its shape and the corresponding datum plate of this detected material shape, it is more suitable to be arranged on user's side for this occasion.Yet, be difficult to construct and can datum plate corresponding to its shape and this detected material shape, that be positioned at user's side implement the system that drives for this situation.And, what adopt in the prior art is that the surface configuration of datum plate is implemented to measure with three datum plates, combine by twos, be configured in former benchmark Board position place with one in two datum plates after the combination, another is configured in former object to be detected position, thereby these array configurations are implemented interference fringe respectively to be measured, three groups of interference fringe informations that obtained are implemented computing, and then obtain the method (such as, can referring to Japanese kokai publication hei 10-325710 communique) of each datum plate surface (reference field) shape.This method is called as triple identical methods, and for the occasion that adopts this method, the user need not add the datum plate of former use on interferometer, so compare with the occasion that datum plate was set originally, having more superiority in price.
Yet, when initial, be not assembled in the occasion at interferometer place for datum plate, will be difficult to adopt by piezoelectric element or the like datum plate is implemented to drive to carry out the said method of interference fringe scanning operation.
And, though do not adopt aforesaid piezoelectric element at present yet, but implement the method for interference fringe scanning by the subtle change of the illumination beam wavelength that provides by light source, it is bigger that yet these prior arts have a light source output change of implementing length scanning, thereby the defective of precision aspect problem can occur resolving.
This shows that above-mentioned existing interferometer obviously still has inconvenience and defective, and demands urgently further being improved in structure and use.In order to solve the problem that interferometer exists, relevant manufacturer there's no one who doesn't or isn't seeks solution painstakingly, but do not see always that for a long time suitable design finished by development, and common product does not have appropriate structure to address the above problem, this obviously is the problem that the anxious desire of relevant dealer solves.
Because the defective that above-mentioned existing interferometer exists, the inventor is based on being engaged in this type of product design manufacturing abundant for many years practical experience and professional knowledge, and the utilization of cooperation scientific principle, actively studied innovation, in the hope of founding a kind of interferometer of new structure with interference fringe scanning function, can improve general existing interferometer, make it have more practicality.Through constantly research, design, and after studying sample and improvement repeatedly, create the present invention who has practical value finally.
Summary of the invention
The objective of the invention is to, overcome the defective that existing interferometer exists, and provide a kind of interferometer of new structure with interference fringe scanning function, technical matters to be solved is to make it can form the datum plate supporting mechanism that can not be subjected to the external vibration influence usually, and can make cheap for manufacturing cost, have interference fringe scanning function, thereby be suitable for practicality more.
Another object of the present invention is to, overcome the defective that existing interferometer exists, and provide a kind of interferometer of new structure with interference fringe scanning function, even technical matters to be solved is to make it that datum plate is arranged on user's side, also can carry out well and interference fringe scanning simply, thereby have interference fringe scanning function, thereby be suitable for practicality more.
The present invention compared with prior art has tangible advantage and beneficial effect.By above technical scheme as can be known, in order to reach aforementioned goal of the invention, major technique of the present invention thes contents are as follows:
A kind of interferometer provided by the invention with interference fringe scanning function, can have light source, to be divided into two bundles by the light beam that this light source provides, make this two light beams respectively the optical path difference by will be each other be adjusted into after two paths of detected the optical range twice that is equivalent to interferometric reference field and object to be detected, two light beams is implemented to merge the route matching path portion of output, and will expose to the collimation lens of described reference field as parallel beam from the light beam of this route matching path portion output, and have according to the interference fringe of crossing described reference field by the light wave face of this reference field reflection and transmission and forming by the interference of the light wave face of described detected reflection, obtain the interference fringe scanning function of this corrugated information of detected, at described route matching path portion place, have and make the phase differential variable cell that changes and implement strip-scanning (interference fringe scanning) by the light beam phase differential of described two paths.
And, another kind provided by the invention has the interferometer of interference fringe scanning function, can have light source, to be divided into two bundles by the light beam that this light source provides, make this two light beams respectively the optical path difference by will be each other be adjusted into after two paths of detected the optical range twice that is equivalent to interferometric reference field and object to be detected, two light beams is implemented to merge the route matching path portion of output, to expose to the collimation lens of described reference field from the light beam of this route matching path portion output as parallel beam, and datum plate with this reference field, and have according to the interference fringe of crossing described reference field by the light wave face of this reference field reflection and transmission and forming by the interference of the light wave face of described detected reflection, obtain the interference fringe scanning function of this corrugated information of detected, at described route matching path portion place, have that the light beam phase differential that makes by described two paths changes and the phase differential variable cell that can implement strip-scanning (interference fringe scanning).
And, interferometer with interference fringe scanning function provided by the invention, for described object to be detected is transparent parallel, described light beam by described light source output, be the occasion that coherence distance is set at the low coherence light beam of thickness (the being optical range) twice less than described transparent parallel, effective especially.
And the interferometer with interference fringe scanning function provided by the invention, wherein said phase differential variable cell make by the moving of the optics physics of light beam irradiates, and change the light beam phase differential by described two paths by this.
And the interferometer with interference fringe scanning function provided by the invention can also further make the physics of described optics move, by implementing such as piezoelectric element.
And the interferometer with interference fringe scanning function provided by the invention can also further make described optics for can make at least one in described two paths, produces two catoptrons or prism of 180 degree warpages.
And, aforesaid detected and reference field, refer to and implement the relative address of two optical surfaces of reflection producing two light beams of interfering, in the following description, comprise that also denotion is for by producing the occasion of interfering such as the surface of substantially parallel transparent panel, the folded light beam that inner face provides, as face in detected surface, the inner face with as the surface of reference field, another face in the inner face.
The present invention is based on when carrying out interference fringe scanning, owing to preferably change the reference beam that reflects by datum plate, and by the phase differential between the object beam of detected reflection, the principle that datum plate (or object to be detected) is not moved along optical axis direction is finished.And, when this principle is embodied as the above-mentioned form of the composition, preferably separate reference beam path and object beam path, and make optical path length, produce the technical though of relative variation for the optical path length of the light beam by another paths after separating by the light beam of the paths after separating.
Reference technique with above-mentioned conception is specialized is disclosed in the Japanese kokai publication hei 9-21606 communique by the applicant.
In other words be exactly, by the disclosed route matching of this patent gazette path type interferometer is a kind of striking rope type interferometer, and implement to set less than the mode of predetermined length according to making the coherence distance of measuring light beam, be provided with the route matching path portion that makes a part of measuring light beam produce warpage, the folded light beam that provides by detected face at the mensuration light beam of the straight ahead that does not produce warpage, with can not produce optical interference outside the folded light beam that provides by reference field of the mensuration light beam that produces warpage, thereby can obtain not have noise by the very simple form of the composition, clear and definite interference fringe image, interferometer with interference fringe scanning function provided by the invention, can in the portion of above-mentioned route matching path, make optical path length by the light beam of a paths, produce relative variation with the optical path length of the light beam that passes through another paths, thereby solved the technical matters that will solve required for the present invention.
Via as can be known above-mentioned, the invention relates to a kind of interferometer with interference fringe scanning function, can be by locating in route matching path portion, be provided with and make the variable unit of phase differential that changes and can implement interference fringe scanning by the light beam phase differential of two paths, form the datum plate supporting mechanism that is not vulnerable to the external vibration influence, and can make cheap for manufacturing cost.Optical path length changing unit 30 wherein, two completely reflecting mirrors 23,24 can be fixedly installed on the pallet part 31, by the piezoelectric element 14 of drive installation on this pallet part 31, completely reflecting mirror 23,24 integral body are moved back and forth along direction shown in the arrow A, thereby change by the phase differential between the light beam of two paths.Piezoelectric element 14 can be implemented to drive by the piezoelectric element drive part 16 as driver element.Piezoelectric element drive part 16 can be applied to predetermined driving voltage on the piezoelectric element 14 according to the piezoelectric element output signal in response to the control signal that provides with computing machine 11 from 15 outputs of objective table control section.
By technique scheme, the interferometer that the present invention has interference fringe scanning function has following advantage at least:
Interferometer with interference fringe scanning function constructed according to the invention, have and the light beam that is provided by light source can be divided into two bundles, after two paths that make this two light beams implement to adjust according to the mode suitable by its optical path difference respectively with the optical range twice of reference field between detected, implement the route matching path portion place of merging output, to implement the phase differential variable cell of the interference fringe scanning of change by the light beam phase differential of two paths.
Adopt this form of the composition, no longer need the bigger datum plate of weight to be implemented to move by some piezoelectric elements, can implement the interference fringe scanning of simple and compact (compact) by a piezoelectric element, so can construct the datum plate supporting mechanism that can not be subjected to the external vibration influence usually, and can make cheap for manufacturing cost.
And, interferometer with interference fringe scanning function constructed according to the invention, can not use the unit that is assembled with datum plate to implement interference fringe scanning, so for the occasion that datum plate is set in user's side, do not need the additional unit that has other to implement interference fringe scanning yet, thereby can make cheap for manufacturing costly, and can implement the interference fringe scanning operation.
In sum, the interferometer with interference fringe scanning function of special construction of the present invention can form the datum plate supporting mechanism that usually can not be subjected to the external vibration influence, and can make cheap for manufacturing cost, have an interference fringe scanning function.And the interferometer with interference fringe scanning function of another special construction of the present invention even datum plate is arranged on user's side, also can carries out well and interference fringe scanning simply, thereby have interference fringe scanning function.It has above-mentioned many advantages and practical value, and in like product, do not see have similar structural design to publish or use and really genus innovation, no matter it structurally or bigger improvement all arranged on the function, have large improvement technically, and produced handy and practical effect, and more existing interferometer has the multinomial effect of enhancement, thus be suitable for practicality more, and have the extensive value of industry, really be a new and innovative, progressive, practical new design.
Above-mentioned explanation only is the general introduction of technical solution of the present invention, for can clearer understanding technological means of the present invention, and can be implemented according to the content of instructions, and for above-mentioned and other purposes, feature and advantage of the present invention can be become apparent, below especially exemplified by going out a plurality of preferred embodiments, and conjunction with figs., be described in detail as follows.
Description of drawings
Fig. 1 is the schematic apparatus structure pie graph of the interferometer with interference fringe scanning function of the present invention's first form of implementation.
Fig. 2 is the generalized schematic of a change example of optical path length changing unit shown in Figure 1.
The schematic apparatus structure pie graph of the interferometer with interference fringe scanning function of Fig. 3 the present invention second form of implementation.
Fig. 4 is the schematic apparatus structure pie graph of the interferometer with interference fringe scanning function of the present invention's the 3rd form of implementation.
The schematic apparatus structure pie graph of the interferometer with interference fringe scanning function of Fig. 5 the present invention the 4th form of implementation.
Fig. 6 is the synoptic diagram that is applicable to first using method of interferometer of the present invention.
Fig. 7 is the synoptic diagram that explanation is applicable to second using method of interferometer of the present invention.
Fig. 8 is the synoptic diagram that explanation is applicable to the 3rd using method of interferometer of the present invention.
2,202,302,402,502,602,5: collimation lens
205,305a, 405,505,605: collimation lens
4,21,22,204,221,321,404,421: the half reflection prism
422,504,521,522,604,621,622: the half reflection prism
4a, 21a, 22a, 204a, 221a, 321a: half reflection minute surface
6a, 106a, 107a, 207a (surface), 307a (surface): reference field
406a (reference lens face), 506a, 606a (detected face): reference field
7a, 207b (inner face), 307b (inner face), 407a: detected
507a, 606a (reference field), 607a: detected
23,24,223,224,230,231,323,324,330,331: completely reflecting mirror
423,424,425,523,524,525,623,624,625: completely reflecting mirror
1,201,301,401,501,601: light source
208,308,508,608: carry platform
3,203,303,403,503,603: divergent lens
30,40,430,530,630: the path changing unit
31,41,431,531,631: pallet part
6,106,107,506: datum plate
7,507,606,607: object to be detected (transparent parallel)
9,209,309,409,509,609: imaging lens
10,210,310,410,510,610: camera head
14,214,314,414,514,614: piezoelectric element
20,220,320,420,520,620: route matching path portion
7b: non-detected 8: lift-launch face
11: computing machine 12: image displaying part
13: input block 15: the objective table control section
16: piezoelectric element drive part 43: the right angle isosceles prism
50: unit 207: the thin plate sample
307: film 305b, 441: shrink lens
306: substrate
Embodiment
Reach technological means and the effect that predetermined goal of the invention is taked for further setting forth the present invention, below in conjunction with accompanying drawing and preferred embodiment, to its embodiment of the interferometer with interference fringe scanning function, structure, feature and the effect thereof that foundation the present invention proposes, describe in detail as after.
＜the first form of implementation 〉
Seeing also shown in Figure 1ly, is the schematic apparatus structure pie graph of the interferometer with interference fringe scanning (fringescan) function of the present invention's first form of implementation.Interferometer as shown in Figure 1, by light source 1 output, form on the path of parallel beam by collimation lens 2, be provided with route matching path portion 20.
Described route matching path portion 20 has and is positioned at by two the half reflection prisms 21,22 of collimation lens 2 on divergent lens 3 linearly extended first paths, and be arranged in tell by first path, two completely reflecting mirrors 23,24 on second path that 21,22 warpages of two half reflection prisms transmit.
This route matching path portion 20 can make the light beam that is provided by collimation lens 2 at the half reflection minute surface 21a place of half reflection prism 21, is separated into transmission and crosses the light beam of this half reflection minute surface 21a and the light beam that is reflected by half reflection minute surface 21a right angle.The light beam of described half reflection minute surface 21a is crossed in transmission, be incident to described half reflection prism 22 places along first path, by the light beam that half reflection minute surface 21a right angle reflects, implement to be incident to described half reflection prism 22 places after the right angle reflection by described completely reflecting mirror 23,24 successively along second path.At described half reflection prism 22 places, to implementing synthetic output by a part of light beam in first path with by a part of light beam in second path.
By the light beam of half reflection prism 22 output, be radiated at transparent datum plate 6 places after by divergent lens 3 and collimation lens 5 beam diameter being enlarged.The a part of light beam that is incident in the datum plate 6 is reflected by reference field 6a, and reference field 6a is crossed in the remainder light beam transmission, is radiated at object to be detected 7 places of lift-launch on lift-launch face 8.
Reference field 6a beam reflected (light wave face) by datum plate 6, and interference mutually is synthetic by implementing between detected the 7a beam reflected (light wave face) of object to be detected 7, half reflection minute surface 4a by half reflection prism 4 implements the right angle reflection subsequently, by forming interference fringe image on the CCD element of imaging lens 9 in camera head 10.Can be according to some interference fringe image information of implementing light-to-current inversion by this CCD element, surface configuration by 11 couples of detected 7a of computing machine or the like is implemented to measure and is resolved operation (comprising the parsing operation of adopting the interference fringe scanning method to implement), and interference fringe image can be presented on the image displaying part 12 such as CRT or the like.
And, aforesaid route matching path portion 20, can be to the optical path difference between first path (optical path length L1) and second path (optical path length L2=11+12+13), implement to set according to the mode of the optical range L twice of detected 7a of reference field 6a that equals datum plate 6 substantially and object to be detected 7.Adopt this mode, can make through first path and cross the beam path length of reference field 6a, and be equal to each other through the optical path length of second path by reference field 6a beam reflected by detected 7a reflection and transmission.
Adopt this form of the composition,, also can measure accurately the enforcements such as shape of detected 7a even object to be detected 7 is the transparent parallel such as glass plate, plastic plate, quartz plate or the like.In other words be exactly, the low-coherence light source of employing such as SLD (super-radiance light emitting diode), halogen lamp or high-pressure mercury-vapor lamp or the like (such as coherence distance is 1 μ m) is as light source 1, be set at mode by coherence distance less than transparent parallel thickness t 1 twice with its output beam, to can not produce by the reference field 6a of datum plate 6 and non-detected the 7b (inner face of object to be detected) of object to be detected 7, and by detected the 7a and non-detected the interference of light that 7b produced.And the effect of this route matching path portion is by open in detail in the foregoing Japanese kokai publication hei 9-21606 communique, so omitted detailed description thereof here.
This form of implementation is characterised in that on second path in route matching path portion 20, also is provided with optical path length changing unit 30.In other words be exactly, this optical path length changing unit 30 can be by being fixedly installed on the completely reflecting mirror on second path 23,24 on the pallet part 31, the piezoelectric element 14 that is installed in these pallet part 31 places is implemented the mode of driving, completely reflecting mirror 23,24 integral body are moved back and forth along direction shown in the arrow A, produce phase change thereby make between light beam by two paths.And pallet part 31 need be according to implementing to be provided with along the mode that directional smoothing shown in the arrow A moves with corresponding to the driving of piezoelectric element 14.
Described piezoelectric element 14 can be implemented to drive by the piezoelectric element drive part 16 as driver element.When the control signal that piezoelectric element drive part 16 is provided by computing machine 11 in response is implemented output by light source 15, predetermined drive voltages is applied on the piezoelectric element 14 according to the drive signal of piezoelectric element.
Also be connected with input block 13 such as keyboard and change-over switch or the like at computing machine 11 places.If for instance, this input block 13 is implemented to set the change except using carrying out the occasion that the shape desorb analyzes by the operator of interferometer according to the interference fringe image data that obtained, and can also use to implement the occasion of change or the like such as the number of steps of interference fringe scanning.
Adopt this form of the composition, the interferometer of this form of implementation can be by being provided with the mode of optical path length changing unit 30 on second path, change is through the optical path length L2 in second path, thereby can change by the phase differential between the light beam of two paths, if therefore make pallet part 31 facing one direction (along direction shown in the arrow A by optical path length changing unit 30, when an i.e. direction in the paper above-below direction) mobile (usually when phase differential is 2 π), obtain some interference fringe image data, then can implement the image analysis operation by the interference fringe scanning mode.
In other words be exactly, this form of implementation can be as mentioned above, to cross the optical path length of the light beam (object beam) of reference field 6a through first path by detected 7a reflection and transmission, be equal to each other with being set at by the optical path length of reference field 6a beam reflected (reference beam) through second path, the position of this moment is taken as the reference position, if make pallet part 31 facing one direction (along direction shown in the arrow A, an i.e. direction in the paper above-below direction) moves, every predetermined space (such as whenever phase differential when (1/2) π) in the time of can obtaining interference fringe image, be 0 then by the phase differential between described object beam and described reference beam, (1/2) π, π, (3/2) obtains interference fringe image (four step methods) during π, utilize computing machine that the some interference fringe image data that obtained are implemented the mode of predetermined operation as described later, can implement to measure accurately the shape of detected 7a.
Adopt this form of the composition, can be not as prior art, move the bigger datum plate of weight ratio by several (more than three) piezoelectric elements, but implement to move, so can implement the interference fringe scanning operation simple and compactly by a piezoelectric element 14.And, datum plate 6 can be according to the mode that can not be subjected to the external vibration influence usually, be fixedly installed on its inside and maintain the open end place of the housing of aforesaid object to be detected 7, if so adopt this form of implementation, can not need along optical axis direction moving reference plate 6, therefore can also form the form of the composition of vibration resistance type.
Below, to using some interference fringe image data, the predetermined operation of utilizing computing machine 11 to implement according to the interference fringe scanning method is carried out brief description.
For the occasion that adopts the interference fringe scanning method, by aforesaid four step methods, fringe intensity I1, the I2 of four interference fringe scannings of acquisition, I3, I4 can be respectively by following formula (1), (2), (3), (4) expressions.
I
1(x，y)＝I
0(x，y)[1+γ(x，y)cos{Φ(x，y)}] ……(1)
I
2(x，y)＝I
0(x，y)[1+γ(x，y)cos{Φ(x，y)+π/2}] ……(2)
I
3(x，y)＝I
0(x，y)[1+γ(x，y)cos{Φ(x，y)+π}] ……(3)
I
4(x，y)＝I
0(x，y)[1+γ(x，y)cos{Φ(x，y)+3π/2}] ……(4)
At this, x, y are coordinate figure, and (x y) is phase value, I to Φ
0(x y) is the average luminous intensity value at each point place, and (x y) is the adjusted value of interference fringe to γ.And this adjusted value and interference fringe amplitude are correlationship substantially, and can specifically be expressed as following formula (5).
[mathematical formulae 1]
When by above-mentioned four formula (1), (2), (3), (4), (x in the time of y), can adopt following formula (6) to find the solution Φ.
[mathematical formulae 2]
At this moment, above-mentioned formula (6) is a kind of arctan function, and (x y) implements convolution to phase place Φ between-π to π.The data of this state are called as conventional phrase overlap data.Subsequently, by implementing the phase place coiling data (Wrapping data) that convolution obtains between-the π to π, can be by finding the solution continuous phase distribution Φ ' (x, y) the non-coiling of known phase place (Unwrapping) disposal route of usefulness is implemented the non-coiling processing of phase place, solve with suitable, the continuous PHASE DISTRIBUTION Φ ' of shape of actual detected 7a (x, y).
And, in above-mentioned interference fringe scanning method, also can not adopt four step methods, but adopt such as other step method more than three steps of five step methods or the like.
And in above-mentioned form of implementation, be with completely reflecting mirror 23,24 fixing lift-launchs on the pallet part 31 of mobile piezoelectric element 14 usefulness, yet also can not adopt this mode, but general's right angle isosceles prism 43 as shown in Figure 2, the fixing lift-launch constitutes optical path length changing unit 40 on pallet part 41.When adopting this right angle isosceles prism 43, the collimation adjustment of the second path optical system that guarantees that two reflecting surface right angle precision are used is implemented easily.
And, can also adopt right-angle prism to substitute above-mentioned right angle isosceles prism 43.
＜the second form of implementation 〉
Below second form of implementation of the present invention is described.Seeing also shown in Figure 3ly, is the synoptic diagram of the interferometer with interference fringe scanning function of the present invention's second form of implementation.In Fig. 3, with the identical inscape of above-mentioned first form of implementation, by with Fig. 1 in identical reference number represent, and omitted detailed description to them.
Second form of implementation is characterised in that datum plate 106 is not included in the inscape of interferometer, and all the formation with the interferometer of above-mentioned first form of implementation is identical substantially for other.
In other words be exactly, this interferometer can will not comprise the unit 50 of datum plate 106, with the desirable datum plate 106 of user's side preparation, constitutes interferometer for using.
When interferometer adopts as the form of the composition of this form of implementation, can have following advantage.
In the prior art, such as the disclosed technology of Japanese kokai publication hei 10-325710 communique, owing to adopting the known method as the triple identical methods of what is called to have certain advantage.So-called triple identical method, be a kind of for the surface configuration of datum plate with high precision plane is implemented to measure, three datum plates are combined in twos, and one in two datum plates after will making up is configured in former benchmark Board position place, another is configured in former object to be detected position, and then these array configurations are implemented interference fringe respectively measure, three groups of interference fringe informations that obtained are implemented computing, obtain the method for each datum plate surface (reference field) shape.For the occasion that adopts this method, the user need be when beginning on interferometer additional datum plate, so and the occasion that datum plate is set when beginning compare, at Job Operations with have more superiority in price.As the interferometer of this form of implementation, for this application scenario, even also can implement good interference fringe scanning in the unit that interference fringe scanning is used not additional enforcement of user's side.
As shown in Figure 3, be will be in two datum plates 106,107 in three datum plates that user's side is prepared one and be arranged on former benchmark Board position place, another is arranged on former object to be detected position, and the example the when relative shape of two reference field 106a, 107a implemented to measure.
User for interferometer, may need the object to be detected that has special shape such as very long linear foot or the like is implemented to measure, can prepare its shape and the corresponding datum plate of this detected material shape easily in user's side for this occasion.In this state, user's side often be difficult to construct can to corresponding with this datum plate shape, the interference fringe scanning of this datum plate is measured the system that drives of implementing, if yet the form of the composition that adopts this form of implementation to provide can be carried out the interference fringe scanning operation well.And, for the occasion that need implement mensuration to the surface configuration of lengthwise type object to be detected, can also pass through interferometer and object to be detected, move the mode of preset distance simultaneously along the object to be detected longitudinal direction, the enforcement interference fringe is measured, and then the some interference fringe image data that obtained are implemented to connect the opening synthetic method of coincideing.
＜the three form of implementation 〉
Seeing also shown in Figure 4ly, is the synoptic diagram of the interferometer with interference fringe scanning function of the present invention's the 3rd form of implementation.Interferometer as shown in Figure 4, by light source 201 output, form on the light path of parallel beam by collimation lens 202, be provided with different route matching path portion 220 of the route matching path portion that uses with above-mentioned first form of implementation and above-mentioned second form of implementation 20.
Described route matching path portion 220 has half reflection prism 221 and two completely reflecting mirrors 230,231 that the light beam that will be provided by collimation lens 202 is divided into two bundles.
This route matching path portion 220 can make the light beam that is provided by collimation lens 202 at the half reflection minute surface 221a place of half reflection prism 221, is divided into transmission and crosses the light beam of this half reflection minute surface 221a and the light beam that is reflected by half reflection minute surface 221a right angle.
The light beam of described half reflection minute surface 221a is crossed in transmission, and vertical incidence is to the completely reflecting mirror of fixing 230, and vertical reflection returns half reflection prism 221, and its part is implemented right angle reflection (first path) by half reflection minute surface 221a.On the other hand, by the light beam that half reflection minute surface 221a right angle reflects, vertical incidence is to the completely reflecting mirror 231 that can move along optical axis direction, and vertical reflection returns half reflection prism 221, and its part is by half reflection minute surface 221a place's transmission (second path).
Adopt this form of the composition, be back to the part of two light beams in half reflection prism 221 places, can implement to synthesize by half reflection minute surface 221a, and outgoing is to completely reflecting mirror 223 places.
Synthetic back is implemented total reflection towards the light beam of completely reflecting mirror 223 by this completely reflecting mirror 223 and completely reflecting mirror 224, after by divergent lens 203 and collimation lens 205 beam diameter being enlarged, is radiated at lift-launch at transparent thin board sample 207 places of carrying on the platform 208.The a part of light beam that exposes to these thin plate sample 207 places is implemented reflection by this surface (reference field) 207a, and thin plate sample 207 is crossed in the remainder light beam transmission, is implemented to reflect by inner face (detected face) 207b of this thin plate sample 207.
Surface (reference field) 207a by thin plate sample 207 implements beam reflected (light wave face), and inner face (detected face) 207b by thin plate sample 207 implements to interfere mutually between beam reflected (light wave face) synthetic, half reflection minute surface 204a by half reflection prism 204 implements the right angle reflection subsequently, by forming interference fringe image on the CCD element of imaging lens 209 in camera head 210.Can be according to some interference fringe image information of implementing light-to-current inversion by this CCD element, by not shown computing machine, the surface of thin plate sample 207, the depth of parallelism between inner face and thickness risen and fallen or the like implement to measure parse operation, and interference fringe image can be presented on not shown, the image displaying part such as CRT or the like.
And described lift-launch platform 208 constitutes the mode of the relative configuration with lower side panel 208c of epipleural 208a according to by tilt adjusting mechanism 208b.
Can piezoelectric element 214 be installed along mobile completely reflecting mirror 231 places of optical axis direction (along direction shown in the arrow B), completely reflecting mirror 231 can be implemented scanning along optical axis direction (along direction shown in the arrow B), to obtain to have the function of interference fringe scanning.Adopt this form of the composition, can pass through the interference fringe scanning method, the surface of thin plate sample 207, the depth of parallelism between inner face and thickness are risen and fallen or the like implement to resolve operation.
Adopt this form of the composition, this form of implementation can be implemented scanning to the completely reflecting mirror 231 that is configured in the route matching path portion 220, and then enforcement interference fringe scanning, so, also can carry out simple and high-precision interference fringe scanning and measure for the occasion that constitutes one as the surface of thin plate sample 207, inner face and detected and reference field.
And above-mentioned route matching path portion 220, can be according to making by half reflection minute surface 221a to completely reflecting mirror 230, and then be back to first path of half reflection minute surface 221a, with by half reflection minute surface 221a to completely reflecting mirror 231, and then be back to the optical path length in second path of half reflection minute surface 221a, equal the mode of optical thickness (optical beam path length) twice of thin plate sample 207 substantially, completely reflecting mirror 231 is implemented to move adjustment (travel mechanism of completely reflecting mirror 231 usefulness is not shown in the drawings) along direction shown in the arrow B.
If adopt this form of the composition, through the optical path length of first path by inner face (detected face) the 207b beam reflected of thin plate sample 207, can with equate substantially through the optical path length of second path by surface (reference field) the 207a beam reflected of thin plate sample 207, so can implement high-precision mensuration to rising and falling such as the surface of transparent thin board sample 207, the depth of parallelism between inner face and thickness or the like.In other words be exactly, can adopt can its interference distance of outgoing than the little low-coherence light source of the twice of the optical thickness (optical beam path length) of thin plate sample 207 as light source 201, so that outside above-mentioned beam interference, can not occur because the beam interference that noise or the like produces.
＜the four form of implementation 〉
Seeing also shown in Figure 5ly, is the synoptic diagram of the interferometer with interference fringe scanning function of the present invention's the 4th form of implementation.The 4th form of implementation is represented measures usefulness in order to carry out rising and falling or the like such as film thickness, as oblique incidence interferometer of the present invention, the form of the composition such as route matching path portion 320 or the like, identical substantially with the form of the composition of route matching path portion 220 or the like in above-mentioned the 3rd form of implementation, so in the ordinary course of things, for with the 3rd form of implementation in identical parts, represent by the mode that on the parts reference number of the 3rd form of implementation, increases numerical value 100, and omitted detailed description them.
Similar with above-mentioned the 3rd form of implementation, implement synthetic and towards the light beam of completely reflecting mirror 323 outgoing by route matching path portion 320, implement total reflection by this completely reflecting mirror 323 and completely reflecting mirror 324, after beam diameter is enlarged and forming parallel beam by divergent lens 303 and collimation lens 305a, expose to be formed on and be positioned at film 307 places of lift-launch on the opaque substrate 306 that carries on the platform 308.The a part of light beam that exposes to these film 307 places is implemented reflection by its surface (reference field) 307a, and film 307 is crossed in the remainder light beam transmission, is implemented to reflect by inner face (detected face) 307b of this film 307.
Surface (reference field) 307a by film 307 implements beam reflected (light wave face), and inner face (detected face) 307b by film 307 implements to interfere mutually between beam reflected (light wave face) synthetic, by shrinking lens 305 and imaging lens 309, form interference fringe image on the CCD element in camera head 310 subsequently.
Can be according to some interference fringe image information of implementing light-to-current inversion by this CCD element, by not shown computing machine, the surface of film 307, the depth of parallelism between inner face and thickness risen and fallen or the like to implement to measure resolve operation, and interference fringe image can be presented on not shown, the image displaying part such as CRT or the like.And, carry out the scanning that interference fringe scanning is measured the optical path difference of usefulness, can be by the piezoelectric element in the route matching path portion 320 314 to be implemented to drive, the mode that makes completely reflecting mirror 331 implement to move along direction shown in the arrow C is implemented.
Adopt this form of the composition, this form of implementation can be implemented scanning to the completely reflecting mirror 331 that is configured in the route matching path portion 320, and then enforcement interference fringe scanning, so for as the face suitable in the surface of film 307, the inner face with reference field, with with detected the indissociable to each other occasion of suitable face, also can carry out simple and high-precision interference fringe scanning and measure.
And, above-mentioned route matching path portion 320, can also make by half reflection minute surface 321a to completely reflecting mirror 330, and then be back to first path of half reflection minute surface 321a, with by half reflection minute surface 321a to completely reflecting mirror 331, and then be back to the optical path length in second path of half reflection minute surface 321a, equal the mode of optical thickness (optical beam path length) twice of film 307 oblique incidences substantially, completely reflecting mirror 331 is implemented to move adjustment (travel mechanism of completely reflecting mirror 331 usefulness is not shown in the drawings) along direction shown in the arrow C.
If adopt this form of the composition, can adopt can its coherence distance of outgoing than the little low-coherence light source of the twice of the optical thickness (optical beam path length) of film 307 as light source 301, and can be outside above-mentioned beam interference, can not occur because the beam interference that noise or the like produces, thereby can rise and fall or the like to the surface of film 307, thickness between inner face, implement high-precision mensuration.
＜be specially adapted to using method of the present invention 〉
Seeing also Fig. 6 to Fig. 8 below is, to describing as first, second, third using method that is specially adapted to the using method of interferometer of the present invention.
At this these three kinds of using method are described among Fig. 6 to Fig. 8 of usefulness, by light source to the part between collimation lens, can be identical substantially with the form of the composition in above-mentioned first form of implementation and second form of implementation, so in the ordinary course of things, for with first form of implementation in identical parts, by mode (first using method), mode (second using method) that increases numerical value 500 that on the parts reference number of first form of implementation, increases numerical value 400 or mode (the 3rd using method) expression that increases numerical value 600, and omitted detailed description to them.
＜the first using method 〉
First using method is a kind of assay method that applies the present invention to sphere mensuration with striking rope type interferometer as shown in Figure 6.In general sphere is measured with striking rope type interferometer, the spherical face shape is implemented the occasion of resolving for adopting the interference fringe scanning method, reference lens 406 (constituting by shrinking lens 441 and spherical lens 442) can be passed through piezoelectric element, implement scanning operation along optical axis direction, and can make at this moment by reference lens face (reference field) 406a beam reflected (divergent beams), optical path length along the light beam on the optical axis direction produces the variation that Δ L is arranged, yet optical path length by the reference lens face 406a beam reflected that is angle θ inclination with respect to optical axis, but do not produce the variation of promising Δ Lcos θ, so analysis result can produce error corresponding with it.
Corresponding is, adopt device of the present invention, be to carry out interference fringe scanning, so the error that this reason produces can not appear in the surface configuration analysis result of detected 407a (being the ball surface of globe lens 407 here) by the mode that the optical path length changing unit 430 that is configured in the route matching path portion 420 is implemented scanning.
＜the second using method 〉
Second using method is a kind of assay method that applies the present invention to dispose the striking rope type interferometer of the bigger datum plate of weight ratio as shown in Figure 7.For the bigger datum plate of this weight ratio, and in order to make aperture-coefficient (F number) clearly use the interferometer of the datum plate of many lens formations, prior art is by implementing interference fringe scanning, such as the piezoelectric element that is three heavier datum plate and reference lens are implemented support and scanning operation, yet owing to need to use several piezoelectric elements, and can make cost than higher, and owing to be provided with heavier datum plate and reference lens are implemented the interference fringe scanning mechanism that interference fringe scanning is used, hang down inferior problem so also have the low and freedom from vibration of device intensity.
Corresponding is, adopt device of the present invention, be to carry out interference fringe scanning by the mode that the optical path length changing unit 530 that is configured in the route matching path portion 520 is implemented scanning, so do not need heavier datum plate 506 is implemented interference fringe scanning, therefore can be as shown in Figure 7, be fixed on datum plate 506 firm and have on the datum plate maintaining body (having the function that the lift-launch platform as object to be detected 507 uses) 508 of excellent shock.And, only need to use a piezoelectric element, so can also reduce manufacturing cost significantly.
As shown in Figure 7, datum plate maintaining body 508 can make epipleural 508a and lower side panel 508c, 508b disposes relatively by tilt adjusting mechanism, and can pass through datum plate tilt adjusting mechanism 517, will keep the datum plate holding member 526 of datum plate 506 usefulness to be installed in epipleural 508a place.
＜the three using method 〉
The 3rd using method is a kind of applying the present invention to by triple identical methods as shown in Figure 8, the absolute shape of the rectangular lengthwise glass bar of section shape is implemented to measure the assay method of the striking rope type interferometer of resolving usefulness.
For be easy to generate problem such as deflection, implement method for measuring such as the absolute shape of the object to be detected of lengthwise glass bar or the like, can measure its relative shape for three objects to be detected are taken out by twos, and then three relative shape enforcement computings that obtained are measured with the absolute shape enforcement separately to three objects to be detected, so-called triple identical method (such as, can referring to Japanese kokai publication hei 11-37742 communique or the like).For the occasion that adopts this method, be difficult to construct the mechanism that these objects to be detected is implemented interference fringe scanning, measure so often be difficult to implement interference fringe scanning in the prior art by this triple identical methods.
Yet adopt device of the present invention, can carry out interference fringe scanning by the mode that the optical path length changing unit 630 that is configured in the route matching path portion 620 is implemented scanning, so can carry first object to be detected 606 on the platform 608 and the relative shape between each detected 606a (reference field), 607a on second object to be detected 607 for carrying, implement high precision and easily measure, so can be by the triple identical method that adopts interference fringe scanning to measure, the absolute shape such as the object to be detected of lengthwise glass bar or the like is implemented to measure.
And the interferometer with interference fringe scanning function constructed according to the invention is not limited in above-mentioned form of implementation, also comprises various distortion forms of implementation.
If for instance, above-mentioned route matching path portion 20 is according to the optical path difference that makes between first path and second path, equal substantially that the mode of the optical range L twice between detected 7a of the reference field 6a of datum plate 6 and object to be detected 7 implements to set, yet also can be not limited to above-mentioned form of implementation.The phase differential variable cell also can not be arranged on second path, and is arranged on the first via footpath.And, the phase differential variable cell also can move by the mode of the light beam phase differential of two paths by change, such as can tire out the optical path length change unit of (Babinet-Soleil) plate or the like than Nat-Suo, thereby make light beam phase differential produce change by two paths by insertion on a paths such as crust.
And at least one in two paths can be made of optical fiber, and route matching path portion can be made of forming unit (compact).
The above, it only is preferred embodiment of the present invention, be not that the present invention is done any pro forma restriction, though the present invention discloses as above with preferred embodiment, yet be not in order to limit the present invention, any those skilled in the art, in not breaking away from the technical solution of the present invention scope, when the technology contents that can utilize above-mentioned announcement is made a little change or is modified to the equivalent embodiment of equivalent variations, in every case be the content that does not break away from technical solution of the present invention, according to technical spirit of the present invention to any simple modification that above embodiment did, equivalent variations and modification all still belong in the scope of technical solution of the present invention.
Claims (11)
1, a kind of interferometer with interference fringe scanning function, has light source, route matching (path match) path portion, to be divided into two bundles by the light beam that this light source provides, and make this two light beams respectively the optical path difference by will be each other be adjusted into after two paths of the optical range twice between detected that is equivalent to interferometric reference field and object to be detected, two light beams is implemented to merge output, and collimation lens, to expose to described reference field as parallel beam from the light beam of this route matching path portion output, and has an interference fringe scanning function, according to the interference fringe of crossing described reference field by the light wave face of this reference field reflection and transmission and forming by the interference of the light wave face of described detected reflection, obtain this corrugated information of detected
It is characterized in that having the phase differential variable cell, light beam phase differential by described two paths is changed and can implement strip-scanning at described route matching path portion place.
2, a kind of interferometer with interference fringe scanning function, has light source, route matching path portion, to be divided into two bundles by the light beam that this light source provides, and make this two light beams respectively the optical path difference by will be each other be adjusted into after two paths of the optical range twice between detected that is equivalent to interferometric reference field and object to be detected, two light beams is implemented to merge output, collimation lens, to expose to described reference field as parallel beam from the light beam of this route matching path portion output, and datum plate with this reference field, and has an interference fringe scanning function, according to the interference fringe of crossing described reference field by the light wave face of this reference field reflection and transmission and forming by the interference of the light wave face of described detected reflection, obtain this corrugated information of detected
It is characterized in that having the phase differential variable cell, light beam phase differential by described two paths is changed and can implement strip-scanning at described route matching path portion place.
3, the interferometer with interference fringe scanning function according to claim 1 and 2, it is characterized in that wherein said object to be detected is a transparent parallel, the described light beam of being exported by described light source is the low coherence light beam that relevant (coherence) distance is set to the twice of the thickness (being optical range) less than described transparent parallel.
4, the interferometer with interference fringe scanning function according to claim 1 and 2, it is characterized in that wherein said phase differential variable cell makes by the moving of the optics physics of light beam irradiates, and changes the light beam phase differential by described two paths by this.
5, the interferometer with interference fringe scanning function according to claim 3, it is characterized in that wherein said phase differential variable cell makes by the moving of the optics physics of light beam irradiates, and changes the light beam phase differential by described two paths by this.
6, the interferometer with interference fringe scanning function according to claim 4 is characterized in that the physics of wherein said optics moves, and implements by piezoelectric element.
7, the interferometer with interference fringe scanning function according to claim 5 is characterized in that the physics of wherein said optics moves, and implements by piezoelectric element.
8, the interferometer with interference fringe scanning function according to claim 4 is characterized in that wherein said optics is to make at least one in described two paths produce two catoptrons or a prism of 180 degree warpages.
9, the interferometer with interference fringe scanning function according to claim 5 is characterized in that wherein said optics is to make at least one in described two paths produce two catoptrons or a prism of 180 degree warpages.
10, the interferometer with interference fringe scanning function according to claim 6 is characterized in that wherein said optics is to make at least one in described two paths produce two catoptrons or a prism of 180 degree warpages.
11, the interferometer with interference fringe scanning function according to claim 7 is characterized in that wherein said optics is to make at least one in described two paths produce two catoptrons or a prism of 180 degree warpages.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003200251A JP2005043081A (en) | 2003-07-23 | 2003-07-23 | Interferometer device having fringe scanning function |
| JP2003200251 | 2003-07-23 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1576776A true CN1576776A (en) | 2005-02-09 |
| CN1281917C CN1281917C (en) | 2006-10-25 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200410069067 Expired - Fee Related CN1281917C (en) | 2003-07-23 | 2004-07-19 | Interferometer with interference fringe scanning function |
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| Country | Link |
|---|---|
| JP (1) | JP2005043081A (en) |
| CN (1) | CN1281917C (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103712553A (en) * | 2013-12-26 | 2014-04-09 | 镇江超纳仪器有限公司（中外合资） | Interference method with phase method and vertical scanning method compatible |
| CN106352789A (en) * | 2015-07-14 | 2017-01-25 | 株式会社三丰 | Instantaneous phase-shift interferometer and measurement method |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5009709B2 (en) * | 2007-07-20 | 2012-08-22 | 富士フイルム株式会社 | Optical interference measurement device for thickness measurement |
-
2003
- 2003-07-23 JP JP2003200251A patent/JP2005043081A/en not_active Withdrawn
-
2004
- 2004-07-19 CN CN 200410069067 patent/CN1281917C/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103712553A (en) * | 2013-12-26 | 2014-04-09 | 镇江超纳仪器有限公司（中外合资） | Interference method with phase method and vertical scanning method compatible |
| CN103712553B (en) * | 2013-12-26 | 2017-02-08 | 镇江超纳仪器有限公司（中外合资） | Interference method with phase method and vertical scanning method compatible |
| CN106352789A (en) * | 2015-07-14 | 2017-01-25 | 株式会社三丰 | Instantaneous phase-shift interferometer and measurement method |
| CN106352789B (en) * | 2015-07-14 | 2019-12-24 | 株式会社三丰 | Instantaneous phase shift interferometer |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2005043081A (en) | 2005-02-17 |
| CN1281917C (en) | 2006-10-25 |
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