CN1564053A - High solution digital microoptical grey mask prodn. system and its prodn, method - Google Patents
High solution digital microoptical grey mask prodn. system and its prodn, method Download PDFInfo
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- CN1564053A CN1564053A CN 200410017768 CN200410017768A CN1564053A CN 1564053 A CN1564053 A CN 1564053A CN 200410017768 CN200410017768 CN 200410017768 CN 200410017768 A CN200410017768 A CN 200410017768A CN 1564053 A CN1564053 A CN 1564053A
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Abstract
The system includes ultraviolet light source, final minification projection composite lens, spatial filter, basal piece and computer etc. Characters are that the system also includes light ray modulation device. The modulation device uses digital micro lens part as spatial light modulator. Assembled part including two to three digital micro lenses realizes modulation of light intensity subdivision so as to realize photoetching and exposing in high resolution. The invention possesses advantages: (1) one-off exposure on a surface much quicker than exposure by one point by one point; (2) higher resolution than general image output equipment; (3) exposure controlled from two factors: one is time of exposure, and the other is by digitized gray level of pixel trough computer control.
Description
Technical field
The present invention relates to the manufacturing system of micro-optical device, especially relate to a kind of high resolution digitizing micro-optic gray scale mask manufacturing system and method for making.
Background technology
What micro-optical device gray scale mask method for making in the past mainly adopted is following two kinds of methods: one, laser or direct electronic beam literary style; Two, desk-top publishing or colour print figures output device printing final minification forms.Wherein, laser or direct electronic beam literary style are the pointwise exposures, adopt superlaser or beam bombardment high energy beam sensing glass HEBSG (high energy beam sensitive glass) to go up and make gray scale mask, subject matter is: the pointwise exposure, process velocity is slow, the single time shutter is extremely long, only be suitable for making multistage phase place of single-piece or continuous profile device simple in structure, and it is very expensive directly to write the gray scale mask equipment needed thereby, the cost height, and also problems such as profile depth and profile distortion can not be accurately controlled in existence.What second method adopted is computer control, utilizes desk-top publishing or colour print figures output device, output binary figure or half-tone, and the final minification transfer printing forms the analog gray scale mask graph.Subject matter is: resolution is lower, and its minimum feature size is tens microns, does not satisfy the requirement of the binary optical device of making fine structure far away.And the finished product mask that above two kinds of methods are made determines that to the modulation system of light the size of exposure was controlled by the time shutter, can be regarded as the simulation mask.
Summary of the invention
The objective of the invention is to overcome the scarce limit of above-mentioned prior art, provide a kind of can be to high resolution digitizing micro-optic gray scale mask manufacturing system and the method for making that each point exposure light intensity digital quantization is controlled on disposable exposure of single or multiple micro-optical devices, the plane of exposure, resolving power is high, it is to realize the accurate exposure control of high resolution by the digital gray level extended method.
The object of the present invention is achieved like this: micro-optic gray scale mask manufacturing system of the present invention comprises ultraviolet source, beam-expanding collimation device, final minification projection compound lens, spatial filter, substrate, two-dimentional accurate exposure stage and computing machine, and feature is also to comprise the light modulating device.The ultraviolet light that ultraviolet source sends is by directive light modulating device behind the beam-expanding collimation device beam-expanding collimation, ultraviolet light by by computer-controlled light modulating device modulation after be imaged on the substrate after the compression of final minification projection compound lens bulk, spatial filter filtering.
Described light modulating device is made up of a catoptron and two Digital Micromirror Device (DigitalMicromirror Device, abbreviation DMD), and two Digital Micromirror Device all are connected with computing machine by lead.
Described light modulating device is made up of a light-splitting device and two Digital Micromirror Device, and two Digital Micromirror Device all are connected with computing machine by lead.
Described light modulating device is made up of two light-splitting devices and three Digital Micromirror Device, and three Digital Micromirror Device all are connected with computing machine by lead.
Micro-optic gray scale mask method for making of the present invention is:
1, according to the position requirement mutually of micro-optic diffractive optical element, converse the exposure intensity of the phase place correspondence of each point on the mask face, determine the modulation GTG of each pixel by the exposure intensity of each point, thereby determine the gray-tone mask distribution plan of whole exposure plane;
2, show by the mask graph GTG on each Digital Micromirror Device of computer control;
3, the ultraviolet light that sends of ultraviolet source is by directive light modulating device behind the beam-expanding collimation device beam-expanding collimation;
4, ultraviolet light carries out intensity modulation by the light modulating device;
5, the ultraviolet light after the modulation carries out being imaged on the substrate after bulk compression, the spatial filter filtering through final minification projection compound lens.
Described intensity modulation is the secondary modulation structure, be that the secondary modulation structure adopts two Digital Micromirror Device and an arrangement of mirrors, the light that sends from ultraviolet source is behind beam-expanding collimation device beam-expanding collimation, by mirror reflects, to become 20 ° of angles to be radiated on this Digital Micromirror Device with first digit micro mirror element minute surface normal, the micro mirror of first digit micro mirror element+10 ° corner reflection light is perpendicular to self minute surface output, and be radiated on the minute surface of second digit micro mirror element, and become 20 ° of angles with the minute surface normal of second digit micro mirror element, second digit micro mirror element micro mirror+10 ° of corner reflection light are perpendicular to self minute surface output.
Described intensity modulation is the superposition modulated structure, be that the superposition modulated structure adopts one or two light-splitting device and two Digital Micromirror Device or three Digital Micromirror Device combinations, the light that sends from ultraviolet source is behind beam-expanding collimation device beam-expanding collimation, the light beam that is divided into corresponding way by light-splitting device, vertical irradiation is on the minute surface of each Digital Micromirror Device respectively, and the size of reflective light intensity is modulated in the micro mirror deflection of computer control Digital Micromirror Device; The Guang Yuanlu that reflects under micro mirror maintenance and the incident light plumbness turns back to light-splitting device, by light-splitting device synthetic back output.
The present invention has set up the light modulating device on the basis of ultraviolet source, beam-expanding collimation device, final minification projection compound lens, spatial filter, substrate, two-dimentional accurate exposure stage and computing machine, this light modulating device adopts Digital Micromirror Device as the spatial light modulation device, and adopt a Digital Micromirror Device or two to three Digital Micromirror Device to make up, by the intensity modulation method, the segmentation of realization intensity modulation, be equivalent to the expansion of single digital micro mirror element GTG, realize the high resolution photolithographic exposure.Can be divided into secondary modulation structure and superposition modulated structure by the light-struck precedence of incident between each Digital Micromirror Device of the present invention, wherein secondary modulation structure adopts two Digital Micromirror Device and an arrangement of mirrors, and the superposition modulated structure adopts one or two light-splitting device and two Digital Micromirror Device or three Digital Micromirror Device combinations.
The GTG expansion of secondary modulation structure of the present invention is calculated: two Digital Micromirror Device can modulate 256 grades of light intensity respectively, then through inciding light intensity on the second digit micro mirror element after 256 grades of GTG intensity modulation of first digit micro mirror element, can realize 256 grades of modulation again, minimax inter-stage energy difference can reach 65535 times, is equivalent to incident intensity is realized 65535 GTG modulation.The GTG expansion computing formula of superposition modulated structure: in the multiple digital micro mirror element overlaying structure, utilize the reflection stack of a plurality of Digital Micromirror Device, can realize that equivalent GTG expansion exponent number is 256/m, m is the incident intensity beam split number percent of the more weak way word micro mirror element of intensity wherein.Reduce beam split number percent, can realize the high gray expansion equally.Secondary modulation structure and superposition modulated structure can realize high multiple GTG expansion, and the modulation range and the fineness of exposure light source increase greatly, can be used for the processing of hyperfine complex surface embossment structure mask.
Therefore the present invention has following advantage:
(1) utilizes Digital Micromirror Device to make gray scale mask, once can disposable exposure of single or multiple micro-optical devices have been solved and directly write the slow problem of a film speed;
(2) Digital Micromirror Device is to have only tens microns square pixel array to constitute by the length of side, and the micro-optical device mask graph is discretized into up to a million pixels, and each pixel only needs final minification less than 20 times, just can reach the luminous point of submicron order.Solved the not high difficult problem of generic graphic output device resolution;
(3) utilize Digital Micromirror Device combination GTG expanding system to make gray scale mask, the exposure of each pixel final minification luminous point is not only controlled by the time shutter, can also adjust the control of Digital Micromirror Device pixel gray level by the computer real-time digitizing, be a kind of brand-new digitizing mask manufacturing system.
(4) multiple digital micro mirror element combination modulation technique has greatly improved the modulation resolving power of each point exposure light intensity, thereby has solved the problem of accurate control profile depth by the light intensity high power segmentation that can realize exposing of light intensity secondary modulation or superposition modulated.
(5) multiple digital micro mirror element combination exposure technique not only can increase substantially the resolution of intensity modulation, shortens the time shutter, but also can increase the degree of freedom of mask design, simplifies the complicacy of mask design on the single digital micro mirror element.
Description of drawings
Fig. 1 is the synoptic diagram of secondary modulation structure of the present invention;
Fig. 2 is the synoptic diagram of the superposition modulated structure of two Digital Micromirror Device of the present invention;
Fig. 3 is the synoptic diagram of the superposition modulated structure of three Digital Micromirror Device of the present invention.
Embodiment
Below in conjunction with embodiment and contrast accompanying drawing the present invention further is elaborated.
Embodiment 1:
Micro-optic gray scale mask producing device of the present utility model is by ultraviolet source 1, beam-expanding collimation device 2, the light modulating device, spectroscope 3, computing machine 4, final minification projection compound lens 7, spatial filter 8, substrate 9, the accurate exposure stage 10 of two dimension is formed, wherein the light modulating device is by catoptron 3 and two Digital Micromirror Device 5,6 form, two Digital Micromirror Device 5,6 all are connected with the video card video expansion delivery outlet of computing machine 4 by lead, and controlled by computing machine 4, the minute surface of the reflecting surface of catoptron 3 and beam-expanding collimation device 2 angle at 45, the reflection ray of catoptron 3 is to become 20 ° of angles to be radiated on the Digital Micromirror Device 6 with Digital Micromirror Device 6 minute surface normals, the micro mirror of Digital Micromirror Device 6+10 ° corner reflection light is perpendicular to self minute surface output, and be radiated on the minute surface of Digital Micromirror Device 5, and become 20 ° of angles with the minute surface normal of Digital Micromirror Device 5, the axis normal of the minute surface of Digital Micromirror Device 5 and final minification projection compound lens 7, and the light that is radiated at Digital Micromirror Device 5 by Digital Micromirror Device 6 becomes 20 ° of angles with the minute surface normal of Digital Micromirror Device 5.
Micro-optic gray scale mask method for making is:
1, according to the position requirement mutually of micro-optic diffractive optical element, converse the exposure intensity of the phase place correspondence of each point on the mask face, determine the modulation GTG of each pixel by the exposure intensity of each point, thereby determine the gray-tone mask distribution plan of whole exposure plane;
2, show by the mask graph GTG on the computing machine 4 control figure micro mirror elements 6,5;
3, the ultraviolet light that sends of ultraviolet source 1 is by toward mirror 3 behind beam-expanding collimation device 2 beam-expanding collimations;
4, catoptron 3 reflexes to Digital Micromirror Device 6 with light, to become 20 ° of angles to be radiated on the Digital Micromirror Device 6 with Digital Micromirror Device 6 minute surface normals, the micro mirror of Digital Micromirror Device 6+10 ° corner reflection light is perpendicular to self minute surface output, and be radiated on the minute surface of Digital Micromirror Device 5, and become 20 ° of angles with the minute surface normal of Digital Micromirror Device 5, Digital Micromirror Device 5 micro mirrors+10 ° of corner reflection light are perpendicular to self minute surface output, ultraviolet light carries out the intensity modulation second time by carrying out the intensity modulation first time by the Digital Micromirror Device 6 of computing machine 4 controls by Digital Micromirror Device 5;
5, the ultraviolet light after the modulation carries out being imaged on the substrate 9 after bulk compression, spatial filter 8 filtering through final minification projection compound lens 7.
Embodiment 2:
The structure of the structure of embodiment 2 and embodiment 1 is basic identical, difference is: the light modulating device, the light modulating device is spectroscope 11 and two Digital Micromirror Device 5 by light-splitting device, 12 form, two Digital Micromirror Device 5,12 all are connected with the video card video expansion delivery outlet of computing machine 4 by lead, and controlled by computing machine 4, the minute surface of the light splitting surface of spectroscope 11 and beam-expanding collimation device 2 angle at 45, the two-way light that spectroscope 11 is divided into respectively with two Digital Micromirror Device 5,12 minute surface is vertical, two Digital Micromirror Device 5,12 reflect back into spectroscope 11 with the two-way incident light along former road respectively, by spectroscope 11 synthetic back outputs.
Micro-optic gray scale mask method for making is:
1, according to the position requirement mutually of micro-optic diffractive optical element, converse the exposure intensity of the phase place correspondence of each point on the mask face, determine the modulation GTG of each pixel by the exposure intensity of each point, thereby determine the gray-tone mask distribution plan of whole exposure plane;
2, show by the mask graph GTG on the computing machine 4 control figure micro mirror elements 5,12;
3, the ultraviolet light that sends of ultraviolet source 1 is by directive spectroscope 11 behind beam-expanding collimation device 2 beam-expanding collimations;
4, spectroscope 11 is divided into two-way with light, one road vertical directive Digital Micromirror Device 5, the vertical directive Digital Micromirror Device 12 in another road, two Digital Micromirror Device 5,12 reflect back into spectroscope 11 with the two-way incident light along former road respectively, by spectroscope 11 synthetic back outputs, ultraviolet light is by carrying out intensity modulation by the Digital Micromirror Device 5,12 of computing machine 4 controls, and the light of two-way modulation is realized superposition modulated at spectroscope 11 places;
5, the ultraviolet light after the modulation carries out being imaged on the substrate 9 after bulk compression, spatial filter 8 filtering through final minification projection compound lens 7.
Embodiment 3:
The structure of the structure of embodiment 3 and embodiment 1 is basic identical, difference is: the light modulating device, the light modulating device is by light-splitting device and three Digital Micromirror Device 5,13,14 form, light-splitting device is made up of a spectroscope 11 and a prism assembly 15 again, three Digital Micromirror Device 5,13,14 all are connected with the video card video expansion delivery outlet of computing machine 4 by lead, and controlled by computing machine 4, the minute surface of the light splitting surface of spectroscope 11 and beam-expanding collimation device 2 angle at 45, spectroscope 11 is divided into two-way light, one road vertical directive final minification projection compound lens 7, another road directive prism assembly 15, prism assembly 15 penetrates three road light respectively, three road light that penetrate respectively with three Digital Micromirror Device 5,13,14 minute surface is vertical, three Digital Micromirror Device 5,13,14 reflect back into prism assembly 15 with three road incident lights along former road respectively, prism assembly 15 passes spectroscope 11 back outputs with the synthetic back of three road light directive spectroscope 11.
Micro-optic gray scale mask method for making is:
1, according to the position requirement mutually of micro-optic diffractive optical element, converse the exposure intensity of the phase place correspondence of each point on the mask face, determine the modulation GTG of each pixel by the exposure intensity of each point, thereby determine the gray-tone mask distribution plan of whole exposure plane;
2, show by the mask graph GTG on the computing machine 4 control figure micro mirror elements 5,13,14;
3, the ultraviolet light that sends of ultraviolet source 1 is by directive spectroscope 13 behind beam-expanding collimation device 2 beam-expanding collimations;
4, spectroscope 13 is divided into two-way with light, one road vertical directive final minification projection compound lens 7, another road directive prism assembly 15, prism assembly 15 penetrates three road light respectively, three road light that penetrate respectively with three Digital Micromirror Device 5,14,16 minute surface is vertical, three Digital Micromirror Device 5,14,16 reflect back into prism assembly 15 with three road incident lights along former road respectively, prism assembly 15 is with the synthetic back of three road light directive spectroscope 13, pass spectroscope 13 back outputs, ultraviolet light is by the Digital Micromirror Device 5 by computing machine 4 controls, 14,16 carry out intensity modulation, and the light of three tunnel modulation is realized superposition modulated at prism assembly 15 places;
5, the ultraviolet light after the modulation carries out being imaged on the substrate 9 after bulk compression, spatial filter 8 filtering through final minification projection compound lens 7.
Claims (7)
1, a kind of high resolution digitizing micro-optic gray scale mask manufacturing system, comprise ultraviolet source (1), beam-expanding collimation device (2), final minification projection compound lens (7), spatial filter (8), substrate (9), two-dimentional accurate exposure stage (10) and computing machine (4), it is characterized in that: also comprise the light modulating device.
2, high resolution digitizing micro-optic gray scale mask manufacturing system as claimed in claim 1, it is characterized in that: described light modulating device is by catoptron (3) and two Digital Micromirror Device (5,6) form, two Digital Micromirror Device (5,6) all be connected with the video card video expansion delivery outlet of computing machine (4) by lead, and controlled by computing machine (4), the minute surface angle at 45 of the reflecting surface of catoptron (3) and beam-expanding collimation device (2), the reflection ray of catoptron (3) is to become 20 ° of angles to be radiated on the Digital Micromirror Device (6) with Digital Micromirror Device (6) minute surface normal, micro mirror+10 of Digital Micromirror Device (6) ° corner reflection light is perpendicular to self minute surface output, and be radiated on the minute surface of Digital Micromirror Device (5), and become 20 ° of angles with the minute surface normal of Digital Micromirror Device (5), the axis normal of the minute surface of Digital Micromirror Device (5) and final minification projection compound lens (7), and the light that is radiated at Digital Micromirror Device (5) by Digital Micromirror Device (6) becomes 20 ° of angles with the minute surface normal of Digital Micromirror Device (5).
3, high resolution digitizing micro-optic gray scale mask manufacturing system as claimed in claim 1, it is characterized in that: described light modulating device is by spectroscope (11) and two Digital Micromirror Device (5,12) form, two Digital Micromirror Device (5,12) all be connected with the video card video expansion delivery outlet of computing machine (4) by lead, and controlled by computing machine (4), the minute surface angle at 45 of the light splitting surface of spectroscope (11) and beam-expanding collimation device (2), the two-way light that spectroscope (11) is divided into respectively with two Digital Micromirror Device (5,12) minute surface is vertical, two Digital Micromirror Device (5,12) respectively the two-way incident light is reflected back into spectroscope (11) along former road, by spectroscope (11) synthetic back output.
4, high resolution digitizing micro-optic gray scale mask manufacturing system as claimed in claim 1, it is characterized in that: described light modulating device is by light-splitting device and three Digital Micromirror Device (5,13,14) form, light-splitting device is made up of a spectroscope (11) and a prism assembly (15) again, three Digital Micromirror Device (5,13,14) all be connected with the video card video expansion delivery outlet of computing machine (4) by lead, and controlled by computing machine (4), the minute surface angle at 45 of the light splitting surface of spectroscope (11) and beam-expanding collimation device (2), spectroscope (11) is divided into two-way light, one road vertical directive final minification projection compound lens (7), another road directive prism assembly (15), prism assembly (15) penetrates three road light respectively, three road light that penetrate respectively with three Digital Micromirror Device (5,13,14) minute surface is vertical, three Digital Micromirror Device (5,13,14) respectively three road incident lights are reflected back into prism assembly (15) along former road, prism assembly (15) passes the output of spectroscope (11) back with the synthetic back of three road light directive spectroscope (11).
5, the method for making of high resolution digitizing micro-optic gray scale mask as claimed in claim 2 is characterized in that:
(1), according to the position requirement mutually of micro-optic diffractive optical element, converse the exposure intensity of the phase place correspondence of each point on the mask face, determine the modulation GTG of each pixel by the exposure intensity of each point, thereby determine the gray-tone mask distribution plan of whole exposure plane;
(2), show by the mask graph GTG on computing machine (4) the control figure micro mirror element (6,5);
(3), the ultraviolet light that sends of ultraviolet source (1) is by toward mirror (3) behind beam-expanding collimation device (2) beam-expanding collimation;
(4), catoptron (3) reflexes to Digital Micromirror Device (6) with light, to become 20 ° of angles to be radiated on the Digital Micromirror Device (6) with Digital Micromirror Device (6) minute surface normal, micro mirror+10 of Digital Micromirror Device (6) ° corner reflection light is perpendicular to self minute surface output, and be radiated on the minute surface of Digital Micromirror Device (5), and become 20 ° of angles with the minute surface normal of Digital Micromirror Device (5), Digital Micromirror Device (5) micro mirror+10 ° of corner reflection light are perpendicular to self minute surface output, ultraviolet light carries out the intensity modulation second time by carrying out the intensity modulation first time by the Digital Micromirror Device (6) of computing machine (4) control by Digital Micromirror Device (5);
(5), the ultraviolet light after the modulation carries out being imaged on the substrate (9) after bulk compression, spatial filter (8) filtering through final minification projection compound lens (7).
6, the method for making of high resolution digitizing micro-optic gray scale mask as claimed in claim 3 is characterized in that:
(1), according to the position requirement mutually of micro-optic diffractive optical element, converse the exposure intensity of the phase place correspondence of each point on the mask face, determine the modulation GTG of each pixel by the exposure intensity of each point, thereby determine the gray-tone mask distribution plan of whole exposure plane;
(2), show by the mask graph GTG on computing machine (4) the control figure micro mirror element (5,12);
(3), the ultraviolet light that sends of ultraviolet source (1) is by directive spectroscope (11) behind beam-expanding collimation device (2) beam-expanding collimation;
(4), spectroscope (1) is divided into two-way with light, one road vertical directive Digital Micromirror Device (5), the vertical directive Digital Micromirror Device in another road (12), two Digital Micromirror Device (5,12) reflect back into spectroscope (11) with the two-way incident light respectively along former road, by spectroscope (11) synthetic back output, ultraviolet light is by carrying out intensity modulation by the Digital Micromirror Device (5,12) of computing machine (4) control, and the light of two-way modulation locates to realize superposition modulated at spectroscope (11);
(5), the ultraviolet light after the modulation carries out being imaged on the substrate (9) after bulk compression, spatial filter (8) filtering through final minification projection compound lens (7).
7, the method for making of high resolution digitizing micro-optic gray scale mask as claimed in claim 4 is characterized in that:
(1), according to the position requirement mutually of micro-optic diffractive optical element, converse the exposure intensity of the phase place correspondence of each point on the mask face, determine the modulation GTG of each pixel by the exposure intensity of each point, thereby determine the gray-tone mask distribution plan of whole exposure plane;
(2), show by the mask graph GTG on computing machine (4.) the control figure micro mirror element (5,13,14);
(3), the ultraviolet light that sends of ultraviolet source (1) is by directive spectroscope (11) behind beam-expanding collimation device (2) beam-expanding collimation;
(4), spectroscope (11) is divided into two-way with light, one road vertical directive final minification projection compound lens (7), another road directive prism assembly (15), prism assembly (15) penetrates three road light respectively, three road light that penetrate respectively with three Digital Micromirror Device (5,13,14) minute surface is vertical, three Digital Micromirror Device (5,13,14) respectively three road incident lights are reflected back into prism assembly (15) along former road, prism assembly (15) is with the synthetic back of three road light directive spectroscope (11), pass the output of spectroscope (11) back, ultraviolet light is by the Digital Micromirror Device (5 by computing machine (4) control, 13,14) carry out intensity modulation, the light of three tunnel modulation locates to realize superposition modulated at prism assembly (15);
(5), the ultraviolet light after the modulation carries out being imaged on the substrate (9) after bulk compression, spatial filter (8) filtering through final minification projection compound lens (7).
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| CNB2004100177686A CN1308738C (en) | 2004-04-16 | 2004-04-16 | High solution digital microoptical grey mask prodn. system and its prodn, method |
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| CNB2004100177686A CN1308738C (en) | 2004-04-16 | 2004-04-16 | High solution digital microoptical grey mask prodn. system and its prodn, method |
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