CN1554516A - Diamond-coating grinding tool and preparing method - Google Patents
Diamond-coating grinding tool and preparing method Download PDFInfo
- Publication number
- CN1554516A CN1554516A CNA2003101145353A CN200310114535A CN1554516A CN 1554516 A CN1554516 A CN 1554516A CN A2003101145353 A CNA2003101145353 A CN A2003101145353A CN 200310114535 A CN200310114535 A CN 200310114535A CN 1554516 A CN1554516 A CN 1554516A
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- grinding tool
- diamond
- diamond coatings
- grinding
- millimeter
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Abstract
The present invention relates to a kind of diamond-coating grinding tool and its making process. The technological scheme includes depositing 0.002-0.2 mm thick diamond coating on the substrate with uneven surface of unflatness of 0.005-1 mm, with the raised parts and the notched parts being in the same area. During the making process, the diamond coating is generated with hydrogen, carbon source gas and other gaseous material and through chemical vapor deposition process at temperature of 200-1000 deg.c and pressure lower than 1 atm. The present invention has diamond coating firmly combined with the substrate, so as to have greatly raised grinding strength, combining strength and hardness, and result in long service life, high grinding efficiency and low cost of the grinding tool.
Description
One, technical field: the present invention relates to a kind of diamond coatings grinding tool and preparation method thereof.
Two, background technology: the critical piece of grinding tool is an abrading block, and the abrading block that uses all is to be bonded on the matrix by bond by abrasive particle to generate at present.Abrasive particle mainly contains alundum (Al, carborundum, cubic oxide boron, diamond etc.; Bond mainly contains combinations such as resin, pottery, metal.Because the intensity of bond is low, the abrasive particle obscission is serious in the use, causes the module life cycle short, and grinding efficiency is low, the cost height.
Three, summary of the invention: purpose of the present invention is exactly the defective that exists at prior art, and a kind of diamond coatings grinding tool and preparation method thereof is provided.
Its technical scheme comprises: deposit diamond coatings on ups and downs matrix.Adamantine coating layer thickness is between the 0.002-0.2 millimeter.The granularity of bossing is below 1 millimeter on the matrix, and more than 0.005 millimeter, the area of bossing is suitable with the concave surface area.The preparation method of diamond coatings grinding tool is: diamond coatings is to be raw material with gases such as hydrogen, carbon raw-gas, and 200 ℃-1000 ℃ of temperature, pressure utilizes chemical vapour deposition technique to generate less than under 1 atmospheric condition.
Because the present invention has adopted the strong bonded of diamond coatings and matrix, all there is great raising its scuff resistance, conjugation and hardness aspect, thereby have improved the service life of module, have improved grinding efficiency, cut down finished cost.
Four, description of drawings:
Accompanying drawing is the partial enlarged drawing after a kind of matrix material processing of the present invention.
Five, specific embodiment:
With reference to accompanying drawing, it is raw material that matrix material is selected carbide alloy, pottery, metal, alloy etc. for use, utilizes the mould pressing on its surface, the processing method that sandblasts or chemical etching method etc. be processed into ups and downs matsurface.Be to be raw material with gases such as hydrogen, carbon raw-gas then in its surface, 200 ℃-1000 ℃ of temperature, pressure is less than under 1 atmospheric condition, the diamond coatings that utilizes chemical vapour deposition technique to generate.Concaveconvex shape can be various rules or irregular particles such as rectangle, triangle, quadrangle, circle, and its granularity below 1 millimeter, is selected processing according to the requirement of corase grind, fine grinding and correct grinding in the scope more than 0.005 millimeter.
Claims (4)
1, a kind of diamond coatings grinding tool is characterized in that: deposit diamond coatings on ups and downs matrix.
2, diamond coatings grinding tool according to claim 1, it is characterized in that: adamantine coating layer thickness is between the 0.002-0.2 millimeter.
3, diamond coatings grinding tool according to claim 1 and 2 is characterized in that: the granularity of bossing is below 1 millimeter on the matrix, and more than 0.005 millimeter, the area of bossing is suitable with the concave surface area.
4, the preparation method of diamond coatings grinding tool according to claim 1 and 2, it is characterized in that: diamond coatings is to be raw material with hydrogen, carbon raw-gas, 200 ℃-1000 ℃ of temperature, pressure utilizes chemical vapour deposition technique to generate less than under 1 atmospheric condition.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2003101145353A CN1554516A (en) | 2003-12-23 | 2003-12-23 | Diamond-coating grinding tool and preparing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2003101145353A CN1554516A (en) | 2003-12-23 | 2003-12-23 | Diamond-coating grinding tool and preparing method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1554516A true CN1554516A (en) | 2004-12-15 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2003101145353A Pending CN1554516A (en) | 2003-12-23 | 2003-12-23 | Diamond-coating grinding tool and preparing method |
Country Status (1)
| Country | Link |
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| CN (1) | CN1554516A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106926148A (en) * | 2017-02-08 | 2017-07-07 | 上海交通大学 | The method that mono-layer diamond abrasive material tools are prepared using chemical vapor deposition |
| CN110948408A (en) * | 2019-12-23 | 2020-04-03 | 郑州机械研究所有限公司 | Diamond grinding tool and preparation method thereof |
| CN111390780A (en) * | 2020-03-26 | 2020-07-10 | 西安奕斯伟硅片技术有限公司 | Chamfer grinding wheel, preparation method thereof and wafer processing equipment |
| CN112695292A (en) * | 2020-11-24 | 2021-04-23 | 四川大学 | Diamond coating grinding material and preparation method thereof |
| CN114634796A (en) * | 2022-02-18 | 2022-06-17 | 厦门雷昂科技有限公司 | Preparation method of modified diamond abrasive particles |
-
2003
- 2003-12-23 CN CNA2003101145353A patent/CN1554516A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106926148A (en) * | 2017-02-08 | 2017-07-07 | 上海交通大学 | The method that mono-layer diamond abrasive material tools are prepared using chemical vapor deposition |
| CN110948408A (en) * | 2019-12-23 | 2020-04-03 | 郑州机械研究所有限公司 | Diamond grinding tool and preparation method thereof |
| CN111390780A (en) * | 2020-03-26 | 2020-07-10 | 西安奕斯伟硅片技术有限公司 | Chamfer grinding wheel, preparation method thereof and wafer processing equipment |
| CN112695292A (en) * | 2020-11-24 | 2021-04-23 | 四川大学 | Diamond coating grinding material and preparation method thereof |
| CN114634796A (en) * | 2022-02-18 | 2022-06-17 | 厦门雷昂科技有限公司 | Preparation method of modified diamond abrasive particles |
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