CN1542412A - Low-temperature calibration system for electric vortex displacement sensing device - Google Patents
Low-temperature calibration system for electric vortex displacement sensing device Download PDFInfo
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- CN1542412A CN1542412A CNA200310103532XA CN200310103532A CN1542412A CN 1542412 A CN1542412 A CN 1542412A CN A200310103532X A CNA200310103532X A CN A200310103532XA CN 200310103532 A CN200310103532 A CN 200310103532A CN 1542412 A CN1542412 A CN 1542412A
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Abstract
The present invention relates to measurement technology of displacement or other mechanical quantity variation in ultralow temperature medium conveying apparatus, and is the low temperature calibration system for eddy current displacement sensor. The calibration system includes low temperature container with liquid inlet, gas outlet and liquid level gauge inserting port, calibration chamber with test observing window, sensor calibrating rack inside the chamber, vacuum Dewar bottle with heat sink and vacuum pump port and communicated with the chamber, displacement simulating mechanism on the casing of Dewar bottle and connected with the side wall of the chamber, temperature measuring and regulating device for the calibrated eddy current sensor, and data acquisition and signal processing system comprising data acquiring instrument with three input channels and computer.
Description
Technical field the invention belongs to the displacement of ultralow temperature medium transport equipment or the field of measuring technique that mechanical quantity changes, and particularly sensor low temperature calibration facility is designed.
Background technology in recent years in fields such as machinery, electric power, oil, aviation displacement transducer the measurement of mechanical operating parameters and supervision have been obtained using widely.But when the temperature variation of environment for use is big, the output of sensor will produce bigger drift.Float the error of bringing for reducing temperature, displacement transducer should be demarcated under serviceability temperature.
According to relevant patent of having retrieved and non-patent literature report, one piece of article of " cryogenic engineering " fourth phase in 1992 that the 101st research institute of the First Academy of China National Space Industry Corporation sponsors " design and the demarcation of the displacement transducer that cryogenic conditions uses down ", wherein the P21-22 page or leaf has been introduced a kind of resistance-strain type displacement transducer (abbreviation extensometer) low temperature caliberating device, and this device can be demarcated extensometer in 4.2～300K temperature range.It is mainly formed structure and comprises: low-temperature (low temperature) vessel, micrometer caliper, extensometer are installed partly, temperature control equipment, and wherein micrometer caliper is installed on the low-temperature (low temperature) vessel top cover, and its sensor to be calibrated and the part that is installed together place low-temperature (low temperature) vessel inside.Its deficiency has: 1) can only demarcate contact resistance-strain type displacement transducer; 2) displacement is a micrometer caliper to certain portions, is installed in the top cover top of low-temperature (low temperature) vessel, operation inconvenience; 3) no experimental observation window; 4) only the output signal of low temperature extensometer is carried out computer acquisition and processing.
SPIE proceeding vol.2865,1996, pp.58-65. the article that is entitled as " A facility forInterferometric Measurement of Linear Displacement In Actuators andCalibration of Sensors at Cryogenic Temperatures Between 4.2K and 77K " in has been introduced and a kind ofly with optical interference measurement extensometer (also can be used for other displacement transducers, but concrete structure is not mentioned) the low temperature caliberating device demarcated, operating temperature range is at 4.2～77K.It mainly forms structure has: optical interference instrument system, sample are installed and backup system, staking-out work chamber (vacuum), liquid helium reservoir, vacuum Dewar bottle, temperature measuring equipment and data acquisition and computer control system, and wherein the staking-out work chamber is arranged in low-temperature (low temperature) vessel top and together places vacuum Dewar bottle.Its deficiency has: 1) can only demarcate contact resistance-strain type displacement transducer; 2) displacement in the backup system is installed in the top of whole calibrating device to certain portions, operation inconvenience; 3) top cover of whole calibrating device middle part is provided with vacuum window, only is used for the optical path of optical interference method Displacement Measurement, can not be used for the calibration process of clearly observing inner; 4) have only temperature measuring equipment, can not carry out adjustment and temperature range narrower; 5) cooling (about a day) and (about the two days) speed of rising again are very slow.
Advantages such as noncontact electric vortex type displacement sensor has simple in structure, highly sensitive, and is insensitive to measuring media, and antijamming capability is strong are specially adapted to the measurement and the supervision of rotating machinery operational factor, have obtained in recent years using widely.But when the temperature variation of environment for use is big, the output of sensor also will produce bigger drift.Float the error of bringing for reducing temperature, the eddy current displacement sensor that uses in the low temperature environment should be demarcated under serviceability temperature.It is reported, the normal temperature caliberating device commercialization of electric vortex type displacement sensor, the high temperature caliberating device has also obtained than widespread usage, but in the 20K environment its device of demarcating is not appeared in the newspapers as yet.
Summary of the invention the objective of the invention is for overcoming the weak point of prior art, and a kind of eddy current displacement sensor low temperature calibration system is provided, and can demarcate low temperature noncontact electric vortex type displacement sensor under low temperature (20K) state.
The objective of the invention is to be achieved through the following technical solutions:
Eddy current displacement sensor low temperature calibration system of the present invention comprises low temperature caliberating device and data acquisition and signal processing system two parts; Wherein the low temperature caliberating device mainly comprises low-temperature (low temperature) vessel and is arranged on infusion port on its top cover, exhausr port and liquid level gauge insert mouth, with the affixed staking-out work chamber that has the experimental observation window, this low-temperature (low temperature) vessel bottom and be arranged on wherein transducer calibration support, be arranged on the vacuum Dewar bottle of low-temperature (low temperature) vessel and staking-out work outdoor, on the vacuum Dewar bottle housing, be equipped with heat sink and the vacuum pumping hole, this vacuum Dewar bottle is connected with the staking-out work chamber, the shift simulation mechanism that is arranged on the vacuum Dewar bottle outside and links to each other with this staking-out work chamber sidewall, the temperature survey and the regulating device that are used to measure and regulate the current vortex sensor of being demarcated; This data acquisition and signal processing system are made up of the data collecting instrument and the computing machine of one three input channel, are used for output signal, the shift simulation mechanism displacement amount of receiving sensor and the temperature signal of being located by the calibration sensor place respectively.
Compare with existing displacement transducer low temperature caliberating device, the present invention has following feature:
1, can demarcate the noncontact eddy current displacement sensor;
2, have the experimental observation window in the bottom of low temperature caliberating device, be convenient to the experimenter understands low temperature caliberating device inside from the outside calibration process;
3, the staking-out work chamber is positioned at the low-temperature (low temperature) vessel bottom and both tighten together, and the staking-out work chamber is in vacuum environment, is connected as a single entity with the vacuum Dewar bottle of low-temperature (low temperature) vessel outside.Such structure helps the installation and removal of sensor on the one hand, can accelerate the speed of rising again (about half a day) of low temperature caliberating device on the other hand, saves the running time of demarcating;
4, shift simulation mechanism is positioned at the bottom side of vacuum Dewar bottle housing, is convenient to the experimenter and operates;
5, have thermometric, temperature control link preferably, the long period remains on predetermined temperature can to make transducer calibration support place temperature reach also rapidly, and temperature range is 20～300K, wider range;
6, have data acquisition and the signal processing system that to gather, show displacement, temperature and three kinds of signals of sensor output simultaneously, have in addition by predefined record cycle store sample data and with calculating and carry out the function of communication contact.
The present invention has following outstanding feature: this low temperature caliberating device can be demarcated low temperature electric vortex type displacement sensor in 20～300K temperature range, and having solved does not have ready-made calibration system the low temperature eddy current displacement sensor to be carried out a difficult problem of demarcating under the low temperature environment; In addition, this low temperature caliberating device is by improving also the demarcation applicable to other low temperature displacement transducers.
Description of drawings
Fig. 1 is a low temperature calibration system embodiment synoptic diagram of the present invention.
Fig. 2 is the low temperature caliberating device schematic internal view of present embodiment.
Embodiment further describes concrete enforcement of the present invention below in conjunction with accompanying drawing:
Low temperature calibration system embodiment general structure of the present invention as shown in Figure 1, mainly comprise vacuum Dewar bottle 10, infusion port 11, exhausr port 12, liquid level gauge inserts mouthful 13 (being used to monitor the position of liquid coolant in the low-temperature (low temperature) vessel), heat sink 14 (for reducing the leakage heat that measuring lead wire imports, all lead-in wires of introducing from the room temperature district enter low-temperature space around several circles earlier again on heat sink), vacuum pumping hole 15, low temperature caliberating device support 16 (being used for the low temperature caliberating device is adjusted to proper height), experimental observation window 17, staking-out work chamber 18, shift simulation mechanism 19 and data collector.Wherein shift simulation mechanism is mounted in the micrometer caliper on the caliberating device bottom sides support, imposes on the displacement of mircrometer gauge, is delivered to the tested target sheet of inner sleeve end by a fixing hermetically sealed case pipe and spring.
The low temperature caliberating device inner structure of present embodiment as shown in Figure 2, mainly comprise low-temperature (low temperature) vessel 20 (being used to store liquid coolant), (the temperature conducting block bottom surface is processed with 6 holes to temperature conducting block 21, can be used for sensor installation and demarcate support), the heater strip installation site 22 of temperature survey and regulating device (the temperature control heater strip adopts noninductive double wound around the temperature conducting block bottom), (the transducer calibration support is used for installing transducer calibration support 23, fixing low temperature current vortex sensor probe to be calibrated), (thermometric is counted micro metal shell rhodium iron resistance thermometer with temperature in the thermometer installation site 24 of temperature survey and regulating device, be installed on the transducer calibration support), target sheet installation site 25, low temperature spring 26, isothermal screen 27 (the isothermal screen forms an approximate seal bootr (leaving observation panel) transducer calibration support and tested target sheet are surrounded), Dewar flask vacuum chamber 28 (vacuumizing formation one vacuum Dewar bottle) by vacuum chamber, cold screen 29 (, respectively being provided with cold screen structure) at low-temperature (low temperature) vessel and vacuum chamber for further to reduce the leakage heat that convection current causes.
In addition, the movable or removable section that all often relate in the low temperature caliberating device, low temperature connects (junction between for example low temperature caliberating device upper and lower half is divided etc.) all must be smeared vacuum oil in advance, can play good effect of heat insulation at low temperatures.
The key property and the technical indicator of the low temperature caliberating device of present embodiment:
One Electronic Digital Micrometer has been installed on micrometer caliper, and this clock gauge also has digital demonstration, numeral maintenance, minimum value tracking, maximal value tracking and quick Presentation Function except that having the function of standard machinery clock gauge, and displacement accuracy is 0.001mm.In addition, the data output of this table (RS232 serial delivery outlet) links to each other with computing machine by data adapter unit, is convenient to carry out data processing;
Micro metal shell rhodium iron resistance thermometer, diameter 3mm, long 10mm, calibration warm area: 1～300K, accuracy 0.1K; Temperature-controlled precision ± 1K;
In 77～300K temperature range, with liquid nitrogen as low-temperature receiver; In 20～77K temperature range, carry out precooling with liquid nitrogen earlier, be low-temperature receiver again with the liquid helium;
The low-temperature (low temperature) vessel body is good in the low-temperature space serviceability, from the temperature stabilization time of infusing be 40 minutes.
The data acquisition of present embodiment and signal processing system are made up of the data collecting instrument and the computing machine of one three input channel.Displacement, temperature and three kinds of signals of sensor output can be gathered, be shown to data collecting instrument simultaneously, has in addition by predefined record cycle store sample data and with calculating to carry out the function of communication contact, and its performance index are as follows:
Fundamental error≤± 0.2%FS ± 1 word, can float temperature, the time float automatic compensation
Measure control cycle: 0.2S
Measurement Resolution: 14 A/D conversions
Indication range :-1999～9999
Data storage: 512K byte (4Mbit)
Logging interval: 1 second～59 minutes and 59 seconds
Adopt the present invention to the scaling method of electric vortex type displacement sensor when temperature is 20K:
Timing signal, at first sensor to be calibrated is fixed on the calibrating table support, sensor cable connects sensor measuring circuit after passing hole on the calibrating table shell, uses rubber stopper (scribbling vacuum oil), nut to be fastened on the calibrating table shell again, demarcates according to the following steps then:
Connect vacuum pump, open vacuum pump and vacuumize, took out continuously 1 hour;
In low-temperature (low temperature) vessel, pour into liquid nitrogen, carry out precooling;
Behind the temperature stabilization, begin to get rid of the remaining liquid nitrogen in the low-temperature (low temperature) vessel;
The liquid nitrogen eliminating finishes, and with high pressure gas helium residual gas nitrogen in the low-temperature (low temperature) vessel is blown out again;
Liquid helium is imported in beginning continuously in low-temperature (low temperature) vessel, bright until the liquid level gauge pilot lamp, shows to have the liquid helium of setting volume in the low-temperature (low temperature) vessel, stops the helium of infusing, and opens temperature-controlling system, with temperature stabilization at 20K;
Begin to demarcate, adjust correlation parameter and mobile simultaneously tested target sheet on the sensor circuit;
After above each several part is adjusted, draw near and adjust the distance of tested target, the corresponding output of record sensor to probe.
Claims (2)
1, a kind of eddy current displacement sensor low temperature calibration system comprises low temperature caliberating device and data acquisition and signal processing system two parts; It is characterized in that, this low temperature caliberating device comprises: low-temperature (low temperature) vessel and be arranged on infusion port on its top cover, exhausr port and liquid level gauge insert mouth, with the affixed staking-out work chamber that has the experimental observation window, this low-temperature (low temperature) vessel bottom and be arranged on wherein transducer calibration support, be arranged on the vacuum Dewar bottle of low-temperature (low temperature) vessel and staking-out work outdoor, on the vacuum Dewar bottle housing, be equipped with heat sink and the vacuum pumping hole, this vacuum Dewar bottle is connected with the staking-out work chamber, the shift simulation mechanism that is arranged on the vacuum Dewar bottle outside and links to each other with this staking-out work chamber sidewall, the temperature survey and the regulating device that are used to measure and regulate the current vortex sensor of being demarcated; This data acquisition and signal processing system are made up of the data collecting instrument and the computing machine of one three input channel, are used for output signal, the shift simulation mechanism displacement amount of receiving sensor and the temperature signal of being located by the calibration sensor place respectively.
2, eddy current displacement sensor low temperature calibration system as claimed in claim 1, its spy is characterised in that, said shift simulation mechanism is a micrometer caliper.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200310103532 CN1219189C (en) | 2003-11-07 | 2003-11-07 | Low-temperature calibration system for electric vortex displacement sensing device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200310103532 CN1219189C (en) | 2003-11-07 | 2003-11-07 | Low-temperature calibration system for electric vortex displacement sensing device |
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| Publication Number | Publication Date |
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| CN1542412A true CN1542412A (en) | 2004-11-03 |
| CN1219189C CN1219189C (en) | 2005-09-14 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN 200310103532 Expired - Fee Related CN1219189C (en) | 2003-11-07 | 2003-11-07 | Low-temperature calibration system for electric vortex displacement sensing device |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102589708A (en) * | 2012-01-20 | 2012-07-18 | 中国科学院上海技术物理研究所 | Low-energy-consumption temperature-control Dewar flask |
| CN105333947A (en) * | 2015-10-20 | 2016-02-17 | 国家电网公司 | Low temperature detection apparatus for overhead line vibration sensor |
| CN105403671A (en) * | 2015-11-24 | 2016-03-16 | 广西电网有限责任公司电力科学研究院 | Calibration device for gas concentration detection instrument |
| CN109813207A (en) * | 2019-03-18 | 2019-05-28 | 中国重汽集团大同齿轮有限公司 | A kind of AMT position sensor temperature drift test platform and its correction of temperature drift method |
| CN113251909A (en) * | 2021-06-25 | 2021-08-13 | 清华大学 | Calibration device and method of eddy current sensor for measuring displacement of rotating shaft |
-
2003
- 2003-11-07 CN CN 200310103532 patent/CN1219189C/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102589708A (en) * | 2012-01-20 | 2012-07-18 | 中国科学院上海技术物理研究所 | Low-energy-consumption temperature-control Dewar flask |
| CN105333947A (en) * | 2015-10-20 | 2016-02-17 | 国家电网公司 | Low temperature detection apparatus for overhead line vibration sensor |
| CN105333947B (en) * | 2015-10-20 | 2018-03-23 | 国家电网公司 | A kind of low temperature detection means of overhead transmission line vibrating sensor |
| CN105403671A (en) * | 2015-11-24 | 2016-03-16 | 广西电网有限责任公司电力科学研究院 | Calibration device for gas concentration detection instrument |
| CN109813207A (en) * | 2019-03-18 | 2019-05-28 | 中国重汽集团大同齿轮有限公司 | A kind of AMT position sensor temperature drift test platform and its correction of temperature drift method |
| CN109813207B (en) * | 2019-03-18 | 2021-05-14 | 中国重汽集团大同齿轮有限公司 | AMT position sensor temperature drift test platform and temperature drift correction method thereof |
| CN113251909A (en) * | 2021-06-25 | 2021-08-13 | 清华大学 | Calibration device and method of eddy current sensor for measuring displacement of rotating shaft |
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| Publication number | Publication date |
|---|---|
| CN1219189C (en) | 2005-09-14 |
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