CN1541307A - Vacuum exhaust appts. and drive method of vacuum appts. - Google Patents
Vacuum exhaust appts. and drive method of vacuum appts. Download PDFInfo
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- CN1541307A CN1541307A CNA028157117A CN02815711A CN1541307A CN 1541307 A CN1541307 A CN 1541307A CN A028157117 A CNA028157117 A CN A028157117A CN 02815711 A CN02815711 A CN 02815711A CN 1541307 A CN1541307 A CN 1541307A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K15/00—Check valves
- F16K15/02—Check valves with guided rigid valve members
- F16K15/04—Check valves with guided rigid valve members shaped as balls
- F16K15/042—Check valves with guided rigid valve members shaped as balls with a plurality of balls
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2220/00—Application
- F04C2220/10—Vacuum
- F04C2220/12—Dry running
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- Condensed Matter Physics & Semiconductors (AREA)
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- Applications Or Details Of Rotary Compressors (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Abstract
Pairs of rotors (R1, R2, R3, R4, R5 and R6) driven rotationally by a motor (22) are disposed in the body (21) of a main pump (20) comprising a multistage Roots dry vacuum pump. A suction opening (23) communicating with the rotor chamber of the rotor R1 is provided in the upper wall portion at the left end of the body (21). A delivery section (24) communicating with the delivery side of the rotor chamber of rotor R6 on the final stage is coupled to an exhaust pipe (25) and is provided with a silencer (26) and further coupled to a check valve (28) through a pipe (27). The check valve (28) has its forward direction toward the atmospheric side. The delivery section (24), or a delivery section (24') at the side intermediate stage, is coupled to an auxiliary pump (30) having an exhaust capacity smaller than that of the main pump (20). When the motor (22) is driven, gas exhausted through rotation of the rotors (R1-R6) is carried sequentially to the downstream side from the rotor chambers and a vacuum processing chamber coupled to the suction opening (23) is exhausted. The delivery section (24) on the final stage is exhausted by driving the auxiliary pump (30), and the pressure is reduced. Consequently, the burden of the exhaust action on the rotor (R6) on the final stage or the rotor (R5) on the intermediate stage is lessened, and the power consumption of the motor (22) can be reduced significantly as compared with the prior art.
Description
Technical field
The present invention relates to for example vacuum pumping hardware of use in semiconductor manufacturing apparatus, particularly relate to and seek to reduce the energy-saving vacuum pumping hardware of power consumption and the method for operation of this vacuum pumping hardware.
Background technique
Vacuum pump as the use in semiconductor manufacturing apparatus at initial stage uses oily rotary vacuum pump mostly.This pump generally be power consumption little, obtain the vacuum pump of the structure of lower arrival pressure easily, be used under the situation of semiconductor-fabricating device, be necessary to be careful following some.
1. in being used for the gas of semiconductor-fabricating device, mostly be hyperergic gas greatly, if such gas is carried out exhaust, then since with the reaction of pumping fluid, produce reaction product, in view of the above, have or pump can not rotate or pump oil deterioration causes the problem of insufficient lubrication.
2. the diffusion of vapor of pumping fluid is indoor to application of vacuum, produces to pollute.
3. in used pumping fluid, the situation of toxic substance that contains arsenic compound, phosphorous compound etc. is a lot, in the processing as industrial waste, needs the treatment cost of cost great number, on the other hand, also needs man-hour in management.
Because these reasons in recent years, replace oily rotary vacuum pump, use the dry vacuum pump of pumping fluid.Described here dry vacuum pump can begin vacuum exhaust from barometric pressure, is the mechanical type vacuum pump that does not have sealing oil (pumping fluid) at suction chamber, uses Roots type, pawl type (Network ロ one type), the screw type of variable capacity type more.These pumps are the twin shaft structure, a pair of rotor is by keeping small gap each other, to opposite spin, carry out vacuum exhaust, because there is not the part of contact,, also the solid formation that is contained in the gas that sucks from semiconductor-fabricating device can be divided and discharge so the life-span is long, even with respect to corrosive gas, also can easily have corrosion resistance.
Like this, will be in semiconductor-fabricating device employed vacuum pump, be replaced by the dry vacuum pump that does not use pumping fluid, dry vacuum pump is compared with oily rotary vacuum pump, and the big problem of power consumption is arranged.Particularly because the problem from the environment, having produced needs the requirement that suppresses energy consumption and reduce the semiconductor manufacture cost, is suppressed at hope below 50% so produced the power consumption of wishing dry vacuum pump.
For example, the Roots type dry vacuum pump, it is the solid of rotation that has a plurality of rotors along the adjacent setting of running shaft, to rotor keeps small gap each other relatively, to opposite spin, carry out suction, the exhaust of gas, constitute by the pump chamber of 3 grades or 6 grades, at pump chamber at different levels, carry out pumping action in turn.In this pump, the gas that is accompanied by exhaust is from prime portion moving of level portion backward, because gas pressure rises, so level portion also can be less than prime portion after the air displacement.On same axle, be provided with under the situation of multi-stage roots type rotor, rotor separately is for the ease of processing and be convenient to synchronous maintenance between rotor, so present situation is to have identical outer shape.Therefore, reduce to discharging the side stage from the suction side of gas, come corresponding by the interim attenuation of the thickness that makes rotor in order to make air displacement.
Here, the compression of the gas of exhaust in the Roots type dry vacuum pump, be to be discharged to space gas that recess and housing by rotor surface constitute in case enclosed, rotation by rotor, this space and discharge side spatial communication, in this moment, in above-mentioned space, carry out by the back flow of gas of discharging side.In the Roots type dry vacuum pump, can obtain the arrival pressure about 1～0Pa, from arriving pressure near 3kPa, as wirking pressure.Outlet pressure is that barometric pressure is certain.Therefore, be vacuum in order to keep sucking oral-lateral, need be in compression stroke, the gas of adverse current to rotor chamber is pushed back, in the final level that stops from atmospheric adverse current,, use about about 70% to 80% of all required drives of pump in order to push back gas.
In above-mentioned multi-stage roots type dry vacuum pump, to be that the gas flow that pushes back is more little then tail off in the work of final level.Therefore, as mentioned above, attenuate rotor thickness reduces the air displacement of level portion behind the pump.Like this, present situation is smaller by the air displacement of final level is arranged to, and is suppressed at the required power of wirking pressure scope of pump, to be used for energy-conservationization.
Claw shape dry type vacuum pump is just different on rotor shapes with Roots type, and venting principleand is identical.On the other hand, the screw type dry vacuum pump is the space that the flight by 2 screws is constituted, and axially moves, and conveying gas, the gas of discharge portion flow into the space that is made of flight to compress this point the same with Roots type.Because flight is continuous, thus can obtain as Roots type, pawl type, the air displacement of level is reduced arbitrarily, and the structure that the spacing of flight is reduced continuously.But, because have boundary, so will carry out the effort that the rotor set that spacing is different is combined into bulk, dwindles the air displacement etc. of final level for the spacing that changes flight.
If this is further described, as shown in figure 18, if each rotor size is identical, then as shown in figure 21, as a, change, if as shown in figure 19 with respect to the exhaust velocity of suction pressure, 2 of prime is same size, middle rank is littler than it, 2 rotor minimums of back level, and then the relation of suction pressure and exhaust velocity changes as b.In addition, as shown in figure 20, if the rotor of final level is littler, then exhaust velocity changes shown in the c among Figure 21.Figure 22 is expression with respect to these Figure 18,19 and the power consumption of the suction pressure of the situation of Figure 20, shown in c ', b ', a ', as 10 of the wirking pressure of use in semiconductor manufacturing apparatus
2Under the situation below the Pa, power consumption then is Figure 19 in the situation minimum of Figure 20, and Figure 18 is maximum.
The purposes of this pump of set basis of the air displacement of final level is different and different.For example in multi-stage roots type dry vacuum pump, with respect to the 1st grade, it is to produce the heat of compression in the wirking pressure scope more that final grade air displacement is set at about 50%.Promptly, in the decompression CVD device or etching device of semiconductor-fabricating device, in the gas that process produced of reaction, contain in vacuum pumping hardware, the material of separating out as the solid of the concentration that surpasses saturation vapour pressure, for these gases are carried out exhaust, the temperature that is necessary to make dry vacuum pump is the high temperature about 100～60 ℃, separates out preventing.From this purpose, because the heat of compression, about 50% the exhaust velocity ratio that employing can more effectively be heated dry vacuum pump.
In addition, in coating apparatus or evaporation coating device etc., the gas that is discharged from mainly is the inert gas of argon or helium etc., because need not to improve the temperature of dry vacuum pump, so require the as far as possible little dry vacuum pump of power consumption.In this case, the air displacement of final level is set in respect to the 1st grade about 20～5%.In this is set, with respect to air displacement about 50% dry vacuum pump of the 1st grade air displacement as final level, can make the power consumption when arriving pressure reduce by 30～60%.
But, at the dry vacuum pump that there is no need to be used for high temperature, be below 20% by the air displacement of air displacement that makes final level with respect to the 1st grade, can further seek energy-conservationization, but produce obstacle in mechanical aspects.For example, be under about 25% the situation, to be 80m in the air displacement that makes final level in maximum exhaust velocity with respect to the 1st grade
3In other dry vacuum pump of/Hr level, the 1st grade rotor thickness is that the situation about 30mm is a lot, in this case, the rotor thickness of final level is 7.5mm, because the intensity of rotor self reduces, so adding man-hour, produced the vertical angle that is difficult to obtain rotor side surface and axle center, be difficult to guarantee that the gap between rotor side surface and next door is the problem from 0.1mm to 0.2mm.
On the other hand, open in the flat 6-129384 communique the spy, a kind of vacuum pumping hardware is disclosed, little but the 2nd vacuum pump that can obtain sufficient low pressure of the 1st vacuum pump by can obtaining big air displacement and air displacement links, reduce total power consumption, particularly as shown in figure 23, a kind of vacuum pumping hardware 2 is disclosed, link the 1st exhaust port 5 and the 2nd exhaust port 6 with outlet pipe 7, in its way, the control valve 8 that opens and closes this outlet pipe 7 is set, by the air inlet side pressure of above-mentioned the 1st pump 3, open and close this control valve 8, total power consumption is further reduced, the 1st exhaust port 5 forms on the intermediate portion of the linking portion of above-mentioned the 1st pump 3 and the 2nd pump 4, and the 2nd exhaust port 6 forms at the exhaust side of the 2nd pump 4.In addition, in Figure 23, the 1st vacuum pump 3 is to use the vacuum pump of direct-acting type, makes it standardization, and the 9th, be used for handling adsorption tower discharging the reaction gas that gas contained.
The startup of this vacuum pumping hardware 2 is following to be carried out like that.Figure 23 represents that exhaust begins state afterwards, and control valve 8 is opened.Promptly, the 1st pump 3 and the 2nd pump 4 start, the suction pressure of the 1st pump 3 and barometric pressure are same grade, the discharge gas flow is big, simultaneously also by driven the 2nd pump 4, the discharge portion of the 1st pump 3 do not reach below the barometric pressure during, control valve 8 is opened, the gas that density is fully high is discharged by the 1st pump 3 and the 2nd pump 4.
Thereafter, if the discharge side of the 1st pump 3, reaches the following authorized pressure of barometric pressure by 4 exhausts of the 2nd pump, then control valve 8 is closed, and the 2nd exhaust port 6 that only forms on the exhaust side of the 2nd pump 4 links with the exhaust side of pump outside.At this moment, because keep fully low pressure,, can reduce the power of the necessity that pushes back to reflux gas conscientiously, energy-conservationization that can seek the power consumption of the 1st pump 3 so can significantly reduce reflux gas to the 1st pump 3 by the discharge side of the 2nd pump 4, the 1 pumps 3.
But,,,, not necessarily can seek energy-efficientization often under the vacuum pumping system situation on the whole that comprises the 2nd pump 4 though can reduce the power consumption of the 1st pump 3 effectively according to this vacuum pumping hardware 2.
But in the past, the vacuum pumping hardware that is connected with the vacuum processing chamber of making semiconductor device was such as shown in figure 24 piping diagram.In Figure 24, vacuum pumping hardware 10 is big main valves 13 of configuration bore on outlet pipe 12, this outlet pipe 12 is communicated with the dry vacuum pump 20 of vacuum processing chamber 1 and exhaust velocity 1000L/min, with main valve 13 the little bypass valve 14 of bores are installed side by side, the pressure meter 19 of the pressure that is used to measure vacuum processing chamber 1 is installed on outlet pipe 12.
Generally, in semiconductor-fabricating device, because the fine particle that is present in the vacuum processing chamber 1 flies upward, be attached in vacuum processing chamber 1 on the semiconductor wafer placed etc., therefore have the situation that produces defective products, so vacuum processing chamber 1 is being carried out under the situation of vacuum exhaust from barometric pressure, adopt following startup method, at main valve 13, under bypass valve 14 closing state, start dry vacuum pump 20, carry out slow exhaust by opening bypass valve 14, or confirm that vacuum processing chamber 1 reaches the pressure of regulation, or after having confirmed to pass through the period of exhaust of regulation, open main valve 13.
In slow exhaust by this valve operation, promptly, carry out under the situation of slow exhaust by being arranged on the bypass valve 14 on the main valve 13, except that bypass valve 14 is set, the control gear that need main valve 13 be opened according to the pressure of vacuum processing chamber 1.
As the method for carrying out slow exhaust in addition, following method is also arranged, replace main valve 13, bypass valve 14, the fly valve of the aperture of may command valve body is set, makes aperture little, along with the reduction of the pressure of vacuum processing chamber 1 at the initial stage of exhaust, aperture is increased, in this case, because the opening control device price height of fly valve self and valve body causes cost to rise.
In addition, open in the vacuum pumping hardware 2 of flat 6-129384 communique spy shown in Figure 23, when exhaust begins, the startup method of carrying out exhaust by the 1st pump 3 and the 2nd pump 4, under the situation in fine particle is present in vacuum processing chamber 1, fine particle flies upward, and also causes the pollution of semiconductor wafer etc. easily.
The purpose of this invention is to provide a kind of vacuum pumping hardware, this vacuum pumping hardware is additional simple formation on general dry vacuum pump only, can obtain high energy-conservation effect.
Have, the purpose of this invention is to provide a kind of method of operation, this method of operation relates to the method for operation of above-mentioned vacuum pumping hardware, needn't be provided for the apparatus of slow exhaust, promptly can carry out slow exhaust.
Summary of the invention
Vacuum pumping hardware of the present invention and method of operation thereof are following such formation in order to achieve the above object.
Vacuum pumping hardware of the present invention is that the discharge side of the pump chamber of the intergrade of suction side and main pump of service pump or last level is connected.Preferably this service pump is the pump littler than main pump air displacement, and at least one pump chamber of back level portion that preferably makes main pump in addition is less than prime portion.Discharge with the discharge side of pipe arrangement with the pump chamber of the last level of main pump and is connected, connect safety check in this discharge on pipe arrangement, this safety check only allows gas mobile to atmospheric side, and best service pump is connected side by side with safety check.This safety check also can be that connection in upright arrangement is a plurality of, preferably have relocatable spherical valve body in valve body,, then float and drive valve if this spherical valve body reaches more than the value of regulation at the pressure of the discharge gas of main pump, if at it below pressure, then the valve seat that falls within the below because of deadweight closes valve.In addition, preferably its spherical valve body is to be made of hollow Metal Ball, and the surface is covered by rubber-like.Have, be preferably under the situation of 2 safety check of connection in upright arrangement, the space that connects 2 safety check is connected with the suction side of service pump.
In addition, vacuum pumping hardware of the present invention, have main pump, safety check and service pump, this safety check is connected with the discharge side of this main pump, only allow gas to flow to atmospheric side from main pump, this service pump is configured in the discharge side of main pump side by side with respect to safety check, air displacement than main pump is little, and preferably service pump is the pump of 3% exhaust velocity running that is less than or equal to the exhaust velocity of main pump with the suction pressure of main pump when the 400Pa.In this case, preferably main pump is the dry vacuum pump of variable capacity type or the compound pump that the multistage array of this dry vacuum pump is connected.Have again, also can the suction side of service pump is connected many configurations side by side of main pump with the discharge side of each main pump.In addition, the arrival pressure of service pump is less than or equal to 20kPa, preferably the vacuum pump of rotor type (Gaede type), piston type, diaphragm type (membranous type) or Scrawl.
Have again, method of operation of the present invention is to pass through vacuum pumping hardware, from near barometric pressure or its, when vacuum processing chamber is carried out exhaust, at first start service pump, after vacuum processing chamber arrives the pressure of regulation, start main pump, needn't be provided for the apparatus of slow exhaust, can carry out slow exhaust, this vacuum pumping hardware has: the main pump that is connected with vacuum processing chamber; Be connected the safety check that only allows gas to flow to atmospheric side from main pump with the discharge side of this main pump; With respect to safety check, be configured in the discharge side of main pump side by side, than the little service pump of the air displacement of main pump.In addition, this method of operation also can be at first to start service pump, before vacuum processing chamber arrives the pressure of regulation, starts main pump, makes it with float tolerance low speed rotation, according to the pressure of vacuum processing chamber, revolution is increased gradually.
Description of drawings
Fig. 1 is the figure that represents vacuum pumping hardware in embodiments of the present invention, is as main pump, the ideograph under the situation that adopts multi-stage roots type dry vacuum pump.
Fig. 2 is the figure that represents the modified example of vacuum pumping hardware in embodiments of the present invention, is as main pump, the ideograph under the situation that adopts multi-stage roots type dry vacuum pump.
Fig. 3 is the figure that represents the modified example of vacuum pumping hardware in embodiments of the present invention, is as main pump, the ideograph under the situation that adopts multi-stage roots type dry vacuum pump.
Fig. 4 is the figure that represents the modified example of vacuum pumping hardware in embodiments of the present invention, is as main pump, the ideograph under the situation that adopts multi-stage roots type dry vacuum pump.
Fig. 5 is the figure that represents the modified example of vacuum pumping hardware in embodiments of the present invention, is as main pump, the ideograph under the situation that adopts multi-stage roots type dry vacuum pump.
Fig. 6 is the sectional view that is illustrated in an example of employed safety check in the vacuum pumping hardware of the present invention.
Fig. 7 is a summary pipe arrangement pie graph of representing the modified example of vacuum pumping hardware in embodiments of the present invention.
Fig. 8 is the sectional view that is illustrated in an example of employed safety check in the vacuum pumping hardware shown in Fig. 7 of the present invention.
Fig. 9 is a summary pipe arrangement pie graph of representing the modified example of vacuum pumping hardware in embodiments of the present invention.
Figure 10 is the sectional view that is illustrated in an example of employed safety check in the vacuum pumping hardware shown in Fig. 9 of the present invention.
Figure 11 is a summary pipe arrangement pie graph of representing vacuum pumping hardware in embodiments of the present invention.
Figure 12 is the figure that the effect of vacuum pumping hardware in embodiments of the present invention is described, the suction pressure of expression main pump and the relation of installing all power consumption.
Figure 13 is the figure that the effect of vacuum pumping hardware in embodiments of the present invention is described, the expression service pump is with respect to the relation of exhaust velocity ratio with the power consumption ratio of main pump.
Figure 14 is the figure of the relation of expression exhaust velocity of representational service pump and power consumption.
Figure 15 is the figure that represents the power consumption characteristic of vacuum pumping hardware in embodiments of the present invention.
Figure 16 is the figure that represents the relation of the suction pressure of vacuum pumping hardware in embodiments of the present invention and exhaust velocity.
Figure 17 is a summary pipe arrangement pie graph of representing the modified example of vacuum pumping hardware in embodiments of the present invention.
Figure 18 is the ideograph of expression multi-stage roots type dry vacuum pump, represents the situation that multistage rotor size equates.
Figure 19 is the ideograph of expression multi-stage roots type dry vacuum pump, and expression changes the situation of the size of rotor by prime, middle rank, back level.
Figure 20 is the ideograph of expression multi-stage roots type dry vacuum pump, and expression is compared with Figure 19, makes 2 situations that rotor is littler of back level.
Figure 21 is the figure that is illustrated in the relation of the suction pressure of the multi-stage roots type dry vacuum pump under the situation of the rotor that uses Figure 18, Figure 19 and Figure 20 and exhaust velocity.
Figure 22 is the figure that is illustrated in the relation of the suction pressure of the multi-stage roots type dry vacuum pump under the situation of the rotor that uses Figure 18, Figure 19 and Figure 20 and power consumption.
Figure 23 is the ideograph that expression can reduce the vacuum pumping hardware in the past of power consumption.
Figure 24 is the summary pipe arrangement pie graph of vacuum pumping hardware in the past.
Embodiment
About the mode of execution of vacuum pumping hardware of the present invention, at first, describe with reference to Fig. 1～Fig. 5 so that multi-stage roots type dry vacuum pump is example as the situation that main pump uses.In these figure, pattern ground expression multi-stage roots type dry vacuum pump.
That is, in the mode of execution of vacuum pumping hardware shown in Figure 1 10, in the main body 21 of multi-stage roots type dry vacuum pump 20 (main pumps), a pair of rotor R that drives by motor 22 rotations is set respectively
1, R
2, R
3, R
4, R
5And R
6In addition, in the left end upper wall portions of main body 21, the suction port 23 is communicated with the rotor chamber of rotor R 1 is set, the exhaust pipe arrangement 25 with silencing apparatus 26 is connected and last grade rotor R
6The discharge portion 24 that is communicated with of the discharge side of rotor chamber on, have again by pipe arrangement 27, be connected with safety check 28.This safety check 28 is a postive direction with the direction to atmospheric side.Also have like this, the service pump 30 littler than the air displacement of main pump 20 is connected on the discharge portion 24.
Then, describe with regard to its effect.
If drive motor 22 is then by each rotor R
1, R
2, R
3, R
4, R
5, R
6The rotation gas that carries out exhaust, from separately rotor chamber successively downstream sidesway give, be discharged to the vacuum processing chamber (not having diagram) that is connected with suction port 23.The pressure and the barometric pressure of the discharge portion 24 of last level are the most approaching, if according to the present invention, then can carry out decompression exhaust by the driving of service pump 30.Therefore, can significantly alleviate the burden of the scavenging action that the rotor by last level carries out.That is, can make the power consumption significantly minimizing compared with the past of motor 22.
Fig. 2 is a modified example of representing vacuum pumping hardware 10 in embodiments of the present invention, and the identical symbol of part mark to corresponding with the mode of execution of Fig. 1 omits its detailed explanation.
That is, according to present embodiment, main pump 20 ' last level discharge portion 24 by main body 21 ' opening, be connected with exhaust pipe arrangement 25 with silencing apparatus 26, have again by pipe arrangement 27, be connected with safety check 28, be communicated with to atmosphere.Have by the pipe arrangement 31 arranged side by side with exhaust pipe arrangement 25, service pump 30 is connected again.The exhaust port of this service pump 30 is connected with the atmospheric side of safety check 28 by pipe arrangement 32.In this embodiment, not only can reach the energy-saving effect identical with the mode of execution of Fig. 1, and because service pump 30 is connected side by side with exhaust pipe arrangement 25 and safety check 28, so when jumbo gas is carried out exhaust, in exhaust pipe arrangement 25, flow, even service pump 30 breaks down, also can keep main pump 20 ' performance.
Fig. 3 is the modified example that is illustrated in the vacuum pumping hardware 10 in the mode of execution of Fig. 2, if according to present embodiment, then because service pump 30 by pipe arrangement 31,32, is connected with safety check 28, side by side so can understand the effect that can reach identical with the mode of execution of Fig. 2.
Fig. 4 and Fig. 5 are the modified examples that is illustrated in the vacuum pumping hardware 10 in the mode of execution of Fig. 1 and Fig. 2, if according to these mode of executions, then in the intergrade of main pump 20A, 20B, setting be different from the discharge portion 24 of the discharge portion 24 of last level ', with this discharge portion 24 of service pump 30 ' be connected ' on.So, the pressure of the intergrade of main pump 20A, 20B is reduced pressure,, also alleviated burden by the scavenging action that rotor carried out of last level by alleviating burden by the scavenging action that rotor carried out of intergrade.That is the power consumption of motor 22 minimizing compared with the past.
In the above-described embodiment, each paired rotor R of difference
1, R
2, R
3, R
4, R
5, R
6Be identical size all, replace these, also can be as Figure 19, shown in Figure 20, the size that makes rotor along with from prime backward level reduce gradually.In this case, can understand with above-mentioned mode of execution and compare, can further reduce power consumption.
In addition, main pump 20 is not limited only to multi-stage roots type dry vacuum pump, at the dry vacuum pump of variable capacity type, for example also can obtain same effect in screw type or the pawl type.
Then, to the formation of employed safety check 28 in embodiments of the present invention, describe with reference to Fig. 6.
By on the junction plane of last main body 41 and following main body 42, the seal ring 48 of ring-type is installed, use many bolt members 43 simultaneously, will go up main body 41 and combine with following main body 42, it is integrated that both are sealed.Spherical valve body 46 is to be made of for example hollow Stainless Steel Ball, covers its surface with thin rubber membrane.In the present embodiment, the deadweight of spherical valve body 46 is about 50g, if the high about 700Pa of the pressure ratio barometric pressure of the inlet side of safety check 28 then in Fig. 6, promotes (rise) upward.Block 47 is made of 4 pawls as shown in the figure, and this pawl is along the circumferencial direction of the underpart of the tubular of last main body 41, and is with 90 ° of intervals, outstanding downwards.Therefore, promote spherical valve body 46, make the gas that flows in the valve chamber 44, pass between each pawl that constitutes block 47, flow out to atmospheric side.
Because the safety check of above-mentioned formation 28 its fluid resistances are little, can drive valve by the small pressure rising of inlet side, so also can follow early stage pressure oscillation.Generally, in as main pump 20 employed variable capacity type pumps, the gas of pump discharge portion 24 is owing to carry out repeatedly or the action that adverse current is released in the rotor chamber or from rotor chamber, so the gas of pump discharge portion 24 produces pulsation, if the suction gas flow of main pump 20 reduces, then valve body is because of the influence of the pulsation here, carry out repeatedly with respect to following of valve seat, disseat.In this case, if valve body is bad with respect to the tracing ability of pulsation, then do not had following time on valve seat of valve body, the suction side of service pump 30 keeps opening to barometric pressure, can not the discharge portion 24 of main pump 20 be reduced pressure.Therefore, in the present embodiment, make the valve body of safety check 28 be spherical (46), only, can carry out the switching of safety check 28, improved tracing ability pulsation by its deadweight.
But,, situation about can not follow is arranged then if the revolution of the rotor of main pump 20 increases.For example, under the situation of the dry vacuum pump of screw type, before the revolution of rotor reaches 3600rpm, follow fully, if reach 6000rpm, then the spherical valve body 46 of safety check 28 can not be followed the pulsation of the gas pressure of discharge portion 24, be created in should following when valve seat 45, not following fully situation.Therefore, though it is little to consider to use spring constant, the spring that tracing ability is good, spherical valve body 46 is pressed into method on the valve seat 45, but this method is because the existence of spring, not only the pressure loss on the exhaust line is big, but also has increased the amount that only makes spherical valve body 46 come-up be equivalent to the pressing force of spring, comes the required gas pressure of opens check valve 28.In addition, though also can consider to increase the air displacement of service pump 30, the method that the gas pressure of the discharge portion 24 of main pump 20 is reduced as early as possible, this method increase power consumption, and energy-saving effect reduces.
Therefore, in this case, shown in the vacuum pumping hardware 10 of Fig. 7, be connect 2 safety check 28a, 28b in upright arrangement.The safety check that connects in upright arrangement is not limited only to 2, also can more than 3.In addition, the 1st safety check 28a and the 2nd safety check 28b are the things that connects the same shapes that constitute equally with safety check shown in Figure 6 28 in upright arrangement as shown in Figure 8.
Like this, in the vacuum pumping hardware 10 of Fig. 7, as main pump 20, use the rotor of screw type dry vacuum pump to rotate with 6000rpm, carry out the exhaust of vacuum processing chamber, the 1st safety check 28a and the 2nd safety check 28b are not subjected to the influence of pressure pulsation of the discharge portion of screw type dry vacuum pump 20, correctly move, compare with the situation of simple use screw type dry vacuum pump, can reduce power consumption about 70%.
Have again,,, also can pass through pipe arrangement 29, the joint of the 1st safety check 28a and the 2nd safety check 28b is connected to the suction side of service pump 30 as Fig. 9 and shown in Figure 10 as the modified example of this mode of execution.In view of the above, can more stably reduce pressure.
In addition, Figure 11 is the summary pipe arrangement formation of expression based on the vacuum pumping hardware 10 of embodiments of the present invention.The pressure meter 19 that main valve 13 and vacuum measurement are used is installed on the exhaust pipe arrangement 12, the main pump 20 that this exhaust pipe arrangement 12 links vacuum processing chamber 1 and is made of single dry vacuum pump, on the exhaust pipe arrangement 25 of main pump 20, be connected with safety check 28, also be connected with the service pump 30 arranged side by side with safety check 28.On service pump 30, use about 10% the dry pump of exhaust velocity as main pump 20, on safety check 28, with shown in Figure 6 same, use has floatable spherical valve body in valve chamber, float by pressure and to drive valve than the high about 700Pa of barometric pressure, in the pressure lower than it, by conduct oneself with dignity following below valve seat close the safety check of valve.The downstream side of exhaust pipe arrangement 15 is connected with exhaust gas treatment device (not having diagram).In addition, also can be at the upstream side of main pump 20, the high vacuum exhaustion pump of connection turbomolecular pump etc.
On service pump 30, electrification consumes little, as to have the good structure of efficient pump.That is, as the pump structure, so long as in the compression stroke of pump, the structure that can reduce the volume of discharging gas gets final product.Specifically, be applicable to rotor type (Gaede type), piston type, diaphragm type (membranous type), Scrawl.So the exhaust velocity of service pump 30 is according to the ability of the vacuum pumping hardware of being expected 10, in the scope from about several % to 20% of the exhaust velocity of main pump 20, select aptly.
Then, be combined in the effect of the vacuum pumping hardware 10 in the embodiments of the present invention as constituted above, just the present invention is described in detail.
If by the scavenging action of service pump 30, the discharge side of main pump 20 is to can be used as the following gas flow of barometric pressure, and then safety check 28 becomes the pulse state that opens and closes repeatedly.In the present embodiment, as mentioned above, because safety check 28 is for having improved the structure with respect to the tracing ability of pulsation, so can guarantee under the condition of high reliability, vacuum pumping hardware of the present invention turns round.
If the discharge side of main pump 20 is below barometric pressure, then safety check 28 cuts out fully, after, the gas flow of the arrow a direction in Figure 11 disappears, the exhaust to the direction of arrow b that only has that scavenging action because of service pump 30 produces.In view of the above, because the head pressure of main pump 20 begins to reduce, the counter-current gas amount to main pump 30 is lowered, so reduced the power consumption of main pump 20.
Also have, open before and after the valve at safety check 28, under the big state of the discharge gas flow of main pump 20, service pump 30 does not play a role substantially, with all power consumption of vacuum pumping hardware of the power consumption combination of the power consumption of main pump 20 and service pump 30, compare when service pump 30 is not turned round and want big.But because for example in semiconductor-fabricating device, the volume of vacuum processing chamber is a lot of in the situation below 100 liters, and the time that service pump 30 reaches the pressure that works is a few minutes, so from energy-conservation this point, can ignore.
Figure 12 is the characteristic with respect to the power consumption (main pump 20+ service pump 30) of the suction pressure of main pump 20 of expression vacuum pumping hardware, and this vacuum pumping hardware is to be 150m in exhaust velocity
3On the back level (discharge side) of the main pump 20 of/Hr, the installation exhaust velocity is 1.8m
3The service pump 30 of/Hr.Main pump 20 is 25% the energy-saving pump that air displacement with last level is set at air displacement with respect to the 1st grade as mentioned above.In Figure 12, the single-point dotted line represents not install the situation of service pump 30, and solid line represents to install the situation of service pump 30 and safety check 28.In addition, transverse axis (suction pressure) is a logarithmic scale.
As shown in figure 12, by installation service pump 30, in the pressure range below 1kPa, power consumption sharply descends, if compare with the situation that service pump 30 is not installed, then when arriving pressure, 1.35kW power consumption be 0.32kW, obtained about 76% fractional energy savings (power consumption reduction rate).In addition, be under the situation of 400Pa in the suction pressure of main pump 20, be 1.4kW with respect to the power consumption of the situation that does not have service pump, the power consumption when service pump 30 is installed is 0.67kW, fractional energy savings is about 52%.
In addition, if the exhaust velocity of service pump 30 increases, then the power consumption of main pump 20 pressure that begins to reduce is near illustrated 1kPa, and promptly move to the high side of suction pressure on right side in figure, and having enlarged becomes effective energy-conservation pressure range.But if the exhaust velocity of service pump 30 increases, then the power consumption of service pump increases, and has reduced energy-saving effect.Generally, in the employed vacuum pumping system, a spot of industrial waste gas flow into vacuum processing chamber 1 in semiconductor-fabricating device, keep the pressure of regulation on one side, carry out the processing of film forming etc. on one side.Even as long as the suction pressure of the main pump 20 of this moment is because under high situation, just about 1500Pa, so in the suction pressure scope below about 3000Pa, if can obtain energy-saving effect, promptly reached purpose of the present invention.
Then, Figure 13 is the situation that imagination will be used as the rear-stage side pump of turbomolecular pump as the dry vacuum pump of main pump, and the exhaust velocity when represent the combination of main pump that mutual exhaust velocity is different and service pump compares and the relation of power consumption ratio.The suction pressure of main pump is 400Pa.
Here, exhaust velocity is than the ratio of the exhaust velocity that is meant service pump with the exhaust velocity of main pump, power consumption is than the ratio that is meant the power consumption of power consumption when not using service pump when using service pump, and therefore, the power consumption ratio is 100% to be meant the complete non-existent situation of energy-saving effect.In addition, the meaning of the power consumption that main pump and service pump add up to is represented in the power consumption when using service pump, and the meaning of the power consumption of main pump is represented in the power consumption when not using service pump.
Can understand that from Figure 13 exhaust velocity is bigger than more, power consumption is low more, so the energy-saving effect height.In addition, if exhaust velocity can think then that than near 3% the reduced rate of power consumption ratio reduces, for its reason, the back narration.From as can be seen above-mentioned, when the suction pressure of main pump is 400Pa, have the service pump of exhaust velocity with respect to the exhaust velocity below 3% of the exhaust velocity of this main pump by use, can reach energy-conservationization efficiently.
In the present embodiment, because the exhaust velocity ratio of main pump 20 and service pump 30 is 1.2%, so satisfy above-mentioned condition.
By increasing the exhaust velocity ratio of service pump with respect to main pump, manifest main pump energy-saving effect suction pressure as mentioned above, move to the high pressure side, otherwise, the power consumption of service pump increases, and is greater than power consumption under the situation of not using service pump in conjunction with the power consumption of main pump and service pump.To this, describe with reference to Figure 14 and Figure 15.
Here, Figure 14 is the typical value of expression with respect to the power consumption of the exhaust velocity of the pump that can be used as the service pump use.In addition, Figure 15 is to be 150m with the exhaust velocity as in the present embodiment main pump 20
3The dry vacuum pump of/Hr is an example, makes exhaust velocity with respect to the service pump of the characteristic shown in Figure 14 of the exhaust velocity of main pump suction pressure 400Pa than the power consumption under the situation about changing.
In Figure 15, the single-point dotted line only is the power consumption of main pump 20, and the exhaust velocity by making service pump is than increasing, and power consumption sharply reduces, and is about 4% when above at the exhaust velocity ratio, restrains in the mechanical loss value of main pump 20.To be expression be converted to relation with the exhaust velocity ratio with the power consumption of the service pump of characteristic shown in Figure 14 to dotted line.Like this, solid line be these and, it is the power consumption as vacuum pumping hardware.
Can understand from the result shown in the solid line of Figure 15, represent above-mentioned service pump 30 with respect to the exhaust velocity of main pump 20 than when 3% left and right sides, be minimum power consumption.If in the suction pressure of main pump 20 during at 400Pa, research obtains the situation of fractional energy savings at 50% (with reference to Figure 12), then above-mentioned exhaust velocity than be 1.2% or 9.4% any all can, exhaust velocity is than being that 9.4% service pump and 1.2% service pump (i.e. service pump 30 in the present embodiment) are in a ratio of large-scale, comparison being used for the space being set and making the energy of pump has produced problem.Therefore, as can be seen,, then can obtain the high vacuum pumping hardware of whole energy rate, on the other hand, than surpassing in 3% the service pump, can eliminate energy-saving effect on the contrary in exhaust velocity if select exhaust velocity than the service pump that is less than or equal to 3%.
On the other hand, shown in the solid line among Figure 12, in the suction pressure scope below 10Pa, power consumption is level substantially.This state reduces at the discharge portion pressure of main pump 20, and little under the situation that can ignore the compression work in the pump chamber, the power consumption here is expressed as the mechanical loss (mechanical loss) of main pump 20.If the suction pressure of main pump 20 increases gradually, then power consumption is also risen gradually.This is that the compression work (here being the work that pushes back counter-current gas) that is illustrated in the last level of main pump 20 becomes visual form gradually.Because the power consumption of main pump 20, keep and the proportional relation of discharge portion pressure, institute thinks the low power consumption that obtains shown in the solid line of Figure 12, must make service pump have the ability that can exhaust reach the discharge pressure when measuring here.
Therefore, use the different dry pump of various exhaust velocities, the power consumption when carrying out from arrival pressure is to the setting of the suction gas flow of the power consumption of rising 10%, if the pressure of investigation service pump at this moment then can obtain the value from 6.5kPa to 20kPa.If this expression is not used the pump with the ability that can be vented to the following pressure of 20kPa as service pump 30, then when arriving pressure, can not obtain the power consumption that the mechanical loss with main pump 20 is equal to.
Then, the solid line of Figure 16 is the exhaust velocity characteristic of the vacuum pumping hardware that expression will be in the present embodiment, and is compared by the exhaust velocity characteristic under the situation that does not have service pump shown in the single-point dotted line.In the suction pressure below 1kPa, compare, increased about 10% exhaust velocity with the situation that does not have service pump.Have again, arrive pressure and improved 1Pa from 2Pa.This is because because the outlet pressure of main pump 20 reduces, the counter-current gas amount reduces, thereby has improved the actual volume rate.Additional service pump 30 not only can obtain reducing the effect of power consumption, but also has the effect that improves exhaust velocity and arrive pressure.
As mentioned above, according to present embodiment,, can seek effective energy-conservationization as vacuum pumping hardware integral body because, can reduce the power consumption of main pump efficiently by having the service pump of little venting capacity.
More than, be illustrated with regard to embodiments of the present invention, certainly, the present invention is not limited only to this, can carry out various modification according to technological thought of the present invention.
For example, in the above embodiment, just use single dry vacuum pump to be illustrated, but be not limited only to this as main pump 20, for example, also the compound pump that constitutes by multistage connection Roots type dry vacuum pump in upright arrangement can be used as above-mentioned main pump.
In addition, in the above embodiment, the formation that just service pump 30 is connected the discharge side of single main pump 20 is illustrated, for example as shown in figure 17, by a service pump 3, the formation of the discharge side of many (being 3 in the drawings) main pump 20A～20C of configuration arranged side by side being carried out exhaust also goes for the present invention.Illustrated example is corresponding respectively with main pump 20A～20C, and safety check 28A～28C is set, the while and service pump 30 between, open and close valve 11A～11C is set.Each main pump 20A～20C and different mutually vacuum processing chamber bindings.Because in this case, can change the suction gas flow of service pump 30 according to the action platform number of main pump 20A～20C, can change according to the action platform number of main pump 20A～20C so wish the exhaust velocity (revolution) of service pump.
In addition, about the method for operation of vacuum pumping hardware of the present invention, the vacuum pumping hardware 10 with reference to Figure 11 is specifically described.
By vacuum pumping hardware 10, when barometric pressure carries out vacuum exhaust to vacuum processing chamber 1, by at first starting service pump 30, open main valve 13, the beginning exhaust.So,, confirm that the degree of vacuum of vacuum processing chamber 1 reaches 10 by pressure meter 19
4The moment of Pa starts main pump 20, makes the revolution of rotor be for example 3600rpm, carries out exhaust and makes the degree of vacuum of vacuum processing chamber 1 reach 1Pa.By adopting such startup method, can prevent atomic the flying upward in vacuum processing chamber 1.That is,, only start service pump 30,, also can carry out slow exhaust even the small-bore bypass valve 14 arranged side by side with main valve 13 as in the past is not set by when barometric pressure begins exhaust.In addition, after degree of vacuum reaches 1Pa, enter normal operation with that, but because at this time point, air displacement is little, safety check 28 cuts out, and only carries out exhaust by service pump 30, so can reduce the power consumption of vacuum pumping hardware 10, also can suppress noise.In addition, on the exhaust pipe arrangement 15 of Figure 11, use the pipe of nominal diameter 40A, because undertaken by service pump 30 in the exhaust of exhaust and connected main pump 20, air displacement is little, so can be replaced into for example pipe of nominal diameter 10A (3/8 inch of bore 10mm ),, can reduce the operating expenses of pipe arrangement because the pipe of this bore can carry out bending.
More than, by embodiment, being illustrated with regard to the method for operation of vacuum pumping hardware of the present invention, the present invention is not limited only to this certainly, can carry out various modification according to technological thought of the present invention.
For example, in the present embodiment, in exhaust by service pump, after making vacuum processing chamber reach the specified vacuum degree, when starting main pump, be that rotor is rotated with 3600rpm, also can be before vacuum processing chamber reaches the specified vacuum degree, the conversion and control main pump makes the degree of vacuum of revolution according to vacuum processing chamber, begins to increase gradually from the slow speed of little air displacement, therefore, the violent variation in pressure when main pump starts can be avoided, main pump can be started, and the unlikely load that becomes service pump.
According to the method for operation of vacuum pumping hardware of the present invention and vacuum pumping hardware, not only can reach compared with the past significantly energy-conservation, and can carry out slow exhaust easily by simple formation.
Claims (16)
1. a vacuum pumping hardware is characterized in that, the suction side of service pump is connected with the discharge side of the pump chamber of the intergrade of main pump or last level.
2. vacuum pumping hardware as claimed in claim 1 is characterized in that, above-mentioned service pump is than the little pump of above-mentioned main pump air displacement.
3. vacuum pumping hardware as claimed in claim 1 or 2 is characterized in that, at least one pump chamber of back level portion that makes above-mentioned main pump makes air displacement less than prime portion less than prime portion.
4. as each the described vacuum pumping hardware in the claim 1 to 3, it is characterized in that, exhaust is connected with the discharge side of the pump chamber of the last level of pipe arrangement and above-mentioned main pump, connects safety check in this exhaust on pipe arrangement, and this safety check only allows gas mobile to atmospheric side.
5. vacuum pumping hardware as claimed in claim 4 is characterized in that, above-mentioned safety check is to be connected in series a plurality of safety check and to constitute.
6. vacuum pumping hardware as claimed in claim 5, it is characterized in that, above-mentioned safety check has relocatable spherical valve body in valve body, be the parts of the 1st safety check and 2nd safety check identical of being connected in series with above-mentioned the 1st safety check, the 1st safety check be when above-mentioned spherical valve body floats because of the pressure of the discharge gas of above-mentioned main pump for driving valve, close valve on the valve seat below when above-mentioned pressure is following, because of deadweight, falling within.
7. as each the described vacuum pumping hardware in the claim 4 to 6, it is characterized in that above-mentioned service pump is connected side by side with above-mentioned safety check.
8. vacuum pumping hardware as claimed in claim 6 is characterized in that, the space that connects above-mentioned the 1st safety check and above-mentioned the 2nd safety check is connected with the suction side of above-mentioned service pump.
9. vacuum pumping hardware as claimed in claim 6 is characterized in that, above-mentioned spherical valve body is to be made of hollow Metal Ball, and the surface is covered by rubber-like.
10. vacuum pumping hardware, have main pump, safety check and service pump, this safety check is connected with the discharge side of this main pump, only allow gas to flow to atmospheric side from above-mentioned main pump, this service pump is configured in the discharge side of above-mentioned main pump side by side with respect to above-mentioned safety check, air displacement than above-mentioned main pump is little, it is characterized in that, above-mentioned service pump is the pump of 3% exhaust velocity running that is less than or equal to the exhaust velocity of above-mentioned main pump with the suction pressure of above-mentioned main pump when the 400Pa.
11. vacuum pumping hardware as claimed in claim 10 is characterized in that, above-mentioned main pump is the dry vacuum pump of variable capacity type, or with the multistage compound pump that connects in upright arrangement of this dry vacuum pump.
12. vacuum pumping hardware as claimed in claim 10 is characterized in that, many configurations side by side of above-mentioned main pump, and the discharge side of the suction side of above-mentioned service pump and above-mentioned each main pump is formed by connecting.
13. vacuum pumping hardware as claimed in claim 10 is characterized in that, the arrival pressure of above-mentioned service pump is less than or equal to 20kPa.
14. vacuum pumping hardware as claimed in claim 13 is characterized in that, above-mentioned service pump is the vacuum pump of rotor type (Gaede type), piston type, diaphragm type (diaphragm-type) or Scrawl.
15. the method for operation of a vacuum pumping hardware is characterized in that, described vacuum pumping hardware has the main pump that is connected with above-mentioned vacuum processing chamber; Be connected the safety check that only allows gas to flow to atmospheric side from above-mentioned main pump with the discharge side of this main pump; With respect to above-mentioned safety check, be configured in the discharge side of above-mentioned main pump side by side, than the little service pump of the air displacement of above-mentioned main pump; By above-mentioned vacuum pumping hardware to vacuum processing chamber when carrying out exhaust near barometric pressure or its, at first start above-mentioned service pump, above-mentioned vacuum processing chamber starts above-mentioned main pump after arriving the pressure of regulation.
16. the method for operation of a vacuum pumping hardware is characterized in that, described vacuum pumping hardware has: the main pump that is connected with vacuum processing chamber; Be connected the safety check that only allows gas to flow to atmospheric side from above-mentioned main pump with the discharge side of this main pump; With respect to above-mentioned safety check, be configured in the discharge side of above-mentioned main pump side by side, than the little service pump of the air displacement of above-mentioned main pump; By above-mentioned vacuum pumping hardware to above-mentioned vacuum processing chamber when carrying out exhaust near barometric pressure or its, at first start above-mentioned service pump, above-mentioned vacuum processing chamber arrives the above-mentioned main pump of the preceding startup of pressure of regulation, make it with float tolerance low speed rotation, according to the pressure of above-mentioned vacuum processing chamber, revolution is increased gradually.
Applications Claiming Priority (10)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001269742 | 2001-09-06 | ||
| JP269742/2001 | 2001-09-06 | ||
| JP327229/2001 | 2001-10-25 | ||
| JP2001327229A JP4045362B2 (en) | 2001-09-06 | 2001-10-25 | Multistage positive displacement vacuum pump |
| JP2001328674A JP3992176B2 (en) | 2001-10-26 | 2001-10-26 | Vacuum exhaust method and vacuum exhaust device |
| JP328674/2001 | 2001-10-26 | ||
| JP2001332632A JP3906973B2 (en) | 2001-10-30 | 2001-10-30 | Vacuum exhaust device |
| JP332632/2001 | 2001-10-30 | ||
| JP333772/2001 | 2001-10-31 | ||
| JP2001333772A JP3982673B2 (en) | 2001-10-31 | 2001-10-31 | Operation method of vacuum exhaust system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1541307A true CN1541307A (en) | 2004-10-27 |
| CN100348865C CN100348865C (en) | 2007-11-14 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB028157117A Expired - Lifetime CN100348865C (en) | 2001-09-06 | 2002-09-05 | Vacuum exhaust appts. and drive method of vacuum appts. |
Country Status (5)
| Country | Link |
|---|---|
| US (2) | US20040173312A1 (en) |
| KR (1) | KR100876318B1 (en) |
| CN (1) | CN100348865C (en) |
| TW (1) | TWI267581B (en) |
| WO (1) | WO2003023229A1 (en) |
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| TWI823675B (en) | 2022-11-14 | 2023-11-21 | 財團法人工業技術研究院 | Pressure difference generating apparatus |
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| US6863019B2 (en) * | 2000-06-13 | 2005-03-08 | Applied Materials, Inc. | Semiconductor device fabrication chamber cleaning method and apparatus with recirculation of cleaning gas |
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- 2002-09-05 WO PCT/JP2002/009048 patent/WO2003023229A1/en active Application Filing
- 2002-09-05 KR KR1020047002269A patent/KR100876318B1/en active IP Right Grant
- 2002-09-05 US US10/486,189 patent/US20040173312A1/en not_active Abandoned
- 2002-09-05 CN CNB028157117A patent/CN100348865C/en not_active Expired - Lifetime
- 2002-09-09 TW TW091120409A patent/TWI267581B/en not_active IP Right Cessation
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| CN107002681A (en) * | 2014-10-02 | 2017-08-01 | 阿特利耶博世股份有限公司 | Pumping system and the pumping method using this pumping system for producing vacuum |
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| CN106762650A (en) * | 2015-11-25 | 2017-05-31 | 中国科学院沈阳科学仪器股份有限公司 | A kind of energy-saving control system and method for pumping equipment |
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| CN114962269A (en) * | 2021-02-26 | 2022-08-30 | 中国科学院微电子研究所 | Vacuum pump and vacuum pump system |
Also Published As
| Publication number | Publication date |
|---|---|
| KR100876318B1 (en) | 2008-12-31 |
| US20080145238A1 (en) | 2008-06-19 |
| CN100348865C (en) | 2007-11-14 |
| US20040173312A1 (en) | 2004-09-09 |
| TWI267581B (en) | 2006-12-01 |
| WO2003023229A1 (en) | 2003-03-20 |
| KR20040030968A (en) | 2004-04-09 |
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