CN1540283A - Method and device for measuring roughness on working surface - Google Patents

Method and device for measuring roughness on working surface Download PDF

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Publication number
CN1540283A
CN1540283A CNA200310110471XA CN200310110471A CN1540283A CN 1540283 A CN1540283 A CN 1540283A CN A200310110471X A CNA200310110471X A CN A200310110471XA CN 200310110471 A CN200310110471 A CN 200310110471A CN 1540283 A CN1540283 A CN 1540283A
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China
Prior art keywords
microscope
surface roughness
computing machine
workpiece
measurement mechanism
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Pending
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CNA200310110471XA
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Chinese (zh)
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文晓希
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Individual
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Individual
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Priority to CNA200310110471XA priority Critical patent/CN1540283A/en
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Abstract

Microscope magnifies surfaces of workpiece to be measured and motor drives worktable moving so as to obtain a series of images of micro contours, which through CCD are collected and converted to video image signal. The said video signal being captured and collected, computer analyzes, processes, displays and stores micro contours of workpiece measured and parameters and curves of surface roughness. The measuring device includes worktable, driving motor, microscope, which through CCD and image capture module is connected to computer. The invention combines microscope, COD and computer provides performances. Non-contact type measurement does not damage surface.

Description

Workpiece surface roughness measuring method and device
Technical field:
The present invention relates to mechanical manufacturing field, the method that is specifically related to measuring workpieces surfaceness in the machining reaches by the designed device of this method.
Background technology:
In Machining Technology, workpiece surface roughness is an important techniques index weighing the workpiece processing quality, existing surface roughness measuring method mainly is to be undertaken finishing corresponding surveying work after the data acquisition by sensors of various types, and its testing apparatus mainly exists following defective and deficiency:
1. contactless surface finish measurement equipment price costliness, import equipment be generally more than 1,000,000 yuan, as: import laser type contourgraph surpasses 3,000,000 usually, such device systems complex structure has zero to waft, to personnel and environmental requirement height, failure rate is higher, uses and the maintenance cost height;
2. contact surface finish measurement equipment price is higher, and there is scuffing on the precision component surface when measuring, and the price of such import equipment is generally more than 400,000, the price of home equipment is generally more than 100,000 yuan, and its system construction complexity has zero to waft, failure rate is higher, and maintenance cost is higher;
Though 3. relevant portable roughness concentration equipment price is low than the said equipment, performance is not high, generally is not suitable for measuring room with (being usually used in the production scene);
4. relevant optical measuring apparatus automaticity is poor, efficiency of measurement is low, can only measure the parameter that is of little use individually, and along with carrying out and implementing of new nation's standard (GB/T3503-2000), relevant optical measuring apparatus (as: light-section microscope, interference microscope etc.) can not satisfy request of national standard, is not suitable for directly being used for measure surface roughness.
Summary of the invention:
Technical matters to be solved by this invention is the defective that overcomes above-mentioned prior art, provides a kind of measurement means simple, reliable, and the method that workpiece surface roughness with low cost is measured reaches by the designed measurement mechanism of this method.
The present invention's technical scheme is to adopt microscope that surface of the work to be measured is amplified, by the motor-driven movable workbench, obtain a series of micro-contour images, gather micro-image and be converted into video signal through charge-coupled device, undertaken after the data acquisition its signal being carried out analyzing and processing by image capture module again and show and preserve the measured workpiece micro-profile in surface and surface roughness parameter, curve by computing machine.Comprise the worktable that to put workpiece for measurement and link with it and can be by the designed measurement mechanism of the present invention by the motor of its driving, it is characterized in that described worktable top is provided with microscope, this microscope joins by charge-coupled device, image capture module and computing machine, and described motor joins by motor drive module and computing machine.Microscope is light-section microscope or interference microscope in the said apparatus, and image capture module is the PCI video acquisition module, and charge-coupled device is a planar array type high-res charge-coupled device.On worktable, also be provided with the travel switch that links with computing machine, be provided with PCI between computing machine and motor drive module and the travel switch and isolate the digital quantity input/output module.
The present invention organically combines microscope, planar array type high-res charge-coupled device, computing machine etc., and system cost is reduced greatly, and is relatively low to personnel and environment requirement, and improve relative with reliability of stability is better maintainable.Adopt non-contact measurement, the precision component surface there is not scuffing, and kept microscopical repertoire, increased the repertoire of surfagauge, simultaneously according to accuracy requirement reasonable disposition microscope, expanded the application space of light-section microscope and interference microscope on the verge of being replaced, economized on resources, be convenient to different places and select for use.Present device performance and same category of device are suitable, and cost performance is better than similar measuring equipment greatly.
Description of drawings:
Fig. 1 is apparatus of the present invention synoptic diagram.
Among the figure:
The 1-workpiece; The 2-worktable; The 3-microscope;
4-charge-coupled device 5-image capture module; The 6-computing machine;
The 7-printer; 8-PCI isolates the digital quantity input/output module;
The 9-motor drive module; The 10-power supply; The 11-power light;
The 12-motor; 13-shaft coupling knot; 14-screwfeed mechanism;
The 15-travel switch.
Embodiment:
The present invention be directed to that shortcomings and deficiencies that existing measuring technique exists design.It is by being provided with microscope on work stage, utilize microscope that surface of the work to be measured is carried out local micro-amplification then, simultaneously by the motor-driven movable workbench, obtain a series of micro-contour images, gather micro-image and be converted into video signal through charge-coupled device, undertaken carrying out analyzing and processing by computing machine after the data acquisition by image capture module again, draw measured workpiece micro-profile in surface and surface roughness parameter, curve, at last by the printer output test result.
The present invention according to the designed measurement mechanism of said method as shown in Figure 1, it comprise the worktable 2 that can put workpiece for measurement 1 and with motor 12, this motor 12 is the two phase mixing stepper motor, employing is total to positive connection, and (positive input of stepping pulse signal CP and direction level signal DIR is a common port, the method that the opener gate circuit is commonly used), segmentation drives, and can eliminate the low-frequency oscillation of motor fully, improve the output torque and the resolution of motor 12, running more evenly, steadily.Worktable 2 links with motor 12 by screwfeed mechanism 14 and shaft coupling knot 13, can realize the stepping feeding under the driving of motor 12.On worktable 2, be provided with microscope 3, this microscope 3 can dispose light-section microscope or interference microscope according to accuracy requirement, has expanded the application space of light-section microscope and interference microscope on the verge of being replaced, economizes on resources, and is convenient to different places and selects for use.The low configurable light-section microscope of precision (0.1 μ m<Ra<20 μ m) wherein, the configurable interference microscope of high precision (0.001 μ m<Ra≤0.1 μ m).Adopt light to cut or the optical interference principle is carried out local micro-amplification to the measured workpiece surface, it is stable and reliable for performance, disturbs relative legacy equipment with the influence of noise signal little, in addition, utilizes the worktable of microscope 3 itself, need not other surveying work platform fully.Charge-coupled device 4 is a planar array type high-res charge-coupled device, its input end and microscope 3 join, be used to gather micro-image, simultaneously can play sensor, can be converted to the electric signal of the output of serial chronologically inciding on its photosurface by the intensity signal of space distribution, its nonlinearity is zero substantially, do not have zero to waft, and only need a planar array type high-res charge-coupled device 4 just can finish whole surveying works.Described planar array type high-res charge-coupled device 4 output terminals are connected with image capture module 5, and join by itself and computing machine 6.Image capture module 5 is the PCI video acquisition module, is sent to computing machine 6 after the picture signal that planar array type high-res charge-coupled device 4 is gathered can being handled.It can play the effect of mould/number conversion and data acquisition, and the performance and the latter are suitable, but cost is less than the latter's 1/10th; Fir digital filter with linear phase replaces traditional 2RC analog filter, saved hardware cost, and performance improves relatively, the Fir digital filter can design as required, accurately locate cutoff frequency, performance can be near desirable wave filter, transition section can be littler more than one times than 2RC wave filter, amplitude fading can reach more than 90% at the cutoff frequency place, exceed 75% requirement far away, ripple can be less than 1%, and the 2RC analog filter is difficult to reach, and debugging difficulty is big, and cutoff frequency is in case determine and can not change.Computing machine 6 can adopt 586,1.2GHz, 256M compatible (or higher), it is to be developing instrument with Visual C++, under the Windows environment, adopt interrupt mode micro-contour images to be converted into the DIB image by picture catching, then the DIB image is carried out rim detection, profile extraction, profile connection, adopt least square method that profile center line, contour curve are carried out match; The Fir bandpass digital filter is carried out the parametrization design, determine that with the form of parameter exponent number, cutoff frequency, the filtering of wave filter counts etc., and employing dynamic link library and working routine dynamic link, frequency characteristic according to surface profile signal and noise signal, by the Fir digital filtering, from the original contour signal, filter low frequency macro contours signal and the high frequency noise signal obtains the surfaceness signal, change filtering parameter and can obtain the morphology signal.Owing to be subjected to the influence of cutter trade, discontinuity of materials, stain etc., during measurement, may there be indivedual singular points, can distinguish and revise according to the variation of gray-scale value, adopt the method for running mean can reduce the influence of noise etc.; Adopt the working software under the Windows environment, it is convenient and simple for operation, friendly interface, attractive in appearance, need only click several times mouse according to information and just can finish whole measurements, realize that the local configuration image amplifies, good visual effect, be convenient to observe and analysis, can preserve measurement data, show relevant measurement result.
Motor drive module 9 actions of the driving of motor 12 of the present invention by joining with computing machine 6, the feed motion by motor drive module 9 control motors 12 is moved worktable 2, collects the contour images on required surface to be measured to guarantee computing machine 6.
The present invention also is provided with the travel switch 15 that links with computing machine 6 on worktable 2, be used for left and right two extreme positions of restraint of labour platform 2 motion, stop automatically during over travel, and sound and light alarm.Between computing machine 6 and motor drive module 9 and travel switch 15, also be provided with PCI and isolate digital quantity input/output module 8, inside has interrupt function, can adopt interrupt mode to carry out data acquisition, is used for the control of image acquisition and motor movement.
The present invention can estimate surfaceness by latest national standards (GB/T3505-2000), and valuable range parameter is maximum height Rz, average line height Rc, the overall height Rt of profile of profile unit, arithmetic average deviation Ra, the root-mean-square-deviation Rq of evaluation profile of evaluation profile, the measure of skewness Rsk of evaluation profile, the steepness Rku of evaluation profile of largest contours peak height Rp, the dark Rv of largest contours paddy, profile; Spacing parameter is the mean breadth Rsm of profile unit; Hybrid parameter is the root mean square slope R Δ q of evaluation profile; Curve is bearing length rate Rmr (c), the section of outline difference in height R δ c of profile, relative bearing length rate curve, the profile amplitude distribution curve that supports ratio R mr, profile with correlation parameter.
The present invention and the comparison of miscellaneous equipment technical characteristic can see the following form.
The present invention The import contactless measuring system Import contact type measurement system Homemade contact type measurement system The traditional optical measuring equipment
Cost 30,000 yuan
Price About 100~4,000,000 About 40~800,000 About 10~300,000 20,000 yuan
Measuring multiple parameters Be Be Be Be Not
Measuring accuracy Moderate High Moderate Moderate Low
Automaticity High High High High Low
Efficiency of measurement High High High High Low
Personnel and environmental requirement Moderate Higher Moderate Moderate Moderate
Failure rate Low Higher Higher Higher Low
Maintenance cost Low High High Higher Low
Scratch Do not have Do not have Have Have Do not have
Zero drift Do not have Have Have Have Do not have
Inside surface is measured Measure indirectly Measure indirectly Directly measure Directly measure Measure indirectly
The macro contours measurement function Do not have Have Do not have Do not have Do not have
Reliability Good Generally Generally Generally Good
The course of work of the present invention:
Measured workpiece 1 is placed on the instrument worktable 2, regulate microscope 3, is video signal by planar array type high-res charge-coupled device 4 with the image transitions on the microscope 3, after catching, image capture module 5 delivers to computing machine 6, carry out analyzing and processing by the picture signal of 6 pairs of inputs of computing machine then, show local micro-contour images in real time.During measurement, computing machine 6 is by isolating the feeding of digital quantity input/output module 8 through motor drive module 9 control step motors 12, motor 12 every feedings once, through shaft coupling knot 13, screwfeed mechanism 14 drives worktable 2 and moves once, like this, computing machine 6 can be gathered the local micro-contour images of a width of cloth in real time, then according to the needs of measure surface roughness, by computing machine 6 controls, can obtain the micro-contour images in a series of parts, after image acquisition finishes, analyze and handle by 6 pairs of images of computing machine, can show, preserve measured workpiece micro-profile in surface and relevant surface roughness parameter, curves etc. carry out the part to the micro-profile in measured workpiece surface then and amplify, by the relevant test report of printer 7 outputs, finish entire work process.

Claims (7)

1, a kind of workpiece surface roughness measuring method, it is characterized in that it is to adopt microscope that surface of the work to be measured is amplified, by the motor-driven movable workbench, obtain a series of micro-contour images, gather micro-image and be converted into video signal through charge-coupled device, undertaken after the data acquisition its signal being carried out analyzing and processing by image capture module again and show and preserve the measured workpiece micro-profile in surface and surface roughness parameter, curve by computing machine.
2, a kind of workpiece surface roughness measurement mechanism, comprise the worktable that to put workpiece for measurement and link with it and can be by the motor of its driving, it is characterized in that described worktable top is provided with microscope, this microscope joins by charge-coupled device, image capture module and computing machine, and described motor joins by motor drive module and computing machine.
3, workpiece surface roughness measurement mechanism according to claim 2 is characterized in that worktable is provided with the travel switch that links with computing machine.
4, workpiece surface roughness measurement mechanism according to claim 2 is characterized in that microscope is light-section microscope or interference microscope.
5, workpiece surface roughness measurement mechanism according to claim 2 is characterized in that image capture module is the PCI video acquisition module.
6, workpiece surface roughness measurement mechanism according to claim 2 is characterized in that charge-coupled device is a planar array type high-res charge-coupled device.
7, workpiece surface roughness measurement mechanism according to claim 3, its feature are provided with PCI and isolate the digital quantity input/output module between computing machine and motor drive module and travel switch.
CNA200310110471XA 2003-10-30 2003-10-30 Method and device for measuring roughness on working surface Pending CN1540283A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CNA200310110471XA CN1540283A (en) 2003-10-30 2003-10-30 Method and device for measuring roughness on working surface

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Application Number Priority Date Filing Date Title
CNA200310110471XA CN1540283A (en) 2003-10-30 2003-10-30 Method and device for measuring roughness on working surface

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CN1540283A true CN1540283A (en) 2004-10-27

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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100381781C (en) * 2004-12-10 2008-04-16 株式会社东芝 Surface roughness measuring method and apparatus and turbine deterioration diagnostic method
CN104697476A (en) * 2015-03-19 2015-06-10 北京时代之峰科技有限公司 Automatic detection method and device for roughness light-incision profile curve
CN105651778A (en) * 2016-01-20 2016-06-08 成都理工大学 Mineral surface roughness numerical computation method based on confocal microscope observation data
CN110582213A (en) * 2017-04-26 2019-12-17 Ykk株式会社 Fastener stringer, fastener chain, and method for manufacturing fastener chain
CN111266575A (en) * 2019-12-31 2020-06-12 南京理工大学 Method for quantitatively repairing surface defects of additive part
CN114754706A (en) * 2022-04-11 2022-07-15 广东机电职业技术学院 Mechanical part machining surface roughness online detection method and system

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100381781C (en) * 2004-12-10 2008-04-16 株式会社东芝 Surface roughness measuring method and apparatus and turbine deterioration diagnostic method
CN104697476A (en) * 2015-03-19 2015-06-10 北京时代之峰科技有限公司 Automatic detection method and device for roughness light-incision profile curve
CN104697476B (en) * 2015-03-19 2017-06-06 北京时代之峰科技有限公司 Roughness light cuts the automatic testing method and device of contour curve
CN105651778A (en) * 2016-01-20 2016-06-08 成都理工大学 Mineral surface roughness numerical computation method based on confocal microscope observation data
CN105651778B (en) * 2016-01-20 2018-11-20 成都理工大学 Mineral surfaces roughness value calculation method based on confocal microscope observation data
CN110582213A (en) * 2017-04-26 2019-12-17 Ykk株式会社 Fastener stringer, fastener chain, and method for manufacturing fastener chain
CN111266575A (en) * 2019-12-31 2020-06-12 南京理工大学 Method for quantitatively repairing surface defects of additive part
CN111266575B (en) * 2019-12-31 2022-03-08 南京理工大学 Method for quantitatively repairing surface defects of additive part
CN114754706A (en) * 2022-04-11 2022-07-15 广东机电职业技术学院 Mechanical part machining surface roughness online detection method and system

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