CN1536439A - Gray mask defect correction method - Google Patents
Gray mask defect correction method Download PDFInfo
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- CN1536439A CN1536439A CNA200410033705XA CN200410033705A CN1536439A CN 1536439 A CN1536439 A CN 1536439A CN A200410033705X A CNA200410033705X A CN A200410033705XA CN 200410033705 A CN200410033705 A CN 200410033705A CN 1536439 A CN1536439 A CN 1536439A
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- 238000012937 correction Methods 0.000 title claims abstract description 85
- 238000000034 method Methods 0.000 title claims abstract description 56
- 230000007547 defect Effects 0.000 title claims abstract description 40
- 238000002834 transmittance Methods 0.000 claims abstract description 21
- 229920002120 photoresistant polymer Polymers 0.000 claims abstract description 6
- 238000012545 processing Methods 0.000 claims description 31
- 230000002950 deficient Effects 0.000 claims description 10
- 230000000694 effects Effects 0.000 claims description 8
- 230000001915 proofreading effect Effects 0.000 claims description 8
- 230000005540 biological transmission Effects 0.000 claims description 7
- 238000011156 evaluation Methods 0.000 claims description 7
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 238000012546 transfer Methods 0.000 abstract description 18
- 239000011521 glass Substances 0.000 description 13
- 239000000758 substrate Substances 0.000 description 7
- 238000010023 transfer printing Methods 0.000 description 7
- 238000007689 inspection Methods 0.000 description 6
- 238000003384 imaging method Methods 0.000 description 5
- 238000012550 audit Methods 0.000 description 4
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- 230000000052 comparative effect Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 238000001182 laser chemical vapour deposition Methods 0.000 description 2
- 230000003252 repetitive effect Effects 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 238000004380 ashing Methods 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
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- 150000001845 chromium compounds Chemical class 0.000 description 1
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
- G03F1/72—Repair or correction of mask defects
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1306—Details
- G02F1/1309—Repairing; Testing
Abstract
Provided is a method for determining (inspecting and guaranteeing) a gray tone mask and a method for correcting the mask by which a gray tone part is easily determined (inspected) as to whether the part causes problems for the user in exposure and transfer processes when a normal pattern or various kinds of corrected patterns are to be determined. The method for determining a defect in a gray tone mask has: a gray tone part where transmittance is controlled and which is formed to decrease the quantity of light transmitting this region to selectively vary the film thickness of a photoresist; a light shielding part; and a transmitting part. The method includes: a process (3) of correcting a defect produced in the gray tone part 3; a process of preparing a transfer image by blurring the image in the gray tone part after correction; and a process (4), (4') of evaluating the corrected part on the basis of the transfer image.
Description
Technical field
The present invention relates to determining defects (inspection) method of the gray tone portion of gray mask and defect correction method etc.This gray tone portion is that light transmission capacity has been carried out the zone of adjusting, and its objective is the thickness that optionally changes photoresist by reducing the light transmission capacity that sees through this regional light.
Background technology
In recent years, use in the mask field, just attempting using gray mask to cut down mask sheet number (non-patent literature 1) at large LCD.
Herein, gray mask shown in Fig. 3 (1), has light shielding part 1, transmittance section 2 and gray tone portion 3 on transparency carrier.Gray tone portion 3 for example is to have formed in the zone of the large LCD that uses gray mask with the shading graph 3a below the limiting resolution of exposure machine, and with reduce the light transmission capacity that sees through this regional light, the thickness that reduces this regional exposure and selectively changing photoresist is that purpose forms.3b is the following trickle transmittance section of limiting resolution of the exposure machine of gray tone portion 3.The identical film of thickness that light shielding part 1 and shading graph 3a are all made by the same material that adopts chromium and chromium compound etc. usually forms.Transmittance section 2 and trickle transmittance section 3b all are the parts that does not form the transparency carrier of photomask etc. on transparency carrier.
Using the limiting resolution of the large LCD of gray mask with exposure machine, is about 2.5 μ m for the exposure machine of step-by-step system, is about 3 μ m for the exposure machine of mirror surface projection mode.For this reason, for example, in Fig. 3 (1), the interval width of the trickle transmittance section 3b of gray tone portion 3 is set at less than 2.5 μ m, the wide less than 2.5 μ m that are set at of the lines of the shading graph 3a below the limiting resolution of exposure machine.When exposing with exposure machine with above-mentioned large LCD, owing to passed through the overall exposing quantity not sufficient of the exposure light of gray tone portion 3, thereby the positive imaging-type photoresist on the substrate is the thickness attenuation after exposing by this gray tone portion 3.That is to say, etchant resist is according to the difference of exposure, the part corresponding with common light shielding part 1 and with the corresponding part of gray tone portion 3 between the two, generation is to the dissolubility difference of developer solution, thereby the etchant resist shape after developing, shown in Fig. 3 (2), part 1 ' for example about 1 μ m corresponding with common light shielding part 1, part 3 ' for example about 0.4～0.5 μ m corresponding with gray tone portion 3, the part corresponding with transmittance section 2 becomes the part 2 ' of no etchant resist.Then, carry out the 1st etching of processed substrate in the part 2 ' of no etchant resist, use ashing etc. to remove the etchant resist of the thin part 3 ' corresponding, and carry out the 2nd etching in this part with gray tone portion 3, thereby available 1 mask carries out the operation of 2 masks in the past, has cut down the mask sheet number.
In addition, gray tone portion for above-mentioned gray mask, the processing of trickle figure is very difficult, and the chip that takes place in manufacturing process etc. has a significant impact, owing to these reasons, thin, thick etc. CD sum of errors residue figure (projection (protruding) by shading graph 3a has taken place, short circuit (bridging), spot etc.) and the graphic defects of shortcoming figure (breach (recessed) and broken string etc.) composition etc. (below, the rugosity of figure and residue graphic defects etc. is called black defective, the fineness of figure and shortcoming defective etc. is called white defective).
Therefore, although can apply figure adjustment to the defective that gray tone portion takes place, yet because the figure of gray tone portion is trickle, thereby exist variety of issue.
The 1st, for example, when the gray tone figure more than the correction 2 μ m that use minimum slit sizes 2 μ m, because the figure trickle (live width is thin) of gray tone portion, and the correction accuracy of means for correcting has boundary, thereby with the part that should form correction graph with will form the suitable bearing accuracy of deviation of the part of correction graph, and the correction accuracy suitable with the difference of part that should form correction graph and the actual part that is formed with correction graph has boundary.Therefore, proofread and correct according to the shape identical (in the CD acceptable precision of normal figure) with normal figure, for the defective that will take place, be very difficult (for example situation that forms trickle calbrating film figure and proofread and correct at huge shortcoming defect part) technically, thereby be corrected into as far as possible and be similar to normal figure, that is, be similar to the correction (the CD acceptable precision of normal figure is outer) of normal figure.
The 2nd, since with the correction of minimum slit sizes 2 μ m for example the gray tone figure of 1 μ m be impossible technically, thereby the present patent application people is in advance with regard to a kind of technology, that is: by forming the shape that non-restoring becomes to be similar to normal figure, and obtain with normogram just as the correction graph of the gray tone effect that waits (different and/or arrange different correction graphs) with normal graphics shape, carry out the technology (special correction method) that gray tone portion is proofreaied and correct, carried out applying for (patent documentation 1).
[non-patent literature 1] monthly magazine FPD Intelligence, p.31-35, in May, 1999
[patent documentation 1] spy opens 2002-107913
There is following problem in above-mentioned prior art.
The 1st, when being corrected into the figure of identical with normal graphics shape (in the CD acceptable precision of normal figure), though can carry out by an audit by comparison that common figure is relatively checked mutually, yet according to having made timing with the figure of normal figure shape approximation (outside the CD acceptable precision of normal figure), and according to having made timing with the variform figure of normal figure, owing to can not carry out common audit by comparison, thereby exist the problem that is not easy to check.
The 2nd, when removing black defective with laser repairing device, because glass substrate is impaired easily, even thereby the shading graph 3a after being corrected satisfies under the situation of the technical specification (figure live width and shape) that sets, at trickle transmittance section (glass portion) when 3b is impaired, the transmittance that also can cause trickle transmittance section (glass portion) 3b down will, thereby can the generation problem in user's exposure and transfer process.Specifically, under the impaired situation of glass,, be necessary to form than the thinner shading graph 3a of the technical specification that sets (figure live width and shape) live width in order to remedy the transmittance deficiency of trickle transmittance section (glass portion) 3b.In this case, existing the inspection of only carrying out graphics shape is inadequate problem.
The 3rd, even in order to satisfy customer requirements (when the user exposes, the etchant resist thickness of reservation regulation) the normal figure (certainly in the CD acceptable precision) of the technical specification (figure live width and shape) that sets and the interior correction graph of CD acceptable precision of normal figure have been satisfied, because the conditions of exposure when existing the actual use of user gray mask to obtain transfer graphic on being transferred the etchant resist of substrate being according to the imposing a condition of optical condition of the used exposure device of transfer printing and different situations, thereby in user's exposure and transfer process, understand the generation problem.Specifically, having the conditions of exposure of the gray mask that the user uses is not the situation (for example, have a mind to utilization make the gray tone figure not understand the situation etc. of the undue not enough illuminate condition of the conditioned disjunction of picture) of usual conditions.Learn thus: (1) even satisfy the normal figure and the correction graph (all in the CD acceptable precision) of the technical specification (figure live width and shape) set, also can go wrong in user's exposure and transfer process; (2) even be similar to the correction graph CD acceptable precision of figure (normal outer) of normal figure, if in user's exposure and transferred image are handled, do not take place problem just can (as long as for the whether qualified result of determination of the etchant resist figure after exposing by the user be qualified just can); (3) in user's exposure and transfer process, whether the judgement (inspection) of problem takes place, its necessity and importance are arranged.
Summary of the invention
The present invention proposes in order to address the above problem, and the 1st purpose of the present invention provides a kind ofly can be easily judges judgement (inspection) method of the gray mask of (inspection) to gray tone portion whether generation problem in user's exposure and transfer process.
In addition, the 2nd purpose of the present invention provides a kind of defect correction method that utilizes the gray mask of above-mentioned decision method.
The present invention has following formation.
The defect correction method of (constituting 1) a kind of gray mask, this gray mask has: gray tone portion, be that light transmission capacity has been carried out the zone of adjusting, its objective is the light transmission capacity that sees through this regional light by reducing, optionally change the thickness of photoresist; Light shielding part and transmittance section is characterized in that, comprising: the operation that the defective that takes place in above-mentioned gray tone portion is proofreaied and correct; Image to the gray tone portion after the above-mentioned correction is implemented Fuzzy Processing, generates the operation of transferred image; And the operation of estimating the gray tone portion after the above-mentioned correction according to above-mentioned transferred image.
(constitute 2) is characterized in that according to the defect correction method that constitutes 1 described gray mask, comprises the operation of proofreading and correct the gray tone portion after the above-mentioned correction according to above-mentioned evaluation result once again.
(constituting 3) according to the defect correction method that constitutes 1 or 2 described gray masks, is characterized in that, above-mentioned gray tone portion is the zone that has formed the shading graph below the limiting resolution of the exposure machine that uses gray mask.
(constituting 4) according to the defect correction method that constitutes 1 or 2 described gray masks, is characterized in that, above-mentioned defect correction operation and transferred image generate operation and use same device to carry out.
(constituting 5) is according to the defect correction method that constitutes 1 or 2 described gray masks, it is characterized in that, gray tone portion after the above-mentioned correction comprises the figure with normal figure shape approximation, perhaps obtain with normogram just as the gray tone effect that waits shape and/or arrange different correction graphs.
(constitute 6) is characterized in that according to the defect correction method that constitutes 1 or 2 described gray masks, and above-mentioned Fuzzy Processing is the processing that the image that comprises the gray tone portion after the above-mentioned correction is defocused.
(constituting 7) according to the defect correction method that constitutes 1 described gray mask, is characterized in that, gray mask is that LCD makes with mask or display device manufacturing mask.
Description of drawings
Fig. 1 is used to illustrate the white defect correction of gray tone portion of embodiments of the invention and the partial top view of decision method.
Fig. 2 is the synoptic diagram that is used to illustrate that the summary of laser-adjusting device constitutes.
Fig. 3 is the figure that is used to illustrate gray mask, and Fig. 3 (1) is a partial top view, and Fig. 3 (2) is a part sectioned view.
Fig. 4 is the white defect correction of gray tone portion of explanation comparative example and the partial top view of decision method.
Among the figure: 1 ... light shielding part; 2 ... the transmittance section; 3 ... gray tone portion; 3a ... shading graph; 3b ... trickle transmittance section
Embodiment
In defect correction of the present invention and decision method, the image that comprises gray tone portion (image etc. that for example comprises the figure of the gray tone portion after the correction) is implemented Fuzzy Processing, generate the transferred image of the transfer printing situation of decidable user in exposure and transfer process, the gray tone portion (constituting 1) after proofreading and correct according to this transferred image evaluation.
Like this, use the formation of estimating correction unit according to the transferred image of decidable user's exposure and the transfer printing situation in the transfer process, have following effect.
(1) for above-mentioned the 1st problem, even carrying out timing (constituting 5) according to figure (outside the CD acceptable precision of normal figure) with normal figure shape approximation, and, use the transferred image corresponding also can judge easily with user's conditions of exposure according to carrying out timing (constituting 5) (in the time of promptly all can not carrying out common audit by comparison) with the variform figure of normal figure.
(2) for above-mentioned the 2nd problem, even damage and when making the transmittance of glass substrate low, also can judge the problem that under user's conditions of exposure, whether takes place at the glass that causes by correction.
(3) for above-mentioned the 3rd problem, decidable is under user's conditions of exposure, and whether the figure of gray tone portion defectiveness.
In the present invention, the image that comprises gray tone portion (image etc. that for example comprises the figure of the gray tone portion after the correction) is implemented Fuzzy Processing, generate decidable user's the exposure and the transferred image of the transfer printing situation in the transfer process, according to this transferred image the gray tone portion after proofreading and correct is estimated, according to this evaluation result, can be corrected into the permissible range (constituting 2) that the figure that makes after the correction reaches the user once again.And, also can store this evaluation result in advance, and can carry out defect correction (constituting 2 application) to gray tone portion according to the data of this storage.
In the present invention, use the transferred image of Fuzzy Processing, for example, can obtain (constituting 6) by the image that comprises the gray tone portion after the correction is defocused to handle.More particularly, for example, behind the image of the gray tone portion after obtaining to comprise correction, defocus processing (defocus processing) (microscopical focal shift (bluring) is observed) and can obtain by microscopical with microscope.
Below, the condition enactment of Fuzzy Processing of the present invention is described.The condition enactment of Fuzzy Processing is a condition of setting the transferred image that can generate the exposure that can judge the user and the transfer printing situation in the transfer process for.For example, research user's conditions of exposure (for example, having a mind to make the gray tone figure not understand the not enough excessively illuminate condition of the conditioned disjunction of picture etc.) carries out corresponding therewith Fuzzy Processing.
Because there is repetitive pattern in gray tone portion, thereby there is the CD deviation of repetitive pattern herein.After having considered these CD deviations,, under the condition that " upper limit (for example thick figure) " and " lower limit (for example thin figure) " all do not have to influence, expose in the user there.For this reason, the figure after the correction is necessary to obtain the gray tone effect that enters between the upper limit～lower limit (tolerance deviation scope).As an example, corresponding with the upper limit～lower limit (tolerance deviation scope), set the Fuzzy Processing condition.This Fuzzy Processing condition is to judge the situation that whether obtains the gray tone effect in the CD acceptable precision.
More particularly, for example, before do not made the fuzzy condition enactment of microscopical focus become the Fuzzy Processing condition all separating picture at the normal figure (in the CD acceptable precision) of gray tone portion.This Fuzzy Processing condition is for roughly equal with the transfer printing state of the light of user's exposure and the reality in the transfer process with simplation validation.For example, when the upper limit of uncorrected normal figure (for example thick figure) was not separated picture and before microscopical focus blured to observe, the gray tone portion of being made up of normal figure demonstrated roughly uniform luminance (roughly even grey).At for the gray tone portion of forming by this normal figure that demonstrates uniform luminance roughly (roughly evenly grey), the gray tone portion that comprises the correction graph of part with to a certain degree above dark (to a certain degree above Dark grey) or to a certain degree above bright (to a certain degree above shallow (light) grey), the evaluation correction unit is comprehensively judged in bright (shallow), the area of the part of dark (dense) or to a certain degree above bright (shallow (light) grey to a certain degree) of the part of to a certain degree above dark (to a certain degree above Dark grey), position etc.
As another example, the conditions of exposure of the gray mask that uses for the user be not usual conditions situation (for example, employing has a mind to make conditioned disjunction that the gray tone figure the do not understand picture situation etc. of not enough illuminate condition excessively), in order in the exposure that makes the user according to correct focus (focal state) and the transfer process scope of problem to take place and the upper limit or the lower limit of state obviously changed, be the Fuzzy Processing condition making the condition enactment of microscopical focal shift (bluring) according to correct focus (focal state).By the method for simulation, can confirm that the transfer printing state of light of this Fuzzy Processing condition and user's exposure and the reality in the transfer process is roughly the same.
It is the situation (constituting 3) that has formed the zone of the following shading graph of the limiting resolution of the exposure machine that uses gray mask that defect correction of the present invention and decision method are particularly suitable for gray tone portion.This is because because the influence of live width thickness is by Fuzzy Processing and obviousization, thereby can be under user's conditions of exposure, whether defectiveness carries out the high precision judgement to the figure of gray tone portion.
In addition, also to be applied to gray tone portion be the situation that has formed the zone of semi-transparent film for defect correction of the present invention and decision method.
In the present invention, preferred above-mentioned defect correction operation and transferred image generation operation uses same device to carry out (constituting 4).This is because after proofreading and correct on the means for correcting, can obtain splendid effect on the identical means for correcting correction position after just being corrected being estimated.
The present invention makes with gray mask or display device manufacturing effective especially with the defect correction and the decision method of gray mask as LCD.This is because along with the high-definition of display device in recent years, the solution of above-mentioned variety of issue becomes the task of top priority.
[embodiment]
Fig. 2 is the synoptic diagram that the summary of the laser-adjusting device (laser CVD repair apparatus) that is used to illustrate that embodiment uses constitutes.
In the figure, laser beam 11 is by beam expander 12 expansions, form parallel rays by plano-convex lens 13, pass through rectangle slit (variable rectangular diaphragm) 14 shapings of variable rectangular again, dwindle and imaging on photomask 20 by imaging len (object lens) 15, become the rectangular laser correcting area of rectangular aperture picture.In Fig. 2, direct light 16 is to be used for using before laser radiation 17 pairs of rectangular laser correcting areas as the picture on the photomask 20 of variable rectangular diaphragm 14 of microscope to confirm, and be used to use microscope 17 the illuminator of laser-adjusting zone location at defective locations, illumination (Halogen lamp LEDs etc.) 18 are positioned at the opposition side of imaging len (object lens) 15, formation is clamped between the two state with photomask 20, and formation can use microscope 17 to observe the illuminator that sees through light of photomasks 20.In addition, the location in defective locations and laser-adjusting zone is to carry out coarse localization being placed with on the XY coarse motion objective table of mask, correctly locatees on XY fine motion objective table afterwards.
In this device, have: can remove function (laser preparing function) except that the laser of striping (black defect correction) by laser radiation, and the laser film forming function (laser CVD function) that can form film (white defect correction) by laser radiation.
In the present invention, imaging len (object lens) 15 is moved, carry out Fuzzy Processing (defocusing processing).
Fig. 1 is used to illustrate the white defect correction of gray tone portion of embodiments of the invention and the partial top view of decision method.
Normal figure for the gray tone portion 3 shown in Fig. 1 (1), shown in Fig. 1 (2), when huge figure shortcoming takes place in the shading graph 3a of gray tone portion 3, by laser-adjusting device shown in Figure 2 etc., use and normal figure be the slit of same size roughly, form calbrating film 4, be similar to the correction (the CD acceptable precision of normal figure is outer) (Fig. 1 (3)) of normal figure.At this moment, owing to use laser repairing device to remove the thick part of live width the trickle transmittance section 3b (glass portion figure) and the shading graph 3a of adjacency are affected, thereby will not carry out.
The state that figure after proofreading and correct has been carried out certain certain Fuzzy Processing (defocusing processing) is shown in Fig. 1 (4).Specifically, the imaging len (object lens) 15 of laser-adjusting device shown in Figure 2 is moved, carry out Fuzzy Processing (defocusing processing).And, normal figure has been carried out the state (the perhaps state of the normal figure in the same field of view) of identical Fuzzy Processing (defocusing processing) shown in Fig. 1 (4 ').At this moment, the gray tone portion of being made up of normal figure demonstrates roughly uniform luminance (roughly even grey).For the gray tone portion of forming by this normal figure that demonstrates uniform luminance roughly (roughly evenly grey), comprise and have the to a certain degree gray tone portion of the correction graph of the part of above dark (to a certain degree above Dark grey), the evaluation correction unit is comprehensively judged in dark (deeply), the area of the part of to a certain degree above dark (to a certain degree above Dark grey), position etc.
In the present embodiment, can be to the influence of the live width thickness by Fuzzy Processing obviousization, promptly under user's conditions of exposure the figure of gray tone portion whether defectiveness carries out the high precision judgement.
In the present embodiment, after proofreading and correct on the means for correcting, can estimate the correction position after just being corrected on the identical means for correcting.
Fig. 4 is used to illustrate the white defect correction of gray tone portion of comparative example of the present invention and the partial top view of decision method.
Normal figure for the gray tone portion 3 shown in Fig. 4 (1), shown in Fig. 4 (2), when huge figure shortcoming takes place in the shading graph 3a of gray tone portion 3, by laser-adjusting device shown in Figure 2 etc., use and normal figure be the slit of same size roughly, form calbrating film 4, be similar to the correction (the CD acceptable precision of normal figure is outer) (Fig. 4 (3)) of normal figure.At this moment, owing to use laser repairing device to remove the thick part of live width the trickle transmittance section 3b (glass portion figure) and the shading graph 3a of adjacency are affected, thereby will not carry out.
For the figure after proofreading and correct, Fig. 4 (4) has represented to have carried out the synoptic diagram of the state of that carry out usually and synthetic comparison normal figure (getting the difference that is examined figure and normal figure compares).With the result of the synthetic comparison of normal figure be to have only correction unit to be emphasized, and be difficult to carry out whether qualified judgement.That is to say that it is difficult carrying out common audit by comparison.
In addition, the invention is not restricted to the foregoing description.
In the above-described embodiments, enumerated the situation of the correction (the CD acceptable precision of normal figure is outer) that is similar to normal figure, yet for: (1) is though obtain and the gray tone effect of normogram just as grade, yet the situation that forms its shape and/or arrange different correction graphs, (2) the glass damage that causes by correction and make the low situation of transmittance of glass substrate, (3) carry out the situation of the judgement of normal figure and all correction graphs, can be under user's conditions of exposure, whether defectiveness is judged to the figure of gray tone portion.
In addition,, can observe, can overcome the judgement of the defect correction of above-mentioned the 2nd problem by seeing through light about " transmittance that is damaged the glass substrate that causes by glass is low " of above-mentioned (2).
As described above such, according to the present invention, situation for the judgement of carrying out normal figure and all correction graphs, can provide a kind of and can be easily gray tone portion whether generation problem in user's exposure and transfer process be judged judgement (check, the guarantee) method of the gray mask of (inspection).
And, a kind of defect correction method that utilizes the gray mask of above-mentioned decision method can be provided, like this, can provide a kind of gray mask that makes the gray tone portion that comprises correction graph that problem not take place in user's exposure and transfer process.
Claims (7)
1. the defect correction method of a gray mask, this gray mask has:
Gray tone portion is that light transmission capacity has been carried out the zone of adjusting, and its objective is the light transmission capacity that sees through this regional light by reducing, and optionally changes the thickness of photoresist;
Light shielding part; With
The transmittance section,
It is characterized in that, comprising:
The operation that the defective that takes place in above-mentioned gray tone portion is proofreaied and correct;
Image to the gray tone portion after the above-mentioned correction is implemented Fuzzy Processing, generates the operation of transferred image; And
Estimate the operation of the gray tone portion after the above-mentioned correction according to above-mentioned transferred image.
2. the defect correction method of gray mask according to claim 1 is characterized in that, comprises the operation of proofreading and correct the gray tone portion after the above-mentioned correction according to above-mentioned evaluation result once again.
3. the defect correction method of gray mask according to claim 1 and 2 is characterized in that, above-mentioned gray tone portion is the zone that has formed the shading graph below the limiting resolution of the exposure machine that uses gray mask.
4. the defect correction method of gray mask according to claim 1 and 2 is characterized in that, above-mentioned defect correction operation and transferred image generate operation and use same device to carry out.
5. the defect correction method of gray mask according to claim 1 and 2, it is characterized in that, gray tone portion after the above-mentioned correction comprises the figure with normal figure shape approximation, perhaps obtain with normogram just as the gray tone effect that waits shape and/or arrange different correction graphs.
6. the defect correction method of gray mask according to claim 1 and 2 is characterized in that, above-mentioned Fuzzy Processing is the processing that the image that comprises the gray tone portion after the above-mentioned correction is defocused.
7. the defect correction method of gray mask according to claim 1 is characterized in that, gray mask is that LCD makes with mask or display device manufacturing mask.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP103784/2003 | 2003-04-08 | ||
| JP2003103784A JP4294359B2 (en) | 2003-04-08 | 2003-04-08 | Gray tone mask defect correction method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1536439A true CN1536439A (en) | 2004-10-13 |
| CN1261818C CN1261818C (en) | 2006-06-28 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB200410033705XA Expired - Lifetime CN1261818C (en) | 2003-04-08 | 2004-04-08 | Gray mask defect correction method |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP4294359B2 (en) |
| KR (1) | KR100650365B1 (en) |
| CN (1) | CN1261818C (en) |
| TW (1) | TWI232488B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102445833A (en) * | 2010-09-30 | 2012-05-09 | Hoya株式会社 | Photo mask defect correction method, pattern transferring method, photo mask and manufacturing method thereof |
| CN101788757B (en) * | 2009-01-27 | 2012-07-04 | Hoya株式会社 | Multi-color light adjustment mask, its manufacture method and a pattern transfer-printing method |
| CN111736424A (en) * | 2019-03-25 | 2020-10-02 | 日本株式会社日立高新技术科学 | Mask defect correction device and mask defect correction method |
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-
2003
- 2003-04-08 JP JP2003103784A patent/JP4294359B2/en not_active Expired - Lifetime
-
2004
- 2004-04-08 TW TW093109725A patent/TWI232488B/en active
- 2004-04-08 KR KR1020040024060A patent/KR100650365B1/en active IP Right Grant
- 2004-04-08 CN CNB200410033705XA patent/CN1261818C/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101788757B (en) * | 2009-01-27 | 2012-07-04 | Hoya株式会社 | Multi-color light adjustment mask, its manufacture method and a pattern transfer-printing method |
| CN102445833A (en) * | 2010-09-30 | 2012-05-09 | Hoya株式会社 | Photo mask defect correction method, pattern transferring method, photo mask and manufacturing method thereof |
| CN111736424A (en) * | 2019-03-25 | 2020-10-02 | 日本株式会社日立高新技术科学 | Mask defect correction device and mask defect correction method |
| CN111736424B (en) * | 2019-03-25 | 2024-02-13 | 日本株式会社日立高新技术科学 | Mask defect correction device and mask defect correction method |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI232488B (en) | 2005-05-11 |
| TW200425246A (en) | 2004-11-16 |
| KR100650365B1 (en) | 2006-11-27 |
| CN1261818C (en) | 2006-06-28 |
| JP4294359B2 (en) | 2009-07-08 |
| KR20040087947A (en) | 2004-10-15 |
| JP2004309826A (en) | 2004-11-04 |
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