CN1534330A - Variable colour pixel unit - Google Patents

Variable colour pixel unit Download PDF

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Publication number
CN1534330A
CN1534330A CNA031077528A CN03107752A CN1534330A CN 1534330 A CN1534330 A CN 1534330A CN A031077528 A CNA031077528 A CN A031077528A CN 03107752 A CN03107752 A CN 03107752A CN 1534330 A CN1534330 A CN 1534330A
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Prior art keywords
electrode
color
pixel unit
variable pixel
unit according
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CNA031077528A
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Chinese (zh)
Inventor
蔡熊光
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Qualcomm MEMS Technologies Inc
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Prime View International Co Ltd
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Priority to CNA031077528A priority Critical patent/CN1534330A/en
Publication of CN1534330A publication Critical patent/CN1534330A/en
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Abstract

A color-variable pixel unit has at least the first electrode, the second electrode (deformable reflecting electrode) and the third electrode, all of which are parallelly arranged. The light beam comes in from one side of the first electrode, is interferred between the first and the second electrodes, and is reflected out by the first electrode. The frequency of the reflected light is associated with the distance between the first and the second electrodes. Applying a voltage to the third electrode can change the distance between the first and the second electrodes, so changing the frequency of reflected light.

Description

Color-variable pixel unit
Technical field
The present invention relates to a kind of color-variable pixel unit, relate in particular to a kind of color-variable pixel unit of light interference type display.
Background technology
Flat-panel screens is owing to have little, the lightweight characteristic of volume, at the Portable display device, and very advantageous in the monitor market of using, little space.Flat-panel screens is now removed LCD (LiquidCrystal Display, LCD), organic electric exciting light-emitting diode (Organic Electro-LuminescentDisplay, OLED) and plasma display (Plasma Display Panel, PDP) or the like outside, a kind of plane display mode of light interference type that utilizes is suggested.
See also U.S. USP5835255 patent, this patent has disclosed the adjustment element arrays (Array of Modulation) of a visible light, can be used as the usefulness of flat-panel screens.See also Fig. 1, Fig. 1 is the existing diagrammatic cross-section of adjusting element.Each is adjusted element 100 and comprises twice wall (Wall) 102 and 104, and 102,104 supported objects of twice wall support and form a chamber (Cavity) 108.The distance that the twice wall is 102,104, just the length of chamber 108 is D.One of them is one to have absorptivity for a wall 102,104, but the partial penetration partially reflecting layer of absorption portion visible light, and another then is to utilize driven can produce the reflection horizon of deformation.When incident light passes wall 102 or 104 and when entering in the chamber 108, in the wavelength of the visible light spectrum that incident light is all (Wave Length represents with λ), the wavelength (λ of coincidence formula 1.1 is only arranged 1) can produce constructive interference and export.Wherein N is a natural number.In other words,
2D=Nλ (1.1)
When chamber 108 length D satisfy the integral multiple of incident light half wavelength, then can produce constructive interference and export precipitous light wave.At this moment, observer's eyes are observed along the direction of incident light incident, can see that wavelength is λ 1Reflected light, therefore, be in "open" state to adjusting element 100.
Fig. 2 is the existing diagrammatic cross-section of adjusting after element adds voltage.Please refer to Fig. 2, under the driving of voltage, wall 104 is owing to electrostatic attraction produces deformation, sinks to the direction of wall 102.At this moment, the distance that the twice wall is 102,104, just the length of chamber 108 is also non-vanishing, but is d, and d can equal zero.At this moment, the D in the formula 1.1 will replace with d, in the wavelength X of the visible light spectrum that incident light is all, the visible wavelength (λ of coincidence formula 1.1 only be arranged 2) can produce constructive interference, export to penetrate wall 102 via the reflection of wall 104.102 pairs of wavelength of wall are λ 2Light have higher absorptivity, at this moment, all visible light spectrum of incident light is all by filtering, for the observer who observes along the direction of incident light incident wall 102, with the reflected light that can not see in any visible light spectrum, therefore, be in "off" state to adjusting element 100.
For monochromatic flat-panel screens, adjust element 100 and forms to utilize and voltage-operatedly come the array of gauge tap enough, but for the color plane display, adjust element 100 obviously not inadequately.Existing have three adjustment elements of different chamber length and become a pixel as manufactured, and as shown in Figures 3 and 4, Fig. 3 and Fig. 4 are the existing color plane display diagrammatic cross-section of adjusting the element manufacturing of utilizing.Fig. 3 is existing multiple field color plane display diagrammatic cross-section.Multiple field color plane display 200 has comprised that three layers are adjusted element 202,204 and 206.When incident light 208 incidents, adjust the coloured light that element 202,204 and 206 can reflect a wavelength respectively for three layers, for example, ruddiness, green glow or blue light.Adjust the coloured light why element 202,204 and 206 can reflect different wave length for three layers, it is to utilize different chamber length and select different mirror surfaces for use.The mode of three plies adjustment element is made the resulting resolution rate variance of method of color plane display, and as shown in FIG., the brightness of blue light is low than the brightness of ruddiness.
Fig. 4 is existing array color plane display diagrammatic cross-section.In the existing array color plane display 300, on same base material 301, form three respectively and adjust element 302,304 and 306 arrays, when incident light 308 incidents, adjust the coloured light that element 302,304 and 306 different chamber length can reflect different wave length respectively for three, for example, ruddiness, green glow or blue light.The arrangement of adjusting the element arrays formula is except selecting different mirror surfaces for use, the more important thing is that the resolution and the brightness between various coloured light that can provide splendid are even, but, because the difference of chamber length, adjusting element for three must make respectively, and for example, making needs when adjusting element 302 to cover the zone of adjusting element 304 and 306 to form with photoresistance, cost is higher itself in just complicated manufacturing, more seriously owing to complicated manufacturing makes product percent of pass to improve.In addition, because the deviation on making, for example the deviation of the length of chamber can make when the coloured light that reflects produces red displacement (Red Shift) or blue displacement (Blue Shift), then can not revise fully, and base material can only be scrapped.
Therefore, provide one can have high resolving power, high brightness, manufacturing is simple and easy and product percent of pass is high colorama interferometric display simultaneously, become an important research project.
In summary, described existing light interference type display on reality is used, obviously exists inconvenience and defective, so be necessary to be improved.
Summary of the invention
At above-mentioned defective, fundamental purpose of the present invention is to provide a kind of color-variable pixel unit, is applicable to make the colorama interferometric display, can have high resolving power and high brightness.
Another object of the present invention is to be to provide a kind of color-variable pixel unit, is applicable to make the colorama interferometric display, makes simple and easy and product percent of pass is high.
Another purpose of the present invention is to be to provide a kind of color-variable pixel unit, is applicable to make the colorama interferometric display, can revise the deviation that color-variable pixel unit is made in follow-up manufacturing.
According to above-mentioned purpose of the present invention, a kind of adjustment element is proposed in a preferred embodiment of the present invention, can be used as a color-variable pixel unit, at least comprise one first electrode, one second electrode and a third electrode, wherein, three electrodes become arrangement arranged side by side approximately, and second electrode is between first electrode and third electrode.First electrode is half through electrode, and second electrode then is a deformable reflecting electrode.Supported object supports and forms a chamber between first electrode and second electrode, and the length of this chamber is D.
Adjusting element is under the "open" state, between first electrode and second electrode, do not apply voltage, when incident light by the one side incident of first electrode and after by generation interference of light effect in first electrode and the second interelectrode chamber, in the wavelength of the visible light spectrum that incident light is all, only there is the wavelength of coincidence formula 1.1 can produce constructive interference, and penetrates first electrode and export via the reflection of second electrode.The length of catoptrical frequency and chamber is relevant.Third electrode is an operation electrode, on third electrode, can apply one first voltage, because second electrode is a deformable reflecting electrode, this second electrode can be subjected to the influence of the voltage on the third electrode, can be to be attracted or to be ostracised and to have changed first electrode and the second interelectrode distance, the just length of chamber.By formula 1.1 as can be known, the change of chamber length can change catoptrical wavelength and obtain different coloured light, for example ruddiness, green glow or blue light.In addition, as prior art as can be known, between first electrode and second electrode, add one second voltage, under the driving of second voltage, second electrode that can be out of shape produces deformation because of electrostatic attraction, direction to first electrode sinks, and makes the adjustment element be in "off" state, does not reflect any visible light.
According to another object of the present invention, provide an array formula color plane display device structure in a preferred embodiment of the present invention.On same base material, form one respectively and adjust element arrays, per three adjustment elements can form a pixel, each is adjusted element and comprises one first electrode, one second electrode and a third electrode at least, wherein, three electrodes become the arrangement arranged side by side and second electrode approximately between first electrode and third electrode.First electrode is half through electrode, and second electrode then is a deformable reflecting electrode.Supported object supports and forms a chamber between first electrode and second electrode, and the length of this chamber is D.Adjust elements at three and wherein apply different voltage on two or three the third electrode, because second electrode is a deformable reflecting electrode, second electrode can be subjected to the influence of the voltage on the third electrode, can be to be attracted or to be ostracised and to have changed first electrode and the second interelectrode distance, the length of chamber just, therefore, three chambeies of adjusting in the element are long all inequality.Adjusting element is under the "open" state, does not apply voltage between first electrode and second electrode, and by formula 1.1 as can be known, the change of chamber length can change catoptrical wavelength and obtain different coloured light, for example ruddiness, green glow or blue light.Same, as prior art as can be known, between first electrode and second electrode, add a voltage, under the driving of voltage, second electrode that can be out of shape produces deformation because of electrostatic attraction, direction to first electrode sinks, and makes the adjustment element be in "off" state, does not reflect any visible light.
The color plane display of forming according to the array of adjustment element of the present invention, the advantage that has kept existing array color plane display, have high resolving power and high brightness, simultaneously also have the advantage of existing multiple field color plane display, promptly make simple and easy and product percent of pass is high.Except the advantage that possesses existing two kinds of light interference type color plane displays, can also utilize the voltage that applies on the third electrode to finely tune the length of adjusting element inner cavity chamber, to revise the deviation of the chamber length that may produce, to improve the qualification rate of product because of the error of making.Hence one can see that, adjustment element of the present invention not only keeps the existing all advantages of light interference type color plane display simultaneously when forming array, high resolving power, high brightness, manufacturing is simple and easy and product percent of pass high outside, can also increase the nargin in the manufacturing, improve the product percent of pass of light interference type color plane display.
Brief Description Of Drawings
Below in conjunction with accompanying drawing,, will make technical scheme of the present invention and other beneficial effects apparent by detailed description to preferred embodiment of the present invention.
In the accompanying drawing,
Fig. 1 is the existing diagrammatic cross-section of adjusting element;
Fig. 2 is the existing diagrammatic cross-section of adjusting after element adds voltage;
Fig. 3 is existing multiple field color plane display diagrammatic cross-section;
Fig. 4 is existing array color plane display diagrammatic cross-section;
Fig. 5 A is a kind of adjustment element section synoptic diagram of first preferred embodiment according to the present invention;
Fig. 5 B is a diagrammatic cross-section of adjusting the function of third electrode in the element; And
Fig. 6 is a kind of adjustment element arrays diagrammatic cross-section of second preferred embodiment according to the present invention.
Embodiment
Hereinafter, will describe the present invention in detail.
For allow color-variable pixel unit structure provided by the present invention clear more for the purpose of, in the embodiment of the invention 1, describe the structure that each adjusts element in detail.In addition, for make the present invention with adjust the formed light interference type color plane of element arrays display clear more for the purpose of, in the embodiment of the invention 2, further describe.
Embodiment 1
Please refer to Fig. 5 A, Fig. 5 A is a kind of adjustment element section synoptic diagram of first preferred embodiment according to the present invention.One adjusts element 500, can be used as a color-variable pixel unit, at least comprise one first electrode 502, one second electrode 504 and a third electrode 506, wherein, three electrodes become the arrangement arranged side by side and second electrode 504 approximately between first electrode 502 and third electrode 506.First electrode 502 and one second electrode 504 are selected from narrow wavestrip (Narrowband) minute surface, wide wavestrip (Broadband) minute surface, nonmetal mirror and speculum or it makes up the group that is formed.
First electrode 502 is a part of penetrating component reflecting electrode, generally is made up of a base material 5021, an absorption layer 5022 and a dielectric layer 5023.When incident light passed first electrode 502, the part intensity absorbed layer 5022 of incident light absorbed.Wherein, the material that forms base material 5021 can be transparent conductive material, for example indium oxide tin glass (ITO) or indium zinc oxide glass (IZO); The material that forms absorption layer 5022 can be metal, for example aluminium, chromium, silver or the like; The material that forms dielectric layer 5023 can be monox, silicon nitride or metal oxide.The part of metal oxide can partially absorb layer 5022 by direct oxidation and obtain.504 at second electrode is a deformable reflecting electrode, can be out of shape under the control of voltage and moves up and down.Generally speaking the material that forms second electrode 504 can be dielectric material/not (partly) transparent conductive material or metal material/transparent conductive material.
First electrode 502 and 504 supported objects 508 of second electrode support and form a chamber 510, and the length of chamber is D.506 of second electrode 504 and third electrodes also supported object 512 support.
Adjusting element 500 is under the "open" state, keep the length of D at the chamber 510 of 504 at first electrode 502 and second electrode, when incident light 514 by the 502 1 side incidents of first electrode and after by generation interference of light effect in the chamber 510 of 504 at first electrode 502 and second electrode, in the wavelength of the visible light spectrum that incident light 514 is all, only have the wavelength of coincidence formula 1.1 can produce constructive interference, the reflection by second electrode 504 penetrates first electrode 502 and exports.Wherein, the length of catoptrical frequency and chamber is relevant.
Please refer to Fig. 5 B, Fig. 5 B is a diagrammatic cross-section of adjusting the function of third electrode in the element.Third electrode 506 is an operation electrode, can apply a voltage V on third electrode 506 1, because second electrode 504 is a deformable reflecting electrode, second electrode 504 can be subjected to the voltage V on the third electrode 506 1Influence, can change the distance of 504 at first electrode 502 and second electrode near (position 5041) or away from (position 5042) third electrode 506 because of being attracted or being ostracised, just the length of chamber 501 changes over D by D 1Or D 2By formula 1.1 as can be known, the change of chamber 501 length can change catoptrical wavelength and obtain different coloured light, for example ruddiness, green glow or blue light.
Please continue B, by prior art as can be known, add a voltage V at first electrode 502 and 504 at second electrode with reference to Fig. 5 2, at voltage V 2Driving under, second electrode 504 that can be out of shape produces deformation because of electrostatic attraction, sink (position 5043) to the direction of first electrode 502, adjusts element 500 and is in "off" state and make, and does not reflect any visible light.
At the monochromatic flat-panel screens of light interference type, compared with prior art, utilize the adjustment element of present embodiment can't increase the step of manufacturing as pixel cell, if but be not the length of original design because of the deviation on making makes the length of chamber, or when making the minute surface characteristic of electrode depart from designed reflected light wavelength because of the deviation on making, can utilize the voltage that applies on the third electrode to finely tune the length of adjusting element inner cavity chamber, revise possible foozle, to improve the qualification rate of product.
Embodiment 2
Please refer to Fig. 6, Fig. 6 is a kind of adjustment element arrays diagrammatic cross-section of second preferred embodiment according to the present invention.One adjusts element arrays 600, and this adjustment element arrays 600 has 602,604 and 606, three adjustment of three parallel adjustment elements element 602,604 and 606 can constitute a pixel, and wherein, each adjusts element can be as a color-variable pixel unit.Each structure of adjusting element all with embodiment 1 in identical.One control circuit 608 is attached to third electrode 6023, on 6043 and 6063, control circuit 608 can be distinguished or simultaneously to third electrode 6023,6043 and 6063 apply identical or different voltage, because second electrode 6022,6042 and 6062 is a deformable reflecting electrode, second electrode 6022,6042 and 6062 can be subjected to third electrode 6023, the influence of the voltage on 6043 and 6063, can change first electrode 6021 because of being attracted or being ostracised, 6041 and 6061 and second electrode 6022,6042 and 6062 distance, just the length of chamber is adjusted element 602 and make, 604 and 606 have different chamber 6102,6104 and 6106 have different length d 1, d 2And d 3Adjusting element 602,604 and 606 is under the "open" state, by formula 1.1 as can be known, and chamber length d 1, d 2And d 3Design can produce the reflected light of different wave length, for example ruddiness, green glow or blue light.
Same, by prior art as can be known, one drive circuit 612 is attached to adjustment element 602, on 604 and 606, driving circuit 612 can be distinguished or simultaneously at this first electrode 6021,6041 and 6061 and this second electrode 6022,6042 and 6062 apply a voltage, under the driving of voltage, second electrode 6022 that can be out of shape, 6042 and 6062 produce deformation because of electrostatic attraction, to this first electrode 6021,6041 and 6061 direction sinks, adjust element 602 and make, 604 and 606 are in "off" state respectively or simultaneously, and produce ruddiness, green glow, blue light, the coloured light of Hun Heing or do not reflect any visible light in twos.
The color plane display of forming according to the array of the adjustment element of present embodiment, the advantage that has kept existing array color plane display, have high resolving power and high brightness, simultaneously also have the advantage of existing multiple field color plane display, promptly make simple and easy and product percent of pass is high.
Than existing array color plane display, the length of the array middle chamber of the adjustment element of present embodiment is identical, the variation of chamber length is controlled by control circuit, rather than in manufacture process, form the adjustment unit of different chamber length, make simple and easy and and product percent of pass height.
Than existing multiple field color plane display, the array of the adjustment element of present embodiment, it is in the same plane that all can be used to produce the adjustment element that reflects coloured light, incident light need not penetrate the adjustment element of multilayer to reflect different coloured light, therefore have high resolving power and high brightness, and, existing multiple field color plane display arrives the adjustment element of position, back for the adjustment element that incident light is effectively passed be positioned at the front position, and result's (reflected light of green wavelength or blue light wavelength) of the interference of light in position, the back adjustment element can penetrate front position adjustment element effectively, three types adjust first electrode of element and the employed material of second electrode is formed and thickness all needs inequality, manufacture process seems simply, but in fact is still suitable complexity.By contrast, the complexity of the manufacturing of the array of adjustment element of the present invention is not higher than the existing complexity of making.
Except the advantage that possesses existing two kinds of light interference type color plane displays, the present invention can also utilize the voltage that applies on the third electrode to finely tune the length of adjusting element inner cavity chamber, be used to revise the deviation of the chamber length that may produce because of foozle, to improve product percent of pass.
Be understandable that; for the person of ordinary skill of the art; can make other various corresponding changes and distortion according to technical scheme of the present invention and technical conceive, and all these changes and distortion all should belong to the protection domain of accompanying Claim of the present invention.

Claims (13)

1, a kind of color-variable pixel unit is characterized in that, this color-variable pixel unit comprises at least:
One first electrode;
One operation electrode becomes arrangement arranged side by side approximately with this first electrode; And
One second electrode, between between this first electrode and this operation electrode and becomes arrangement side by side approximately, wherein form a chamber between this second electrode and this first electrode, wherein the length of this chamber can make an incident light interfere in this chamber, and the part that makes specific wavelength in this incident light is reflected and is appeared this color-variable pixel unit, between this operation electrode and this second electrode, apply the length that a voltage changes this chamber, to obtain the reflected light of different wave length.
2, color-variable pixel unit according to claim 1 is characterized in that, can form a light interference type color plane display, and this light interference type color plane display comprises at least:
One control circuit;
One drive circuit; And
One color-variable pixel unit array;
Wherein this control circuit and this operation electrode electrically connect the visible light that can reflect specific wavelength with the length of controlling the chamber in this color-variable pixel unit, and this driving circuit electrically connects this first electrode and this second electrode to control the switch of this color-variable pixel unit.
3, color-variable pixel unit according to claim 1 and 2 is characterized in that, this first electrode comprises at least:
One base material;
One absorption layer; And
One dielectric layer.
4, color-variable pixel unit according to claim 3 is characterized in that, this base material is a transparent conductive material.
5, color-variable pixel unit according to claim 3 is characterized in that, the material of this dielectric layer can be monox, silicon nitride or metal oxide.
6, color-variable pixel unit according to claim 3 is characterized in that, this absorption layer can be metal.
7, color-variable pixel unit according to claim 3 is characterized in that, this base material is indium tin oxidation glass or indium zinc oxidation glass.
8, color-variable pixel unit according to claim 1 and 2 is characterized in that, this first electrode and this second electrode are selected from narrow wavestrip minute surface, wide wavestrip minute surface, nonmetal mirror and speculum or it makes up the group that is formed.
9, color-variable pixel unit according to claim 1 and 2 is characterized in that, this second electrode is for producing the electrode of deformation up and down.
10, color-variable pixel unit according to claim 1 and 2 is characterized in that, this second electrode is transportable electrode.
11, color-variable pixel unit according to claim 1 and 2 is characterized in that, this second electrode comprises an opaque conductive material or a semi-transparent conductive material at least.
12, color-variable pixel unit according to claim 11 is characterized in that, this semi-transparent conductive material can be indium tin oxidation glass or indium zinc oxidation glass.
13, color-variable pixel unit according to claim 1 and 2 is characterized in that, comprises that also a plurality of stilts are between this first electrode and this second electrode and between this second electrode and this operation electrode.
CNA031077528A 2003-03-28 2003-03-28 Variable colour pixel unit Pending CN1534330A (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101872579B (en) * 2009-04-22 2014-03-12 季中 Display panel, display method and display device
CN104460172A (en) * 2014-12-09 2015-03-25 京东方科技集团股份有限公司 Micro electro mechanical system display unit, manufacture method thereof and display device
WO2018068480A1 (en) * 2016-10-14 2018-04-19 Boe Technology Group Co., Ltd. Display substrate and manufacturing method thereof, display apparatus and driving method thereof
CN108196362A (en) * 2018-01-03 2018-06-22 京东方科技集团股份有限公司 Dot structure, image element driving method, array substrate, display device

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101872579B (en) * 2009-04-22 2014-03-12 季中 Display panel, display method and display device
CN104460172A (en) * 2014-12-09 2015-03-25 京东方科技集团股份有限公司 Micro electro mechanical system display unit, manufacture method thereof and display device
CN104460172B (en) * 2014-12-09 2017-07-04 京东方科技集团股份有限公司 Microelectromechanicdisplay display unit and preparation method thereof, display device
WO2018068480A1 (en) * 2016-10-14 2018-04-19 Boe Technology Group Co., Ltd. Display substrate and manufacturing method thereof, display apparatus and driving method thereof
CN107957639A (en) * 2016-10-14 2018-04-24 京东方科技集团股份有限公司 Display base plate and preparation method thereof, display device and its driving method
US20180348551A1 (en) * 2016-10-14 2018-12-06 Boe Technology Group Co., Ltd. Display substrate and manufacturing method thereof, display apparatus and driving method thereof
CN107957639B (en) * 2016-10-14 2020-04-24 京东方科技集团股份有限公司 Display substrate and manufacturing method thereof, display device and driving method thereof
CN108196362A (en) * 2018-01-03 2018-06-22 京东方科技集团股份有限公司 Dot structure, image element driving method, array substrate, display device

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