CN1520961A

CN1520961A - Lapping apparatus and lapping method

Info

Publication number: CN1520961A
Application number: CNA2004100039898A
Authority: CN
Inventors: С; 小又正博; 饭泉雅彦; 长谷川清; 荻野崇; 近藤智浩; 武田和夫; ֮; 渡边孝文; ־; 千田义之; 松下靖志
Original assignee: Nissan Motor Co Ltd
Current assignee: Nissan Motor Co Ltd
Priority date: 2003-02-12
Filing date: 2004-02-12
Publication date: 2004-08-18
Anticipated expiration: 2024-02-12
Also published as: EP1447172B1; KR100547640B1; KR20040073380A; US7413498B2; DE602004007418T2; EP1447172A1; US20040157530A1; CN100450715C; DE602004007418D1

Abstract

A film feeder (FF1) feeds a film (1), a first drive (20) rotates a work (W), a second drive (30) moves the work (W) relative to the film(1), a shoe set handler (40) handles the shoe set (2) to press the film (1) against the work (W), and a deterioration delayer (C) is configured to delay an abrasivity deterioration of the film (1).

Description

Milling apparatus and Ginding process

Technical field

The present invention relates to a kind of milling apparatus and Ginding process, more particularly, the present invention relates to milling apparatus and the Ginding process of a kind of use grinding abrasive film (being called " grinding film " or " film " hereinafter) as instrument.

Background technology

Development for the demand of high-precision workpiece has in recent years caused using grinding film to finish the attention of super polishing.

Disclosed in Japanese patent application authorization publication number No.7-237116, for super polishing, the abradant surface of grinding film is pressed in the back has on the workpiece of pushing base plate, make workpiece rotate and vibration so that it is ground.

Summary of the invention

The abradant surface of grinding film has a large amount of abrasive particles adhered thereto, and is easy to very fast one-tenth piece, causes the deterioration of abrasiveness.

On the basis of having considered above problem, made the present invention.Therefore an object of the present invention is to provide a kind of milling apparatus and Ginding process that overcomes described degeneration.

In order to realize this purpose, according to one aspect of the present invention, milling apparatus comprises: grinding film, be constituted for the film feeder of supplying with described film, first drive unit that is configured so that to make workpiece rotate, be configured so that to make described workpiece with respect to second drive unit, the base plate group of described film motion, be constituted for and control the base plate group with the base plate group control device of described mould on workpiece, and be constituted for the degeneration delayer that the abrasiveness that delays described film is degenerated.

According to another aspect of the present invention, Ginding process comprises: supply with grinding film, make workpiece rotate, make described workpiece with respect to described film move, control the base plate group with described mould on workpiece, and the degeneration that delays the abrasiveness of described film.

Description of drawings

When below reading in conjunction with the accompanying drawings, describing in detail, from described description, will more fully understand above-mentioned and other purposes and novel feature of the present invention, wherein:

Fig. 1 is the left side view of the related milling apparatus of first embodiment of the invention;

Fig. 2 is the rearview of closure state of the lap tool of Fig. 1 equipment;

Fig. 3 is the rearview of the open mode of Fig. 2 lap tool;

Fig. 4 is the detail drawing of " A " among Fig. 2;

Fig. 5 is that the film of Fig. 2 lap tool is supplied with time limit figure;

Fig. 6 is that the film of the lap tool of the related milling apparatus of first modification of first embodiment is supplied with time limit figure;

Fig. 7 is that the film of the lap tool of the related milling apparatus of second modification of first embodiment is supplied with time limit figure;

Fig. 8 is the view of the lap tool control system of the related milling apparatus of the 3rd modification of first embodiment;

Fig. 9 is the rearview of closure state of the lap tool of the related milling apparatus of second embodiment of the invention;

Figure 10 is the rearview of the open mode of Fig. 9 lap tool;

Figure 11 is the sectional view of film cleaner of the lap tool of the related milling apparatus of first modification of second embodiment;

Figure 12 is the sectional view of film cleaner of the lap tool of the related milling apparatus of second modification of second embodiment;

Figure 13 is the sectional view of film cleaner of the lap tool of the related milling apparatus of the 3rd modification of second embodiment;

Figure 14 is the left side view of the related milling apparatus of third embodiment of the invention;

Figure 15 is the rearview of closure state of the lap tool of Figure 14 equipment;

Figure 16 is the rearview of the open mode of Figure 15 lap tool;

Figure 17 is the top of Figure 15 lap tool or the sectional view of bottom lap tool;

Figure 18 is the sectional view that line " C1 "-" C1 " cut along Figure 17;

Figure 19 is the sectional view of bottom plate shell of top lap tool of the lap tool of the related milling apparatus of the modification of the 3rd embodiment;

Figure 20 is the sectional view that line " C2 "-" C2 " cut along Figure 19;

Figure 21 is the rearview of closure state of the lap tool of the related milling apparatus of fourth embodiment of the invention;

Figure 22 is the rearview of the open mode of Figure 21 lap tool;

Figure 23 is the detail drawing of " D " among Figure 21;

Figure 24 is the rearview of closure state of the lap tool of the related milling apparatus of fifth embodiment of the invention;

Figure 25 is the detail drawing of lap tool among Figure 24 " E ";

Figure 26 is the sectional view of the film of lap tool among Figure 24;

Figure 27 is the side view of closure state of the lap tool of the related milling apparatus of first modification of the 5th embodiment;

Figure 28 is the characteristic curve diagram of Figure 27 lap tool;

Figure 29 is the side view of the closure state of the related milling apparatus of second modification of the 5th embodiment;

Figure 30 is the left side view of the related milling apparatus of sixth embodiment of the invention;

Figure 31 is the rearview of closure state of the lap tool of Figure 30 equipment;

Figure 32 is the rearview of the open mode of Figure 31 lap tool;

Figure 33 is the detail drawing of " F " among Figure 31;

Figure 34 is the rearview of the top lap tool element of Figure 31 lap tool, and wherein element vibrates along CW (clockwise direction);

Figure 35 is the rearview along the top lap tool element of CCW (counterclockwise) vibration;

Figure 36 is the perspective view of the workpiece of Figure 30 equipment;

Figure 37 is the cross-sectional view of the workpiece at Figure 31 lap tool place;

Figure 38 is the view of the control system of Figure 31 lap tool;

Figure 39 is the rearview of the lap tool of the related milling apparatus of the modification of the 6th embodiment; And

Figure 40 A is the rearview of the top lap tool of Figure 39 lap tool to 40D, and its middle and upper part lap tool is floating to follow the trail of workpiece.

The specific embodiment

Six embodiment of the present invention are described below with reference to accompanying drawings, and its some modification.Components identical or device are represented with identical Reference numeral.

(first embodiment)

The first embodiment of the present invention is described to Fig. 5 now with reference to Fig. 1.

Fig. 1 shows the related milling apparatus 100 as machinery tools of first embodiment in the three dimensions that quadrature X-Y-Z coordinate system limited, wherein equipment 100 have be parallel to the X-axle processing vertically, be parallel to the cross machine of Y-axle and along the working height of Z-axle.

Milling apparatus 100 comprises the frame FR that is fixed in the ground (not shown), be installed on frame FR goes up and is configured so that with the mode of the sliding lower stage 27 with respect to frame FR length travel, and a pair of front and back upper stage 26, described front and back upper stage 26 is installed on the lower stage 27 respectively and is configured so that in the mode of sliding with respect to lower stage 27

lateral displacements.Platform

26,27 has the screwfeed system (not shown) that is controlled by NC (digital control) controller C (as the guidance system of abrasiveness degeneration delayer).

Front upper part platform 26 has the headstock 22 that is mounted thereon and is equipped with the axle 21 that can rotate with chuck 23.Upper back platform 26 has the tailstock 25 that is mounted thereon and is equipped with core 25a.Chuck 23 is suitable for a longitudinal end of clamping work pieces W (for example, the bent axle shown in Fig. 1), cooperates with the core 25a of another longitudinal end of supporting workpiece W, so that this workpiece W is arranged on the position that is used for grinding.

Shaft drive motor M1 drives described 21 so that its rotation by driving-belt 24.By the rotation of encoder S1 detection (according to angular displacement and/or angular speed or rpm (revolutions per minute)) axle 21, the detection signal of encoder S1 is imported among the controller C.When motor M1 was controlled by controller C by order wire La, described workpiece W is controlled must to rotate around its longitudinal axis between chuck 23 and core 25a.

Therefore, constitute NC-control lateral rotation driving mechanism 20 " operatively the motor M1 of Lian Jieing, with 24 with the combination of axle 21 " driving workpiece W is so that its rotation, described lateral rotation driving mechanism 20 can comprise encoder S1, and comprises chuck 23 and core 25a to constitute work piece holder.

Lower stage 27 usually by one group as the spring 34 of the parallel flexible member between the opposed member that is compressed in the rear end of platform 27 and frame FR bias voltage forward, so that the front end of platform 27 and assembling or the circumference that is fixed in the circular cam dish 33 on the eccentric drive shaft 33a contact.CD-ROM drive motor M2 drives described axle 33a so that its rotation by gear train 33b.By the rotation of encoder S2 detection (according to angular displacement and/or angular speed or rpm) axle 33a, the detection signal of encoder S2 is imported among the controller C.Motor M2 is controlled by controller C by order wire Lb.When cam 33 rotated eccentrically around axle 33a, lower stage 27 was driven to such an extent that back and forth vertically move with upper stage on it 26 and

seat

22,25.

Therefore, " cooperative inclusion of motor M2, gear train 33b, a 33a, cam 33 and spring 34 " feasible workpiece W extensional vibration that is clamped between chuck 23 and the core 25a of the driving mechanism 30 of the vertically reciprocal or vibration that formation NC-controls, described driving mechanism 30 can comprise encoder S2, upper and

lower platform

26,27, and

seat

22,25.

The vibration of workpiece W has the amplitude of the side-play amount that depends on eccentric shaft 33a, described side-play amount promptly, the geographic center of cam 33 and the axle 33a turning cylinder between distance.The vibration number amount of time per unit depends on the rpm of motor M2, and the instantaneous velocity of vibration depends on that side-play amount multiply by the cosine of motor rpm.Preferably regulate side-play amount, or regulate side-play amount by use ductile distancing element under controlled fluid pressure by insertion distance piece or trimmer between the installing hole of axle 33a and loose fit cam 33.

If necessary, workpiece W can be molded or rolling, the extruding, the distortion and/or the welding and cut, mill, hole and/or polish so that processed at milling apparatus 100 places (for example, meticulous smoothing or polishing are so that super surface grinding).Workpiece W have the part that adds up to I (I=predetermined integers) that (at 100 places) there are processed W1 (for example, axle journal), W2 (for example, pin), W3 ..., Wi (i=arbitrary integer; 1≤i≤I) }, wherein part Wi can have the processing conditions that differs from one another aspect the peripheral shape of for example material, machinability, locus, curve and/or the surface roughness.In the present embodiment, for the ease of understanding, suppose that peripheral shape is circular.

By ading up to J (J=predetermined integers; J≤I) optionally and removable or removable lap tool 100-1,100-2,100-3 ..., 100-j (j=arbitrary integer; 1≤j≤J) ..., 100-J} vertical array realize grinding for workpiece W, each all is made of described lap tool the upper and lower lap tool 110 of a pair of horizontal expansion.J lap tool 100-j by order wire Lc (if necessary, can be branched, for example be divided into branch line Lc1, Lc2, Lc3 ..., Lcj ..., LcJ) can be synchronously or asynchronously be controlled by controller C.In the present embodiment,, suppose J=I for the ease of understanding, and described be controlled to be synchronous.

Closure state, Fig. 3 that Fig. 2 shows the lap tool 100-j of equipment 100 shows the open mode of lap tool 100-j.Fig. 4 is the detail drawing of " A " among Fig. 2.

Lap tool 100-j is by constituting with the lower part: be suitable for using the upper and lower lap tool 110 of the grinding film 1 of supply length with cooperation way grinding work-piece part Wi; The film feed system FF1 that is suitable for the supply of controlling diaphragm 1; And fluid pressure (for example, hydraulic pressure or air pressure) cylinder 13, described pressure cylinder 13 can be operated under the control of controller C, be used for the vertical driving of upper and lower lap tool 110, so that its respectively around along the upper and lower supporting pin 14 of processing-longitudinal extension along CW (clockwise direction) and CCW (counterclockwise) vibrate so that the opening-closed procedure of lap tool 100-j.Supporting pin 14 is fixed on the suitable element of frame FR.

Upper and lower lap tool 110 is formed with the upper and

lower push arm

11,12 along processing-horizontal expansion respectively.Approximating protrusion central portion 11a, the 12a place of upper and

lower push arm

11,12 on their upper and lower supporting pin 14 pivots.Push arm 11, the 12 also far-end of the Z-shaped bending on their

horizontal expansion pin

13a, 13b or straight extension,

right side

11b, 12b pivots, and described

extension

11b, 12b are fixed in the cylinder cap 13a of fluid pressure cylinder 13 and the far-end of piston rod 13b.

Push

arm

11,12 has upper and lower left side extension 11c, the 12c effect with the pusher of the fixator that plays film extrusion element (2) respectively, left side extension 11c, 12c extend beyond the longitudinal center line of axle 21 (Fig. 1), vertically intersect with center line and workpiece part Wi in plane.Left side, upper and lower extension 11c, 12c are formed with respectively at their opposite side place and are used to hold upper and lower left groove 11d, the 12d that is assemblied in bottom plate shell 3 (as the extrusion element fixator) wherein in the mode that can vertically slide, and the upper and lower right groove 11e, the 12e that are used to hold the upper and lower film roller R3 that is fixed in wherein.Extension 11c, 12c are equipped with upper and lower oval cam 16 in its vertical outside in the left side, and have upper and lower through

hole

11f, 12f between the bottom that is formed at the vertical outside and upper and lower left groove 11d, 12d respectively, described through

hole

11f, 12f are used for usually biased with along the upper and lower push rod 11g of its slip, the insertion of 12g, to follow moving of upper and lower cam 16.

By manually-operated or under the NC of controller C control, cam 16 is assemblied on the back shaft (not shown) that is fixed on left side extension 11c, 11d and controller C in rotating mode, so that rotate vertically upcountry to promote bottom plate shell 3.The rotation of each cam 16 all can be detected and be input to controller C.

Upper and lower bottom plate shell 3 is formed with upper and lower arc groove 3a, the 3b (Fig. 3) along horizontal expansion at its opposite side place, and have along a pair of upper and lower group 2 of first, second and the

3rd base plate

2a, 2b and the 2c (as the film extrusion element) of horizontal expansion, described first, second and the

3rd base plate

2a, 2b and 2c are configured so that its cross section be trapezoidal substantially and is embedded in the bottom plate shell 3 along arc interval T (Fig. 4), so that fix by these shells 3 and by arm 11,12.It is arc that the exposure of

base plate

2a, 2b and 2c is constituted as the cross section, has arc width or an arc length L (Fig. 4), so that conformal with the respective surfaces zone of workpiece part Wi to be ground.

Base plate

2a, 2b and 2c are made of rubber, synthetic resin, metal (for example, aluminium) or metal alloy so that have the required enough rigidity of grinding.

Therefore, in lap tool 100-j, formation makes each base plate group 2 all conformally push workpiece part Wi as " bottom plate shell 3,

bar

11g or 12g, cam 16,

arm

11 or 12, cylinder 13 and the combination of selling 14 " of the base plate group control device of base plate pushing mechanism 40, wherein film 1 is squeezed in therebetween, and described base plate pushing mechanism 40 comprises " combination of

bar

11g or 12g and cam 16 " of playing motive force adjuster or adjuster 15 effects.Adjuster 15 can be replaced by hydraulic pressure that is controlled by controller C or pneumatic cylinder.

Grinding film 1 (with reference to Figure 26) be provided as reeling length band shape have good characteristics of flexibility but not extending thin layer or lamination (being called " substrate ") SB, described thin layer or lamination SB have as being used to be crushed on before the abrasive material on the workpiece part Wi to be ground or the face Sf on right side, and as the back side Sb of the smooth back or reverse side that pushed by base plate 2.Substrate S B locates to make with polyester at its face Sf (for example 1a among Figure 26) at least, and has the thickness of about 25 μ m in 130 mu m ranges.Along the discontinuous length at length or film 1 interval, the face Sf of substrate S B have be embedded in wherein or by adhesive as the attached equally distributed particle AP (for example 1c among Figure 26) thereon of adherend.Abrasive particle AP is made by grinding-material (for example aluminium oxide, carborundum, diamond), and has a few μ m to the interior particle size of about 200 mu m ranges.Sb (for example 1b among Figure 26) locates overleaf, and substrate S B makes with anti-slip material (for example rubber, synthetic resin), it can be coarse or processed or processing so that anti-skidding.

Film feed system FF1 formed have: be used to loosen the film feed reel 5 that is supplied with the length of the film 1 that is used to grind, the film take-up reel 6 of the length of the film 1 to be rolled that is used for reeling and being used to assists film to supply with and/or the film donor rollers Rk (k=1,2,3,4,5) of the necessary amount of the change film direction of the supply under the situation that does not retrain or disturb after grinding.Feed reel 5, take-up reel 6, donor rollers Rk are supported by frame FR (Fig. 1), upper arm 11 or lower arm 12.Frame FR supports feed reel 5, take-up reel 6, supply assistance roller R4 and reels and assist roller R5.

Upper and lower arm 11,12 has and a pair ofly is fixed in the vertical extension of its left side extension 11c, 12c left end and long upper and lower roller support component 11h, 12h, and is located at a pair of short upper and lower roller support section 11i, 12i among upper and lower right groove 11e, the 12e of left side extension 11c, 12c.Upper roll support component 11h is constituted for and supports the upper and lower roller R1 that a pair of supply side direction changes, described roller R1 is used to assist the film 1 of institute's supply length, so that its walk around arm 11 upper left-hand extension 11c, enter into the space S p between upper and lower left side extension 11c, the 12c, and in space S p or relevant slit, advance along forward direction to the right.Lower rollers support component 12h is constituted for and supports the upper and lower roller R2 that a pair of winding side direction changes, described roller R2 is used to assist the length of the film 1 supplied with, so that it retreats, withdraws from along backward direction left, and walk around lower left side extension 12c from space S p in space S p or relevant slit.Upper and lower roller support section 11i, 12i are constituted for and support a pair of direction of the supply and change upper and lower roller R3, and described roller R3 is used to assist the length film 1 supplied with, so that it turns back among the space S p.

Film feed system FF1 comprises: be used to drive take-up reel 6 so that it rotates twining or to roll the CD-ROM drive motor M3 of film 1 (film 1 of a segment length that makes feed reel 5 loosen to be supplied to), and be used to detect the rotary encoder S3 that motor M3 rotates.The order wire (Lcj) of (with reference to Fig. 8) is controlled by controller C to motor M3 by therebetween.The detection signal of encoder S3 is imported into controller C.Feed reel 5 also can be by another drive motor that is provided with rotary encoder and is controlled by controller C to rotate, and described controller C and motor M3 are synchronous.

Film feed system FF1 also comprises: the supply part f that a pair of upper and lower locking device 7 (Fig. 4) is respectively applied for film 1 is locked in supply side (between dish 5 and roller R4, R1 or R3) and tape side (between roller R3, R2 or R5 and dish 6).Locking device 7 is controlled by controller C (Fig. 1), so that film 1 is tightened up as required at supply side and tape side.Similarly locking device can be placed between dish 5 and roller R4 or R1 or roller R1, the R3 and between roller R3, R2 or roller R2 or R5 and the dish 6.

When being tightened up between roller R1-R3 and R3-R2, film 1 position that lap tool 100-j is opened when hydraulic cylinder 13 shrinks in as Fig. 3 is straightened.When extending and lap tool when being closed as shown in Figure 2 at hydraulic cylinder 13, film 1 is compressed between

base plate

2a, 2b and 2c arbitrary group 2 and the workpiece part Wi, when driving mechanism 30 (Fig. 1) vertically makes workpiece W vibration along processing, conformally crooked so that ground by upper and lower lap tool 110 with the surf zone of workpiece part Wi.

In this embodiment, film feed system FF1 is suitable for the delivery film 1 of a series of interruptions so that grinding operation is carried out at each base plate group 2 place in film 1 usefulness interval therebetween.In order to grind and use effectively film 1 effectively, by setting baseplate width L and base plate interval T and the ratio of supplying with part f, lap tool 100-j is configured the repeated use that prevents diaphragm area in each operation, so that:

T∶L∶f＝n∶1∶n，

Wherein n is the base plate quantity relevant with operation, that is, and and the quantity in each base plate group 2.

Fig. 5 shows the film at lap tool 100-j place and supplies with the time limit.N=3 wherein, T=3 * L, and f=3 * L (=f1).

In operation for the first time, when workpiece W vibrate, first, second and the

3rd base plate

2a, 2b and 2c had the work section W that width is first, second and the 3rd band of L along its arc exposure _p(p=3 of the p=1 of 2a, the p=2 of 2b, 2c), film 1 has the shadow region (with reference to Figure 26) that the width that is used for face Sf place grinding operation is L in this case.The first base plate 2a covers the first work section W _pAnd use corresponding diaphragm area 17, the first base plate 2a to be correlated with at present (p=1).

After operation for the first time, first supplies with part makes film 1 move one apart from f1=3 * L, thereby the right lateral position of diaphragm area 17 moves on to secondary service area section W _p(p=2) Zuo Ce adjacent position is so that diaphragm area 17 covers secondary service area section W _p(p=2) the L width regions afterbody of back.

In operation for the second time, just in the front of above-mentioned tail region, the second base plate 2b uses corresponding new diaphragm area so that grind.

After operation for the second time, second supplies with part makes film 1 move another apart from f1, thereby the right lateral position of diaphragm area 17 moves on to just at the 3rd work section W _p(p=3) adjacent position in the left side of the tail region of back is so that diaphragm area 17 covers the 3rd work section W _p(p=3) the L width regions afterbody after another tail region of back.

In operation for the third time, just in the front of above-mentioned another tail region, the 3rd base plate 2c uses corresponding new diaphragm area so that grind.

After operation for the third time, the 3rd supplies with part makes film 1 move another apart from f1, thereby the right lateral position of diaphragm area 17 moves on to just at the 3rd work section W _p(p=3) position on the front region right side of front is so that zone 17 covers front region.

In the 4th operation, just in the back of above-mentioned front region, the 3rd base plate 2c uses corresponding new diaphragm area so that grind.

After the 4th operation, the 4th supplies with part makes film 1 move another apart from f1, thereby the right lateral position of diaphragm area 17 moves on to the 3rd work section W _p(p=3) position that surmounts regional right side of front is connected with three L width regions betwixt, so that diaphragm area 17 covers the described zone that surmounts.

In the 5th operation, just in above-mentioned trizonal back, the 3rd base plate 2c uses corresponding new diaphragm area so that grind.It should be noted, at last work section W _p(p=3) afterwards, between do not have that whole diaphragm area is connected under the situation in obsolete zone so that the substrate surface Sf of film 1 is fully once used, thereby allow effective use of uniform grinding operation and film 1.

(first modification of first embodiment)

Fig. 6 shows the film at the lap tool 100-j place of the related milling apparatus of first modification of first embodiment and supplies with the time limit, n=4 wherein, and T=4 * L, and f=4 * L (=f2).

In this lap tool 100-j, each base plate group 2 has covering and has the work section W that width is first, second, third and the four-tape point of L along its arc exposure _qFour

base plate

2a, 2b, 2c and the 2d of (q=3 of the q=1 of 2a, the q=2 of 2b, 2c, the q=4 of 2d), to have the width that is used for face Sf place grinding operation be the shadow region of L to film 1 in this case.In operation for the first time, the first base plate 2a covers the first work section W _q(q=1), and use corresponding diaphragm area 18, it divides the 6th operation afterwards relevant with the 5th supply unit now.

In this modification, at last work section W _q(q=4) afterwards, between do not have that whole diaphragm area is connected under the situation in obsolete zone so that the substrate surface Sf of film 1 is fully once used, thereby allow effective use of uniform grinding operation and film 1.

(second modification of first embodiment)

Fig. 7 shows the film at the lap tool 100-j place of the related milling apparatus of second modification of first embodiment and supplies with the time limit, n=2 wherein, and T=2 * L, and f=2 * L (=f3).

In this lap tool 100-j, each base plate group 2 has covering and has the work section W that width is first and second bands point of L along its arc exposure _rTwo base plate 2a, the 2b of (r=1 of 2a, the r=2 of 2b), to have the width that is used for face Sf place grinding operation be the shadow region of L to film 1 in this case.In operation for the first time, the first base plate 2a covers the first work section W _r(r=1), and use corresponding diaphragm area 19, it divides the 4th operation afterwards relevant with the 3rd supply unit now.

In this modification, at last work section W _r(r=4) afterwards, between do not have that whole diaphragm area is connected under the situation in obsolete zone so that the substrate surface Sf of film 1 is fully once used, thereby allow effective use of uniform grinding operation and film 1.

(the 3rd modification of first embodiment)

Fig. 8 shows the control system of the lap tool 100-j of the related milling apparatus of the 3rd modification of first embodiment.

This modification is different from first embodiment, 100 parts and is, by being arranged near the video camera 180 of detouring in the film path between the upper and lower bottom plate shell 3, detect the substrate surface Sf of film 1, to find the repeated use zone of grinding operation at base plate group 2 places of not using or can be used for the bottom lap tool 111 of lap tool 101-j, and the view data that comes from video camera 180 is handled by image processor 181, to be input to controller C.

At controller C place, the data that processing is imported are to produce to issue orders: the CD-ROM drive motor M3 that outputs to take-up reel 6 by branch line Lcj, and locking device 7, realize that if necessary film supplies with the correction (Fig. 4) of f, compare more congested areas afterwards with reference the operation at base plate group 2 places of the top lap tool 111 of lap tool 101-j to avoid using (in the operation at base plate group 2 places of bottom lap tool 111).

Workpiece W (Fig. 1) can be camshaft, and workpiece part Wi (Fig. 4) can be cam lobe.In such a case, even at base plate group 2 places of bottom lap tool 2, film is supplied with also controlled the once used zone of not reusing.

(second embodiment)

Now with reference to Fig. 9 and Figure 10 the second embodiment of the present invention is described.Fig. 9 shows the closure state of the lap tool 200-j of the related milling apparatus of second embodiment 200, and Figure 10 shows the open mode of the lap tool 200-j of milling apparatus 200.

This embodiment 200 is different from first embodiment, 100 parts and is, film feed system FF2 has the film cleaner CL1 that is arranged between the upper and lower lap tool 110 and is supported by lap tool 110 or framework FR (Fig. 1), with the repeated use that allows film 1 with evenly grind.

Cleaner CL1 is constituted for Cleaning lining bottom surface Sf (with reference to Figure 26) after the grinding operation at base plate group 2 places of top lap tool 11 or when lap tool 200-j leaves grinding operation.After the single pass of the mode of operation of associated drives, the on-off time limit of cleaner CL1 and duty are controlled by controller C (Fig. 1).This scanning coverability graph as the view data of processor 181 (Fig. 8) with the obstruction of checking film 1 or by the removable foreign matter of cleaning.

(first modification of second embodiment)

Figure 11 shows the film cleaner CL2 of the lap tool 210-j of the related milling apparatus 210 of first modification of second embodiment, and corresponding to the detail drawing of Fig. 9 " B ".

This modification is different from second embodiment, 200 parts and is that film feed system FF21 has film cleaner CL2, and described film cleaner CL2 comprises ultrasonic wave brush 207 and is located at detouring of film 1 on auxiliary film roller R31, the R32 between the roller R3.Roller R31 so arranged, that is, make film 1 be bent or be picked up so that the mode that is exposed at the outside with substrate surface Sf cleans it easily by brushing 207.Cleaner CL2 can be arranged to output the film 1 at clearer R3, R31 and/or R32 place.

(second modification of second embodiment)

Figure 12 shows the film cleaner CL3 of the lap tool 211-j of the related milling apparatus 211 of second modification of second embodiment.

This modification is different from second embodiment, 200 parts and is that film feed system FF22 has film cleaner CL3, and described film cleaner CL3 comprises ultrasonic cleaner 208 and is located at detouring of film 1 on auxiliary film roller R31, the R32 between the roller R3.Roller R31 so arranged, that is, make film 1 be bent or be picked up so that substrate surface Sf is soaked in the outside, thereby can clean it easily in rinse bath 208.Clean liquid can be the cooling fluid that is used to grind, and supplies from the cooling fluid accumulator tank.Cleaner CL3 can be arranged or make its extension so that the film 1 at clearer R3, R31 and/or R32 place.

(the 3rd modification of second embodiment)

Figure 13 shows the film cleaner CL4 of the lap tool 212-j of the related milling apparatus 212 of the 3rd modification of second embodiment.

This modification is different from second embodiment, 200 parts and is that film feed system FF23 has film cleaner CL4, and described film cleaner CL4 comprises high pressure nozzle 209 and is located at detouring of film 1 on auxiliary film roller R31, the R32 between the roller R3.Roller R31 so arranged, that is, make film 1 be bent or be picked up so that the mode that is exposed at the outside with substrate surface Sf cleans it easily by the jet that comes from nozzle 209.The cleaning fluid that is sprayed into jet can be the cooling fluid that is used for grinding and supplies from coolant storage tank.Cleaner CL4 can be arranged to output the film 1 at clearer R3, R31 and/or R32 place.

(the 3rd embodiment)

To Figure 18 the third embodiment of the present invention is described now with reference to Figure 14.Figure 14 shows the related milling apparatus of the 3rd embodiment 300, and Figure 15 is the closure state of the lap tool 300-j of equipment 300, and Figure 16 is the open mode of the lap tool 300-j of milling apparatus 300.Figure 17 is top or the push arm 11 of

bottom lap tool

310 or 12 the sectional view of lap tool 300-j, and Figure 18 is the sectional view that line " C1 "-" C1 " cut along Figure 17.

This embodiment is different from the previous embodiment part and is, lap tool 300-j has upper and lower lap tool 310, each all is equipped with the base plate pushing mechanism 340 that the internal lubricant that comprises thrust controller 315 and be connected in exterior lubricant pump P distributes supply system LD respectively, and film feed system FF3 has the shape of co-operate with it.Described in first embodiment 100, the detection signal that comes from rotary encoder S1, the S2 of CD-ROM drive motor M1, M2 is imported into controller C via holding wire L1, L2.

Top push arm 11 (or bottom push arm 12) is formed with left side, top (or bottom) the rectangular recess 11a (or 12a) that is used to hold bottom plate shell 3.This bottom plate shell 3 can slide to regulate thrust by adjuster 315 vertically along groove 11a (or 12a), and described adjuster 315 promotes the combination of spring and spring force adjustment screw for bottom plate shell.

Bottom plate shell 3 is formed with along the semi-circular recesses of processing longitudinal extension, and described groove has the radial slit 345 along the processing longitudinal extension of cutting in wherein, and trapezoidal ledge 344 is defined in therebetween as backplanes support.These ledges 344 make their arc top 343 as the remainder of the attached semi-circular recesses thereon of each base plate of base plate group 2, and grinding film 1 is directed with the left and right sides wall of wavy mode along ledge top 343 and radial slit 345, so that radial space 342 is defined between film 1 length on the wall of the left and right sides.

When ledge top 343 promoted base plate, base plate group 2 conformally was pressed on the respective surfaces zone of workpiece W (or workpiece part Wi), and extend at the openend of radial space 342 in the remaining surface zone of workpiece W.For film 1 being pulled in the degree of depth of each slit 345, the film feeder 341 of detouring is provided in slit bottom, described feeder 341 is made of a pair of spring 349 and the idler roller 350 that is anchored on slit 345 left and right sides walls, described idler roller 350 is hung by spring 349 in rotating mode and usually by the elastic force of spring 349 bias voltage radially outward, makes film 1 be tightened up on this direction.The roller 350 that is draped in rotating mode has the trend that alleviates tunicle 1 wearing and tearing, thereby gives the operation lifetime that the feeder 341 of detouring prolongs, and allows the level and smooth supply of film 1 and the simplified structure of film feed system FF3.

In order to install, the film 1 of sufficient length is inserted in the slit 345 to have once is formed at radially detouring wherein, returning, on idler roller 350, overturn in the proximal end of trapezoidal ledge 344 with before passing between workpiece W and the relevant base plate.Use the wavy layout of the film 1 of slit 345 to guarantee that each radial space 342 opens at each front end 342a and rear end 342b place, and by idler roller 350 film on every side detour, the circumference of the relative length of the film 1 at left and right sides place and workpiece W to be ground expose area limiting.The circle alternate ground of workpiece W has the not zone of exposing the zone and being covered by film 1 of tunicle 1 covering.

Internal lubricant supply system LD is formed the network of the lubricant paths 346 in the bottom plate shell 3, and be connected with exterior lubricant pump P with tube connector 347 by hookup 348, described pipe 347 has elasticity and extending, thereby avoids excessive dynamic loading to put on base plate group 2 or the bottom plate shell 3.

Each radial space 342 all communicates with lubricant paths 346 at its front end 342a and rear end 342b two places, so that lubricant flows into therefrom, and face Sf guide lubricant along film 1, to guarantee on the surface of the work zone to be ground and the conveying between the lapped face zone of film 1 and workpiece W, make lubricant flow along surface of the work in the mode of direct contact, or flow to workpiece W to be processed a bit, thereby the contact area between lubricant and workpiece W is effectively expanded.

It should be noted that the lubricant of institute's pumping vertically is transported to the radial space 342 from lubricant paths 346 along processing, directly flushing is exposed at the face Sf of 342 inboards, space, thereby cleans soil dust from face Sf.

Should also be noted that, has the zone of detouring that the wavy film of detouring 1 alternately has the pressurized zone between the workpiece W of base plate and vibration and limits radial space 342, wherein pressurized zone workpiece W along with the dissipation of heat by rubbing, and expose at the regional workpiece W that detours.When the stream of the lubricant in each radial space 342 is exposed face Sf when the surface of the work that exposes guides by (film 1 is detoured regional), most of lubricant flows out by front and back central space 342c, 342d with exterior with the soil dust that seizes the workpiece heat, and remainder is supplied between the pressurized zone and workpiece W of film 1, pass gap therebetween, therefrom seize heat, to flow out to next radial space 342.Therefore lubricant is drawn towards on the surface of the work to be ground, and between surface of the work and film, or between film and base plate, cause its cooling and remove soil dust, otherwise the described intrusion of lubricant may be very difficult.

Launch aforementioned detour each position of feeder 341 of film that acts on, allow the supply facilitation of lubricant to a plurality of points of workpiece to be processed, and the corresponding increase of contact area expansion aspect between lubricant and the workpiece W, thereby can remove soil dust more smoothly, and the enhancing of film 1 and workpiece W cooling.

(modification of the 3rd embodiment)

Figure 19 shows the bottom plate shell 303 of top lap tool of arbitrary lap tool of the related milling apparatus of the modification of the 3rd embodiment, and Figure 20 is the sectional view that line " C2 "-" C2 " cut along Figure 19.

This modification is different from the 3rd embodiment part and is, the lubricant of supplying from exterior lubricant pump P (Figure 17) is assigned with and atomizes or be discharged from so that drenched the dorsal part Sb (with reference to Figure 26) in grinding film 1 zone in operation, and bottom plate shell 303 and internal lubricant distribute supply system LD1 to have improved structure, and film feed system FF31 has the shape of co-operate with it.

The bottom plate shell 303 of hollow is configured has: along the vacuum bottom plate shell element 361 of processing longitudinal extension, described bottom plate shell element 361 comprises half-cylindrical top 361a, the vertical part 361b in front and back, and left and right sides sidepiece 361c; And a plurality of support components 344 along the processing longitudinal extension, described support component 344 radially is arranged in angled uniformly-spaced the locating of bottom plate shell element 361 inboards.

Bottom plate shell element 361 has the cover structure of adding, the described cover structure that adds is formed with outer wall 363a and the inwall 363b that defines the hollow space 362 of half round post or tubular domeshape in the mode of cooperation, and the lubricant dispense that described hollow space 362 is used for being supplied is at inwall 363b.Inwall 363b is formed with a plurality of equally distributed through holes 364, and described through hole 364 is used for atomizing or discharging the lubricant that is distributed so that it sprays a plurality of trapezoidal slits 345 along the processing longitudinal extension that are defined between the support component 344.Support component 344 has the base plate group 2 that invests its inner radial near-end, and support component 344 is fixed in inwall 363b at its radial outer end place.

Film feed system FF31 has the film feeder 349 of detouring in each trapezoidal slit 345, the described film feeder 349 of detouring constitutes by a pair of front and back spring 349 that is anchored on inwall 363b and along the idler roller 350 of processing longitudinal extension, and described idler roller 350 is hung by spring 349 in rotating mode and usually by the elastic force of spring 349 bias voltage radially outward.Grinding film 1 passes between bottom plate shell 303 and workpiece W (or workpiece part Wi) and waveform detour, with the pressurized zone between the surf zone of the workpiece W that alternately has base plate and grinding, and the elongation on idler roller 350 of detouring of a segment length, define radial space 342, exposed the surf zone of workpiece W to be ground there.

The outer radial space 345 that comprises front and

back end

345a and 345b that lubricant supply system LD1 limits by hollow space 362, hole 364, by the back side Sf of the film 1 of detouring, the inner radial space 342 that limits by the face Sf of the film 1 of detouring, and constitute with the front and back central space 342c and the 342d of exterior.

Wash each outer radial space 345 from the water of top 361a spray, some flow in the inner radial space 342, and major part is left central space 342c and 342d, seize frictional heat from the zone of film 1 and workpiece W to be cooled.The water that sprays each inner radial space 342 from front and rear part 361b guides and demonstrates the effect similar to the 3rd embodiment by film 1.

Do not consider the detour position of feeder 341 of film, water is sprayed whole area of space, realized total film cooling, guaranteed simultaneously lubricant for process or the supply of being had a few of workpiece to be processed, and the abrasive particle of having removed soil dust effectively and having dropped, make workpiece must be had the uniform outer surface fineness of raising by finishing, and improved crudy.

(the 4th embodiment)

Now with reference to Figure 21 to 23 fourth embodiment of the present invention is described.Figure 21 shows the closure state of the lap tool 400-j of the related milling apparatus of the 4th embodiment 400, and Figure 22 is the open mode of lap tool 400-j.Figure 23 is the detail drawing of " D " among Figure 21.

The difference of this embodiment and previous embodiment is, equipment 400 also comprises " the film vibrator " of the combination of or vibrating mechanism 432 (Figure 23) reciprocal along cross machine as the upper and lower except that the conduct edge processes " the Workpiece vibration device " of vertically reciprocal or vibrating mechanism 30 (Fig. 1).Each vibrating mechanism 432 all undertakes the responsibility of film 1 vibration so that thereby it enough is not subjected to the influence of workpiece velocity of rotation soon.Effective in order to make along the film vibration of film 1 direction of the supply, vibrating mechanism 432 uses the horizontal film stretching-machine 437 of directed vertically film stretching-machine 436 of vibration and tension force orientation.Stretching-machine 437 is responsible for the synchronous mode of vibration film being supplied to stretching-machine 432, and between upper and lower vibrating mechanism 432 by shared.

Lap tool 400-j (Figure 21-22) comprising: the film feed system FF4 that is constituted for the NC-control supply of film 1; And a pair of upper and lower lap tool 410, each all is equipped with base plate pusher 440 respectively, described base plate pusher 440 has the bottom plate shell 403 that is used for base plate group 402 is pushed to workpiece W to be ground (or workpiece part Wi) surf zone, and wherein film 1 is crushed on therebetween.

Vertically film stretching-machine 436 comprises and is suitable for the radially idler roller R44 that makes that film 1 is detoured around its formation by the base plate of arbitrary base plate group 402, and the vibrator M44 that drives of motor, and described vibrator M44 is configured so that to make roller R44 radially to vibrate.Described vibration also can realize by for example fluid pressure cylinder.

Flat membrane stretching-machine 437 comprises and is suitable for the radially idler roller R3 that makes that film 1 is detoured around its formation by base plate group 402, and flexible member 438 (for example spring), described flexible member 438 is suitable for the normal bias voltage roller of radially outside direction R3, the necessary length of the film 1 that the film vibration at permission supply stretching-machine 436 places is required.The roller R3 that is supported by bar when lap tool 400-j closes is guided so that be set in the trailed position by guide rod 439 (Figure 21-22).

Film feed system FF4 comprises the upper and lower tension controller 441 that uses upper and lower idler roller R4, R5 respectively, described tension controller 441 by the upper and lower flexible member 443 (such as spring) that is fixed in frame FR (Fig. 1) (Figure 23) along the normal bias voltage of its film tension direction.Controller 441 provides the tension force tolerance between locking device and arbitrary base plate group 402, to help the film supply with along the level and smooth film vibration of the direction of the supply.At the supply side of film feed system FF4 or roll side, idler roller R4 or R5 have the application point on the film 1 between the application point of film locker 7 and the base plate group 2.

For meticulous vibration, base plate group 402 can separately be arranged with the film stretching-machine of repetitive vibrations orientation and the replacing of film stretching-machine of tension force orientation by multiple.

Workpiece W can have and rotates centrifugal offset axis part Wi, but described rotation centrifugal be that cooperation by

shaker arm

11,12 is along with grinding is carried out.

The spring 438 of film stretching-machine 437 allows the level and smooth of roller R44 to move with the radially outward mobile film of expanding to supply necessary length 1 of two roller R44 or arbitrary roller R44.Film 1 is approach still enough firm in to bear pulling.

In the cooperation of film vibrator and Workpiece vibration device, workpiece W stands to contact with the Z font of film 1, so that grind by the abrasive particle of accelerating, allows shorter effective processing.Z font workpiece makes the littler and easier removal of soil dust, and has the trend that reduces to stop up.For the shaft portion of the 60-mm diameter of bent axle, the grinding of the amplitude of roller R44 in 0.5 to 2.0mm (preferably being about 1mm) scope is suitable.For the vibration frequency of roller R44,10Hz is suitable to the grinding in thousands of Hz (and being preferably 80Hz or more) scope.

(the 5th embodiment)

To Figure 26 the fifth embodiment of the present invention is described with reference to Figure 24 below.Figure 24 shows the closure state of the lap tool 500-j of the related milling apparatus of the 5th embodiment 500, and Figure 25 is the detail drawing of " E " among Figure 24, and Figure 26 is the sectional view of film 1.

The difference of this embodiment and previous embodiment is, lap tool 500-j has control system, described control system comprises the roughness detector RD with the video camera 504 that is attached thereto by data wire L51, and is used to handle the controller C that the conduct that comes from detector RD detects the image data of data.

Detector RD is suitable for not using the surface roughness of the face Sf (Figure 26) in zone to detect the abrasive material state according to the film 1 between the roller R1 of film feed system FF5.

Controller C is suitable for control: via the CD-ROM drive motor M3 of order wire L52 control take-up reel 6; Control the thrust controller 15 of each base plate pusher 540 via order wire L53; And via the calibrator 507 of order wire L50 control, described calibrator 507 is used for the ledge height h (Figure 26 is on the adhesion layer of substrate 1b) of the abrasive particle AP on the face Sf of the film 1 between the roller R1 of calibration camera 504 upstreams.

Roughness detector RD can be super depth structure measuring microscope (VK-8500, Keyence), untouchable 3 D surface shape roughness concentration device (New View 5000:ZaigoCo., Ltd), or any commercially available detector.

Calibrator 507 constitutes with the cylindrical calibrator instrument 571 that rotates by the calibration body 570 that is controlled by controller C with by 570 drivings of calibration body.Instrument 571 has attached abrasive diamond particle thereon.Instrument 571 contacts with the face Sf of the F of the film 1 that is supplied to.When instrument 571 was actuated to rotate, before being detected by video camera 504, the abrasive particle AP (Figure 26) on the face Sf was ground to a height.

Detector RD analyzes image data from video camera 504, and calculates the ledge height of abrasive particle AP, and described height is imported among the controller C, and it is processed to determine the blocked state and the grainding capacity of film 1 there.The data of determining the result are stored among the controller C.When film 1 enters operation, the grinding that controller C is beneficial to expect according to each thrust controller 15 of Data Control that stores, or being used for motor M3 that film supplies with control to avoid using the diaphragm area of low grainding capacity, in the normal running after calibration, base plate thrust and film supply are constant.

(first modification of the 5th embodiment)

Figure 27 shows the closure state of the lap tool 501-j of the related milling apparatus 501 of first modification of the 5th embodiment, and Figure 28 is the P-h characteristic curve diagram of lap tool 501-j.

The difference of this modification and the 5th embodiment is that video camera 504 is arranged for detecting the film 1 in the way between the base plate group 2.Video camera 504 is connected with roughness detector RD by data wire L54, and the controller C that is connected in detector RD has the order wire L55 of the take-up reel CD-ROM drive motor M3 that is connected in film feed system FF51, and the order wire L56 that is connected in the thrust controller 15 of each base plate pusher 541.

Video camera 504 absorbs the image of the state of the abrasive grain on the grinding films 1, and this image is transported to roughness detector RD.Roughness detector RD calculates the ledge height of abrasive particle from image.The result of calculation of ledge height is transported to controller C from roughness detector RD.Controller C judges the chocking-up degree of abrasive particle, and stores the judged result and the position of stopping up of detecting, and then, controller C controls moving of each structure of milling apparatus.

According to the ledge height of abrasive particle, controller C control motor M3 and thrust controller 15 are to guarantee stable grinding.

When the blocking position grinding work-piece of grinding film 1, grind and become insufficient, thus the surface smoothness that can not obtain to expect.Therefore, controller C judges the chocking-up degree of abrasive particle, and whether the ledge height is being carried out under the state that suitably grinds.If abrasive particle stops up largely, controller C control motor M3 is with the transmission grinding film, thus the position of not using abrasive particle to stop up.

If abrasive particle is obstructed to words largely, controller C control thrust controller 15 is to strengthen base plate thrust.Like this, under the situation that abrasive particle stops up, also can obtain the surface smoothness of the expectation of workpiece.

Relation between the ledge height of abrasive particle and the base plate thrust P as shown in Figure 7.

If the ledge height of abrasive particle is 100%, when being 100%, base plate thrust P can obtain the surface smoothness of the expectation of workpiece so.Yet, if the ledge height of abrasive particle is 60%, when being 100%, base plate thrust P can not obtain the surface smoothness of the expectation of workpiece so, that is to say that base plate thrust P must be 120%.

According to the ledge height of abrasive particle, controller C control motor M3 and thrust controller 15 are to guarantee stable grinding.Therefore, milling apparatus demonstrates such effect,, can obtain the surface smoothness of the expectation of the stable amount of grinding of surface of the work and workpiece that is.

(second modification of the 5th embodiment)

Figure 29 shows the closure state of the lap tool 502-j of the related milling apparatus 502 of second modification of the 5th embodiment.

The difference of this modification and the 5th embodiment is that video camera 504 is arranged for detecting the film 1 in the way between the base plate group 2.Video camera 504 is connected with roughness detector RD by data wire L57, and the controller C that is connected in detector RD has the order wire L58 of the take-up reel CD-ROM drive motor M3 that is connected in film feed system FF52, and the order wire L59 that is connected in the thrust controller 15 of each base plate pusher 542.

Video camera 504 absorbs the image of the state of the abrasive grain on the grinding films 1, and this image is transported to roughness detector RD.Roughness detector RD is according to the ledge height of its image calculation abrasive particle.The result of calculation of ledge height is transported to controller C from roughness detector RD.Controller C judges the chocking-up degree of abrasive particle, and stores the judged result and the position of stopping up of detecting, and then, controller C controls moving of each structure of milling apparatus.

Under abrasive particle was obstructed to largely situation, controller C was for feeding back in the future judged result.Controller C judges the chocking-up degree of abrasive particle and the blocking position of grinding film 1 according to the ledge height of the abrasive particle that is calculated, and the feedback judged result is so that make the conveying capacity of grinding film 1 and the base plate thrust optimization of workpiece.Content by controller C feedback is stored in the storage element, in order to using in the future.

(the 6th embodiment)

To Figure 37 the sixth embodiment of the present invention is described with reference to Figure 30 below.Figure 30 shows the related milling apparatus of the 6th embodiment 600; Figure 31 is the closure state of the lap tool 600-j of equipment 600; Figure 32 is the open mode of lap tool 600-j; Figure 33 is the detail drawing of " F " among Figure 31; Figure 34 shows along the top lap tool element 671 of CW (clockwise direction) vibration; Figure 35 is the top lap tool element 671 along CCW (counterclockwise) vibration; Figure 36 and Figure 37 show the camshaft 660 as workpiece W; Figure 38 shows the control system of lap tool 600-j.

Particularly, with reference to Figure 30 to 33, the milling apparatus 600 of present embodiment is equipped with: heaving floor 671,671, described base plate 671,671 is held to promote towards workpiece W the lapped face (but described surface is flexible not extending) of grinding film 1, and base plate 671,671 operationally shows the unsteady motion of its vibration head; And floating unit 630 (floating installation), described floating unit 630 makes base plate 671,671 along with the rotation of the workpiece W motion of floating, thereby carries out grinding operation, grinding film 1 is pressed on the surface 665 of workpiece W to be ground simultaneously.Floating unit 30 comprises the drive unit 631 that is connected with base plate 671,671, so that base plate 671,671 is forced to produce the motion of floating.

When the workpiece W shown in Figure 36 was applicable to camshaft 660, the external peripheral surface of each cam lobe 661 all was surface 665 to be ground.As shown in Figure 37, cam lobe 661 is made of portion C a to be ground, Cb1, Cb2, Cc1, Cc2 and Cd, and bottom Cd has constant radius of curvature, and portion C b1, Cb2 have linear circumference, and top Ca has less radius of curvature.That is to say that the surface 665 of cam lobe 661 is formed with wherein the not toroidal that changes from the radius of center of rotation.

As shown in Figure 31 and 32, provide this to upper arm 11 and lower arm 12 by this way rotationally by pin 14, that is, make base plate 671,671 attached its distal portions thereon operationally open and close relatively along the Z direction.That is to say, use grinding film 1 to carry out the pivoting action of upper arm 11 and lower arm 12, and when upper arm 11 and lower arm 12 are in when opening motion, the cam lobe 661 of base plate 671,671 and insertion grinding film 1 leans, opposite when upper arm 11 and lower arm 12 are in closing movement, removed between the cam lobe 661 of base plate 671,671 and insertion grinding film 1 against.

As shown in Figure 34 and 35, base plate 671,671 has the protruding far-end that cross section is a raised annular, and described protruding far-end is used for pushing the lapped face of grinding film 1 to workpiece W.In the current embodiment that has declared, it is variable that base plate 671,671 is operated with the unsteady of demonstration and contact point or sheet, and described contact point or sheet will contact with the surface 665 of cam lobe 661 by grinding film 1.Incidentally, here the circumferential surface of the workpiece W of word " contact " expression base plate 671,671 and insertion grinding film 1 leans.

Base plate 671,671 is housed inside respectively in the bottom plate shell 673,673 so that show operationally and be used to make its head with the floating of vibration pin (back shaft) 672,672 vibrations that described vibration pin 672,672 is arranged on the line of the central shaft O that passes camshaft 60.Bottom plate shell 673,673 is contained in respectively in the recessed portion 627,627 that is formed at upper arm 11 and lower arm 12, so that withdraw with respect to workpiece W.Bottom plate shell 673,673 can move respectively, and the inner surface by recessed portion 627,627 guides its outer surface simultaneously.For the rear surface of bottom plate shell 673,673, spring 674,674 is provided, each spring comprises that all a compression disc spring is used for clamping work pieces, respectively base plate 671,671 is pressed in via grinding film 1 on the surface 665.

As shown in Figure 33, floating unit 630 is equipped with the linkage 633 that is connected with motor 4 with action bars 632.The shift position of sensor S4 with sense operation bar 632 is provided, thereby detected the floating position of each base plate 671.Constituted driving mechanism 631 by action bars 632, linkage 633 and motor 4.Incidentally, the initial position of base plate 671,671 is restricted to its position as shown in Figure 33.

The unsteady direction of base plate 671,671 is mutual any combinations.For example, if top base plate 671 demonstrates from its initial position around vibration pin 672 floating along clockwise direction, lower raft 671 demonstrates from its initial position around vibration pin 672 along clockwise direction or anticlockwise floating so.

With reference to Figure 34 and Figure 35, operationally be in the effect of each base plate 671 in floating when being described in detail in its vibration.In Figure 34, show to demonstrate and be in peaked base plate 671, and in Figure 35 from along clockwise direction unsteady of its initial position, show to demonstrate and be in peaked base plate 671 from the counterclockwise direction unsteady of its initial position.Incidentally, in Figure 34 and Figure 35, show abrasive particle with Reference numeral 612.

As shown in Figure 34, when base plate 671 demonstrates when along clockwise direction unsteady of its initial position is in maximum, the base plate 671 that is pushed and the rear surface of grinding film 1 on an A1 each other pressure contact, and the lapped face of grinding film 1 and workpiece W on an A2 each other pressure contact.On the other hand, as shown in Figure 35, when base plate 671 demonstrates when in the counterclockwise direction unsteady of its initial position is in maximum, because base plate 671 does not slide mutually with grinding film 1, therefore the base plate 671 that is pushed and the rear surface of grinding film 1 on a B1 each other pressure contact, and the lapped face of grinding film 1 and workpiece W on a B2 each other pressure contact.

Therefore, the contact point between base plate 671 and the grinding film 1 is dispersed in the scope between contact point A1 and the B1.In addition, the contact point between grinding film 1 and the workpiece W is dispersed in the scope between contact point A2 and the B2.If from initial position along each clockwise direction and anticlockwise angle of throw be set to angle α, will be restricted to angle θ around this scope as the vibration pin 72 at center, it is expressed as θ=2 α.

In this manner, during grinding operation, because the contact point between each base plate 671 and the grinding film 1 is dispersed in a certain scope, so base plate thrust is not concentrated on the point of base plate 671, therefore, prevents that base plate 671 parts are badly damaged.And because the contact point between grinding film 1 and the workpiece W is dispersed in a certain scope, so base plate thrust is not concentrated on the point of grinding film 1, therefore, can prevent that the obstruction of grinding film 1 and the part of abrasive particle 612 from seriously peeling off.

Figure 38 is a schematic diagram, shows the control system of milling apparatus 600.

With reference to Figure 38, rotary encoder S1 is connected with controller (control device) C to S3, sensor S4, and relevant for the turned position of the cam lobe during the grinding operation 661 and the detection signal of shift position of action bars 632 that is used to limit the floating position of base plate 671,671 be imported into controller C.And relevant for the velocity of rotation of the motor M1 that is used to limit workpiece velocity of rotation Vw and the detection signal of velocity of rotation that is used to limit the motor M2 of vibration velocity Vo be imported into controller C.Controller C control is so that base plate 671,671 shows the floating of turned position of the cam lobe 661 that is detected in response to rotary encoder S1.

In order to the control of floating that changes base plate 671,671 is that the operation of the drive unit 631 by controlling floating unit 630 is by this way carried out, described mode promptly, the turned position of the cam lobe 661 during making contact point between base plate 671,671 and the grinding film 1 and the contact point between grinding film 1 and the workpiece W in response to grinding operation and changing.

More particularly, the turned position of the cam lobe 661 of controller C during in response to grinding operation transmits control signal, rotation with control motor M4, thereby control operation bar 632, so that move collapsiblely, and in response to this effect, operator link mechanism 633 is so that base plate 671,671 shows floating around vibration pin 672,672 respectively.Therefore, contact point between each base plate 671 and the grinding film 1 (for example is dispersed in a certain scope, scope between contact point A1 shown in Figure 34 and the B1) in, and, contact point between grinding film 1 and the workpiece W is dispersed in a certain scope (for example, the scope between contact point A2 shown in Figure 35 and the B2).

Next, the operation of the above-mentioned milling apparatus 600 of present embodiment will be described in detail.

At first, in the mode identical with previous embodiment, camshaft 660 is set between headstock 22 and the tailstock 25, and then this is closed to align with each cam lobe 661 upper arm 11 and lower arm 12, grinding film 1 is arranged on the surface 665 of cam lobe 661 simultaneously.

Then, be easy to act as most when grinding film 1 applies tension force and clamps camshaft 660, the thrust of spring 74 is pushed base plate 671,671 to cam lobe 661, and the lapped face of grinding film 1 is pushed to surface to be ground 665.

Then, axially applying vibration and making camshaft 660 when its central axis rotates along it by operation vibration unit 30 by operation rotating drive unit 20 to camshaft 660, the bottom plate shell 673,673 that holds base plate 671,671 respectively shrinks mobile along with the rotation of cam lobe 661, therefore, the surface 665 of each cam lobe 661 has all been ground.

During described grinding operation, rotary encoder S1 detects the turned position of each cam lobe 661, and controller C control base plate 671,671 is so that it shows floating in response to the turned position of the cam lobe 661 that is detected.That is to say that controller C control motor M4 starts linkage 633 with shrinkage operation bar 634 thereupon, and make base plate 671,671 show around floating as the vibration pin 672,672 at center.

Therefore, the contact point between each base plate 671 and the grinding film 1 is dispersed in a certain scope, and the contact point between grinding film 1 and the workpiece W is dispersed in a certain scope.

During described grinding operation, make camshaft 660 forward rotation preset number of times (for example, 5 times), make the identical number of times of its backward rotation afterwards.By changing the rotation direction of camshaft 660, can eliminate the obstruction of grinding film 1 and keep its performance.

By this way, during described grinding operation, because the contact point between each base plate 671 and the grinding film 1 is dispersed in a certain scope, so base plate thrust is not concentrated on the point of base plate 671, therefore, prevents that base plate 671 parts are badly damaged.

And because the contact point between grinding film 1 and the workpiece W is dispersed in a certain scope, so base plate thrust is not concentrated on the point of grinding film 1, therefore, can prevent that the obstruction of grinding film 1 and the part of abrasive particle 612 from seriously coming off.This means, when observing the working volume of grinding film 1,, thereby increased working volume owing to working surface has been disperseed.Therefore, because the increase of the working volume of grinding film 1, the surface 665 of grinding has the grinding fineness of raising and can reduce number of operations.

Although camshaft 660 has a plurality of cam lobe 661, grinding operation is synchronously carried out on all cam lobe 661.After having finished grinding operation, this is opened to upper arm 11 and lower arm 12 and takes out camshaft 660.Then, if desired, will be arranged in the milling apparatus 600 as the camshaft 660 of workpiece W in an identical manner.

Aforesaid, in the milling apparatus 600 of present embodiment, provide: grinding film 1; Comprise the base plate 671,671 of its cross section for the circular protruding far-end of projection, described protruding far-end is used for pushing the lapped face of grinding film 1 to workpiece W, and described base plate 671,671 is housed inside in the bottom plate shell 673,673, is used to make its floating about 672,672 vibrations of vibration pin operationally to show; And make the floating unit 630 that base plate 671,671 rotates in response to the rotation of workpiece W by this way, described mode promptly, the contact point between each base plate 671 and the grinding film 1 be dispersed in a certain scope and grinding film 1 and workpiece W between contact point be dispersed in a certain scope.Therefore, can prevent that base plate 671 parts are badly damaged and can prevent that the obstruction of grinding film 1 and the part of abrasive particle 612 from seriously coming off.In addition, because the increase of the working volume of grinding film 1, the surface 665 of grinding has the grinding fineness of raising and can reduce number of operations.

In addition, floating unit 630 comprises the drive unit 631 that is connected with base plate 671,671, so that being forced to produce, base plate 671,671 floats, and provide controller C, described controller C accessory drive 631, so that change floating of base plate 671,671 by this way, described mode promptly, the turned position of the cam lobe 661 during making contact point between base plate 671,671 and the grinding film 1 and the contact point between grinding film 1 and the workpiece W in response to grinding operation and changing.Therefore, the scope of scattering contact point can at random and advantageously be set.

Incidentally, because grinding film 1 is flexible but non-extension, therefore available workpiece W carries out preferred grinding operation.

(modification of the 6th embodiment)

Figure 39 shows the upper and lower floating unit 631 of the lap tool 601-j of the related milling apparatus of the modification of the 6th embodiment, and Figure 40 A is floating to follow the trail of the top floating unit 631 of workpiece W to 40D.

This grinding is suitable for grinding the workpiece that only rotates along a direction.This milling apparatus comprises protruding base plate 671 and floating unit 631.Projection base plate 671 is formed convex, have the tip portion that is used for the surface of the band abrasive particle of grinding film is pushed to the projection of workpiece, and protruding base plate 671 is held unsteady to carry out.Floating unit 631 makes protruding base plate 671 carry out according to the rotation of workpiece and floats.

As shown in Figure 39, floating unit 631 comprises a pair of spring element 675,676 that is used for applying to protruding base plate 671 along the direction of floating reaction elastic force.The power that is applied by a pair of spring element 675,676 acts on like this, that is, make protruding base plate 671 along floating with the direction of workpiece direction of rotation.That is to say that under the workpiece situation that indicated direction clockwise rotates along arrow, the power that is applied by a pair of spring element 675,676 acts on like this, that is, make upper lobes base plate 671 float to the left side, make lower lobes base plate 671 float to the right side simultaneously.

Spring element 675,676 has different spring constants to apply above-mentioned power to protruding base plate 671.For example, under the situation that spring element 675,676 is made of disc spring, the spring constant of spring element 675 is greater than the spring constant of spring element 676.Under the situation that spring element 675,676 is made of compression disc spring, the spring constant of spring element 676 is greater than the spring constant of spring element 675.

Applying vibration to camshaft 660 vertically by operation vibration unit 30 simultaneously by operation rotating drive unit 40 makes camshaft 660 rotate around its axis, in recessed portion 27, advance in one way and shrink so that hold the bottom plate shell 673 of base plate 671, described mode is promptly followed the rotation of cam lobe part 661 applicatory respectively, thereby grinds the preparation of surfaces 665 of cam lobe part 661.

To as shown in the 40D, when grinding work-piece W, workpiece W only clockwise rotates along the indicated direction of arrow as Figure 40 A.The power that is applied by a pair of spring element 675,676 acts on like this, that is, make protruding base plate 671 along floating with the direction of workpiece direction of rotation.

According to the rotation of workpiece W, protruding base plate 671 Figure 40 A in the 40D towards floating to right.When the processing part of workpiece W when top area moves to operating space, the effect of spring element 675 makes protruding base plate 671 float towards direction left in the 40D at Figure 40 A.(seeing Figure 40 D)

Therefore, contact point between projection base plate 671 and the grinding film 1 is dispersed in the constant zone, and the contact point between grinding film 1 and the workpiece W is dispersed in the constant zone, thereby has reduced the local damage of protruding base plate 671, the obstruction of grinding film 1 and the separation of abrasive particle.

In the above-described embodiments, because the driving mechanism 631 of floating unit 630 forces protruding base plate 671 to vibrate in the mode of floating, can be the vibration that protruding base plate 671 is accurately controlled in the various turned positions of workpiece W during the processing.For example, for the cam lobe part 661 of grinding the desired very fine surface smoothness of top area Ca and operating space Cb1 and Cb2, protruding base plate 671 can be controlled to such an extent that only when workpiece W rests in the turned position of processing top area Ca or operating space Cb1 and Cb2, vibrate in unsteady mode.Vibrate in the mode of floating in the time of the proper workpiece W of protruding base plate 671 controls once can being rotated, or when workpiece W rotates with the angle of rotation of preset range, vibrate the limited time.

Although the driving mechanism 631 of above-mentioned floating unit 630 is made of bar 632, linkage 633, motor M4 etc., driving mechanism 631 also can be made of miscellaneous part.For example, fluid pressure cylinder such as hydraulic cylinder or pneumatic cylinder, can be used for making that protruding base plate 671 is forced to vibration in the mode of floating.A plurality of protruding base plates 671 (being top base plate and lower raft in the example shown) can be connected with driving mechanism 631 independently.

Although, the flexible member 675 and 676 that is included in the floating unit 630 is made of disc spring, but flexible member 675 and 676 also can be made of other materials, such as leaf spring, disk spring and elastic rubber material, as long as flexible member can put on power on the protruding base plate 671, so that protruding base plate 671 edges vibrate in the mode of floating with the direction of the direction of rotation of workpiece W.

Merge content here with reference to Japanese patent application No.2003-058954, No.2003-034088, No.2003-066595, No.2003-036701, No.2003-058964 and No.2003-034064.

Though used specific term to describe the preferred embodiments of the present invention, this only is for illustrative purposes, and it should be understood that under the situation of the spirit or scope that do not break away from following claim, and the technical staff can change and revises it.

Claims

1. milling apparatus comprises:

Grinding film;

Supply with the film feeder of described film;

First drive unit that workpiece is rotated;

Make second drive unit of described workpiece with respect to described film motion;

The base plate group;

Control described base plate group with the base plate group control device of described mould on workpiece; And

Delay the degeneration delayer of degeneration of the abrasiveness of described film.

2. milling apparatus as claimed in claim 1 is characterized in that

Described base plate group comprises first base plate with certain width and second base plate with described width, and described second base plate is keeping described width to multiply by the distance of an integer with described first base plate, and

The degeneration delayer comprises the controller apart from delivery film of controlling diaphragm feeder with described width.

3. milling apparatus as claimed in claim 2 is characterized in that

Described base plate group comprises that quantity equals the base plate of described integer.

4. milling apparatus as claimed in claim 2 is characterized in that

Described base plate group comprises the first base plate group and the second base plate group, and

The degeneration delayer comprises the lapped face status detection device that is used to detect film between the described first base plate group and the second base plate group, and

Described controller is controlled described film feeder according to the state that is detected by described detector.

5. milling apparatus as claimed in claim 1 is characterized in that

The degeneration delayer comprises the cleaner that is used to clean the film lapped face between the described first base plate group and the second base plate group.

6. milling apparatus as claimed in claim 5 is characterized in that

The degeneration delayer comprises the film coiler that is used for the described film so that described lapped face mode is outwardly reeled.

7. milling apparatus as claimed in claim 5 is characterized in that

Described cleaner comprises the ultrasonic wave brush.

8. milling apparatus as claimed in claim 5 is characterized in that

Described cleaner comprises the ultrasonic wave bath.

9. milling apparatus as claimed in claim 5 is characterized in that

Described cleaner comprises nozzle.

10. milling apparatus as claimed in claim 5 is characterized in that

Described film comprises flexible and not extending substrate.

11. milling apparatus as claimed in claim 1 is characterized in that

Described base plate group comprises first base plate and second base plate, and

First detour generator and the lubricant feeder that is used for lubricant is supplied to first space that the degeneration delayer comprises that first of first space that is used to film to provide to be limited between described first base plate and second base plate detours.

12. milling apparatus as claimed in claim 11 is characterized in that

Described film comprises flexible and not extending substrate.

13. milling apparatus as claimed in claim 11 is characterized in that

Described base plate group comprises the 3rd base plate,

Second generator of detouring that the degeneration delayer comprises that second of second space that is used to film to provide to be limited between described second base plate and the 3rd base plate detours, and

The lubricant feeder is used for lubricant is supplied to second space.

14. milling apparatus as claimed in claim 11 is characterized in that

Described first generator of detouring comprises and is used to make first to detour around its idler roller with along the biased element of the first circuitous direction bias voltage idler roller of detouring.

15. milling apparatus as claimed in claim 14 is characterized in that

Described idler roller is rotating.

16. milling apparatus as claimed in claim 11 is characterized in that

The degeneration delayer comprises bottom plate shell, described bottom plate shell has second support section that is used to support first support section of described first base plate and is used to support described second base plate, first support section and second support section be along the radially extension of workpiece, and limit one be used to hold first and detour and from the detour slit of generator of first of bottom plate shell resilient suspension between first support section and second support section.

17. milling apparatus as claimed in claim 16 is characterized in that

Described lubricant feeder comprises and is formed in the described bottom plate shell and the lubricant paths network that communicates with first space.

18. milling apparatus as claimed in claim 11 is characterized in that

Described lubricant feeder is used for from first conveyor lubricant around the generator of detouring.

19. milling apparatus as claimed in claim 1 is characterized in that

Described degeneration delayer comprise be used to make film on the direction of the supply of film with film vibrator greater than the speed vibration of workpiece rotational frequency.

20. milling apparatus as claimed in claim 19 is characterized in that

Described second drive unit comprises and is used to make workpiece Workpiece vibration device with respect to the film vibration on the direction of its pivot center.

21. milling apparatus as claimed in claim 19 is characterized in that

Described film vibrator comprises: the vibrating membrane drawing device, and described vibrating membrane drawing device has the film roller, has on the film roller by the base plate group to walk around its film on every side; Be used to make the radial vibration device of film roller along first radial vibration of workpiece; Tensioning film drawing device, described tensioning film drawing device has idler roller, has on the idler roller by the base plate group to walk around its film on every side; And be used for first radially the biased element of the second radial elastic bias voltage idler roller that is different from along workpiece.

22. milling apparatus as claimed in claim 21 is characterized in that

Described film vibrator involving vibrations film drawing device, another vibrating membrane drawing device and be arranged on tensioning film drawing device between them.

23. milling apparatus as claimed in claim 19 is characterized in that

The film feeder comprises the film lock that is used for film is locked in the first application point place on the film, and

Described film vibrator comprises the tensioning controller of the second application point place control film tensioning that is used on the film between described first application point and the base plate group.

24. milling apparatus as claimed in claim 19 is characterized in that

Described film comprises flexible and not extending substrate.

25. milling apparatus as claimed in claim 1 is characterized in that

The degeneration delayer comprises the film detector of the state of the lapped face that is used to detect film, and the controller of controlling one of described film feeder and base plate group control device according to the state that is detected.

26. milling apparatus as claimed in claim 25 is characterized in that

The state that is detected comprises the outstanding state of the abrasive grains of lapped face.

27. milling apparatus as claimed in claim 25 is characterized in that

Described degeneration delayer comprises the calibrator of lapped face being calibrated according to the state that is detected.

28. milling apparatus as claimed in claim 25 is characterized in that

The film detector can detect by the state to lapped face before grinding operation.

29. milling apparatus as claimed in claim 25 is characterized in that

The film detector can detect by the state to lapped face after grinding operation.

30. milling apparatus as claimed in claim 1 is characterized in that

Described base plate group comprises the convex surface base plate,

Described base plate group control device comprises the base plate flotator that base plate is floated, and

Described degeneration delayer comprises the controller that is used to control the contact site between base plate, film and the workpiece.

31. milling apparatus as claimed in claim 30 is characterized in that

Described controller comprises the detector that is used to detect the location of workpiece, and can drive base plate to change the driver of contact position according to the position of being detected.

32. milling apparatus as claimed in claim 30 is characterized in that

Described base plate flotator comprises a pair of spring of the base plate that dangles, and

The described position to spring of controller control is to change the position of base plate.

33. milling apparatus as claimed in claim 32 is characterized in that

Described have different spring constants to spring.

34. milling apparatus as claimed in claim 30 is characterized in that

Described film comprises flexible and not extending substrate.

35. milling apparatus as claimed in claim 1 is characterized in that

Described degeneration delayer comprises the obstruction delayer that the obstruction that is used to make film delays.

36. a milling apparatus comprises:

Grinding film;

Be used to supply with the film feedway of described film;

Be used to make first drive unit of workpiece rotation;

Be used to second drive unit that described workpiece is moved with respect to described film;

The base plate group;

Be used to control described base plate group with the base plate group actuation means of described mould on workpiece; And

Be used to delay the degeneration retarding means that the abrasiveness of described film is degenerated.

37. a Ginding process comprises:

Supply with grinding film;

Turning of work piece;

Described workpiece is moved with respect to described film;

Control described base plate group with described mould on workpiece; And

The grinding that delays described film is degenerated.

38. method as claimed in claim 37 is characterized in that,

Described delay to comprise the controlling diaphragm feeder with described width apart from delivery film.

39. Ginding process as claimed in claim 38 is characterized in that

40. Ginding process as claimed in claim 37 is characterized in that

The described state that delays to comprise the lapped face that detects the film between the described first base plate group and the second base plate group, and

Described control is to carry out according to the state that is detected.

41. Ginding process as claimed in claim 37 is characterized in that

The described lapped face that delays to comprise the film between the described first base plate group of cleaning and the second base plate group.

42. Ginding process as claimed in claim 37 is characterized in that

Describedly delay to be included as film detouring of the space that is limited between described first base plate and second base plate is provided, and lubricant is supplied to described space.

43. Ginding process as claimed in claim 37 is characterized in that

Described delay to comprise make film on the direction of the supply of film with greater than the vibration of the speed of workpiece rotational frequency.

44. Ginding process as claimed in claim 37 is characterized in that

The described state that delays to comprise the lapped face that detects film, and control described supply and one of control according to the state that is detected.

45. Ginding process as claimed in claim 37 is characterized in that

Described base plate group comprises the convex surface base plate,

Described controlling comprise base plate floated, and

The described contact site that delays to comprise between control base plate, film and the workpiece.