CN1515410A - Failure detection in miniature mechanoelectrical device by utilizing signal current pulse - Google Patents

Failure detection in miniature mechanoelectrical device by utilizing signal current pulse Download PDF

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Publication number
CN1515410A
CN1515410A CN 200310113183 CN200310113183A CN1515410A CN 1515410 A CN1515410 A CN 1515410A CN 200310113183 CN200310113183 CN 200310113183 CN 200310113183 A CN200310113183 A CN 200310113183A CN 1515410 A CN1515410 A CN 1515410A
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China
Prior art keywords
actuator arm
method
arm
nozzle
au00
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CN 200310113183
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Chinese (zh)
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CN1319740C (en
Inventor
卡・西尔弗布鲁克
卡·西尔弗布鲁克
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西尔弗布鲁克研究股份有限公司
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Publication of CN1319740C publication Critical patent/CN1319740C/en

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2/14427Structure of ink jet print heads with thermal bend detached actuators
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/015Ink jet characterised by the jet generation process
    • B41J2/04Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2/045Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
    • B41J2/04501Control methods or devices therefor, e.g. driver circuits, control circuits
    • B41J2/04508Control methods or devices therefor, e.g. driver circuits, control circuits aiming at correcting other parameters
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/015Ink jet characterised by the jet generation process
    • B41J2/04Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2/045Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
    • B41J2/04501Control methods or devices therefor, e.g. driver circuits, control circuits
    • B41J2/0451Control methods or devices therefor, e.g. driver circuits, control circuits for detecting failure, e.g. clogging, malfunctioning actuator
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/015Ink jet characterised by the jet generation process
    • B41J2/04Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2/045Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
    • B41J2/04501Control methods or devices therefor, e.g. driver circuits, control circuits
    • B41J2/04541Specific driving circuit
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/015Ink jet characterised by the jet generation process
    • B41J2/04Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2/045Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
    • B41J2/04501Control methods or devices therefor, e.g. driver circuits, control circuits
    • B41J2/04585Control methods or devices therefor, e.g. driver circuits, control circuits controlling heads based on thermal bent actuators
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/015Ink jet characterised by the jet generation process
    • B41J2/04Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2/045Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
    • B41J2/04501Control methods or devices therefor, e.g. driver circuits, control circuits
    • B41J2/04588Control methods or devices therefor, e.g. driver circuits, control circuits using a specific waveform
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/015Ink jet characterised by the jet generation process
    • B41J2/04Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2/045Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
    • B41J2/04501Control methods or devices therefor, e.g. driver circuits, control circuits
    • B41J2/0459Height of the driving signal being adjusted
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/015Ink jet characterised by the jet generation process
    • B41J2/04Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2/045Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
    • B41J2/04501Control methods or devices therefor, e.g. driver circuits, control circuits
    • B41J2/04591Width of the driving signal being adjusted
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/015Ink jet characterised by the jet generation process
    • B41J2/04Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2/045Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
    • B41J2/04501Control methods or devices therefor, e.g. driver circuits, control circuits
    • B41J2/04596Non-ejecting pulses
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/07Ink jet characterised by jet control
    • B41J2/125Sensors, e.g. deflection sensors
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J29/00Details of, or accessories for, typewriters or selective printing mechanisms not otherwise provided for
    • B41J29/38Drives, motors, controls or automatic cut-off devices for the entire printing mechanism
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J29/00Details of, or accessories for, typewriters or selective printing mechanisms not otherwise provided for
    • B41J29/38Drives, motors, controls or automatic cut-off devices for the entire printing mechanism
    • B41J29/393Devices for controlling or analysing the entire machine ; Controlling or analysing mechanical parameters involving printing of test patterns
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2002/14346Ejection by pressure produced by thermal deformation of ink chamber, e.g. buckling
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2002/14354Sensor in each pressure chamber
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, e.g. INK-JET PRINTERS, THERMAL PRINTERS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/14Structure thereof only for on-demand ink jet heads
    • B41J2/14427Structure of ink jet print heads with thermal bend detached actuators
    • B41J2002/14435Moving nozzle made of thermal bend detached actuator
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00Fluid handling
    • Y10T137/8158With indicator, register, recorder, alarm or inspection means
    • Y10T137/8225Position or extent of motion indicator
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00Fluid handling
    • Y10T137/8158With indicator, register, recorder, alarm or inspection means
    • Y10T137/8225Position or extent of motion indicator
    • Y10T137/8242Electrical

Abstract

本发明涉及利用信号电流脉冲在微型机电器件中检测故障,公开了在具有支撑结构和致动臂的类型的微型机电器件内检测故障的方法,所述致动臂在流过的热感应电流的影响下相对于所述支撑结构可移动,其中单个电流脉冲流过可移动臂。 The present invention relates to fault detection using a signal current pulse in microelectromechanical devices, it is disclosed a method of detecting a fault in a microelectromechanical device having a support structure and a type of the actuator arm, the actuator arm thermally induced current flowing through the Effect of lower phase structure is movable relative to the support, wherein a single current pulse flowing through the movable arm. 并确定做出响应的所述臂的移动。 Movement of the arm and a determination is made response.

Description

利用信号电流脉冲在微型机电器件中检测故障 Using a signal detected fault current pulse microelectromechanical devices

本申请是2002年1月24日提交的申请号为00810824.2、发明名称为“微型机电器件中的故障检测”的发明专利申请的分案申请。 This application is a divisional application Application No. 2002, January 24 filed 00810824.2, entitled "fault detection microelectromechanical devices," the patent application of the invention.

技术领域 FIELD

本发明涉及一种在微型机电(MEM)器件中检测故障并且如果合适的话就排除此故障的方法。 The present invention relates to a method for detecting a fault in the microelectromechanical (MEM) device and, if appropriate, on this fault exclusion method. 本发明可应用在墨水喷嘴类型方面,这些喷嘴通过结合可用于微型机电系统(MEMS)的技术以及辅助金属氧化物半导体(CMOS)集成电路而制造,并且本发明以下按此应用的情况进行描述。 The present invention can be applied to the types of ink nozzles, these nozzles may be used in conjunction with micro-electromechanical systems (MEMS) technology and a secondary metal-oxide semiconductor (CMOS) integrated circuit manufacturing, and Click case of applying the present invention will be described in the following. 然而,应该理解,本发明具有更广泛的应用,可在各种类型的MEM器件中排除故障。 However, it should be understood that the invention has broader applications, MEM troubleshooting in various types of devices.

共同未决的申请涉及本发明的各种方法、系统和装置在由本发明申请人或受让人与本申请同时提交的下列共同未决的申请中公开:PCT/AU00/00518,PCT/AU00/00519,PCT/AU00/00520,PCT/AU00/00521,PCT/AU00/00522,PCT/AU00/00523,PCT/AU00/00524,PCT/AU00/00525,PCT/AU00/00526,PCT/AU00/00527,PCT/AU00/00528,PCT/AU00/00529,PCT/AU00/00530,PCT/AU00/00531,PCT/AU00/00532,PCT/AU00/00533,PCT/AU00/00534,PCT/AU00/00535,PCT/AU00/00536,PCT/AU00/00537,PCT/AU00/00538,PCT/AU00/00539,PCT/AU00/00540,PCT/AU00/00541,PCT/AU00/00542,PCT/AU00/00543,PCT/AU00/00544,PCT/AU00/00545,PCT/AU00/00547,PCT/AU00/00546,PCT/AU00/00554,PCT/AU00/00556,PCT/AU00/00557,PCT/AU00/00558,PCT/AU00/00559,PCT/AU00/00560,PCT/AU00/00561,PCT/AU00/00562,PCT/AU00/00563,PCT/AU00/00564,PCT/AU00/00565,PCT/AU00/00566,PCT/AU00/00567,PCT/AU00/00568, Co-pending application of the present invention is directed to various methods, systems and apparatus of the present invention, the following applications the applicant or assignee of the present application and filed concurrently disclosed in co-pending: PCT / AU00 / 00518, PCT / AU00 / 00519, PCT / AU00 / 00520, PCT / AU00 / 00521, PCT / AU00 / 00522, PCT / AU00 / 00523, PCT / AU00 / 00524, PCT / AU00 / 00525, PCT / AU00 / 00526, PCT / AU00 / 00527, PCT / AU00 / 00528, PCT / AU00 / 00529, PCT / AU00 / 00530, PCT / AU00 / 00531, PCT / AU00 / 00532, PCT / AU00 / 00533, PCT / AU00 / 00534, PCT / AU00 / 00535, PCT / AU00 / 00536, PCT / AU00 / 00537, PCT / AU00 / 00538, PCT / AU00 / 00539, PCT / AU00 / 00540, PCT / AU00 / 00541, PCT / AU00 / 00542, PCT / AU00 / 00543, PCT / AU00 / 00544, PCT / AU00 / 00545, PCT / AU00 / 00547, PCT / AU00 / 00546, PCT / AU00 / 00554, PCT / AU00 / 00556, PCT / AU00 / 00557, PCT / AU00 / 00558, PCT / AU00 / 00559, PCT / AU00 / 00560, PCT / AU00 / 00561, PCT / AU00 / 00562, PCT / AU00 / 00563, PCT / AU00 / 00564, PCT / AU00 / 00565, PCT / AU00 / 00566, PCT / AU00 / 00567, PCT / AU00 / 00568,

PCT/AU00/00569,PCT/AU00/00570,PCT/AU00/00571,PCT/AU00/00572,PCT/AU00/00573,PCT/AU00/00574,PCT/AU00/00575,PCT/AU00/00576,PCT/AU00/00577,PCT/AU00/00578,PCT/AU00/00579,PCT/AU00/00581,PCT/AU00/00580,PCT/AU00/00582,PCT/AU00/00587,PCT/AU00/00588,PCT/AU00/00589,PCT/AU00/00583,PCT/AU00/00593,PCT/AU00/00590,PCT/AU00/00591,PCT/AU00/00592,PCT/AU00/00584,PCT/AU00/00585,PCT/AU00/00586,PCT/AU00/00594,PCT/AU00/00595,PCT/AU00/00596,PCT/AU00/00597,PCT/AU00/00598,PCT/AU00/00516,PCT/AU00/00517,PCT/AU00/00511,PCT/AU00/00501,PCT/AU00/00502,PCT/AU00/00503,PCT/AU00/00504,PCT/AU00/00505,PCT/AU00/00506,PCT/AU00/00507,PCT/AU00/00508,PCT/AU00/00509,PCT/AU00/00510,PCT/AU00/00512,PCT/AU00/00513,PCT/AU00/00514,PCT/AU00/00515。 PCT / AU00 / 00569, PCT / AU00 / 00570, PCT / AU00 / 00571, PCT / AU00 / 00572, PCT / AU00 / 00573, PCT / AU00 / 00574, PCT / AU00 / 00575, PCT / AU00 / 00576, PCT / AU00 / 00577, PCT / AU00 / 00578, PCT / AU00 / 00579, PCT / AU00 / 00581, PCT / AU00 / 00580, PCT / AU00 / 00582, PCT / AU00 / 00587, PCT / AU00 / 00588, PCT / AU00 / 00589, PCT / AU00 / 00583, PCT / AU00 / 00593, PCT / AU00 / 00590, PCT / AU00 / 00591, PCT / AU00 / 00592, PCT / AU00 / 00584, PCT / AU00 / 00585, PCT / AU00 / 00586, PCT / AU00 / 00594, PCT / AU00 / 00595, PCT / AU00 / 00596, PCT / AU00 / 00597, PCT / AU00 / 00598, PCT / AU00 / 00516, PCT / AU00 / 00517, PCT / AU00 / 00511, PCT / AU00 / 00501, PCT / AU00 / 00502, PCT / AU00 / 00503, PCT / AU00 / 00504, PCT / AU00 / 00505, PCT / AU00 / 00506, PCT / AU00 / 00507, PCT / AU00 / 00508, PCT / AU00 / 00509, PCT / AU00 / 00510, PCT / AU00 / 00512, PCT / AU00 / 00513, PCT / AU00 / 00514, PCT / AU00 / 00515.

这些共同未决申请的内容在此作为交叉参考。 These co-pending application is hereby incorporated by cross-reference.

背景技术 Background technique

近来,本申请人已开发高速页宽喷墨打印机。 Recently, the Applicant has developed a high-speed page-wide inkjet printers. 此打印机一般使用大约51200个墨水喷嘴在A4大小的纸上打印,提供1600dpi的照片质量图象打印。 This printer typically uses about 51,200 ink nozzles of the print paper in A4 size, providing a photo quality print images 1600dpi. 为了达到此喷嘴密度,喷嘴通过结合MEMS-CMOS技术来制造。 To achieve this density nozzle, the nozzle is manufactured by binding MEMS-CMOS technology.

在此打印机制造中的困难是:没有确保所有遍布打印头的喷嘴或事实上位于给定芯片上的喷嘴进行完全相同操作的简便方式,并且当由不同圆片获得的芯片需要组装成给定打印头时此问题进一步恶化。 Difficulties in manufacturing this printer is: not ensure that all nozzles of the printhead across or in fact located on a given chip nozzle simple manner of operation is identical, and when the chip is given print obtained by different wafer required to assemble this problem worsened when head. 而且,在从多个芯片制造完整的打印头之后,难以确定驱动单个喷嘴所需的能级,从而难以评估给定喷嘴的持续性能和难以检测单个喷嘴中的任何故障。 Further, after the complete manufacture of chips from the plurality of print heads, it is difficult to determine the level required to drive a single nozzle, making it difficult to assess the performance of a given duration and any failure of a single nozzle in the nozzle is difficult to detect.

发明内容 SUMMARY

本发明可广泛定义为:提供一种在微型机电器件中检测故障的方法,此种器件具有支撑结构、可相对于支撑结构移动的致动臂以及与致动臂相关联的移动传感器,在此,致动臂的移动是流经致动臂的热感应电流所引起的;其中,此方法包括以下步骤:(a)在致动臂中通过至少一个具有预定周期tp的电流脉冲;以及(b)检测致动臂的移动是否达到预定水平。 The present invention can be broadly defined as: to provide a method for detecting a failure in a microelectromechanical device, such a device has a support structure, the support structure may be moved relative to the actuating arm and a movement sensor associated with the actuator arm, in this moving the actuator arm is flowing through the actuator arm caused by thermally induced current; wherein the method comprises the steps of: (a) in the actuator arm by at least one current pulse having a predetermined period tp; and (b ) detects movement of the actuator arm reaches a predetermined level.

以上定义的方法允许在微型机电(MEM)器件使用中检测故障。 The method as defined above allows detection of a fault in a device using a micro-electromechanical (MEM) in. 如果在预定周期的电流脉冲通过致动臂后没检测到预定的移动水平,就可假定致动臂的移动受阻,原因例如为致动臂中已存在故障或致动臂的移动被阻挡。 If a current pulse by a predetermined period is not detected after the actuating arm moves to a predetermined level, we can assume that the mobile actuator arm is blocked, for example, the reason for the failure or actuator arm in the actuator arm is blocked existing mobile.

如果得出结论:在MEM器件中存在堵塞形式的故障,就可在致动臂中进一步通过至少一个电流脉冲(具有更高的能级)而尝试清除此故障。 If it is concluded: blockage MEM device in the form of a fault, the actuator arm can be further through the at least one current pulse (having a higher energy level) to attempt to clear the fault.

因而,本发明还进一步定义为:提供一种在MEM器件中检测并排除故障的方法,此两阶段方法包括以下步骤:(a)按以上定义的方式检测故障;以及(b)在致动臂中进一步通过至少一个其能级比故障检测电流脉冲更高的电流脉冲而排除此故障。 Accordingly, the present invention is further defined as: to provide a MEM device in the detection and troubleshooting method, this two-stage process comprising the steps of: (a) detecting a failure by the manner defined above; and (b) in the actuator arm at least a further higher energy level than the pulse current fault detection current pulses troubleshoot this.

如果此排除步骤不能纠正故障,MEM器件就可能过了维修期并且/或者需要返回供货商进行维修。 If this does not correct the fault troubleshooting steps, MEM devices may after a maintenance period and / or suppliers need to be returned for repair.

此故障检测方法可按后述实施:在致动臂中通过一个具有预定周期tp的电流脉冲并检测致动臂的移动是否达到预定水平。 This fault detection method according to embodiments described later: the actuating arm by a current pulse having a predetermined period tp and detects movement of the actuator arm reaches a predetermined level. 可替换地,在时间跨度t内,为了试图使致动臂移动的程度连续增加,可在致动臂中通过一系列其周期tp连续增加的电流脉冲。 Alternatively, in the time span t, for an attempt to move the actuator arm degree increases continuously, which cycle through a series of successively increasing current pulse tp actuating arm. 接着,在预定的时间窗口tw内检测致动臂的移动是否达到预定水平,在此t>tw>tp。 Next, detecting movement of the actuator arm reaches a predetermined level within a predetermined time window TW, here t> tw> tp.

本发明的优选特征本发明的故障检测方法优选应用于液体喷射器形式的MEM器件中,并最优选地应用于墨水喷嘴形式的MEM器件中,在致动臂被驱动时墨水喷嘴可喷射墨滴。 Fault detection method of the preferred features of the invention is preferably applied to the present invention is in the form of a liquid ejector device MEM, and most preferably applied to the ink in the form of a nozzle device MEM, when the actuator arm is driven ink nozzle may eject ink droplets . 在本发明的后一优选形式中,致动臂的第二端优选耦合到整体形成的闸门,此闸门用于从墨水室中喷出墨水,致动臂延伸进此室中。 In a preferred form of the invention, the second end is preferably coupled to the shutter actuator arm integrally formed, said shutter for ejecting ink from the ink chamber, the actuator arm extending into this chamber.

致动臂最优选地由两个相似形状的臂部分形成,这两个臂部分以内搭接的关系互连。 Most preferably, the actuator arm is formed from two similarly shaped arm portion, the relationship between the two arm portions are interconnected within overlapping. 在本发明的这个实施例中,臂的第一部分与电源连接,并布置得用于被单个电流脉冲或被多个周期为tp的电流脉冲加热。 In this embodiment of the invention, the first arm portion is connected to the power supply, and arranged for heating the single current pulse or a current pulse period tp of the plurality. 然而,臂的第二部分用于限制致动臂作为一个整体单元而线性膨胀,第一臂部分被热引发的伸长使弯曲沿着致动臂的长度方向发生。 However, the second arm portion for restricting actuator arm as a whole unit of linear expansion, a first arm portion thermally induced elongation of the bending occurs along the longitudinal direction of the actuator arm. 因而,随着致动臂的第一部分的加热和冷却,致动臂相对于支撑结构有效地旋转。 Thus, as the heating and cooling of the first portion of the actuator arm, the actuator arm relative to the support structure effectively rotate.

从以下对应用于墨水喷嘴的故障检测方法优选实施例的描述中,将更加完全地理解本发明,附图中示出墨水喷嘴。 From the following description of embodiments of the fault detection method is preferably applied to the ink nozzles, it will be more fully understood from the present invention, illustrated in the accompanying drawings ink nozzles.

附图说明 BRIEF DESCRIPTION

在附图中:图1示出墨水喷嘴一部分被高度放大的横截面视图;图2示出图1墨水喷嘴的平面视图;图3示出致动臂和墨水喷射闸门或墨水喷嘴的外部的透视图,致动臂和闸门以独立于喷嘴的其它元件的方式示出;图4示出与图3相似但与致动臂内部有关的布置;图5示出与图3和4相似但与整个致动臂有关的布置,完整的致动臂包括图3和4中所示的外部和内部;图6示出图5圆圈内所示的移动传感器布置的详细部分;图7示出图1中喷嘴在充墨之前的横截面视图;图8示出图7喷嘴的横截面视图,但其中致动臂和闸门被驱动到测试位置;图9示出当喷嘴在故障清除操作下被驱动时喷嘴的墨水喷射;图10示出当致动臂和闸门被驱动到一般足以从喷嘴喷射墨水的程度时喷嘴被堵塞的状况;图11示出喷嘴内所包含的一部分电路的示意图;图12示出可用于喷嘴致动臂正常(喷墨)驱 In the drawings: FIG 1 shows a part of the ink nozzle highly enlarged cross-sectional view; FIG. 2 shows a plan view of the ink nozzles 1; Figure 3 shows the actuator arm and the ink jet external perspective view of the ink nozzles or the shutter manner other elements of FIG, actuator arm and the shutter independently of the nozzle is shown; Figure 4 shows a similar to Figure 3 but with the interior of the actuating arm arrangement related; and 4 is similar to FIG. 5 shows the FIG. 3, but with the entire For actuating arm arrangement, actuator arm includes a complete internal and external shown in FIGS. 3 and 4; FIG. 6 shows a detailed portion of the mobile sensor arrangement shown in the circle in FIG. 5; FIG. 7 is shown in FIG. 1 a cross-sectional view of a nozzle before filling the ink; FIG. 8 shows a cross-sectional view of FIG. 7 of the nozzle, but wherein the actuating arm and the shutter is driven to the test position; FIG. 9 shows when the nozzle is driven at the fault clearing operations nozzle ink jet; Fig. 10 shows when the degree of the actuating arm and the shutter are driven to generally sufficient ejected from the nozzle of the ink when the nozzle is clogged condition; FIG. 11 is a schematic diagram illustrating a portion of the circuitry within nozzle included; FIG. 12 shows the actuating arm can be used for the normal nozzle (ink jet) flooding 的激励-时间图;图13示出可用于喷嘴致动臂测试驱动的激励-时间图; Excitation - time; Figure 13 shows the excitation of the actuator arm may be used to test the nozzle driving - time diagram;

图14示出可用于图12和13所示激励-时间图的比较性位移-时间曲线;图15示出可用于故障检测程序的激励-时间图;图16示出可用于喷嘴致动臂的温度-时间图,此图对应于图15的激励时间图;以及图17示出可用于喷嘴致动臂的偏移-时间图,此图对应于图15和16的激励/加热-时间图。 Figure 14 shows may be used as shown in FIGS. 12 and 13 excitation - comparative time diagram displacement - time curve; FIG. 15 illustrates an excitation can be used for fault detection program - time; Figure 16 shows an actuator arm for the nozzle temperature - time diagram, this excitation time corresponds to FIG 15; and Figure 17 shows a nozzle may be used to offset the actuator arm - time diagram, this corresponds to FIG. 15 and FIG. 16 excitation / heating - time diagram.

具体实施方式 Detailed ways

如在图1和其它相关附图中以大约3000x放大倍数所例示的,单墨水喷嘴器件为芯片的一部分示出,此芯片通过结合MEMS和CMOS技术而制造。 As in FIG. 1 and other figures related to a magnification of about 3000x illustrated, a single ink nozzle device is shown a portion of a chip, the chip produced by combining MEMS and CMOS technology. 完整的喷嘴器件包括具有硅基片的支撑结构20、金属氧化物半导体层21、钝化层22和非腐蚀性介电涂层/室确定层23。 Complete nozzle device comprises a support structure having a silicon substrate 20, metal oxide semiconductor layer 21, passivation layer 22 and noncorrosive dielectric coating / layer chamber 23 is determined.

喷嘴器件包括连接到墨水源(未示出)的墨水室24以及位于所述室上方的喷嘴室25。 A nozzle connected to a device comprising an ink source (not shown) of the ink chamber 24 and the nozzle chamber 25 located above the chamber. 在室确定层23中设有喷嘴开孔26以允许墨滴喷出到纸上或其它介质上(未示出),墨水将淀积在纸或其它介质上。 Chamber layer 23 is determined in a nozzle aperture 26 to allow the ink droplets onto the paper or other medium (not shown), the ink deposited on the paper or other medium. 如图1和7所示,闸门27位于两个室24和25之间,并且当处于静止位置时,闸门27有效地分隔开两个室24和25。 As shown in FIG. 1 and 7, the shutter 27 is located between the two chambers 24 and 25, and when in the rest position, the shutter 27 effectively separated from the two chambers 24 and 25.

闸门27通过闸门延伸端29和介电涂层23的桥接部分30耦合到致动臂28。 End 29 and the shutter 27 extends dielectric coating 23 is coupled by a bridging portion 30 to the shutter actuator arm 28.

致动臂28形成(即在器件的制造过程中淀积)得相对于支撑结构或基片20是可旋转的。 Actuating arm 28 is formed (i.e., deposited in the device during the manufacturing process) obtained with respect to the substrate 20 or the support structure is rotatable. 亦即,致动臂具有耦合到支撑结构的第一端和可相对于此支撑结构向外移动的第二端38。 That, coupled to the actuating arm having a first end and a second end 38 relative to this support structure of the support structure moves outward. 致动臂28包括外、内臂部分31和32。 The actuator includes an outer arm 28, inner arm portion 31 and 32. 在图3所示的透视图中,外臂部分31被详细示出并与喷嘴器件的其它部件是隔离的。 In the perspective view shown in FIG. 3, the outer arm portion 31 is shown in more detail and with other components of the nozzle device are isolated. 在图4中以相似的方式示出内臂部分32。 In a manner similar to FIG. 4 shows the inner arm portion 32. 在图5透视图以及图1、7、8、9和10中示出完整的致动臂28。 In the perspective view of FIG. 5 and FIGS. 1,7,8,9 and 10 show a complete actuation arm 28.

致动臂28的内部分32在喷嘴器件形成过程中由钛铝氮化物(TiAl)N淀积形成,并且如图11示意性示出的,内部分32电连接到CMOS结构内的电源33。 The actuator arm 28 during portion 32 (TiAl) N deposition of titanium aluminum nitride is formed in the nozzle device, and Figure 11 schematically illustrated, the inner portion 32 is electrically connected to the power source 33 in the CMOS structure. 在接线端34和35上进行电连接,施加到接线端上的脉冲激励(驱动)电压导致脉冲电流只流经致动臂28的内部分。 Electrically connected to the terminals 34 and 35, the excitation pulse is applied to terminals (driving) voltage results in a pulse current flows through only the part of the actuating arm 28. 电流在致动臂的内部分32内产生迅速的电阻加热,结果导致臂的此部分瞬间伸长。 Rapid resistance heating current generating portion 32 in the actuator arm, resulting in elongation of this portion of the arm of the moment.

致动臂28的外臂部分31通过柱36机械耦合到内臂部分32上,但与之是电隔绝的。 The outer arm portions 28 of the actuator arm 31 is coupled to the arm portion 32 on the inner column 36 by a mechanical, but electrically insulated therewith. 在外臂部分31内不产生电流引发的热,结果,电压感应的电流流经内臂部分32使整个致动臂28以图8、9和10所示的方式产生瞬间弯曲。 Thermally induced current is not generated in the outer arm portion 31, a result, the current flowing through the voltage induced in the arm portion 32 so that the whole of the actuator arm 28 in the manner shown in FIG. 8, 9 and 10 generate the bending moment. 致动臂28的此种弯曲等效于此臂相对于基片20的旋转运动,并导致闸门27在室24和25内产生位移。 Such actuator arm of the bent arm 28 is equivalent to this rotational movement relative to the substrate 20, resulting in displacement of 24 and 25 and the shutter 27 in the chamber.

在器件中设置集成的移动传感器,以便确定致动臂28旋转运动的程度或速度并且允许在器件中进行故障检测。 A sensor provided in the integrated mobile device to determine the extent or rate of rotational movement 28 and the actuator arm allows fault detection in the device.

移动传感器包括移动接触元件37,元件37与致动臂28的内部分32整体形成并且当电流流经致动臂的内部分时是可被电激励的。 Movement sensor comprises a moving contact element 37, element 37 is formed integrally with the portion 32 within the actuator arm 28 and when current flows through the interior of the actuator arm can be time-sharing is electrically energized. 移动接触元件37与致动臂的第二端38相邻布置,因此,随着电压V施加到接线端34和35上时,移动接触元件的电势大约为V/2。 The movable contact member 37 is disposed with the actuating arm adjacent the second end 38, and therefore, when as the voltage V is applied to the terminals 34 and 35, the movable contact member about the potential V / 2. 移动传感器还包括固定接触元件39,元件39与CMOS层22整体形成并定位得当致动臂28向上旋转预定程度时与移动接触元件37接触。 Further comprising a movement sensor fixed contact member 39, member 39 is formed integrally with the CMOS layer 22 and positioned properly actuating element 37 in contact with the contact arm 28 moves upward by a predetermined degree of rotation. 固定接触元件电连接到放大器元件40和微处理器结构41,这两者都在图11中示出并且其组成元件包括在器件的CMOS层22内。 Amplifier element 40 is connected to the fixed contact member and a microprocessor electrically structure 41, both of which are shown in FIG. 11 and its constituent elements included in the CMOS device layer 22.

如图1和7所示,当致动臂28,以及因此当闸门27处于静止位置时,在移动和固定接触元件37和39之间没有接触。 As shown in FIG. 1 and 7, when the actuator arm 28, and thus when the shutter 27 is in the rest position, between the mobile and the fixed contact element 37 and 39 there is no contact. 在另一极限情况下,如图8和9所示,当致动臂和闸门发生过度的移动时,在移动和固定接触元件37和39之间发生接触。 In the other extreme case, as shown in FIG. 8 and, when the actuator arm and the shutter relatively excessive movement of the contact 9 occurs between the mobile and the fixed contact member 37 and 39. 当致动臂28和闸门27被驱动到足以从喷嘴喷出墨水的正常程度时,在移动和固定接触元件之间没有接触。 When the actuator arm 28 and the shutter 27 is driven to eject ink from the nozzle sufficient to normal levels between the mobile and the fixed contact elements are not in contact. 亦即,当从室25正常喷射墨水时,致动臂28和闸门27移动到处于图7和8所示位置之间的途中位置上。 That is, when the normal ejection of ink from the chamber 25, the actuating arm 28 and the shutter 27 moves to a position in the middle between the position shown in FIGS. 7 and 8 on. 此(中间)位置如图10所示,尽管这是喷嘴被堵塞的结果而不是在墨水从喷嘴正常喷出的过程中。 This (middle) position shown in Figure 10, although this is a result of nozzle clogging during ink not ejected from a normal nozzle.

图12示出激励-时间图,此图可用于使致动臂28和闸门27从静止位置驱动到低于正常的墨水喷射位置。 Figure 12 shows the excitation - time diagram, this figure can be used to actuator arm 28 and the shutter drive 27 from the rest position to a position below the normal ink ejection. 从图12激励所产生的闸门27位移在图14中由下曲线42表示,从图中可看出,位移的最大值小于位移线43所示的最佳水平。 The shutter 12 resulting from excitation by the FIG. 27 showing displacement curve 42 in FIG. 14, it can be seen from the figure, the maximum displacement less than the optimum level as shown in line 43 of the displacement.

图13示出延长的激励-时间图,此图可用于使致动臂28和闸门27被过度驱动,如图8和9所示。 Figure 13 shows an extended excitation - time diagram, this figure can be used to actuator arm 28 and the shutter 27 is overdriven, 8 and 9. 从图13激励所产生的闸门27位移在图14中由上曲线44表示,从图中可看出,最大位移水平大于位移线43所示的最佳水平。 The shutter 13 resulting from displacement of excitation represented by FIG. 27 on the curve 44 in FIG. 14, can be seen from the figure, the horizontal displacement is greater than the maximum displacement of the optimum level as shown in line 43.

图15、16和17示出施加到致动臂28的激励周期连续增加时,激励电压、致动臂温度和闸门偏移相对于时间的曲线图。 Figures 15, 16 and 17 show the actuating arm 28 increases continuously excitation period, excitation voltage, and the shutter actuator arm offset temperature versus time graph applied to. 这些图与喷嘴器件中的故障检测有关联。 FIG These fault detection devices associated nozzle.

当在喷嘴器件中或在喷嘴器件阵列的每个器件中检测故障状况时,在时间跨度t内,一系列其周期tp连续增加的电流脉冲被引导流经致动臂28。 When a fault condition is detected or device in each device in the array of nozzles of the nozzle device in a time span t, which is a series of continuously increasing pitch tp is directed current pulses passing through the actuator arm 28. 控制周期tp使其以图15图形所示的方式增加。 Tp control cycle so as to increase the pattern 15 shown in FIG.

每个电流脉冲在致动臂内引发瞬间加热,结果导致温度上升,随后在脉冲周期终止时温度下降。 Each current pulse induced in the actuator arm heated instantaneously, resulting in temperature increase, and then decrease in temperature at the termination of the pulse period. 如图16所示,随着图15所示的脉冲周期增加,温度升高到连续更高的水平。 As shown in FIG. 16, as the pulse period shown in FIG. 15, the temperature was raised to successively higher levels.

结果,如图17所示,在正常情况下,致动臂28会在连续增加的程度上发生移动(旋转),有时会低于使移动和固定接触元件37和39之间产生接触所要求的水平而其它时候则会高于使移动和固定接触元件之间产生接触所要求的水平。 The results, shown in Figure 17, under normal circumstances, the actuator arm 28 moves (rotates) occurs at successively increasing the degree, sometimes lower than the moving and the fixed contact element to produce the desired contact between the 37 and the 39 level at other times will be higher than the moving and the fixed contact member into contact to produce the desired level between. 这由图17中的“测试水平”线表示。 This is represented in FIG 17 by the "test level" line. 然而,如果在喷嘴器件中发生堵塞,如图10所示,闸门27,以及因而致动臂28将被限制而不能移动到从喷嘴喷射墨水所需的正常的完全程度。 However, if clogging occurs in the nozzle device shown in Figure 10, the shutter 27, and the desired normal full level of the ink ejected from the nozzle thereby actuating arm 28 is restricted from moving to. 结果,致动臂正常的完全移动将不会发生并且在移动和固定接触元件37和39之间不会产生接触。 As a result, the actuator arm moves completely normal and will not occur between the mobile and the fixed contact member 37 and 39 do not come into contact.

如果当预定周期tp的电流脉冲流经致动臂时不产生此种接触,就可得出结论:在喷嘴器件中已发生堵塞。 If a predetermined period when a current flows through the pulse tp is not generated when the actuator arm such access, lead to the conclusion: nozzle clogging has occurred in the device. 然后这可通过使进一步的电流脉冲流经致动臂28而得到排除,这进一步的电流脉冲具有比正常流经致动臂的脉冲明显更高的能级。 This can then be obtained by further negative current pulses passing through the actuator arm 28, which further current pulses having a pulse actuator arm significantly higher than normal level flows. 如果这能有效除去堵塞,就会发生图9所示的喷墨。 If this can effectively remove the clogging, the ink jet shown in FIG. 9 occurs.

作为用于故障检测的更简单的替代程序,如图12所示的单个电流脉冲可被引导流经致动臂,并且可简单地检测致动臂的移动是否足以使移动和固定接触元件之间产生接触。 As a more simple alternative procedure for fault detection, a single current pulse shown in FIG. 12 may be directed to flow through actuator arm, and may simply detect whether the mobile actuator arm is sufficient to move between the fixed contact member and make contact.

只要不偏离后附权利要求的范围,可对上述作为本发明优选实施例而描述的器件作各种改变和变更。 Without departing from the scope of the appended claims, various changes and modifications may be made to the device as a preferred embodiment of the present invention described above.

Claims (16)

1.在具有支撑结构和致动臂的微型机电器件内检测故障的方法,所述致动臂在流经至少部分致动臂的热感应电流的影响下相对于所述支撑结构可移动,所述方法包括以下步骤:(a)使具有预定持续时间tp的第一电流脉冲通过所述致动臂,和(b)确定做出响应的致动臂的移动。 1. Effect of the method of the microelectromechanical device having a support structure and the actuator arm detecting a failure, the actuator arm at least partially flow through the heat of the actuator arm relative to the induction current to the moveable support structure, the said method comprising the steps of: (a) that the first current pulse having a predetermined duration tp by the actuating arm, and (b) determining the movement of the actuator arm responsive.
2.如权利要求1的方法,包括确定所述臂的移动量、移动速度和预定量的移动中的一个。 2. The method as claimed in claim 1, comprising determining a movement amount of the movement of the arm, and a moving speed of a predetermined amount.
3.如权利要求1的方法,包括确定所述臂是否已经移动一个预定的量。 3. The method as claimed in claim 1, comprising determining whether the boom has moved a predetermined amount.
4.如权利要求1的方法,包括确定电路状态是否已经由于所述臂的移动而改变。 4. The method as claimed in claim 1, comprising determining whether the state of the circuit due to the movement of the arm has changed.
5.如权利要求4的方法,包括确定电路的关闭。 5. A method as claimed in claim 4, comprising determining the shutdown circuit.
6.如权利要求1的方法,当应用于涉及具有液体贮存室的液体喷嘴时,通过致动臂的移动,液体从喷嘴喷出。 6. The method of claim 1, relates to a liquid when applied to the nozzle the liquid storage chamber, by moving the actuator arm, the liquid ejected from the nozzle.
7.如权利要求1的方法,当应用于涉及具有墨水贮存室的墨水喷嘴时,通过致动臂的移动,墨水从喷嘴喷出。 7. The method of claim 1, relates to an ink when applied to the nozzle of the ink storage chamber, by moving the actuator arm, ink is ejected from the nozzle.
8.如权利要求1的方法,包括提供一个移动传感器,该移动传感器包括与致动臂形成一体的移动接触元件、与支撑结构形成一体的固定接触元件、和形成在支撑结构内的电路元件,其中通过固定接触元件和移动接触元件之间的接触检测致动臂的预定程度的移动。 8. The method comprising providing a motion sensor, the motion sensor element comprising a fixed contact element, with the support structure in contact with the mobile actuator arm are integrally formed of integrally formed, and the circuit elements are formed in the support structure as claimed in claim, wherein detecting a predetermined degree of movement of the actuating arm by the contact between the fixed contact member and movable contact member.
9.在具有支撑结构和致动臂的微型机电器件内检测和排除故障的方法,所述致动臂在流经该致动臂的热感应电流的影响下相对于所述支撑结构可移动,所述方法包括以下步骤:(a)使具有预定持续时间tp的第一电流脉冲通过所述致动臂;(b)确定做出响应的致动臂的移动;和(c)通过使其能级比第一电流脉冲更高的至少一个另外的电流脉冲通过所述致动臂来排除故障。 9. A method of detecting and troubleshooting in a microelectromechanical device having a support structure and the actuator arm, the actuator arm of the impact of the actuator arm in thermally-induced current flowing through the lower phase is movable relative to the support structure, said method comprising the steps of: (a) that the first current pulse having a predetermined duration tp by said actuating arm; (b) a determination is made in response to movement of the actuator arm; and (c) so that it can pass a higher level than the first current pulse of at least one further current pulse through the actuating arm to troubleshoot.
10.如权利要求9的方法,其中步骤(b)包括确定所述臂的移动量、移动速度、和预定量的移动中的一个。 10. The method of claim 9, wherein step (b) comprises determining an amount of movement of a moving speed of the arm, and moves in a predetermined amount.
11.如权利要求9的方法,其中步骤(b)包括确定所述臂是否已经移动预定的量。 11. The method of claim 9, wherein step (b) comprises determining whether the boom has moved a predetermined amount.
12.如权利要求9的方法,其中步骤(b)包括确定是否电路状态已经由于所述臂的移动而改变。 12. The method of claim 9, wherein step (b) comprises determining whether the state of the circuit due to the movement of the arm has changed.
13.如权利要求12的方法,其中步骤(b)包括确定电路的关闭。 13. The method of claim 12, wherein step (b) comprises determining the closed circuit.
14.如权利要求9的方法,当应用于涉及具有液体贮存室的液体喷嘴时,通过致动臂的移动,液体从喷嘴喷出。 14. The method of claim 9, relates to a liquid when applied to the nozzle the liquid storage chamber, by moving the actuator arm, the liquid ejected from the nozzle.
15.如权利要求9的方法,当应用于涉及具有墨水贮存室的墨水喷嘴时,通过致动臂的移动,墨水从喷嘴喷出。 15. The method of claim 9, relates to an ink when applied to the nozzle of the ink storage chamber, by moving the actuator arm, ink is ejected from the nozzle.
16.如权利要求9的方法,包括提供一个移动传感器,该移动传感器包括与致动臂形成一体的移动接触元件、与支撑结构形成一体的固定接触元件、和形成在支撑结构内的电路元件,其中通过在步骤(b)固定接触元件和移动接触元件之间的接触检测致动臂的预定程度的移动。 16. The method of claim 9, comprising a motion sensor, the motion sensor element comprising a fixed contact element, with the support structure in contact with the mobile actuator arm are integrally formed of integrally formed, and the circuit elements are formed within the support structure, wherein the predetermined degree of movement by a step (b) detects the contact between the fixed contact member and movable contact element of the actuator arm.
CN 200310113183 1999-06-30 2000-05-24 Failure detection in miniature mechanoelectrical device by utilizing signal current pulse CN1319740C (en)

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