CN1499156A - 太阳能真空集热管溅射选择性光吸收膜形成方法 - Google Patents
太阳能真空集热管溅射选择性光吸收膜形成方法 Download PDFInfo
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- CN1499156A CN1499156A CNA021501416A CN02150141A CN1499156A CN 1499156 A CN1499156 A CN 1499156A CN A021501416 A CNA021501416 A CN A021501416A CN 02150141 A CN02150141 A CN 02150141A CN 1499156 A CN1499156 A CN 1499156A
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- 239000012528 membrane Substances 0.000 title claims abstract description 6
- 238000000034 method Methods 0.000 title claims description 20
- 230000031700 light absorption Effects 0.000 title description 3
- 229910052751 metal Inorganic materials 0.000 claims abstract description 115
- 239000002184 metal Substances 0.000 claims abstract description 115
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 72
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 72
- 238000004544 sputter deposition Methods 0.000 claims abstract description 41
- 238000010521 absorption reaction Methods 0.000 claims abstract description 28
- 239000000919 ceramic Substances 0.000 claims abstract description 20
- 239000007789 gas Substances 0.000 claims description 79
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 72
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 claims description 68
- 238000006243 chemical reaction Methods 0.000 claims description 45
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 claims description 38
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 claims description 38
- 229910052757 nitrogen Inorganic materials 0.000 claims description 37
- 239000000376 reactant Substances 0.000 claims description 35
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 34
- 238000000576 coating method Methods 0.000 claims description 30
- 239000011248 coating agent Substances 0.000 claims description 23
- 239000000203 mixture Substances 0.000 claims description 21
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 19
- 229910052721 tungsten Inorganic materials 0.000 claims description 19
- 239000010937 tungsten Substances 0.000 claims description 19
- 238000004062 sedimentation Methods 0.000 claims description 18
- 229910052786 argon Inorganic materials 0.000 claims description 17
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical group [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 16
- 229910052782 aluminium Inorganic materials 0.000 claims description 16
- 238000000151 deposition Methods 0.000 claims description 16
- 239000004411 aluminium Substances 0.000 claims description 15
- 239000000463 material Substances 0.000 claims description 13
- 239000002131 composite material Substances 0.000 claims description 10
- 230000008021 deposition Effects 0.000 claims description 10
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 8
- 230000015572 biosynthetic process Effects 0.000 claims description 8
- 239000007769 metal material Substances 0.000 claims description 8
- 239000012495 reaction gas Substances 0.000 claims description 8
- 238000002156 mixing Methods 0.000 claims description 7
- 229910021654 trace metal Inorganic materials 0.000 claims description 7
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 6
- 229910052750 molybdenum Inorganic materials 0.000 claims description 6
- 239000011733 molybdenum Substances 0.000 claims description 6
- 230000000694 effects Effects 0.000 claims description 5
- 238000001755 magnetron sputter deposition Methods 0.000 claims description 5
- 230000003068 static effect Effects 0.000 claims description 5
- 230000008859 change Effects 0.000 claims description 4
- 150000001875 compounds Chemical class 0.000 claims description 4
- 230000007423 decrease Effects 0.000 claims description 4
- 229910052759 nickel Inorganic materials 0.000 claims description 4
- 238000007670 refining Methods 0.000 claims description 4
- 238000005477 sputtering target Methods 0.000 claims description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 3
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 claims description 3
- 229910052802 copper Inorganic materials 0.000 claims description 3
- 239000010949 copper Substances 0.000 claims description 3
- 239000010935 stainless steel Substances 0.000 claims description 3
- 229910001220 stainless steel Inorganic materials 0.000 claims description 3
- 229910000881 Cu alloy Inorganic materials 0.000 claims description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 2
- 239000010931 gold Substances 0.000 claims description 2
- 229910052737 gold Inorganic materials 0.000 claims description 2
- 238000001465 metallisation Methods 0.000 claims description 2
- 229910052755 nonmetal Inorganic materials 0.000 claims description 2
- 229910052709 silver Inorganic materials 0.000 claims description 2
- 239000004332 silver Substances 0.000 claims description 2
- 239000010936 titanium Substances 0.000 claims description 2
- 229910052719 titanium Inorganic materials 0.000 claims description 2
- 238000005755 formation reaction Methods 0.000 claims 3
- 238000003825 pressing Methods 0.000 claims 1
- 230000003287 optical effect Effects 0.000 abstract description 4
- 239000013078 crystal Substances 0.000 abstract 3
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 105
- 238000005546 reactive sputtering Methods 0.000 description 35
- 229910017083 AlN Inorganic materials 0.000 description 7
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 7
- 239000007888 film coating Substances 0.000 description 6
- 238000009501 film coating Methods 0.000 description 6
- 239000006096 absorbing agent Substances 0.000 description 5
- 239000012530 fluid Substances 0.000 description 5
- 230000005855 radiation Effects 0.000 description 5
- 238000009413 insulation Methods 0.000 description 4
- 238000001816 cooling Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000011159 matrix material Substances 0.000 description 3
- IWBUYGUPYWKAMK-UHFFFAOYSA-N [AlH3].[N] Chemical compound [AlH3].[N] IWBUYGUPYWKAMK-UHFFFAOYSA-N 0.000 description 2
- 239000006117 anti-reflective coating Substances 0.000 description 2
- 235000019628 coolness Nutrition 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000000605 extraction Methods 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- 230000010512 thermal transition Effects 0.000 description 2
- 229910001080 W alloy Inorganic materials 0.000 description 1
- CKUAXEQHGKSLHN-UHFFFAOYSA-N [C].[N] Chemical compound [C].[N] CKUAXEQHGKSLHN-UHFFFAOYSA-N 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000008246 gaseous mixture Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 230000004446 light reflex Effects 0.000 description 1
- 239000011777 magnesium Substances 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 230000011514 reflex Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- -1 tungsten Chemical class 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/40—Solar thermal energy, e.g. solar towers
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- Surface Treatment Of Optical Elements (AREA)
- Physical Vapour Deposition (AREA)
Abstract
Description
Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CNB021501416A CN100381764C (zh) | 2002-11-09 | 2002-11-09 | 太阳能真空集热管溅射选择性光吸收膜形成方法 |
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CNB021501416A CN100381764C (zh) | 2002-11-09 | 2002-11-09 | 太阳能真空集热管溅射选择性光吸收膜形成方法 |
Publications (2)
Publication Number | Publication Date |
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CN1499156A true CN1499156A (zh) | 2004-05-26 |
CN100381764C CN100381764C (zh) | 2008-04-16 |
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CNB021501416A Expired - Fee Related CN100381764C (zh) | 2002-11-09 | 2002-11-09 | 太阳能真空集热管溅射选择性光吸收膜形成方法 |
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CN (1) | CN100381764C (zh) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1300370C (zh) * | 2004-06-21 | 2007-02-14 | 朱德永 | 太阳光谱选择性吸收涂层的沉积方法 |
CN100487337C (zh) * | 2007-01-22 | 2009-05-13 | 罗赞继 | 涂敷选择性吸收复合膜的太阳能吸热板芯及其制作方法 |
CN102207341A (zh) * | 2011-07-01 | 2011-10-05 | 中国华能集团清洁能源技术研究院有限公司 | 中高温直通式太阳能金属集热管 |
WO2017054780A1 (zh) * | 2015-09-29 | 2017-04-06 | 淄博环能海臣环保技术服务有限公司 | 一种蚀刻生成耐高温选择性吸收功能膜 |
CN108917210A (zh) * | 2018-04-28 | 2018-11-30 | 陕西科技大学 | 一种自掺杂纳米复合光热转换涂层及其制备方法 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4339484A (en) * | 1977-05-17 | 1982-07-13 | University Of Sydney | Solar collector |
CN1018021B (zh) * | 1991-06-18 | 1992-08-26 | 北京市太阳能研究所 | 太阳能选择性吸收膜及制备方法 |
CN1020797C (zh) * | 1991-06-18 | 1993-05-19 | 北京市太阳能研究所 | 光-热转换吸收薄膜及制备 |
IN185567B (zh) * | 1991-07-19 | 2001-03-03 | Univ Sydney | |
AUPN364195A0 (en) * | 1995-06-19 | 1995-07-13 | University Of Sydney, The | Solar selective surface coating |
CN1266973A (zh) * | 2000-03-15 | 2000-09-20 | 张入通 | 热管真空集热管镀膜板芯及其制造方法 |
-
2002
- 2002-11-09 CN CNB021501416A patent/CN100381764C/zh not_active Expired - Fee Related
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1300370C (zh) * | 2004-06-21 | 2007-02-14 | 朱德永 | 太阳光谱选择性吸收涂层的沉积方法 |
CN100487337C (zh) * | 2007-01-22 | 2009-05-13 | 罗赞继 | 涂敷选择性吸收复合膜的太阳能吸热板芯及其制作方法 |
CN102207341A (zh) * | 2011-07-01 | 2011-10-05 | 中国华能集团清洁能源技术研究院有限公司 | 中高温直通式太阳能金属集热管 |
CN102207341B (zh) * | 2011-07-01 | 2012-12-19 | 中国华能集团清洁能源技术研究院有限公司 | 中高温直通式太阳能金属集热管 |
WO2017054780A1 (zh) * | 2015-09-29 | 2017-04-06 | 淄博环能海臣环保技术服务有限公司 | 一种蚀刻生成耐高温选择性吸收功能膜 |
CN108917210A (zh) * | 2018-04-28 | 2018-11-30 | 陕西科技大学 | 一种自掺杂纳米复合光热转换涂层及其制备方法 |
Also Published As
Publication number | Publication date |
---|---|
CN100381764C (zh) | 2008-04-16 |
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C06 | Publication | ||
PB01 | Publication | ||
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20090109 Address after: Daxing District, Beijing town Huangcun sunny rain sunshine solar energy company Patentee after: Sun Peiyu Address before: Room 2, unit 33, 302 Dong Dong Dong, Shijingshan District, Beijing Patentee before: Xu Baoan |
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ASS | Succession or assignment of patent right |
Owner name: SUN PEIYU Free format text: FORMER OWNER: XU BAOAN Effective date: 20090109 |
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C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20090227 Address after: Daxing District, Beijing town Huangcun sunny rain sunshine solar energy company Patentee after: Beijing Sunshine Sunshine Solar Energy Industry Co., Ltd. Address before: Daxing District, Beijing town Huangcun sunny rain sunshine solar energy company Patentee before: Sun Peiyu |
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ASS | Succession or assignment of patent right |
Owner name: BEIJING YU XIN SUNSHINE SOLAR INDUSTRIAL CO., LTD. Free format text: FORMER OWNER: SUN PEIYU Effective date: 20090227 |
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CI01 | Correction of invention patent gazette |
Correction item: Patentee Correct: Beijing Sunshine Sunshine Solar Energy Industry Co., Ltd. False: Beijing Sunshine Sunshine Solar Energy Industry Co., Ltd. Number: 13 Page: 1656 Volume: 25 |
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ERR | Gazette correction |
Free format text: CORRECT: PATENTEE; FROM: BEIJING YU XIN SUNSHINE SOLAR INDUSTRIAL CO., LTD. - TO: BEIJING YUXIN YANGGUANG SOLAR ENERGY CO.,LTD. - |
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PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: Method for forming light absorption membrane possessing mirroring option for solar powered vacuum heat collection bube Effective date of registration: 20110503 Granted publication date: 20080416 Pledgee: Bank of Beijing Limited by Share Ltd Daxing Branch Pledgor: Beijing Yuxin Yangguang Solar Energy Industry Co., Ltd. Registration number: 2011990000160 |
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Date of cancellation: 20120528 Granted publication date: 20080416 Pledgee: Bank of Beijing Limited by Share Ltd Daxing Branch Pledgor: Beijing Yuxin Yangguang Solar Energy Industry Co., Ltd. Registration number: 2011990000160 |
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Granted publication date: 20080416 Termination date: 20171109 |
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