CN1494238A - Fabuli-polu device for compensating half height full width error its manufacturing method - Google Patents
Fabuli-polu device for compensating half height full width error its manufacturing method Download PDFInfo
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- CN1494238A CN1494238A CNA021466238A CN02146623A CN1494238A CN 1494238 A CN1494238 A CN 1494238A CN A021466238 A CNA021466238 A CN A021466238A CN 02146623 A CN02146623 A CN 02146623A CN 1494238 A CN1494238 A CN 1494238A
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Abstract
The Fabry-Perot device possessing Fabry-Perot resonant cavity for light to pass through includes following parts. The first reflecting surface with first reflectivity reflects the light partly. The second reflecting surface, which is paralleled to the first reflecting surface, with second reflectivity reflects the light partly. The distance between the first reflecting surface and the second reflecting surface can be adjusted in order to compensate error of full width at half maximum (FWHM) cause by light passing through Fabry-Perot resonant cavity with first and second reflectivities.
Description
Technical field
The present invention relates to a kind of Fabry-Perot device, relate in particular to and a kind ofly in optical-fibre communications is used, compensate full width at half maximum (Full Width at Half Maximum; FWHM) the Fabry-Perot device and the manufacture method thereof of error.
Background technology
Recently, have characteristic and handy advantages such as reflection, refraction, interference and propagation velocity be fast based on light wave, and driven the flourish of various optical application technology, wherein developing into the optical communication field especially.Since optical communication be by light wave advance transmission information, therefore in information exchanging process, the transmission of information and the quality of receiving efficiency are breezy relevant with the characteristic of light wave.In other words, employed various active or passive optical elements must be able to overcome the restriction of light wave characteristic in present optical communication path, just can make these optical elements have the transmission and the receiving efficiency of expectation.
For satisfying this demand, and even the making precision of present various optical elements is made semiconductor and MEMS (micro electro mechanical system) (Micro-Electro-Mechanical Systems for example invariably towards the manufacturing technology of inferior micron nano-scale; MEMS) manufacturing technology.For example, utilize the miniature Fabry-Perot resonator (or interferometer) that face type micromachined (SurfaceMicro-machining) technology in semiconductor technology and the micro electro mechanical system (MEMS) technology is developed to be widely used in photoelectricity, machinery, to have given birth to many-sides such as doctor, environment measuring.
Fig. 1 is a schematic diagram, shows an existing Fabry-Perot etalon (Etalon).As shown in Figure 1, one Fabry-Perot etalon 10 is made of two relative level crossings 11 parallel to each other and 12, level crossing 11 and 12 its reflectivity are R (Reflectance), and two level crossings all can be with an incident light 13 partial reflections, and the distance D between level crossing 11 and 12
OpBe called as optical thickness (optical thickness).To have wavelength be λ when one
1～λ
nIncident light 13 enter this Fabry-Perot etalon 10 after because level crossing 11 and 12 reflexs for incident light 13, thus incident light 13 can between two level crossings 11 and 12, advance back and forth, and by adjusting the distance D between the level crossing 11 and 12
Op, can only allow to have specific wavelength be λ
iEmergent light 14 pass through, and reach the effect of filtering.The optical characteristics of one Fabry-Perot element is by following formula definition:
Free spectral range (Free Spectrum Ratio; FSR): FSR=(λ
2)/2nD
OpWherein λ is a centre wavelength, and n is medium refraction index (optical index), D
OpIt is the distance between two level crossings;
Fineness (Finesse; F): F=π √ R/ (1-R); Wherein R is the reflectivity of two parallel mirrors; And
Full width at half maximum value (FWHM): FWHM=FSR/F.
Because above-mentioned Wavelength distribution approximate Gaussian distribution by the emergent light 14 after the Fabry-Perot etalon 10, therefore, in the application of general light communication system, a full width at half maximum value of filtering light wave is the first heavy design parameter of designer.With regard to above-mentioned Fabry-Perot etalon 10, the full width at half maximum value of the Wavelength distribution of emergent light 14 mainly is by the reflectivity of above-mentioned two level crossings 11 and 12 and the optical thickness D between two level crossings
OpDetermine.Therefore, for a Fabry-Perot etalon, how in the manufacturing and assembling process of two level crossings 11 and 12, control the optical thickness D between two level crossings
OpAnd reflectivity R just becomes designer's primary work.
For example, according to the regulation of optical-fibre communications ITU100GHZ, for making a specific wavelength λ by the emergent light 14 behind the above-mentioned Fabry-Perot etalon 10
iBeing same as wave-length coverage is a central wavelength lambda of the C frequency band (C band) of 1530nm～1565nm, be 1550nm, it is the condition that 0.37nm and free spectral range FSR are at least 40nm that light wave frequency spectrum (spectrum) characteristic of emergent light 14 must satisfy the full width at half maximum value.In other words, fineness F is necessary for 108.At this, the definition of full width at half maximum value, free spectral range and fineness as shown in Figure 2.Again further according to free spectral range FSR, central wavelength lambda, optical thickness D
OpAnd the relational expression of medium refraction index n, i.e. FSR=λ
2/ 2nD
Op, we can calculate the optical thickness D between two parallel mirrors 11 and 12
OpBe at most 30 μ m; And according to the relational expression of fineness F and two reflected in parallel specular reflectivity R, i.e. F=π √ R/ (1-R), the reflectivity R that can calculate two parallel mirrors 11 and 12 is at least 0.97.
Yet, as shown in Figure 3, with present existing Fabry-Perot resonator 20 by MEMS (micro electro mechanical system) and semiconductor fabrication made, common way is the groove of etching one certain depth on a glass substrate 21, plate one deck optical thin film then in the above to form a fixed reflection surface 23, and on a silicon substrate 22, utilize MEMS (micro electro mechanical system) manufacturing technology formation one to be coated with the movable reflecting surface 24 of optical thin film, wherein, distance between two reflectings surface is D, and movable reflecting surface 24 removable slight distance d, d＜＜D.Thus, in fact two reflectings surface 23 and 24 reflectivity are decided by optically coated quality, and ripe at present optical coating technology only can be controlled at the reflectivity tolerance of two reflectings surface ± 1% within.Therefore, with regard to above-mentioned example, in fact the reflectivity that can reach by optical coating is 0.97 ± 0.01, that is 0.96～0.98.With this reflectivity R 0.96～0.98 value substitution formula fineness F=π √ R/ (1-R) and full width at half maximum value FWHM=FSR/F, obtain fineness F and be 77～155 and full width at half maximum value FWHM be 0.52～0.258nm, so the wide full width at half maximum value FWHM margin of tolerance almost can't be used, thus, this existing Fabry-Perot resonator 20 just can cause actual full width at half maximum and desired value that sizable discrepancy is arranged because of in fact optically coated tolerance.Therefore, error free for asking full width at half maximum can meet designer's demand, then certainly will to compensate by the distance D between modulation two reflectings surface.With above-mentioned is example, full width at half maximum value FWHM=0.37nm, suppose then F=108 of R=0.97, by formula FSR=0.37nm * 108=40nm as can be known, D=30 μ m, suppose then F=155 of R=0.98 again, by formula FSR=0.37nm * 155=57.5nm as can be known, get D=20.8 μ m, can learn that thus the reflectivity tolerance variation can be maintained fixed full width at half maximum value FWHM by adjusting the size of D.Yet, because glass substrate 21 and silicon substrate 22 in the manufacturing process are fixed together, that is the distance D between two reflectings surface 23 and 24 in the Fabry-Perot resonator 20 is fixing, therefore, this existing Fabry-Perot resonator can't compensate the full width at half maximum error that is caused because of the optical coating tolerance, and makes this existing Fabry-Perot resonator can not satisfy designer's demand.
Be head it off, the present inventor is intended to propose a kind of Fabry-Perot device, and this Fabry-Perot device is achieved satisfy our desired full width at half maximum, and can be used by optical-fibre communications.
Summary of the invention
Therefore, one object of the present invention is to provide a kind of Fabry-Perot device and manufacture method thereof, the error that full width at half maximum caused that this Fabry-Perot device energy compensate for optical plated film tolerance distributes for the light wave by this Fabry-Perot device.
Another object of the present invention is to provide a kind of method that compensates the full width at half maximum error, is to reach by the distance of one between two reflectings surface in the modulation Fabry-Perot device.
Fabry-Perot device of the present invention has a Fabry-Perot resonator, passes through for a light, and it comprises: one first reflecting surface has one first reflectivity in order to this light of partial reflection; And one second reflecting surface, be configured to parallel relatively with this first reflecting surface, have one second reflectivity in order to this light of partial reflection; Wherein the distance of one between this first reflecting surface and this second reflecting surface can be carried out modulation according to this first reflectivity and this second reflectivity, to compensate by this light behind this Fabry-Perot resonator because of this first reflectivity and caused half the high overall with error of this second reflectivity.Wherein, this first reflecting surface system position is coated with one first optical thin film by on the minitype reflector of MEMS (micro electro mechanical system) manufacturing technology made on this first reflecting surface, and this first reflectivity is provided by this first optical thin film.In addition, this first reflecting surface has a fine-tuning gap, and this fine-tuning gap is much smaller than the optical thickness D of this resonant cavity
Op
In the first embodiment of the present invention, this second reflecting surface is a gradual index lens (graded-index lens; GRIN Lens) a surface is coated with one second optical thin film on this surface, this second reflectivity is provided by this second optical thin film.In addition, this first reflecting surface this minitype reflector and this second reflecting surface this gradual index lens between also then with a scolder.Speak by the book, this of present embodiment first reflecting surface and this second reflecting surface had an adjustable distance before following, and had an adjustable clearance after then.Therefore, as many as this adjustable distance of a adjustable distance between two reflectings surface of the Fabry-Perot device of present embodiment adds this adjustable clearance, and can make the Fabry-Perot device compensation of present embodiment distribute because of this first reflectivity and caused half the high overall with error of this second reflectivity by the light wave behind this Fabry-Perot device by adjusting this adjustable distance.
In the second embodiment of the present invention, this second reflecting surface is a surface of a glass substrate, is coated with one second optical thin film on this surface, and this second reflectivity is provided by this second optical thin film, and this glass substrate is fixed on the gradual index lens.In addition, also follow between this minitype reflector and this gradual index lens with a scolder.In addition, the other parts of present embodiment are identical with the description person of first embodiment institute, do not repeat them here.
In the third embodiment of the present invention, the Fabry-Perot device also comprises a gradual index lens, as a receiver (receiver), in order to receive the light by this Fabry-Perot device.In addition, the person is identical in the other parts of the Fabry-Perot device of present embodiment and the first embodiment of the invention or described in the second embodiment of the invention.
In the fourth embodiment of the present invention, the Fabry-Perot device also comprises a speculum or reflecting prism, in order to will be reflected back into this Fabry-Perot device by the light of this Fabry-Perot device once more.In addition, the person is identical in the other parts of the Fabry-Perot device of present embodiment and the first embodiment of the invention or described in the second embodiment of the invention.
Description of drawings
Fig. 1 is a schematic diagram, shows existing Fabry-Perot etalon;
Fig. 2 is a schematic diagram, shows the spectral characteristic of light wave, wherein go up transverse axis and represent that striped ordinal number, time transverse axis represent wavelength, and the longitudinal axis represents that energy dissipation (db), the left longitudinal axis represent transmissivity (%);
Fig. 3 is a generalized section of utilizing the existing Fabry-Perot resonator of semiconductor fabrication and MEMS (micro electro mechanical system) manufacturing technology made;
Fig. 4 A shows the generalized section of the Fabry-Perot device of first embodiment of the invention;
Fig. 4 B shows the generalized section of the Fabry-Perot device of second embodiment of the invention;
Fig. 5 A shows the generalized section of the Fabry-Perot device of third embodiment of the invention; And
Fig. 5 B shows the generalized section of the Fabry-Perot device of fourth embodiment of the invention.
[figure number explanation]
10 Fabry-Perot etalons, 11,12 level crossings
13 incident lights, 14 emergent lights
20 Fabry-Perot resonators, 21 glass substrates
22 silicon substrates, 23,24 optical thin films
100,200,300,400 Fabry-Perot devices
101,201 gradual index lenses, 102,202 optical thin films
110,210 minitype reflector, 111,211 optical thin films
121,221 scolders, 203 glass substrates
301 gradual index lenses, 401 speculums
Embodiment
For solving the problem that can't realize expecting the full width at half maximum value of above-mentioned existing Fabry-Perot resonator, the present invention proposes a kind of Fabry-Perot device, it will be coated with the directional light input element of optical thin film on the surface, a gradual index lens for example, be used as one first reflecting surface, and replace existing reflecting surface by the semiconductor fabrication made; And will be used as one second reflecting surface by the formed reflecting surface of MEMS (micro electro mechanical system) manufacturing technology; Thus, first reflecting surface in the Fabry-Perot device of the present invention and the distance between second reflecting surface just become adjustable and on-fixed.Therefore, we can adjust distance between two reflectings surface according to first reflecting surface on the gradual index lens and by the actual optical thin film reflectivity that is plated on formed second reflecting surface of MEMS (micro electro mechanical system) manufacturing technology, are achieved an expectation full width at half maximum value with the Fabry-Perot device that can make manufacturing.Below will elaborate at each embodiment of the present invention referring to Fig. 4 A to Fig. 5 B.
First embodiment
Fig. 4 A shows the generalized section of the Fabry-Perot device 100 of first embodiment of the invention.Shown in Fig. 4 A, the Fabry-Perot device 100 of present embodiment mainly comprises a gradual index lens 101, is coated with an optical thin film 102 on it with as one first reflecting surface; And one by the formed minitype reflector 110 of MEMS (micro electro mechanical system) manufacturing technology, is coated with another optical thin film 111 on it with as one second reflecting surface; Follow with scolder 121 between gradual index lens 101 and the minitype reflector 110.In the manufacturing process of the Fabry-Perot device of present embodiment, above-mentioned first reflecting surface and second reflecting surface be configured to parallel to each other relatively and have a space D
1(unit is μ m), and second reflecting surface in the minitype reflector 110 to have a removable gap be d
1(unit is nm), d
1With D
1Suitable in comparison is little, that is d
1＜＜D
1Thus, before following with scolder 121, space D
1Be adjustable, therefore, exist that the Fabry-Perot device of present embodiment still can be adjusted space D according to the actual reflectance of optical thin film 111 and 102 although the desired reflectivity of the actual reflectance of optical thin film 111 and 102 and designer has tolerance
1, and make the Fabry-Perot device of present embodiment after following, be achieved desired full width at half maximum value with scolder 121.Lift previous example, when expectation reflectivity R is 0.97 and actual reflectance R when being 0.96, then we just can be with space D
1Be adjusted into about 20.8 μ m (R is 0.98 respective value) from aforesaid about 30 μ m (R is 0.97 respective value).
In addition, the Fabry-Perot device of present embodiment with scolder 121 then after because second reflecting surface on the minitype reflector 110 is a reflecting surface movably, therefore, we can utilize this removable gap d
1Adjust the filter effect of light wave.Yet, be noted that, because gap d
1With space D
1Be quite little by contrast, therefore, an adjustable distance D of the Fabry-Perot device of present embodiment
1With adjustable clearance d
1It is diverse amount.Speak by the book, the adjustable distance between two reflectings surface of the Fabry-Perot device of present embodiment equals D
1Add d
1
Second embodiment
Shown in Fig. 4 B, the Fabry-Perot device 200 of second embodiment of the invention mainly comprises a gradual index lens 201, is equiped with a glass substrate 203 on it, is coated with an optical thin film 202 on the glass substrate 203 with as one first reflecting surface; And one by the formed minitype reflector 210 of MEMS (micro electro mechanical system) manufacturing technology, is coated with another optical thin film 211 on it with as one second reflecting surface; Follow with scolder 221 between gradual index lens 201 and the minitype reflector 210.In the manufacturing process of the Fabry-Perot device of present embodiment, above-mentioned first reflecting surface and second reflecting surface be configured to parallel to each other relatively and have a space D
2, and second reflecting surface in the minitype reflector 210 to have a removable gap be d
2, d
2With D
2Suitable in comparison is little, that is d
2＜＜D
2Thus, before following with scolder 221, space D
2Be adjustable, therefore, exist that the Fabry-Perot device of present embodiment still can be adjusted space D according to the actual reflectance of optical thin film 211 and 202 although the desired reflectivity of the actual reflectance of optical thin film 211 and 202 and designer has tolerance
2, and make the Fabry-Perot device of present embodiment after following, be achieved the full width at half maximum value of an expectation with scolder 221.
In addition, the Fabry-Perot device of present embodiment with scolder 121 then after because second reflecting surface on the minitype reflector 110 is a reflecting surface movably, therefore, we can utilize this removable gap d
1Adjust the filter effect of light wave.Yet, as mentioned above, an adjustable distance D of the Fabry-Perot device of present embodiment
2With adjustable clearance d
2It is diverse amount.Speak by the book, the adjustable distance between two reflectings surface of the Fabry-Perot device of present embodiment equals D
2Add d
2
The 3rd embodiment
Fabry-Perot device 100 in the foregoing description also can comprise an extra gradual index lens 301, and becomes the Fabry-Perot device 300 shown in Fig. 5 A.In the case, the gradual index lens 301 that is comprised among the embodiment is as a receiver (receiver), in order to receive a light wave by Fabry-Perot device 100.In addition, other each several part of the Fabry-Perot device 300 of present embodiment is all identical with first embodiment, does not repeat them here.
In like manner, the Fabry-Perot device 300 of present embodiment also can be made of Fabry-Perot device among second embodiment 200 and gradual index lens, and in addition, other each several part of Fabry-Perot device 300 is all identical with second embodiment.
The 4th embodiment
In addition, shown in Fig. 5 B, when the gradual index lens among above-mentioned the first/the second embodiment 101/201 is bidirectional optical fiber (Dual Fiber) pattern, Fabry-Perot device 100/200 among above-mentioned the first/the second embodiment also can comprise an extra reflecting element 401, for example a speculum or a reflecting prism, and become Fabry-Perot device 400 shown in Fig. 5 B.In the case, the reflecting element 401 that is comprised in the present embodiment is in order to be reflected back into same Fabry-Perot device with a light wave by Fabry-Perot device 100/200.In addition, other each several part of the Fabry-Perot device 400 of present embodiment is all identical with first embodiment/second embodiment, does not repeat them here.
To sum up, each embodiment of the present invention describes in detail already.Yet; those skilled in the art should be appreciated that; each embodiment is described in this only for exemplary rather than restrictive; that is; do not breaking away within connotation of the present invention and the scope; the variation example of top each item of addressing and correction example are the present invention and contain, and therefore, protection scope of the present invention is defined by claim of the present invention.
Claims (10)
1. Fabry-Perot device, it is characterized in that: this device has a Fabry-Perot resonator, passes through for a light, and this Fabry-Perot resonator comprises:
One first reflecting surface has one first reflectivity in order to this light of partial reflection; And
One second reflecting surface is configured to parallel relatively with this first reflecting surface, has one second reflectivity in order to this light of partial reflection;
Wherein the distance of one between this first reflecting surface and this second reflecting surface can be carried out modulation according to this first reflectivity and this second reflectivity, to compensate this first reflectivity and this second reflectivity for half the high overall with error that this light was caused by this Fabry-Perot resonator.
2. Fabry-Perot device as claimed in claim 1, it is characterized in that: this first reflecting surface is by MEMS (micro electro mechanical system) manufacturing technology made, be coated with one first optical thin film on this first reflecting surface, this first reflectivity is provided by this first optical thin film, and this first reflecting surface has a fine-tuning gap.
3. Fabry-Perot device as claimed in claim 1 is characterized in that: this second reflecting surface is a surface of a gradual index lens, is coated with one second optical thin film on this surface, and this second reflectivity is provided by this second optical thin film.
4. Fabry-Perot device as claimed in claim 1, it is characterized in that: this second reflecting surface is a surface of a glass substrate, be coated with one second optical thin film on this surface, this second reflectivity is provided by this second optical thin film, and this glass substrate is fixed on the gradual index lens.
5. Fabry-Perot device as claimed in claim 1 is characterized in that: also comprise a receiving element, in order to receive this light by this Fabry-Perot resonator.
6. Fabry-Perot device as claimed in claim 5 is characterized in that: this receiving element is a gradual index lens.
7. Fabry-Perot device as claimed in claim 5 is characterized in that: this receiving element is the optical diode of an opto-electronic conversion.
8. Fabry-Perot device as claimed in claim 1 is characterized in that: also comprise a reflecting prism or a speculum, in order to being reflected back into this Fabry-Perot resonator by this light of this Fabry-Perot resonator.
9. the manufacture method of the Fabry-Perot device of half high overall with error of compensation is characterized in that, comprises the following step:
Make a movable minitype reflector with the MEMS (micro electro mechanical system) manufacturing technology, and be coated with one first optical thin film to form one first reflecting surface;
Coating one second optical thin film is to form one second reflecting surface on a gradual index lens;
On a platform, should movable minitype reflector aim at, and be configured to parallel relative with this second reflecting surface this first reflecting surface with this gradual index lens; And
Monitor the spectrum behind this Fabry-Perot-type of a light penetration, adjust the distance between this first reflecting surface and this second reflecting surface, make this full width at half maximum error meet tolerance.
10. the manufacture method of the Fabry-Perot device of half high overall with error of compensation as claimed in claim 9, it is characterized in that: after making this full width at half maximum error meet tolerance, also comprise a step, be with a scolder should movable minitype reflector and this gradual index lens fix.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA021466238A CN1494238A (en) | 2002-10-28 | 2002-10-28 | Fabuli-polu device for compensating half height full width error its manufacturing method |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA021466238A CN1494238A (en) | 2002-10-28 | 2002-10-28 | Fabuli-polu device for compensating half height full width error its manufacturing method |
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| Publication Number | Publication Date |
|---|---|
| CN1494238A true CN1494238A (en) | 2004-05-05 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112415647A (en) * | 2019-08-21 | 2021-02-26 | 新加坡国立大学 | Semiconductor etalon device and method of manufacturing the same |
-
2002
- 2002-10-28 CN CNA021466238A patent/CN1494238A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112415647A (en) * | 2019-08-21 | 2021-02-26 | 新加坡国立大学 | Semiconductor etalon device and method of manufacturing the same |
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