CN112615254A - Tunable external cavity laser - Google Patents
Tunable external cavity laser Download PDFInfo
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- CN112615254A CN112615254A CN202011513806.2A CN202011513806A CN112615254A CN 112615254 A CN112615254 A CN 112615254A CN 202011513806 A CN202011513806 A CN 202011513806A CN 112615254 A CN112615254 A CN 112615254A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/14—External cavity lasers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/06—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
Abstract
The invention discloses a tunable external cavity laser, comprising: the light splitting surface of the cubic beam splitter prism forms an angle of 45 degrees with the first direction and the second direction, and the first direction is vertical to the second direction; the gain chip is arranged along the first direction, and the emitted light enters the light splitting surface to be transmitted along the first direction and reflected along the second direction; the independent Fabry-Perot etalons are arranged along the second direction and used for selecting wavelengths and narrowing line widths in an optical path, at least one independent Fabry-Perot etalon is respectively arranged on at least one side of the cubic beam splitter prism, and a first reflector is arranged on one side, back to the cubic beam splitter prism, of each independent Fabry-Perot etalon; the air-gap Fabry-Perot cavity is arranged along the first direction, the air-gap Fabry-Perot cavity and the gain chip are respectively arranged on two opposite sides of the cubic beam splitter prism, and the second reflector is arranged on one side of the air-gap Fabry-Perot cavity back to the cubic beam splitter prism, so that double-shaft output can be realized, and the difficulty in coupling and adjusting the optical path is reduced.
Description
Technical Field
The invention relates to the technical field of semiconductor lasers, in particular to a double-shaft output tunable external cavity laser.
Background
In recent years, laser technology has been rapidly developed under the push of the explosive development of the communication industry. The external cavity Laser couples the output light at one end of the Laser into the external resonant cavity, so that the chirp problem of a Distributed Feedback Laser (DFB) Laser is solved. In addition, the external cavity laser has increased photon life and reduced spectral width by adopting the external optical resonant cavity, and the adjustability of the lasing wavelength can be realized by arranging a wavelength selection device, such as a diffraction grating and an interference filter, in the external resonant cavity. The cavity laser has the characteristics of excellent narrow line width, small chirp and high side mode suppression ratio, and becomes the mainstream choice of backbone network transmission.
Typically, external cavity lasers using diffraction gratings in the external cavity are Littrow and Littman lasers. The lasers with the two structures realize wavelength selection by changing the inclination angle of the diffraction grating, and the difference is that the laser with the Littman structure selects the wavelength through twice diffraction of the diffraction grating, so that the linewidth can be narrowed compared with the Littrow laser. However, the two lasers have larger sizes, are more complicated in tuning process, have high mechanical assembly difficulty and are more sensitive to external optical feedback.
Typically, an external cavity laser using an interference filter in an external cavity is a laser whose optical path is in the X direction. Light generated by the gain chip passes through a plurality of interference filters in the X direction, and the narrowing of the line width and the selection of the wavelength are performed by a combination of the interference filters. The traditional external cavity laser only carries out narrowing line width and wavelength tuning in the X direction, and a plurality of interference filters and lenses are introduced in the X direction, so that the optical path is difficult to couple and adjust, and the lasing wavelength can only be output in the X direction.
Disclosure of Invention
In order to solve the technical problems and reduce the difficulty of coupling and adjusting the optical path, the invention discloses a tunable external cavity laser capable of double-shaft output, and the specific scheme is as follows.
A tunable external cavity laser comprising:
the beam splitting surface of the cubic beam splitter prism forms an angle of 45 degrees with the first direction and the second direction;
the gain chip is arranged along the first direction, and light emitted by the gain chip is incident to the light splitting surface and transmitted along the first direction and reflected along the second direction;
the at least one independent Fabry-Perot etalon is arranged along the second direction and used for selecting wavelength and narrowing line width in an optical path, wherein the at least one independent Fabry-Perot etalon is respectively arranged on at least one side of the cubic beam splitter prism, and a first reflector is arranged on one side, back to the cubic beam splitter prism, of the independent Fabry-Perot etalon; and
the air gap Fabry-Perot cavity is arranged along the first direction, the air gap Fabry-Perot cavity and the gain chip are respectively arranged on two opposite sides of the cubic beam splitter prism, and a second reflector is arranged on one side, back to the cubic beam splitter prism, of the air gap Fabry-Perot cavity;
wherein the first direction is perpendicular to the second direction.
According to some embodiments of the present invention, the air gap fabry-perot cavity includes a first fabry-perot etalon and a second fabry-perot etalon arranged side by side along the first direction, the first fabry-perot etalon is fixedly arranged, the second fabry-perot etalon is provided with a first movable assembly, the first reflector is provided with a second movable assembly, and the second reflector is provided with a third movable assembly.
According to some embodiments of the invention, the first, second and third movable components each comprise a piezoceramic wafer or a thermal expansion component.
According to some embodiments of the invention, the single-axis output mode or the dual-axis output mode is selected by adjusting the reflectivity of the first mirror and the second mirror.
According to some embodiments of the invention, the number of the independent fabry-perot etalons is plural, and free spectral regions of the plurality of the independent fabry-perot etalons are different from each other.
According to some embodiments of the invention, a plate extending direction of one or more of the independent fabry-perot etalons forms an angle β with the first direction, the angle β of two adjacent independent fabry-perot etalons is different, and the angle β ranges from 0 ° to 3 °.
According to some embodiments of the invention, the at least one separate fabry-perot etalon is provided with a high reflective film on both sides.
According to some embodiments of the invention, the laser comprises a plurality of said air-gap fabry-perot cavities.
According to some embodiments of the present invention, a plate extending direction of the plurality of air-gap fabry-perot cavities forms an angle θ with the second direction, the angle θ of two adjacent air-gap fabry-perot cavities is different, and the angle θ ranges from 0 ° to 3 °.
According to some embodiments of the invention, a side of the first and second fabry-perot etalons opposite to each other is provided with a high reflection film, and the other side is provided with an antireflection film.
According to the technical scheme, the cubic beam splitter prism is adopted to split light in the first direction into light in the first direction and light in the second direction, the independent Fabry-Perot etalon and the air gap Fabry-Perot cavity are matched to tune the light wavelength and narrow the line width, double-axis output is achieved, and meanwhile the difficulty of coupling and adjusting of a light path is reduced.
Drawings
FIG. 1 schematically illustrates a schematic structural diagram of a tunable external cavity laser of an embodiment of the present disclosure;
FIG. 2 schematically illustrates a working schematic diagram of a cubic beam splitting prism of a tunable external cavity laser of an embodiment of the present disclosure;
fig. 3 schematically illustrates a structural diagram of an air-gap fabry-perot cavity of a tunable external cavity laser according to an embodiment of the present disclosure;
FIG. 4 schematically illustrates a schematic diagram of the vernier effect of a tunable external cavity laser of an embodiment of the present disclosure;
wherein, 1 represents a gain chip; 2 denotes a collimator lens; 3 denotes a cubic beam splitter prism; 4 represents an independent fabry-perot etalon; 5 denotes a first mirror; 6 denotes a second movable assembly; 7 denotes an air-gap fabry-perot cavity; 8 denotes a first fabry-perot etalon; 9 denotes a second fabry-perot etalon; 10 denotes a first movable assembly; 11 denotes a condensing lens; 12 denotes a second mirror; 13 denotes a third movable assembly; 14 denotes incident light; 15 represents transmitted light; 16 denotes reflected light; n1 and n2 represent refractive indices, and n1 > n 2; 17 represents an antireflection film; 18 high reflective film.
Detailed Description
In order that the objects, technical solutions and advantages of the present invention will become more apparent, the present invention will be further described in detail with reference to the accompanying drawings in conjunction with the following specific embodiments.
It is to be understood that such description is merely illustrative and not intended to limit the scope of the present invention. In the following detailed description, for purposes of explanation, numerous specific details are set forth in order to provide a thorough understanding of the embodiments of the invention. It may be evident, however, that one or more embodiments may be practiced without these specific details. Furthermore, in the following description, descriptions of well-known technologies are omitted so as to avoid unnecessarily obscuring the concepts of the present invention.
The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The term "comprising" as used herein indicates the presence of the features, steps, operations but does not preclude the presence or addition of one or more other features.
All terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art unless otherwise defined. It should be noted that the terms used herein should be interpreted as having meanings consistent with the context of the present specification, and should not be interpreted in an idealized or overly formal manner, for example, a square beam splitter prism, where a film is coated on a 45 ° right-angled prism slope, and then a prism of the same shape is bonded to form a bonded cube, and the light beam is split into two beams by reflection and refraction, where the intersecting plane of the two right-angled prism slopes is the splitting plane, and for example, the vernier effect, each fabry-perot etalon generates independent comb-shaped resonant peaks, and when one of the comb-shaped resonant peaks moves to the left and right in a small range, the overlapping positions of the comb-shaped resonant peaks are greatly changed. Thus allowing the resonant wavelength to be varied over a wide range. Specifically, as shown in fig. 4: the coincident positions of the wave crest R1 and the wave crest R2 are at the middle position at first, when R2 is changed to R2', the resonance peak is changed to delta lambda, the coincident position is changed to delta lambda, and small resonance peak change finally causes large-range change of the coincident position, namely the wavelength at the coincident position is the wavelength of light emitted by the laser.
In order to solve the technical problems and reduce the difficulty of coupling and adjusting the optical path, the invention discloses a tunable external cavity laser capable of double-shaft output, and the specific scheme is as follows.
Fig. 1 schematically illustrates a schematic structural diagram of a tunable external cavity laser of an embodiment of the present disclosure.
As shown in fig. 1, a tunable external cavity laser includes a cubic beam splitter prism 3, a gain chip 1, an independent fabry-perot etalon 4, and an air gap fabry-perot cavity 7, where the air gap fabry-perot cavity 7 is back to a second reflecting mirror 12 disposed at one side of the cubic beam splitter prism 3.
According to some embodiments of the present invention, the splitting plane of the cubic beam splitting prism 3 is at an angle of 45 ° to both the first and second directions.
According to some embodiments of the invention, the first direction is perpendicular to the second direction.
According to some embodiments of the present invention, the gain chip 1 is disposed along a first direction, and light emitted from the gain chip 1 is incident on the splitting surface, transmitted from the cubic beam splitter prism 3 along the first direction, and reflected along a second direction.
Fig. 2 schematically illustrates a working schematic diagram of a cubic beam splitting prism of a tunable external cavity laser of an embodiment of the present disclosure.
As shown in fig. 2, according to some embodiments of the present invention, the refractive index of the splitting surface of the cubic beam splitter prism 3 is n2, and the refractive indices of both sides of the splitting surface of the cubic beam splitter prism 3 are n1, so that the incident light 14 enters from one side surface of the cubic beam splitter prism 3, part of the light is transmitted through the splitting surface, the transmitted light 15 exits from the opposite side surface of the entrance surface of the cubic beam splitter prism 3, the other part of the light is reflected at the splitting surface, and the reflected light 16 exits from the adjacent side surface of the entrance surface of the cubic beam splitter prism 3. According to some embodiments of the present invention, both the transmitted light and the reflected light from the cubic beam splitter prism 3 partially re-enter the gain chip 1, generating stimulated emission of photons.
According to some embodiments of the invention, at least one separate fabry-perot etalon 4 is arranged along the second direction for wavelength screening and line width narrowing in the optical path in the second direction. According to some embodiments of the present invention, at least one independent fabry-perot etalon 4 is respectively disposed on at least one side of the cubic beam splitter prism 3, and a first reflecting mirror 5 is disposed on a side of the independent fabry-perot etalon 4 facing away from the cubic beam splitter prism 3.
According to some embodiments of the present invention, the light returned by the reflector is reflected by the cubic beam splitter prism 3 into different directions, and is subjected to secondary wavelength screening and line width narrowing by the independent fabry-perot etalon 4 or the air gap fabry-perot cavity 7 in the direction. According to some embodiments of the present invention, a collimating lens 2 is disposed between the gain chip 1 and the cubic beam splitter prism 3, and the collimating lens 2 adjusts the light emitted from the gain chip 1 to be parallel to the first direction.
According to some embodiments of the present invention, the air-gap fabry-perot cavity 7 is disposed along a first direction, the air-gap fabry-perot cavity 7 and the gain chip 1 are respectively disposed at two opposite sides of the cubic beam splitter prism 3, and a second reflector 12 is disposed at a side of the air-gap fabry-perot cavity 7 facing away from the cubic beam splitter prism 3.
According to some embodiments of the present invention, the air gap fabry-perot cavity 7 includes a first fabry-perot etalon 8 and a second fabry-perot etalon 9 arranged side by side along a first direction, the first fabry-perot etalon 8 is fixedly arranged, the second fabry-perot etalon 9 is provided with a first movable assembly 10, the first reflector 5 is provided with a second movable assembly 6, and the second reflector 12 is provided with a third movable assembly 13.
According to some embodiments of the present invention, the first movable element 10 adjusts the distance between the first and second fabry- perot etalons 8 and 9, so as to achieve coarse adjustment of the wavelength of the light.
According to some embodiments of the present invention, the first, second and third movable elements 10, 6, 13 each comprise a piezoceramic wafer or thermal expansion element.
According to some embodiments of the present invention, the piezoceramic wafer is moved by controlling the first, second and third movable assemblies 10, 6 and 13 by voltage, or the thermal expansion assembly is moved by controlling the first, second and third movable assemblies 10, 6 and 13 by temperature, thereby accomplishing the adjustment of the positions of the first and second mirrors 5 and 12, and the adjustment of the size of the air gap of the air-gap fabry-perot cavity 7, thereby accomplishing the tuning of the wavelength and phase of the light.
According to some embodiments of the present invention, the uniaxial output mode or biaxial output mode is selected by adjusting the reflectivity of the first mirror 5 and the second mirror 12.
According to some embodiments of the present invention, optionally, when the reflectivity of the first mirror 5 is 70% to 100% and the reflectivity of the second mirror 12 is 5% to 30%, the tunable external cavity laser is in a single-axis output mode, and the tunable external cavity laser outputs along the first direction.
According to some embodiments of the present invention, optionally, when the reflectivity of the first mirror 5 is 5% to 30% and the reflectivity of the second mirror 12 is 70% to 100%, the tunable external cavity laser is in a single-axis output mode, and the tunable external cavity laser outputs along the second direction.
According to some embodiments of the present invention, optionally, when the reflectivity of the first mirror 5 is 5% to 30% and the reflectivity of the second mirror 12 is 5% to 30%, the tunable external cavity laser is in a biaxial output mode, and the tunable external cavity laser outputs in the first direction and the second direction.
According to some embodiments of the present invention, the number of the independent fabry-perot etalons 4 is plural, and the plurality of independent fabry-perot etalons 4 are different from each other in free spectral region. The vernier effect and line width narrowing brought by Fabry-Perot etalons in a plurality of different free spectral regions are utilized to realize the tunable external cavity laser with narrow line width.
The vernier effect is applied to the application, so that the optical waves of the common accessible waveband of the multiple independent Fabry-Perot etalons 4 are screened out, and the accuracy of the tunable external cavity laser is improved.
According to some embodiments of the present invention, the plate extending direction of one or more independent fabry-perot etalons 4 forms an angle β with the first direction, and the angle β of two adjacent independent fabry-perot etalons 4 are different from each other, thereby preventing resonance from occurring and further affecting the tuning effect, and the angle β ranges from 0 ° to 3 °.
According to some embodiments of the invention, both sides of at least one of the individual fabry-perot etalons 4 are provided with a high reflective film. For causing light to oscillate within the separate fabry-perot etalon 4.
According to some embodiments of the invention, the laser comprises a plurality of air-gap fabry-perot cavities 7.
According to some embodiments of the present invention, the plate extension direction of the air-gap fabry-perot cavities 7 forms an angle θ with the second direction, the angles θ of two adjacent air-gap fabry-perot cavities 7 are different from each other, so as to prevent resonance from occurring and further affect the tuning effect, and the angle θ ranges from 0 ° to 3 °.
Fig. 3 schematically shows a structural diagram of an air-gap fabry-perot cavity 7 of a tunable external cavity laser according to an embodiment of the present disclosure.
As shown in fig. 3, according to some embodiments of the present invention, a high reflection film 18 is disposed on a side of the first fabry-perot etalon 8 opposite to the second fabry-perot etalon 9, and an anti-reflection film 17 is disposed on the other side of the first fabry-perot etalon 9 and the second fabry-perot etalon 10 for causing light to oscillate in an air cavity between the first fabry-perot etalon 9 and the second fabry-perot etalon 10.
According to some embodiments of the present invention, as shown in fig. 1, the output light from the right side of the gain chip 1 enters the cubic beam splitter prism 3 through the collimating lens 2, and the incident light generates reflected light in a second direction in addition to the transmitted light in the first direction. After the transmission light in the first direction is selected through the Fabry-Perot cavity 7 of the air gap, the transmission light returns to the cubic beam splitter prism 3 to generate transmission light in the first direction and reflection light in the second direction; similarly, light selected by the fabry-perot etalon 4 in the second direction also enters the first direction through the cubic beam splitter prism 3, and then is subjected to wavelength selection by the fabry-perot etalon in the first direction. Therefore, the Fabry-Perot etalons in the first direction and the second direction can act together to select light with specific wavelength for lasing, and the dual-axis output light can be realized due to the dual-axis light path.
According to some embodiments of the invention, a Fabry-Perot etalon with a free spectral range of 100GHz is used that meets ITU specifications.
According to some embodiments of the present invention, an airgap fabry-perot cavity with an initial pitch of about 11um is used, which corresponds to a moving assembly 1 with a moving range of 1um and a step accuracy of the order of nanometers. For the air-gap Fabry-Perot cavity, the free spectral range can reach 100nm, the distance change is 5-6nm, and the corresponding resonant wavelength changes by 100 Ghz.
According to the technical scheme, the cubic beam splitter prism is adopted to split light in the first direction into light in the first direction and light in the second direction, and the independent Fabry-Perot etalon and the air gap Fabry-Perot cavity are matched to finish the lasing of the light in the first direction and the second direction, so that the double-axis output is realized, and the difficulty in coupling and adjusting the light path is reduced.
So far, the embodiments of the present disclosure have been described in detail with reference to the accompanying drawings. It is to be noted that, in the attached drawings or in the description, the implementation modes not shown or described are all the modes known by the ordinary skilled person in the field of technology, and are not described in detail. In addition, the above definitions of the components are not limited to the specific structures, shapes or manners mentioned in the embodiments, and those skilled in the art may easily modify or replace them.
It is also noted that, unless otherwise indicated, the numerical parameters set forth in the specification and attached claims are approximations that can vary depending upon the desired properties sought to be obtained by the present disclosure. In particular, all numbers expressing dimensions, range conditions, and so forth, used in the specification and claims are to be understood as being modified in all instances by the term "about". Generally, the expression is meant to encompass variations of ± 10% in some embodiments, 5% in some embodiments, 1% in some embodiments, 0.5% in some embodiments by the specified amount.
It will be appreciated by a person skilled in the art that various combinations and/or combinations of features described in the various embodiments and/or in the claims of the invention are possible, even if such combinations or combinations are not explicitly described in the invention. In particular, various combinations and/or combinations of the features recited in the various embodiments and/or claims of the present invention may be made without departing from the spirit or teaching of the invention. All such combinations and/or associations fall within the scope of the present invention.
The above-mentioned embodiments are intended to illustrate the objects, technical solutions and advantages of the present invention in further detail, and it should be understood that the above-mentioned embodiments are only exemplary embodiments of the present invention and are not intended to limit the present invention, and any modifications, equivalents, improvements and the like made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. A tunable external cavity laser, comprising:
the beam splitting surface of the cubic beam splitter prism forms an angle of 45 degrees with the first direction and the second direction;
the gain chip is arranged along the first direction, and light emitted by the gain chip is incident to the light splitting surface and transmitted along the first direction and reflected along the second direction;
the at least one independent Fabry-Perot etalon is arranged along the second direction and used for selecting wavelength and narrowing line width in an optical path, wherein the at least one independent Fabry-Perot etalon is respectively arranged on at least one side of the cubic beam splitter prism, and a first reflector is arranged on one side, back to the cubic beam splitter prism, of the independent Fabry-Perot etalon; and
the air gap Fabry-Perot cavity is arranged along the first direction, the air gap Fabry-Perot cavity and the gain chip are respectively arranged on two opposite sides of the cubic beam splitter prism, and a second reflector is arranged on one side, back to the cubic beam splitter prism, of the air gap Fabry-Perot cavity;
wherein the first direction is perpendicular to the second direction.
2. A laser as claimed in claim 1 wherein the airgap fabry-perot cavity comprises a first fabry-perot etalon and a second fabry-perot etalon arranged side-by-side along the first direction, the first fabry-perot etalon being fixedly arranged, the second fabry-perot etalon being provided with a first movable element, the first mirror being provided with a second movable element, the second mirror being provided with a third movable element.
3. The laser of claim 2, wherein the first, second, and third movable components each comprise a piezoceramic wafer or a thermal expansion component.
4. The laser according to any one of claims 1 to 3, wherein the uniaxial output mode or biaxial output mode is selected by adjusting the reflectivities of the first mirror and the second mirror.
5. A laser as claimed in any one of claims 1 to 3 wherein there are a plurality of said individual fabry-perot etalons, said individual fabry-perot etalons differing from one another in their free spectral regions.
6. The laser of claim 1, wherein the plate extension direction of one or more of the independent fabry-perot etalons forms an angle β with the first direction, the angle β of two adjacent independent fabry-perot etalons is different, and the angle β ranges from 0 ° to 3 °.
7. A laser as claimed in claim 1 wherein the at least one independent fabry-perot etalon is flanked by high-reflection films.
8. The laser of claim 2, wherein the external cavity laser comprises a plurality of said airgap fabry-perot cavities.
9. The laser as claimed in claim 8, wherein the slab extension direction of a plurality of said airgap fabry-perot cavities is at an angle θ with the second direction, the θ angles of two adjacent said airgap fabry-perot cavities are different, and the range of θ angles is 0 ° to 3 °.
10. The laser according to claim 8, wherein the first and second fabry-perot etalons are provided with a high reflection film on a side opposite to each other and an anti-reflection film on the other side.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN117559207A (en) * | 2024-01-10 | 2024-02-13 | 闽都创新实验室 | High-precision narrow linewidth wavelength adjustable pulse laser output method |
| CN117559207B (en) * | 2024-01-10 | 2024-04-26 | 闽都创新实验室 | High-precision narrow linewidth wavelength adjustable pulse laser output method |
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| CN101557075A (en) * | 2008-04-10 | 2009-10-14 | 中国计量科学研究院 | Fabry-Perot cavity of semiconductor laser |
| CN101615763A (en) * | 2009-07-07 | 2009-12-30 | 福州高意通讯有限公司 | A kind of semiconductor laser of wideband wavelength locking |
| CN102244358A (en) * | 2011-06-02 | 2011-11-16 | 天津奇谱光电技术有限公司 | External-cavity tunable laser |
| CN103515840A (en) * | 2013-08-07 | 2014-01-15 | 苏州旭创科技有限公司 | External-cavity laser device with tunable wave length |
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2020
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| US20020080367A1 (en) * | 2000-12-27 | 2002-06-27 | Ando Electric Co., Ltd. | Wavelength measuring apparatus and wavelength tunable light source device with built-in wavelength measuring apparatus |
| CN101557075A (en) * | 2008-04-10 | 2009-10-14 | 中国计量科学研究院 | Fabry-Perot cavity of semiconductor laser |
| CN101615763A (en) * | 2009-07-07 | 2009-12-30 | 福州高意通讯有限公司 | A kind of semiconductor laser of wideband wavelength locking |
| CN102244358A (en) * | 2011-06-02 | 2011-11-16 | 天津奇谱光电技术有限公司 | External-cavity tunable laser |
| CN103515840A (en) * | 2013-08-07 | 2014-01-15 | 苏州旭创科技有限公司 | External-cavity laser device with tunable wave length |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN117559207A (en) * | 2024-01-10 | 2024-02-13 | 闽都创新实验室 | High-precision narrow linewidth wavelength adjustable pulse laser output method |
| CN117559207B (en) * | 2024-01-10 | 2024-04-26 | 闽都创新实验室 | High-precision narrow linewidth wavelength adjustable pulse laser output method |
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Application publication date: 20210406 |