CN103515840A - External-cavity laser device with tunable wave length - Google Patents
External-cavity laser device with tunable wave length Download PDFInfo
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- CN103515840A CN103515840A CN201310341504.5A CN201310341504A CN103515840A CN 103515840 A CN103515840 A CN 103515840A CN 201310341504 A CN201310341504 A CN 201310341504A CN 103515840 A CN103515840 A CN 103515840A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/14—External cavity lasers
- H01S5/141—External cavity lasers using a wavelength selective device, e.g. a grating or etalon
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/06—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
- H01S5/0607—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium by varying physical parameters other than the potential of the electrodes, e.g. by an electric or magnetic field, mechanical deformation, pressure, light, temperature
- H01S5/0612—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium by varying physical parameters other than the potential of the electrodes, e.g. by an electric or magnetic field, mechanical deformation, pressure, light, temperature controlled by temperature
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/28—Interference filters
- G02B5/284—Interference filters of etalon type comprising a resonant cavity other than a thin solid film, e.g. gas, air, solid plates
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/106—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity
- H01S3/1062—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity using a controlled passive interferometer, e.g. a Fabry-Perot etalon
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/06—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
- H01S5/068—Stabilisation of laser output parameters
- H01S5/06804—Stabilisation of laser output parameters by monitoring an external parameter, e.g. temperature
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- Lasers (AREA)
- Semiconductor Lasers (AREA)
Abstract
The invention aims to provide an external-cavity laser device with a tunable wave length. Particularly, the external-cavity laser comprises a laser gain chip, one or more lens units, an optical etalon and a reflector, wherein the one or more lens units, the optical etalon and the reflector are located on one side of the laser gain chip and constitute an external-cavity feedback region; the end face, facing the external-cavity feedback region, of the laser gain chip is plated with an antireflection film, and the other end face of the laser gain chip is plated with a partial-transmission partial-reflection film; from the side, plated with the antireflection film, of the laser gain chip, the one or more lens units, the optical etalon and the reflector are sequentially arranged; the one or more lens units, the optical etalon and the reflector are arranged so as to make the external-cavity feedback region and the laser gain chip constitute a laser resonant cavity. Compared with the prior art, the external-cavity laser device has the advantages of having the large-range output wave length of a multi-longitudinal-mode laser, high reliability, low cost and the like.
Description
Technical field
The present invention relates to laser technique field, relate in particular to a kind of technology of outside cavity gas laser of tunable wave length.
Background technology
Wave division multiplexing passive optical network (WDM-PON, Wavelength Division Multiplexing PON) is for terminal use provides the richest foresight in high broadband, extendible solution, and it combines WDM technology and PON topological structure advantage.WDM technology refers to according to certain wavelength interval, the light signal some roads through ovennodulation, by wave multiplexer (or wavelength division multiplexer) combine, by the technology of an Optical Fiber Transmission.In WDM-PON system, as optical network unit end (ONU, while Optical Network Unit) carrying out data upstream transmission, just must use the laser of different wave length, and in WDM-PON system, due to easy operating and height reliability, distributed feed-back (DFB, Distributed Feedback) laser is able to extensive use, but the bandwidth of Distributed Feedback Laser is enough wide not tuning in relative broad range to realize wavelength, therefore, Distributed Feedback Laser cannot meet the needed wave-length coverage of a plurality of ONU, thereby the existing technology that adopts Distributed Feedback Laser in WDM-PON system, not only can cause the cost of expensive wavelength management, also bring serious storage problem.For addressing this problem, up to the present, main array waveguide grating (the AWG that uses, Arrayed Waveguide Gratin) technology, by controlling electric current and the temperature of laser, and tuning grating Prague (Bragg) wavelength, by uncoated Fabry-Perot FP(FP, Fabry-Pero) outside cavity gas laser that laser and grating form can be exported single-mode optics at different wave length, but, the side mode suppression ratio of this technology (SMSR, Side-Mode Suppression Ratio) and reliability also need further raising.
Summary of the invention
The outside cavity gas laser that the object of this invention is to provide a kind of tunable wave length.
According to an aspect of the present invention, a kind of outside cavity gas laser of tunable wave length is provided, comprise laser gain chip, and the one or more lens units, optical standard tool and the speculum that are positioned at this laser gain chip one side, formation exocoel feedback district, wherein:
Described laser gain chip is coated with anti-reflection film on the end face in described exocoel feedback district, is coated with part transmissive portion reflectance coating on other end;
A side that is coated with anti-reflection film by described laser gain chip rises, and sets gradually described one or more lens unit, optical standard tool and speculum;
Wherein, described one or more lens unit, optical standard tool and speculum are provided so that described exocoel feedback district and described laser gain chip form laserresonator.
The beneficial effect such as compared with prior art, the present invention has in a big way multilongitudianl-mode laser output wavelength, reliability is high, cost is low.The present invention by plating anti-reflection film at described laser gain chip on the end face in described exocoel feedback district, the chamber that is equivalent to have been extended by exocoel feedback district laser is long, the concussion thereby the light that laser gain chip produces does not directly gain in laser gain chip, but be directly transmitted into exocoel feedback district, select ripple, return in laser gain chip and gain, be that the light that laser gain chip produces is carrying out resonance in exocoel feedback district and described laser gain chip form laserresonator, generate the multilongitudianl-mode laser of narrow bandwidth, and, can be by controlling the first temperature-adjusting device on laser gain chip and/or controlling the second temperature-adjusting device or the voltage regulating device on optical standard tool, regulate the wavelength of the wavelength of LASER Light Source and/or the transmission peaks of optical standard tool transmission, to realize laser tuning, thereby provide a kind of laser that meets the needed wave-length coverage of a plurality of ONU, simultaneously, also WDM-PON networking cost and networking complexity have been reduced.
Accompanying drawing explanation
By reading the detailed description that non-limiting example is done of doing with reference to the following drawings, it is more obvious that other features, objects and advantages of the present invention will become:
Fig. 1 illustrates the outside cavity gas laser vertical view structural representation of tunable wave length according to an embodiment of the invention;
Fig. 2 illustrates the structural representation of the outside cavity gas laser of tunable wave length according to another embodiment of the present invention;
Fig. 3 illustrates the pectination spectrogram of LASER Light Source;
Fig. 4 illustrates the transmission pectination spectrogram of optical standard tool;
Fig. 5 illustrates the structural representation (vertical view) of the outside cavity gas laser of tunable wave length according to a further aspect of the invention;
Fig. 6 illustrates the structural representation (front view) of the outside cavity gas laser of tunable wave length according to a further aspect of the invention;
Fig. 7 illustrates the spectrogram of the outside cavity gas laser with tunable wave length;
Fig. 8 illustrates along with heating degree changes and realizes tunable optical standard lamps structure schematic diagram;
What Fig. 9 illustrated another preferred embodiment realizes tunable optical standard lamps structure schematic diagram along with heating degree changes;
Figure 10 illustrates the tunable optical etalon structure schematic diagram of the liquid crystal that comprises that its refractive index changes with the variation of voltage;
Figure 11 illustrates the tunable optical etalon structure schematic diagram of the piezoelectric ceramic that comprises that its shape changes with the variation of voltage;
Figure 12 illustrates the tunable optical etalon structure schematic diagram that comprises the piezoelectric ceramic that its shape changes with the variation of voltage of another preferred embodiment;
Figure 13 illustrates the structural representation (vertical view) of the outside cavity gas laser of a kind of tunable wave length in Hai Yige aspect according to the present invention;
Figure 14 illustrates the structural representation (front view) of the outside cavity gas laser of a kind of tunable wave length in Hai Yige aspect according to the present invention;
Figure 15 illustrates the outside cavity gas laser structural representation of tunable wave length in accordance with a preferred embodiment of the present invention;
Figure 16 illustrates the outside cavity gas laser structural representation according to the tunable wave length of another preferred embodiment of the present invention.
In accompanying drawing, same or analogous Reference numeral represents same or analogous parts.
Embodiment
Below in conjunction with accompanying drawing, the present invention is described in further detail.
Fig. 1 illustrates the structural representation of the outside cavity gas laser of tunable wave length according to an embodiment of the invention, comprising laser gain chip 1, and the lens unit 2, optical standard tool 3 and the speculum 4 that are positioned at these laser gain chip 1 one sides, formation exocoel feedback district, wherein laser gain chip 1 is coated with anti-reflection film 6 on the end face in exocoel feedback district, is coated with part transmissive portion reflectance coating 7 on other end; A side that is coated with anti-reflection film 6 by laser gain chip 1 rises, and sets gradually lens unit 2, optical standard tool 3 and speculum 4; Wherein, lens unit 2, optical standard tool 3 and speculum 4 are provided so that exocoel feedback district and laser gain chip 1 form laserresonator.
Fig. 2 illustrates the structural representation of the outside cavity gas laser of tunable wave length according to another embodiment of the present invention, wherein also comprise laser gain chip 1, and the lens unit 2, optical standard tool 3 and the speculum 4 that are positioned at these laser gain chip 1 one sides, formation exocoel feedback district, wherein laser gain chip 1 is coated with anti-reflection film 6 on the end face in exocoel feedback district, is coated with part transmissive portion reflectance coating 7 on other end; A side that is coated with anti-reflection film 6 by laser gain chip 1 rises, and sets gradually lens unit 2, optical standard tool 3 and speculum 4; Wherein, lens unit 2, optical standard tool 3 and speculum 4 are provided so that exocoel feedback district and laser gain chip 1 form laserresonator.At this, lens unit 2 is arranged on lens carrier 8.
At this, in Fig. 1 and Fig. 2, the light that the light being produced by described laser gain chip and this light directly obtain through the reflection of described one or more lens units and described speculum carries out the LASER Light Source that light wave stack generates can launch many longitudinal mode spectral line laser as shown in Figure 3, and the wavelength location of these laser and the interval of adjacent optical maser wavelength are determined by the refractive index of material in gain spectra, chip and the length of chip.
At this, optical standard tool 3 in Fig. 1 and Fig. 2 is for locking the output frequency of outside cavity gas laser, be that the transmitting light beam that its light that can directly obtain through described one or more lens units and the reflection of described speculum the light being produced by laser gain chip 1 and this light carries out the LASER Light Source that light wave stack generates carries out transmission filter, as allow the light transmission of particular range wavelength, the light that belongs to a plurality of wavelength within the scope of LASER Light Source emission spectrum as allowed carries out transmission, and the light of other wave-length coverages is filtered, its pectination distribution transmitted spectrum is as shown in Figure 4.
For ease of explanation, at this, in Fig. 1 and Fig. 2, only take in the present invention shown in following Fig. 8 (or Fig. 9) along with heating degree change realize tunable optical standard tool 3 structure as exemplifying the structural representation of the outside cavity gas laser of tunable wave length of the present invention.
As shown in Figures 1 and 2, the light beam that laser gain chip 1 produces is transmitted through the lens unit 2 being comprised of single lens through anti-reflection film 6, after forming directional light, lens unit 2 is incident to optical standard tool 3, through 3 pairs of light beams of optical standard tool, carry out after transmission, toward mirror 4, after speculum 4 reflections, be back to optical standard tool 3, and by optical standard tool 3 again transmission enter lens unit 2, through lens unit 2, focus on and be back to laser gain chip 1, in the interior gain of laser gain chip 1, amplify, so, light beam obtains required multi-mode laser after the multiple reflections of laser resonant cavity, the one end that is coated with part transmissive portion reflectance coating 7 from laser gain chip 1 is penetrated.At this, by plating anti-reflection film 6 at laser gain chip 1 on the end face in exocoel feedback district, the light that laser gain chip 1 the is produced concussion that do not gain in laser gain chip 1, directly be transmitted into exocoel feedback district and select ripple, return in laser gain chip 1 and gain, generate multilongitudianl-mode laser.
Fig. 5 and Fig. 6 illustrate the structural representation of the outside cavity gas laser of tunable wave length according to a further aspect of the invention, and wherein, described optical standard tool 3 is for realizing tunable optical standard tool along with heating degree changes.Wherein, outside cavity gas laser shown in Fig. 5 and Fig. 6 is all based on outside cavity gas laser shown in Fig. 2, Fig. 5 be shown in the vertical view of outside cavity gas laser, Fig. 6 be shown in the front view of outside cavity gas laser.As shown in Fig. 5 and Fig. 6, wherein said tunable optical etalon 3 is provided with second temperature-adjusting device 5 that can controlledly regulate temperature, and wherein, described tunable optical etalon 3 comprises the long variation with temperature in its chamber and the air chamber that changes.Fig. 5 and Fig. 6 the second temperature-adjusting device 5 shown in respectively includes but not limited to fan refrigerator, liquid refrigerator, semiconductor cooler or its various combinations.At this, the profile of the second temperature-adjusting device 5 includes but not limited to base type, outer-cover type etc.The profile that it will be understood by those skilled in the art that said temperature adjusting device is only example; other thermostatic profile styles existing or that may occur are from now on as applicable to the present invention; also should be included in protection range of the present invention, and with way of reference, be contained in this at this.
At this, the second temperature-adjusting device 5 can be realized temperature by Artificial Control and automatic control and regulate, it includes but not limited to as artificial thermoregulator, intelligent temperature regulator, artificial intelligence thermoregulator etc., wherein, described manually operated mode include but not limited to as: 1) by the temperature button of artificial rotary temperature adjuster, realize temperature and regulate; 2) mode by artificial set temperature switch realizes temperature and regulates; 3) by keyboard, touch pad, or the man-machine interaction mode such as sound-controlled apparatus is carried out temperature adjusting.Wherein, the mode of described automatic control includes but not limited to as pid control mode 1); 2) microcomputer control mode.Those skilled in the art will be understood that above-mentioned the second thermostatic control mode is only for giving an example; other existing or second thermostatic control modes that may occur are from now on as applicable to the present invention; also should be included in protection range of the present invention, and with way of reference, be contained in this at this.
Particularly, in the outside cavity gas laser as shown in Fig. 5 and Fig. 6, by controlling the output temperature of the second temperature-adjusting device 5, the chamber of air chamber that can change tunable optical etalon 3 is long, and then the wavelength location of the transmission peaks of change tunable optical etalon 3 transmissions, can make LASER Light Source after 3 transmissions of tunable optical etalon, incide speculum 4, after speculum 4 reflection successively through tunable optical etalon 3 transmission again, lens unit 2 focuses on, be back to laser gain chip 1, in laser gain chip 1, gain, thereby make photon obtain maximum feedback in this superimposed wave strong point, and through laserresonator, obtain the laser of this overlapping wavelength, by again changing the output temperature of the second temperature-adjusting device 5, to change the wavelength location of the transmission peaks of tunable optical etalon 3, distribute, the crest of realizing in the transmission peaks of tunable optical etalon 3 and the distribution of the pectination peak of LASER Light Source is overlapping at other wavelength places, and then obtain the laser of other overlapping wavelength, thereby realize laser tuning, the spectrogram of laser output as shown in Figure 7, wherein, the light that the light that described LASER Light Source is produced by described laser gain chip 1 and this light directly obtain through described one or more lens units and the reflection of described speculum carries out light wave stack generation.
Preferably, outside cavity gas laser also comprises second control device (not shown), particularly, second control device can be controlled the second temperature-adjusting device 5 and regulate temperature, so that the change of variations in temperature, the air chamber chamber personal attendant of tunable optical etalon 3 make one or more crests of LASER Light Source and corresponding one or more transmission peaks of tunable optical etalon 3 transmissions of laser gain chip 1 generation overlapping at one or more predetermined wavelengths place, thereby make photon obtain maximum feedback in this superimposed wave strong point, and through laserresonator, obtain the laser of this overlapping wavelength, and then realize laser tuning.
Preferably, be provided with the second temperature sensor 10 near tunable optical etalon 3, it can be used for detecting the temperature of tunable optical etalon 3.Wherein, the second temperature sensor 10 includes but not limited to thermistor, thermocouple, resistance temperature detector (RTD) and IC temperature sensor, or its various combinations.Those skilled in the art will be understood that the second temperature sensor 10 should be integral ground or be installed on separably on the second temperature-adjusting device 5 with outside cavity gas laser.
Fig. 8 illustrates, and in the above-mentioned outside cavity gas lasers of describing with reference to Fig. 5 and 6, air chamber chamber personal attendant variations in temperature and the structural representation of a kind of concrete structure of the tunable optical etalon 3 that changes.As shown in Figure 8, tunable optical etalon 3 comprises the first member 31 and the second component 32 of being made by different thermal expansion coefficient material respectively, wherein, member that the first member 31 is hollow, that at least one end has an opening (as shown in Figure 8, the first member 31 has an end opening), described second component 32 is placed in described the first member 31 completely, described tunable optical etalon 3 also comprises for sealing respectively the substrate 33 of opening of at least one end of described the first member 31, as the opening of substrate 33 sealing the first members 31.At this, the first member 31, second component 32, and the air chamber that is optical standard tool 3 for sealing closed area that the substrate 33 of opening of at least one end of the first member 31 forms.During the output temperature of the second temperature-adjusting device 5 on controlling tunable optical etalon 3, the first member 31 and second component 32 because of its corresponding material thermal expansion coefficient different, the first member 31, second component 32 change with the big or small variation with temperature of the closed area of substrate 33 formation, be tunable optical etalon 3 air chamber big or small variation with temperature and change, make chamber personal attendant's variations in temperature of air chamber and change.
At this, the shape of the first member 31 and second component 32 includes but not limited to as various shapes such as cylinder, circular cone, round platform, cuboid, squares.Second component 32 or solid, or the member of closed at both ends.
Fig. 9 illustrates, and in the above-mentioned outside cavity gas lasers of describing with reference to Fig. 5 and 6, air chamber chamber personal attendant variations in temperature and the structural representation of the another kind of concrete structure of the tunable optical etalon 3 that changes.As shown in Figure 9, tunable optical etalon 3 comprises the first member 31 and the second component 32 of being made by different thermal expansion coefficient material respectively, wherein, the first member 31 is member hollow, that have both ends open, described second component 32 is placed in described the first member 31 completely, and described tunable optical etalon 3 also comprises for sealing respectively substrate 33 and the substrate 34 of the opening at described the first member 31 two ends.
Preferably, the air chamber of tunable optical etalon 3 shown in Fig. 8 and Fig. 9 is coated with film particular range of wavelengths to high reflectance at least one surface in light path, to realize the frequency-selecting function to light wave of tunable optical etalon 3, as the light of the wavelength that tunable optical etalon 3 is filtered has high reflectance.For example, tunable optical etalon 3 as shown in Figure 8, by the first member 31, second component 32, and the air chamber forming for sealing the substrate 33 of opening of at least one end of the first member 31, can on the end face of substrate 33 formation air chambers, be coated with film particular range of wavelengths to high reflectance, and/or be coated with film particular range of wavelengths to high reflectance on the end face of second component formation air chamber.
(with reference to figure 1 or Fig. 2) in a further advantageous embodiment, wherein, described optical standard tool 3 is for realizing tunable optical standard tool along with institute's making alive changes, and wherein, described tunable optical etalon 3 comprises: the voltage regulating device (not shown) that can controlledly regulate described voltage.At this, described voltage regulating device includes but not limited to contact voltage regulator, transistor regulator, Ic regulator, computer adjuster or its various combinations.It will be understood by those skilled in the art that above-mentioned voltage regulating device is only example, other voltage regulating devices existing or that may occur from now on, as applicable to the present invention, also should be included in protection range of the present invention, and with way of reference, are contained in this at this.Wherein, along with realizing tunable optical standard tool, institute's making alive variation includes but not limited to following at least any one: the tunable optical etalon that 1) comprises the liquid crystal that its refractive index changes along with the variation of voltage; 2) comprise the tunable optical etalon of the piezoelectric ceramic that its shape changes along with the variation of voltage.
Figure 10 illustrates the structural representation that changes a kind of concrete structure of realizing tunable optical standard tool 3 along with institute's making alive.As shown in figure 10, tunable optical etalon 3 comprises the liquid crystal 41 that its refractive index changes with the variation of voltage, and for forming closed area to place the first sheet glass 42 of described liquid crystal, the second sheet glass 43 and at least one pad are (as shown in figure 10, comprise that 2 pads are respectively pad 44 and pad 45), wherein, described the first sheet glass 42 and described the second sheet glass 43 are oppositely arranged, and it is coated with film 46 and the conducting film 47 for conducting electricity particular range of wavelengths to high reflectance on the end face of described liquid crystal, pad 44 and pad 45 are between described the first sheet glass 42 and described the second sheet glass 43.When controlling the Voltage-output of voltage regulating device, wherein, the output voltage of voltage regulating device is added on liquid crystal 41 by the conducting film on the first sheet glass 42 and the second sheet glass 43, can change the refractive index of the liquid crystal 41 of tunable optical etalon 3, thereby change the wavelength location of the transmission peaks of tunable optical etalon 3 transmissions, so that corresponding one or more transmission peaks of one or more crests of LASER Light Source and 3 transmissions of tunable optical etalon are overlapping at one or more predetermined wavelengths place, thereby make photon obtain maximum feedback in this superimposed wave strong point, and through laserresonator, obtain the laser of this overlapping wavelength, and then realize laser tuning, wherein, the light that the light that described LASER Light Source is produced by described laser gain chip and this light directly obtain through the reflection of described one or more lens units and described speculum carries out light wave stack and generates.
Those skilled in the art will be understood that, in specific embodiment, on same sheet glass, plate to particular range of wavelengths have high reflectance film and for the coating of the conducting film that conducts electricity sequentially there is no priority minute, as can be first plates conducting film, and then plating has the film of high reflectance to particular range of wavelengths; Or, can be also first to plate film particular range of wavelengths to high reflectance, and then plating conducting film.
Figure 11 illustrates the structural representation that changes the another kind of concrete structure of realizing tunable optical standard tool 3 along with institute's making alive.As shown in figure 11, described tunable optical etalon 3 comprises the piezoelectric ceramic 51 that its shape changes with the variation of voltage, and be used to form the variation of the shape of piezoelectric ceramic 51 described in the personal attendant of its chamber and the first speculum 52 and second speculum 53 of the air chamber that changes, wherein, at least one in described the first speculum 52 and the second speculum 53 is fixedly attached to described piezoelectric ceramic 51.When controlling the Voltage-output of voltage regulating device, wherein, the output voltage of voltage regulating device is added on piezoelectric ceramic 51, piezoelectric ceramic 51 produces polarization and deformation occurs when applied voltage (electric field), and then change by the chamber of the first speculum 52 and the formed air chamber of the second speculum 53 long, thereby change the wavelength location of the transmission peaks of tunable optical etalon 3 transmissions, so that corresponding one or more transmission peaks of one or more crests of LASER Light Source and 3 transmissions of tunable optical etalon are overlapping at one or more predetermined wavelengths place, thereby make photon obtain maximum feedback in this superimposed wave strong point, and through laserresonator, obtain the laser of this overlapping wavelength, and then realize laser tuning, wherein, the light that the light that described LASER Light Source is produced by described laser gain chip 1 and this light directly obtain through described one or more lens units and the reflection of described speculum carries out light wave stack generation.
Wherein, the tunable optical etalon 3 shown in Figure 11 can be fixed by securing member 54, as shown in figure 12.
Figure 13 and Figure 14 illustrate the structural representation of the outside cavity gas laser of a kind of tunable wave length in Hai Yige aspect according to the present invention.At this, the outside cavity gas laser shown in Figure 13 and Figure 14 of take is all to describe as example based on outside cavity gas laser shown in Fig. 2, the vertical view of outside cavity gas laser as shown in Figure 13 is, Figure 14 be shown in the front view of outside cavity gas laser.As shown in Figure 13 and 14, wherein laser gain chip 1 is provided with first temperature-adjusting device 9 that can controlledly regulate temperature, and the refractive index of described laser gain chip 1 interior material can change along with the variation of temperature.Figure 13 and Figure 14 the first temperature-adjusting device 9 shown in respectively includes but not limited to fan refrigerator, liquid refrigerator, semiconductor cooler or its various combinations.At this, the profile of the first temperature-adjusting device 9 includes but not limited to base type, outer-cover type etc.It will be understood by those skilled in the art that above-mentioned the first thermostatic profile is only example; other existing or first thermostatic profile styles that may occur are from now on as applicable to the present invention; also should be included in protection range of the present invention, and with way of reference, be contained in this at this.
At this, the first temperature-adjusting device 9 can be realized temperature by Artificial Control and automatic control and regulate, it includes but not limited to as artificial thermoregulator, intelligent temperature regulator, artificial intelligence thermoregulator etc., wherein, described manually operated mode include but not limited to as: 1) by the temperature button of artificial rotary temperature adjuster, realize temperature and regulate; 2) mode by artificial set temperature switch realizes temperature and regulates; 3) by keyboard, touch pad, or the man-machine interaction mode such as voice-operated device is carried out temperature adjusting.Wherein, the mode of described automatic control includes but not limited to as pid control mode 1); 2) microcomputer control mode.Those skilled in the art will be understood that above-mentioned the first thermostatic control mode is only for giving an example; other existing or first thermostatic control modes that may occur are from now on as applicable to the present invention; also should be included in protection range of the present invention, and with way of reference, be contained in this at this.
Particularly, in the outside cavity gas laser as shown in Figure 13 and Figure 14, by controlling the output temperature of the first temperature-adjusting device 9, can change the interior material of laser gain chip 1 as the refractive index of fiber waveguide, and then the wavelength location of the crest of change LASER Light Source, the light of this wavelength is after the max transmissive of tunable optical etalon 3, incide speculum 4, after speculum 4 reflection successively through tunable optical etalon 3 transmission again, lens unit 2 focuses on, be back to laser gain chip 1, in laser gain chip 1, gain, thereby make photon obtain maximum feedback in this superimposed wave strong point, and through laserresonator, obtain the laser of this overlapping wavelength, by changing the first temperature-adjusting device 9 output temperatures, the wavelength location at the pectination peak of the LASER Light Source producing with change laser gain chip 1 distributes, the transmission peaks that realizes the crest of pectination peak in distributing and tunable optical etalon 3 is overlapping at other wavelength places, and then obtain the laser of other overlapping wavelength, thereby realize laser tuning, the spectrogram of outside cavity gas laser output as shown in Figure 7 above, wherein, the light that the light that described LASER Light Source is produced by described laser gain chip 1 and this light directly obtain through described one or more lens units and the reflection of described speculum carries out light wave stack generation.
Preferably, outside cavity gas laser also comprises first control device (not shown), particularly, first control device can be controlled the first temperature-adjusting device 9 and regulate temperature, so that the refractive index of laser gain chip 1 interior material along with the change of variations in temperature make one or more crests of LASER Light Source and corresponding one or more transmission peaks of tunable optical etalon 3 transmissions overlapping at one or more predetermined wavelengths place, thereby make photon obtain maximum feedback in this superimposed wave strong point, and through laserresonator, obtain the laser of this overlapping wavelength, and then realize laser tuning, wherein, the light that the light that described LASER Light Source is produced by described laser gain chip 1 and this light directly obtain through described one or more lens units and the reflection of described speculum carries out light wave stack generation.
Preferably, be provided with the first temperature sensor 11 near laser gain chip 1, it can be used for the temperature of detection laser chip gain 1.Wherein, the first temperature sensor 11 includes but not limited to thermistor, thermocouple, resistance temperature detector (RTD) and IC temperature sensor, or its various combinations.Those skilled in the art will be understood that the first temperature sensor 11 should be integral ground or be installed on separably on the first temperature-adjusting device 9 with outside cavity gas laser.
Those skilled in the art will be understood that in specific embodiment, and first control device and second control device can integrate, and also can be separated from each other.
Those skilled in the art will be understood that, in specific embodiment, can be synchronous or the output temperature of asynchronous control the first temperature-adjusting device 9 and/or the second temperature-adjusting device 5, so that a certain crest of described LASER Light Source is overlapping at a certain wavelength place with a certain transmission peaks that realizes tunable optical etalon 3 along with heating degree variation, and then obtain the laser of overlapping wavelength, thereby realize laser tuning.
Those skilled in the art will be understood that, in specific embodiment, can synchronous or asynchronous control first output temperature of temperature-adjusting device 9 and/or the output voltage of voltage regulating device, so that a certain crest of described LASER Light Source is overlapping at a certain wavelength place with a certain transmission peaks that realizes tunable optical etalon 3 along with institute's making alive variation, and then obtain the laser of overlapping wavelength, thereby realize laser tuning.
Figure 15 illustrates the outside cavity gas laser of tunable wave length in accordance with a preferred embodiment of the present invention, wherein, described outside cavity gas laser also comprises for regulating the long fiber waveguide 13 in the chamber of described external resonant cavity and/or for screening the filter plate 12 of optical wavelength, described fiber waveguide 13 and described filter plate 12 all can be positioned at any position in described exocoel feedback district.At this, filter plate 12 is for beam frequencies is screened, the optical device that fiber waveguide 13 is made for be greater than the material (as quartz glass) of air refraction by refractive index.At this, those skilled in the art will be understood that, the structure of the optical standard tool 3 in the outside cavity gas laser shown in Figure 15 (with of the present invention along with heating degree changes the structure that realizes tunable optical standard tool 3 as shown in above-mentioned Fig. 8 (or Fig. 9)) is only exemplary, and nonrestrictive.
Figure 16 illustrates the outside cavity gas laser of the tunable wave length of another preferred embodiment according to the present invention, comprise laser gain chip 1, and the lens unit 2, optical standard tool 3 and the speculum 4 that are positioned at these laser gain chip 1 one sides, formation exocoel feedback district, wherein, laser gain chip 1 is coated with anti-reflection film 6 on the end face in exocoel feedback district, is coated with part transmissive portion reflectance coating 7 on other end; A side that is coated with anti-reflection film 6 by laser gain chip 1 rises, and sets gradually lens unit 2, optical standard tool 3 and speculum 4; Wherein, lens unit 2, optical standard tool 3 and speculum 4 are provided so that exocoel feedback district and laser gain chip 1 form laserresonator.At this, be arranged on lens unit 2 on lens carrier 8 and formed as lens 14, lens 15, lens 16 by a plurality of lens, first temperature-adjusting device 9 that can controlledly regulate temperature that laser gain chip 1 is provided with; Optical standard tool 3 is provided with second temperature-adjusting device 5 that can controlledly regulate temperature; Near laser gain chip 1, be provided with the first temperature sensor 11; Near optical standard tool 3, be provided with the second temperature sensor 10.Wherein, the first temperature-adjusting device 9, the second temperature-adjusting device 5, the first temperature sensor 11 and the second temperature sensor 10 respectively with the outside cavity gas laser shown in Fig. 5 and Fig. 6 in the first temperature-adjusting device 9, the second temperature-adjusting device 5, the first temperature sensor 11 and the second temperature sensor 10 same or similar, for simplicity's sake, do not repeat them here.
For ease of explanation, at this, in Figure 16, only take as shown in above-mentioned Fig. 8 (or Fig. 9) of the present invention along with heating degree changes the structure realize tunable optical standard tool 3 as exemplifying the structural representation of outside cavity gas laser of the tunable wave length of another preferred embodiment of the present invention.
Particularly, as shown in figure 16, the light beam that laser gain chip 1 produces is transmitted through by lens 14 through anti-reflection film 6, lens 15, the lens unit 2 that lens 16 form, after forming directional light, lens unit 2 is incident to optical standard tool 3, through 3 pairs of light beams of optical standard tool, carry out after transmission, toward mirror 4, after speculum 4 reflections, be back to optical standard tool 3, and by optical standard tool 3 again transmission enter lens unit 2, through lens unit 2, focus on and be back to laser gain chip 1, in the interior gain of laser gain chip 1, amplify, so, light beam obtains required multi-mode laser after the multiple reflections of laser resonant cavity, the one end that is coated with part transmissive portion reflectance coating 7 from laser gain chip 1 is penetrated.
To those skilled in the art, obviously the invention is not restricted to the details of above-mentioned one exemplary embodiment, and in the situation that not deviating from spirit of the present invention or essential characteristic, can realize the present invention with other concrete form.Therefore, no matter from which point, all should regard embodiment as exemplary, and be nonrestrictive, scope of the present invention is limited by claims rather than above-mentioned explanation, is therefore intended to be included in the present invention dropping on the implication that is equal to important document of claim and all changes in scope.Any Reference numeral in claim should be considered as limiting related claim.In addition, obviously other unit or step do not got rid of in " comprising " word, and odd number is not got rid of plural number.A plurality of unit of stating in claim or device also can You Yige unit or device by software or hardware, realize.The first, the second word such as grade is used for representing title, and does not represent any specific order.
Claims (14)
1. an outside cavity gas laser for tunable wave length, comprises laser gain chip, and the one or more lens units, optical standard tool and the speculum that are positioned at this laser gain chip one side, formation exocoel feedback district, wherein:
Described laser gain chip is coated with anti-reflection film on the end face in described exocoel feedback district, is coated with part transmissive portion reflectance coating on other end;
A side that is coated with anti-reflection film by described laser gain chip rises, and sets gradually described one or more lens unit, optical standard tool and speculum;
Wherein, described one or more lens unit, optical standard tool and speculum are provided so that described exocoel feedback district and described laser gain chip form laserresonator.
2. according to right, will remove the outside cavity gas laser described in 1, wherein, described optical standard tool is for realizing tunable optical standard tool along with heating degree changes.
3. outside cavity gas laser according to claim 2, wherein, described tunable optical etalon is provided with second temperature-adjusting device that can controlledly regulate temperature, and wherein, described tunable optical etalon comprises the long variation with temperature in its chamber and the air chamber that changes.
4. according to the outside cavity gas laser described in claim 2 or 3, wherein, described outside cavity gas laser also comprises:
Second control device, be used for controlling described the second temperature-adjusting device and regulate temperature, it is overlapping at one or more predetermined wavelengths place so that the air chamber chamber personal attendant of described tunable optical etalon corresponding one or more transmission peaks of one or more crests that temperature change makes LASER Light Source and the transmission of described tunable optical etalon, wherein, the light that the light that described LASER Light Source is produced by described laser gain chip and this light directly obtain through the reflection of described one or more lens units and described speculum carries out light wave stack and generates.
5. according to the outside cavity gas laser described in any one in claim 2 to 4, wherein, near described tunable optical etalon, be provided with the second temperature sensor, for detection of the temperature of described tunable optical etalon.
6. according to the outside cavity gas laser described in any one in claim 2 to 5, wherein, described tunable optical etalon comprises the first member and the second component of being made by different thermal expansion coefficient material respectively, wherein, the first member be hollow, at least one end has the member of opening, described second component is placed in described the first member completely, and described tunable optical etalon also comprises for sealing respectively the substrate of opening of at least one end of described the first member.
7. outside cavity gas laser according to claim 6, wherein, described air chamber is coated with film particular range of wavelengths to high reflectance at least one surface in light path.
8. outside cavity gas laser according to claim 1, wherein, described optical standard tool is for realizing tunable optical standard tool along with institute's making alive changes, and wherein, described tunable optical etalon comprises: the voltage regulating device that can controlledly regulate described voltage.
9. outside cavity gas laser according to claim 8, wherein, described tunable optical etalon comprises the liquid crystal that its refractive index changes with the variation of voltage, and for forming closed area to place the first sheet glass, the second sheet glass and at least one pad of described liquid crystal, wherein, described the first sheet glass and described the second sheet glass are oppositely arranged, and it is coated with film and the conducting film for conducting electricity particular range of wavelengths to high reflectance on the end face of described liquid crystal, described pad is between described the first sheet glass and described the second sheet glass.
10. outside cavity gas laser according to claim 8, wherein, described tunable optical etalon comprises the piezoelectric ceramic that its shape changes with the variation of voltage, and be used to form the variation of the shape of piezoelectric ceramic described in the personal attendant of its chamber and the first speculum and second speculum of the air chamber that changes, wherein, at least one in described the first speculum and the second speculum is fixedly attached to described piezoelectric ceramic.
11. according to the outside cavity gas laser described in any one in claim 1 to 10, wherein, described laser gain chip is provided with first temperature-adjusting device that can controlledly regulate temperature, and wherein, in described laser gain chip, the refractive index of material can change along with the variation of temperature.
12. outside cavity gas lasers according to claim 11, wherein, also comprise:
First control device, be used for controlling described the first temperature-adjusting device and regulate temperature, so that in described laser gain chip the refractive index of material along with the change of temperature make one or more crests of LASER Light Source and corresponding one or more transmission peaks of described tunable optical etalon transmission overlapping at one or more predetermined wavelengths place, wherein, the light that the light that described LASER Light Source is produced by described laser gain chip and this light directly obtain through the reflection of described one or more lens units and described speculum carries out light wave stack and generates.
13. according to the outside cavity gas laser described in claim 11 or 12, wherein, is provided with the first temperature sensor, for detection of the temperature of described laser gain chip near described laser gain chip.
14. according to the outside cavity gas laser described in any one in claim 1 to 13, wherein, described outside cavity gas laser also comprises for regulating the long fiber waveguide in the chamber of described external resonant cavity and/or for screening the filter plate of optical wavelength, described fiber waveguide and described filter plate all can be positioned at any position in described exocoel feedback district.
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| CN201310341504.5A CN103515840A (en) | 2013-08-07 | 2013-08-07 | External-cavity laser device with tunable wave length |
| PCT/CN2014/083881 WO2015018352A1 (en) | 2013-08-07 | 2014-08-07 | Wavelength-tunable external cavity laser |
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| CN201310341504.5A CN103515840A (en) | 2013-08-07 | 2013-08-07 | External-cavity laser device with tunable wave length |
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