CN1489965A - Ceramic heating apparatus and producing method thereof - Google Patents

Ceramic heating apparatus and producing method thereof Download PDF

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Publication number
CN1489965A
CN1489965A CNA031589340A CN03158934A CN1489965A CN 1489965 A CN1489965 A CN 1489965A CN A031589340 A CNA031589340 A CN A031589340A CN 03158934 A CN03158934 A CN 03158934A CN 1489965 A CN1489965 A CN 1489965A
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powder
sintered glass
ceramic heat
heat equipment
temperature
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乌尔里克・希夫纳
乌尔里克·希夫纳
里克・西伯斯
弗里德里克·西伯斯
・沃姆布特
卡斯滕·沃姆布特
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Schott AG
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Schott Glaswerke AG
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    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C14/00Glass compositions containing a non-glass component, e.g. compositions containing fibres, filaments, whiskers, platelets, or the like, dispersed in a glass matrix
    • C03C14/004Glass compositions containing a non-glass component, e.g. compositions containing fibres, filaments, whiskers, platelets, or the like, dispersed in a glass matrix the non-glass component being in the form of particles or flakes
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C10/00Devitrified glass ceramics, i.e. glass ceramics having a crystalline phase dispersed in a glassy phase and constituting at least 50% by weight of the total composition
    • C03C10/0036Devitrified glass ceramics, i.e. glass ceramics having a crystalline phase dispersed in a glassy phase and constituting at least 50% by weight of the total composition containing SiO2, Al2O3 and a divalent metal oxide as main constituents
    • C03C10/0045Devitrified glass ceramics, i.e. glass ceramics having a crystalline phase dispersed in a glassy phase and constituting at least 50% by weight of the total composition containing SiO2, Al2O3 and a divalent metal oxide as main constituents containing SiO2, Al2O3 and MgO as main constituents
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00Ohmic-resistance heating
    • H05B3/68Heating arrangements specially adapted for cooking plates or analogous hot-plates
    • H05B3/74Non-metallic plates, e.g. vitroceramic, ceramic or glassceramic hobs, also including power or control circuits
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2214/00Nature of the non-vitreous component
    • C03C2214/04Particles; Flakes
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2214/00Nature of the non-vitreous component
    • C03C2214/20Glass-ceramics matrix

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Materials Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Dispersion Chemistry (AREA)
  • Organic Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Glass Compositions (AREA)
  • Electric Stoves And Ranges (AREA)
  • Baking, Grill, Roasting (AREA)
  • Cookers (AREA)

Abstract

The surface consists of a low-expansion sintered glass ceramic. This contains cordierite forming at least 90%, preferably at least 92% of the main crystal phase. An Independent claim is included for the method of manufacture.

Description

Ceramic heat equipment and manufacture method thereof
The invention relates to a kind of ceramic heat equipment with the single chip architecture on big plane, its whole heating tanks cover the manufacture method of the heating panel and this ceramic heat equipment that dispose independent predetermined heating district.
Common ceramic heat equipment is made of a flat heating panel, disposes boiling vessel in the above and below the heating panel heating system is set, as heating with radiation or halogen heating object.Therefore heat panel and constitute, as the glass ceramics of Ceran type by the low bulk material.
Also known except this conventional ceramic heat equipment with common mode of heating have a kind of direct-fired ceramic heat equipment.Replace the directly zone of heating of a kind of conduction of coating below the heating panel of common heating object in this known firing equipment, this layer is bonding securely with the heating panel.Direct-fired firing equipment is compared its advantage with the firing equipment of common heating be generally to have necessary lower operating temperature, and good thermal power is regulated and the temperature of the upper surface of control heating panel, the i.e. temperature of the thermal treatment zone thus.So heat with this direct-fired firing equipment, heat time heating time is short and obtain higher efficient thus in the firing equipment of littler device height.
The material that is used for the heating panel of direct-fired firing equipment must have except low hot expansibility, also must have high electrical insulating property and good thermal conductivity.Therefore for direct-fired firing equipment, can use glass ceramics, disclosed as WO 00/15005.In addition, also can use preferred non-oxide pottery, as the Si of patent EPO 853444 A2 regulation 3N 4Or the SiC of patent DE19835378 regulation or the application of AlN.
About the necessary performance to the material of the heating panel that is used for direct-fired digesting apparatus is known, and Here it is, and it reduces than resistance along with the increase of temperature.Especially the LAS-glass ceramics as Ceran of Shi Yonging.It is not more than 106 Ω cm than resistance when the maximum operating temperature of direct-fired firing equipment is 450 ℃.Certainly this resistance is not enough to guarantee to satisfy the compressive resistance of 3750V (European standard) or 1000V (Unite States Standard) requirement.In order to satisfy this requirement, need between the heat carrier layer of the heating panel of glass ceramics and coating, to add an electric insulation layer in addition.This insulating barrier can be by Al 2O 3(DE 19817194 A1) or constitute by Glasemaille (patent DE 19845102 A1).By the known layer that constitutes by BN or ceramic bonding agent of patent DE 19835378 A1.Known in addition also is excellent material as mullite or cordierite.Thickness according to the electric insulation layer of this material of ratio resistance of this material itself can be maximum to a hundreds of μ m.
But the insulating barrier of this necessity has a series of new shortcomings when using in direct-fired firing equipment.Usually only have the thermal conductance ability that reduces in proportion because be used for the material of insulating barrier, will make the efficient reduction of firing equipment along with the increase of thickness of insulating layer.In addition owing to the different thermal stress that produce of thermal coefficient of expansion between glass ceramics and the insulating materials, this just is difficult to realize stable bonding of mechanicalness.Simultaneously often inevitably, out-of-flatness that insulating barrier had or the similar porous of its upper surface, these make to have only the thick thin heat carrier diatom of several μ m to be difficult to even coating.Require the manufacturing of this layer at last, just the coating of the layer material that is used to insulate of the necessary layer thickness of coating and back to back calcining to this layer need increase extra technical fee, the especially manufacturing expense that is not little on glass ceramics one heating panel.
The thermal mismatch problem of glass ceramics and insulating materials can have ductility by between heating panel and insulating barrier coating is a kind of, and metal level reduces.Because the stress (patent DE 3105065 C2) that this additional layer can be loose causes because of thermal mismatching.If make this metal level ground connection, can also therefore bring other advantage, between boiling container on the thermal treatment zone and heat conductor because the guard electrode that it punctures as reactance voltage.Can lower the requirement of electricity on insulating barrier thus as far as possible, make and for example to reduce its thickness.Certainly also to consider to use the existing expense that manufacturing increased of this metal intermediate layer to this layer.
Use above mentioned non-oxide glass ceramics, as Si 3N 4, the topmost advantage of SiC and AlN is that opposite this pottery with the heating panel that is made of glass ceramics has very high ratio resistance.Because this specific character generally can be cancelled the electric insulation layer that is added noted earlier between heating panel and heat carrier, do not reduce desired compressive resistance simultaneously.
But with respect to glass ceramics, the major defect of described pottery is its obviously excessive coefficient of expansion>3.10 -6K -1Suppose to use and be similar to like the heating panel of the glass ceramics situation that covers with cook vat big by this material manufacturing, the heating panel of monolithic then will be owing to producing very big mechanical stress in the single thermal treatment zone with around the temperature contrast that does not heat edge interval of the thermal treatment zone.This can cause the irregular corresponding buckling deformation of the thermal treatment zone, so that can not guarantee the Pingdu of the plate that the boiling vessel bottom surface on the thermal treatment zone is placed again and cause the efficient of firing equipment obviously to reduce thus.Also there is very big danger on the other hand, when the thermal stress that produces surpasses the intensity of heating surface material itself, will in the heating panel, produces fracture, crack etc.
Another shortcoming of this ceramic material is its high thermal conductivity, for Si 3N 4For>30W/mK or for SiC and AlN be>100W/mK, this causes the excessive heat in the marginal portion of the heating panel of the monolithic on big plane, the reliability that this might cause equipment damage and reduce equipment.Thisly overheatedly also cause energy loss, because the scope outside the thermal treatment zone is forced heat.
Owing to above these reasons can not adopt the heating plate of the monolithic on this known big plane of ceramic making, needn't tolerate this major defect.Independent heating panel can be the size of the desired thermal treatment zone in principle and be to place corresponding space that plate that cook vat covers stays and by organic encapsulant the fringe region between heating plate and the overlay is fixed.
Compare with the heating plate of the monolithic on the big plane of being made by glass ceramics, there are many shortcomings in the concrete structure of this firing equipment.It does not have consistent, the aesthstic printing of large scale monolithic heating panel.Make evenly highly no longer keeping between cover plate heating plate and encirclement and that hold owing in cover plate, embedding single heating plate on the other hand.Last since between single heating plate and cover plate existing bonding land and impaired and cover plate is well purified is very important.
Task of the present invention is the ceramic heat equipment of a kind of form that begins to mention of preparation, and the heating panel that it is made by ceramic material part is at least covered by cook vat and has low thermal conductivity and a little thermal expansion.
This task is solved by the present invention, promptly heats panel and is made of the sintered glass pottery of low bulk, and it contains at least 90%, the cordierite of preferred at least 92% primary crystallization phase.
Used a kind of sintered glass pottery in this ceramic heat equipment, it is a kind of primary crystallization phase that is made of cordierite.This sintered glass pottery has enough little thermal expansivity, is<1.510 in 20 to 500 ℃ temperature range -6K -1, be preferably<110 -6K -1Because the thermal conductivity that this material has is 2-4W/mK, can be used to make a kind of heating panel with big plane monolithic of the independent regulation thermal treatment zone.
By the most preferred embodiment, the sintered glass pottery contains TiO 2And/or ZrO 2And/or ZrSiO 4As the submember of crystallization, and thermal conductivity at ambient temperature is 4 to 4.5W/mK, and its thermal conductivity is 2 to 3W/mK under 450 ℃ temperature.
E modulus>the 120GPa of sintered glass pottery, preferred>140GPa and have high electrical insulation capability is promptly at t K100Surpass 650 ℃, preferably above 850 ℃.
The stock of sintered glass pottery is the MgO of 14-16 based on percentage by weight, the Al of 32-35 2O 3, the SiO of 48-57 2, the K of 0-2 2O, the B of 0-2 2O 3And the TiO of 0-8 2And/or ZrO 2
The machinery of this ceramic heat equipment, electricity, the characteristic with how much of ratio of specific heat all satisfies the requirement of standard.
What take by the preferred embodiments of the invention is the thermal treatment zone that can directly heat panel by the heat conductor diatom that directly applies below the heating panel.Such configuration can not added insulating barrier owing to heat the excellent electric insulating of panel material between heating panel and heat conductor layer.Its special advantage is to work as the heating panel with big plane, monolithic, all the object of cook vats covering constitutes.Eliminated at the beginning the 5th page of technical shortcoming of being described with simple method like this.
This ceramic heat equipment is a kind of product of long-term stability, and it is different from common firing equipment, and it has the efficient of tangible improved Controllable Temperature and Geng Gao.In addition owing to having omitted the expense that insulating barrier has reduced material and manufactured.
Especially based on the hot expansibility of mentioned sintered glass pottery, little thermal conductivity and high E-modulus, the warpage<0.1mm of its thermal treatment zone under with the operational temperature conditions of the upper surface of 420 ℃ the thermal treatment zone.
Use the powder of sintered glass pottery in the manufacturing of this ceramic heat equipment, it is that mixture by the powder of the raw material glass of crystallization and at least a other oxide component constitutes.Wherein, the amount of the other oxide component of Jia Ruing is the 2-8 weight % of mixture of powders here, and uses TiO as other oxide component 2And/or ZrO 2And/or ZrSiO 4The base substance of used sintered glass ceramics powder is MgO by 14-16 based on weight %, the Al of 32-35 2O 3, the SiO of 48-57 2, the B of 0-2 2O 3, the K of 0-2 2O forms.This crystallization raw material glass powder is to obtain by the melt raw material glass with above-mentioned component is handled under the treatment temperature of>900 ℃ temperature, wherein, is to be made of cordierite mutually as primary crystallization.
Then with the raw material glass of crystallization and 2-8 weight % by TiO 2And/or ZrO 2And/or ZrSiO 4The oxide component of other of the mixture of powders that constitutes grinds together and becomes the powder that granularity is 1-3 μ m.
The powder mixture of the above-mentioned granularity that grinds is become the flat board of heating plate size, is 1250 to 1400 ℃ in temperature, preferably sinters solid matter under 1320 to 1360 ℃ condition.
Use with the barbecue plane and as the warming plate in the heat-preserving equipment on the boiling plane that the heating plate that makes like this can be used as in the heater.
Based on MgO-Al 2O 3-SiO 2The cordierite material of three systems since its 1 to 310 -6K -1Low thermal expansivity and possess apparently higher than 10 simultaneously 14The high specific resistance of Ω cm, especially in electronic equipment as nonexpondable workpiece.
Its low thermal coefficient of expansion<1.510 particularly -6K -1(20 to 500 ℃ scope) can be by keeping on the one hand material the content of impurity little, require on the other hand to have the cordierite-crystalline phase of high-load in the material and reach.These two kinds of conditions all satisfy well, because this material is not to be made but by the manufacturing of sintered glass pottery by the Production of Ceramics routes that the part natural material uses by most of industry.Raw material pure comparatively speaking in principle under this condition are converted into the glass pellet by melting, and then carry out pulverization process then.Make profiled member by this powder through the process for preparing ceramic of routine, and form through sintering.Crystallization in sintering process generation cordierite crystalline phase.Except having low thermal expansion and high resistivity, cordierite material also has high intensity (E-modulus>120GPa) and in 2 to 5W/mK thermal conductivity comparatively speaking.All these characteristics of mentioning of cordierite material, especially it occurs with form of sintered glass pottery, to the application as the heating panel be suit with significant.
Known for a long time that cordierite-sintered glass is ceramic as the material as filler, matrix and mold.The component of cordierite-sintered glass pottery generally is expressed as the MgO of 13-18, the Al of 30-38 with percentage by weight 2O 3SiO with 48-54 2, be more or less the same with the pure cordierite-crystalline phase synthetic that calculates by chemical method in principle.Usually with other oxide component such as B 2O 3Or K 2O adds with a small amount of weight % as sintering aid.It is particularly favourable to harden that and then this formed body by casting method manufacturing like compacting or the mud carries out sintering.
As previously mentioned, high-load cordierite-crystalline phase being arranged in the sintered glass pottery is to make material have the prerequisite of enough little thermal coefficient of expansion.Raw material glass is carried out repeatedly that crystallization handles is very favourable in order to reach this target.Be only to reach requirement under the condition of glass particle or levigate powder when raw material through the primary crystallization process.To in burning brilliant process, carry out primary crystallizationization again if carry out sintered moulded body.
Table 1 is that some cordierite-sintered glass potteries are within the scope of the present invention tested the example of composition.
Mixture quenches after melting (1550 ℃, 2 hours) and forms glass particle.This particle grind again become glass powder (particle mean size is about 6 μ m) and under 1020 to 1080 ℃ temperature crystallization handled 4 to 8 hours.
Listed the powder material that is used to heat the key property that panel is suitable for and be with the single shaft compacting with at 1350 ℃ of even sample particles of 5 hours sintering of heating (by powders A to E) (table 1).
Table 1: the composition (representing) that is used for the raw material glass of cordierite-sintered glass pottery with percentage by weight
????A ????B ????C ????D ????E
????MgO ????15.1 ????14.5 ????14.5 ????14.2 ????14.2
????Al 2O 3 ????32.7 ????34.1 ????34.1 ????34.0 ????34.0
????SiO 2 ????52.2 ????50.4 ????50.4 ????49.8 ????49.8
????B 2O 3 ????- ????1.0 ????- ????2.0 ????1.0
????K 2O ????- ????- ????1.0 ????- ????1.0
α 20/500(10 -6K -1) ????1.08 ????0.81 ????0.92 ????0.88 ????0.95
Log ρ (at 400 ℃) ????10.0 ????9.6 ????9.7 ????9.9 ????9.8
Above-described, before crystallization and powder that contained cordierite-crystalline phase thus can be directly used in the formed body of making the heating surface board size.Also proved conclusively and added other oxide powder, TiO especially above-mentioned 2, ZrO 2And/or ZrSiO 4Powder, addition 10 weight % at the most especially improves it than resistance to improve its characteristic electron, and makes the intensity of sintered material be improved, and don't change other key property, especially can not degenerate as thermal coefficient of expansion and by the sintering character of the formed body of powder manufacturing.By table 2 mixture of powders (composition) (% represents with weight) by the different test of powder that contains cordierite-crystalline phase and the oxide composition powder of some is shown obviously.
These mixture of powders mixed in ball mill 5 hours.The best distribution of particles of relevant this mixture of powders is, average grain diameter is in 1 to 3 μ m size, and this handles back to back powder processing is favourable.For determine material behavior by mixture by single shaft make sample also and then carry out sintering (1350 ℃/5h).The material behavior of the sintered glass pottery that these detected is shown in table 3.
Table 2: add the mixture of powders component (representing) that composition is formed with percentage by weight by cordierite-raw material glass and oxide
????1 ????2 ????3 ????4 ????5 ????6 ????7 ????8 ????9 ????10
Powders A ????98 ????94 ????96
Powder B ????94 ????96
Powder C ????96 ????94
Powder D ????92 ????96
Powder E ????92
??TiO 2-powder ????2 ????6
??ZrO 2-powder ????6 ????4 ????8
??ZrSiO 4-powder ????4 ????4 ????6 ????4 ????8
Table 3: the material behavior of sintered powder mixture
???1 ???2 ???3 ???4 ???5 ???6 ???7 ??8 ???9 ??10
???δ ?g/cm 3 ??2.63 ?2.67 ?2.65 ?2.67 ?2.65 ?2.64 ?2.68 2.69 ?2.65 ?2.68
???α 20/500 ?ppm/K ??1.10 ?1.18 ?1.15 ?0.93 ?0.89 ?0.98 ?1.05 1.09 ?1.02 ?1.12
???E ?GPa ??129 ?136 ?132 ?139 ?135 ?128 ?141 142 ?138 ?145
???logρ(400℃) ??10.2 ?10.6 ?10.5 ?9.9 ?10.8 ?10.5 ?11.2 11.4 ?10.6 ?11.8
???λ(400℃) ?W/mK ??3.0 ?3.1 ?3.2 ?3.5 ?3.3 ?3.2 ?3.4 ?3.2 ?3.3 ?3.0
The formed body pressure sintering that heats panel for the routine by above-mentioned powder component geometrical shape making is reliable.Here fill up in corresponding model that dusty material carries out uniaxial compression and with the time or heat-treat with sintering.This method relatively has remarkable advantages with conventional moulding and sintering process when making large-sized sheet material, especially about the dimensional accuracy of formed body and the quality of its upper surface.
And then the plate of sintering is made desired final geometry or corresponding upper surface quality with the cold treatment method of routine.
This heating plate of can be directly using as the firing equipment of heating usually through the sheet material of said method manufacturing by cordierite-sintered glass pottery or in heat-preserving equipment, be used as warming plate.
For being used for direct-fired firing equipment then at the corresponding heat carrier diatom of another step coating below the heating plate of being furnished with the scope that is used for the thermal treatment zone.This carries out with known method such as print process or thermojet method.No longer need the coating of former electric insulation layer by the present invention.After the corresponding electric contact of heat conductor diatom is connected, comprise in case of necessity thermal element amass, can implement temperature adjustability better, this direct-fired heating panel can be used for the field of firing equipment.
Use the warpage<0.1mm that when heating panel upper surface temperature is 420 ℃, records thermal treatment zone plate face (φ 180mm) by the above-mentioned of cordierite-sintered glass pottery and the direct-fired heating panel made when the heat run in the scope at heating region.

Claims (16)

1. have a big plane, the ceramic heat equipment of monolithic, cook vat cover to small part has the heating panel of the regulation thermal treatment zone at least, it is characterized by, the heating panel is made of the sintered glass pottery of low bulk, and it contains 90% at least, the cordierite of preferred at least 92% primary crystallization phase.
2. by the ceramic heat equipment of claim 1, it is characterized by, the sintered glass pottery contains TiO 2And/or ZrO 2And/or ZrSiO 4Less important composition as crystallization.
3. by claim 1 or 2 ceramic heat equipment, it is characterized by, the thermal expansion that the sintered glass pottery has in temperature is 20 to 500 ℃ scope is less than 1.5.10 -6.K -1, preferably less than 1.10 -6.K -1
4. by the ceramic heat equipment one of in the claim 1 to 3, it is characterized by, the sintered glass pottery at room temperature has 4 to 4.5W/m thermal conductance and 2 to 3W/mK thermal conductance under 450 ℃ temperature.
5. by the ceramic heat equipment one of in the claim 1 to 4, it is characterized by, the E-modulus of sintered glass pottery is preferably greater than 140GPa greater than 120GPa.
6. by the ceramic heat equipment one of in the claim 1 to 5, it is characterized by, the sintered glass pottery has and is higher than 650 ℃, is preferably to be higher than 800 ℃ t K100-value has high electrical insulating property.
7. by the ceramic heat equipment one of in the claim 1 to 6, it is characterized by, the sintered glass pottery contains the MgO of 14-16 in weight %, the Al of 32-35 2O 3, the SiO of 48-57 2, the K of 0-2 2O, the B of 0-2 2O 3And the TiO of 0-8 2And/or ZrO 2
8. by the ceramic heat equipment one of in the claim 1 to 7, it is characterized by, directly heat by the heat carrier diatom that directly applies below the heating panel thermal treatment zone of heating panel.
9. by the ceramic heat equipment one of in the claim 1 to 8, it is characterized by, the upper surface of the thermal treatment zone with 420 ℃ operating temperature under the warpage of thermal treatment zone scope less than 0.1mm.
10. by the ceramic heat device manufacturing method one of in the claim 1 to 9, it is characterized by, the sintered glass pottery is made by powder, and this powder is made of the mixture of the raw material glass of crystallization and at least a other oxide components powder.
11. the method by claim 10 is characterized by, it is 2 to 8 weight % that other oxide component amount accounts for mixture of powders.
12. the method by claim 10 or 11 is characterized by, as the component use TiO of oxide 2And/or ZrO 2And/or ZrSiO 4
13. the method by one of in the claim 10 to 12 is characterized by, and uses a kind ofly to have the MgO of 14-16, the Al of 32-35 in weight % 2O 3, the SiO of 48-57 2B with 0-2 2O 3K with 0-2 2The sintered glass ceramics powder of O.
14. the method by one of in the claim 10 to 13 is characterized by, and is higher than in temperature by glass powder under 980 ℃ the condition to constitute with primary crystallization phase cordierite.
15. the method by one of in the claim 10 to 14 is characterized by, and the raw material glass and the other oxide component of crystallization ground to form the powder that particle mean size is 1-3 μ m.
16. by the method for claim 15, it is characterized by, dull and stereotyped and this plate that is become the heating surface board size by the powder mixture that grinds is preferably under 1320 to 1360 ℃ the temperature in temperature is 1250 to 1400 ℃ scope, sinters solid matter into.
CNA031589340A 2002-09-13 2003-09-12 Ceramic heating apparatus and producing method thereof Pending CN1489965A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10242481.0 2002-09-13
DE2002142481 DE10242481C1 (en) 2002-09-13 2002-09-13 Glass ceramic hob comprises low-expansion sintered glass ceramic containing specified high percentage of cordierite in main crystal phase

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CN1489965A true CN1489965A (en) 2004-04-21

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CN (1) CN1489965A (en)
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CN105271763A (en) * 2015-11-20 2016-01-27 中国地质大学(武汉) Low-dielectric low-expanded cordierite glass-ceramic material taking perlite as main raw materials and preparation method thereof
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WO2009032197A1 (en) * 2007-08-31 2009-03-12 Corning Incorporated Glass-ceramic and glass-ceramic/ceramic composite semiconductor manufacturing article support devices
US8925350B2 (en) * 2010-07-23 2015-01-06 King Abdulaziz City For Science And Technology Preparation of sintered cordierite glass-ceramic bodies
ES2385082B1 (en) 2010-12-21 2013-05-24 BSH Electrodomésticos España S.A. PROCEDURE FOR THE MANUFACTURE OF A DOMESTIC APPLIANCE PLATE, AND DOMESTIC DEVICE DEVICE WITH A DOMESTIC APPLIANCE PLATE.
JP2012224515A (en) * 2011-04-20 2012-11-15 Mitsubishi Electric Corp Sintered body plate and heating cooker
JP2015029627A (en) * 2013-07-31 2015-02-16 住友電気工業株式会社 Cooking plate and cooking device equipped with the same
WO2014203427A1 (en) * 2013-06-17 2014-12-24 住友電気工業株式会社 Cooking plate and cooker provided with same

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT302155B (en) * 1970-05-05 1972-08-15 Keramische Werke Hermsdorf Ele PROCESS FOR MANUFACTURING CERAMIC PRODUCTS WITH HIGH COMPOSITION
DE3105065A1 (en) * 1981-02-12 1982-08-19 Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt Glass-ceramic hotplate
DE3106055A1 (en) * 1981-02-19 1982-09-02 Anchor Hocking Corp., 43130 Lancaster, Ohio High-strength ceramic article
DE3447633A1 (en) * 1983-12-28 1985-07-11 Kyocera Corp., Kyoto Sintered oxide ceramic article
FR2711364B1 (en) * 1993-10-18 1995-12-22 Itech System Sinterable ceramic powder of the cordierite type, ceramic obtained by sintering this powder and heating element comprising this ceramic.
US5532194A (en) * 1994-11-18 1996-07-02 Kabushiki Kaisya Ohara Cordierite glass-ceramic and method for manufacturing the same
DE59813206D1 (en) * 1997-01-10 2005-12-29 Ego Elektro Geraetebau Gmbh Cooking system with a contact heat transmitting electric hotplate
DE19817194A1 (en) * 1998-04-17 1999-10-21 Bsh Bosch Siemens Hausgeraete Cooking plate with electrically conductive ceramic plate
DE19835378A1 (en) * 1998-08-05 2000-02-10 Ako Werke Gmbh & Co Heated surface element
AU5408599A (en) * 1998-09-03 2000-03-27 Aktiebolaget Electrolux An insulated thin film heater
DE19845102A1 (en) * 1998-09-30 2000-04-06 Bsh Bosch Siemens Hausgeraete Contact heat-transferring electrical cooking system

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100427014C (en) * 2007-04-17 2008-10-22 景德镇陶瓷学院 High heat-resisting ceramic cooking cook ware suitable for electromagnetic induction furnace
WO2009046611A1 (en) * 2007-10-12 2009-04-16 Mei De Jituan Ltd Material used to produce defrost vessel for microwave oven and the defrost vessel made of such material
CN102256392A (en) * 2011-05-18 2011-11-23 何小洁 Method for preparing microcrystalline glass heating plate based on in-situ crystallization technology
CN105461295A (en) * 2014-09-25 2016-04-06 肖特股份有限公司 Pore-free ceramic component
CN105461295B (en) * 2014-09-25 2021-01-08 肖特股份有限公司 Non-porous ceramic member
CN105271763A (en) * 2015-11-20 2016-01-27 中国地质大学(武汉) Low-dielectric low-expanded cordierite glass-ceramic material taking perlite as main raw materials and preparation method thereof
CN105271763B (en) * 2015-11-20 2017-11-24 中国地质大学(武汉) It is a kind of using perlite as low Jie's low bulk cordierite glass-ceramic material of primary raw material and preparation method thereof
CN111908797A (en) * 2020-07-28 2020-11-10 电子科技大学 Low-thermal-expansion cordierite-based microcrystalline glass material and preparation method thereof
CN111908797B (en) * 2020-07-28 2022-05-03 电子科技大学 Low-thermal-expansion cordierite-based microcrystalline glass material and preparation method thereof

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