CN1449128A - Method for modulating multipath light simultaneously using waveguide resonance mode and modulator - Google Patents
Method for modulating multipath light simultaneously using waveguide resonance mode and modulator Download PDFInfo
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- CN1449128A CN1449128A CN03116462A CN03116462A CN1449128A CN 1449128 A CN1449128 A CN 1449128A CN 03116462 A CN03116462 A CN 03116462A CN 03116462 A CN03116462 A CN 03116462A CN 1449128 A CN1449128 A CN 1449128A
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Abstract
The present invention belongs to the field of optoelectronic communication and optical information treatment. In the modulator, upper metal film, photoelectric polymer film, isolating layer and lower metal film are plated successively onto the lower surface of the prism; the upper and the lower metal film and the photoelectric polymer film constitute double-sided metal coated waveguide structure; the prism, the upper metal film and the photoelectric polymer film constitute the attenuating total-reflection structure; and the excited guide wave propagates inside the photoelectric polymer film. The modulation method includes constituting the said modulator, using semiconductor laser as laser light source, producing guide wave resonance mode, looking for corresponding sync angle to make the incident angle of laser beam to the bottom of the prism equal to the sync angle, and receiving reflected laser beam with detector to realize multiplex light modulation.
Description
Technical field
What the present invention relates to is a kind of method and device of modulating multichannel light simultaneously, and particularly a kind of method and modulator that utilizes the guided wave resonance mode to modulate multichannel light simultaneously belongs to photoelectron communication and optical information processing field.
Background technology
Recent two decades comes, and along with the fast development of electro-optical organic material, the development of organic electrooptic modulator has been made significant headway.Moreover, the also existing report of multichannel electrostrictive polymer optical modulator.There are two kinds of forms can realize multichannel electrostrictive polymer light modulation at present: the Mach-Zender of waveguide type (M-Z) structure and attenuate total reflection device architecture.The electrooptic modulator of Mach-Zehnder interfere type or its improved structure is the main flow of optical modulator in the world today, its advantage be modulation bandwidth than higher, made lithium niobate modulator and the practicability that modulation bandwidth is 40GHz as U.S. Lawrence Livermore National Laboratory.But it is big that the modulator ubiquity of this class waveguiding structure the insertion loss, the shortcoming of complex manufacturing technology.Its insertion loss generally about 2 dB, this means that the intake near 40% has lost in the modulated process.The micro fabrication that extensively adopts in its manufacturing process has increased the degree of difficulty of making simultaneously.The meticulous micro fabrication of a series of complexity such as the preparation process as the Mach-Zehnder performance of interferometric modulators comprises electrode design, plate-making, mask, photoetching, etching, peel off, and whole process must be carried out in the clean room of ultra-clean dedusting.This has just determined the expensive characteristics of electrooptic modulator with this method making.Find by literature search, Appl.Phys.Lett.62 (24), 14, June, 1993, Multilevel registered polymeric intensity modulator array (Applied Physics wall bulletin .62 (24), 14, June, 1993, the Mach-Zehnder intensity modulator that multilayer is integrated), this article is to propose integrated two-layer guided wave polymer electric light Mach-Zehnder intensity modulator first, it is vertical integrated two structures of Mach-Zehnder modulator fully independently on same chip, and these two Mach-Zehnder modulators can independent polarization and operation.Though this twin-channel Mach-Zehnder modulator can use, it integrated exists very big difficulty.The integrated M-Z modulator of multichannel difficulty especially on same chip particularly, each M-Z structure needs 4-5 layer combination, and vertical integrated two M-Z structures need the 8-10 layer, and therefore integrated a plurality of M-Z are actually unusual difficulty on same chip.
Summary of the invention
The objective of the invention is to overcome deficiency of the prior art, a kind of method and modulator that utilizes the guided wave resonance mode to modulate multichannel light simultaneously is provided, modulation when making the guided wave resonance mode of its modulator that utilizes the attenuate total reflection structure realize multichannel light, modulator has features such as technology is simple, cheap, miniaturization simultaneously.
The present invention is achieved by the following technical solutions, modulator of the present invention is made of prism, upper strata metal film, electro-optic polymer film, separator and lower metal film, upper strata metal film, electro-optic polymer film, separator and lower metal film are plated in the lower surface of prism successively, wherein, metal film and electro-optic polymer film constitute double-sided metal coating waveguiding structure up and down, prism, upper strata metal film and electro-optic polymer film have constituted the attenuate total reflection structure, just propagate the electro-optic polymer film from the guided wave that laser beam excited of laser incident.
Prism can adopt high-index materials such as glass, crystalline material to make, its refractive index should be between 1.75-2.00 under operation wavelength, and the laser to this wavelength does not have absorption, the shape of prism can be selected according to actual needs, as other common or special shapes such as equilateral, isosceles, cylinder, spheres.
Upper strata metal film and lower metal film generally can be selected for use operation wavelength is absorbed less metal.Dielectric constant of metal ε=ε
r+ ε
iRelevant with operation wavelength, metal species can be selected the less metal of dielectric constant imaginary part in the optical frequency scope such as silver, gold, its real part of permittivity ε
rWith imaginary part ε
iRatio is | ε
r|/ε
i〉=10.
The thickness of metal film should strict control make the guided wave resonance absorption the strongest, makes its modulation depth bigger.The thickness of upper strata metal film adopts different thickness to different polymer between 20nm～60nm, the thickness of lower metal film is greater than 100nm.The operation wavelength of modulator is selected in visible and near-infrared optical frequency scope.
The organic film that the optional usefulness of electro-optic polymer film has electro optic effect, this organic film must have higher electro-optic coefficient, and the thickness of electro-optic polymer film must can carry a plurality of guided wave resonance modes, usually the electro-optic coefficient γ of electro-optic polymer film
33＞10pm/V, thickness is between 2 μ m～4 μ m.In order to reduce the area of hot spot, improve modulation degree, the refractive index of electro-optic polymer film must be less than the refractive index of prism, and the refractive index of electro-optic polymer is between 1.50～1.70.
Separator can adopt various nonconducting organic materials; thickness is advisable to protect electro-optic polymer under the high electric field action not to be destroyed; refractive index must be less than the refractive index of polar polymer, and the thickness of separator is between 2 μ m～3 μ m usually, and the refractive index of separator is between 1.4～1.5.
On the basis of above-mentioned attenuate total reflection electrooptic modulator, the present invention proposes to utilize different wave length and different guided wave resonance modes to realize the modulator approach of multichannel light simultaneously, at first form prism by high index of refraction, the upper strata metal film, the electro-optic polymer film, the attenuate total reflection electrooptic modulator that separator and lower metal film are formed, adopt semiconductor laser as LASER Light Source, when the laser incidence angle surpasses the angle of total reflection of prism and electro-optic polymer film and reaches a certain special angle (guided wave resonance angle), to in the electro-optic polymer thin layer, excite guided wave, the resonance of formation guided wave, in whole angular range, there are some guided wave resonance angles, all can produce the guided wave resonance absorption, every generation once absorbs, be called a pattern, and the angle corresponding with these patterns is called synchro angle, the change curve of whole angular range internal reflection light intensity is called the ATR spectrum, peak corresponding with the guided wave resonance absorption on the ATR spectrum is called the ATR absworption peak, because the guided mode absworption peak of the ATR of prism-dual-surface metal waveguide spectrum is very responsive for the refractive index of waveguide medium, the curve that utilizes reflective light intensity to change with laser incident angle, seek the pairing different pairing synchro angle of guided wave resonance mode under the various wavelength, make its each LASER Light Source identical with the synchro angle of selected guided wave resonance mode in the incidence angle of prism bottom, adopt the detector with the laser same number to receive beam reflected simultaneously at the opposite side of prism then, just can realize modulation multichannel light.
One of characteristic of ATR spectrum is the refractive index n of the resonance angle position of whole spectral line for the electro-optic polymer film
3Variation very sensitive, work as n
3Change when very little, the variation of whole ATR spectrum shows as along the coordinate X direction one micro-displacement takes place.On the ATR spectrum, the trailing edge of its total reflection absworption peak exists one section linear zone.The linearity in this section zone is better, slope is bigger.If like this working point is chosen in the midpoint of linearity range.And after on electrode, applying an operating voltage, because electro optic effect can cause the minor variations of electrooptical material dielectric coefficient, and then the translation that causes whole ATR spectral line changes, and causes reflective light intensity with the operating voltage linear change, thereby realized the function of a reflective light intensity modulator.
Below the inventive method is further described, concrete steps are as follows:
The first step: select suitable material and parameter to form the attenuate total reflection electrooptic modulator of forming by prism, upper strata metal film, electro-optic polymer film, separator and the lower metal film of high index of refraction;
Adopt lacquering technique that electro-optic polymer is produced on the metal film of upper strata, can control thickness, make waveguide can carry a plurality of resonance modes, can select one of them pattern or a plurality of pattern to modulate simultaneously during modulator work by regulating the photoresist spinner rotating speed.Adopt corona polarizing method, polymeric material is heated near the glass transition temperature of this material, at this moment the polar molecule of polymer inside is in state free to rotate, apply high electric field in direction perpendicular to polymer surfaces, the then polar molecule of polymer inside neat lining up of meeting under electric field action, keep electric field action again, slowly reduce to room temperature, at this moment polar molecule is just freezed firmly, at this moment remove electric field again, polymeric material just externally presents certain optical anisotropy, has promptly had electro-optical characteristic.Adopt lacquering technique that separator is produced on the electro-optic polymer film.Adopt sputtering method below separator, to make lower metal film, as the bottom electrode of modulator.
Second step: select for use semiconductor laser as light source, from laser incident, operation wavelength is selected in can seeing near infrared light frequency scope.Polarizer is transferred to needed operating state: S polarization or P polarization, be placed on the back of laser, make laser beam vertical through polarizer, keep not changing light path.Choose some specific incidence angle (guided wave resonance angle), make the decay of S polarized wave or P polarized wave reach maximum.Simultaneously, the guided wave resonance angle is equaled or near the base angle of high index prism, so that laser beam can insert loss and reduce perpendicular to incident and exit facet.In addition, less angle incident can reduce facula area, thereby reduces electrode area, so that improve modulation bandwidth.Over against the synchro angle of the guided wave resonance mode of prism bottom surface, detector and laser can be radiated on the detector laser light reflected light beam respectively with respect to the prism symmetry to the laser beam that the setting of laser makes its incident respectively.According to the polarization direction that will choose (S polarized wave or P polarized wave), select for use laser inciding on the bottom surface of refractive index prism under the guided wave resonance angle, and excite the guided wave of in the electro-optic polymer film, propagating.Adopt detector to receive outgoing beam.Simultaneously, on the modulator electrode, adding a signal of telecommunication, utilize the operation principle of modulator---the effect electric field makes the variations in refractive index of material and causes that light intensity changes, thereby finishes by the modulation of the signal of telecommunication to light signal, the light signal that can obtain modulating, and simultaneously it is presented on the oscilloscope.
By selecting synchro angle, mode of operation is chosen on the absworption peak of low-order mode, the device working point is chosen in the trailing edge of ATR absworption peak, to reduce driving voltage.
In the present invention, because the trailing edge of ATR guided mode absworption peak is comparatively responsive with the characteristic variations such as refractive index of polymer, and linear characteristics, because causing dielectric coefficient, the field changes the significant change that the ATR spectrum minute movement that causes is converted into reflective light intensity simultaneously, in addition, carry a plurality of patterns because waveguide can be taken advantage of, different wave length has different synchro angles again.Therefore can utilize different guided modes and different wave length to carry out work, thereby realize direct modulation multipath reflection light.
The present invention can modulate dual-surface metal waveguide TE and TM mould simultaneously, can be applicable to that optical communication, optical information processing etc. are various an occasion that needs light modulation.As in wireless optical communications, need signal is transferred to a plurality of different places simultaneously.Also can be used for the situation that other need be controlled simultaneously to multi-path laser or multichannel light beam parameters in addition, as fields such as accurate measurement, range finding, holographic detection, analytical instrument.
The present invention has substantive distinguishing features and marked improvement, and the present invention has realized the electrooptic modulation to multichannel light, possesses following advantage: the preparation of (1) modulator is quite simple, can adopt electro-optic polymer as operation material, and material processed is convenient, with low cost.Simultaneously, electro-optic polymer makes that the preparation of sample is very simple owing to having the preparation technology compatible with semiconductor.For example adopt lacquering technique can control thickness very easily.Technologies such as hot evaporation and polarization are also very ripe.And polymer can obtain to be higher than the electro-optic coefficient of mineral crystals such as LiNbO3 by the method for corona polarizing.(2) it is very low to insert loss, and modulation occurs in outside the angle of total reflection, and projectile energy almost can all be reflected.(3) because two electrodes up and down of modulator constitute pair of parallel plate capacitor, and the electric capacity of capacitor has determined the size of modulation bandwidth, accurately controlling under the launching spot size situation, by calculating, when electrode diameter was 1mm, modulation bandwidth can reach 2.5GHZ.Can improve modulation bandwidth by the method that reduces electrode area.(4) available multiple mode realizes the multi-pass modulation.By selecting different guided wave resonance modes or different wavelength, modulator is worked under different modes: same wavelength, different guided wave resonance mode mode; Different wave length, identical guided wave resonance mode mode; Different wave length, different guided wave resonance mode mode.(5) modulator has only an electrode, applies when the identical signal of telecommunication is realized multichannel light to modulate, thereby does not have electricity to crosstalk.
Description of drawings
Fig. 1 principle of the invention schematic diagram
Embodiment
As shown in Figure 1, modulator of the present invention is made up of prism 1, upper strata metal film 2, electro-optic polymer film 3, separator 4 and lower metal film 5, upper strata metal film 2, electro-optic polymer film 3, separator 4 and lower metal film 5 are plated in the lower surface of prism 1 successively, wherein, metal film 2,5 and electro-optic polymer film 3 constitute double-sided metal coating waveguiding structure up and down, prism 1, upper strata metal film 2 and electro-optic polymer film 3 have constituted the attenuate total reflection structure, just propagate electro-optic polymer film 3 from the two bundle guided waves that laser beam excited of laser 6 and 7 incidents.
Below in conjunction with three embodiment are provided according to the inventive method content, the dielectric constant of given material and refractive index are the situations when wavelength is 832nm among the embodiment.
Embodiment 1
Modulation when utilizing the different guided wave resonance modes (TM1 and TM2) of identical wavelength (832nm) to realize two-way light:
The first step: prism 1 material selection high index of refraction equilateral triangle prism (ZF6, n=1.7355).Upper strata metal film 2 materials employing silver (ε=-30.0+i1.5), utilize sputtering method to be plated on the bottom surface of prism 1, thickness is 45.0nm.The organic material of electro-optic polymer film 3 material selection cross-linking types, its refractive index are 1.680, and thickness is 3.0 μ m.Near the glass transition temperature (160 ℃) of electro-optic polymer 3 materials, on perpendicular to the metal needle point above the polymer surfaces, apply high electric field (3800V) then, make atmospherical discharges.Then the polar molecule of polymer inside can neat lining up under electric field action.Keep electric field action again, slowly reduce to room temperature.At this moment polar molecule is just freezed firmly.At this moment remove electric field again, polymeric material just externally presents certain optical anisotropy, has promptly had electro-optical characteristic.Separator 4 adopts film forming macromolecular material polymethyl methacrylate (PMMA) preferably, and its refractive index is 1.490, with lacquering technique PMMA is produced on the electro-optic polymer film 3, and its thickness is 2 μ m.Lower metal film 5 materials employing gold (ε=-28.0+i2.0), being plated in sputtering method on the bottom surface of PMMA, thickness is 100.0nm.
Second step: the wavelength of choosing laser 6 and laser 7 is 832nm, and output light polarization plate 10,11 directions are the P polarization, and two guided wave resonance modes are respectively TM1 and TM2, and its synchro angle is respectively θ
1, θ
2Make the angle of determining from two bundle laser beams of laser 6 and 7 incidents---incide on the bottom surface of prism 1 under guided wave resonance angle 64.0530 degree and 63.4230 degree, excite the guided wave of in electro-optic polymer film 3, propagating.Accept respectively from the light beam of laser 6 and laser 7 outgoing with detector 8 and detector 9.Simultaneously, add a 40V signal of telecommunication on the upper/lower electrode of modulator, utilize the operation principle of modulator, obtain the different light signal of two-way, its size is respectively 1.7V and 1.6V, and it is simultaneously displayed on the oscilloscope.
Embodiment 2
Modulation when utilizing the identical guided wave resonance mode (TM1) of different wave length (832nm and 980nm) to realize two-way light:
The first step: prism 1 material selection high index of refraction equilateral triangle prism (ZF7, n=1.7837).Upper strata metal film 2 materials employing silver (ε=-30.0+i1.5), utilize sputtering method to be plated on the bottom surface of prism 1, thickness is 55.0nm.The organic material of electro-optic polymer film 3 material selection cross-linking types, its refractive index are 1.680, and thickness is 3.5 μ m.Near the glass transition temperature (160 ℃) of electro-optic polymer 3 materials, on perpendicular to the metal needle point above the polymer surfaces, apply high electric field (4000V) then, make atmospherical discharges.Then the polar molecule of polymer inside can neat lining up under electric field action.Keep electric field action again, slowly reduce to room temperature.At this moment polar molecule is just freezed firmly.At this moment remove electric field again, polymeric material just externally presents certain optical anisotropy, has promptly had electro-optical characteristic.Separator 4 adopts film forming macromolecular material polymethyl methacrylate (PMMA) preferably, and its refractive index is 1.49, with lacquering technique PMMA is produced on the electro-optic polymer film 3, and its thickness is 2.5 μ m.Lower metal film 5 materials employing gold (ε=-28.0+i2.0), being plated in sputtering method on the bottom surface of PMMA, thickness is 150.0nm.
Second step: the wavelength of choosing laser 6 and laser 7 is respectively 832nm and 980nm, and output light polarization plate 10,11 directions are the P polarization, and two guided wave resonance modes are TM1, and its synchro angle is respectively θ
1, θ
2Make the angle of determining from two bundle laser beams of laser 6 and 7 incidents---incide on the bottom surface of prism 1 under guided wave resonance angle 63.6134 degree and 62.1707 degree, excite the guided wave of in electro-optic polymer film 3, propagating.Accept respectively from the light beam of laser 6 and laser 7 outgoing with detector 8 and detector 9.Simultaneously, add a 40V signal of telecommunication on the upper/lower electrode of modulator, utilize the operation principle of modulator, obtain the different light signal of two-way, its size is respectively 1.7V and 1.4V, and it is simultaneously displayed on the oscilloscope.
Embodiment 3
Utilize the different guided wave resonance modes of different wave length--the modulation when TM1 of 832nm and the TE2 of 980nm realize two-way light:
The first step: prism 1 material selection high index of refraction equilateral triangle prism (n=1.900).Upper strata metal film 2 materials employing silver (ε=-30.0+i1.5), utilize sputtering method to be plated on the bottom surface of prism 1, thickness is 60.0nm.The organic material of electro-optic polymer film 3 material selection cross-linking types, its refractive index are 1.680, and thickness is 4.0 μ m.Near the glass transition temperature (160 ℃) of electro-optic polymer 3 materials, on perpendicular to the metal needle point above the polymer surfaces, apply high electric field (4300V) then, make atmospherical discharges.Then the polar molecule of polymer inside can neat lining up under electric field action.Keep electric field action again, slowly reduce to room temperature.At this moment polar molecule is just freezed firmly.At this moment remove electric field again, polymeric material just externally presents certain optical anisotropy, has promptly had electro-optical characteristic.Separator 4 adopts film forming macromolecular material polymethyl methacrylate (PMMA) preferably, and its refractive index is 1.490, with lacquering technique PMMA is produced on the electro-optic polymer film 3, and its thickness is 3 μ m.Lower metal film 5 materials employing gold (ε=-28.0+i2.0), being plated in sputtering method on the bottom surface of PMMA, thickness is 200.0nm.
Second step: the wavelength of choosing laser 6 and laser 7 is respectively 832nm and 980nm, and output light polarization plate 10,11 directions are respectively P polarization and S polarization, and two guided wave resonance modes are respectively TM1 and TE2, and corresponding synchro angle is respectively θ
1, θ
2Make the angle of determining from two bundle laser beams of laser 6 and 7 incidents---incide on the bottom surface of prism 1 under guided wave resonance angle 62.3347 degree and 60.6719 degree, excite the guided wave of in electro-optic polymer film 3, propagating.Accept respectively from the light beam of laser 6 and laser 7 outgoing with detector 8 and detector 9.Simultaneously, add a 40V signal of telecommunication on the upper/lower electrode of modulator, utilize the operation principle of modulator, obtain the different light signal of two-way, its size is respectively 1.8V and 1.0V, and it is simultaneously displayed on the oscilloscope.
Above-mentioned three given examples are the modulation to two-way light entirely.Modulation for multichannel light, only need find the synchro angle of pairing each different guided wave resonance modes under the different wave length, adopt a plurality of lasers that LASER Light Source is provided then, utilize identical principle, make its each light source identical with the synchro angle of selected resonance mode in the incidence angle of prism bottom, adopt the detector with the laser same number to receive beam reflected simultaneously at the opposite side of prism then, just can realize modulation multichannel light.
Claims (10)
1, a kind of modulator that utilizes the guided wave resonance mode to modulate multichannel light simultaneously, comprise: prism (1), separator (4), it is characterized in that also comprising: upper strata metal film (2), electro-optic polymer film (3) and lower metal film (5), upper strata metal film (2), electro-optic polymer film (3), separator (4) and lower metal film (5) are plated in the lower surface of prism (1) successively, wherein, metal film (2) up and down, (5) and electro-optic polymer film (3) constitute double-sided metal and coat waveguiding structure, prism (1), upper strata metal film (2) and electro-optic polymer film (3) have constituted the attenuate total reflection structure, just propagate electro-optic polymer film (3) from the two bundle guided waves that laser beam excited of laser (6) and (7) incident.
2, the modulator that utilizes the guided wave resonance mode to modulate multichannel light simultaneously according to claim 1 is characterized in that, prism (1) adopts high-index material to make, its refractive index under operation wavelength between 1.75-2.00.
3, the modulator that utilizes the guided wave resonance mode to modulate multichannel light simultaneously according to claim 1, it is characterized in that, upper strata metal film (2) and lower metal film (5) are selected for use operation wavelength are absorbed less metal, metal species is chosen in the less metal of dielectric constant imaginary part in the optical frequency scope, as: silver-colored, golden, its real part of permittivity ε
rWith imaginary part ε
iRatio is | ε
r|/ε
i〉=10.
4, according to claim 1 or the 3 described modulators that utilize the guided wave resonance mode to modulate multichannel light simultaneously, it is characterized in that, the thickness of upper/lower layer metallic film makes the guided wave resonance absorption the strongest, the thickness of upper strata metal film (2) is between 20nm～60nm, and the thickness of lower metal film (5) is greater than 100nm.
5, the modulator that utilizes the guided wave resonance mode to modulate multichannel light simultaneously according to claim 1, it is characterized in that, electro-optic polymer film (3) is selected the organic film with electro optic effect for use, this organic film must have higher electro-optic coefficient, the thickness of electro-optic polymer film (3) must can carry a plurality of guided wave resonance modes, the electro-optic coefficient γ of electro-optic polymer film (3)
33＞10pm/V, thickness are between 2 μ m～4 μ m, and the refractive index of electro-optic polymer film (3) is less than the refractive index of prism (1), and the refractive index of electro-optic polymer film (3) is between 1.50～1.70.
6, the modulator that utilizes the guided wave resonance mode to modulate multichannel light simultaneously according to claim 1, it is characterized in that, separator (4) adopts nonconducting organic material, and separator (4) thickness is between 2 μ m～3 μ m, and the refractive index of separator (4) is between 1.4～1.5.
7, the modulator that utilizes the guided wave resonance mode to modulate multichannel light simultaneously according to claim 1 is characterized in that, the operation wavelength of modulator is selected in visible and near-infrared optical frequency scope.
8, a kind of method of utilizing the guided wave resonance mode to modulate multichannel light simultaneously, it is characterized in that, at first form by prism (1), upper strata metal film (2), electro-optic polymer film (3), the attenuate total reflection electrooptic modulator that separator (4) and lower metal film (5) are formed, adopt semiconductor laser as LASER Light Source, when the laser incidence angle surpasses the angle of total reflection of prism (1) and electro-optic polymer film (3) and reaches the guided wave resonance angle, to in electro-optic polymer film (3) layer, excite guided wave, the resonance of formation guided wave, produce the guided wave resonance mode, the angle of pattern correspondence is a synchro angle, by the curve of reflective light intensity with the laser incident angle variation, seek the pairing synchro angle of pairing guided wave resonance mode under the various wavelength, make its each LASER Light Source identical with the synchro angle of selected guided wave resonance mode in the incidence angle of prism (1) bottom, adopt the detector with the laser same number to receive beam reflected simultaneously at the opposite side of prism (1) then, realize modulation multichannel light.
9, the method for utilizing the guided wave resonance mode to modulate multichannel light simultaneously according to claim 8 is characterized in that concrete steps are as follows:
The first step: select material and parameter to form the attenuate total reflection electrooptic modulator of forming by (1), upper strata metal film (2), electro-optic polymer film (3), separator (4) and the lower metal film (5) of high index of refraction, adopt lacquering technique that electro-optic polymer is produced on the upper strata metal film (2), control thickness by regulating the photoresist spinner rotating speed, make waveguide can carry a plurality of resonance modes, select one of them pattern or a plurality of pattern to modulate simultaneously during modulator work; Adopt corona polarizing method, polymeric material is heated near the glass transition temperature of this material, apply high electric field in direction perpendicular to polymer surfaces, keep electric field action again, slowly reduce to room temperature, at this moment polar molecule is freezed firmly, removes electric field again, and polymeric material has just had electro-optical characteristic; Adopt lacquering technique that separator is produced on the electro-optic polymer film (3); Adopt sputtering method to make lower metal film (5), as the bottom electrode of modulator in separator (4) below.
Second step: select for use semiconductor laser as light source, from laser incident, operation wavelength is selected in can seeing near infrared light frequency scope, polarizer is transferred to S polarization or P polarization, be arranged on the back of laser, make the vertical process polarizer of laser beam, and avoid light path to change, choose the guided wave resonance angle, make the decay of S polarized wave or P polarized wave reach maximum; Simultaneously, select to equal or, make laser beam perpendicular to incident and exit facet near the guided wave resonance angle at prism (1) base angle; The laser beam that being provided with of laser satisfied incident is over against the synchro angle of the guided wave resonance mode of prism (1) bottom surface, and detector and laser are with respect to prism (1) symmetry, and the laser light reflected light beam is radiated on the detector respectively; According to S polarized wave of choosing or P polarized wave, select for use laser inciding on the bottom surface of refractive index prism (1) under the guided wave resonance angle, and excite the guided wave of in electro-optic polymer film (3), propagating, adopt detector to receive outgoing beam; On the modulator electrode, add a signal of telecommunication, finish by the modulation of the signal of telecommunication to light signal by modulator, the light signal that obtains modulating, and simultaneously it is presented on the oscilloscope.
10, according to Claim 8 or the 9 described methods of utilizing the guided wave resonance mode to modulate multichannel light simultaneously, it is characterized in that, reduce driving voltage by the following method: select synchro angle, mode of operation is chosen on the absworption peak of low-order mode, the device working point is chosen in the trailing edge of ATR absworption peak.
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| CN105466888B (en) * | 2015-12-31 | 2018-05-18 | 哈尔滨工业大学 | The device of liquid refractivity is measured under the conditions of a kind of extra electric field |
| CN107942539A (en) * | 2017-11-17 | 2018-04-20 | 厦门大学 | A kind of reflective spatial electrooptic modulator based on graphene |
| CN109037443A (en) * | 2018-08-07 | 2018-12-18 | 电子科技大学 | Based on a-SiNxSPR nerve synapse device of memristor effect and preparation method thereof |
| CN109037443B (en) * | 2018-08-07 | 2020-07-31 | 电子科技大学 | Based on a-SiNxSPR (surface plasmon resonance) nerve synapse device with memristive effect and preparation method thereof |
| CN110174782A (en) * | 2019-05-30 | 2019-08-27 | 电子科技大学 | Electro-optic polymer waveguide mode change-over switch for mode division multiplexing technology |
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