CN1449128A - Method for modulating multipath light simultaneously using waveguide resonance mode and modulator - Google Patents

Abstract

A method for simultaneously modulating multiple paths of light by using a guided wave resonance mode and a modulator belong to the fields of optoelectronic communication and optical information processing. The upper metal film, electro-optic polymer film, isolation layer and lower metal film of the modulator are sequentially plated on the lower surface of the prism. The upper and lower metal films and the electro-optic polymer film form a double-sided metal-clad waveguide structure. The polymer film constitutes an attenuated total reflection structure, and the excited guided wave propagates in the electro-optic polymer film. The method is as follows: first form the above-mentioned modulator, use a semiconductor laser as the laser light source, when the laser incident angle reaches the guided wave resonance angle, a guided wave resonance mode is generated, and find the corresponding synchronization angle through the curve of the reflected light intensity changing with the laser incident angle , so that the incident angle of the laser light source at the bottom of the prism is the same as the synchronization angle of the selected guided wave resonance mode, and the detector is used to receive the reflected beam to realize the modulation of the multi-channel light.

Description

Method and Modulator for Simultaneous Modulation of Multiple Lights Using Guided Wave Resonance Mode

technical field

The invention relates to a method and device for simultaneously modulating multi-path light, in particular to a method and a modulator for simultaneously modulating multi-path light by using a guided wave resonance mode, belonging to the field of optoelectronic communication and optical information processing.

Background technique

In the past two decades, with the rapid development of organic electro-optic materials, the development of organic electro-optic modulators has made great progress. Moreover, multi-channel polymer electro-optic modulators have also been reported. At present, there are two forms that can realize multi-channel polymer electro-optic modulation: waveguide transmission type Mach-Zender (M-Z) structure and attenuated total reflection device structure. The electro-optic modulator of Mach-Zehnder interference type or its improved structure is the mainstream of optical modulators in the world today. Its advantage is that the modulation bandwidth is relatively high. For example, the Lawrence Livermore National Laboratory of the United States has produced niobic acid with a modulation bandwidth of 40 GHz. Lithium modulators have not been put into practical use. However, modulators with this type of waveguide structure generally have the disadvantages of large insertion loss and complicated manufacturing process. Its insertion loss is generally around 2 dB, which means that nearly 40% of the input energy is lost during modulation. At the same time, the widely used micro-processing technology in the production process increases the difficulty of production. For example, the preparation process of the Mach-Zehnder interferometric modulator includes a series of complex and fine micro-processing processes such as electrode design, plate making, masking, photolithography, etching, and stripping, and the entire process must be carried out in a clean room with ultra-clean dust removal. . This determines the expensive characteristics of the electro-optic modulator made by this method. Found through literature search, Appl.Phys.Lett.62 (24), 14, June, 1993, Multilevel registered polymeric intensity modulator array (Applied Physics Letters. 62 (24), 14, June, 1993, multilevel integrated Mach- Zehnder intensity modulator), this paper is the first to propose an integrated two-layer waveguide polymer electro-optic Mach-Zehnder intensity modulator, which is a structure of vertically integrating two completely independent Mach-Zehnder modulators on the same chip, the two Mach-Zehnder modulators can be polarized and operated independently. Although this dual-channel Mach-Zehnder modulator can be used, its integration presents significant difficulties. In particular, it is even more difficult to integrate multiple M-Z modulators on the same chip. Each M-Z structure requires 4-5 layers of combination, and vertical integration of two M-Z structures requires 8-10 layers. Therefore, integrating multiple M-Zs on the same chip is practical. is very difficult.

Contents of the invention

The purpose of the present invention is to overcome the deficiencies in the prior art, to provide a method and a modulator for simultaneously modulating multiple paths of light by using a guided wave resonance mode, so that the guided wave resonance mode of the modulator with an attenuated total reflection structure can be used to realize multiple paths. Simultaneous modulation of light, while the modulator has the characteristics of simple process, low price, and miniaturization.

The present invention is achieved through the following technical solutions. The modulator of the present invention is composed of a prism, an upper metal film, an electro-optic polymer film, an isolation layer and a lower metal film, and the upper metal film, the electro-optic polymer film, the isolation layer and the lower metal film are sequentially Coated on the lower surface of the prism, in which the upper and lower metal films and the electro-optic polymer film constitute a double-sided metal-clad waveguide structure, and the prism, the upper metal film and the electro-optic polymer film constitute an attenuated total reflection structure. The excited guided wave propagates in the electro-optic polymer film.

The prism can be made of high refractive index materials such as glass and crystal materials. Its refractive index should be between 1.75-2.00 at the working wavelength, and there is no absorption of laser light at this wavelength. The shape of the prism can be selected according to actual needs, such as equilateral , isosceles, cylinder, sphere and other common or special shapes.

Generally, the upper metal film and the lower metal film can be selected from metals that absorb less at the working wavelength. The metal dielectric constant ε=ε _r +ε _i is related to the working wavelength. The metal type can be silver, gold and other metals with a small dielectric constant imaginary part in the optical frequency range. The real part of the dielectric constant ε _r and the imaginary part The ε _i ratio is |ε _r |/ε _i ≥10.

The thickness of the metal film should be strictly controlled so that the guided wave resonance absorption is the strongest and the modulation depth is greater. The thickness of the upper metal film is between 20nm and 60nm, different thicknesses are used for different polymers, and the thickness of the lower metal film is greater than 100nm. The operating wavelength of the modulator is selected in the visible and near-infrared optical frequency range.

The electro-optic polymer film can be an organic film with electro-optic effect. The organic film must have a high electro-optic coefficient, and the thickness of the electro-optic polymer film must be able to carry multiple guided wave resonance modes. Usually, the electro-optic coefficient of the electro-optic polymer film is γ ₃₃ >10pm/V, the thickness is between 2μm and 4μm. In order to reduce the area of the light spot and increase the degree of modulation, the refractive index of the electro-optic polymer film must be smaller than that of the prism, and the refractive index of the electro-optic polymer is between 1.50 and 1.70.

Various non-conductive organic materials can be used for the isolation layer, and the thickness is suitable to protect the electro-optic polymer from being damaged under the action of high electric field. Between, the refractive index of the isolation layer is between 1.4 and 1.5.

On the basis of the attenuated total reflection electro-optic modulator described above, the present invention proposes a modulation method that utilizes different wavelengths and different guided wave resonance modes to simultaneously realize multi-path light. , an attenuated total reflection electro-optic modulator composed of an isolation layer and a lower metal film, using a semiconductor laser as a laser light source, when the incident angle of the laser exceeds the total reflection angle between the prism and the electro-optic polymer film and reaches a certain angle (guided wave resonance angle) When , the guided wave will be excited in the electro-optic polymer film layer to form a guided wave resonance. In the entire angle range, there are several guided wave resonance angles, which can all produce guided wave resonance absorption. Each absorption is called a mode. The angle corresponding to these modes is called the synchronous angle, and the change curve of the reflected light intensity in the entire angle range is called the ATR spectrum, and the peak corresponding to the guided wave resonance absorption on the ATR spectrum is called the ATR absorption peak. The guided mode absorption peak of the ATR spectrum of the waveguide is extremely sensitive to the refractive index of the waveguide medium. Using the curve of the reflected light intensity changing with the incident angle of the laser, the synchronization angle corresponding to the different guided wave resonance modes corresponding to various wavelengths is found. Make the incident angle of each laser light source at the bottom of the prism the same as the synchronization angle of the selected guided wave resonance mode, and then use the same number of detectors as the laser on the other side of the prism to receive the reflected beams at the same time. Modulation of multiplexed light.

One of the characteristics of the ATR spectrum is that the resonance angle position of the entire spectral line is very sensitive to the change of the refractive index _{n 3 of} the electro-optic polymer film. Minor displacement. On the ATR spectrum, there is a linear region on the falling edge of the total reflection absorption peak. The linearity of this region is better and the slope is larger. In this way, if the working point is selected at the midpoint of the linear segment. When an operating voltage is applied to the electrode, the electro-optic effect will cause a small change in the dielectric coefficient of the electro-optic material, which in turn will cause a translational change of the entire ATR spectral line, causing the reflected light intensity to change linearly with the operating voltage, thereby realizing a reflection Function of the light intensity modulator.

The inventive method is described further below, and concrete steps are as follows:

The first step: select appropriate materials and parameters to form an attenuated total reflection electro-optic modulator composed of a high refractive index prism, an upper metal film, an electro-optic polymer film, an isolation layer and a lower metal film;

The electro-optic polymer is made on the upper metal film by the glue-spinning method, and the film thickness can be controlled by adjusting the speed of the glue-spinning machine, so that the waveguide can carry multiple resonance modes, and one or more modes can be selected when the modulator is working. Simultaneous modulation. Using the corona polarization method, the polymer material is heated to near the glass transition temperature of the material. At this time, the polar molecules inside the polymer are in a state of free rotation, and a very high electric current is applied in the direction perpendicular to the polymer surface. Electric field, the polar molecules inside the polymer will be neatly arranged under the action of the electric field, and then keep the electric field, and slowly drop to room temperature, then the polar molecules will be firmly frozen, then remove the electric field, The polymer material presents a certain optical anisotropy to the outside, that is, it has electro-optical properties. The isolation layer is fabricated on the electro-optic polymer film by the glue-spinning method. The lower metal film is fabricated under the isolation layer by sputtering method, which is used as the lower electrode of the modulator.

Step 2: Select a semiconductor laser as the light source, incident from the laser, and select the working wavelength within the visible to near-infrared optical frequency range. Adjust the polarizer to the required working state: S polarization or P polarization, put it behind the laser, make the laser beam pass through the polarizer vertically, and keep the optical path unchanged. Select some specific incident angles (guided wave resonance angles) to maximize the attenuation of S-polarized or P-polarized waves. At the same time, the waveguide resonance angle is equal to or close to the bottom angle of the high-refractive-index prism, so that the laser beam can be perpendicular to the incident and outgoing surfaces, thereby reducing the insertion loss. In addition, a smaller angle of incidence reduces the spot area, thereby reducing the electrode area for increased modulation bandwidth. The laser is set so that the incident laser beams are respectively facing the synchronization angle of the guided wave resonance mode on the bottom surface of the prism, and the detector and the laser are symmetrical with respect to the prism, so that the reflected laser beams can be respectively irradiated on the detector. According to the polarization direction to be selected (S polarized wave or P polarized wave), the laser is selected to be incident on the bottom surface of the refractive index prism under the guided wave resonance angle, and to excite the guided wave propagating in the electro-optic polymer film. A detector is used to receive the outgoing beam. At the same time, add an electrical signal to the electrode of the modulator, and use the working principle of the modulator—the applied electric field changes the refractive index of the material to cause a change in light intensity, thereby completing the modulation from the electrical signal to the optical signal, and the modulated light can be obtained signal and simultaneously display it on the oscilloscope.

By selecting the synchronization angle, the operating mode is selected on the absorption peak of the low-order mode, and the device operating point is selected on the falling edge of the ATR absorption peak to reduce the driving voltage.

In the present invention, since the falling edge of the ATR guided mode absorption peak is more sensitive to changes in the characteristics of the polymer such as the refractive index, and has a linear relationship, at the same time, the slight movement of the ATR spectrum caused by the field-induced dielectric coefficient change is converted into reflection In addition, since the waveguide can carry multiple modes, different wavelengths have different synchronization angles. Therefore, different guided modes and different wavelengths can be used to work, thereby realizing direct modulation of multiple reflected light.

The invention can simultaneously modulate the TE and TM modes of the double-sided metal waveguide, and can be applied to various occasions requiring optical modulation such as optical communication and optical information processing. For example, in wireless optical communication, signals need to be transmitted to multiple different locations at the same time. In addition, it can also be used in other situations that need to control the parameters of multiple lasers or multiple beams at the same time, such as precision measurement, distance measurement, holographic detection, analytical instruments and other fields.

The present invention has substantive features and significant progress. The present invention realizes the electro-optic modulation of multi-channel light, and has the following advantages: (1) The preparation of the modulator is quite simple, and electro-optic polymers can be used as the working material, which is convenient for material processing and low in cost . At the same time, because the electro-optic polymer has a preparation process compatible with semiconductors, the preparation of samples is very simple. For example, the thickness of the film can be easily controlled by the glue-spinning method. Processes such as thermal evaporation and polarization are also very mature. Moreover, the electro-optic coefficient of the polymer can be higher than that of inorganic crystals such as LiNbO3 through the method of corona polarization. (2) The insertion loss is very low, and the modulation occurs outside the total reflection angle, and the incident energy can be reflected almost completely. (3) Since the upper and lower electrodes of the modulator form a pair of parallel plate capacitors, the capacitance of the capacitor determines the modulation bandwidth. Under the condition of accurately controlling the size of the incident spot, by calculation, when the electrode diameter is 1mm, the modulation bandwidth can reach 2.5GHZ. The modulation bandwidth can be increased by reducing the electrode area. (4) Multi-optical path modulation can be realized in various ways. By selecting different guided wave resonance modes or different wavelengths, the modulator can work in different ways: the same wavelength, different guided wave resonance modes; different wavelengths, the same guided wave resonance mode; different wavelengths, different guided waves mode of resonance. (5) The modulator has only one electrode, and the same electrical signal is applied to realize simultaneous modulation of multiple channels of light, so there is no electrical crosstalk.

Description of drawings

Fig. 1 schematic diagram of principle of the present invention

Detailed ways

As shown in Figure 1, the modulator of the present invention is made up of prism 1, upper layer metal film 2, electro-optic polymer film 3, isolation layer 4 and lower layer metal film 5, upper layer metal film 2, electro-optic polymer film 3, isolation layer 4 and The lower metal film 5 is sequentially plated on the lower surface of the prism 1, wherein the upper and lower metal films 2, 5 and the electro-optic polymer film 3 constitute a double-sided metal-clad waveguide structure, and the prism 1, the upper metal film 2 and the electro-optic polymer film 3 constitute According to the attenuated total reflection structure, the guided waves excited by the two incident laser beams from the lasers 6 and 7 propagate in the electro-optic polymer film 3 .

Three examples are provided below in combination with the content of the method according to the present invention, and the dielectric constant and refractive index of the materials given in the examples are the conditions when the wavelength is 832nm.

Example 1

Simultaneous modulation of two channels of light is achieved using different guided wave resonance modes (TM1 and TM2) of the same wavelength (832nm):

Step 1: The material of the prism 1 is an equilateral triangular prism with high refractive index (ZF6, n=1.7355). The material of the upper metal film 2 is silver (ε=-30.0+i1.5), which is plated on the bottom surface of the prism 1 by sputtering method, with a thickness of 45.0 nm. The electro-optic polymer film 3 is made of cross-linked organic material with a refractive index of 1.680 and a thickness of 3.0 μm. Then, near the glass transition temperature (160°C) of the electro-optic polymer 3 material, a very high electric field (3800V) is applied on the metal needle tip vertically above the polymer surface to discharge the air. Then the polar molecules inside the polymer will be neatly arranged under the action of the electric field. Then keep the electric field, and slowly lower to room temperature. At this time, the polar molecules are firmly frozen. At this time, the electric field is removed again, and the polymer material presents a certain optical anisotropy to the outside, that is, it has electro-optic characteristics. The isolation layer 4 is made of polymethyl methacrylate (PMMA), a polymer material with good film-forming properties, and its refractive index is 1.490. The PMMA is made on the electro-optic polymer film 3 by the glue-spinning method, and its thickness is 2 μm. The lower metal film 5 is made of gold (ε=-28.0+i2.0), which is plated on the lower bottom surface of PMMA by sputtering, with a thickness of 100.0 nm.

Step 2: Select the wavelengths of laser 6 and laser 7 as 832nm, the directions of the output light polarizers 10 and 11 are both P-polarized, the two guided wave resonance modes are TM1 and TM2 respectively, and their synchronization angles are θ ₁ and θ respectively ₂ . Two laser beams incident from lasers 6 and 7 are incident on the bottom surface of prism 1 at certain angles—guided wave resonance angles 64.0530° and 63.4230°, to excite guided waves propagating in electro-optic polymer film 3 . The beams emitted from the laser 6 and the laser 7 are respectively received by the detector 8 and the detector 9 . At the same time, add a 40V electrical signal to the upper and lower electrodes of the modulator, and use the working principle of the modulator to obtain two different optical signals, the magnitudes of which are 1.7V and 1.6V respectively, and display them on the oscilloscope at the same time.

Example 2

Simultaneous modulation of two channels of light using the same guided wave resonance mode (TM1) at different wavelengths (832nm and 980nm):

Step 1: The material of the prism 1 is an equilateral triangular prism with high refractive index (ZF7, n=1.7837). The material of the upper metal film 2 is silver (ε=-30.0+i1.5), which is plated on the bottom surface of the prism 1 by sputtering method, with a thickness of 55.0 nm. The electro-optic polymer film 3 is made of cross-linked organic material with a refractive index of 1.680 and a thickness of 3.5 μm. Then, near the glass transition temperature (160°C) of the electro-optic polymer 3 material, a very high electric field (4000V) is applied on the metal needle tip vertically above the polymer surface to discharge the air. Then the polar molecules inside the polymer will be neatly arranged under the action of the electric field. Then keep the electric field, and slowly lower to room temperature. At this time, the polar molecules are firmly frozen. At this time, the electric field is removed again, and the polymer material presents a certain optical anisotropy to the outside, that is, it has electro-optic characteristics. Isolation layer 4 adopts polymethyl methacrylate (PMMA), a polymer material with good film-forming property, and its refractive index is 1.49. PMMA is made on the electro-optical polymer film 3 by the glue-spinning method, and its thickness is 2.5. μm. The lower metal film 5 is made of gold (ε=-28.0+i2.0), which is plated on the lower bottom surface of PMMA by sputtering, with a thickness of 150.0 nm.

Step 2: Select the wavelengths of laser 6 and laser 7 as 832nm and 980nm respectively, the directions of the output light polarizers 10 and 11 are both P-polarized, the two guided wave resonance modes are both TM1, and their synchronization angles are θ ₁ , θ ₂ . Two laser beams incident from lasers 6 and 7 are incident on the bottom surface of prism 1 at certain angles—guided wave resonance angles 63.6134° and 62.1707°, to excite guided waves propagating in electro-optic polymer film 3 . The beams emitted from the laser 6 and the laser 7 are respectively received by the detector 8 and the detector 9 . At the same time, add a 40V electrical signal to the upper and lower electrodes of the modulator, and use the working principle of the modulator to obtain two different optical signals, the magnitudes of which are 1.7V and 1.4V respectively, and display them on the oscilloscope at the same time.

Example 3

Using different guided wave resonance modes of different wavelengths - TM1 at 832nm and TE2 at 980nm to achieve simultaneous modulation of two channels of light:

Step 1: The material of the prism 1 is an equilateral triangular prism with high refractive index (n=1.900). The material of the upper metal film 2 is silver (ε=-30.0+i1.5), which is plated on the bottom surface of the prism 1 by sputtering method, with a thickness of 60.0 nm. The electro-optic polymer film 3 is made of cross-linked organic material with a refractive index of 1.680 and a thickness of 4.0 μm. Then, near the glass transition temperature (160°C) of the electro-optic polymer 3 material, a very high electric field (4300V) is applied on the metal needle tip vertically above the polymer surface to discharge the air. Then the polar molecules inside the polymer will be neatly arranged under the action of the electric field. Then keep the electric field, and slowly lower to room temperature. At this time, the polar molecules are firmly frozen. At this time, the electric field is removed again, and the polymer material presents a certain optical anisotropy to the outside, that is, it has electro-optic characteristics. The isolation layer 4 is made of polymer material polymethyl methacrylate (PMMA) with good film-forming properties, and its refractive index is 1.490. PMMA is made on the electro-optical polymer film 3 by the glue-spinning method, and its thickness is 3 μm . The lower metal film 5 is made of gold (ε=-28.0+i2.0), which is plated on the lower bottom surface of PMMA by sputtering, with a thickness of 200.0 nm.

Step 2: Select the wavelengths of laser 6 and laser 7 as 832nm and 980nm respectively, the directions of output light polarizers 10 and 11 are P polarization and S polarization respectively, the two guided wave resonance modes are TM1 and TE2 respectively, and the corresponding synchronization angles are respectively are θ ₁ and θ ₂ . Two laser beams incident from lasers 6 and 7 are incident on the bottom surface of prism 1 at certain angles—guided wave resonance angles of 62.3347° and 60.6719°, to excite guided waves propagating in electro-optic polymer film 3 . The beams emitted from the laser 6 and the laser 7 are respectively received by the detector 8 and the detector 9 . At the same time, add a 40V electrical signal to the upper and lower electrodes of the modulator, and use the working principle of the modulator to obtain two different optical signals, the magnitudes of which are 1.8V and 1.0V respectively, and display them on the oscilloscope at the same time.

The three examples given above are all modulations of two paths of light. For the modulation of multi-channel light, it is only necessary to find the synchronization angles of different guided wave resonance modes corresponding to different wavelengths, and then use multiple lasers to provide laser light sources, and use the same principle to make each light source incident on the bottom of the prism The angle is the same as the synchronization angle of the selected resonant mode, and then the same number of detectors as the laser are used on the other side of the prism to receive the reflected light beams, so that the modulation of multi-channel light can be realized.

Claims (10)

1, a kind of modulator that utilizes the guided wave resonance mode to modulate multichannel light simultaneously, comprise: prism (1), separator (4), it is characterized in that also comprising: upper strata metal film (2), electro-optic polymer film (3) and lower metal film (5), upper strata metal film (2), electro-optic polymer film (3), separator (4) and lower metal film (5) are plated in the lower surface of prism (1) successively, wherein, metal film (2) up and down, (5) and electro-optic polymer film (3) constitute double-sided metal and coat waveguiding structure, prism (1), upper strata metal film (2) and electro-optic polymer film (3) have constituted the attenuate total reflection structure, just propagate electro-optic polymer film (3) from the two bundle guided waves that laser beam excited of laser (6) and (7) incident.

2, the modulator that utilizes the guided wave resonance mode to modulate multichannel light simultaneously according to claim 1 is characterized in that, prism (1) adopts high-index material to make, its refractive index under operation wavelength between 1.75-2.00.

3, the modulator that utilizes the guided wave resonance mode to modulate multichannel light simultaneously according to claim 1, it is characterized in that, upper strata metal film (2) and lower metal film (5) are selected for use operation wavelength are absorbed less metal, metal species is chosen in the less metal of dielectric constant imaginary part in the optical frequency scope, as: silver-colored, golden, its real part of permittivity ε _rWith imaginary part ε _iRatio is | ε _r|/ε _i〉=10.

4, according to claim 1 or the 3 described modulators that utilize the guided wave resonance mode to modulate multichannel light simultaneously, it is characterized in that, the thickness of upper/lower layer metallic film makes the guided wave resonance absorption the strongest, the thickness of upper strata metal film (2) is between 20nm～60nm, and the thickness of lower metal film (5) is greater than 100nm.

5, the modulator that utilizes the guided wave resonance mode to modulate multichannel light simultaneously according to claim 1, it is characterized in that, electro-optic polymer film (3) is selected the organic film with electro optic effect for use, this organic film must have higher electro-optic coefficient, the thickness of electro-optic polymer film (3) must can carry a plurality of guided wave resonance modes, the electro-optic coefficient γ of electro-optic polymer film (3) ₃₃＞10pm/V, thickness are between 2 μ m～4 μ m, and the refractive index of electro-optic polymer film (3) is less than the refractive index of prism (1), and the refractive index of electro-optic polymer film (3) is between 1.50～1.70.

6, the modulator that utilizes the guided wave resonance mode to modulate multichannel light simultaneously according to claim 1, it is characterized in that, separator (4) adopts nonconducting organic material, and separator (4) thickness is between 2 μ m～3 μ m, and the refractive index of separator (4) is between 1.4～1.5.

7, the modulator that utilizes the guided wave resonance mode to modulate multichannel light simultaneously according to claim 1 is characterized in that, the operation wavelength of modulator is selected in visible and near-infrared optical frequency scope.

8, a kind of method of utilizing the guided wave resonance mode to modulate multichannel light simultaneously, it is characterized in that, at first form by prism (1), upper strata metal film (2), electro-optic polymer film (3), the attenuate total reflection electrooptic modulator that separator (4) and lower metal film (5) are formed, adopt semiconductor laser as LASER Light Source, when the laser incidence angle surpasses the angle of total reflection of prism (1) and electro-optic polymer film (3) and reaches the guided wave resonance angle, to in electro-optic polymer film (3) layer, excite guided wave, the resonance of formation guided wave, produce the guided wave resonance mode, the angle of pattern correspondence is a synchro angle, by the curve of reflective light intensity with the laser incident angle variation, seek the pairing synchro angle of pairing guided wave resonance mode under the various wavelength, make its each LASER Light Source identical with the synchro angle of selected guided wave resonance mode in the incidence angle of prism (1) bottom, adopt the detector with the laser same number to receive beam reflected simultaneously at the opposite side of prism (1) then, realize modulation multichannel light.

9, the method for utilizing the guided wave resonance mode to modulate multichannel light simultaneously according to claim 8 is characterized in that concrete steps are as follows:

The first step: select material and parameter to form the attenuate total reflection electrooptic modulator of forming by (1), upper strata metal film (2), electro-optic polymer film (3), separator (4) and the lower metal film (5) of high index of refraction, adopt lacquering technique that electro-optic polymer is produced on the upper strata metal film (2), control thickness by regulating the photoresist spinner rotating speed, make waveguide can carry a plurality of resonance modes, select one of them pattern or a plurality of pattern to modulate simultaneously during modulator work; Adopt corona polarizing method, polymeric material is heated near the glass transition temperature of this material, apply high electric field in direction perpendicular to polymer surfaces, keep electric field action again, slowly reduce to room temperature, at this moment polar molecule is freezed firmly, removes electric field again, and polymeric material has just had electro-optical characteristic; Adopt lacquering technique that separator is produced on the electro-optic polymer film (3); Adopt sputtering method to make lower metal film (5), as the bottom electrode of modulator in separator (4) below.

Second step: select for use semiconductor laser as light source, from laser incident, operation wavelength is selected in can seeing near infrared light frequency scope, polarizer is transferred to S polarization or P polarization, be arranged on the back of laser, make the vertical process polarizer of laser beam, and avoid light path to change, choose the guided wave resonance angle, make the decay of S polarized wave or P polarized wave reach maximum; Simultaneously, select to equal or, make laser beam perpendicular to incident and exit facet near the guided wave resonance angle at prism (1) base angle; The laser beam that being provided with of laser satisfied incident is over against the synchro angle of the guided wave resonance mode of prism (1) bottom surface, and detector and laser are with respect to prism (1) symmetry, and the laser light reflected light beam is radiated on the detector respectively; According to S polarized wave of choosing or P polarized wave, select for use laser inciding on the bottom surface of refractive index prism (1) under the guided wave resonance angle, and excite the guided wave of in electro-optic polymer film (3), propagating, adopt detector to receive outgoing beam; On the modulator electrode, add a signal of telecommunication, finish by the modulation of the signal of telecommunication to light signal by modulator, the light signal that obtains modulating, and simultaneously it is presented on the oscilloscope.

10, according to Claim 8 or the 9 described methods of utilizing the guided wave resonance mode to modulate multichannel light simultaneously, it is characterized in that, reduce driving voltage by the following method: select synchro angle, mode of operation is chosen on the absworption peak of low-order mode, the device working point is chosen in the trailing edge of ATR absworption peak.