CN107942539A - A kind of reflective spatial electrooptic modulator based on graphene - Google Patents
A kind of reflective spatial electrooptic modulator based on graphene Download PDFInfo
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- CN107942539A CN107942539A CN201711170004.4A CN201711170004A CN107942539A CN 107942539 A CN107942539 A CN 107942539A CN 201711170004 A CN201711170004 A CN 201711170004A CN 107942539 A CN107942539 A CN 107942539A
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/0102—Constructional details, not otherwise provided for in this subclass
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/011—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour in optical waveguides, not otherwise provided for in this subclass
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- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
Abstract
A kind of reflective spatial electrooptic modulator based on graphene, is related to electro-optical modulation device.Equipped with space optical coupling module and waveguide type Electro-optical Modulation module；The space optical coupling module is equipped with optical clear prism, and the waveguide type Electro-optical Modulation module is equipped with substrate under external electrode, graphene bottom electrode and medium under external electrode, graphene top electrode, electro-optical medium sandwich layer, metal on medium top covering, metal；When waveguide type Electro-optical Modulation module works under applied voltage driving, you can realize to spatial light wave modulation.Using all-dielectric optically waveguide, the quality factor for comparing Traditional Space electrooptic modulator is high so that its resonance line width, is expected to obtain small half-wave voltage；Traditional space electrooptic modulator based on surface plasmon resonance is compared, is operable with H mode or transverse magnetic wave, no polarization correlation.
Description
Technical field
The present invention relates to electro-optical modulation device, more particularly, to a kind of reflective spatial Electro-optical Modulation based on graphene
Device.
Background technology
With the fast development of current information technology, information transmission, storage, the photoelectron letter of handling implement are used light as
Breath technology is widely used.Optical modulator is by the device on the Signal averaging to carrier wave light wave of a carrying information.
According to operation principle, optical modulator can be divided into acousto-optic modulator, magneto-optic modulator, electroluminescent Absorption modulation device and Electro-optical Modulation
Device.It is a kind of wherein most ripe, most widely used technology and Electro-optical Modulation can be combined directly with circuit communication system.
The operation principle of traditional electrooptic modulator is the linear electro-optic effect using medium, that is, steeps Ke Ersi effects and carry out work
Make.Under the influence of alive outside, the refractive index of medium changes, so as to modulate the intensity of output light.According to electric light tune
The difference of device device architecture processed, can be divided into Mach Zehnder interference type electrooptic modulator, directional couple formula electrooptic modulator,
Grating type optical fiber electrooptic modulator, decay fully-reflected type electrooptic modulator, Micro-ring electrooptic modulator etc..
Above-mentioned all types of electrooptic modulators are to produce modulated electric fields by electrode to apply applied voltage.However,
Due to the characteristic of optical transport in modulator model, and the characteristics of device architecture, the electrode for often requiring that modulator is transparent.
The material that tradition is used as transparency electrode is often tin indium oxide, carbon nanotubes, conducting polymer etc..However, most-often used oxygen
Change indium tin there are a series of shortcomings, including it is expensive, recycling is difficult, toxic, and the material is a kind of fragile material, easily
It is damaged because of distortion；The square resistance of carbon nano-tube film is generally bigger than normal；Conducting polymer there is also it is many problem of, it is such as complicated
Synthesis step, low dissolubility, narrow printing opacity frequency range, and poor chemical stability (bibliography in atmosphere：Han Yuan beautiful woman
Research [D] the University Of Suzhou 2014 of efficient Organic Light Emitting Diode based on graphene transparent electrode).Further, since above-mentioned biography
System transparency electrode is made of body block of material, and being introduced into for electrode will form interference, electric light integrated level to the light-transfer characteristic in model
Difference.
Graphene is the two-dimensional material that a kind of single layer of carbon atom of plane is closely combined with honeycomb lattice, its thickness only one
A carbon atom diameter (about 0.34nm).The characteristics of graphene, includes：Intensity is high, and pliability is good；Electric conductivity is excellent, and electrical conductivity is high
Up to 106s/m；Special electronic band structure causes the transmission speed of electronics to be thereon up to the 1/300 of the light velocity, is much higher than other
General conductor and semi-conducting material；At the same time, absorption of the graphene to light is very low, is only 2.3%, and in broad spectrum scope
Interior thang-kng is good；Chemical property is stablized, not oxidizable.Exactly these advantages of graphene so that it can substitute traditional material
Material becomes transparent conductive electrode of future generation.
The content of the invention
It is an object of the invention to overcome the shortcomings of the electrooptic modulator based on conventional transparent electrode, there is provided electric light integrated level
A kind of high, compact-sized, the convenient reflective spatial electrooptic modulator based on graphene of preparation.
The present invention is equipped with space optical coupling module and waveguide type Electro-optical Modulation module；The space optical coupling module is equipped with light
Learn transparent prism, the waveguide type Electro-optical Modulation module be equipped with medium top covering, external electrode on metal, graphene top electrode,
Substrate under external electrode, graphene bottom electrode and medium under electro-optical medium sandwich layer, metal；When waveguide type Electro-optical Modulation module outside
Under making alive driving during work, you can realize to spatial light wave modulation.
The prism of the space optical coupling module is made of the optical clear prism of high index, space optical coupling module
The shape of prism can be but not limited to triangular prism or semi-cylindrical prism.
Under the medium top covering of the waveguide type Electro-optical Modulation module, graphene top electrode, electro-optical medium sandwich layer, graphene
Substrate is optically transparent material under electrode, medium, there is higher optical transmissibility；The medium top covering and substrate under medium
For waveguide covering, electro-optical medium sandwich layer is waveguide core layer.
The present invention each component index of refraction relationship be：The refractive index of the optical clear prism of Special composition optical coupler module is big
The equivalent refractive index of pattern is supported in waveguide, and the refractive index of the electro-optical medium sandwich layer in waveguide is more than medium top covering and Jie
The refractive index of substrate under matter.
External electrode is made of the metal of stronger electric conductivity under external electrode and metal on the metal, the graphene
Top electrode and graphene bottom electrode are made of single or multiple lift graphene film.
The electro-optical medium sandwich layer is made of the optically transparent material for possessing electrooptic effect, and the thickness of electro-optical medium sandwich layer is then
The quantity of the service aisle of the present invention is controlled, therefore can expand and realize multichannel Electro-optical Modulation.
The operation principle of the present invention：Space light wave to be modulated enters the optical clear prism of the modulator from light source, passes through
After transmission, which incides on the interface of the prism and medium top covering.When the incidence angle at the interface is complete more than the interface
When reflecting critical angle, incident light wave is totally reflected in optical clear prism and medium top covering interface, and is produced at the interface
Raw evanescent wave, the evanescent wave field are expected to the guided mode of excitation waveguide type Electro-optical Modulation module.When incidence angle meets phase-matching condition
When, incident light wave excites guided mode at special angle, in spatial light energy being coupled to waveguide core layer；Due to Graphene electrodes Europe
The presence of nurse loss, the energy of the guided mode are absorbed before space optical coupling module is coupled back into, the reflected light light intensity of prism
Weaken, form decay total reflection absworption peak.Phase matched formula is：
N × k × sin θ=β
Wherein n is the refractive index of prism, and k is the wave number of light in a vacuum, and θ is optical clear prism and medium top covering
The light wave incident angle (also referred to as resonant excitation angle) of interface, β is guided mode propagation constant.When applied voltage passes through metal respectively
When upper and lower external electrode puts on graphene upper and lower electrode, which is placed in the modulation of applied voltage formation
In electric field.When applied voltage changes, electric field strength changes therewith；The refractive index of electro-optical medium sandwich layer will due to electrooptic effect and
Change, and the propagation constant of guided mode strictly relies on the refractive index of waveguide core layer, therefore the guided mode propagation constant of waveguide will be with it
Change, and and then cause resonant excitation angle or the change of wavelength of space light wave.So on original resonance location,
Since mismatch occurs for the wave vector of guided mode propagation constant and space optical coupling module, coupling efficiency reduces, the intensity hair of reflecting light
Changing, it is achieved thereby that the effect of Electro-optical Modulation.The refractive index of electrooptical material meets equation with the change of applied voltage：
Δ n=(γ × E × n3)/2
Wherein, n is the refractive index of electrooptical material when being not powered on, and γ is electro-optic coefficient, and E is electric field strength, and Δ n is
Variations in refractive index caused by extra electric field.
Compare with the prior art, beneficial effects of the present invention are as follows：
1) present invention employs all-dielectric optically waveguide, the quality factor for comparing Traditional Space electrooptic modulator is high so that its
Resonance line width, is expected to obtain small half-wave voltage；Compare traditional space Electro-optical Modulation based on surface plasmon resonance
Device, the present invention are operable with H mode or transverse magnetic wave, no polarization correlation.
2) present invention employs Graphene electrodes, it is at the same time as crucial optical module and electric components so that this hair
Bright photoelectricity integrated level is high, compact-sized.
3) present invention employs multilayered optical structures, prepare simple；The Graphene electrodes of one of component are relative to traditional saturating
Prescribed electrode, mechanical flexibility are good, environmental-friendly, of low cost, easily prepared.
4) decay total reflection principle and phase-matching technique are taken in the technology of the present invention, is expected to obtain small insertion damage
Consumption.
5) present invention can be by the service aisle quantity of the thickness control present invention of electro-optical medium sandwich layer, so as to expand more logical
Road application.
Brief description of the drawings
Fig. 1 is the structure diagram of the embodiment of the present invention.
Fig. 2 is the angle spectrogram of angle operating mode described in the embodiment of the present invention.
Fig. 3 is the voltage modulated curve of angle operating mode described in the embodiment of the present invention.
Embodiment
The embodiment of the present invention is illustrated below in conjunction with the accompanying drawings.
As shown in Figure 1, the embodiment of the present invention is equipped with space optical coupling module 1 and waveguide type Electro-optical Modulation module；The sky
Between optical coupler module 1 be equipped with optical clear prism, the waveguide type Electro-optical Modulation module is equipped with medium top covering 2, outer on metal
Substrate under external electrode 6, graphene bottom electrode 7, medium under receiving electrode 3, graphene top electrode 4, electro-optical medium sandwich layer 5, metal
8.When waveguide type Electro-optical Modulation module works under applied voltage driving, you can realize to spatial light wave modulation.
It is using a kind of specific embodiment of the invention：
The space optical coupling module uses optical clear prism, and material is ZF7 glass, refractive index 1.8；Wrapped on medium
The material of layer is transparent fluororesin (ETFE), refractive index 1.4, thickness 700；The thickness of the upper and lower electrode of graphene is 0.34,
Dielectric constant is 4.1911+7.4685i；The material of electro-optical medium sandwich layer is cross-linking for diels-Alder based on chromophore
Electro-optic polymer AJ309, refractive index 1.64, thickness 1000, electro-optic coefficient 142pm/V；Substrate is air under medium, folding
Rate is penetrated as 1；The upper and lower external electrode of metal is gold or silver-colored microelectrode.The operation wavelength of the modulator is 1550nm, and incident light is horizontal stroke
Magnetic wave (TM ripples), incident angle is between 51.0576 °~90 °, i.e., more than optical clear prism and medium top covering interface
The cirtical angle of total reflection.
By adjusting applied voltage, the refractive index of electrooptical material can be finely tuned.Fig. 2 is angle work described in the specific embodiment
The angle spectrogram of operation mode；When modulation voltage is 0V, reflectance curve is as shown in the figure；When modulation voltage is 20V, reflectivity is bent
Line is as shown in the figure；Solid line corresponds to 58.34 ° of incidence angle during minimum reflectance.Fig. 3 is angle Working mould described in the specific embodiment
The voltage modulated curve of formula, relative reflectance be 58.34 ° angle reflection light intensity it is alive outside under the influence of, relative to Fig. 2
The ratio of middle minimum reflectance 0.0044.As seen from the figure, when applied voltage changes in the range of 0V to 50V, relative reflectance
214.7 are changed to by 1, it is achieved thereby that Electro-optical Modulation.
Claims (9)
1. a kind of reflective spatial electrooptic modulator based on graphene, it is characterised in that equipped with space optical coupling module and waveguide
Type Electro-optical Modulation module；The space optical coupling module is equipped with optical clear prism, and the waveguide type Electro-optical Modulation module is equipped with
It is electric under external electrode, graphene under external electrode, graphene top electrode, electro-optical medium sandwich layer, metal on medium top covering, metal
Substrate under pole and medium；When waveguide type Electro-optical Modulation module works under applied voltage driving, that is, realize to space light wave
Modulation.
A kind of 2. reflective spatial electrooptic modulator based on graphene as claimed in claim 1, it is characterised in that the space
The prism of optical coupler module is made of the optical clear prism of high index, and the shape of the prism of space optical coupling module is three
Angular prism or semi-cylindrical prism.
A kind of 3. reflective spatial electrooptic modulator based on graphene as claimed in claim 1, it is characterised in that the waveguide
Substrate under the medium top covering of type Electro-optical Modulation module, graphene top electrode, electro-optical medium sandwich layer, graphene bottom electrode, medium
It is optically transparent material.
A kind of 4. reflective spatial electrooptic modulator based on graphene as claimed in claim 1, it is characterised in that the medium
Top covering is waveguide covering with substrate under medium, and electro-optical medium sandwich layer is waveguide core layer.
A kind of 5. reflective spatial electrooptic modulator based on graphene as claimed in claim 1, it is characterised in that each component folding
The rate relation of penetrating is：The refractive index of the optical clear prism of Special composition optical coupler module is more than the equivalent folding that pattern is supported in waveguide
Rate is penetrated, and the refractive index of the electro-optical medium sandwich layer in waveguide is more than the refractive index of substrate under medium top covering and medium.
A kind of 6. reflective spatial electrooptic modulator based on graphene as claimed in claim 1, it is characterised in that the metal
External electrode is made of metal under upper external electrode and metal.
A kind of 7. reflective spatial electrooptic modulator based on graphene as claimed in claim 1, it is characterised in that the graphite
Alkene top electrode and graphene bottom electrode are made of single or multiple lift graphene film.
A kind of 8. reflective spatial electrooptic modulator based on graphene as claimed in claim 1, it is characterised in that the electric light
Medium sandwich layer is made of the optically transparent material for possessing electrooptic effect.
A kind of 9. reflective spatial electrooptic modulator based on graphene as claimed in claim 1, it is characterised in that electro-optical medium
The quantity of the thickness control service aisle of sandwich layer.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201711170004.4A CN107942539A (en) | 2017-11-17 | 2017-11-17 | A kind of reflective spatial electrooptic modulator based on graphene |
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| CN201711170004.4A CN107942539A (en) | 2017-11-17 | 2017-11-17 | A kind of reflective spatial electrooptic modulator based on graphene |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111856784A (en) * | 2020-07-02 | 2020-10-30 | 南京邮电大学 | Tunable signal modulator based on multilayer stacked dielectric structure |
| CN112596281A (en) * | 2020-12-17 | 2021-04-02 | 中国科学院半导体研究所 | Spatial light modulator and method for manufacturing the same |
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| US20170329127A1 (en) * | 2016-05-12 | 2017-11-16 | The Chinese University Of Hong Kong | Light modulator using total internal reflection at an interface with a tunable conductive layer |
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| CN1449128A (en) * | 2003-04-17 | 2003-10-15 | 上海交通大学 | Method for modulating multipath light simultaneously using waveguide resonance mode and modulator |
| CN102032946A (en) * | 2010-10-29 | 2011-04-27 | 上海交通大学 | Method for simultaneously measuring electro-optic coefficients Pockels and Kerr |
| KR20140045001A (en) * | 2012-10-05 | 2014-04-16 | 한국과학기술연구원 | Attenuated total reflection type waveguide mode resonance sensor using nanocrystalline diamond and method for manufacturing waveguide made of nanocrystalline diamond |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111856784A (en) * | 2020-07-02 | 2020-10-30 | 南京邮电大学 | Tunable signal modulator based on multilayer stacked dielectric structure |
| CN112596281A (en) * | 2020-12-17 | 2021-04-02 | 中国科学院半导体研究所 | Spatial light modulator and method for manufacturing the same |
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Application publication date: 20180420 |