CN1449060A - Structure of light-emitting diode and method for making the same - Google Patents
Structure of light-emitting diode and method for making the same Download PDFInfo
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- CN1449060A CN1449060A CN02106132A CN02106132A CN1449060A CN 1449060 A CN1449060 A CN 1449060A CN 02106132 A CN02106132 A CN 02106132A CN 02106132 A CN02106132 A CN 02106132A CN 1449060 A CN1449060 A CN 1449060A
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Abstract
The present invention is the structure and manufacture of LED. The LED has mirror reflector, which is a composite reflecting layer comprising a transparent conducting oxide layer and a high-reflecting index metal layer, and most of the light is permitted to pass through the transparent conducting oxide layer before being reflected by the reflecting metal layer. The transparent conducting oxide layer is made of material with few or no reaction to the high-reflecting index metal layer, and this can avoid the degradation of the reflecting performance of the metal layer in high temperature annealing. The LED with mirror reflector has high product quality and low production cost.
Description
Technical field
The present invention relates to light-emitting diode (Light Emitting Diode; LED) technology specifically is relevant light-emitting diode structure and manufacture method thereof, particularly about a kind of structure and manufacture method thereof with high brightness LED of complex reflex layer.
Background technology
Traditional AlGaInP light-emitting diode has double-heterostructure (Double Heterostructure; DH), it is constructed as shown in Figure 1, from bottom to top is respectively: substrate Ohm contact electrode layer 1A, n p type gallium arensidep (GaAs) substrate (Substrate) 1, one aluminium content is at the n of 70%-100% type (Al
xGa
1-x)
0.5In
0.5Following coating layer 3, the one (Al of P
xGa
1-x)
0.5In
0.5 Active layer 5, the one aluminium content of P are at the p of 70%-100% type (Al
xGa
1-x)
0.5In
0.5The last coating layer 7 of P, and the electric current dispersion layer (CurrentSpreading Layer) 9 of the high energy gap of a p type, the material of this one deck can be gallium phosphide, gallium arsenide phosphide, InGaP, tin oxide or aluminum gallium arsenide etc.But because the energy gap of described GaAs substrate 1 is little, the therefore light that sent of described active layer 5, its light towards described GaAs substrate 1 will all be absorbed by described GaAs substrate 1.Therefore, the luminous quantum efficiency of described AlGaInP light-emitting diode is very low.In addition, because only about 44W/m-℃ of the pyroconductivity of GaAs, therefore, be not enough to the heat energy of all light-emitting diodes is dissipated with the pyroconductivity of little GaAs like this.
For overcoming the shortcoming of above substrate extinction, have some documents to expose the technology of LED traditionally, yet these technology all have its shortcoming and restriction.For example people such as Sugawara is published in [Appl.Phys Lett.Vol.61,1775-1777 (1992)] and has just disclosed a kind of adding one deck and disperse Bragg reflecting layer (DistributedBragg Reflector; DBR) on GaAs substrate 1, its light-emitting diode structure please refer to Fig. 2.Because its structure is similar to Fig. 1, therefore, the film of part identity function all indicates with same reference numbers.Among Fig. 2, people such as Sugawara are formed between described GaAs substrate 1 and the following coating layer 3 except having increased described dispersion Bragg reflecting layer 2, outside the light of described GaAs substrate 1, have more increased by a barrier zones 10 to add the distribution of heavy current with reflection.But, the reflection efficiency of 2 pairs of described AlGaInP light-emitting diode of described DBR layer is also only about 80%, and in addition, reflection characteristic is relevant with reflection angle again.Described DBR layer 2 is only to being normally incident in or can be very efficient near the described GaAs substrate 1 of vertical incidence.Therefore, described DBR layer 2 for photo-quantum efficiency to improve effect limited.
Another embodiment is published in the document of [Appl.Phys Lett.Vol.64, No.21,2839, (1994)] for people such as Kish, and name is called " Very high-efficiency semiconductor wafer-bondedtransparent-substrate (Al
xGa
1-x)
0.5In
0.5P/GaP ", disclose the transparent mode substrate (Transparent-Substrate of a kind of adhesive wafer (Waferbonding); TS) (Al
xGa
1-x)
0.5In
0.5The P/GaP light-emitting diode.Please refer to schematic diagram shown in Figure 3.Wherein, people such as Kish has replaced the GaAs substrate with transparency carrier TS 13.TS AlGaInP LED is with the gas phase of utilizing hydride brilliant method (Hydride vaporphase epitaxy of heap of stone; HVPE) form p type gallium phosphide (GaP) window (Window) layer 11 of thickness quite thick (about 50 μ m) on ray structure epitaxial layer 12.The ray structure epitaxial layer comprises the thick p-type Al of 0.75 μ m
0.5In
0.5 P coating layer 7, active layer (Al
xGa
1-x)
0.5In
0.5The n-type Al that P5,1 μ m are thick
0.5In
0.5 P coating layer 3 is formed on the temporary n p type gallium arensidep substrate.After described p type gallium phosphide (GaP) window (Wndow) layer 11 forms,, optionally remove n p type gallium arensidep (GaAs) substrate again with known chemical method for etching.Then with this n type (Al that exposes
xGa
1-x)
0.5In
0.5Coating layer 3 under the P, are bonded on the n type gallium phosphide substrate TS 13 that thickness is about 8-10mil.With regard to luminosity, prepared by this way TS AlGaInP LED is than the absorption substrate (Absorbing-Substrate of tradition; AS) more than the big twice of its brightness of AlGaInP LED.Yet the shortcoming of this TS AlGaInP LED is exactly that manufacture process is too numerous and diverse, and can have the high-ohmic of a non-ohmic contact at joint interface usually, therefore, can't obtain high production yield and be difficult to reduce manufacturing cost.
Another kind of conventional art, for example people such as Horng is published in [Appl.Phys Lett.Vol.75, No.20,3054 (1999)] document, name are called " AlGaInP light-emitting diodes with mirrorsubstrates fabricated by wafer bonding " and have reported a kind of wafer integration technology of utilizing to form minute surface substrate (Mirfor-Substrate; MS) the LED manufacturing technology of AlGaInP/metal level/silica/silicon substrate.Another piece report sees also J Electronic Materials, Vol.30, No.8,2001,907 documents, name is called " Wafer bonding of 50-mm-diameter mirror substratesto AlGa InP light-emitting diode wafers ", please refer to Fig. 4 A, it uses AuBe23, Au specular layer 21, and thickness is about 100nm, 150nm, and this metallic mirror surface (21,23) is adhered to SiO
225, silicon substrate 27 and form a minute surface substrate 30.20 of stacked crystal layer structures of light emission are shown in Fig. 4 B, and itself and Fig. 2 have close structure.Many GaAs buffer layer 2a between the GaAs substrate 1 of n type and n type AlGaAs/GaAs DBR layer 2 wherein.And there is a p p type gallium arensidep cap rock (capping) 15 to replace electric current dispersion layer 9.Subsequently, please refer to Fig. 4 C, described minute surface substrate 30 removes described GaAs substrate 1, described GaAs buffer layer 2a and described n type AlGaAs/GaAs DBR layer 2 after adhering with described light emission stacked crystal layer structure 20 more in regular turn.At last, form n type AuGeNi/Au electrode 19 again on described n type coating layer 3.End-results please refer to Fig. 4 C.
The purpose of described minute surface substrate 30 is to reflect the light towards the absorbability orientation substrate, and the supporting substrate that better capacity of heat transmission is provided.The pyroconductivity of the silicon in the described minute surface substrate 30 is 124 to 148W/m-℃.Therefore, described minute surface substrate 30 helps to solve heat dissipation problem.But, because there is defective (Hillock defects) (not shown) surface formed thereon of heaving as the similar koppie in described AlGaInP light emission epitaxial layer regular meeting.These microminiature koppie accumulation regions have problems in the time of will causing light emission epitaxial layer 20 and minute surface substrate 30 to be adhered together, and make the decreased performance of LED wafer.Furthermore, owing to will reach the benefit of low ohm contact impedance, the annealing of 400 ℃ or higher temperature often is necessary.Anneal under said temperature, golden specular layer 21 and III-V family semiconducting compound (being p type GaAs cap rock 15) will react.In addition, p type electrode 21 of above-mentioned AlGaInP diode (Au specular layer 21 is as p type electrode) and described n type electrode 19 all are formed at the same side.Therefore, the diode size of homonymy is not big than traditional p type electrode and n type electrode for above-mentioned AlGaInP light-emitting diode.
Another embodiment is by United States Patent (USP)s that the people obtained the 6th, 319 such as Chen, and the light-emitting diode that 778B1 discloses wherein has a reflective metal layer to increase the output of light.This light-emitting diode structure is shown in Fig. 5.It is made up of a light emission epitaxial layer 40 and a supporting substrate 35, and with the soldering-tin layer 39 of low temperature with described both 40,35 be bonded together.Described light emission epitaxial layer 40 comprises a n type coating layer 41, an AlGaInP active layer 42, a p type coating layer 43, a p type GaAs cap rock 44 and a p type ohmic contact layer 45.Described supporting substrate 35 comprises the highly doped silicon substrate of a conductive impurities 36, and is plated on the upper and lower surface of described silicon substrate respectively with metal level 37a and 37b.Therefore, with this understanding, form the LED structure of vertical injection current type, its n type electrode (n type metal ohmic contact electrode) 47 and p type electrode 37a can finish in the technology of homonymy not.But above-mentioned n type metal ohmic contact electrode 47 is to carry out after described light emission epitaxial layer 40 and a supporting substrate 35 adhesions again, therefore, for reaching the purpose of low contact resistance, the high annealing processing procedure is normally necessary, but this fabrication steps will sacrifice the reflectivity of reflective metal layer 37b usually.If do not wish to sacrifice the reflectivity in reflector, certainly will can not carry out high annealing, in other words, just can not reach the purpose of low resistance ohmic contact.
Summary of the invention
In view of this, a purpose of the present invention provides one and has the high efficient LED structure of reflective metal layer.
Another object of the present invention provides a kind of structure (the present invention has added an inertia conductivity oxide layer between reflective metal layer and p type ohmic contact layer) of reacting because of annealing between reflective metal layer and the p type ohmic contact layer of preventing.
A further object of the present invention provides a kind of structure that prevents adhesion coating and reflective metal layer reaction, further to avoid the reaction of reflective metal layer and adjacent layer.
A more purpose of the present invention provides the good substrate of LED heat radiating.
The invention provides a kind of high efficient LED structure, its structure comprises a light-emitting diode stacked crystal layer structure length at least on the substrate of a lattice constant match, and can be luminous in response to the injection of electric current; One reflective metal layer is made up of the metal level of transparent conductivity type oxide layer and high reflection, is formed on the p type transparent ohmic contact layer; One silicon substrate, upper and lower surface all deposit a metal, utilize soldering-tin layer or metal or metal silicide that high reflecting metal layer and silicon substrate are adhered together again.
In addition for preventing that the reaction of adhesion coating and reflective metal layer from also can form a conductivity type oxide layer earlier earlier on reflective metal layer.
Concrete technical scheme of the present invention is achieved as follows:
A kind of light-emitting diode comprises at least:
One conductor substrate;
One light-emitting layer structure has plural layer light-emitting diode epitaxial layer, produces light after injecting when electric current;
One electrically conducting transparent type oxide layer is formed on this light-emitting layer structure;
One reflective metal layer is formed on this electrically conducting transparent type oxide layer; And
One metal adhesion coating adhere this conductor substrate and this reflective metal layer are to form this light-emitting diode.
Aforesaid light-emitting diode, conductor substrate wherein are the good conductor of heat conduction and conduction, and the material of its conductor substrate is to be selected from wherein a kind of of the group that is made up of copper, aluminium, SiC, AlN and silicon; Wherein above-mentioned electrically conducting transparent type oxide layer is for being selected from by In
2O
3, SnO
2, CdO, ZnO, ITO (tin indium oxide), CTO (cadmium tin), CuAlO
2, CuGaO
2And SrCu
2O
2Wherein a kind of of the group that is formed; And reflective metal layer wherein is to be selected from wherein a kind of of the group that is made up of gold, silver, aluminium; Wherein above-mentioned metal adhesion coating is to be selected from wherein a kind of of In, Sn, Au-Be alloy, Au-Si alloy, Pb-Sn alloy, Au-Ge alloy and PdIn alloy; And this light-emitting diode, more can comprise a diffused barrier layer and be formed between this reflective metal layer and this metal adhesion coating, its diffusion barrier layer material is to be selected from wherein a kind of of the group that is made up of conductivity oxide layer, high-temperature metal layer, high-temperature metal silicide layer.
A kind of light-emitting diode is comprised at least by lower floor to upper strata:
One conductor substrate;
One reflective metal layer is formed on this conductor substrate;
One electrically conducting transparent type oxide layer is formed on this reflective metal layer; And
One light-emitting layer structure is formed on this electrically conducting transparent type oxide layer, and this light-emitting layer structure has plural layer light-emitting diode epitaxial layer, produces light after injecting when electric current.
Aforesaid light-emitting diode, conductor substrate wherein are the good conductor of heat, simultaneously also be electric good conductor, and the material of its conductor substrate is to be selected from wherein a kind of of the group that is made up of copper, aluminium, SiC, AlN and silicon; Wherein above-mentioned electrically conducting transparent type oxide layer is for being selected from by In
2O
3, SnO
2, CdO, ZnO, ITO, CTO, CuAlO
2, CuGaO
2And SrCu
2O
2Wherein a kind of of the group that is formed; And reflective metal layer wherein is to be selected from wherein a kind of of the group that is made up of gold, silver, aluminium; This light-emitting diode more comprises a metal adhesion coating and is formed between this reflective metal layer and this conductor substrate, and this metal adhesion coating is to be selected from wherein a kind of of In, Sn, Au-Be alloy, Au-Si alloy, Pb-Sn alloy, Au-Ge alloy and PdIn alloy; And this light-emitting diode more can comprise a diffused barrier layer and be formed between this reflective metal layer and this metal adhesion coating, and its diffusion barrier layer material is to be selected from wherein a kind of of the group that is made up of conductivity oxide layer, high-temperature metal layer, high-temperature metal silicide layer.
A kind of light-emitting diode, this light-emitting diode is by a conductor substrate, an one plural layer light-emitting diode epitaxial layer and a reflector are formed, this reflector is between this conductor substrate and this plural layer light-emitting diode epitaxial layer, in order to reflect the light that this plural layer light-emitting diode epitaxial layer produces, it is characterized in that this reflector is made up of an electrically conducting transparent type oxide layer and a high-reflectivity metal layer, and this electrically conducting transparent type oxide layer connects this plural layer light-emitting diode epitaxial layer and high-reflectivity metal layer, in order to prevent the reaction between this high-reflectivity metal layer and this light-emitting diode epitaxial layer.
Aforesaid light-emitting diode, conductor substrate wherein are the good conductor of heat, simultaneously also be electric good conductor, and the material of its conductor substrate is to be selected from wherein a kind of of the group that is made up of copper, aluminium, SiC, AlN and silicon; Wherein above-mentioned electrically conducting transparent type oxide layer is for being selected from by In
2O
3, SnO
2, CdO, ZnO, ITO, CTO, CuAlO
2, CuGaO
2And SrCu
2O
2Wherein a kind of of the group that is formed; And reflective metal layer wherein is to be selected from wherein a kind of of the group that is made up of gold, silver, aluminium.
A kind of manufacturing method for LED comprises following steps at least:
One light-emitting diode epitaxial layer is provided, and this epitaxial layer comprises plural layer III-V compound semiconductor layer and is formed on the temporary substrate;
Form a light transmission conductive oxide layer on this epitaxial layer;
Form a reflective metal layer on this light transmission conductive oxide layer;
One conductor substrate is provided, and this conductor substrate has the upper surface of first ohmic contact metal layer in this conductor substrate, and one second ohmic contact metal layer is in the lower surface of this conductor substrate;
Utilize a low-melting-point metal adhesion coating that this first ohmic contact metal layer and this reflective metal layer are pasted together;
Remove this temporary substrate; And
Form the exposed surface of an ohmic contact metal layer, with as Ohm contact electrode in this light-emitting diode epitaxial layer.
In the aforesaid manufacturing method for LED, more can comprise earlier formation one diffused barrier layer carries out this low-melting-point metal adhesion coating adhesion step again on this reflective metal layer.
The invention provides a kind of high efficiency light emitting diode construction and manufacture method thereof, the metallic mirror that this light-emitting diode has high reflectance is absorbed by substrate with the light of avoiding producing, the complex reflex layer that constitutes by transparent conductor oxide layer and high reflecting metal layer, the problem that can avoid the reflective that reaction causes of reflective metal layer and III-V compound semiconductor when carrying out the ohmic contact annealing steps to degenerate, therefore, light-emitting diode with above-mentioned complex reflex layer can be so that product has high yield, and then reduces manufacturing cost.
Description of drawings
Fig. 1 is the cross sectional representation according to the light emitting diode construction of known techniques manufacturing;
Fig. 2 is according to known techniques, has the cross sectional representation of the light-emitting diode that disperses Bragg reflecting layer;
Fig. 3 has a transparent material that forms according to the adhesion technology as substrate for the light-emitting diode of foundation known techniques manufacturing;
Fig. 4 A to Fig. 4 C is the led layers according to the known techniques manufacturing, has the minute surface substrate of AlGaInP/ metal level/SiO2/Si;
Fig. 5 is the led layers according to the known techniques manufacturing, has a reflective metal layer and reflective metal layer and is bonded on the conductivity silicon substrate;
Fig. 6 A to Fig. 6 C utilizes the light-emitting diode stacked crystal layer structure of the method first embodiment manufacturing of the present invention and the structure after board structure and both adhesions, has the cross sectional representation of inertia transparent conductor layer between reflective metal layer and stacked crystal layer structure;
Fig. 7 A to Fig. 7 B is according to the AlGaInN light-emitting diode stacked crystal layer structure of method second embodiment of the present invention and the cross sectional representation of substrate supported structure;
Fig. 8 is the cross sectional representation of AlGaInN light emitting diode construction.
Embodiment
Below enumerate preferred embodiment, and in conjunction with the accompanying drawings, technology contents of the present invention, feature and advantage are described in further detail.
At first ask the cross sectional representation of elder generation, comprise n p type gallium arensidep (GaAs) substrate 100, an etch stop layer (Etching StopLayer) 102, the one n type AlGaInP (Al that from bottom to top pile up in regular turn with reference to the epitaxial structure layer 118 of light-emitting diode shown in Fig. 6 A
xGa
1-x)
0.5In
0.5P coats down (Cladding) layer 104, wherein the aluminium content range by 50 to 100% all can, a unadulterated AlGaInP (Al
xGa
1-x)
0.5In
0.5P active layer (Active Layer) 106, wherein the aluminium content range is 0-45%, when aluminium content x=0, the composition of active layer is Ga
0.5In
0.5P, and the light wavelength lambda d that light-emitting diode sent is about 635nm, promptly is about red range, a p type (Al
xGa
1-x)
0.5In
0.5The last coating of P (Cladding) layer 108, wherein the aluminium content range also can be by 50 to 100%, one p type ohmic contact epitaxial layer (Ohmic Contact Epitaxial Layer) 110.
In addition, the material of wherein said etch stop layer 102 can be the compound semiconductor of any III-V family element, but, lattice constant needs and can be complementary to reduce difference row's generation with described GaAs substrate 100, (for example: 5H on the other hand ought utilize the etching intermixture
3PO
4: 3H
2O
2: 3H
2O or 1NH
4OH: 35H
2O
2) during etching, etch-rate needs less than the etch-rate to described GaAs substrate 100, in addition, described etch stop layer 102 also needs high carrier concentration to reduce the ohmic contact resistance value.The typical case, carrier concentration is for being higher than 1 * 10
18/ cm
3The preferable material of etch stop layer 102 can be InGaP (InGaP) or aluminum gallium arsenide (AlGaAs) in the present invention.
110 of described p type ohmic contact epitaxial layers should be selected material that described active layer 106 is had high optical transmittance, and this layer of material is therefore at this and be called transparent ohmic contact layer 110 backward.In other words, transparent ohmic contact layer 110 is mixed with high carrier concentration for to be selected from the material of energy gap (energy band gap) greater than described active layer 106 simultaneously, is beneficial to form ohmic contact.According to above-mentioned requirements, transparent ohmic contact layer 110 can be selected from the material that closes in the III-V family semiconducting compound in above-mentioned requirements.For example if the light wavelength scope that described active layer 106 sends at 590nm to 650nm, then can be selected aluminum gallium arsenide (AlGaAs) or gallium arsenide phosphide (GaAsP) like this.And if wavelength near 560nm and following time, can be selected gallium phosphide (GaP).In addition, the carrier concentration of transparent ohmic contact layer 110 is for being higher than 1 * 10
18/ cm
3
Subsequently, form one again and have the p type ohmic metal contact patterns layer 112 of point-like or net-like pattern on transparent ohmic contact layer 110.The material of p type ohmic metal contact patterns layer 112 can be selected as Au-Be, and the metal level of Au-Zn or this type of Cr-Au is to add the even distribution of heavy current.And described point-like or netted p type ohmic metal contact patterns layer 112 can adopt following order to form.A kind of mode is to form p type ohmic metal contact layer earlier, and inferior formation one photoresistance pattern is used etching technique again and formed described p type ohmic metal contact patterns layer 112 thereon, removes the photoresistance pattern at last again.Another kind of mode is to form a photoresistance pattern earlier on described transparent ohmic contact layer 110, inferior formation p type ohmic metal contact layer, after use the adhesive plaster adhesion system again and remove the not good p type ohmic metal contact layer of adhesive force, to form p type ohmic metal contact patterns layer 112, remove the photoresistance pattern at last again.
Described p type ohmic metal contact patterns layer 112 coverage rate are if more height will reduce light output, but it also can make the forward magnitude of voltage of light-emitting diode lower relatively.Therefore, under the profit and loss of output of balance light and contact resistance, the coverage rate of described p type ohmic metal contact patterns layer 112 is comparatively desirable below 10%.Described subsequently light emitting diode construction body carries out 350-600 ℃ high-temperature annealing step again, to reduce contact resistance value.Then, successively form an electrically conducting transparent type oxide layer 114 and a high reflecting metal layer 116 again on transparent ohmic contact layer 110, as shown, comprise certainly described p type ohmic metal contact patterns layer 112 is covered in wherein.Described electrically conducting transparent type oxide layer 114 is the oxide layer of a high conductivity good light penetrability according to method of the present invention, and can react with described high reflecting metal layer 116.For example: as In
2O
3, SnO
2, CdO, ZnO, ITO (tin indium oxide), CTO (cadmium tin), CuAlO
2, CuGaO
2And SrCu
2O
2It all is the candidate of the oxidic, transparent, conductive layers 114 that can select for use.Can be selected from aluminium, gold, silver etc. as for 116 on described high reflecting metal layer, described these three kinds of metal levels all are to have on the metal level of high reflectance to select, and under 560 to 650nm wavelength, the reflectivity of reflective metal layer 116 is about more than 90%.
Main improvement place of the present invention is because the present invention has adopted described electrically conducting transparent type oxide layer 114 between high reflecting metal layer 116 and described transparent ohmic contact layer 110 as can be seen, can prevent reflective metal layer described in the high annealing processing procedure 116 and the reaction between the two of described transparent ohmic contact layer 110 like this.Generally speaking, described reflective metal layer 116 selected materials of aluminum, gold, silver almost can react with all III-V families, and annealing temperature is higher, and situation just more seriously.If both produce reaction tangible infringement will be arranged the reflective of described reflective metal layer 116.Add an inert layer: transparent conductivity type oxide layer 114 just can avoid described reflective metal layer 116 and the reaction between the two of described transparent ohmic contact layer 110 to take place fully.Therefore described reflective metal layer 116 can bear the annealing of high temperature, and does not have the problem of reflectivity variation.
Then, shown in Fig. 6 B, described AlGaInP light-emitting diode epitaxial layer 118 is adhered together with the conductive board 125 with high thermal conductivity and conductivity again.Have many semi-conducting materials to serve as, for example silicon substrate, silicon carbide substrate, aluminium nitride, copper and aluminium all are the good candidate as described conductivity and heat-conducting substrate material, because thermal diffusivity is good, therefore can bear higher electric current.Silicon substrate particularly, not only cheap and grind etching or cutting all is easy to, so silicon substrate is better selection.Shown in Fig. 6 B, at first silicon substrate 120 is wanted to mix with conductive impurities earlier.Subsequently, respectively deposit a metal level, in order to form ohmic contact metal layer 122 at described silicon substrate 120 upper and lower surfaces.Subsequently, the described ohmic contact metal layer 122 of one of them re-uses metal adhesion coating 124 AlGaInP light-emitting diode epitaxial layer 118 and ohmic contact metal layer 122 is adhered together.Metal adhesion coating 124 materials must have high adhesion strength and current conductivity, for example can be selected from scolding tin, low-temperature metal or metal silicide, all are good selections as PbSn, AuGe, AuBe, AuSi, Sn, In and PdIn etc. for example.For avoiding described metal adhesion coating 124 and described reflective metal layer 116 in the annealing process of high temperature, also to produce reaction, can optionally a diffused barrier layer 119 be deposited on earlier on the described reflective metal layer 116.Diffused barrier layer 119 can be selected from ITO, CTO or zinc oxide etc., or other dystectic refractory metal layers all can, for example tungsten, tungsten nitride, molybdenum and some high-temperature metal silicides can be selected for use.Certainly if earlier might as well be thicker during described reflective metal layers 116 depositions of 119 of described diffused barrier layers of deposition.In addition, though note that it is example that Fig. 6 B is formed at earlier on the ohmic contact metal layer 122 with metal adhesion coating 124, does not represent to limit the scope of the invention, because metal adhesion coating 124 also can directly be formed on the reflective metal layer earlier, or all can on the diffused barrier layer 119.Ohmic contact metal layer 122 in addition, also can not need metal adhesion coating 124, as long as can make reflective metal layer 116 and substrate 120 be adhered together for low-melting-point metal (for example fusing point is the metal between 300 to 600 ℃) or alloy.
After adhesion, subsequently, re-use and grind or chemical etching mixture (as: 5H
3PO
4: 3H
2O
2: 3H
2O or 1NH
4OH: 35H
2O
2) or reactive ion etch technology (reaction ion etchingl; RIE) described lighttight n p type gallium arensidep substrate 100 is removed, and rested on the described etch stop layer 102.Subsequently, form again a n type ohmic contact layer 130 on described etch stop layer 102 with as electrode, its result is shown in Fig. 6 C.Certainly, need anneal subsequently, in order to the ohmic contact resistance is reduced, to finish the up rightness conduction of current and to have the making of the AlGaInP light-emitting diode of good heat radiating ability.
The AlGaInP light-emitting diode wave-length coverage of finishing according to processing procedure of the present invention is about 585 to 630nm, and lumen illumination is about 30 lumens/watt.Brightness is to increase with the electric current that injects in addition, and electric current also can reach 100mA.Proved that silicon is better than using the substrate of GaAs really as baseplate material, though the above embodiments illustrate as embodiment with the AlGaInP light-emitting diode, but the diode kind of not representing restriction the present invention to be suitable for, aluminum gallium arsenide (AlGaAs) light-emitting diode for example, gallium arsenide phosphide indium (InGaAsP) light-emitting diode, aluminum indium gallium nitride (AlGaInN) light-emitting diode or vertical cavity formula wall emission laser (vertical cavity surface emitting laser) also can be suitable for.
Below get aluminum indium gallium nitride (AlGaInN) light-emitting diode and other variations of the present invention are described as second embodiment.Please refer to Fig. 7 A, show the multilayer stacked crystal layer structure part of described aluminum indium gallium nitride light-emitting diode among the figure.Aluminum indium gallium nitride multilayer epitaxial layer 215 be grow up temporary and have on the silicon substrate 200 of a resilient coating 202 one.Resilient coating 202 can be that the armorphous aluminium nitride or the aluminium nitride of compound crystal type are deposited on the described silicon substrate 200 with sputtering method.Aluminum indium gallium nitride (AlGaInN) light-emitting diode epitaxial structure comprises a n type gallium nitride 204, one indium gallium nitride multiple quantum traps (Multiple Quantum Well; MQW) 206, one thin ohmic contact metal layer (Transparent Ohmic Contact Layer with p type gallium nitride 208, one light transmissions of organic metal vapour deposition process (MOVPE) deposition; TCL) 210, for example the nickel of 100 dust thickness/gold layer is deposited on the described p type gallium nitride 208, then, more in regular turn a deposit transparent conductivity type oxide layer 212 and a high reflecting metal layer 214 on described TCL layer 210.
Subsequently, aluminum indium gallium nitride (AlGaInN) the light-emitting diode epitaxial structure layer 215 that will be formed at again on the described temporary silicon substrate 200 is adhered on another silicon substrate 220, shown in Fig. 7 B.Identical with the last embodiment shown in Fig. 6 B, silicon substrate 220, conductive doped property impurity is deposited on the described silicon substrate 220 with an ohmic contact metal layer 222 more earlier.Same, can form earlier on the reflective metal layer 214 a conductivity oxide layer 226 or high-temperature metal layer as diffused barrier layer to prevent the reaction of metal adhesion coating 224 and reflective metallic 214.After described silicon substrate 220 and described reflective metallic 214 adhesions, described temporary silicon substrate 200 and resilient coating 202 then utilize wherein any of grinding, polishing, etching or its combination to remove.Because hardness, chemical and aluminum indium gallium nitride (AlGaInN) the light-emitting diode epitaxial layer of silicon is very different, silicon substrate 200, can just rest on the n type gallium nitride 204 when removing method and removing at an easy rate with aforesaid.At last, form a n type Ohm contact electrode 218 again on n type gallium nitride 204, and impose cycle of annealing to finish the up rightness conduction of current and to have the making of the aluminum indium gallium nitride light-emitting diode of good heat radiating ability.
The present invention can be applied to vertical cavity formula wall emission laser as described above, for example the AlGaInP vertical cavity formula wall emission laser of 650nm to 670nm.With GaAs the AlGaInP wall emission laser of substrate owing to have electric current to leak and the problem of heat radiation, can't under the environment of high temperature, use usually.And because the AlGaAs/AlAs DBR refringence opposite sex is very little and deposition needs long one-tenth long-time, cause disperseing the Bragg reflecting layer neither be perfect, use reflective metallic of the present invention to be incorporated into p type DBR and not only can reduce the logarithm of required AlGaAs/AlAs P-DBR and become to shorten for a long time.Whole vertical resonant wall emission laser can be adhered on the silicon substrate of high thermal conductivity, so the high-temperature operation characteristic can be improved.
The present invention and following some benefit is arranged:
Therefore (1) provide a kind of light emitting diode construction of vertical injection current type, and only needed a single gold thread to get final product, can simplify the encapsulation procedure of light-emitting diode and reduce production costs.
(2) size of light-emitting diode can greatly reduce, and makes the LED crystal particle number of every wafer output increase.
(3) have good thermal diffusivity, so LED there is preferably the reliability performance, and can operates under the high current density.
(4) a large amount of easily production, yield height and cost are low.
(5) reflective metal layer can bear higher temperature, and is unlikely the problem of reflective metallic quality badness, therefore can provide wafer fabrication bigger elasticity.
The above is preferred embodiment of the present invention only, is not in order to limiting claim of the present invention, and all other do not break away from the equivalence of being finished under the disclosed spirit and change or modify, and all should be included within the scope of this case claim protection.
Claims (23)
1. light-emitting diode, it is characterized in that: it comprises at least:
One conductor substrate;
One light-emitting layer structure has plural layer light-emitting diode epitaxial layer, produces light after injecting when electric current;
One electrically conducting transparent type oxide layer is formed on this light-emitting layer structure;
One reflective metal layer is formed on this electrically conducting transparent type oxide layer; And
One metal adhesion coating adhere this conductor substrate and this reflective metal layer are to form this light-emitting diode.
2. light-emitting diode as claimed in claim 1 is characterized in that: wherein above-mentioned conductor substrate is the good conductor of heat conduction and conduction.
3. light-emitting diode as claimed in claim 1 is characterized in that: the material of wherein above-mentioned conductor substrate is to be selected from wherein a kind of of the group that is made up of copper, aluminium, SiC, AlN and silicon.
4. light-emitting diode as claimed in claim 1 is characterized in that: wherein above-mentioned electrically conducting transparent type oxide layer is for being selected from by In
2O
3, SnO
2, CdO, ZnO, ITO (tin indium oxide), CTO (cadmium tin), CuAlO
2, CuGaO
2And SrCu
2O
2Wherein a kind of of the group that is formed.
5. light-emitting diode as claimed in claim 1 is characterized in that: wherein above-mentioned reflective metal layer is to be selected from wherein a kind of of the group that is made up of gold, silver, aluminium.
6. light-emitting diode as claimed in claim 1 is characterized in that: wherein above-mentioned metal adhesion coating is to be selected from wherein a kind of of In, Sn, Au-Be alloy, Au-Si alloy, Pb-Sn alloy, Au-Ge alloy and PdIn alloy.
7. light-emitting diode as claimed in claim 1 is characterized in that: more comprise a diffused barrier layer and be formed between this reflective metal layer and this metal adhesion coating.
8. light-emitting diode as claimed in claim 7 is characterized in that: wherein above-mentioned diffusion barrier layer material is to be selected from wherein a kind of of the group that is made up of conductivity oxide layer, high-temperature metal layer, high-temperature metal silicide layer.
9. light-emitting diode, it is characterized in that: it is comprised at least by lower floor to upper strata:
One conductor substrate;
One reflective metal layer is formed on this conductor substrate;
One electrically conducting transparent type oxide layer is formed on this reflective metal layer; And
One light-emitting layer structure is formed on this electrically conducting transparent type oxide layer, and this light-emitting layer structure has plural layer light-emitting diode epitaxial layer, produces light after injecting when electric current.
10. light-emitting diode as claimed in claim 9 is characterized in that: wherein above-mentioned conductor substrate is the good conductor of heat, also is simultaneously the good conductor of electricity.
11. light-emitting diode as claimed in claim 9 is characterized in that: the material of wherein above-mentioned conductor substrate is to be selected from wherein a kind of of the group that is made up of copper, aluminium, SiC, AlN and silicon.
12. light-emitting diode as claimed in claim 9 is characterized in that: wherein above-mentioned electrically conducting transparent type oxide layer is for being selected from by In
2O
3, SnO
2, CdO, ZnO, ITO (tin indium oxide), CTO (cadmium tin), CuAlO
2, CuGaO
2And SrCu
2O
2Wherein a kind of of the group that is formed.
13. light-emitting diode as claimed in claim 9 is characterized in that: wherein above-mentioned reflective metal layer is to be selected from wherein a kind of of the group that is made up of gold, silver, aluminium.
14. light-emitting diode as claimed in claim 9, it is characterized in that: more comprise a metal adhesion coating and be formed between this reflective metal layer and this conductor substrate, this metal adhesion coating is to be selected from wherein a kind of of In, Sn, Au-Be alloy, Au-Si alloy, Pb-Sn alloy, Au-Ge alloy and PdIn alloy.
15. light-emitting diode as claimed in claim 14 is characterized in that: more comprise a diffused barrier layer and be formed between this reflective metal layer and this metal adhesion coating.
16. light-emitting diode as claimed in claim 15 is characterized in that: wherein above-mentioned diffusion barrier layer material is to be selected from wherein a kind of of the group that is made up of conductivity oxide layer, high-temperature metal layer, high-temperature metal silicide layer.
17. light-emitting diode, it is characterized in that: this light-emitting diode is by a conductor substrate, an one plural layer light-emitting diode epitaxial layer and a reflector are formed, this reflector is between this conductor substrate and this plural layer light-emitting diode epitaxial layer, in order to reflect the light that this plural layer light-emitting diode epitaxial layer produces, this reflector is made up of an electrically conducting transparent type oxide layer and a high-reflectivity metal layer, and this electrically conducting transparent type oxide layer connects this plural layer light-emitting diode epitaxial layer and high-reflectivity metal layer, in order to prevent the reaction between this high-reflectivity metal layer and this light-emitting diode epitaxial layer.
18. light-emitting diode as claimed in claim 17 is characterized in that: wherein above-mentioned conductor substrate is the good conductor of heat, also is simultaneously the good conductor of electricity.
19. light-emitting diode as claimed in claim 17 is characterized in that: the material of wherein above-mentioned conductor substrate is to be selected from wherein a kind of of the group that is made up of copper, aluminium, SiC, AlN and silicon.
20. light-emitting diode as claimed in claim 17 is characterized in that: wherein above-mentioned electrically conducting transparent type oxide layer is for being selected from by In
2O
3, SnO
2, CdO, ZnO, ITO (tin indium oxide), CTO (cadmium tin), CuAlO2, CuGa
2And SrCu
2O
2Wherein a kind of of the group that is formed.
21. light-emitting diode as claimed in claim 17 is characterized in that: wherein above-mentioned reflective metal layer is to be selected from wherein a kind of of the group that is made up of gold, silver, aluminium.
22. a manufacturing method for LED is characterized in that: this method comprises following steps at least:
One light-emitting diode epitaxial layer is provided, and this epitaxial layer comprises plural layer III-V compound semiconductor layer and is formed on the temporary substrate;
Form a light transmission conductive oxide layer on this epitaxial layer;
Form a reflective metal layer on this light transmission conductive oxide layer;
One conductor substrate is provided, and this conductor substrate has the upper surface of first ohmic contact metal layer in this conductor substrate, and one second ohmic contact metal layer is in the lower surface of this conductor substrate;
Utilize a low-melting-point metal adhesion coating that this first ohmic contact metal layer and this reflective metal layer are pasted together;
Remove this temporary substrate; And
Form the exposed surface of an ohmic contact metal layer, with as Ohm contact electrode in this light-emitting diode epitaxial layer.
23. method as claimed in claim 22 is characterized in that: more comprise earlier formation one diffused barrier layer carries out this low-melting-point metal adhesion coating adhesion step again on this reflective metal layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB021061327A CN1198339C (en) | 2002-04-04 | 2002-04-04 | Structure of light-emitting diode and method for making the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB021061327A CN1198339C (en) | 2002-04-04 | 2002-04-04 | Structure of light-emitting diode and method for making the same |
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| Publication Number | Publication Date |
|---|---|
| CN1449060A true CN1449060A (en) | 2003-10-15 |
| CN1198339C CN1198339C (en) | 2005-04-20 |
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| CN104347773B (en) * | 2013-08-01 | 2018-05-11 | 新世纪光电股份有限公司 | Light emitting diode construction |
| CN108321273B (en) * | 2013-08-01 | 2020-01-07 | 新世纪光电股份有限公司 | Light emitting diode structure |
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| WO2020132843A1 (en) * | 2018-12-24 | 2020-07-02 | 泉州三安半导体科技有限公司 | Light-emitting diode and manufacturing method thereof |
| CN110710002A (en) * | 2018-12-24 | 2020-01-17 | 泉州三安半导体科技有限公司 | Light emitting diode and manufacturing method thereof |
| US20210226095A1 (en) * | 2018-12-24 | 2021-07-22 | Quanzhou Sanan Semiconductor Technology Co., Ltd. | Light-emitting diode and manufacturing method thereof |
| JP2022508781A (en) * | 2018-12-24 | 2022-01-19 | 泉州三安半導体科技有限公司 | Light emitting diode and its manufacturing method |
| JP7154429B2 (en) | 2018-12-24 | 2022-10-17 | 泉州三安半導体科技有限公司 | Light emitting diode and manufacturing method thereof |
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