CN1431530A - Multi-mode interference coupler based on ridge type light wave guide - Google Patents
Multi-mode interference coupler based on ridge type light wave guide Download PDFInfo
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- 230000003628 erosive effect Effects 0.000 claims description 102
- 230000003287 optical effect Effects 0.000 claims description 21
- 238000005530 etching Methods 0.000 claims description 6
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- 230000037431 insertion Effects 0.000 abstract description 3
- 230000010354 integration Effects 0.000 abstract 1
- 230000008878 coupling Effects 0.000 description 32
- 238000010168 coupling process Methods 0.000 description 32
- 238000005859 coupling reaction Methods 0.000 description 32
- 230000007246 mechanism Effects 0.000 description 30
- 238000003384 imaging method Methods 0.000 description 10
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- 238000000034 method Methods 0.000 description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 3
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- 229910052906 cristobalite Inorganic materials 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
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- 239000000377 silicon dioxide Substances 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 239000002210 silicon-based material Substances 0.000 description 2
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- 240000007762 Ficus drupacea Species 0.000 description 1
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- 230000009931 harmful effect Effects 0.000 description 1
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Abstract
The coupler includes at least one input wave-guide, one MMI area and at least one output wave-guide. The input wave-guide through the MMI area is connected to the output wave-guide. At least one input wave-guide from the input to the output is composed of the shallow etched area and the taper area. The MMI area is the deep etched area. At least one output wave-guide from the input to the output is composed of the taper area and the shallow etched area. The deep etched wave-guide area could be connected to place between the taper area and the MMI deep etched area. The invention solves the issue of multimode interference in vertical direction as well as the insertion loss and the channels uniformity existed in the traditional MMI coupler. The invention possesses the advantages of easy to connect to other integrated wave-guide, increasing the quality of the self-image and the integration level etc.
Description
Technical field
The present invention relates to integrated light guide merit branch technical field, particularly relate to a kind of multi-mode interference coupler based on ridge optical waveguide.
Background technology
Optical power distributor/wave multiplexer is a very important element in the optical system.There are a lot of method and structures can realize merit branch function, as Y branch, X branch, directional coupler, star coupler, multiple-mode interfence (MMI) coupling mechanism etc., superiority such as wherein the MMI coupling mechanism has that size is little, tolerance is big, low-loss, big bandwidth, polarization irrelevant and high uniformity, thereby the MMI coupling mechanism is the most attractive.
Through years of development, the material that is used to make optical waveguide has a variety of materials, comprises SiO
2, Si, GaAs, InP, polymkeric substance macromolecular material etc.Especially since the loss of ridge optical waveguide in 1.3～1.5 μ m windows based on the silicon materials on the insulator (SOI) material is reduced to 0.1dB/cm, silicon materials light integrated technology is developed rapidly, and a large amount of SOI optical waveguide integrated devices are developed out.The SOI material has lot of advantages, especially has good compatibility with existing integrated circuits.This point is had an optimistic view of very much, thereby obtains extensive studies and application.
Ridge optical waveguide is a kind of common waveguide type, and the material of employing has SOI, GaAs, InP etc. usually.Traditional ridge MMI coupler structure mainly is made up of input waveguide 1, MMI zone 2 and output waveguide 3 as shown in Figure 1.Input waveguide 1, output waveguide 3 are identical with the etching depth in MMI zone 2.Because the restriction of single mode condition is light engraving erosion (etching depth h
r≤ H
Max, H
MaxFor satisfying the depth capacity of single mode condition).Light enters MMI zone 2 from input waveguide 1 incident, and multimode interference effect takes place, and forms and has image effect of one's own, and the tail end in MMI zone 2 forms N picture, places an output waveguide in the position of each picture, can realize the function that merit is divided.Tradition ridge MMI coupling mechanism has the shortcoming of some, and is relevant with etching depth as the image quality in ridge MMI zone.For the ridge waveguide of light engraving erosion, because restriction dies down the image quality variation in MMI zone.Image quality not only can have influence on insertion loss, the channels uniformity of device, and owing to there is the interface (as the SOI waveguide) of big refringence, the bad meeting of image quality causes stronger reflection.
When the refractive index of the core material (as the Si material in the SOI waveguide) of ridge waveguide and air differs very big, also there is multiple-mode interfence usually in vertical direction, multiple-mode interfence on this vertical direction can produce some harmful effects to the MMI coupling mechanism, inserts loss etc. as increasing.
Summary of the invention
The purpose of this invention is to provide a kind of multi-mode interference coupler, adopt deep erosion (etching depth h with taper structure based on ridge optical waveguide
r＞H
Max) the MMI coupling mechanism solves problems such as insertion loss that traditional MMI coupling mechanism exists, channels uniformity.
The technical solution used in the present invention is: comprise at least one input waveguide, regional and at least one output waveguide of MMI, input waveguide is connected with output waveguide by the MMI zone; At least one input waveguide is made up of light engraving erosion zone, taper regional (conical region) from being input to output; The MMI zone is deep erosion zone; At least one output waveguide is made up of taper zone, light engraving erosion zone from being input to output;
Advantage of the present invention:
1. the tip designs of I/O waveguide is light engraving erosion zone (single mode ridge waveguide), can make things convenient for the coupling efficiency that is connected and improves the standard single-mode fiber coupling with other SOI integrated optical wave guide devices.
2.MMI zone design is deep erosion zone, improves greatly and has improved the picture element amount that has of one's own in MMI zone, has solved in traditional MMI coupling mechanism because problem such as light engraving erosion causing imaging is imperfect.
3. in the mould field matching degree raising in vertical direction input and MMI zone, reduced the high-order mode component that excites, solved the multiple-mode interfence problem of vertical direction.
4. can the type structure be buried by the ridge structure in the MMI zone instead by deep erosion, more more simple and convenient in the design than ridge MMI coupling mechanism.
5. because the I/O waveguide bend partly can be deep erosion, can reduce bending radius greatly, thereby reduce device size, improve integrated level.
Description of drawings
Fig. 1 is traditional MMI coupling mechanism three-dimensional structure synoptic diagram;
Fig. 2 is the structural representation of the present invention 1 * N MMI coupling mechanism;
Fig. 3 is the three-dimensional structure synoptic diagram of A among Fig. 2;
Fig. 4 is first kind of the present invention and implements illustration;
Fig. 5 is second kind of the present invention and implements illustration;
Fig. 6 is that of the present invention the third implemented illustration;
Fig. 7 is the 4th kind of the present invention and implements illustration;
Fig. 8 is the ridge optical waveguide sectional view;
Fig. 9 is the light field transmission in Taper zone;
Figure 10 is the mould spot of Taper zone output terminal;
Figure 11 is the interference imaging of traditional MMI coupling mechanism;
Figure 12 is the output mould spot of traditional MMI coupling mechanism;
Figure 13 is the interference imaging of MMI coupling mechanism of the present invention;
Figure 14 is the output mould spot of MMI coupling mechanism of the present invention.
Embodiment
Shown in Fig. 2,3,4,5,6,7, a kind of multi-mode interference coupler based on ridge optical waveguide comprises at least one input waveguide, regional and at least one output waveguide of MMI, and input waveguide is connected with output waveguide by the MMI zone.At least one input waveguide is made up of light engraving erosion zone 8, taper zone 9 from being input to output; The MMI zone is deep erosion zone 11; At least one output waveguide is made up of taper zone 13, light engraving erosion zone 14 from being input to output;
Inputing or outputing taper waveguide region 9 in the waveguide and MMI loses deeply between the zone 11 and is connected with deep erosion waveguide region 10.
Shown in Fig. 4,5,6,7, the light engraving of input waveguide erosion zone 8 and taper zone 9 are connected MMI and lose before the zone 11 deeply or the light engraving of input waveguide erosion zone 4 and taper zone 5 are connected before the curved waveguide 7.
Shown in Fig. 4,5,6,7, the taper of output waveguide zone 13 and light engraving erosion zone 14 are connected to MMI in turn and lose after the zone 11 deeply or the taper of output waveguide zone 17 and light engraving erosion zone 18 are connected in turn after the curved waveguide 15.
Shown in Fig. 4,5,6,7, the light engraving of input waveguide erosion zone 8, taper zone 9 and lose wave guide zone 10 deeply and be connected to MMI in turn and lose before the zone 11 deeply or the light engraving of input waveguide erosion zone 4, taper zone 5 and lose wave guide zone 6 deeply and be connected in turn before the curved waveguide 7.
Shown in Fig. 4,5,6,7, the deep erosion waveguide region 12 of output waveguide, taper zone 13 and light engraving erosion zone 14 are connected to MMI in turn and lose after the zone 11 deeply or the deep erosion waveguide region 16 of output waveguide, taper zone 17 and light engraving erosion zone 18 are connected in turn after the curved waveguide 15.
As shown in Figure 3, taper zone is for only all having the structure of taper in vertical direction or in the horizontal direction with on the vertical direction.
As shown in Figure 3, MMI loses zone 11 deeply and is the multimode ridge waveguide of deep erosion or the type of the burying multimode waveguide of full etching.
Fig. 2 is 1 * N MMI coupling mechanism, and 1 * N coupling mechanism comprises an input waveguide, loses MMI zone and N bar output waveguide deeply.Input waveguide comprises light engraving erosion part 4, taper zone 5 and deep erosion zone 6.Output waveguide comprises light engraving erosion part 18, taper zone 17, deep erosion zone 16 and loses curved waveguide 15 deeply.Light through taper zone 5, enters deep erosion zone 6 from input waveguide 4 inputs, light field mould spot is converted to the eigenmode of deep erosion waveguide 6 by the eigenmode of single mode ridge waveguide 4, as input, incides deep erosion MMI zone 11 then, multiple-mode interfence takes place, and produces from imaging.At the MMI end, each picture is coupled to the deep erosion part 12 of corresponding output waveguide respectively, passes through taper zone 16 again, and the mould spot changes the eigenmode of single mode ridge waveguide 18 into.Realized the function that light is divided equally like this.
Fig. 4 is M * N MMI coupling mechanism.M * N MMI coupling mechanism comprises M bar input waveguide, loses MMI zone and N bar output waveguide deeply.Input waveguide comprises light engraving erosion part 4, taper zone 5 and deep erosion zone 6.Output waveguide comprises light engraving erosion part 18, taper zone 17 and deep erosion zone 16 and loses curved waveguide 15 deeply.Light is from 4 inputs of input waveguide light engraving erosion zone, through taper zone 5, enter deep erosion straight wave guide 6, light field mould spot is converted to the eigenmode of deep erosion straight wave guide 6 by the eigenmode of single mode ridge waveguide 4, incide deep erosion MMI zone 11 from deep erosion curved waveguide 7, multiple-mode interfence takes place, and produces from imaging.At the MMI end, each the picture respectively be coupled to corresponding output waveguide deep erosion curved waveguide 15, lose straight wave guide 16 deeply, pass through taper zone 17 again, the mould spot changes the eigenmode of single mode ridge waveguide 18 into.Realized the function that light is divided equally like this.
Fig. 5 is M * N MMI coupling mechanism.M * N MMI coupling mechanism comprises M bar input waveguide, loses MMI zone and N bar output waveguide deeply.Input waveguide comprises light engraving erosion part 4, taper zone 5 and deep erosion zone 6.Output waveguide comprises light engraving erosion curved waveguide 15, light engraving erosion straight wave guide 14, taper zone 13 and deep erosion zone 12.Light is from 4 inputs of input waveguide light engraving erosion zone, through taper zone 5, enter deep erosion straight wave guide 6, light field mould spot is converted to the eigenmode of deep erosion straight wave guide 6 by the eigenmode of single mode ridge waveguide 4, incide deep erosion MMI zone 11 from deep erosion curved waveguide 7, multiple-mode interfence takes place, and produces from imaging.At the MMI end, each picture is coupled to the deep erosion straight wave guide 12 of corresponding output waveguide respectively, passes through taper zone 13 again, and the mould spot changes the eigenmode of single mode ridge waveguide 14 into, at last through 15 outputs of light engraving erosion curved waveguide.Realized the function that light is divided equally like this.
Fig. 6 is M * N MMI coupling mechanism.M * N MMI coupling mechanism comprises M bar input waveguide, loses MMI zone and N bar output waveguide deeply.Input waveguide comprises light engraving erosion curved waveguide 7, light engraving erosion straight wave guide 8, taper zone 9 and deep erosion zone 10.Output waveguide comprises light engraving erosion part 18, taper zone 17, deep erosion zone 16 and loses curved waveguide 15 deeply.Light incides light engraving erosion curved waveguide 7, be input to light engraving erosion zone 8, through taper zone 9, enter deep erosion straight wave guide 10, light field mould spot is converted to the eigenmode of deep erosion straight wave guide 10 by the eigenmode of single mode ridge waveguide 8, incide deep erosion MMI zone 11 from deep erosion curved waveguide 10, multiple-mode interfence takes place, produce from imaging.At the MMI end, each the picture respectively be coupled to corresponding output waveguide deep erosion curved waveguide 15, lose straight wave guide 16 deeply, pass through taper zone 17 again, the mould spot changes the eigenmode of single mode ridge waveguide 18 into.Realized the function that light is divided equally like this.
Fig. 7 is M * N MMI coupling mechanism.M * N MMI coupling mechanism comprises M bar input waveguide, loses MMI zone and N bar output waveguide deeply.Input waveguide comprises light engraving erosion curved waveguide 7, light engraving erosion straight wave guide 8, taper zone 9 and deep erosion zone 10.Output waveguide comprises light engraving erosion curved waveguide 15, light engraving erosion straight wave guide 14, taper zone 13 and deep erosion zone 12.Light incides light engraving erosion curved waveguide 7, be input to light engraving erosion zone 8, through taper zone 9, enter deep erosion straight wave guide 10, light field mould spot is converted to the eigenmode of deep erosion straight wave guide 10 by the eigenmode of single mode ridge waveguide 8, incide deep erosion MMI zone 11 from deep erosion curved waveguide 10, multiple-mode interfence takes place, produce from imaging.At the MMI end, each picture is coupled to the deep erosion straight wave guide 12 of corresponding output waveguide respectively, passes through taper zone 13 again, and the mould spot changes the eigenmode of single mode ridge waveguide 14 into, at last through 15 outputs of light engraving erosion curved waveguide.Realized the function that light is divided equally like this.
For the design of deep erosion ridge MMI coupling mechanism, can adopt the method for subregion design.With the propagation of 3D-BPM simulated light in taper zone and curved waveguide, realize the optimal design of taper structure and curved waveguide.For the image effect that has of one's own in MMI zone, can adopt 3D-MPA method and 3D-BPM method.
Design one 1 * 4 MMI coupling mechanism based on the SOI material.According to single mode condition, following structural parameters have been selected: the wide W of ridge
r=4 μ m, the high h of ridge
r=2.0 μ m, Si layer thickness h
2=5 μ m, Si layer refractive index n
2=3.455, SiO2 layer refractive index n
2=1.46, calculate wavelength X=1.55 μ m, the oxidized one deck SiO2 of upper surface.SOI ridge optical waveguide structure as shown in Figure 8.The MMI peak width is 40 μ m, and length is about the m.1.Taper regional light field transmission of 915 μ
Pass through the process of taper structural transition to ridge waveguide from the zone of deep erosion, as long as taper structure long enough, energy is not loss almost.At this, as one of embodiment, the length of design taper is 800 μ m.Fig. 9 is a taper zone light field transmission course, Figure 10 is a taper area light output terminal mould spot, from Fig. 9,10 as seen, almost can change light engraving fully into behind the process taper zone, the regional waveguide eigenmode of deep erosion field and lose regional waveguide eigenmode field, the output field energy has kept 99.22%, loss is minimum, can ignore.2.MMI regional multiple-mode interfence and output thereof
Figure 11,12 is the interference imaging and output mould spot of traditional SOI-MMI.Its MMI zone length and slightly change with MPA method calculated value is about 960 μ m.Traditional as seen from the figure light engraving erosion MMI coupling mechanism image quality is relatively poor, and each passage unevenness and added losses are all bigger.
Figure 13,14 interference imagings and output mould spot for SOI-MMI of the present invention.The result shows with traditional SOI-MMI coupling mechanism and compares that the performance of MMI coupling mechanism of the present invention has the raising of highly significant.
Claims (8)
1. the multi-mode interference coupler based on ridge optical waveguide comprises at least one input waveguide, regional and at least one output waveguide of MMI, and input waveguide is connected with output waveguide by the MMI zone; It is characterized in that at least one input waveguide is made up of light engraving erosion zone (8), taper zone (9) from being input to output; The MMI zone is deep erosion zone (11); At least one output waveguide is made up of taper zone (13), light engraving erosion zone (14) from being input to output.
2. a kind of multi-mode interference coupler based on ridge optical waveguide as claimed in claim 1 is characterized in that inputing or outputing taper waveguide region (9) in the waveguide and MMI and loses deeply and be connected with deep erosion waveguide region (10) between the zone (11).
3. a kind of multi-mode interference coupler as claimed in claim 1, the light engraving erosion zone (8) and taper zone (9) that it is characterized in that input waveguide based on ridge optical waveguide be connected MMI lose deeply zone (11) before or the light engraving of input waveguide erosion regional (4) and taper zone (5) be connected curved waveguide (7) before.
4. a kind of multi-mode interference coupler as claimed in claim 1 based on ridge optical waveguide, it is characterized in that the taper zone (13) of output waveguide and light engraving erosion zone (14) be connected in turn MMI lose deeply zone (11) afterwards or the taper zone (17) of output waveguide and light engraving erosion regional (18) be connected to curved waveguide (15) in turn afterwards.
5. a kind of multi-mode interference coupler based on ridge optical waveguide as claimed in claim 1, light engraving erosion zone (8), taper zone (9) and the deep erosion wave guide zone (10) that it is characterized in that input waveguide are connected to MMI in turn and lose zone (11) deeply before or the light engraving of input waveguide erosion zone (4), taper zone (5) and lose wave guide zone (6) deeply and be connected to curved waveguide (7) in turn before.
6. a kind of multi-mode interference coupler as claimed in claim 1 based on ridge optical waveguide, it is characterized in that the deep erosion waveguide region (12), taper zone (13) of output waveguide and light engraving erosion zone (14) be connected in turn MMI lose deeply zone (11) afterwards or the deep erosion waveguide region (16) of output waveguide, taper zone (17) and light engraving erosion regional (18) be connected to curved waveguide (15) in turn afterwards.
7. as the described a kind of multi-mode interference coupler of claim 1～6, it is characterized in that said taper zone is for only all having the structure of taper in vertical direction or in the horizontal direction with on the vertical direction based on ridge optical waveguide.
8. a kind of multi-mode interference coupler based on ridge optical waveguide as claimed in claim 1 is characterized in that MMI loses zone (11) deeply and is the multimode ridge waveguide of deep erosion or the type of the burying multimode waveguide of full etching.
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|---|---|---|---|
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| CN102844695A (en) * | 2010-03-29 | 2012-12-26 | 英特尔公司 | Multimode optical coupler interfaces |
| CN103023600A (en) * | 2012-10-17 | 2013-04-03 | 浙江大学 | Multi-channel integrating light guide mode multiplexing-demultiplexing device |
| CN103091869A (en) * | 2013-02-05 | 2013-05-08 | 中国科学院半导体研究所 | Integrated coherent-light-communication electro-optical modulator structure |
| CN104965258A (en) * | 2015-07-22 | 2015-10-07 | 湖南晶图科技有限公司 | Star coupler with power being uniformly distributed, and arrangement method therefor |
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| CN108732682A (en) * | 2018-05-29 | 2018-11-02 | 聊城大学 | A kind of preparation method of the full crystal waveguide beam splitter of multi-mode interference-type |
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- 2003-01-13 CN CNB03114893XA patent/CN1180284C/en not_active Expired - Fee Related
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| CN102844695A (en) * | 2010-03-29 | 2012-12-26 | 英特尔公司 | Multimode optical coupler interfaces |
| CN103023600A (en) * | 2012-10-17 | 2013-04-03 | 浙江大学 | Multi-channel integrating light guide mode multiplexing-demultiplexing device |
| CN103023600B (en) * | 2012-10-17 | 2015-05-20 | 浙江大学 | Multi-channel integrating light guide mode multiplexing-demultiplexing device |
| CN103091869A (en) * | 2013-02-05 | 2013-05-08 | 中国科学院半导体研究所 | Integrated coherent-light-communication electro-optical modulator structure |
| CN103091869B (en) * | 2013-02-05 | 2018-08-10 | 中国科学院半导体研究所 | Integrated coherent light communication electrooptical modulator structure |
| CN104965258B (en) * | 2015-07-22 | 2018-03-27 | 湖南晶图科技有限公司 | The star coupler and its method to set up that a kind of power evenly distributes |
| CN104965258A (en) * | 2015-07-22 | 2015-10-07 | 湖南晶图科技有限公司 | Star coupler with power being uniformly distributed, and arrangement method therefor |
| CN105467518A (en) * | 2015-12-29 | 2016-04-06 | 北京大学 | Star coupler for adjustment of light power division ratio and realization method for same |
| CN105467518B (en) * | 2015-12-29 | 2019-05-21 | 北京大学 | A kind of tunable optical function divides the star coupler and its implementation of ratio |
| CN108732682A (en) * | 2018-05-29 | 2018-11-02 | 聊城大学 | A kind of preparation method of the full crystal waveguide beam splitter of multi-mode interference-type |
| CN111458796A (en) * | 2020-04-22 | 2020-07-28 | 中国计量大学 | Optical coupler with four-slot waveguide |
| CN112904477A (en) * | 2021-03-05 | 2021-06-04 | 东南大学 | Polarization insensitive optical power divider based on shallow etching multimode interference coupler |
| CN112904477B (en) * | 2021-03-05 | 2022-05-10 | 东南大学 | Polarization insensitive optical power divider based on shallow etching multimode interference coupler |
| CN114637072A (en) * | 2022-01-18 | 2022-06-17 | 浙江大学 | Shallow etching multimode interference coupled multi-channel flat-top wavelength division multiplexing receiver |
| CN114637072B (en) * | 2022-01-18 | 2023-10-13 | 浙江大学 | Shallow etching multimode interference coupling multichannel flat-top type wavelength division multiplexing receiver |
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|---|---|
| CN1180284C (en) | 2004-12-15 |
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