CN1414136A - Tube type work piece inner surface beam ion implantation installation - Google Patents
Tube type work piece inner surface beam ion implantation installation Download PDFInfo
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- CN1414136A CN1414136A CN 02133102 CN02133102A CN1414136A CN 1414136 A CN1414136 A CN 1414136A CN 02133102 CN02133102 CN 02133102 CN 02133102 A CN02133102 A CN 02133102A CN 1414136 A CN1414136 A CN 1414136A
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Abstract
An ion beam implantation equipment for the inner surface of tubular workpiece is composed of ion implantation machine, vacuum chamber and deflector in the hole of workpiece. Said deflector has axial electrodes, ground electrode and radial electrode.
Description
Technical field: the present invention relates to a kind of tube type work piece inner surface be implemented ion implantation device, particularly the elongated tubular inwall is implemented ion implantation device.
Background technology: ion implantation is a kind of method of effective surface optimization, and it can introduce various ions at workpiece or device surface, and not limited by classical epuilibrium thermodynamics.But because the sight line (rectilinearity) of ion run trace makes this technology be difficult to handle the inner wall surface of socket workpiece, elongated tubular especially, ion almost is parallel to the inwall of pipe, and it almost is impossible making the ion implantation of elongated tubular.And bigger implant angle makes sputter very serious, and the vertical range of ionic is also more shallow simultaneously, does not reach modified effect.
Summary of the invention: the present invention is difficult to carry out ion implantation problem a kind of tube type work piece inner surface beam ion implantation installation is provided for solving elongated cylindrical workpiece internal surface.This device includes ion implanter 1 and vacuum chamber 2, this device also includes the inflector assembly 3 that an ionic fluid that ion implanter 1 is sent deflects in the endoporus of the workpiece A of socket shape, inflector assembly 3 is arranged in the endoporus of workpiece A, inflector assembly 3 includes axial electrode 3-1 and the ground-electrode 3-2 that produces with ionic fluid heading opposite electric field, and be arranged on radial electrode 3-3 between axial electrode 3-1 and the ground-electrode 3-2, the axis of axial electrode 3-1 and ground-electrode 3-2 and workpiece A is perpendicular, have a hole 3-4 who makes ionic fluid directive axial electrode 3-1 on ground-electrode 3-2, the axis of radial electrode 3-3 and workpiece A is parallel to each other.Workpiece A ground connection during work forms radial electric field between the tube wall of radial electrode 3-3 and workpiece A.In the said apparatus, the running orbit of ionic fluid in the endoporus of the workpiece A of socket shape is: before ion enters inflector assembly 3, and rectilinear flight; Ion enters after the inflector assembly 3, and ion is subjected to the compound action of two electric fields, and ion is owing to the effect that is subjected to the axial electric field opposite with heading is slowed down on the one hand; Ion is subjected to the effect of radial electric field and turns on the other hand, and flies to tube wall.Tube type work piece inner surface beam ion implantation installation of the present invention is owing to be provided with the inflector assembly 3 that ionic fluid is deflected in the workpiece endoporus, it makes the ion that enters in the socket carry out deflection near decanting point, be that ion enters socket inside along the central axes direction of socket earlier, after entering inflector assembly, fly to tube wall.By means of making inflector assembly 3, can scan the inwall of socket workpiece to inject and handle with respect to the device of workpiece along axis rotation and translation.The ion implantation energy of this device depends on the size of radial electric field, and the voltage swing of axial electrode 3-1 depends on the ionic original speed.This device has thoroughly solved the ion implantation problem of elongated socket work piece inner surface.
Description of drawings: Fig. 1 is the structural representation of embodiment one, and Fig. 2 is the structural representation of embodiment two, and Fig. 3 is the D-D sectional view of Fig. 2, and Fig. 4 is the structural representation of inflector assembly 3 in the embodiment three, and Fig. 5 is the E-E sectional view of Fig. 4.
Embodiment one: consult Fig. 1, the tube type work piece inner surface beam ion implantation installation of present embodiment comprises ion implanter 1, vacuum chamber 2, inflector assembly 3, is arranged on interior frame 4, cantilever shafts 5, supporter 6 in the vacuum chamber 2; Workpiece A is arranged on the inner support 4.Ion implanter 1 is located at the outside of vacuum chamber 2, and its outlet 1-1 is positioned at vacuum chamber 2, and ionic fluid is along the axial-movement of workpiece A.Inflector assembly 3 is arranged in the endoporus of workpiece A.Inflector assembly 3 is made up of axial electrode 3-1, ground-electrode 3-2, radial electrode 3-3 and isolator 3-5.The axis of axial electrode 3-1 and ground-electrode 3-2 and workpiece A is perpendicular, has hole 3-4 on ground-electrode 3-2, the dead in line of the medullary ray of hole 3-4 and workpiece A.Radial electrode 3-3 is located between axial electrode 3-1 and the ground-electrode 3-2, and radial electrode 3-3 is parallel with the axis of workpiece A.Radial electrode 3-3, axial electrode 3-1 and ground-electrode 3-2 are fixedly connected on the isolator 3-5.When ion implanter 1 injected positive ion, axial electrode 3-1 was connected with the positive pole of power supply 25, power supply 26 respectively with radial electrode 3-3; When ion implanter 1 injected negative ion, axial electrode 3-1 was connected with the negative pole of power supply 25 with power supply 26 respectively with radial electrode 3-3.Inflector assembly 3 is fixedly connected on the end of wall suspending axis 5, also is connected with annular supporter 6 on cantilever shafts 5, and the endoporus of the neighboring of supporter 6 and workpiece A forms and is slidingly matched, and said structure makes inflector assembly 3 be positioned at same radial position all the time in workpiece A.Also be provided with in the outside of vacuum chamber 2 and make the deflection transmission mechanism of inflector assembly along workpiece A axis translation and rotation, this device is made up of the support 7 that has guide rail 8, the slide plate 9 that matches with guide rail 8, movable motor 10, rotating machine 11 and pitch wheel 12 and tooth bar 13, movable motor 10 and rotating machine 11 all are fixed on the slide plate 9, the rotating shaft of rotating machine 11 is connected with cantilever shafts 5, the rotating shaft of movable motor 10 is fixedlyed connected with gear 12, the tooth bar 13 that be arranged in parallel with guide rail 8 is fixedly connected on the support 7, and guide rail 8 parallels with workpiece A axis.Be provided with dynamic seal 24 between cantilever shafts 5 and the vacuum chamber 2.Radial electrode 3-3, axial electrode 3-1 and ground-electrode 3-2 are slab structure.Rotating machine 11 periodic rotatings are in order to avoid lead twines.Cantilever shafts 5 and supporter 6 are made by insulating material.
Embodiment two: consult Fig. 2, Fig. 3, what present embodiment and embodiment one were different is: the outer end of cantilever shafts 5 is fixedly connected on the anchor 4-1 above the inner support 4.The deflection transmission mechanism that replaces embodiment one by the Workpiece transmission device that drives workpiece translational motion and rotation, this device is by the outer support 15 that has external slide rail 14, the sliding panel 16 that matches with external slide rail 14, the external toothing 17 that is fastenedly connected with workpiece A, with external toothing 17 engagement cog 18, the lower gear 20 of tooth bar 19 engagements below sliding panel 16, movable motor 21 and rotating machine 22 are formed, the rotating shaft of movable motor 21 is fixedlyed connected with lower gear 20, rotating machine 22 and workpiece A all are arranged on the sliding panel 16, the rotating shaft of rotating machine 22 18 is fixedlyed connected with cogging through transmission shaft 22-1, interior slide rail 4-2 above the inner of sliding panel 16 and the inner support 4 matches, interior slide rail 4-2 and external slide rail 14 are parallel to each other with the axis of workpiece A, are provided with dynamic sealing device 23 between sliding panel 16 and transmission shaft 22-1 and the vacuum chamber 2.
Embodiment three: consult Fig. 4, Fig. 5, what present embodiment and embodiment one, two were different is, the axial electrode 3-1 of inflector assembly 3 and ground-electrode 3-2 are slab structure, and radial electrode 3-3 is domes.Other composition is identical with embodiment one, two with annexation.
Claims (7)
1, tube type work piece inner surface beam ion implantation installation, it includes ion implanter (1) and vacuum chamber (2), it is characterized in that it also includes the inflector assembly (3) that an ionic fluid that ion implanter (1) is sent deflects in the endoporus of the workpiece A of socket shape, inflector assembly (3) is arranged in the endoporus of workpiece A, inflector assembly (3) includes axial electrode (3-1) and the ground-electrode (3-2) that produces with ionic fluid heading opposite electric field, and be arranged on radial electrode (3-3) between axial electrode (3-1) and the ground-electrode (3-2), axial electrode (3-1) and ground-electrode (3-2) are perpendicular with the axis of workpiece A, have a hole (3-4) that makes ionic fluid directive axial electrode (3-1) on ground-electrode (3-2), radial electrode (3-3) is parallel to each other with the axis of workpiece A.
2, tube type work piece inner surface beam ion implantation installation according to claim 1 is characterized in that radial electrode (3-3), axial electrode (3-1) and ground-electrode (3-2) are fixedly connected on the isolator (3-5).
3, tube type work piece inner surface beam ion implantation installation according to claim 1 and 2, it is characterized in that inflector assembly (3) is fixedly connected on the end of wall suspending axis (5), also be connected with annular supporter (6) on cantilever shafts (5), the neighboring of supporter (6) and the endoporus of workpiece A form and are slidingly matched.
4, tube type work piece inner surface beam ion implantation installation according to claim 3, it is characterized in that also being provided with and make the deflection transmission mechanism of inflector assembly along workpiece A axis translation and rotation in the outside of vacuum chamber (2), this device is by the support that has guide rail (8) (7), the slide plate (9) that matches with guide rail (8), movable motor (10), rotating machine (11), and pitch wheel (12) and tooth bar (13) composition, movable motor (10) and rotating machine (11) all are fixed on the slide plate (9), the rotating shaft of rotating machine (11) is connected with cantilever shafts (5), the rotating shaft of movable motor (10) is fixedlyed connected with gear (12), the tooth bar (13) that be arranged in parallel with guide rail (8) is fixedly connected on the support (7), and guide rail (8) parallels with the axis of workpiece A.
5, tube type work piece inner surface beam ion implantation installation according to claim 3, the outer end that it is characterized in that cantilever shafts (5) is fixedly connected on the top anchor (4-1) of inner support (4), this device also includes makes the transmission mechanism of workpiece A along rotation of self axis and translation, it is by the outer support that has external slide rail (14) (15), the sliding panel (16) that matches with external slide rail (14), the external toothing (17) that is fastenedly connected with workpiece A, cog (18) with external toothing (17) engagement, the lower gear (20) of tooth bar (19) engagement below sliding panel (16), movable motor (21) and rotating machine (22) are formed, the rotating shaft of movable motor (21) is fixedlyed connected with lower gear (20), rotating machine (22) and workpiece A all are arranged on the sliding panel (16), the rotating shaft of rotating machine (22) is fixedlyed connected with cog (18) through transmission shaft (22-1), interior slide rail (4-2) above the inner of sliding panel (16) and the inner support (4) matches, and the axis of interior slide rail (4-2) and external slide rail (14) and workpiece A is parallel to each other.
6, tube type work piece inner surface beam ion implantation installation according to claim 1 and 2 is characterized in that radial electrode (3-3), axial electrode (3-1) and ground-electrode (3-2) are slab structure.
7, tube type work piece inner surface beam ion implantation installation according to claim 1 and 2 is characterized in that axial electrode (3-1) and ground-electrode (3-2) are slab structure, and radial electrode (3-3) is domes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB021331022A CN1180124C (en) | 2002-09-30 | 2002-09-30 | Tube type work piece inner surface beam ion implantation installation |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB021331022A CN1180124C (en) | 2002-09-30 | 2002-09-30 | Tube type work piece inner surface beam ion implantation installation |
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| Publication Number | Publication Date |
|---|---|
| CN1414136A true CN1414136A (en) | 2003-04-30 |
| CN1180124C CN1180124C (en) | 2004-12-15 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB021331022A Expired - Fee Related CN1180124C (en) | 2002-09-30 | 2002-09-30 | Tube type work piece inner surface beam ion implantation installation |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2004079040A1 (en) * | 2003-03-04 | 2004-09-16 | Institute Of Physics, Chinese Academy Of Sciences | A method and special apparatus for modifying the internal surface of tubular workpiece |
| CN100368590C (en) * | 2003-12-26 | 2008-02-13 | 中国科学院物理研究所 | Apparatus for inner surface modification by plasma source ion implantation |
| CN101365289B (en) * | 2008-09-28 | 2011-05-11 | 哈尔滨工业大学 | Device and method for injecting ion on inner surface of hollow cathode coupling positive voltage bias voltage tube |
| CN102560403A (en) * | 2010-12-31 | 2012-07-11 | 中央民族大学 | Method for modifying inner surface of bottle-shaped workpiece |
-
2002
- 2002-09-30 CN CNB021331022A patent/CN1180124C/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2004079040A1 (en) * | 2003-03-04 | 2004-09-16 | Institute Of Physics, Chinese Academy Of Sciences | A method and special apparatus for modifying the internal surface of tubular workpiece |
| CN100368590C (en) * | 2003-12-26 | 2008-02-13 | 中国科学院物理研究所 | Apparatus for inner surface modification by plasma source ion implantation |
| CN101365289B (en) * | 2008-09-28 | 2011-05-11 | 哈尔滨工业大学 | Device and method for injecting ion on inner surface of hollow cathode coupling positive voltage bias voltage tube |
| CN102560403A (en) * | 2010-12-31 | 2012-07-11 | 中央民族大学 | Method for modifying inner surface of bottle-shaped workpiece |
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| Publication number | Publication date |
|---|---|
| CN1180124C (en) | 2004-12-15 |
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