CN1403850A - Two-dimensional precise angle trimmer for the second crystal of double-crystal monochromator - Google Patents
Two-dimensional precise angle trimmer for the second crystal of double-crystal monochromator Download PDFInfo
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- CN1403850A CN1403850A CN 02137613 CN02137613A CN1403850A CN 1403850 A CN1403850 A CN 1403850A CN 02137613 CN02137613 CN 02137613 CN 02137613 A CN02137613 A CN 02137613A CN 1403850 A CN1403850 A CN 1403850A
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Abstract
The two-dimensional precise angle timer for the second crystal of double crystal monochromator belongs to regulating mechanism. The upper support board is connected first to the positioning board and then to the frame, one linear stepped motor with coder is positioned via the head screws to the upper support board, one other linear stepped motor with coder is fixed to the middle support board via one tensile spring assembly and the head screws, the middle support board and the lower support board are connected via two flexible hinge assemblies, the second crystal is mounted onto the regulating board via one other tensils spring assembly, and the two crystal holding boards are connected to the lower support board.
Description
Technical field
What the present invention relates to is a kind of precise angle micromatic setting, and particularly a kind of 2 dimension angle vernier devices that are used for double-crystal monochromator second crystal belong to mechanical field.
Background technology
At present, the regulating device that the method for trimming of double-crystal monochromator second crystal that uses in the synchrotron radiation light beam line mainly adopts stepper motor, worm drive, elasticity screw, the supporting of 3 sphere double-screw bolts etc. to form, the part number that this control method adopts is more, structure is complicated, and precision is lower, fine setting sensitivity is low.In recent years, flexible hinge has obtained widespread use in miniature precision optical machinery, it has and does not have machinery friction, non-lubricating advantage, this is extremely important for the parts of working under high vacuum environment as double-crystal monochromator, the present invention ties up a kind of special flexible hinge component application in the angle vernier devices at 2 of double-crystal monochromator second crystal, not only significantly reduced number of spare parts, simplified apparatus structure, and degree of regulation and sensitivity are greatly improved.Find according to the further retrieval to prior art: application number is 99107784.9, name is called: " miniature monoblock precisive plane moving mechanism and device thereof ", this patented claim discloses a kind of miniature monoblock precisive plane moving mechanism and device thereof, comprise motion table top, flexible hinge leverage, clamping piece and fixed base plate, the flexible hinge leverage is formed by connecting by flexible hinge by piezoelectric actuated piece, center connector, four support lever, four frame levers and four frame connectors.This mechanism is fit to little feeding location of point-to-point.Symmetrical structure helps guaranteeing that mechanism is along X, Y-axis travel direction.Simple and compact for structurely be easy to microminaturization, can be used for XY θ ultra precise workbench and microminiature translation robot.But 2 dimensions that this patent is mainly used in the realization table plane move and 1 dimension rotation, can not realize the rotations fine setting of 2 dimension angles, so it can not satisfy the job requirement of double-crystal monochromator second crystal.
Summary of the invention
The objective of the invention is at deficiency of the prior art, a kind of 2 dimensional precise angle micromatic settings of double-crystal monochromator second crystal are provided.Make it when being used for the fine setting of double-crystal monochromator second crystal, 2 rotational angles of double-crystal monochromator second crystal are (around the throwing angle that X-axis is rotated, the angle of rolling around the Y-axis rotation) obtains minute adjustment, and not only can be used for the adjusting of double-crystal monochromator second crystal in the synchrotron radiation light beam line, also can be applied on other exact instrument or equipment that need 2 dimension angles fine settings.The present invention realizes according to following technical scheme, the present invention mainly comprises: the linear stepping motor of 2 band scramblers, the upper bracket plate, location-plate, adjust screw, frame, mask pattern, the crystal pressing plate, adjust plate, second crystal, 4 cover flexible hinge assemblies, 2 cover extension spring assemblies, the lower carriage plate, the medium-height trestle plate, register pin, crystal side direction pressing plate, its connected mode is: after being connected with screw between upper bracket plate and the location-plate, be connected with screw with frame again, after joining draw-bore, locate with register pin, adjust the screw that screw is positioned at location-plate for 2, locate behind the mounting hole of the head screw rod insertion upper bracket plate of the linear stepping motor of band scrambler, 2 cover flexible hinge assemblies respectively with the upper bracket plate, the medium-height trestle plate connects, the extension spring assembly is passed the upper bracket plate, behind the through hole of medium-height trestle plate, be positioned on the screw rod of both ends, the head screw rod of the linear stepping motor of another band scrambler is inserted behind the mounting hole of medium-height trestle plate fixing, with other 2 cover flexible hinge assemblies respectively with the medium-height trestle plate, the lower carriage plate connects, another extension spring assembly is passed the medium-height trestle plate, behind the through hole of lower carriage plate, be positioned on the screw rod of both ends, with after adjusting plate and being arranged on the bottom land of mask pattern, second crystal of packing into, after pushing down the second crystal crystal face edge, 2 crystal pressing plates are connected with mask pattern, 2 crystal side direction pressing plates are connected with mask pattern after pushing down the side of second crystal, be screwed with 4 and adjust screw on end face on the mask pattern, mask pattern is connected with the lower carriage plate.
The flexible hinge assembly mainly comprises: hinge upper shell, flexible hinge, hinge lower house, flexible hinge adopts high resiliency beryllium-bronze Qbe2 line of material cutting processing to form, lower house then adopts stainless steel 1Cr18Ni9Ti line of material cutting processing to form on the hinge, its connected mode is: be connected 2 group of 4 orthogonal thereto layout of cover flexible hinge assembly on flexible hinge and the hinge between the lower house with sunk screw.
The extension spring assembly mainly comprises: end screw rod, extension spring, its connected mode is that the two ends spring silk of extension spring is tightly around the helicla flute internal fixation of end screw rod, the extension spring assembly is arranged between the linear stepping motor of flexible hinge assembly and band scrambler, the equilibrium activity when playing fine setting.
Among the present invention, give the linear stepping motor energising of 2 band scramblers respectively, motor output shaft is made corresponding straight line and is moved, the output shaft head of these two motors withstands lower carriage plate and medium-height trestle plate respectively, at this moment, 2 extension springs are subjected to pulling force respectively, by adjusting the input pulse of linear stepping motor, make the flexible hinge assembly of two groups of orthogonal thereto layouts do corresponding the rotation respectively around its center, the result can make the workplace (lower surface) of second crystal be in basic horizontal.In the course of the work, often need to adjust two rotational angles of second crystal, promptly roll the angle around throwing angle that X-axis is rotated with around what Y-axis was rotated.When requiring to adjust the throwing angle of second crystal, give the linear stepping motor energising of a band scrambler, and import corresponding pulse by control system, at this moment, one group of corresponding flexible hinge assembly is done corresponding the rotation around its center, thereby each part (comprising second crystal) that drives below this group flexible hinge assembly rotates around X-axis together; When require to adjust second crystal roll the angle time, linear stepping motor energising to another band scrambler, and import corresponding pulse by control system, at this moment, corresponding flexible hinge assembly is done corresponding the rotation around its center, thereby each part (comprising second crystal) that drives below this group flexible hinge assembly rotates around Y-axis together.So, this cover micromatic setting just can be finished 2 dimension angular setting of double-crystal monochromator second crystal.In addition, in installation process, by the set screw on the positioning of rotating plate, micromatic setting (except that frame) is moved up and down, guiding realizes by the relative slip between register pin and the location-plate, when second crystal meets design requirement with respect to the vertical interval of first crystal, location-plate is tightened in the screw of frame with 2 screws.
The present invention has substantive distinguishing features and marked improvement, 4 cover flexible hinges of 2 groups of orthogonal thereto layouts that the present invention is used can be regulated 2 dimension angles of double-crystal monochromator second crystal (promptly around throwing angle that X-axis is rotated, the angle of rolling around the Y-axis rotation), flexible hinge has and does not have the machinery friction, need not to lubricate, the precision advantages of higher, be highly suitable for the exact instrument or the device of work under the high vacuum state, and adopt the linear stepping motor of band scrambler to drive when regulating, can realize long-range accurate controllable adjustment, in addition by location-plate is set, register pin, adjust screw, when 2 crystal of double-crystal monochromator are installed, can guarantee that 2 vertical intervals between the crystal meet design requirement.
Description of drawings
Fig. 1 structure forward of the present invention synoptic diagram
Fig. 2 structure side schematic view of the present invention
Fig. 3 flexible hinge modular construction of the present invention synoptic diagram
Fig. 4 extension spring modular construction of the present invention synoptic diagram
Embodiment
As Fig. 1, Fig. 2, Fig. 3 and shown in Figure 4, the present invention mainly comprises: the linear stepping motor 1 of 2 band scramblers, upper bracket plate 2, location-plate 3, adjust screw 4,16, frame 5, mask pattern 6, crystal pressing plate 7, adjust plate 8, second crystal 9,4 cover flexible hinge assemblies 10,2 cover extension spring assemblies 11, lower carriage plate 12, medium-height trestle plate 13, register pin 14, crystal side direction pressing plate 15, its connected mode is: after being connected with screw between upper bracket plate 2 and the location-plate 3, be connected with frame 5 usefulness screws again, after joining draw-bore, with register pin 14 location, adjust the screw that screw 4 is positioned at location-plate 3 for 2, after the head screw rod of the linear stepping motor 1 of band scrambler inserts the mounting hole of upper bracket plate 2, with pad and nut screwing clamping, 2 cover flexible hinge assemblies 10 respectively with upper bracket plate 2, medium-height trestle plate 13 usefulness screws connect, extension spring assembly 11 passes upper bracket plate 2, behind the through hole of medium-height trestle plate 13, suitably be tightened on the both ends screw rod of stretching spring assembly 11 with pad and nut, after the head screw rod of the linear stepping motor 1 of another band scrambler inserts the mounting hole of medium-height trestle plate 13, with pad and nut screwing clamping, in addition 2 cover flexible hinge assemblies 10 respectively with medium-height trestle plate 13, lower carriage plate 12 usefulness screws connect, another extension spring assembly 11 passes medium-height trestle plate 13, behind the through hole of lower carriage plate 12, suitably be tightened on the both ends screw rod of stretching spring assembly 11 with pad and nut, after adjustment plate 8 is arranged on the bottom land of mask pattern 6, second crystal 9 of packing into, 2 crystal pressing plates 7 are connected with mask pattern 6 usefulness screws after pushing down second crystal, 9 crystal face edges, 2 crystal side direction pressing plates 15 are connected with mask pattern 6 usefulness screws after pushing down the side of second crystal 9, on end face on the mask pattern 6, be screwed with 4 and adjust screws 16, be connected with screw between mask pattern 6 and the lower carriage plate 12.
2 group of 4 cover flexible hinge assembly 10 orthogonal thereto layout.
The fine setting of second crystal 2 rotational angle is that the linear stepping motor 1 by 2 band scramblers drives respectively, and keeps balance by 2 groups of extension springs 21.
By the set screw on the positioning of rotating plate 34, except that frame 5, micromatic setting moves up and down, by the relative slide-and-guide between register pin 14 and the location-plate 3.
Claims (6)
1, a kind of 2 dimensional precise angle micromatic settings of double-crystal monochromator second crystal, mainly comprise: the linear stepping motor of 2 band scramblers (1), upper bracket plate (2), location-plate (3), adjust screw (4) and (16), frame (5), mask pattern (6), crystal pressing plate (7), adjust plate (8), 4 cover flexible hinge assemblies (10), 2 cover extension spring assemblies (11), lower carriage plate (12), medium-height trestle plate (13), register pin (14), crystal side direction pressing plate (15), it is characterized in that connected mode is: upper bracket plate (2) is with after location-plate (3) is connected, be connected with frame (5) again, after joining draw-bore, locate with register pin (14), adjust the screw that screw (4) is positioned at location-plate (3) for 2, locate behind the mounting hole of the head screw rod insertion upper bracket plate (2) of the linear stepping motor (1) of band scrambler, 2 the cover flexible hinge assemblies (10) respectively with upper bracket plate (2), medium-height trestle plate (13) connects, extension spring assembly (11) passes upper bracket plate (2), behind the through hole of medium-height trestle plate (13), be positioned on the screw rod of both ends, locate behind the mounting hole of the head screw rod insertion medium-height trestle plate (13) of the linear stepping motor (1) of another band scrambler, in addition 2 cover flexible hinge assemblies (10) respectively with medium-height trestle plate (13), lower carriage plate (12) is fixing, another extension spring assembly (11) passes medium-height trestle plate (13), behind the through hole of lower carriage plate (12), be positioned on the screw rod of both ends, after adjustment plate (8) is arranged on the bottom land of mask pattern (6), second crystal (9) of packing into, 2 crystal pressing plates (7) are connected with mask pattern (6) after pushing down second crystal (9) crystal face edge, 2 crystal side direction pressing plates (15) are connected with mask pattern (6) after pushing down the side of second crystal (9), on the last end face of mask pattern (6), be screwed with 4 and adjust screw (4), (16), mask pattern (6) is connected with lower carriage plate (12).
2,2 dimensional precise angle micromatic settings of this double-crystal monochromator second crystal according to claim 1, its feature also is: flexible hinge assembly (10) mainly comprises: hinge upper shell (17), flexible hinge (18), hinge lower house (19), its connected mode is: lower house (17), (19) are connected with screw on flexible hinge (18) and the hinge.
3,2 dimensional precise angle micromatic settings of this double-crystal monochromator second crystal according to claim 1, its feature also is: extension spring assembly (11) mainly comprises: end screw rod (20), (22), extension spring (21), its connected mode is: the two ends spring silk of extension spring (21) is tightly fixed around the interior spot welding of the helicla flute of end screw rod (20), (22), and extension spring assembly (11) is arranged between the linear stepping motor (1) of flexible hinge assembly (10) and band scrambler.
4,2 dimensional precise angle micromatic settings of this double-crystal monochromator second crystal according to claim 1, its feature also is: 2 group of 4 orthogonal thereto layout of cover flexible hinge assembly (10).
5,2 dimensional precise angle micromatic settings of this double-crystal monochromator second crystal according to claim 1, its feature also is: the fine setting of second crystal 2 rotational angle is that the linear stepping motor (1) by 2 band scramblers drives respectively, keeps balance by 2 groups of extension springs (21).
6,2 dimensional precise angle micromatic settings of this double-crystal monochromator second crystal according to claim 1, its feature also is: by the set screw (4) on the positioning of rotating plate (3), except that frame (5), micromatic setting moves up and down, by the relative slide-and-guide between register pin (14) and the location-plate (3).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 02137613 CN1403850A (en) | 2002-10-24 | 2002-10-24 | Two-dimensional precise angle trimmer for the second crystal of double-crystal monochromator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 02137613 CN1403850A (en) | 2002-10-24 | 2002-10-24 | Two-dimensional precise angle trimmer for the second crystal of double-crystal monochromator |
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| CN1403850A true CN1403850A (en) | 2003-03-19 |
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| CN 02137613 Pending CN1403850A (en) | 2002-10-24 | 2002-10-24 | Two-dimensional precise angle trimmer for the second crystal of double-crystal monochromator |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1303453C (en) * | 2004-09-16 | 2007-03-07 | 上海交通大学 | Primary crystal driving rotation axis system for synchrotron radiation bicrystal monochromator |
| CN100338689C (en) * | 2004-10-18 | 2007-09-19 | 中国科学院高能物理研究所 | T device and method for synchronous radiation fixed outlet double-crystal monochromator |
| CN103163905A (en) * | 2013-02-06 | 2013-06-19 | 中国科学院西安光学精密机械研究所 | Tangent drive type microsecond-level high-precision angle adjusting mechanism |
| CN104965289A (en) * | 2015-05-27 | 2015-10-07 | 中国科学院长春光学精密机械与物理研究所 | Lens two-dimensional angle accurate adjustment installation mechanism |
| CN105607207A (en) * | 2015-12-30 | 2016-05-25 | 西安工业大学 | Double-crystal monochromator crystal fine tuning mechanism |
| CN105607208A (en) * | 2015-12-30 | 2016-05-25 | 西安工业大学 | Double-crystal monochromator crystal switching mechanism |
| CN107607200A (en) * | 2017-08-07 | 2018-01-19 | 中国科学院高能物理研究所 | A kind of straight drive multichannel monochromator |
| CN110145524A (en) * | 2019-03-08 | 2019-08-20 | 天奇自动化工程股份有限公司 | Accurate adjustment guide-localization pin assemblies |
-
2002
- 2002-10-24 CN CN 02137613 patent/CN1403850A/en active Pending
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1303453C (en) * | 2004-09-16 | 2007-03-07 | 上海交通大学 | Primary crystal driving rotation axis system for synchrotron radiation bicrystal monochromator |
| CN100338689C (en) * | 2004-10-18 | 2007-09-19 | 中国科学院高能物理研究所 | T device and method for synchronous radiation fixed outlet double-crystal monochromator |
| CN103163905A (en) * | 2013-02-06 | 2013-06-19 | 中国科学院西安光学精密机械研究所 | Tangent drive type microsecond-level high-precision angle adjusting mechanism |
| CN103163905B (en) * | 2013-02-06 | 2015-07-15 | 中国科学院西安光学精密机械研究所 | Tangent drive type microsecond-level high-precision angle adjusting mechanism |
| CN104965289A (en) * | 2015-05-27 | 2015-10-07 | 中国科学院长春光学精密机械与物理研究所 | Lens two-dimensional angle accurate adjustment installation mechanism |
| CN105607207A (en) * | 2015-12-30 | 2016-05-25 | 西安工业大学 | Double-crystal monochromator crystal fine tuning mechanism |
| CN105607208A (en) * | 2015-12-30 | 2016-05-25 | 西安工业大学 | Double-crystal monochromator crystal switching mechanism |
| CN107607200A (en) * | 2017-08-07 | 2018-01-19 | 中国科学院高能物理研究所 | A kind of straight drive multichannel monochromator |
| CN107607200B (en) * | 2017-08-07 | 2019-09-20 | 中国科学院高能物理研究所 | A kind of straight drive multichannel monochromator |
| CN110145524A (en) * | 2019-03-08 | 2019-08-20 | 天奇自动化工程股份有限公司 | Accurate adjustment guide-localization pin assemblies |
| CN110145524B (en) * | 2019-03-08 | 2024-03-29 | 天奇自动化工程股份有限公司 | Fine tuning guide positioning pin assembly |
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